CN101282094A - Multi-frequency, broadband, two-way drive device for ultrasonic motor - Google Patents
Multi-frequency, broadband, two-way drive device for ultrasonic motor Download PDFInfo
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- CN101282094A CN101282094A CNA2008100378310A CN200810037831A CN101282094A CN 101282094 A CN101282094 A CN 101282094A CN A2008100378310 A CNA2008100378310 A CN A2008100378310A CN 200810037831 A CN200810037831 A CN 200810037831A CN 101282094 A CN101282094 A CN 101282094A
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Abstract
The invention relates to a multiple frequency, broad band, double way drive device for ultrasound motor, which comprises a signal generating circuit, an optical couple isolation circuit, a compound reaction type amplification circuit and a protection circuit. A six way sine signal is generated by the signal generating circuit, which is transported to the compound reaction type amplification circuit and the protection circuit to perform protection and amplification by filtering and isolating and output two way amplifying signal to supply power to the ultrasound motor terminal. The invention avoids the probloms that the sine signal which is obtained by filtering of the filtering circuit is not stable, the volume miniaturization and the bandwidth of the transformer is limited, and ultrasound motors with different structures need different filtering circuits. The invention can perform modulation for frequence and amplitude on computer conveniently, and be more convenient for frequency sweep requirment of the ultrasound motor.
Description
Technical field
The present invention relates to a kind of drive unit of ultrasound electric machine technical field, specially refer to a kind of multifrequency, broadband, two-way drive device that is used for ultrasound electric machine.
Background technology
Ultrasound electric machine is a kind of inverse piezoelectric effect and ultrasonic vibration that utilizes piezoelectric ceramic, the microdeformation of material is converted to the next-generation drive of rotor (mover) macroscopic motion.Compare with traditional electromagnetic motor, the piezoelectric ceramic piece in the ultrasound electric machine has replaced the copper cash of thousands of circles in the electromagnetic machine, has compact conformation, volume is little, low speed, torque are big, and response is fast, cut off self-lock, the power density big 3-10 of electromagnetic type (be doubly) and be not subjected to electromagnetic interference, advantages such as it is accurate to move, in Aero-Space, robot, medicine equipment, precision instrument, fields such as auto industry have a wide range of applications.Yet ultrasound electric machine has limited the application of ultrasound electric machine in occasions such as the big output torque of needs such as robots because absolute output torque is less.So how to improve the output torque of ultrasound electric machine, be at home, outward the research focus in ultrasound electric machine field always, this also is the basis that enlarges the ultrasound electric machine application.
Find through literature search prior art, " the ultrasonic wave of " U.S. electric and electronic engineering association ", ferroelectric material and FREQUENCY CONTROL journal " on " oscillator size drives for the amplitude modulation of the quad straight ultrasound electric machine of 8mm*2.16mm*1mm " (2006 the 53rd volume the 12nd phase 2435-2441 pages or leaves) of delivering, " utilizing double frequency to drive the performance that improves the quad straight ultrasound electric machine " (the 51st volume the 12nd phase 1600-1606 page or leaf December in 2004), propose to adopt double frequency, amplitude modulation drives, the high order mode of excitation ultrasound motor or the vibration of supporting construction, the power output of raising ultrasound electric machine.Yet signal source is with two signal generators and the direct addition of adder or adopt the single rate amplifier of attacking of square wave drive to realize here.In fact most of ultrasound electric machines are to adopt two-way phase shift 90 degree, and two direct additions of signal source can not guarantee two phase difference between signals, thereby the method for mentioning in the literary composition does not have versatility.
Summary of the invention
The present invention is directed to the deficiency of the driver (driving power) of existing ultrasound electric machine, multifrequency, broadband, a two-way drive device that is used for ultrasound electric machine is provided, this installs than well known device bandwidth, can provide the signal of two-way multi-frequency composition to drive.By design, make its work requirements that satisfies ultrasound electric machine, for important basis is laid in the shake research and development of ultrasound electric machine of multi resonant to drive circuit of ultrasonic motor.This device is wider than known drive unit purposes, and it not only can provide multifrequency to drive to the multi resonant ultrasound electric machine that shakes, and provide single-frequency to drive also can for the ultrasound electric machine of general different structure.
