CN101271024A - Synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus - Google Patents
Synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus Download PDFInfo
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- CN101271024A CN101271024A CNA2007100645942A CN200710064594A CN101271024A CN 101271024 A CN101271024 A CN 101271024A CN A2007100645942 A CNA2007100645942 A CN A2007100645942A CN 200710064594 A CN200710064594 A CN 200710064594A CN 101271024 A CN101271024 A CN 101271024A
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Abstract
A synchrotron radiation X-ray multi-layer film integrated polarization measuring device relates to a synchrotron radiation technology and includes a vacuum cavity, a polarization measuring device, a vacuum system and a data obtaining and control system; the measuring device is integrated with a two-dimensional azimuth angle rotating mechanism and a dual double angle composite mechanism, and combined with four working modes, i.e. double-reverse, double-penetrate, front reverse and rear penetrate, and front penetrate and rear reverse. Compared with the prior international synchrotron radiation beam line polarization devices, the polarization device of the invention is characterized in that the four modes are integrated, so as to select different working modes on the same instrument on detecting demand and complete reflection or transmission polarization element testing; the whole device has the advantages of compact structure and convenience in installation and debugging.
Description
Technical field
The present invention relates to the synchrotron radiation technical field, particularly a kind of synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus.
Background technology
Malus had been found the polarisation of light phenomenon in 1808, by further investigation, had proved that light wave is a shear wave, made people further be familiar with the person's character of light.For making full use of the polarisation of light characteristic, arising at the historic moment of various polarization optical elements also promoted the development of polarized light application technology.Polarization characteristic is one of synchrotron radiation light source excellent specific property, utilizes the synchrotron radiation X-ray polarization characteristic to carry out extensive studies in fields such as biology, chemistry, physics, material science and measuring sciences in the world.In recent years, measure different materials (especially magnetic and living matter) has become the research of more and more synchrotron radiation centers to the variation of incident grenz ray intensity of polarization light and polarization state focus.In these researchs, the polarization state of accurately measuring the incident grenz ray seems of crucial importance.And in soft x-ray optics element function measuring process, can't determine that the polarization characteristic of light source will cause the very big deviation of test result.Therefore, study the polarization optics research that grenz ray polarizer and method of testing will be carried out corresponding wave band for China, measurement synchronization radiation polarization characteristic and the application in subjects such as information, electronics, material thereof have important scientific meaning and using value comprehensively.
In order to determine polarization state of light to need two elements fully, one is the polarizer that certain phase shift is arranged, can be two electric vectors of incident light separately; Another is an analyzer, suppresses one-component in the incident light and chooses another linear polarization component and pass through.Incident light is done full polarization analysis, need two optical elements independently to rotate around optical axis respectively and write down light intensity.According to S light and P optical transmission and reflective relation intensity curve is carried out match and determine the polarization of incident light attitude then.
It should be noted that at extreme ultraviolet and grenz ray wave band, the refractive index of any material (real part) levels off to 1, material is strong for the absorption of light, does not have transparency material, thereby operable polarizer can't can be distinguished use at this in other energy ranges.Because the relevant structure of strengthening of multilayer film, the district selects multilayer film as polarizer usually at soft x luminous energy.
The polarising means in the international soft x luminous energy district that has set up has at present: reflective polarizer reflection analyzing (two anti-), and transmission plays inclined to one side transmission analyzing (two), and transmission plays inclined to one side reflection analyzing several structures such as (preceding back are anti-).The polarising means of each type all has advantage and the deficiency of himself.
What Fig. 1 provided is a two contracureent transformation installation drawing.The reflective polarizer reaches its maturity on design and processing technology, can obtain very high reflectivity and good polarization properties; During experiment, use the reflective polarizer can obtain stronger signal, like this, the noise of instrument is less to the influence of experimental result; But in experimentation, need to change the direction of propagation of light, all have certain difficulty when the Installation and Debugging of instrument and experiment.
Two saturating polarising means figure of prior art.It is advantageous that using this device does not change direction of beam propagation, light path is simple relatively.Can provide a kind of by linearly polarized light to circularly polarized light transform mutually easily and effectively by way of, and it is relatively easy to add other application element thereofs.But, can distinguish at soft x, obtain the higher polarizer of transmissivity, on technology, be still waiting further raising, and the relative reflecting element of the polarization property of transmissive element is relatively poor.
Saturating back contracureent transformation installation drawing before the prior art.Adopt the transmission-type polarizer, do not change direction of beam propagation, light path is simple relatively, regulates relatively easy.And transmissive element to cook phase plate more suitable, can provide a kind of by linearly polarized light to circularly polarized light transform mutually easily and effectively by way of.As everyone knows, in the detection for polarized light, the polarization properties of analyzer directly has influence on the precision of detection.Because the polarization properties of reflection type polarization element is better than the transmission-polarizing element, thereby, adopt reflecting element as analyzer, can be better the character of incident light be detected.But the polarization by reflection element changes the direction of propagation of light path, and the difficult point of detection is, needs to regulate the rotating shaft and the optical axis conllinear of measurement mechanism.
Summary of the invention
The present invention considers the deficiency of other polarising means existence in the world, in order to give full play to the advantage of various mode of operations, avoid corresponding unfavorable factor, consider reflective and the characteristics transmission-type polarizer, in order to give full play to the advantage of different polarization element and all kinds of devices, the invention discloses a kind of synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus.
