CN101210803A - Two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measuring device - Google Patents
Two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measuring device Download PDFInfo
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- CN101210803A CN101210803A CNA200610169681XA CN200610169681A CN101210803A CN 101210803 A CN101210803 A CN 101210803A CN A200610169681X A CNA200610169681X A CN A200610169681XA CN 200610169681 A CN200610169681 A CN 200610169681A CN 101210803 A CN101210803 A CN 101210803A
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Abstract
The invention discloses a device for measuring linearity/coaxiality of a two-dimensional transverse dual-frequency Zeeman laser, which comprises a dual-frequency laser source; a telescope, a light splitter, a parallel light splitter, a first two-dimensional Wollaston prism, a second two-dimensional Wollaston prism and a two-dimensional rectangular prism, which are arranged in order on a light path axial line at an emission end of the laser; a second analyzer, a second photoelectric receiver, a third analyzer and a third photoelectric receiver, which are all arranged between the light splitter and the first two-dimensional Wollaston prism; a first analyzer and a first photoelectric receiver both arranged on the reflection light path of the light splitter; and a two-way signal processing unit and a display unit both connected with the three photoelectric receivers. The invention employs the two-dimensional optical elements to replace the conventional one-dimensional optical elements, so as to realize the simultaneous operation of installation, regulation and measurement of the linearity device in horizontal and vertical directions. Therefore, the invention shortens the measurement time, increases the accuracy of installation, and can accurately evaluate the error in linearity/coaxiality of an object to be measured.
Description
Technical field
The present invention relates to the accurate laser measurement technology, relate in particular to a kind of application laser and carry out high precision alignment measurement technology.
Background technology
The measurement of linearity is one of metering project the most basic in how much metering fields, longly has a wide range of applications in fields such as installing and locating, exact instrument manufacturing and the detection of the installation collimation of guide rail, large-scale instrument, large-scale metrology, war products manufacturings apart from straight line degree measurement.Require the coaxality measurement to many groups axle, hole in many engineerings, require to measure and can intermittently carry out, with respect to linearity, coaxality measurement is had higher requirement.
The Yin Chun of Tsing-Hua University waits the people to propose a kind of method of utilizing the graceful two-frequency laser of horizontal match to measure linearity/coaxality forever, utilize one dimension linearity/coaxality interferometer to carry out the measurement of horizontal direction and vertical direction linearity/coaxality respectively, carrying out that horizontal direction is measured and vertical direction is measured when switching, two wollaston prisms of formation interferometer and right-angle prism need revolved and turn 90 degrees.The measurement range of this method reaches 30m.
The implement device of this method as shown in Figure 1, comprise: laterally match graceful stabilized two-frequency laser light source 101, telescope 102, spectroscope 103, the quill 106 of rotatable 90 degree, a pair of glass wedge (not shown), first, second wollaston prism 107,108 and right-angle prism 109, be separately positioned on the reflected light path of this spectroscope 103 and wollaston prism 107 and return first analyzer 104 and first photelectric receiver 105 on the light path, second analyzer 110 and second photelectric receiver 111, and link to each other with two photelectric receivers by signal amplification circuit, the signal processing unit that phaser 112 and computing machine 113 constitute.
Said light source adopts the laterally graceful laser instrument of match, directly two mutually orthogonal linearly polarized lights of outgoing; Said two wollaston prisms 107 and 108, its splitting angle is identical; Said a pair of wedge (not shown) is installed on two end faces of first wollaston prism, regulates them and can proofread and correct from asymmetric with respect to former incident light of the two-beam (two-beam does not separate fully) of first wollaston prism, 107 outgoing; Said second analyzer 110 and second photelectric receiver 111 are fixed on the quill 106, can together rotate with quill 106, and light beam can be received by second photelectric receiver 111 by the non-central aperture of quill 106; Said lasing light emitter 101, telescope 102, spectroscope 103, quill 106, analyzer 104 and 110, photelectric receiver 105 and 112 all are installed on the base (not shown), constitute laser head.
The course of work of said apparatus is: crossed polarized light earlier through spectroscope 103, is divided into two bundles with incident light, and a branch of conduct is with reference to light, another Shu Zuowei measuring light.Reference light synthesizes through first analyzer 104, is received by first photelectric receiver 105 and converts ac signal, i.e. reference signal to.Measuring light is earlier by behind first wollaston prism 107, separate a low-angle, again by behind second wollaston prism 108, become two bundle directional lights, after right-angle prism 109 reflections, more successively by second wollaston prism 108 and first wollaston prism 107, become a branch of light again, synthesize through second analyzer 110, receive by second photelectric receiver 111 and convert ac signal, i.e. measuring-signal to.The mobile meeting perpendicular to optical path direction of first wollaston prism 107 or second wollaston prism 108 makes measuring-signal change with respect to the phase place between reference signal, with phaser 112 reference signal is carried out bit comparison mutually with measuring-signal, the result is delivered to computing machine 113 carry out data processing, just can obtain the amount of movement of first wollaston prism 107 or second wollaston prism 108.
