CN101235938A - Gas delivery device - Google Patents
Gas delivery device Download PDFInfo
- Publication number
- CN101235938A CN101235938A CNA2007100047578A CN200710004757A CN101235938A CN 101235938 A CN101235938 A CN 101235938A CN A2007100047578 A CNA2007100047578 A CN A2007100047578A CN 200710004757 A CN200710004757 A CN 200710004757A CN 101235938 A CN101235938 A CN 101235938A
- Authority
- CN
- China
- Prior art keywords
- transporting arrangement
- air transporting
- pipe fitting
- clack box
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 63
- 239000010959 steel Substances 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 12
- 229910001220 stainless steel Inorganic materials 0.000 claims description 10
- 239000010935 stainless steel Substances 0.000 claims description 10
- 241000270295 Serpentes Species 0.000 claims description 3
- 210000001015 abdomen Anatomy 0.000 claims description 3
- 230000001276 controlling effect Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 45
- 238000005516 engineering process Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000003570 air Substances 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- ZWAOHEXOSAUJHY-ZIYNGMLESA-N doxifluridine Chemical compound O[C@@H]1[C@H](O)[C@@H](C)O[C@H]1N1C(=O)NC(=O)C(F)=C1 ZWAOHEXOSAUJHY-ZIYNGMLESA-N 0.000 description 1
- 229950005454 doxifluridine Drugs 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
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Abstract
The invention relates to a gas delivery device, which comprises a valve box body, a lifting device and a plurality of pipe fittings, wherein the lifting device is connected to the valve box body, and the pipe fittings are connected between the valve box body and points of use. The position of the valve box body can be regulated by aid of controlling the lifting device.
Description
Technical field
The invention relates to a kind of semiconductor manufacturing equipment, and particularly relevant for a kind of air transporting arrangement.
Background technique
Increasingly sophisticated along with semiconductor technology, the employed process gas kind of semiconductor factory is also more and more.Semiconductor technology comprise as dry etching, oxidation, ion cloth plant, thin film deposition etc. all uses considerable gas, the purity of gas then has decisive influence to element function, product yield.In addition, the Security of the gas supply safety of operator's health and factory's running that then concerns.Gas generally can simply be divided into bulk gas (Bulk Gases), as N
2, H
2, O
2, the bigger gas of use amount such as Ar, and special gas (Specialty Gases).
General bulk gas N
2, O
2, method of supplying that Ar is commonly used is based on fixed large-scale bucket groove, and the bucket groove is placed near the plant area, framework is supply area independently, regularly fills out filling with tank car, the liquid gas of high pressure is after evaporator evaporation is gaseous state, supply is on-the-spot to be used.
As for special gas (Specialty Gases), as SiH
4, AsH
3, PH
3... etc., present almost all is to supply in the mode of steel cylinder.Generally commonly used is high-pressure cylinder, but can be divided into gaseous state and liquid steel cylinder again according to the gas characteristic of filling in the steel cylinder.
At special gas, usually design places steel cylinder in the gas cabinet (Gas Cabinet), see through pipe fitting again and supply gas near on-the-spot clack box (VMB, Valve Manifold Box), then enter the use point (POU, Point of Use) of technology board again.Gas utilized independently gas control panel (GB, Gas Box) and technology controlling and process module line before entering the board cavity, and carried out the control of flow and the mixed proportion control of air inlet with matter stream controller (MFC, Mass Flow Controller).
Present Y type gas cylinder widespread usage (SiH for example in the supply system of big consumption special gas
4, NH
3, NF
3...), (350L～440L), and therefore weight can't place gas cabinet with steel cylinder and gas card simultaneously near 1000 kilograms, the present practice is to coat a clack box at the cylinder joint place, to prevent gas leakage yet Y type gas cylinder is bulky.