In order to achieve the above object, technical scheme of the present invention is:
A kind of synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus comprises vacuum cavity, polarimetry apparatus main body, vacuum system, data acquisition and control system; Its measurement mechanism adopts bidimensional position angle rotating mechanism and dual two times of angle composite structures to be integrated in one, and is promptly two anti-, two four kinds of mode of operations, and saturating and preceding back, preceding anti-back anti-pattern is comprehensively to same measurement mechanism;
The cylindrical vacuum chamber body has two flange ports forwards, backwards relatively in the footpath, and forward flange is equipped with device for sealing magnetic fluid, the rear flange blind plate sealing; Chamber outer wall and whole whirligig are dynamically connected, and whole whirligig comprises magnetic fluid seal and turbine and worm, and worm screw links to each other with manual turning handle, rotate manual turning handle and promptly drive the ultrahigh vacuum cavity and rotate around incident light axis, and incident light is injected by the forward flange mouth; Centre bottom has a horizonal base plate in the cavity;
The polarimetry apparatus main body is positioned at cavity, is fixed on the horizonal base plate; The polarimetry apparatus main body comprises fine motion collimation platform, and beam detector plays deflection device, servo-actuated rocking arm, specimen holder, Calibrator, main detector; Wherein: right angle " Z " shape fine motion collimation platform bottom surface and horizonal base plate are dynamically connected, and upper mounting plate is as the collimation platform, and lower plane is connected with horizonal base plate, are connected with collimator, beam detector and the polarizer on the fine motion collimation platform and are installed on the horizonal base plate; Servo-actuated rocking arm and the coaxial installation of the rotating shaft of the polarizer; rocking arm is a п shape support; is a through hole in the support planar central; what install on its plane is that the center has a through hole turbine; the analyzing platform is installed above the turbine, and the analyzing platform comprises analyzer and main detector and drive system, and the analyzing platform contains a п shape support; its place, plane is connected with turbine, and there is a through hole at the center, junction; And rocking arm, turbine are identical with the through-hole aperture of analyzing platform, and the center point-blank; The two side arms of the big п shape support of rocking arm is downward, its two ends respectively with the rotating shaft of polarizer hinge joint, hinge joint place is provided with rotating shaft; Play deflection device and comprise the polarizer and drive system, the polarizer is positioned at the rotating shaft middle part, and below through hole, rotating shaft one end is provided with drive system, and drive system and servo-actuated rocking arm are connected; The two side arms of the п shape support on the analyzing platform makes progress, and the two side arms end is provided with rotating shaft, and analyzer is positioned at the rotating shaft middle part, and above through hole, rotating shaft one end has a г shape detector carriage, and support the inner is connected with main detector; The through hole below is installed with specimen holder, and specimen holder is by the rotating shaft and the hinge joint of sample support frame of both sides, and specimen holder is provided with drive system between the polarizer and analyzer;
Collimator, beam detector, the polarizer, specimen holder, analyzer, main detector series arrangement on optical path of incident light;
Bidimensional position angle rotating mechanism: comprise the position angle rotation of the polarizer and analyzer, the position angle rotational structure of the polarizer is made up of device for sealing magnetic fluid, cavity and turbine and worm, the handwheel that rotation is connected with worm screw realizes that the position angle of the polarizer rotates around the incident light optical axis; The azimuthal rotation of analyzer is to drive whole analyzing platform by the motor-driven turbine to rotate around the optical axis through emergent light behind the polarizer and realize that when the analyzing platform rotate, the analyzer and the detector that drive on the analyzing platform all rotated together;
Dual two times of angle composite structures: the grazing angle (θ of the polarizer
P) and the rotational angle theta of servo-actuated rocking arm
RConstitute first two times of angle composite structures, wherein, θ
R=2 θ
P, that is, and the grazing angle of polarizer rotation θ
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, and the analyzer and the detector system that are installed on the analyzing platform are made as a whole 2 θ that rotate together
PThe angle; Second two times of angle composite structure are by the grazing angle θ of analyzer
AWith the detector rotational angle theta
DConstitute, wherein, θ
D=2 θ
AAnd all angles had both been carried out two times of angle interlocks, also can independently rotate.
Described comprehensive polarimetry device, its described four kinds of mode of operations are comprehensively to same measurement mechanism, and be promptly two anti-, two, preceding anti-back saturating and preceding after anti-pattern, their implementation procedure is as follows:
A, two anti-pattern: when the polarizer and analyzer all adopt reflecting element, adopt two two times of angular dependences of two anti-pattern polarimetry devices to satisfy simultaneously, that is, and the grazing angle of polarizer rotation θ
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, comprises that analyzer and detector on the analyzing platform make as a whole 2 θ that rotate together
PThe angle guarantees that the analyzer on the rocking arm can receive from the light of polarizer reflection; And the grazing angle θ of analyzer
AWith the detector rotational angle theta
DAlso satisfy θ
D=2 θ
ARelation is measured;
B, two pattern: when the polarizer and analyzer all adopt the transmission-type element, measure two two times of angular dependences of main body this moment and remove, all angles are independently rotated; The grazing angle rotation θ of the polarizer
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, and it is 0 ° of angle that analyzer and detector system are made the as a whole angle that keeps together, guarantees that the analyzer on the rocking arm can receive from the light of polarizer transmission; And the grazing angle of analyzer turns to θ
AAngle, then detector rotational angle theta
DRemain on 0 ° of angle, receive light from the analyzer outgoing;
C, the saturating pattern in preceding anti-back: the polarizer adopts reflecting element and analyzer when adopting the transmission-type element, and polarimetry this moment device only need satisfy two times of angular dependences of the polarizer, that is, and and the grazing angle of polarizer rotation θ
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, and analyzer and detector system are made as a whole 2 θ that rotate together
PThe angle guarantees that the analyzer on the rocking arm can receive from the light of polarizer reflection; And the grazing angle of analyzer turns to θ
AAngle, then detector rotational angle theta
DRemain on 0 ° of angle, receive from the analyzer emergent light;
D, preceding back anti-pattern: the polarizer adopts the transmission-type element and analyzer when adopting reflecting element, and the polarimetry device only need satisfy two times of angular dependences of analyzer, that is, and and the grazing angle of polarizer rotation θ
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, and analyzer and detector system are done the as a whole 0 ° of angle that remains on together, make analyzer receive the light from polarizer P transmission; And the grazing angle of analyzer turns to θ
AAngle, then detector rotational angle theta
DSatisfy θ
D=2 θ
ATwo times of angular dependences measure, detector can receive signal.
