CN101272109A - Broad-band piezoelectricity oscillating generating set - Google Patents

Broad-band piezoelectricity oscillating generating set Download PDF

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Publication number
CN101272109A
CN101272109A CNA2008101060466A CN200810106046A CN101272109A CN 101272109 A CN101272109 A CN 101272109A CN A2008101060466 A CNA2008101060466 A CN A2008101060466A CN 200810106046 A CN200810106046 A CN 200810106046A CN 101272109 A CN101272109 A CN 101272109A
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CN
China
Prior art keywords
cantilever
conversion
piezoelectric
electrode
piezoelectric energy
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CNA2008101060466A
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Chinese (zh)
Inventor
姜楠
刘俊标
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中国科学院电工研究所
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Priority to CNA2008101060466A priority Critical patent/CN101272109A/en
Publication of CN101272109A publication Critical patent/CN101272109A/en

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Abstract

The invention relates to a board band piezoelectric generating set. A plurality of socle beams L1, L2, L3 are divided into two groups; one end of each socle beam is fixed and the other end keeps free; the socle beams keep parallel with each other; a crossing section is arranged between the two groups of the socle beams; wherein, the socle beam consists of piezoelectric transduction elements (34, 36), a down-lead (31), a metal block (32) and electrodes (33, 35, 37). The electrodes and the transduction elements are alternately arranged; the down-lead (31) is arranged at the fixed end of the socle beam; the metal block (32) is arranged at the free end of the socle beam. The sizes and the structures of the socle beams L1, L2, L3 are different, the manufacture materials of the piezoelectric transduction elements are different and the qualities of the metal blocks are different, therefore, the resonance frequency of each beam is different. The two groups of the socle beams L1, L2, L3 are arranged in an interdigital structure in plane or an interdigital structure in space. The board band piezoelectric generating set can absorb the mechanical vibration or noise of a plurality of frequency components in the environment and realize the transformation from mechanical energy to electricity energy by the piezoelectric transduction elements so as to increase the generating capacity and improve the generating efficiency.

