CN101251259A - Combustion-type exhaust gas treatment apparatus - Google Patents
Combustion-type exhaust gas treatment apparatus Download PDFInfo
- Publication number
- CN101251259A CN101251259A CNA2007101964659A CN200710196465A CN101251259A CN 101251259 A CN101251259 A CN 101251259A CN A2007101964659 A CNA2007101964659 A CN A2007101964659A CN 200710196465 A CN200710196465 A CN 200710196465A CN 101251259 A CN101251259 A CN 101251259A
- Authority
- CN
- China
- Prior art keywords
- combustion
- exhaust gas
- treatment apparatus
- gas treatment
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 94
- 230000007246 mechanism Effects 0.000 claims abstract description 46
- 238000001816 cooling Methods 0.000 claims abstract description 22
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 5
- 239000002184 metal Substances 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 49
- 239000002912 waste gas Substances 0.000 claims description 32
- 238000012545 processing Methods 0.000 claims description 16
- 238000004140 cleaning Methods 0.000 claims description 14
- 239000006227 byproduct Substances 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims description 7
- 230000000630 rising effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 239000002352 surface water Substances 0.000 claims 1
- 238000002485 combustion reaction Methods 0.000 abstract description 5
- 238000005406 washing Methods 0.000 abstract 1
- 239000000428 dust Substances 0.000 description 22
- 238000000034 method Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 13
- 230000006872 improvement Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 238000012423 maintenance Methods 0.000 description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- 239000000498 cooling water Substances 0.000 description 4
- 239000000446 fuel Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000001143 conditioned effect Effects 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 210000005241 right ventricle Anatomy 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000006121 base glass Substances 0.000 description 2
- 238000005422 blasting Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 150000002221 fluorine Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 230000009183 running Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- -1 take out Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
- F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2217/00—Intercepting solids
- F23J2217/50—Intercepting solids by cleaning fluids (washers or scrubbers)
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E20/00—Combustion technologies with mitigation potential
- Y02E20/30—Technologies for a more efficient combustion or heat usage
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
Abstract
A combustion-type exhaust gas treatment apparatus is used to treat a harmful exhaust gas by combustion to render the gas harmless. The present invention provides such a combustion-type exhaust gas treatment apparatus. This treatment apparatus includes a combustion treatment section, a cooling section, and a washing section. The combustion treatment section includes an exhaust-gas treatment combustor, a body made from metal and having a roughened inner surface, and a water-film formation mechanism adapted to form a water film on the inner surface of the body. The combustion treatment of the exhaust gas is performed in the body.
Description
Technical field
The present invention relates to combustion-type exhaust gas treatment apparatus, described combustion-type exhaust gas treatment apparatus is used for comprising for example silane gas (SiH by the burning processing
4) or halogen gas (NF
3, ClF
3, SF
6, CHF
3, C
2F
6, CF
4Deng) harmful and incendivity waste gas so that waste gas is harmless.
Background technology
Semiconductor-fabricating device is discharged and is comprised for example silane gas (SiH
4) or halogen gas (NF
3, ClF
3, SF
6, CHF
3, C
2F
6, CF
4) wait the gas of harmful and incendivity waste gas.This waste gas can not directly be discharged enters atmosphere.Like this, waste gas is introduced in the treating apparatus usually, and waste gas is oxidized so that waste gas is harmless by burning therein.A kind of widely used this type of process method is to use combustion-supporting gas to form flame in stove, by flame combustion waste gas, speciallys permit publication 11-218317 referring to Japan in this stove.
The combustion-type exhaust gas treatment apparatus that uses in semi-conductor industry and the liquid crystal industry may be discharged a large amount of dust and (is mainly SiO
2) and the byproduct handled as waste gas burning of a large amount of sour gas.Therefore, need periodic maintenance work removing the dust of processing section, or need be such as the additional mechanism providing additional operation of scraper plate regularly to scrape off the dust that adheres to or be deposited on the burning process chamber cylindrical body inner surface.
The dust that adheres to or deposit is mainly by SiO
2(that is silica) is formed.But remove SiO
2Outward, dust may wherein be mixed with toxic dust.Dust has multiple diameter, and scope is from 0.1 micron to tens of microns.In addition, dust may exist with the bulk form.Therefore, be necessary to guarantee to remove the processing safety that dust is safeguarded, so that can not cause because of sucking the Health cost that dust causes.
Providing under the situation of wiping mechanism, number of elements increases.Consequently cost of goods manufactured will increase, and need the periodic replacement wiping mechanism, increase operation cost like this.
Because the temperature of burning process chamber internal combustion gas is up to about 1700 ℃, be used as cylindrical body around the burning process chamber such as the heat proof material of alumina base glass ceramics.But the burning chamber temperature is higher, and if have fluorine or chlorine gas, the cylindrical body inner surface will be corroded and destroy.Therefore, be necessary to regularly replace cylindrical body.This replacing of expensive cylindrical body produces expense and requires maintenance consuming time.