Described comprehensive polarimetry device, its described deflection device comprises that polarizer grazing angle rotates θ
pWith the azimuth angle alpha rotation system; Calibrator comprises analyzer grazing angle θ
ARotation system with azimuthal angle beta; The servo-actuated rocking arm is dynamically connected with the drive system of specimen holder and analyzing platform.
Described comprehensive polarimetry device, its described fine motion collimation platform moves along x, y direction respectively under the driving of drive system motor, and scope is ± 15mm that precision is 2.8 microns.
Described comprehensive polarimetry device, its described beam detector is a photodiode, as online beam monitoring detector, be positioned at collimator after, shift-in or shift out light path under the drive system motor-driven.
Described comprehensive polarimetry device, its described main detector is with the main detector of microchannel plate as this device, constitutes two times of angular dependences with the analyzer grazing angle.
Described comprehensive polarimetry device, its measurement mechanism also comprises the electronic and two-dimentional manual control system of octuple, wherein, the octuple power driven system comprises: x and the motion of y direction, the rotation of IO beam monitoring detector, the rotation of polarizer angle, the azimuthal rotation of rotation, analyzer of servo-actuated rocking arm angle, the rotation of analyzer angle and the angular turn of main detector of collimation platform, all realized by external control system in the ultrahigh vacuum cavity by stepper motor; The two dimension manual control system comprises: the position angle rotation of the rotation of the specimen holder of usefulness manual adjustments and the polarizer, wherein the position angle of polarizer rotation is to be fixed on handwheel on the worm screw by manual rotation, drive the rotation of turbine and worm, thereby realize driving the position angle rotation of the polarizer.
Described comprehensive polarimetry device, its described data acquisition and control system, by computing machine, stepping motor control card, driver and low current amplifier are formed, utilize the Integrated Development Environment of programmable software LabVIEW, interactive programming method, function panel and abundant built-in function are for instrument control, data acquisition and process monitoring provide a comparatively complete software development environment and carry platform.
Apparatus of the present invention are adapted at soft x can distinguish use, is the comprehensive polarising means of the manual high vacuum of the electronic bidimensional of multifunctional universal octuple, is achieved as follows purpose:
1. the polarimetry device of the higher relatively and compact conformation of cost performance is provided.
2. a powerful element of set spare polarization characteristic test is provided, and bunch measuring polarization state, diagnosis, analysis and polarized light are applied to the device of one.
3. this device integrates four kinds of mode of operations, can realize freely changing of four kinds of mode of operations.Not only can be used as the measurement of polarization characteristic, can also use as the pick-up unit of the optical property of various types of optical elements.
Synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus of the present invention is compared with other polarising means, key features be four kinds of mode of operations comprehensively to same measurement mechanism, have two anti-, two, before saturating and preceding back, anti-back anti-(polarizer is reflection, and analyzer is transmission) pattern.
Owing on same device, can realize four kinds of patterns, thereby, can be according to different elements, bring into play its advantage, select optimal pattern to experimentize, so can not be subjected to the restriction of instrument, give full play to the superiority of different elements, improve relevant detection, obtain more perfect result, thus significant.
The polarising means of the present invention's development, with at present in the world on the synchrotron radiation light beam line existing polarising means compare, outstanding feature is that four kinds of patterns are integrated in one, and can select different mode of operations on an instrument according to detecting needs, finishes reflection or transmission-polarizing element test; Whole apparatus structure compactness; Be convenient to Installation and Debugging.
Description of drawings
Fig. 1 is an existing two contracureent transformation device synoptic diagram;
Fig. 2, polarising means light path principle figure (bireflection pattern);
Fig. 3 is synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus structural representation of the present invention.
Embodiment
By investigation widely, reference is existing synchrotron radiation polarising means in the world, and the present invention has built the comprehensive polarimetry device of a cover multi-functional high vacuum of synchrotron radiation soft x ray.This device is compared with other existing in the world polarising means, and its outstanding feature is, integrates four kinds of mode of operations, promptly can adopt the anti-four kinds of mode of operations in two saturating and preceding backs, anti-, two, preceding anti-back on this device respectively, and this still belongs to the first in the world.Can be used for linear polarized beam feature measurement, polarization optical element test and polarized light application etc., also can be used as the multifunctional universal albedometer and use.
Simply introduce know-why below.