Description

A kind of broadband piezoelectricity oscillating generating set
Technical field
The present invention relates to piezoelectricity oscillating generating set.
Background technology
Fossil energy is in short supply gradually in recent years, and the energy crisis that causes thus begins to influence economic development and people's life gradually.Under the pressure of the pressure of the energy and environmental protection, people have begun to utilize the exploration of new forms of energy gradually, and it is wherein a kind of that vibration ubiquitous in the natural environment is converted into electric energy.Piezoelectric effect (the mechanical energy of piezoelectric Electric energy) may for utilizing the mechanical oscillation generating to provide.
Along with the development of MEMS (micro electro mechanical system) (MEMS) and microelectric technique, the electronic product of various little power consumptions emerges gradually, has objectively promoted the research of little energy (Micro Power is generally in microwatt and milliwatt magnitude).On the other hand, there are many difficulties in regenerative resource microminiaturizations such as wind energy, solar energy, nuclear energy.Therefore, utilize piezoelectric to obtain ambient vibration and realize that generating becomes the people's attention focus recently.
Take a broad view of the piezo-electric generating technology development situation, domestic and international research personnel concentrate on cantilever beam structure with main energy at present, such as WO 2007121092, have described this structure, are made up of metal derby, piezoelectric layer, electrode, piezoelectric board etc., as shown in Figure 1a.This structure only can be operated under a kind of vibration mode, can only be the highest a resonance working point generating efficiency, so energy output is low, shown in Fig. 1 b.In order to obtain greater efficiency, often device size is very big, is unfavorable for integrated with micro-system.Chinese patent CN 2745781 has proposed a kind of suspended structure, constitutes power generating device by piezoelectric pile, spring and metal derby, is used for absorbing the vibrational energy of automobile, but also can only be at a certain frequency.U.S. Pat 6858970 has designed the electrification structure that a kind of MEMS of employing technology is made, but the arrangement mode of cantilever beam is single, does not make full use of the space.U.S. Pat 7057330 has proposed a kind of broadband piezoelectric energy deriving means, adopts a plurality of springs (elasticity original paper) with the mode that metal derby connects mutually extraneous vibration to be converted into electric energy.Though this form can reach the purpose of wideband generating, the complicated integral structure of this device, and system resonance frequency high practicability is not strong.
Summing up above several structures can find, the various piezoelectric vibration power generation system that is seen in report at present concentrates on cantilever beam and two kinds of structures of spring metal piece mostly.Because spring metal block structure size is big, rigidity height, thereby resonance frequency height, ambient vibration belongs to low-frequency vibration more on the other hand, so this structure and impracticable.And single cantilever beam structure can only absorb the extraneous mechanical oscillation of a certain frequency, and generating efficiency is low, and range of application is narrower, is unfavorable for the piezo-electric generating broad application.
Summary of the invention
The objective of the invention is to overcome that present piezoelectric vibration power generation technical work pattern is single, adaptive capacity to environment is poor, be difficult for shortcomings such as microminiaturization, propose a kind of broadband piezoelectric generating device of interdigital structure.The present invention adopts the parallel interdigitation of the cantilever beam of a plurality of different structure parameters to arrange, and has realized that a plurality of vibration modes work simultaneously, and then has enlarged piezo-electric generating The Application of Technology scope, improves adaptive capacity to environment, increases generating efficiency.
The cantilever beam structure that is used for piezo-electric generating at present is three stacked adding of electrode, piezoelectric energy-conversion element, electrode, the piezoelectric energy-conversion element is positioned at the centre position of two-layer electrode up and down, similar sandwich structure, wherein the length of cantilever beam is much larger than width and thickness, one end of cantilever beam is fixed, it is free that the other end keeps, adhesion metal piece on the free end.For overcoming the shortcoming of this single cantilever beam structure, the present invention has designed the form that a plurality of cantilever beam structures are become one, the length of these cantilever beams, width and thickness are different, take the interdigitation arrangement mode, comprise interdigital arrangement in the interdigital arrangement and space in the plane.Plane interdigital structure arrangement mode is that all cantilever beams are divided into two groups, one end unification of every group of cantilever beam is fixed on the support of device both sides, vertical with support, other end freedom, there is cross section between two groups of cantilever beams, promptly two groups of cantilever beam regions are overlapping but do not contact between the Liang Yuliang, can cross arrangement in same plane as ten fingers of people, and this structure can conserve space.Then for two