Summary of the invention
The present invention is proposed in view of the foregoing.Therefore the purpose of this invention is to provide combustion-type exhaust gas treatment apparatus, described combustion-type exhaust gas treatment apparatus can use material at a low price to be used for body around the burning process chamber, can prevent that dust adhesion is at burning process chamber inner surface, can prevent that corrosive gas from destroying burning process chamber inner surface, and can reduce maintenance consuming time and maintenance cost.
Combustion-type exhaust gas treatment apparatus according to the present invention comprise be used for to waste gas burn the burning processing section of handling, be used to cool off the cooling segment of waste gas processed in the burning processing section and be used to utilize water to clean waste gas to remove the cleaning part that the byproduct that produced is handled in burning.The burning processing section comprises the exhaust-gas treatment burner, is made of metal and has the cylindrical shell of rough inner-surface and is applicable to that the moisture film that forms moisture film on cylinder inner surface forms mechanism.The burning of waste gas is handled and is carried out in cylindrical shell.
As mentioned above, the invention provides combustion-type exhaust gas treatment apparatus, comprise metal body, so waste gas is processed in body by burning with rough inner-surface.The moisture film that is formed on the body internal surface provides stop water.Therefore, can be used for forming body as stainless low price material.In addition, but be formed on moisture film flush away dust on the body internal surface, therefore prevent the inner surface of dust adhesion in body.In addition, but moisture film flush away corrosive gas, so body internal surface can be not destroyed.Consequently, can be used for forming body, therefore reduced the manufacturing cost of body itself as stainless low price material.In addition, can reduce maintenance consuming time and maintenance cost.
Description of drawings
Fig. 1 is the cutaway view that shows according to the burning processing section of the embodiment of the invention;
Fig. 2 shows that moisture film forms the cutaway view of the example of mechanism;
Fig. 3 shows that moisture film forms the cutaway view of the improvement example of mechanism;
Fig. 4 shows that moisture film forms the cutaway view of another improvement example of mechanism;
Fig. 5 shows that moisture film forms the cutaway view of the another improvement example of mechanism;
Fig. 6 shows that moisture film forms the cutaway view of the another improvement example of mechanism;
Fig. 7 A shows that moisture film forms the cutaway view of the another improvement example of mechanism;
Fig. 7 B shows that moisture film shown in Fig. 7 A forms the front view of mechanism;
Fig. 8 A shows that moisture film forms the vertical view of the another improvement example of mechanism;
Fig. 8 B shows that moisture film shown in Fig. 8 A forms the cutaway view of mechanism;
Fig. 9 A shows that moisture film forms the vertical view of the another improvement example of mechanism;
Fig. 9 B shows that moisture film shown in Fig. 9 A forms the cutaway view of mechanism;
Fig. 9 C shows that moisture film shown in Fig. 9 A forms the front view of mechanism;
Figure 10 A shows that moisture film forms the cutaway view of the another improvement example of mechanism;
Figure 10 B shows that moisture film shown in Figure 10 A forms the vertical view of mechanism;
Figure 11 is the block diagram that shows according to the combustion-type exhaust gas treatment apparatus of the embodiment of the invention.
Figure 12 A is the vertical view that shows the example that quickens cooling body;
Figure 12 B is the cutaway view that shows mechanism shown in Figure 12 A;
Figure 13 A is the vertical view that shows another example that quickens cooling body;
Figure 13 B is the cutaway view that shows mechanism shown in Figure 13 A;
Figure 14 A is the vertical view that shows another example that quickens cooling body;
Figure 14 B is the cutaway view that shows mechanism shown in Figure 14 A;
Fig. 1 5A is the vertical view that shows another example that quickens cooling body;
Figure 15 B is the cutaway view that shows mechanism shown in Figure 15 A;
Figure 16 A is the vertical view that shows another example that quickens cooling body; And
Figure 16 B is the cutaway view that shows mechanism shown in Figure 16 A.
The specific embodiment
Below with reference to accompanying drawing the embodiment of the invention is described.In the accompanying drawing, parts or element with said function or structure are represented with same reference number.
Fig. 1 is the cutaway view of demonstration according to the burning processing section of the combustion-type exhaust gas treatment apparatus of the embodiment of the invention.Burning processing section 11 comprises exhaust-gas treatment burner 12.Waste gas is supplied to by ozzle 13, then with circle round stream and mix with the combustion-supporting gas that provides by combustion-supporting gas nozzle 15 of the air that provides by air nozzle 14.Mixture is burned, thereby forms flame 17.Be provided with in flame 17 downstreams by 18 of cylindrical bodies around burning process chamber (flame holding chamber) 19.The burning of waste gas is carried out in burning process chamber 19 with processing.Between exhaust-gas treatment burner 12 and cylindrical body 18, provide current flange 20, make water flow downward, thereby on cylindrical body 18 inner surfaces, form moisture film A along cylindrical body 18 inner surfaces.