If second wollaston prism 108 and right-angle prism 109 are put in guide rail one end, laser head is put in the other end, adjust light path and make it to be parallel to guide rail, first wollaston prism 107 is moved along guide rail, can record the level of guide rail or the linearity deviation on the vertical direction, first wollaston prism 107 is contained in promptly can be used for coaxality measurement on the specific target.
The measuring principle of this method is: in order to realize interrupted measurement, the optical path difference that produces in range ability changes can not surpass a wavelength, and the variation of signal phase must so just must be done unified consideration to measurement range and resolution in ± 180 °.Get 0.1 ° of corresponding W1 of measuring-signal and reference signal phase change and laterally move 1 μ m, like this concerning wollaston prism 107 and 108:
In the formula: λ: optical maser wavelength
θ: the angle between wollaston prism 107 and 108 two emergent lights
C: the cumulative number of phase place card counters
According to design, S=1 μ m is arranged, λ=0.6328 μ m, C=0.1 °:
θ/2＝0.0025°
Again according to sin (θ/2)=(n
0-n
e) tg β
The angle of wedge of wollaston prism: β=0.28 °
0.1 ° of corresponding wollaston prism 107 of the every variation of signal phase or 108 laterally moves 1 μ m, and on behalf of W1, signal one-period ± 180 ° just move ± 1.8mm, and this measurement range is enough in common linearity/coaxality is measured.When Measurement Phase, because signal can not cross over one-period, guaranteed the monambiguity of reading, and phase measurement is state measurement, wollaston prism shifts out light path, puts back in the light path again, and measurement can also be proceeded, thereby can be used for the measurement of right alignment.
Press above-mentioned parameter, two light beams separate 0.005 ° of angle θ ≈, can calculate at 30m place two beam centers and separate about 2.6mm, the diameter of hot spot own is about about 8mm, thereby in 30m two beam center spacings less than spot radius, two Beam Wave-Front inclination correlativitys have stronger resistibility greater than 0.9 to air turbulence at this moment.For the measurement requirement of longer distance, can redesign the angle of wedge of wollaston prism, reduce the separately angle of two light beams, increased the displacement equivalent like this, reduced sensitivity, can obtain better measurement effect.
Adopting this device to carry out the linearity/coaxality measuring method may further comprise the steps:
1, adopt low frequency differences laterally to match graceful laser instrument and do light source 101, the linearly polarized light of two quadratures of this laser instrument output, their frequency difference is very low, is about 240KHz;
2, this mutually orthogonal linearly polarized light is by behind telescope 102 collimator and extenders, by a spectroscope 103 back separated into two parts light;
3, first's light synthesizes through first analyzer 104, is received by first photelectric receiver 105 and forms reference signal;
4, second portion light penetrates through the central small hole of quill 106, behind first wollaston prism 107, the light that this Shu Guang contains two kinds of frequencies, polarization direction quadrature is divided into and accompanies a low-angle two-beam, again by behind second wollaston prism 108, become two bundle directional lights, this two-beam does not separate fully;
5, after this two bundles directional light was reflected by right-angle prism 109, folded light beam was parallel with incident beam, more successively by becoming a branch of light again behind the wollaston prism 108,107;
6, this Shu Guang penetrates through the non-central aperture of quill 106, synthesizes through second analyzer 110, is received by second photelectric receiver 111 and forms measuring-signal;
7, this measuring-signal is admitted to phaser 112 with the said reference signal of the 4th step and carries out bit comparison mutually, obtains the phase differential of this measuring-signal and reference signal.When wollaston prism 107 or 108 in surface level along having perpendicular to the light ray propagation direction when mobile, the variation of this phase differential has just reflected amount of movement, i.e. the linearity of horizontal direction;
8, right-angle prism is revolved around the input path axis turn 90 degrees, also with respect to original position turned over 90 degree by right-angle prism 109 beam reflected this moment, then again wollaston prism 108,107 is also revolved and turn 90 degrees, making folded light beam pass through them penetrates, the quill 106 that will be fixed with second analyzer 110 and second photelectric receiver 111 then revolves and turn 90 degrees, reflected light still can be received by second photelectric receiver 111 by the non-central aperture of quill 106.This moment when wollaston prism 107 or 108 in vertical plane along having perpendicular to the light ray propagation direction when mobile, the variation of this phase differential has just reflected amount of movement, i.e. the linearity of vertical direction;
9, wollaston prism 107 or 108 is contained on the target of measuring right alignment, target is contained in the measured hole, measure the horizontal direction of each point and the deviation on the vertical direction respectively by preceding method, at last it is combined, promptly obtain the coaxiality deviation measurement result in hole.