A. the principle of work of multilayer film polarizer:
At extreme ultraviolet and grenz ray wave band, the refractive index of any material (real part) is all near 1, and less than 1, material is strong for the absorption of light, do not have transparency material, thereby the material that can be used as polarizer in other energy ranges can't can be distinguished use at this.Can distinguish at this, generally select multilayer film as polarizer.The multilayer film polarization optical element is to utilize multilayer film to different reflection (seeing through) rates realization of S polarization and P polarized light.Remove under normal incidence and glancing incidence condition, multilayer film is all inequality to S polarization and P reflection of polarization (seeing through) rate.The ratio of near the S light of incident Brewster angle and P reflection of light (seeing through) rate can reach extreme value; Under given energy condition, P polarized reflectance (transmitance) minimum (greatly) and P polarized reflectance (transmitance) and S polarized reflectance (transmitance) ratio minimum (greatly) are for optimizing polarizer.This moment, corresponding angle was called accurate Brewster angle.Accurate Brewster angle is as the incident angle of the work of multilayer film polarizer.
Polarimetry device main body of the present invention and mode of operation thereof:
The polarimetry device main body comprises when the polarizer and analyzer position angle independently rotate respectively, also comprise the rotation of polarizer grazing angle and rocking arm, the rotation of analyzer grazing angle and detector, this four-dimensional relation that both can realize two two times of angles interlocks of rotating also can be carried out independent rotation as required.
This polarising means can be realized the conversion of four kinds of patterns.
When adopting two anti-pattern, in the time of the independent respectively rotation in the polarizer and analyzer position angle, also there are two two times of angular dependences, wherein grazing angle (the θ of the polarizer
P) and the rotational angle theta of servo-actuated rocking arm (comprise specimen holder and analyzing platform, and analyzer and detector system are installed on the analyzing platform)
R(θ
R=2 θ
P) constitute first two times of angular dependences, that is, and the grazing angle of polarizer rotation θ
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, and analyzer and detector system etc. is made as a whole 2 θ that rotate together
PThe angle.Another two times of angle composite structures are by the grazing angle (θ of analyzer
A) and the detector rotational angle theta
D(θ
D=2 θ
A) constitute.
Before adopting during the saturating pattern in anti-back, the grazing angle (θ of the polarizer
P) and two times of angular dependences of servo-actuated rocking arm keep, and the interlock of analyzer and detector is removed, that is, the grazing angle of analyzer rotates to θ
AThe angle, and detector remains on 0 ° of position.
When adopting preceding saturating back anti-pattern, and the interlock of the polarizer and rocking arm is removed, that is, the grazing angle of the polarizer rotates to θ
PThe angle, and rocking arm remains on 0 ° of position; Second two times of angular dependence (interlock of analyzer and detector) keep, i.e. grazing angle (the θ of analyzer
A) and the detector rotational angle theta
D(θ
D=2 θ
A) two times of angles interlocks of formation.
When adopting two saturating pattern, the independent rotation of each dimension motion, that is, and as the grazing angle rotation θ of the polarizer
PThe angle, the servo-actuated rocking arm remains on 0 °, and in two times of other angular dependences, the grazing angle of analyzer rotation θ
AThe angle, and detector remains on 0 ° of position.
For every kind of pattern four scan modes being arranged, is respectively energy scan (I-E), two times of angle sweeps (I-θ), polarizer azimuth sweep (I-α), analyzer azimuth sweep (I-β).
(1) energy scan (I-E) is fixed into shooting angle, and when polarizer position angle placed α=0 ° and 90 ° respectively, the scanning monochromator energy was measured S and the P polarized component light intensity curve along with energy variation.Find and meet the optimum capacity that polarizer is optimized.
(2) two times of angle sweeps (I-θ), fixedly incident luminous energy, when polarizer azimuth angle alpha=0 ° and 90 °, the light intensity when measuring the changing of S and P polarized component respectively along with grazing angle, light intensity is designated as I respectively
ISAnd I
IPI wherein
ISAnd I
IS/ I
IpRatio is the accurate Brewster angle θ of the pairing angle of extreme value for this polarizer
QB
(3) polarizer azimuth sweep (I-α), fixedly incident luminous energy, the polarizer places accurate Brewster angle position θ
QB, measure light intensity along with polarizer azimuth angle alpha change curve.
(4) analyzer azimuth sweep (I-β), fixedly incident luminous energy, the polarizer and analyzer place accurate Brewster angle position respectively, measure light intensity along with analyzer azimuthal angle beta change curve.
B. the selection of detector:
In the grenz ray polarimetry, the signal of output general 10
-12～10
-9A magnitude, silicon photo diode are one of detectors that often uses, but do not have enlarging function, and comparatively responsive for polarized light.Microchannel plate is a kind of advanced person's the electron-multiplier with transfer function, has advantages such as volume is little, in light weight, resolving power is good, gain is high, noise is low, working voltage is low, and for polarization insensitive.The detection of soft X energy section requires to carry out under vacuum condition, and the instrument cavity volume is limited.Select the signal of the MCP micro-channel plate detector output of use directly to introduce computing machine, detect the signal of surveying about 10 through low current amplifier
-12～10
-9The A magnitude, noise signal 10
-15A satisfies and detects requirement, so select microchannel plate as main detector.
Embodiment
Synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus light path principle figure of the present invention (bireflection pattern) as shown in Figure 2, synchrotron radiation X-ray light source SR is radiated on the polarizer 5 through collimator 3, light after having passed through partially, incide on the analyzer 9, after analyzer 9 reflections, light is detected device 10 and receives and detectable signal again.