Fig. 1 is the clack box device schematic representation in known a kind of air transporting arrangement, and clack box 100 is connected in steel cylinder (not illustrating) and uses between the point (not illustrating).Clack box 100 is arranged with supporting frame 110, is used for supporting clack box 100.Pipe fitting 120,122,124,126,128 is communicated in the clack box 100.Pipe fitting 124 is responsible for being sent to the use point via the process gas of clack box 100.And pipe fitting 124 is arranged in clack box 100 and has flexual connector portions 124a.This connector portions 124a is connected with the joint of steel cylinder.130 of fixing frames are used for fixing pipe fitting 120,122,124,126,128.
Because the size difference of the steel cylinder that manufacturer provided, so also difference to some extent of the height that steel cylinder is mounted to clack box 100.Yet, because the height of supporting frame 110 is fixed, make the position of clack box 100 fix, therefore when being installed, steel cylinder will cause great inconvenience.And clack box 100 is in order to cooperate the height of steel cylinder, must the flexual connector portions 124a of the pipe fitting 124 that is arranged in clack box 100 be adjusted.But limited because of clack box 100 size, so that pipe fitting 124 is arranged in the flexual connector portions 124a elasticity of clack box 100 is less,, the situation generation of gas leak is just arranged easily in case flexual connector portions 124a does not have the appropriate joint that is installed in steel cylinder.
Summary of the invention
The invention provides a kind of air transporting arrangement, be difficult to the problem of one size fits all with the size size differences different and indivedual steel cylinders that solve the steel cylinder that clack box provides for the former material merchant of difference.
For addressing the above problem, the present invention proposes a kind of air transporting arrangement, is applicable to that the dispensing process gas is to using a little.This air transporting arrangement comprises clack box main body, lowering or hoisting gear and first pipe fitting.Lowering or hoisting gear connects the clack box main body, to adjust the position of clack box main body.First pipe fitting is connected in the clack box main body and uses between the point.
According to the described air transporting arrangement of the preferred embodiments of the present invention, more comprise steel cylinder, this steel cylinder is deposited process gas, and the joint of steel cylinder is arranged in the clack box main body.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the first above-mentioned pipe fitting connects the joint of steel cylinder.
According to the described air transporting arrangement of the preferred embodiments of the present invention, above-mentioned steel cylinder can be Y type gas cylinder.
According to the described air transporting arrangement of the preferred embodiments of the present invention, above-mentioned lowering or hoisting gear can be jack.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the first above-mentioned pipe fitting is made of the pliability pipe.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the first above-mentioned pipe fitting has first buffer part, uses so that the height of the first pipe fitting proportioning valve box main body stretches.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the first above-mentioned buffer part becomes spring-like by the pliability canal curvature and constitutes.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the material of the first above-mentioned pipe fitting comprises stainless steel.
According to the described air transporting arrangement of the preferred embodiments of the present invention, more comprise second pipe fitting.Second pipe fitting is connected in the clack box body, in order to the intrinsic gas of discharging clack box.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the second above-mentioned pipe fitting has second buffer part, uses so that the height of the second pipe fitting proportioning valve box main body stretches.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the second above-mentioned buffer part is made of the pliability pipe.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the second above-mentioned buffer part is made of snake belly tube.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the material of the second above-mentioned pipe fitting comprises stainless steel.
According to the described air transporting arrangement of the preferred embodiments of the present invention, more comprise a plurality of the 3rd pipe fittings.These the 3rd pipe fittings connect clack box bodies, in order to supply gas to the clack box body.
According to the described air transporting arrangement of the preferred embodiments of the present invention, above-mentioned a little the 3rd pipe fittings are made of the pliability pipe respectively.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the 3rd above-mentioned pipe fitting respectively has the 3rd buffer part, uses so that the height of the 3rd pipe fitting proportioning valve box main body stretches.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the 3rd above-mentioned buffer part becomes spring-like by the pliability canal curvature and constitutes.
According to the described air transporting arrangement of the preferred embodiments of the present invention, the material of the 3rd above-mentioned pipe fitting comprises stainless steel.