The present invention is achieved through the following technical solutions:
The present invention includes signal generating circuit, optical coupling isolation circuit, compound reaction type power amplification circuit and protective circuit; the signal output part of signal generating circuit is connected to the signal input part of optical coupling isolation circuit, and the signal output part of optical coupling isolation circuit is connected to the signal input part of compound reaction type power amplification circuit.The terminal of compound reaction type power amplification circuit connects corresponding protection circuit.Signal generating circuit is realized the input and output electrical isolation of signal through optical coupling isolation circuit, guarantees that signal generating circuit can not be subjected to the influence of back high voltage circuit and damages.The output signal of optical coupling isolation circuit enters compound reaction type power amplification circuit and carries out power amplification, makes the voltage and current of output signal all meet demand.When signal carries out power amplification, carry out circuit protections such as short circuit, overcurrent by protective circuit, improve the reliability of circuit.
Described signal generating circuit comprises six tunnel sinusoidal signal generation circuit and corresponding filter circuit, and the signal output part of six tunnel sinusoidal signal generation circuit is connected to the signal input part of corresponding filter circuit.Signal is divided into two groups of sinusoidal signal A, B by six tunnel sinusoidal signal generation circuit, and every group of signal all is made up of three tunnel sinusoidal signals, is designated as A1, A2, A3 and B1, B2, B3 respectively.Wherein the initial phase of A1, A2, A3 (B1, B2, B3) is the same, and frequency has nothing in common with each other.And A1 is the same with the frequency of B1 (A2 and B2, A3 and B3).Two groups of signals carry out filtering by corresponding filter circuit respectively, obtain two group of six tunnel purer sinusoidal signal, for the circuit use of back.
Described optical coupling isolation circuit comprises six road voltage follower circuits, two-way add circuit, two-way negater circuit, four road optical coupling isolation circuits, two-way subtraction circuit, the signal output part of six road voltage follower circuits, per 3 outputs constitute one group, totally two groups, be connected respectively to the signal input part of two-way add circuit, the signal output part of two-way add circuit, be connected to the signal input part of two-way negater circuit and the two-way of four road optical coupling isolation circuits respectively simultaneously, the signal output part of negater circuit is connected to the signal input part of remaining two-way optical coupling isolation circuit.Two optical coupling buffer circuits that are connected to the output of add circuit output and respective opposed circuit constitute one group, and the signal output part of each group optical coupling isolation circuit is connected respectively to the signal input part of two-way subtraction circuit.Signal improves the driving force of each road signal by six road voltage follower circuits.Be divided into two groups of signals again and be input in the two-way add circuit and synthesize, can amplify voltage magnitude simultaneously.Signal is after add circuit stack output, and signal is directly imported optical coupling isolation circuit on the one hand, carries out the electrical isolation of the input and output of signal, obtains the isolation signals of sinusoidal positive half cycle signal; Be input to negater circuit on the one hand, carry out anti-phase signal.Signal after anti-phase is input to remaining two-way optical coupling isolation circuit, and the electrical isolation of carrying out input and output obtains the isolation signals of sinusoidal negative half-cycle signal.From four road signals of four road optical coupling isolation circuits output, positive half cycle isolation signals and negative half period isolation signals are formed one group and are input to subtraction circuit like this, signal is carried out subtraction synthesize, and obtain complete sinusoidal signal.Composite signal output is used for the circuit of back.
Described compound reaction type amplifying circuit comprises prefix operation amplifying circuit and back level power amplification circuit, the signal output part of prefix operation amplifying circuit is connected to the signal input part of back level power amplification circuit, composite signal tentatively amplifies by the prefix operation amplifying circuit, and raising driving force, be input to back level power amplification circuit then, signal is carried out power amplification.
Described protective circuit comprises overheating protection circuit, exports over the ground or power supply short-circuit protective circuit; overheating protection circuit is connected the back level power amplification circuit chip in the compound reaction type amplifying circuit, and the signal output part of compound reaction type amplifying circuit is connected to output over the ground or the signal input part of power supply short-circuit protective circuit.Signal carries out current-limiting protection by exporting over the ground or power supply short-circuit protective circuit.Overheating protection circuit carries out overtemperature protection by extraction, processing to back level power amplification circuit temperature signal to circuit.Offering Driven by Ultrasonic Motors after signal is exported by protective circuit uses.