Consult Fig. 3, be synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus structural representation of the present invention, device mainly comprises whole whirligig, polarimetry apparatus main body, vacuum system, the data acquisition and control system of ultrahigh vacuum cavity.Wherein: cavity 1, device for sealing magnetic fluid 2, high precision fine motion collimator 3, I
0Detector 4, the polarizer 5, servo-actuated rocking arm 6, specimen holder 7, analyzing platform 8, analyzer 9, main detector 10.
High precision fine motion colimated light system: collimator 3 is installed on the high precision fine motion collimation platform, is positioned on the axis of cavity rotation, and the collimation platform moves along x, y direction respectively under the driving of motor, changes the collimator in different apertures as required;
Synchrotron radiation X-ray multilayer film polarimetry apparatus main body, be made up of beam monitoring detector 4, the polarizer 5, servo-actuated rocking arm 6, specimen holder 7, analyzer 9, detector 10 and analyzer azimuthal angle beta rotating mechanism etc., the main body of measurement mechanism is positioned at ultrahigh vacuum cavity 1.The polarimetry apparatus main body constitutes dual two times of angle composite structures by two Bragg diffractometers, and first diffractometer is by the grazing angle (θ of the multilayer film polarizer 5
P) and the rotational angle theta of servo-actuated rocking arm 6
R(θ
R=2 θ
P, comprise that specimen holder 7 and analyzer 9 and detector 10 all are fixed on above the rocking arm 6) form; Second diffractometer is by the grazing angle (θ of analyzer 9
A) and detector 10 rotational angle theta
D(θ
D=2 θ
A) constitute.Play deflection device and comprise the rotation of the motor-driven polarizer 5 incident angles, manually rotation hand wheel drives turbine and worm and drives the optical axis rotation of the polarizer 5 around incident light, and rotate at the realization position angle; Calibrator comprises motor-driven analyzer 9 incident angles and position angle rotation.Analyzer 9 azimuthal rotations are to control rotation in the cavity 1 by motor outside vacuum cavity 1, realize that analyzer 9 is around the optical axis rotation from the polarizer 5 emergent lights.
Data acquisition and control system, by computing machine, stepping motor control card, driver and low current amplifier are formed, utilize the Integrated Development Environment of LabVIEW, interactive programming method, function panel and abundant built-in function are for instrument control, data acquisition and process monitoring provide a comparatively complete software development environment and carry platform.
Introduce each component function and correlation parameter below.
1. the rotating mechanism of vacuum cavity 1: vacuum cavity 1 adopts device for sealing magnetic fluid 2 to be connected with light beam line, can rotate freely after guaranteeing cavity 1 and bunch being connected; The rear flange blind plate sealing, and turbine and worm is installed; Worm screw links to each other with manual turning handle, rotates manual turning handle, and the rear flange center is the axis rotation before the cavity 1.Rotating range :-180 °～+ 180 °, minimum angle interval is: 0.1 °.After the rotating shaft and bunch optical axis conllinear of regulating cavity 1, cavity 1 rotates around incident ray, determines the rotation of the polarizer 5 azimuth angle alpha.
2. high precision fine motion colimated light system: collimator 3 is installed on the high precision fine motion collimation platform, this platform can move along x, y direction respectively under the driving of motor, scope is ± 20mm that precision can reach 2.8 microns, and can change the collimator 3 in different apertures as required.
3.I
0Detector 4: with an AUX-100G type photodiode as online beam monitoring detector 4, be installed in collimator 3 after, shift-in or shift out light path under motor-driven.
4. the grazing angle θ of the polarizer 5
PRotation: as required the polarizer 5 can select the reflection or the transmission-type polarizer.The grazing angle θ of the polarizer 5
PRotation, the employing step angle is 1.8 ° a step motor drive turbine and worm, drives the polarizer 5 and rotates around sample central shaft (X-axis), 0 °～90 ° of rotating ranges, the speed ratio of turbine and worm is 1: 120, six class precisions, and the minimum angle interval of the polarizer 5 is 1.8 °/120=0.015 °.
5. the servo-actuated rocking arm 6: the rotating shaft of the grazing angle of the servo-actuated rocking arm 6 and the polarizer 5 is on the same line, and the two can do two times of angles interlock rotations, also can independently rotate.The polarizer 5 has transmission and two kinds of pattern work of reflection; When the polarizer 5 employing reflective-modes, the polarizer 5 grazing angles are θ
PThe time, the rotational angle θ of servo-actuated rocking arm 6 (be fixed with specimen holder 7 and analyzing platform on the rocking arm, the analyzing platform comprises analyzer 9 and detector 10 systems)
RMust satisfy θ
R=2 θ
PTwo times of angular dependences, promptly rocking arm 6 turns over 2 θ around the polarizer 5 incident angle central shafts
PAngle; When the polarizer 5 adopted transmission mode, the angle that rocking arm 6 rotates was θ
R=0 °.Satisfying under the condition of loading moment, select the step motor drive turbine and worm of 1.8 ° of step angles, drive the rotation of servo-actuated rocking arm 6; 0 °-140 ° of the angle ranges of rocking arm 6; speed ratio of turbine and worm is 1: 60; six class precisions, the minimum angle interval of servo-actuated rocking arm 6 are 1.8 °/60=0.03 °.
6. specimen holder 7: in light path, specimen holder 7 is fixed on the front end of analyzing platform 8, can place the maximum gauge 40mm of sample; Specimen holder 7 manually rotation hand wheel is determined the grazing angle of sample.After the incident angle of determining good sample plane, the handwheel pinning with adjusting angle guarantees that the glancing incidence angle of sample when rocking arm rotates is constant.The slewing area of specimen holder 7 is 0 °-90 °, 0.1 ° of precision.