In air transporting arrangement of the present invention, owing to be provided with lowering or hoisting gear to adjust the height of clack box main body, the size size differences different and indivedual steel cylinders that therefore can solve the steel cylinder that clack box provides for the former material merchant of difference are difficult to the problem of one size fits all.
And, in air transporting arrangement of the present invention, make flexible buffer part because but each pipe fitting that is connected with the clack box main body is provided with the position of proportioning valve box main body, therefore can be convenient to the steel cylinder collocation different and use, increase the convenience on using with all size size.Also reduce the chance that the pipe fitting in the script clack box main body causes process gas to leak because of the elasticity deficiency simultaneously.
For above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and cooperate appended graphicly, be described in detail below.
Description of drawings
Fig. 1 illustrates and is the clack box device schematic representation in known a kind of air transporting arrangement.
Fig. 2 illustrates and is the schematic representation according to the height adjustable air transporting arrangement of the preferred embodiment of the present invention.
Fig. 3 illustrate is the schematic representation according to the air transporting arrangement that steel cylinder is installed of the preferred embodiment of the present invention.
[primary component symbol description]
100,200: clack box
110: supporting frame
120,122,124,126,128,220,222,224,226,228: pipe fitting
124a: connector portions
130,230: fixing frame
200a: clack box door
200b: steel cylinder inlet
200c: relief opening
210: lowering or hoisting gear
220a, 222a, 224a, 226a, 228a: buffer part
250: steel cylinder
252: the steel cylinder frame
254: interface
Embodiment
Fig. 2 illustrate is the schematic representation according to the air transporting arrangement of the preferred embodiment of the present invention.Fig. 3 illustrate is the schematic representation according to the air transporting arrangement that steel cylinder is installed of the preferred embodiment of the present invention.
Please be simultaneously with reference to Fig. 2 and Fig. 3, air transporting arrangement of the present invention is applicable to that the dispensing process gas is to using a little.This air transporting arrangement is made of clack box main body 200, lowering or hoisting gear 210, pipe fitting 220,222,224,226,228 and fixing frame 230.
Clack box main body 200 for example is connected in steel cylinder 250 and uses between the point (not illustrating), is used for the process gas that steel cylinder 250 is supplied is sent to the use point.Be provided with the pipe-line system (not illustrating) that is made of valve and pipeline is distributed to the process gas that uses point with control amount in the clack box main body 200.Using point for example is technology boards such as etching machine or deposition machine.The one side of clack box main body 200 is provided with clack box door 200a.This clack box door 200a can open or close clack box main body 200.Clack box door 200a is provided with steel cylinder inlet 200b, makes the joint 254 of steel cylinder 250 and a part of steel cylinder 250 can enter clack box main body 200 inside.Steel cylinder 250 is used to deposit process gas.Steel cylinder 250 for example is arranged on the steel cylinder frame 252.When steel cylinder 250 was installed in the clack box main body 200, the joint 254 of steel cylinder 250 was positioned at clack box main body 200.Steel cylinder 250 for example is a Y type gas cylinder.
Clack box main body 200 for example is arranged on the lowering or hoisting gear 210.Utilize this lowering or hoisting gear 210 can make clack box main body 200 rise or descend, be used for adjusting the position of clack box body 200.Lowering or hoisting gear 210 for example is a jack.Certainly, lowering or hoisting gear 210 also can be any device with lift valve box main body 200.
Pipe fitting 220,222,224,226,228 is connected with clack box main body 200.Fixing frame 230 for example is to be used for fixing pipe fitting 220,222,224,226,228.