When the present invention worked, signal was exported six tunnel sinusoidal signals by signal generating circuit, and was divided into two groups of sinusoidal signals, and wherein each group all has the signal that three road initial phases are identical, frequency is different; And the frequency content of two groups of signal correspondences is the same.Two group of three road signal is input to filter circuit, and signal is carried out correspondent frequency filtering, can obtain purer sinusoidal signal like this.Filtered signal is input to optical coupling isolation circuit, carries out the electrical isolation of the input and output of signal, and improves the driving force of signal simultaneously, the voltage magnitude of amplifying signal.Signal after the isolation is input to compound reaction type amplifying circuit immediately, carries out power amplification, improves the load capacity of signal; And be input to protective circuit simultaneously, and signal is carried out the protection of corresponding circuit parameter, improve the reliability of circuit.Final output signal provides driving power to ultrasound electric machine.
When the data collecting card of LabVIEW or FPGA export six tunnel sinusoidal signals, because six tunnel sinusoidal signals of output is high-frequency signal, so need carry out analysis filtered to six tunnel sinusoidal signals.Filtered signal demand to drive optical coupling isolation circuit, carries out electrical isolation by the amplification of driving force.Circuit after the isolation carries out first voltage amplification through the prefix operation amplifying circuit again, by back level power amplification circuit amplifying power, is transported to ultrasound electric machine through a series of circuit protection again, and the ultrasound-driven power supply is provided.
Compared with prior art, the present invention directly exports six tunnel sinusoidal signals by data collecting card or the FPGA of LabVIEW, avoided carrying out the circuit problems such as unsteadiness that filtering obtains sinusoidal signal by filter circuit, and the different structure ultrasound electric machine challenge that needs different filter circuits to bring.Because sinusoidal signal is to obtain digital signal by programming, convert through D/A again, can carry out the adjusting of frequency, amplitude on computers easily, the frequency sweep demand of more convenient ultrasound electric machine.Six tunnel sinusoidal signals carry out adopting after filtering is isolated a back level power amplification circuit to amplify, and have avoided the bandwidth constraints of transformer.Output signal voltage height of the present invention, bandwidth, purposes is wider than general driver (driving power), it not only can provide multifrequency to drive to the multi resonant ultrasound electric machine that shakes, for important basis has been laid in the shake research and development of ultrasound electric machine of multi resonant, and can provide single-frequency to drive for the ultrasound electric machine of general different structure.
Description of drawings
Fig. 1 is an embodiment of the invention general structure block diagram;
Fig. 2 is an optical coupling isolation circuit structured flowchart in the embodiment of the invention;
Fig. 3 is compound reaction type amplifying circuit and a protective circuit structured flowchart in the embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1; present embodiment comprises: six tunnel sinusoidal signal generation circuit 1, filter circuit 2, optical coupling isolation circuit 3, compound reaction type amplifying circuit 4, protective circuit 5; the signal output part of six tunnel sinusoidal signal generation circuit 1 is connected to the signal input part of filter circuit 2; the signal input part of filter circuit 2 is connected to the signal output part of optical coupling isolation circuit 3; the signal output part of optical coupling isolation circuit 3 is connected to the signal input part of compound reaction type amplifying circuit 4, and compound reaction type amplifying circuit 4 is connected to the signal input part of ultrasound electric machine by protective circuit 5.
As shown in Figure 2, optical coupling isolation circuit 3 comprises: six road voltage follower circuits 6,7,8,9,10,11, first add circuit 12, first negater circuit 13, first optical coupling isolation circuit 14, first subtraction circuit 15, second optical coupling isolation circuit 16, second add circuit 17, second negater circuit 18, the 3rd optical coupling isolation circuit 19, second subtraction circuit 20, the 4th optical coupling isolation circuit 21, voltage follower circuit 6,7,8 signal output part is connected to the signal input part of first adder 12, and the signal output part of first adder 12 is drawn the signal input part of one road to first negater circuit 13, draw the signal input part of another road to first optical coupling isolation circuit 14 simultaneously, the signal output part of first negater circuit 13 is connected to the signal input part of second optical coupling isolation circuit 16.The signal output part of second optical coupling isolation circuit 16 is connected to first subtraction circuit 15. Voltage follower circuit 9,10,11 is connected to the signal input part of second adder 17, the signal output part of second adder 17 is drawn the signal input part of one road to second negater circuit 18, draw the signal input part of another road to the three optical coupling isolation circuits 19 simultaneously, the signal output part of second negater circuit 18 is connected to the signal input part of the 4th optical coupling isolation circuit 21.The signal output part of the 4th optical coupling isolation circuit 21 is connected to second subtraction circuit 20.