7. the rotation of analyzer 9 azimuthal angle beta: the analyzing platform comprises analyzer 9 and detector 10 systems, be fixed on the servo-actuated rocking arm 6, under the driving of motor, driving whole analyzing platform by turbine and worm rotates around optical axis, (this optical axis is the optical axis through the polarizer 5 back emergent lights,) corner is the azimuthal angle beta of analyzer 9, angle range :-180 °-190 °, adopt the stepper motor of 1.8 ° of step angles, the speed ratio of turbine and worm 1: 180, six class precisions, analyzer 9 azimuthal angular resolutions are 1.8 °/180=0.01 °;
8. analyzer 9 grazing angle θ
ARotation: the shelf that the analyzing element is installed is fixed on the analyzing platform, and analyzer 9 rotates around the element central shaft, determines analyzer 9 grazing angle θ
A, 0 °-90 ° of slewing areas; Speed ratio 1: 90, six class precisions, analyzer 9 azimuthal angular resolutions are 1.8 °/90=0.02 °.
9. the angle θ that rotates of detector 10
D: the rotating shaft of the grazing angle of detector 10 and analyzer 9 is on same axis; Be fixed on the analyzing platform, both can have constituted two times of angles interlocks with the grazing angle of analyzer 9 and also can independently rotate, that is, when analyzer 9 is reflecting element, turn over θ
ADuring the angle, detector 10 turns over θ around analyzing element central shaft
D=2 θ
AAngle (analyzer 9 grazing angle θ
AAngle θ with detector 10 rotations
DBecome two times of angular dependences), and when analyzer 9 is transmissive element, work as θ
ADuring rotation, θ
DRemain on 0 °; θ
D Make detector 10 rotate 0 °-140 ° of slewing areas by the step motor drive turbine and worm; The speed ratio of turbine and worm 1: 45, six class precisions, the minimum angle interval of detector 10 is 1.8 °/45=0.04 °; And detector 10 can be planar parallel moves ± 3mm, guarantees that hot spot can be detected device 10 and receive.
10. the software and hardware of control system development: at the characteristics and the detection requirement of polarising means, developed the computer control software system that system controls and data are obtained that a cover is realized based on the LabView programmed method, this system features in convenient, powerful, the interface is easy, easy and simple to handle, data automatic recording is under assigned catalogue.The hardware using stepper motor driver of control system adds that motion control card finishes; It is motor-driven that polarising means has the motion of eight axles, adopts M420 type driver control motor.DMC1000 type pci bus motion control card is adopted in motion control, a card may command 1-4 shaft step motor, the maximum impulse output frequency is 400KHz, and its advantage is the real-time speed change in can moving, and can carry out the motion of circular arc and linear interpolation and start simultaneously and stop simultaneously to realize multiaxis.This multiaxis for polarising means moves simultaneously and has very important and practical meanings.The function that control system can realize: 1. single shaft scanning: the single shaft motion of eight motors; 2. two times of angle servo-actuateds: the polarizer and rocking arm, analyzer and detector can realize that two times of angle interlocks detect; 3. four axes motion: the polarizer, rocking arm, the servo-actuated of analyzer and detector and interlock.Be implemented in various motor functions in the external control vacuum environment by this cover control system.
11. weak signal measurement and data acquisition system (DAS): the detection that soft x can distinguish requires to use under high vacuum condition, and the cavity volume of polarising means is limited, detects a little less than the pickup electrode of surveying, and for the detection that polarization characteristic is measured, the electric current of output signal all is lower than 10
-12A.Thereby need the little and detector that have an enlarging function of volume to survey weak signal.It is high that microchannel plate (MCP) has gain, and a slice uses gain can reach 10 separately
3-10
4, two V-shaped stacks use gain can reach 10
7-10
8The spatial discrimination ability is strong; Volume is little, and is in light weight; Resolving power is good; Noise is low, 10
-16The A magnitude; Coincidence detection is for the requirement of detector, so select the main detector of microchannel plate as polarising means.Signal is drawn by galvanometer 6517 (Keithley, USA) amplification back input computing machine through mininoise cable and silver-colored core lead.