Adopt stainless steel to form cylindrical body 18 in this embodiment.The inner surface of this cylindrical body 18 is made up of rough surface.Because cylindrical body 18 inner surfaces are coarse, have improved the wettable of inner surface, therefore on total inner surface, can form even moisture film.If the stainless steel as hydrophobic material has minute surface fine finishining inner surface, may form water droplet thereon.Therefore, on total inner surface, be difficult to form even moisture film.Because whole cylindrical body 18 inner surfaces are coarse, can form on cylindrical body 18 total inner surface and stablize moisture film, and not have water break.
Rough surface can form by blasting treatment, and blasting treatment is to utilize compressed air or centrifugal force that abrasive material (for example sand or glass ball) high velocity jet is formed the method for the rough surface with required roughness from the teeth outwards.Rough surface can form by machine-tooled method, such as the key point channel process of cutting (broaching) method by utilizing a plurality of blades or the combination scraping workpiece by motion of cutter vertical linearity and workpiece feed motion.Alternatively, can form rough surface by surface treatment such as pickling or hydrophilic coating.Pickling be by workpiece is immersed in the chemical liquid (for example nitric acid, hydrofluoric acid, hydrochloric acid, sulfuric acid), with workpiece from chemical liquid, take out, water cleaning workpiece and dry workpiece and carry out.Hydrophilic coating is by utilizing the hydrophilic film coating inner surface such as glass fibre, silicon polymer or special teflon (registration mark) to carry out.
The preferred temperature that waste gas decomposes is at least 1700 ℃.Therefore, the temperature in the burning process chamber 19 remains on about 1700 ℃.The water yield of being supplied with by current flange 20 is conditioned, and makes moisture film A thickness be at least 2mm.Be at least the thick moisture film A of 2mm heat resistant structure can be provided, thereby the temperature of cylindrical body 18 is maintained at normal temperature (being no more than 50 ℃) substantially.Therefore, can be used to cylindrical body 18, substitute expensive alumina base glass ceramics as stainless low price material.When the water temperature in the current flange 20 was 30 ℃, the water temperature in cylindrical body 18 exits was tens of degree or lower.
When the inner surface of the dust subcylindrical body 18 that produces in the burning process chamber 19, therefore moisture film A flush away dust prevents that dust adhesion is on the inner surface of cylindrical body 18.Similarly, when the inner surface of corrosive gas molecule subcylindrical body 18, moisture film flush away corrosive gas molecule.For example, when the fluorine-containing accessory substance of generation was handled in burning, this fluorine-containing accessory substance became the hydrofluoric acid of dilution, can not cause the inner surface infringement of cylindrical body 18.Therefore, though use as stainless low price material as cylindrical body 18, dust does not stick to inner surface, inner surface can the oxidized gas corrosion.Consequently, maintenance and maintenance cost consuming time can significantly reduce.
As Fig. 1, the inner surface of cylindrical body 18 has upper end from cylindrical body 18 to the constant cylindrical shape of bottom diameter.Alternatively, the inner surface of cylindrical body 18 can have the cone shape that reduces gradually to the bottom diameter size from the upper end of cylindrical body 18.The advantage of cylindrical shape is, thereby thereby eliminates welding portion from the burning process chamber and avoid the production of water break and simplification cylindrical body to reduce production costs.The advantage of cone shape is to be easy to form moisture film because of its taper.On the other hand, cone shape needs solder technology to avoid causing water break, consequently will increase manufacturing cost.
Fig. 2 to Figure 10 has shown the example that is used for forming the mechanism of moisture film on the inner surface of cylindrical body.
Fig. 2 is the cutaway view that shows the example of current flange (moisture film forms mechanism) 20.This example that moisture film forms mechanism 20 comprises annular water receiver 24 and the 18a of weir portion.The 18a of weir portion forms the part of water receiver 24.The 18a of weir portion has the top of even height.Therefore, on the inner surface of cylindrical body 18, can form the even moisture film of uniform thickness.Fig. 3 shows the cylindrical weir 18b of portion with circular inboard apical margin.Moisture film forms among basic structure and Fig. 2 of this example of mechanism identical.This example can form the steady current that overflow the 18b of weir portion.
Fig. 4 is the improvement example of Fig. 2, has shown that the top has the 18c of weir portion in L shaped cross section.This example that moisture film forms mechanism comprises annular water receiver 24 and the 18c of weir portion.The 18c of weir portion forms the part of water receiver 24.Fig. 5 has shown that the top has L shaped cross section and has the cylindrical weir 18d of portion of circular inboard apical margin.Moisture film forms among basic structure and Fig. 4 of this example of mechanism identical.Fig. 6 has shown at the cylindrical weir 18e of portion radially inner side the example that cylindrical parts 33 and water flow downward by the little gap between 18e of weir portion and the cylindrical parts 33 has been set.This example that moisture film forms mechanism comprises annular water receiver 24, the 18e of weir portion and cylindrical parts 33.The 18e of weir portion forms the part of water receiver 24.