As shown in Figure 3, compound reaction type amplifying circuit 4 comprises prefix operation amplifying circuit 22, power amplification circuit 23.Protective circuit 5 comprises: output over the ground or power supply short-circuit protective circuit 24, overheating protection circuit 25, the signal output part of prefix operation amplifying circuit 22 is connected to the signal input part of power amplification circuit 23.The signal output part of power amplification circuit 23 is connected to output over the ground or the signal input part of power supply short-circuit protective circuit 24.Overheating protection circuit 25 is connected to power amplification circuit 23.
Six tunnel sinusoidal signal generation circuit 1 produce six tunnel sinusoidal signals, are divided into two groups of sinusoidal signal A, B, and every group of signal all is made up of three tunnel sinusoidal signals, is designated as A1, A2, A3 and B1, B2, B3 respectively.Wherein the initial phase of A1, A2, A3 (B1, B2, B3) is the same, and frequency has nothing in common with each other.And A1 is the same with the frequency of B1 (A2 and B2, A3 and B3).This signal is input to filter circuit 2, carries out the filtering of corresponding frequencies.Filtered six tunnel sinusoidal signals through six road voltage follower circuits 6,7,8,9,10,11, can improve driving force respectively.Signal is divided into corresponding two groups of A, B by first add circuit 12, second add circuit 17, and each group all comprises corresponding three road signals, A1, A2, A3 and B1, B2, B3.A group signal by the output of first add circuit, 12 outputs is drawn one road signal, and the electrical isolation through first negater circuit, 13 inputs, first optical coupling isolation circuit 14 carries out input and output obtains one tunnel isolation signals; Draw another road signal simultaneously directly through second optical coupling isolation circuit 16, directly carry out the electrical isolation of input and output, obtain another road isolation signals.The two-way isolation signals is synthesized by first subtraction circuit 15, can obtain one road complete sinusoidal signal like this.Draw one road signal by the group-b signal that second add circuit 17 obtains, the electrical isolation through second negater circuit, 18 inputs the 3rd optical coupling isolation circuit 19 carries out input and output obtains one tunnel isolation signals; Draw another road signal simultaneously directly through the 4th optical coupling isolation circuit 21, directly carry out the electrical isolation of input and output, obtain another road isolation signals.The two-way isolation signals is synthesized by second subtraction circuit 20, obtains the complete sinusoidal signal in another road.Synthetic sinusoidal signal is amplified for the first time through prefix operation amplifying circuit 22, and output signal is carried out power amplification to the signal input part of power amplification circuit 23 to signal.Simultaneously by output over the ground or power supply short-circuit protective circuit 24, overheating protection circuit 25 etc. carry out flowing to ultrasound electric machine behind a series of circuit protection, the ultrasound-driven power supply is provided.
The realization of the concrete work of present embodiment comprises following process:
By the data collecting card of LabVIEW or FPGA as six tunnel sinusoidal signal generation circuit 1, export six tunnel sinusoidal signals, wave circuit 2 filtering after filtration, again by voltage follower circuit 6,7,8,9,10,11 and add circuit 12,17 be divided into two groups each three the tunnel, two groups waveform is the square wave or the sine wave of phase difference 90 degree, it is consistent or inconsistent that three tunnel frequency adjustable of each group become, and in the time of the furnishing unanimity, just can be used as general driving power and use; In the time of inconsistent, be the multifrequency driving power.This signal carries out photoelectricity by optical coupling isolation circuit 3 isolates; outputing to compound reaction type amplifying circuit 4 then amplifies; output two-way amplifying signal is powered to the ultrasound electric machine terminal through exporting over the ground or power supply short-circuit protective circuit 24, overheating protection circuit 25 etc.Wherein optical coupling isolation circuit 3 and compound reaction type amplifying circuit 4 are by DC power supply.