Claims (8)
1. a synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus comprises vacuum cavity, polarimetry apparatus main body, vacuum system, data acquisition and control system; It is characterized in that this measurement mechanism adopts bidimensional position angle rotating mechanism and dual two times of angle composite structures to be integrated in one, promptly two anti-, two four kinds of mode of operations, saturating and preceding back, preceding anti-back anti-pattern is comprehensively to same measurement mechanism;
The cylindrical vacuum chamber body has two flange ports forwards, backwards relatively in the footpath, and forward flange is equipped with device for sealing magnetic fluid, the rear flange blind plate sealing; Chamber outer wall and whole whirligig are dynamically connected, and whole whirligig comprises magnetic fluid seal and turbine and worm, and worm screw links to each other with manual turning handle, rotate manual turning handle and promptly drive the ultrahigh vacuum cavity and rotate around incident light axis, and incident light is injected by the forward flange mouth; Centre bottom has a horizonal base plate in the cavity;
The polarimetry apparatus main body is positioned at cavity, is fixed on the horizonal base plate; The polarimetry apparatus main body comprises high precision fine motion collimation platform, and beam detector plays deflection device, servo-actuated rocking arm, specimen holder, Calibrator, main detector; Wherein: Z-shaped fine motion collimation platform bottom surface, right angle is connected with horizonal base plate, and upper mounting plate is as the collimation platform, and lower plane is connected with horizonal base plate, is connected with collimator on the fine motion collimation platform, and the beam detector and the polarizer are installed on the horizonal base plate; Servo-actuated rocking arm and the coaxial installation of the rotating shaft of the polarizer; rocking arm is a ∏ shape support are through holes at the center of support, and what install on its plane is the turbine that there is a through hole at the center; the analyzing platform is installed above the turbine; the analyzing platform comprises analyzer and main detector and drive system, and the analyzing platform contains a ∏ shape support, and its place, plane is connected with turbine; there is a through hole at the center; and rocking arm, turbine are identical with the through-hole aperture of analyzing platform, and the center is point-blank; The two side arms of the big ∏ shape support of rocking arm is downward, its two ends respectively with the rotating shaft of polarizer hinge joint, hinge joint place is provided with rotating shaft; Play deflection device and comprise the polarizer and drive system, the polarizer is positioned at the rotating shaft middle part, and below through hole, rotating shaft one end is provided with drive system, and drive system and servo-actuated rocking arm are connected; The two side arms of analyzing platform ∏ shape support upwards, the two side arms end is provided with rotating shaft, analyzer is positioned at the rotating shaft middle part, above through hole, through hole and analyzer center point-blank, rotating shaft one end has a Г shape detector carriage, support the inner is connected with main detector; The through hole below is installed with specimen holder, and specimen holder is by the rotating shaft and the hinge joint of sample support frame of both sides, and specimen holder is between the polarizer and analyzer;
Collimator, beam detector, the polarizer, specimen holder, analyzer, main detector series arrangement on optical path of incident light;
Bidimensional position angle rotating mechanism: comprise the position angle rotation of the polarizer and analyzer, the position angle rotational structure of the polarizer is made up of device for sealing magnetic fluid, cavity and turbine and worm, the handwheel that rotation is connected with worm screw realizes that the position angle of the polarizer rotates around the incident light optical axis; The azimuthal rotation of analyzer is to drive whole analyzing platform by the motor-driven turbine to rotate around the optical axis through emergent light behind the polarizer and realize that when the analyzing platform rotate, the analyzer and the detector that drive on the analyzing platform all rotated together;
Dual two times of angle composite structures: the grazing angle (θ of the polarizer
P) and the rotational angle theta of servo-actuated rocking arm
RConstitute first two times of angle composite structures, wherein, θ
R=2 θ
P, that is, and the grazing angle of polarizer rotation θ
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, and the analyzer and the detector system that are installed on the analyzing platform are made as a whole 2 θ that rotate together
PThe angle; Second two times of angle composite structure are by the grazing angle θ of analyzer
AWith the detector rotational angle theta
DConstitute, wherein, θ
D=2P
AAnd all angles had both been carried out two times of angle interlocks, also can independently rotate.
2. comprehensive polarimetry device as claimed in claim 1 is characterized in that, described four kinds of mode of operations are comprehensively to same measurement mechanism, and are promptly two anti-, two, preceding anti-back saturating and preceding after anti-pattern, their implementation procedure is as follows:
A, two anti-pattern: when the polarizer and analyzer all adopt reflecting element, adopt two two times of angular dependences of two anti-pattern polarimetry devices to satisfy simultaneously, that is, and the grazing angle of polarizer rotation θ
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, comprises that analyzer and detector on the analyzing platform make as a whole 2 θ that rotate together
PThe angle guarantees that the analyzer on the rocking arm can receive from the light of polarizer reflection; And the grazing angle θ of analyzer
AWith the detector rotational angle theta
DAlso satisfy θ
D=2 θ
ARelation is measured;
B, two pattern: when the polarizer and analyzer all adopt the transmission-type element, measure two two times of angular dependences of main body this moment and remove, all angles are independently rotated; The grazing angle rotation θ of the polarizer
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, and it is 0 ° of angle that analyzer and detector system are made the as a whole angle that keeps together, guarantees that the analyzer on the rocking arm can receive from the light of polarizer transmission; And the grazing angle of analyzer turns to θ
AAngle, then detector rotational angle theta
DRemain on 0 ° of angle, receive light from the analyzer outgoing;
C, the saturating pattern in preceding anti-back: the polarizer adopts reflecting element and analyzer when adopting the transmission-type element, and polarimetry this moment device only need satisfy two times of angular dependences of the polarizer, that is, and and the grazing angle of polarizer rotation θ
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, and analyzer and detector system are made as a whole 2 θ that rotate together
PThe angle guarantees that the analyzer on the rocking arm can receive from the light of polarizer reflection; And the grazing angle of analyzer turns to θ
AAngle, then detector rotational angle theta
DRemain on 0 ° of angle, receive from the analyzer emergent light;
D, preceding back anti-pattern: the polarizer adopts the transmission-type element and analyzer when adopting reflecting element, and the polarimetry device only need satisfy two times of angular dependences of analyzer, that is, and and the grazing angle of polarizer rotation θ
PThe angle, then the servo-actuated rocking arm drives specimen holder and analyzing platform, and analyzer and detector system are done the as a whole 0 ° of angle that remains on together, make analyzer receive the light from polarizer P transmission; And the grazing angle of analyzer turns to θ
AAngle, then detector rotational angle theta
DSatisfy θ
D=2 θ
ATwo times of angular dependences measure, detector can receive signal.