Pipe fitting 220 for example is as exhaust port (air exhaust port), and pipe fitting 220 connects the relief opening 200c of lift valve box main body 200, in order to give off the waste gas in the clack box body 200.Pipe fitting 220 is compared with other pipe fittings 222,224,226,228, for example is the bigger Stainless Steel Tube of internal diameter.Pipe fitting 220 for example is provided with buffer part 220a between clack box main body 200 and fixing frame 230, use so that the height of pipe fitting 220 proportioning valve box main bodies 200 is done flexible, crooked.This buffer part 220a comprises the pliability pipe, and this pliability pipe for example is a snake belly tube.And the material of the buffer part 220a of pipe fitting 220 for example is stainless steel, PVC plastic cement, Furtulon etc.
224 of pipe fittings are used for process gas is sent to the use point.Pipe fitting 224 is arranged in clack box body 200 and has telescopic buffer part 224a, uses so that the height of pipe fitting 224 proportioning valve box main bodies stretches.Pipe fitting 224 is compared with pipe fitting 220, for example is the less pliability pipe of internal diameter.Buffer part 224a for example is with the pliability canal curvature, is wound in spring-like and constitutes, so buffer part 224a can stretch up and down.The material of pipe fitting 224 for example is a stainless steel.Pipe fitting 224 is connected to the joint 254 of steel cylinder 250.
The pipe-line system (not illustrating) that 222,226,228 of pipe fittings are supply gas such as air, helium, nitrogen etc. to the clack box main body 200.Pipe-line system (not illustrating) is distributed to the flow of the process gas that uses point and mixed proportion etc. with control.Pipe fitting 222,226,228 for example also is provided with buffer part 222a, 226a, 228a between clack box main body 200 and fixing frame 230, use so that the height of pipe fitting 222,226,228 proportioning valve box main bodies 200 stretches.Pipe fitting 222,226,228 is compared with pipe fitting 220, for example is the less pliability pipe of internal diameter.Buffer part 222a, 226a, 228a for example are with the pliability canal curvature, are wound in spring-like and constitute, so buffer part 222a, 226a, 228a can stretch up and down.The material of pipe fitting 222,226,228 for example is a stainless steel.
In the time will changing steel cylinder 250, the clack box door 200a of clack box main body 200 is opened, and the interface 254 of pipe fitting 224 from steel cylinder 250 is taken off.Then, remove this old steel cylinder 250, and move into new steel cylinder 250.Because new steel cylinder 250 and old steel cylinder 250 may be different because of manufacturer, steel cylinder 250 sizes own are different and/or the distance on different interfaces 254 that cause steel cylinder 250 of steel cylinder frame 252 sizes and ground is different.When interface 254 that therefore will new steel cylinder 250 moved in the clack box main bodys 200, the interface 254 of new steel cylinder 250 and pipe fitting 224 be a segment distance apart, and can't be connected together.At this moment, make clack box main body 200 rise or descend by lowering or hoisting gear 210, can adjust the interface 254 of steel cylinder 250 and the relative position of pipe fitting 224, shorten the distance of interface 254 with the pipe fitting 224 of steel cylinder 250, and can make the interface 254 and pipe fitting 224 good being connected together of steel cylinder 250.
And, when lowering or hoisting gear 210 rises or descends, because pipe fitting 220,222,226,228 has buffer part 220a, 222a, 226a, 228a, this buffer part 220a, 222a, 226a, 228a can bear active force up or down as spring, and pipe fitting 220,222,226,228 can not ruptured because of lowering or hoisting gear 210 rises or descends.Therefore, the air transporting arrangement of the present invention size size differences different and indivedual steel cylinders that can solve the steel cylinder that clack box provides for the former material merchant of difference are difficult to the problem of one size fits all.
In sum, air transporting arrangement of the present invention, utilize lowering or hoisting gear to adjust the height of clack box body, therefore, even the height dimension of steel cylinder itself is difference to some extent, the clack box body also can be adjusted to suitable height accordingly, solved known in because of the clack box body is fixed, be difficult to be applicable to the problem of the steel cylinder that various height or size are different.