groups of cantilever beams being individually fixed in two planes up and down, there is the overlapping part in space interdigital structure mode between two groups of cantilever beams, promptly there is the space overlap zone in two groups of cantilever beams, but Liang Yuliang does not contact each other.Piezoelectric energy-conversion element in the cantilever beam is laminar, and the length of piezoelectric energy-conversion element is much larger than width and thickness, generally more than ten times.The piezoelectric energy-conversion element can adopt multiple piezoelectric to make, and comprises piezoelectric monocrystal, piezoelectric ceramic, piezoelectric polymer polymer and piezoelectric membrane etc.The polarization mode of piezoelectric energy-conversion element is laterally, and when promptly the piezoelectric energy-conversion element takes place to stretch in the longitudinal direction, its upper and lower surface will produce electric charge.Piezoelectric energy-conversion element in the cantilever beam and electrode between two electrodes, form the electrode-piezoelectric energy-conversion element-electrode structure of two electrodes and a piezoelectric energy-conversion element about the piezoelectric energy-conversion element places all the time alternately; Or three electrodes and two piezoelectric energy-conversion elements, one of them piezoelectric energy-conversion element is between upper surface electrode and target, another piezoelectric energy-conversion element forms electrode-piezoelectric energy-conversion element-electrode-piezoelectric energy-conversion element-electrode structure between target and lower surface electrode; Or form cantilever beam by more a plurality of piezoelectric energy-conversion elements and electrode, but number of electrodes is Duoed one than piezoelectricity inverting element quantity all the time, piezoelectric energy-conversion element and electrode the two alternately, and the piezoelectric energy-conversion element is between two electrodes.The metal derby quality of adhering on each cantilever beam can be different, but metal derby is positioned at the free end of the cantilever beam of electrode and piezoelectric energy-conversion element formation all the time.
Many cantilever beam structures among the present invention can be used Micrometer-Nanometer Processing Technology, as surperficial micro-processing technology and body micro-processing technology processing and fabricating, and integrated with realization and micro-system and micro element.Simultaneously also can use the traditional handicraft method,, be made into the large scale structure, to increase energy output as cutting, bonding, sintering etc.
Because adhesion metal piece quality is different on the size of each cantilever beam and the cantilever beam, therefore the designed device of the present invention has a plurality of resonance working point, can absorb the mechanical oscillation of a plurality of vibration frequencies in the extraneous vibration source, and be converted into electric energy, realize the broadband piezo-electric generating.In addition, the invention has the advantages that and to realize the maximization of generating efficiency in the confined space by a plurality of cantilever beams of interdigitation parallel arranged to make full use of the space.
Description of drawings
Further specify the present invention below in conjunction with the drawings and specific embodiments.
Fig. 1 a is the structural representation of prior art single cantilever beam;
Fig. 1 b is the energy output-frequency curve of structure shown in the corresponding diagram 1a;
Fig. 2 a is the X-Y plane schematic diagram of the many cantilever beam structures of interdigitation in the plane;
Fig. 2 b is the energy output-frequency curve of structure shown in the corresponding diagram 2a;
Fig. 3 is the cantilever beam structure with double-deck piezoelectric energy-conversion element;
Fig. 4 is the tomograph of broadband piezoelectric vibration generating device (plane interdigital structure);
Fig. 5 is that the interdigital structure of many cantilever beams in the space is arranged.
Embodiment
Fig. 1 a has described the structure of prior art single cantilever beam L, single cantilever beam L comprises piezoelectric energy-conversion element 14, lead-in wire 11, metal derby 12, positive electrode 13 and negative electrode 15, piezoelectric energy-conversion element 14 and two electrodes 13 and 15 three's stacked arrangement, piezoelectric energy-conversion element 14 is positioned in the middle of positive electrode 13 and the negative electrode 15, similar sandwich structure.Lead-in wire 11 is in the stiff end of cantilever beam L, is respectively applied for the derivation positive and negative charge, and metal derby 12 is in the free end of cantilever beam L, produces peak swing to make single cantilever beam L when vibrating.Fig. 1 b is the single cantilever beam energy output-frequency curve shown in Fig. 1 a, and transverse axis is represented the frequency of extraneous vibration, and vertical pivot is represented the energy output of cantilever beam.Need to prove that the resonance frequency of cantilever beam is by the quality decision of size (length and width, thick), material and the metal derby 12 of cantilever beam L itself, and is irrelevant with external environment.L is in the vibration environment when this cantilever beam, and cantilever beam will vibrate, and piezoelectric energy-conversion element 14 is converted into electric energy by piezoelectric effect with mechanical oscillation, and 11 electric energy is derived by going between.When the extraneous vibration frequency equals resonance frequency f kThe time, it is maximum that the amplitude of cantilever beam L reaches, and the distortion of piezoelectric energy-conversion element 14 is also maximum, sends maximum electric weight V this moment.