Fig. 7 A and Fig. 7 B have shown below cylindrical weir portion 18f top and have formed rectangular aperture 20f so that water flows to the example of the inner surface of cylindrical body 18 by opening 20f.This example that moisture film forms mechanism comprises that annular water receiver 24, the 18f of weir portion and the 18f of weir portion go up the rectangular aperture 20f that forms.Fig. 8 A and Fig. 8 B have shown outlet 20g, and water flows out to form spiral water flow on the inner circumferential surface of cylindrical body 18 by this outlet.This example that moisture film forms mechanism is included in a plurality of outlet 20g that form on the inner surface of cylindrical body 18.More specifically, outlet 20g forms the inner circumferential surface current in the horizontal direction along cylindrical body 18.Owing to a plurality of outlet 20g are set, on the inner circumferential surface of cylindrical body 18, form the uniform thickness moisture film.Fig. 9 A to Fig. 9 C has shown outlet 20h, and water flows out to form spiral water flow on the inner circumferential surface of cylindrical body 18 by this outlet.This example that moisture film forms mechanism comprises annular water receiver 24 and the vertically extending outlet 20h that forms on the inner surface of cylindrical body 18.Each outlet 20h is that a side is the rectangular shape that opens wide, so that water flows out in the tangential direction level, forms the moisture film that covers rectangle outlet 20h itself.
Figure 10 A and Figure 10 B have shown that supplying water to water receiver 24 from tangential direction makes water overflow the example that the 18i of weir portion forms spiral water flow to form the stream that circles round water receiver 24.At least one supply port 20i that this example of moisture film formation mechanism comprises annular water receiver 24, the 18i of weir portion and is used for supplying water to from the tangential direction of water receiver 24 water receiver 24.The 18i of weir portion forms the part of water receiver 24.When water being supplied to water receiver 24, in water receiver 24, form the stream that circles round of water by supply port 20i.Consequently, the water level in the water receiver 24 evenly increases in the whole circumference direction, and water overflows the 18i of weir portion equably to the inner surface of cylindrical body 18.One or more supply port 20i can be set.Even independent supply port 20i is set, in water receiver 24, still can form the stream that circles round of water.Therefore, on the inner surface of cylindrical body 18, can form even moisture film.According to this example, even, still can stablize and form even moisture film because the mounting condition of emission-control equipment 10 causes cylindrical body 18 relative horizontal direction inclination certain angles (for example, having the height and length of making than being the gradient of 1cm than 200cm).
Figure 11 is the overall structure example of combustion-type exhaust gas treatment apparatus 10.Fuel and oxygen are fed into premixer 37 by managing 35 and 36, and fuel and oxygen mix the formation pre-mixed fuel mutually therein.This pre-mixed fuel is fed into burning processing section 11 by managing 38.As the burning (being oxidation) waste gas source of oxygen air by manage 39 be fed into the burning processing section 11.
Combustion-type exhaust gas treatment apparatus 10 comprise be used to cool off stand to burn the waste gas handled cooling segment 21 and be used to store and circulate and be used on the inner surface of cylindrical body 18, forming the circulating box 25 of the water of moisture film A.Cooling segment 21 is positioned at cylindrical body 18 downstreams.Cooling segment 21 comprises the end portion of cylindrical body 18 and circulating box 25 interconnective pipes 22, and the pipe 27 that is branched to cleaning part 31 by pipe 22.Pipe 27 by pipe 22 bifurcateds is inclined upwardly and is connected by the end portion of vertical tube with cleaning part (purge chamber) 31.At the water spraying mechanism 28 that is provided on pipe 27 inner surfaces, forming moisture film near the connecting portion office between pipe 27 and the vertical tube.
The whole moisture film that flows down from cylindrical body 18 that covers of the inner surface of pipe 22, the whole moisture film that forms by water spraying mechanism 28 that covers of the inner surface of pipe 27.Because these moisture films are as the thermal resistance material, although the waste gas of handling that stands to burn is high temperature, the temperature of pipe 22 and 27 can remain on normal temperature (being no more than 50 ℃) substantially.In addition, moisture film can prevent the infringement that corrosive gas causes pipe.Therefore, stainless steel can be used as pipe 22 and 27 at a low price.As the surface of the gas contact portion of stainless metal pipe on by covering corrosion-resistant materials such as chemical deposition, physics coating, paint or adhesion (for example, special teflon (registration mark) or PVC) be conventional means.Structure according to the above embodiment of the present invention need not to provide this means.