As can be seen from the above-described embodiment, data collecting card or FPGA by LabVIEW directly export six tunnel sinusoidal signals, avoided carrying out the circuit problems such as unsteadiness that filtering obtains sinusoidal signal by analog signal generation circuit such as capacitance-resistances, and the different structure ultrasound electric machine challenge that needs different analog signal generation circuit to bring.And can carry out the adjusting of frequency, amplitude on computers easily, the frequency sweep demand of more convenient ultrasound electric machine.Six road signals carry out adopting power amplification circuit to amplify after filtering is isolated, and have avoided the bandwidth of transformer and the restriction of volume miniaturization.This driver (driving power) output signal voltage height, bandwidth, purposes is wider than general driver (driving power), it not only can provide multifrequency to drive to the multi resonant ultrasound electric machine that shakes, for important basis has been laid in the shake research and development of ultrasound electric machine of multi resonant, and can provide single-frequency to drive for the ultrasound electric machine of general different structure.
In practical operation, the adjustment of said apparatus or change, all element or the material of employing can be replaced by element suitable on the function or material, and these all should belong to protection scope of the present invention.
Claims (6)
1; a kind of multifrequency that is used for ultrasound electric machine; the broadband; two-way drive device; it is characterized in that; comprise signal generating circuit; optical coupling isolation circuit; compound reaction type power amplification circuit and protective circuit; wherein: the signal output part of signal generating circuit is connected to the signal input part of optical coupling isolation circuit; the signal output part of optical coupling isolation circuit is connected to the signal input part of compound reaction type power amplification circuit; the terminal of compound reaction type power amplification circuit connects corresponding protection circuit; described signal generating circuit is realized the input and output electrical isolation of signal through optical coupling isolation circuit; guarantee signal generating circuit can not be subjected to the influence of back high voltage circuit and damage; the output signal of optical coupling isolation circuit enters compound reaction type power amplification circuit and carries out power amplification; make the voltage and current of output signal all meet demand; when signal carries out power amplification, carry out short circuit by protective circuit; overcurrent protection.
2, the multifrequency that is used for ultrasound electric machine according to claim 1, the broadband, two-way drive device, it is characterized in that, described signal generating circuit comprises six tunnel sinusoidal signal generation circuit and corresponding filter circuit, the signal output part of six tunnel sinusoidal signal generation circuit is connected to the signal input part of corresponding filter circuit, signal is by six tunnel sinusoidal signal generation circuit, be divided into two groups of sinusoidal signals, it is identical that each group all has three road initial phases, the signal that frequency is different, and the frequency content of two groups of signal correspondences is the same, two groups of signals carry out filtering by corresponding filter circuit respectively, obtain two group of six tunnel purer sinusoidal signal, for the circuit use of back.
3, multifrequency, broadband, the two-way drive device that is used for ultrasound electric machine according to claim 2 is characterized in that, described six tunnel sinusoidal signal generation circuit are data collecting card or the FPGA of LabVIEW.
4, the multifrequency that is used for ultrasound electric machine according to claim 1, the broadband, two-way drive device, it is characterized in that, described optical coupling isolation circuit comprises six road voltage follower circuits, the two-way add circuit, the two-way negater circuit, four road optical coupling isolation circuits, the two-way subtraction circuit, the signal output part of six road voltage follower circuits, per 3 outputs constitute one group, totally two groups, be connected respectively to the signal input part of two-way add circuit, the signal output part of two-way add circuit, be connected to the signal input part of two-way negater circuit and the two-way of four road optical coupling isolation circuits respectively simultaneously, the signal output part of negater circuit is connected to the signal input part of remaining two-way optical coupling isolation circuit; Two optical coupling buffer circuits that are connected to the output of add circuit output and respective opposed circuit constitute one group, the signal output part of each group optical coupling isolation circuit, be connected respectively to the signal input part of two-way subtraction circuit, signal is by six road voltage follower circuits, improve the driving force of each road signal, being divided into two groups of signals again is input in the two-way add circuit and synthesizes, amplify voltage magnitude simultaneously, signal is after add circuit stack output, directly import optical coupling isolation circuit on the one hand, carry out the electrical isolation of the input and output of signal, obtain the isolation signals of sinusoidal positive half cycle signal, be input to negater circuit on the other hand, carry out anti-phase to signal, signal after anti-phase is input to remaining two-way optical coupling isolation circuit, carry out the electrical isolation of input and output, obtain the isolation signals of sinusoidal negative half-cycle signal, like this from four road signals of four road optical coupling isolation circuits output, positive half cycle isolation signals and negative half period isolation signals are formed one group and are input to subtraction circuit, signal is carried out subtraction to be synthesized, obtain complete sinusoidal signal, composite signal output is used for the circuit of back.