And, in air transporting arrangement of the present invention, make flexible buffer part because but each pipe fitting that is connected with the clack box main body is provided with the position of proportioning valve box main body, therefore can be convenient to the steel cylinder collocation different and use, increase the convenience on using with all size size.Also reduce the chance that the pipe fitting in the script clack box main body causes process gas to leak because of the elasticity deficiency simultaneously.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; have in the technical field under any and know the knowledgeable usually; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is as the criterion when looking accompanying the claim person of defining.
Claims (19)
1. an air transporting arrangement is applicable to dispensing one process gas to use point, comprising:
One clack box main body;
One lowering or hoisting gear connects this clack box main body, to adjust the position of this clack box main body; And
One first pipe fitting, this first pipe fitting is connected between this clack box main body and this use point.
2. air transporting arrangement as claimed in claim 1 more comprises a steel cylinder, and this steel cylinder is deposited this process gas, and a joint of this steel cylinder is arranged in this clack box main body.
3. air transporting arrangement as claimed in claim 2, wherein this first pipe fitting connects this joint of this steel cylinder.
4. air transporting arrangement as claimed in claim 2, wherein this steel cylinder comprises Y type gas cylinder.
5. air transporting arrangement as claimed in claim 1, wherein this lowering or hoisting gear comprises a jack.
6. air transporting arrangement as claimed in claim 1, wherein this first pipe fitting is made of a pliability pipe.
7. air transporting arrangement as claimed in claim 1, wherein this first pipe fitting comprises one first buffer part, uses so that this first pipe fitting cooperates the height of this clack box main body to stretch.
8. air transporting arrangement as claimed in claim 1, wherein this first buffer part becomes spring-like by this pliability canal curvature and constitutes.
9. air transporting arrangement as claimed in claim 1, wherein the material of this first pipe fitting comprises stainless steel.
10. air transporting arrangement as claimed in claim 1 more comprises one second pipe fitting, is connected in this clack box body, in order to discharge the intrinsic gas of this clack box.
11. as the air transporting arrangement of claim 10, wherein this second pipe fitting comprises one second buffer part, uses so that this second pipe fitting cooperates the height of this clack box main body to stretch.
12. as the air transporting arrangement of claim 11, wherein this second buffer part is made of the pliability pipe.
13. as the air transporting arrangement of claim 11, wherein this second buffer part is made of snake belly tube.
14. as the air transporting arrangement of claim 10, wherein the material of this second pipe fitting comprises stainless steel.
15. air transporting arrangement as claimed in claim 1 more comprises a plurality of the 3rd pipe fittings, connects this clack box body, in order to supply gas to this clack box body.
16. as the air transporting arrangement of claim 15, wherein those the 3rd pipe fittings are made of a pliability pipe respectively.
17. as the air transporting arrangement of claim 16, wherein each those the 3rd pipe fitting comprises one the 3rd buffer part, uses so that those the 3rd pipe fittings cooperate the height of this clack box main body to stretch.
18. as the air transporting arrangement of claim 16, wherein the 3rd buffer part becomes spring-like by this pliability canal curvature and constitutes.
19. as the air transporting arrangement of claim 15, wherein the material of those the 3rd pipe fittings comprises stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100047578A CN101235938A (en) | 2007-01-30 | 2007-01-30 | Gas delivery device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100047578A CN101235938A (en) | 2007-01-30 | 2007-01-30 | Gas delivery device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101235938A true CN101235938A (en) | 2008-08-06 |
Family
ID=39919748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007100047578A Pending CN101235938A (en) | 2007-01-30 | 2007-01-30 | Gas delivery device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101235938A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114962994A (en) * | 2022-05-10 | 2022-08-30 | 长兴云腾新能源科技有限公司 | Gas conveying device |
-
2007
- 2007-01-30 CN CNA2007100047578A patent/CN101235938A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114962994A (en) * | 2022-05-10 | 2022-08-30 | 长兴云腾新能源科技有限公司 | Gas conveying device |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20080806 |