Preferably at pipe 22 or manage on 27 the inner surface acceleration cooling body is provided, for example fin or baffle plate.Figure 12 A, Figure 12 B to Figure 16 A, Figure 16 B have shown the example as the acceleration cooling body of fin or baffle plate.Figure 12 A and Figure 12 B have shown the annular flap 23 on the inner surface that is arranged in pipe 22.Figure 13 A and Figure 13 B have also shown annular flap 23.The difference of the relative Figure 12 A with Figure 13 B example illustrated of Figure 13 A and Figure 12 B example illustrated is that the fin 23 among Figure 12 A and Figure 12 B has rectangular cross section, and the fin 23 among Figure 13 A and Figure 13 B has triangular cross section.Figure 14 A and Figure 14 B have shown the short limb sheet 23 that tilts along exhaust gas flow direction in pipe 22.Figure 15 A and Figure 15 B have shown the semicircle baffle plate 23 on the inner surface that is arranged on pipe 22.The shape of each semicircle baffle plate 23 can make its part with the inner surface of pipe 22 cooperate.In pipe 22, baffle plate 23 is arranged on different vertical position and the different circumferential positions.Waste gas flows through the inner surface and the baffle plate 23 of pipe 22 and contact tube 22.In this manner, can quicken the cooling effect of waste gas by the fin that covered by moisture film or baffle plate.Figure 16 A and Figure 16 B have shown the helical wing plate 23 on the inner peripheral surface that is arranged on pipe 22.
The cleaning part 31 of combustion-type exhaust gas treatment apparatus 10 comprises filter 31a and water spraying mechanism 31b.After burning was handled, waste gas part 21 coolings that are cooled were introduced into cleaning part 31 then.This cleaning part 31 waters clean waste gas, comprise by waste gas burning and handle the dust that produced and the byproduct of oxidizing gas to catch and to remove.Dust is removed by filter 31a, and flows downward with the water of water spraying mechanism 31b ejection.Dust flows through pipe 27 and 22 with water and enters circulating box 25, and is stored in the circulating box 25.In this manner, waste gas by burning handle, in cooling segment 21 cooling and in cleaning part 31 water clean become harmless.The useless gas flow tube of handling 32, be discharged in atmosphere or other space then.
Circulating box 25 has weir portion 26.After water was downward through pipe 22, water entered the chamber in weir portion 26 left sides as shown in the figure.The water of a left side in the chamber weir portion 26 of overflowing enters the chamber on weir portion 26 right sides as shown in the figure.Water in the right ventricle is sucked by pump 30 and is sent to heat exchanger 40 by supply pipe 34.The heat exchange that heat exchanger 40 carries out between described water and the cooling water makes glassware for drinking water that proper temperature be arranged.After this, this water is used as recirculated water again.The water that comprises a large amount of dust flows into the left chamber of circulating box 25.Dust has large diameter particulate by some of them and forms.Because big particulate is heavier, they are sink to the bottom, chamber.On the other hand, the particulate with unusual minor diameter is lighter, and the weir portion 26 of therefore overflowing enters the right ventricle.The particulate that moves to the right ventricle is sneaked in the water as recirculated water.As long as mean particle dia is about 50 μ m, the particulate of being sneaked into recirculated water can not play negative interaction in recirculated water uses.Therefore, preferably the height of weir portion 26 makes diameter greater than the particulate of the 50 μ m weir portion 26 of can not overflowing.
Regulate after the temperature in heat exchanger 40, water is supplied to current flange 20 as water W1.Water W1 is used for forming moisture film A on the inner surface of cylindrical body 18 and form moisture film on the inner circumferential surface of pipe 22.Then, water is returned circulating box 25.The part water that temperature has been conditioned in heat exchanger 40 is fed into the water spraying mechanism 31b of cleaning part 31, and is returned to circulating box 25.In addition, the part water that has been conditioned in heat exchanger 40 of temperature is fed into the water spraying mechanism 28 that forms moisture film on the inner circumferential surface of pipe 22.After this, water is returned circulating box 25.In this manner, carry out the water circulation.Because the employed most of water of device 10 runnings is recirculated water, so combustion-type exhaust gas treatment apparatus 10 has the very small amount of urban water supply of supply or the advantage of water for industrial use of being used for of needs.In addition, because water is reused as recirculated water, even water becomes the hydrofluoric acid of dilution after cleaning waste gas, this acid can not be discharged to device 10 outsides yet.
The part cooling water that is fed into heat exchanger 40 is fed into the not shown cooling water path that is arranged in the burning processing section 11 as cooling water W2.This water W2 is used for cooling exhaust and handles burner 12.The part water that is transmitted by pump 30 is fed into circulating box 25 as water W3, makes water W3 flow into circulating box 25 from the sidepiece of circulating box 25.The water dam part 26 that flows into circulating box 25 washes away the byproduct that is deposited on circulating box 25 bottoms, is stopped up by byproduct thereby prevent to manage 22 lower ending opening.