Fig. 2 a has L for the X-Y plane schematic diagram of the many cantilever beam structures of interdigitation in the plane of the present invention in this structure 1, L 2, L 3Etc. a plurality of cantilever beams, therefore these cantilever beam sizes, structure, piezoelectric energy-conversion element material, metal derby quality difference have different resonance frequencys respectively.This device is positioned in a certain complex vibration environment with a plurality of frequencies, and the vibration in the environment produces resonance with a plurality of cantilever beams in the inducing device, and the piezoelectric energy-conversion element then is converted into electric energy by piezoelectric effect with mechanical oscillation.Fig. 2 b is the energy output-frequency curve of structure shown in the corresponding diagram 2a, and transverse axis is represented the frequency of extraneous vibration, and vertical pivot is represented the energy output of cantilever beam.f K1, f K2, f K3Be the cantilever beam L among the difference corresponding diagram 2a 1, L 2, L 3Resonance frequency, when external environment has f K1, f K2, f K3During the equifrequent component, shown in Fig. 2 a in the structure all beams all be in resonance condition, this moment gross generation be V=V 1+ V 2+ V 3+ ...
Figure 3 shows that cantilever beam structure, comprise 2 piezoelectric energy-conversion elements 34 and 36, upper surface electrode 33, target 35, lower surface electrode 37, metal derby 32, lead-in wire 31 with two piezoelectric energy-conversion elements.Wherein electrode and piezoelectric energy-conversion element are alternately, three electrodes 33,34 and 35 lay respectively at the upper and lower surface and the centre position of this cantilever beam, piezoelectric energy-conversion element 34 is between upper surface electrode 33 and target 35, and piezoelectric energy-conversion element 36 is between target 35 and lower surface electrode 37.Lead-in wire 31 is in the stiff end of cantilever beam, and metal derby 32 is in the free end of cantilever beam.
Fig. 4 is the tomograph of corresponding shown in Figure 2 many cantilever beam structures of plane interdigitation, comprises extraneous vibration source 41, crust of the device 42, the support 43 of cantilever mounted girder construction, and the cantilever beam L in this Blast Furnace Top Gas Recovery Turbine Unit (TRT) 1, L 2, L 3All cantilever beam L1, L2, L3 ... be divided into two groups, one end of every group of cantilever beam all is fixed on the support 43 of device both sides, it is free that the other end keeps, keeping parallelism between plane internal cantilever beam and the cantilever beam, there is cross section between two groups of cantilever beams, promptly two groups of cantilever beam regions are overlapping but do not contact between the Liang Yuliang, form the shape that ten fingers of similar people cross one another and arrange.Under the excitation of extraneous vibration source, a plurality of cantilever beam generation resonance in this structure, corresponding cantilever beam end amplitude maximum, the deformation quantity maximum of piezoelectric energy-conversion element, therefore the quantity of electric charge that occurs on the electrode of inverting element upper and lower sides is maximum, generating efficiency is the highest, and these electric charges are exported to energy-storage travelling wave tube by lead-in wire, finishes power generation process.In above-mentioned power generation process, this device has absorbed the oscillating component of extraneous a plurality of frequencies, has realized the broadband piezoelectric vibration power generation.
Fig. 5 is the interdigitation arrangement architecture of a plurality of cantilever beams in the space, comprises support 51, interdigital arrangement 52, goes up plane 53, lower plane 54, cantilever beam 55 and metal derby 56.The quantity of cantilever beam can be determined according to space size and vibration source situation, all cantilever beams are divided into 2 groups, quantity is basic identical, one end of every group of cantilever beam is fixed in the last plane 53 and the lower plane 54 of device, other end freedom, metal derby 56 all is attached to free end, has overlapping region between two groups of cantilever beams, promptly there is the space overlap zone in two groups of cantilever beams, but Liang Yuliang does not contact each other.The position of piezoelectric energy-conversion element and electrode and arrangement mode and Fig. 1 or structure shown in Figure 3 are identical.This structure helps effectively absorbing vibration in the confined space, helps carrying out integrated with other devices.Interdigital structure in operation principle and the plane is similar.
In sum, the generation mode work frequency domain of the visible many cantilever beam structures of interdigitation of the present invention is wide, but the mechanical oscillation component of a plurality of frequencies in the absorbing environmental, and the more single cantilever beam structure of energy output obviously increases, and has strengthened the practicality of piezo-electric generating technology greatly.
The present invention can be widely used in the field that structural health control, intellectual weapon equipment of open-air communication and sensing network equipment, environment and climate watch control, building (bridge, building etc.) and big machinery (aircraft, steamer etc.) etc. needs energy autonomy.