3. comprehensive polarimetry device as claimed in claim 1 is characterized in that, described deflection device comprises that polarizer grazing angle rotates θ
PWith the azimuth angle alpha rotation system; Calibrator comprises analyzer grazing angle θ
ARotation system with azimuthal angle beta; The servo-actuated rocking arm is dynamically connected with the drive system of specimen holder and analyzing platform.
4. comprehensive polarimetry device as claimed in claim 1 is characterized in that, described fine motion collimation platform moves along x, y direction respectively under the driving of drive system motor, and scope is ± 15mm that precision is 2.8 microns.
5. comprehensive polarimetry device as claimed in claim 1 is characterized in that, described beam detector is a photodiode, as online beam monitoring detector, be positioned at collimator after, shift-in or shift out light path under the drive system motor-driven.
6. comprehensive polarimetry device as claimed in claim 1 is characterized in that, described main detector is with the main detector of microchannel plate as this device, constitutes two times of angular dependences with the analyzer grazing angle.
7. comprehensive polarimetry device as claimed in claim 1 is characterized in that, this measurement mechanism also comprises the electronic and two-dimentional manual control system of octuple, and wherein, the octuple power driven system comprises: the x of collimation platform and motion, the I of y direction
0The azimuthal rotation of rotation, analyzer of the rotation of the rotation of beam monitoring detector, polarizer angle, servo-actuated rocking arm angle, the rotation of analyzer angle and the angular turn of main detector are all realized by external control system in the ultrahigh vacuum cavity by stepper motor; The two dimension manual control system comprises: the position angle rotation of the rotation of the specimen holder of usefulness manual adjustments and the polarizer, wherein the position angle of polarizer rotation is to be fixed on handwheel on the worm screw by manual rotation, drive the rotation of turbine and worm, thereby realize driving the position angle rotation of the polarizer.
8. comprehensive polarimetry device as claimed in claim 1, it is characterized in that, described data acquisition and control system, by computing machine, stepping motor control card, driver and low current amplifier are formed, utilize the Integrated Development Environment of programmable software LabVIEW, interactive programming method, function panel and abundant built-in function are for instrument control, data acquisition and process monitoring provide a comparatively complete software development environment and carry platform.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100645942A CN101271024B (en) | 2007-03-21 | 2007-03-21 | Synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus |
| HK09102525.1A HK1124659A1 (en) | 2007-03-21 | 2009-03-17 | Synchrotron radiation x-ray multilayer film synthetic polarization measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100645942A CN101271024B (en) | 2007-03-21 | 2007-03-21 | Synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101271024A true CN101271024A (en) | 2008-09-24 |
| CN101271024B CN101271024B (en) | 2010-10-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100645942A Expired - Fee Related CN101271024B (en) | 2007-03-21 | 2007-03-21 | Synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus |
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|---|---|
| CN (1) | CN101271024B (en) |
| HK (1) | HK1124659A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104267423A (en) * | 2014-10-15 | 2015-01-07 | 重庆大学 | X-ray polarization degree detecting system and method |
| CN108918095A (en) * | 2018-06-12 | 2018-11-30 | 同济大学 | A kind of desktop type Soft X-Ray Region optical element device for testing polarization |
| CN109269470A (en) * | 2018-08-17 | 2019-01-25 | 中铁第四勘察设计院集团有限公司 | A kind of stereo storage rack bias detecting method and device |
| CN110687586A (en) * | 2019-11-05 | 2020-01-14 | 中国计量科学研究院 | Method and device for measuring polarization degree based on CZT detector |
| CN111982278A (en) * | 2020-08-04 | 2020-11-24 | 中国科学院高能物理研究所 | Detector and method for detecting beam position by utilizing synchrotron radiation polarization |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4132653A (en) * | 1977-06-29 | 1979-01-02 | Samson James A R | Polarization analyzer for vacuum ultraviolet and x-ray radiation |
| CN100335876C (en) * | 2004-04-13 | 2007-09-05 | 清华大学 | Passive light splitting offset detector |
-
2007
- 2007-03-21 CN CN2007100645942A patent/CN101271024B/en not_active Expired - Fee Related
-
2009
- 2009-03-17 HK HK09102525.1A patent/HK1124659A1/en not_active IP Right Cessation
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104267423A (en) * | 2014-10-15 | 2015-01-07 | 重庆大学 | X-ray polarization degree detecting system and method |
| CN108918095A (en) * | 2018-06-12 | 2018-11-30 | 同济大学 | A kind of desktop type Soft X-Ray Region optical element device for testing polarization |
| CN109269470A (en) * | 2018-08-17 | 2019-01-25 | 中铁第四勘察设计院集团有限公司 | A kind of stereo storage rack bias detecting method and device |
| CN109269470B (en) * | 2018-08-17 | 2020-11-03 | 中铁第四勘察设计院集团有限公司 | Three-dimensional goods shelf offset detection method and device |
| CN110687586A (en) * | 2019-11-05 | 2020-01-14 | 中国计量科学研究院 | Method and device for measuring polarization degree based on CZT detector |
| CN111982278A (en) * | 2020-08-04 | 2020-11-24 | 中国科学院高能物理研究所 | Detector and method for detecting beam position by utilizing synchrotron radiation polarization |
| CN111982278B (en) * | 2020-08-04 | 2021-07-13 | 中国科学院高能物理研究所 | Detector and method for detecting beam position by utilizing synchrotron radiation polarization |
Also Published As
| Publication number | Publication date |
|---|---|
| HK1124659A1 (en) | 2009-07-17 |
| CN101271024B (en) | 2010-10-13 |
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