Combustion-type exhaust gas treatment apparatus 10 comprises the temperature sensor 41 that is positioned on the cylindrical body 18, and utilizes the temperature of temperature sensor 41 monitoring cylindrical bodies 18 to raise.If water break appears in the inner surface at cylindrical body 18, disappear in this part thermal resistance effect.In this case, cylindrical body 18 directly contacts with high-temp waste gas, and this may cause damaging the inner surface of cylindrical body 18.In order to detect this situation, temperature sensor 41 is set on cylindrical body 18 to guarantee security.
On the part of the support that is used as cylindrical body 18, leak sensor 42 is set.If cylindrical body 18 destroyed and formation through holes, leak sensor 42 can detect the existence of this through hole.In this manner, leak sensor 42 is set and strengthens security.
Although described some preferred embodiment of the present invention, it should be understood that to the invention is not restricted to the foregoing description, can carry out multiple remodeling or change not departing under the scope of the invention situation.
Claims (12)
1. combustion-type exhaust gas treatment apparatus comprises:
Be used for burning processing section that waste gas is burnt and handles;
Be used for cooling off cooling segment at the processed waste gas in described burning processing section; And
Be used for water and clean waste gas to remove the cleaning part that the byproduct that is produced is handled in burning;
Wherein, described burning processing section comprises:
The exhaust-gas treatment burner;
Be made of metal and have the body of rough inner-surface, the burning of waste gas is handled and is carried out in described body; And
Be applicable to that the moisture film that forms moisture film on the described inner surface of described body forms mechanism.
2. combustion-type exhaust gas treatment apparatus as claimed in claim 1 is characterized in that, the described inner surface of described body has upper end from described body to the constant cylinder form of bottom diameter.
3. combustion-type exhaust gas treatment apparatus as claimed in claim 1 is characterized in that, the described inner surface of described body has the cone shape that reduces gradually from upper end to the bottom diameter of described body.
4. combustion-type exhaust gas treatment apparatus as claimed in claim 1 is characterized in that, also comprises:
Be arranged on the circulating box in described body downstream, described circulating box links to each other with described cooling segment.
5. combustion-type exhaust gas treatment apparatus as claimed in claim 4 is characterized in that, described circulating box has the weir portion of the byproduct circulation that prevents to have preliminary dimension.
6. combustion-type exhaust gas treatment apparatus as claimed in claim 4 is characterized in that, described cooling segment comprises:
Be configured to described body lower end and interconnective first pipe of described circulating box;
Branch to second pipe of described cleaning part from described first pipe; And
Be applicable to the mechanism that on the inner surface of described first pipe and described second pipe, forms moisture film.
7. combustion-type exhaust gas treatment apparatus as claimed in claim 6 is characterized in that:
Described second pipe is inclined upwardly from the part of described second pipe by the described first pipe bifurcated; And
Be provided for water spraying mechanism to the described inner surface water spray of described second pipe.
8. combustion-type exhaust gas treatment apparatus as claimed in claim 6 is characterized in that, also comprises:
Be arranged on fin or baffle plate on described first pipe or the described inner surface of described second pipe.
9. combustion-type exhaust gas treatment apparatus as claimed in claim 4 is characterized in that, also comprises:
The water that is used for being stored in described circulating box is supplied with supply pipe and the pump that described moisture film forms mechanism, described cleaning part and described cooling segment; And
The heat exchanger that is connected with described supply pipe.
10. combustion-type exhaust gas treatment apparatus as claimed in claim 9 is characterized in that, the water that has been fed into described moisture film formation mechanism and described cleaning part is returned to described circulating box by described cooling segment.
11. combustion-type exhaust gas treatment apparatus as claimed in claim 1 is characterized in that, also comprises:
Be arranged on the temperature sensor on the described body, described temperature sensor is used to detect the temperature rising of described body.