Claims (3)

1, a kind of broadband piezoelectric generating device comprises extraneous vibration source (41), crust of the device (42), the support of cantilever mounted girder construction (43), cantilever beam L, piezoelectric energy-conversion element (14), lead-in wire (11), metal derby (12) and electrode (13,15); Piezoelectric energy-conversion element and electrode are formed cantilever beam L, electrode and piezoelectric energy-conversion element alternately, lead-in wire (11) is in the stiff end of cantilever beam L, metal derby (12) is in the free end of cantilever beam L, it is characterized in that: a plurality of cantilever beam L 1, L 2, L 3Be divided into two groups, an end of every group of cantilever beam is fixed, and it is free that the other end keeps, and there is cross section in keeping parallelism between cantilever beam and the cantilever beam between two groups of cantilever beams; Cantilever beam L 1, L 2, L 3Be of different sizes and structure the manufacturing materials difference of piezoelectric energy-conversion element, the quality difference of the metal derby that adheres on it.
2, broadband piezoelectric generating device as claimed in claim 1 is characterized in that: two groups of cantilever beam L 1, L 2, L 3An end be fixed on the support (43) of device both sides, be in the plane interdigital structure and arrange, or be fixed in the last plane (53) and the lower plane (54) of device, be interdigital structure arrangement in the space.
3, broadband piezoelectric generating device as claimed in claim 1 or 2 is characterized in that: between two electrodes (13,15), form electrode-piezoelectric energy-conversion element-electrode structure about piezoelectric energy-conversion element (14) places; Or: three electrodes (33,35,37) and two piezoelectric energy-conversion elements (34,36), piezoelectric energy-conversion element (34) is positioned between upper surface electrode (33) and the target (35), piezoelectric energy-conversion element (36) is positioned between target (35) and the lower surface electrode (37), forms electrode-piezoelectric energy-conversion element-electrode-piezoelectric energy-conversion element-electrode structure; Or form cantilever beam by more a plurality of piezoelectric energy-conversion elements and electrode, number of electrodes is Duoed one than piezoelectricity inverting element quantity, piezoelectric energy-conversion element and electrode the two alternately, and the piezoelectric energy-conversion element is between two electrodes.
CNA2008101060466A 2008-05-07 2008-05-07 Broad-band piezoelectricity oscillating generating set CN101272109A (en)

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Cited By (15)

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CN102148587A (en) * 2010-02-05 2011-08-10 边义祥 Combined type piezoelectric generating set
WO2011120258A1 (en) * 2010-03-31 2011-10-06 Hong Kong Applied Science And Technology Research Institute Co., Ltd Non-resonant energy harvesting devices and methods
CN102217184A (en) * 2008-09-29 2011-10-12 马来西亚微电子系统有限公司 A device for maximum detection of vibrating energy for harvesting energy
WO2012065371A1 (en) * 2010-11-18 2012-05-24 中兴通讯股份有限公司 Portable power generating device and intelligent terminal
CN101728974B (en) * 2009-12-31 2012-05-30 华南农业大学 Multilayer beam type piezoelectric generator and power generation method thereof
CN102611351A (en) * 2012-03-23 2012-07-25 东南大学 Piezoelectricity-magnetic electricity mixed energy collection device
CN102664555A (en) * 2010-03-24 2012-09-12 上海交通大学 Multi-frequency-band piezoelectric vibration energy collector
CN102931340A (en) * 2012-11-15 2013-02-13 重庆大学 Wideband micro piezoelectric vibration energy collector and manufacturing method thereof
CN102931878A (en) * 2012-10-26 2013-02-13 北京理工大学 Multi-cantilever broadband MEMS (micro-electromechanical system) piezoelectric energy harvester
CN103227586A (en) * 2013-04-12 2013-07-31 南京航空航天大学 Branch cantilever beam vibration generator and power generation method thereof
EP2670043A1 (en) * 2011-05-09 2013-12-04 Murata Manufacturing Co., Ltd. Piezoelectric power generating apparatus
CN103633879A (en) * 2013-12-13 2014-03-12 太原理工大学 Vibration pick-up structure on basis of flexible main beam for vibration energy harvester
CN103647475A (en) * 2013-12-16 2014-03-19 厦门大学 Wideband piezoelectric vibration energy collecting device
CN104283460A (en) * 2014-10-11 2015-01-14 北京工业大学 High-efficiency multidirectional vibration energy collection device
CN110333445A (en) * 2019-07-25 2019-10-15 山东科技大学 A kind of plane multifrequency pick-up prisoner can experimental provision and its application method