5, multifrequency, broadband, the two-way drive device that is used for ultrasound electric machine according to claim 1, it is characterized in that, described compound reaction type amplifying circuit comprises prefix operation amplifying circuit and back level power amplification circuit, the signal output part of prefix operation amplifying circuit is connected to the signal input part of back level power amplification circuit, composite signal tentatively amplifies by the prefix operation amplifying circuit, and the raising driving force, be input to back level power amplification circuit then, signal is carried out power amplification.
6; the multifrequency that is used for ultrasound electric machine according to claim 1; the broadband; two-way drive device; it is characterized in that; described protective circuit comprises overheating protection circuit; output over the ground or power supply short-circuit protective circuit; overheating protection circuit is connected the back level power amplification circuit chip in the compound reaction type amplifying circuit; the signal output part of compound reaction type amplifying circuit is connected to output over the ground or the signal input part of power supply short-circuit protective circuit; signal is by exporting over the ground or power supply short-circuit protective circuit; carry out current-limiting protection; overheating protection circuit is by the extraction to back level power amplification circuit temperature signal; handle; circuit is carried out overtemperature protection, offer Driven by Ultrasonic Motors after signal is exported by protective circuit and use.
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| CN2008100378310A CN101282094B (en) | 2008-05-22 | 2008-05-22 | Multi-frequency, broadband, two-way drive device for ultrasonic motor |
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| CN2008100378310A CN101282094B (en) | 2008-05-22 | 2008-05-22 | Multi-frequency, broadband, two-way drive device for ultrasonic motor |
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| CN101282094A true CN101282094A (en) | 2008-10-08 |
| CN101282094B CN101282094B (en) | 2011-08-31 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103023342A (en) * | 2011-09-28 | 2013-04-03 | 南京丹迪克科技开发有限公司 | High-stabilized power source suitable for electromagnetic compatibility test |
| CN103427707A (en) * | 2013-07-15 | 2013-12-04 | 南京航空航天大学 | Ultrasonic motor driver |
| CN104314379A (en) * | 2014-08-26 | 2015-01-28 | 北京精密机电控制设备研究所 | Unlocking control circuit for locking mechanism |
| CN104345203A (en) * | 2013-07-31 | 2015-02-11 | 施耐德电器工业公司 | Correction of the bandwidth of an air gap transformer |
| CN106655881A (en) * | 2016-12-28 | 2017-05-10 | 河南师范大学 | Multi-frequency driving method for piezoelectric motor |
-
2008
- 2008-05-22 CN CN2008100378310A patent/CN101282094B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103023342A (en) * | 2011-09-28 | 2013-04-03 | 南京丹迪克科技开发有限公司 | High-stabilized power source suitable for electromagnetic compatibility test |
| CN103023342B (en) * | 2011-09-28 | 2016-02-03 | 南京丹迪克科技开发有限公司 | A kind of high stable power supply being applicable to EMC test |
| CN103427707A (en) * | 2013-07-15 | 2013-12-04 | 南京航空航天大学 | Ultrasonic motor driver |
| CN104345203A (en) * | 2013-07-31 | 2015-02-11 | 施耐德电器工业公司 | Correction of the bandwidth of an air gap transformer |
| CN104314379A (en) * | 2014-08-26 | 2015-01-28 | 北京精密机电控制设备研究所 | Unlocking control circuit for locking mechanism |
| CN106655881A (en) * | 2016-12-28 | 2017-05-10 | 河南师范大学 | Multi-frequency driving method for piezoelectric motor |
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