12. combustion-type exhaust gas treatment apparatus as claimed in claim 1 is characterized in that, also comprises:
Be used to detect the leak sensor of leakage of the water of described body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP328248/2006 | 2006-12-05 | ||
| JP2006328248 | 2006-12-05 | ||
| JP296395/2007 | 2007-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101251259A true CN101251259A (en) | 2008-08-27 |
Family
ID=39692031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101964659A Pending CN101251259A (en) | 2006-12-05 | 2007-12-05 | Combustion-type exhaust gas treatment apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4937886B2 (en) |
| KR (1) | KR101375202B1 (en) |
| CN (1) | CN101251259A (en) |
| TW (1) | TWI406700B (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103299131A (en) * | 2011-08-19 | 2013-09-11 | 大阳日酸株式会社 | Combustion detoxifying device |
| CN104046956A (en) * | 2013-03-14 | 2014-09-17 | 友荃科技实业股份有限公司 | Combustion type harmful gas treatment device |
| TWI487872B (en) * | 2013-02-08 | 2015-06-11 | ||
| CN107429914A (en) * | 2015-03-12 | 2017-12-01 | 株式会社荏原制作所 | Emission-control equipment |
| CN110195694A (en) * | 2018-02-26 | 2019-09-03 | 株式会社荏原制作所 | Wet type is removed the evil device |
| CN110461437A (en) * | 2017-01-06 | 2019-11-15 | 阿尔泽塔公司 | System and method for improving emission abatement |
| CN110678249A (en) * | 2017-04-04 | 2020-01-10 | 爱德华兹有限公司 | Purge gas feed device, abatement system and method of modifying an abatement system |
| CN111237786A (en) * | 2017-07-07 | 2020-06-05 | 鉴锋国际股份有限公司 | Device and system for controlling decomposition and oxidation of gas pollutants |
| CN111495598A (en) * | 2020-04-26 | 2020-08-07 | 安徽顺达环保科技股份有限公司 | Device and method for stably maintaining water film uniformity of wet electric dust collector |
| CN115183252A (en) * | 2022-07-28 | 2022-10-14 | 上海协微环境科技有限公司 | Tail gas treatment device |
| CN115193234A (en) * | 2022-07-28 | 2022-10-18 | 上海协微环境科技有限公司 | NO remover and semiconductor tail gas treatment equipment |
| CN116571011A (en) * | 2023-05-29 | 2023-08-11 | 上海协微环境科技有限公司 | Dehumidification cyclone device and tail gas treatment system |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7854792B2 (en) * | 2008-09-17 | 2010-12-21 | Airgard, Inc. | Reactive gas control |
| KR101253698B1 (en) * | 2010-08-06 | 2013-04-11 | 주식회사 글로벌스탠다드테크놀로지 | Burning apparatus for purifying noxious gas |
| JP2013204923A (en) * | 2012-03-28 | 2013-10-07 | Daihatsu Motor Co Ltd | Evaporator for vehicle |
| JP6196481B2 (en) | 2013-06-24 | 2017-09-13 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| GB2528444B (en) * | 2014-07-21 | 2018-06-20 | Edwards Ltd | Abatement apparatus |
| GB2528445B (en) | 2014-07-21 | 2018-06-20 | Edwards Ltd | Separator apparatus |
| JP6659461B2 (en) * | 2016-05-23 | 2020-03-04 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP6659471B2 (en) * | 2016-06-08 | 2020-03-04 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP6836351B2 (en) * | 2016-08-18 | 2021-02-24 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP6895342B2 (en) | 2016-08-19 | 2021-06-30 | 株式会社荏原製作所 | Burner head for exhaust gas treatment equipment and its manufacturing method, and combustion chamber for exhaust gas treatment equipment, its manufacturing method and maintenance method |
| TWI754084B (en) * | 2017-08-03 | 2022-02-01 | 日商荏原製作所股份有限公司 | Exhaust gas treatment apparatus |
| JP2020034180A (en) * | 2018-08-27 | 2020-03-05 | 国立大学法人埼玉大学 | Combustion furnace of harmful exhaust gas processing device using alternating electric fields |
| CN113058360B (en) * | 2021-03-17 | 2022-06-21 | 北京京仪自动化装备技术股份有限公司 | Online detachable waste gas treatment device |
| CN113058356B (en) * | 2021-03-17 | 2022-06-21 | 北京京仪自动化装备技术股份有限公司 | Waste gas treatment device for semiconductor DPY (differential pressure Y) process |
| JP2024053878A (en) | 2022-10-04 | 2024-04-16 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4320044A1 (en) * | 1993-06-17 | 1994-12-22 | Das Duennschicht Anlagen Sys | Process and device for cleaning exhaust gases |
| TW496764B (en) * | 2001-03-23 | 2002-08-01 | Winbond Electronics Corp | Highly efficient cleaning device for reducing waste gas in the atmosphere |
| DE10342692B4 (en) * | 2003-09-09 | 2006-01-12 | DAS-Dünnschicht Anlagen Systeme GmbH Dresden | Device for the thermal treatment of pollutants containing process gases |
| DE102004047440B4 (en) * | 2004-09-28 | 2007-11-08 | Centrotherm Clean Solutions Gmbh & Co.Kg | Arrangement for the purification of toxic gases from production processes |
-
2007