Cited By (25)

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CN102217184B (en) * 2008-09-29 2014-04-02 马来西亚微电子系统有限公司 A device for maximum detection of vibrating energy for harvesting energy
CN102217184A (en) * 2008-09-29 2011-10-12 马来西亚微电子系统有限公司 A device for maximum detection of vibrating energy for harvesting energy
CN101728974B (en) * 2009-12-31 2012-05-30 华南农业大学 Multilayer beam type piezoelectric generator and power generation method thereof
CN102148587A (en) * 2010-02-05 2011-08-10 边义祥 Combined type piezoelectric generating set
CN102664555A (en) * 2010-03-24 2012-09-12 上海交通大学 Multi-frequency-band piezoelectric vibration energy collector
CN102308468A (en) * 2010-03-31 2012-01-04 香港应用科技研究院有限公司 Non-resonant energy harvesting devices and methods
WO2011120258A1 (en) * 2010-03-31 2011-10-06 Hong Kong Applied Science And Technology Research Institute Co., Ltd Non-resonant energy harvesting devices and methods
CN102308468B (en) * 2010-03-31 2012-10-31 香港应用科技研究院有限公司 Non-resonant energy harvesting devices and methods
WO2012065371A1 (en) * 2010-11-18 2012-05-24 中兴通讯股份有限公司 Portable power generating device and intelligent terminal
US9337751B2 (en) 2011-05-09 2016-05-10 Murata Manufacturing Co., Ltd. Piezoelectric power generator
EP2670043A4 (en) * 2011-05-09 2014-09-03 Murata Manufacturing Co Piezoelectric power generating apparatus
CN103493356B (en) * 2011-05-09 2016-02-17 株式会社村田制作所 Piezoelectric generating device
CN103493356A (en) * 2011-05-09 2014-01-01 株式会社村田制作所 Piezoelectric power generating apparatus
EP2670043A1 (en) * 2011-05-09 2013-12-04 Murata Manufacturing Co., Ltd. Piezoelectric power generating apparatus
CN102611351A (en) * 2012-03-23 2012-07-25 东南大学 Piezoelectricity-magnetic electricity mixed energy collection device
CN102931878B (en) * 2012-10-26 2015-01-21 北京理工大学 Multi-cantilever broadband MEMS (micro-electromechanical system) piezoelectric energy harvester
CN102931878A (en) * 2012-10-26 2013-02-13 北京理工大学 Multi-cantilever broadband MEMS (micro-electromechanical system) piezoelectric energy harvester
CN102931340A (en) * 2012-11-15 2013-02-13 重庆大学 Wideband micro piezoelectric vibration energy collector and manufacturing method thereof
CN103227586A (en) * 2013-04-12 2013-07-31 南京航空航天大学 Branch cantilever beam vibration generator and power generation method thereof
CN103633879A (en) * 2013-12-13 2014-03-12 太原理工大学 Vibration pick-up structure on basis of flexible main beam for vibration energy harvester
CN103633879B (en) * 2013-12-13 2016-03-02 太原理工大学 Based on the vibration energy collector vibration pick-up structure of flexible girder
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CN103647475A (en) * 2013-12-16 2014-03-19 厦门大学 Wideband piezoelectric vibration energy collecting device
CN104283460A (en) * 2014-10-11 2015-01-14 北京工业大学 High-efficiency multidirectional vibration energy collection device
CN110333445A (en) * 2019-07-25 2019-10-15 山东科技大学 A kind of plane multifrequency pick-up prisoner can experimental provision and its application method

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