- 2007-11-15 JP JP2007296395A patent/JP4937886B2/en active Active
- 2007-12-04 TW TW096146016A patent/TWI406700B/en active
- 2007-12-04 KR KR1020070124919A patent/KR101375202B1/en active IP Right Grant
- 2007-12-05 CN CNA2007101964659A patent/CN101251259A/en active Pending
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103299131B (en) * | 2011-08-19 | 2015-10-07 | 大阳日酸株式会社 | Burn device of removing the evil |
| CN103299131A (en) * | 2011-08-19 | 2013-09-11 | 大阳日酸株式会社 | Combustion detoxifying device |
| TWI487872B (en) * | 2013-02-08 | 2015-06-11 | ||
| CN104046956A (en) * | 2013-03-14 | 2014-09-17 | 友荃科技实业股份有限公司 | Combustion type harmful gas treatment device |
| CN107429914A (en) * | 2015-03-12 | 2017-12-01 | 株式会社荏原制作所 | Emission-control equipment |
| CN107429914B (en) * | 2015-03-12 | 2019-06-11 | 株式会社荏原制作所 | Emission-control equipment |
| CN110461437A (en) * | 2017-01-06 | 2019-11-15 | 阿尔泽塔公司 | System and method for improving emission abatement |
| CN110678249A (en) * | 2017-04-04 | 2020-01-10 | 爱德华兹有限公司 | Purge gas feed device, abatement system and method of modifying an abatement system |
| CN110678249B (en) * | 2017-04-04 | 2022-06-03 | 爱德华兹有限公司 | Purge gas feed device, abatement system and method of modifying an abatement system |
| TWI794220B (en) * | 2017-04-04 | 2023-03-01 | 英商愛德華有限公司 | Purge gas feeding means, abatement systems and methods of modifying abatement systems |
| CN111237786A (en) * | 2017-07-07 | 2020-06-05 | 鉴锋国际股份有限公司 | Device and system for controlling decomposition and oxidation of gas pollutants |
| CN111237786B (en) * | 2017-07-07 | 2022-04-29 | 鉴锋国际股份有限公司 | Device and system for controlling decomposition and oxidation of gas pollutants |
| CN110195694A (en) * | 2018-02-26 | 2019-09-03 | 株式会社荏原制作所 | Wet type is removed the evil device |
| CN111495598A (en) * | 2020-04-26 | 2020-08-07 | 安徽顺达环保科技股份有限公司 | Device and method for stably maintaining water film uniformity of wet electric dust collector |
| CN115183252A (en) * | 2022-07-28 | 2022-10-14 | 上海协微环境科技有限公司 | Tail gas treatment device |
| CN115193234A (en) * | 2022-07-28 | 2022-10-18 | 上海协微环境科技有限公司 | NO remover and semiconductor tail gas treatment equipment |
| CN115183252B (en) * | 2022-07-28 | 2023-05-05 | 上海协微环境科技有限公司 | Tail gas treatment device |
| CN116571011A (en) * | 2023-05-29 | 2023-08-11 | 上海协微环境科技有限公司 | Dehumidification cyclone device and tail gas treatment system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008161861A (en) | 2008-07-17 |
| KR101375202B1 (en) | 2014-03-17 |
| TWI406700B (en) | 2013-09-01 |
| JP4937886B2 (en) | 2012-05-23 |
| KR20080052414A (en) | 2008-06-11 |
| TW200835545A (en) | 2008-09-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101251259A (en) | Combustion-type exhaust gas treatment apparatus | |
| US8591819B2 (en) | Combustion-type exhaust gas treatment apparatus | |
| TWI680792B (en) | Exhaust gas treating device | |
| US7985379B2 (en) | Reactor design to reduce particle deposition during process abatement | |
| JP5644109B2 (en) | Method for producing boron-containing glass product and method for purifying exhaust gas generated during production of boron-containing glass product | |
| US8246732B2 (en) | Exhaust gas cleaning apparatus | |
| TWI665417B (en) | Vacuum pump with abatement function | |
| EP1143197A1 (en) | Exhaust gas treating device | |
| JP4522895B2 (en) | Exhaust gas cleaning cooling tower | |
| KR20010093132A (en) | Exhaust gas treating device | |
| US20010048902A1 (en) | Treatment system for removing hazardous substances from a semiconductor process waste gas stream | |
| CN109821373A (en) | A kind of plasma emission-control equipment and method | |
| JP6659471B2 (en) | Exhaust gas treatment equipment | |
| EP3502560B1 (en) | Burner head for exhaust gas treatment device and method for manufacturing same, and combustion chamber for exhaust gas treatment device, and manufacturing method and maintenance method for same | |
| JP2012508105A (en) | Removal system with improved spill scrubbing and moisture control | |
| JP2010014322A (en) | Exhaust gas combustion type detoxifying apparatus | |
| JP6836351B2 (en) | Exhaust gas treatment equipment | |
| CN208260532U (en) | A kind of gas cleaning reactor and flue gas purification system | |
| JP2010037122A (en) | Manufacturing apparatus of porous glass preform and manufacturing method of porous glass preform | |
| KR200246792Y1 (en) | Apparatus for the burn and wet disposal process of waste gas | |
| JP2013166146A (en) | Exhaust gas cleaning method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20080827 |