The linearity/coaxality measurement range of this method is 1.8mm, resolution 0.1 μ m.The step 8 of this method require with right-angle prism 109, wollaston prism 107 or 108 and quill 106 all manually revolve and turn 90 degrees, one illustrates and can not measure horizontal direction linearity and vertical direction linearity/coaxality simultaneously, need to measure twice, more time-consuming, and can there be fine difference in the reference position that measure to be provided with twice, so the level that measures is not corresponding to identical a series of positions with straight vertical dimension/right alignment.Like this that the linearity/coaxality of both direction is synthetic when estimating its comprehensive linearity/coaxality, just there is error.Two manually rotate and have error, can't guarantee the consistance of angular turn, will introduce new measuring error again because of the installation site is undesirable like this.
Summary of the invention
In order to overcome the deficiency that prior art exists, the object of the present invention is to provide a kind of novel two-dimensional transversal to match graceful double-frequency laser device for measuring straightness/coaxiality by applying, can obtain the phase differential that wollaston prism produces when move perpendicular to the light ray propagation direction on the edge in surface level and vertical plane simultaneously, and then just can obtain the linearity/coaxality of horizontal direction and vertical direction simultaneously.
The technical solution adopted for the present invention to solve the technical problems is: adopt two-dimentional wollaston prism to replace common wollaston prism, two-dimentional right-angle prism to replace ordinary straight angle prism, dual receiver and two-way Phase Processing card to replace rotatable quill and single channel Phase Processing card, increase a spectroscope in the place of double-frequency laser outgoing then, light is divided into transverse axis and the Z-axis that two bundles pass through two-dimentional wollaston prism respectively.
Two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measurement mechanism of the present invention, comprise: the two-frequency laser light source, be successively set on the telescope on the light path axis of this laser instrument transmitting terminal, spectroscope, parallel spectroscope, first two-dimentional wollaston prism, second two-dimentional wollaston prism and two-dimentional right-angle prism, be arranged on second analyzer and second photelectric receiver that receive back light between spectroscope and first the two-dimentional wollaston prism, the 3rd analyzer and the 3rd photelectric receiver, be arranged on first analyzer and first photelectric receiver on this spectroscopical reflected light path, and the two-way signal processing unit and the display unit that link to each other with three photelectric receivers.
The structure and parameter of described first and second two-dimentional wollaston prism is identical, all form by two identical wollaston prisms of splitting angle, become cross-shaped placement, the branch light direction of two prisms is vertical mutually, and can be used as whole moving or rotation, the core of two prisms blocks mutually, and the two ends remainder all is enough to allow laser beam pass through.
Described two-dimentional right-angle prism is made up of two orthogonal right-angle prisms of optical axis, becomes cross-shaped placement, and its core blocks mutually, and the two ends remainder all is enough to allow laser beam pass through.
Said parallel spectroscope is to be formed by a rhombic prism and a right-angle prism gummed, and its effect is that a branch of incident light is separated into the emergent light that two bundles are parallel to each other, and the distance that spatially staggers.
The parameter designing of measuring principle of the present invention and wollaston prism is with existing transversal zeeman double-frequency laser linearity/coaxiality measuring device.
The invention has the beneficial effects as follows, the present invention adopts two-dimensional optical components to replace the one dimensional optical element, make the debugging of linearity Unit Installation and the measurement of horizontal direction and vertical direction once finish, shortened Measuring Time, improved installation accuracy, horizontal direction of measuring and vertical direction linearity/coaxality are corresponding to same measurement point, directly vector is synthetic obtains comprehensive linearity/coaxality, can estimate the linearity/coaxality error condition of testee more accurately.The laser head structure that is made of lasing light emitter, telescope, spectroscope, first analyzer and first photelectric receiver is simple, and instrument size is little.The precision frequency stabilization height of LASER Light Source, the deviation of long distance drift is little.
Description of drawings
Fig. 1 is existing one dimension transversal zeeman double-frequency laser linearity/coaxiality measuring device structural representation.
Fig. 2 is the structural representation of a kind of embodiment of two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measurement mechanism of the present invention, can be used to measure the right alignment of linearity or slotted hole.
Fig. 3 is the structural representation that two-dimentional right-angle prism shown in Figure 2 adopts the prism of Pyramid.
Fig. 4 is the structural representation that two-dimentional right-angle prism shown in Figure 2 adopts square glass and four right-angle prisms.
Fig. 5 is the structural representation of the another kind of embodiment of two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measurement mechanism of the present invention, and available its measured the linearity of guide rail.
Embodiment
The invention will be further described with reference to the accompanying drawings and in conjunction with the embodiments.
Fig. 2 is the structural representation of a kind of embodiment of two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measurement mechanism of the present invention.The two-frequency laser 201 of this device adopts the laterally graceful laser instrument of match, direct two mutually orthogonal linearly polarized lights of outgoing, and the linear polarization component of two different frequencies, direction is respectively level and vertical direction, and all perpendicular to radiation direction.Being successively set on has telescope 202 and a spectroscope 203 on the light path axis of this laser instrument transmitting terminal, and spectroscope is neutral unpolarized spectroscope; Parallel spectroscope 206, form by a rhombic prism and a right-angle prism gummed, plating 50% spectro-film on the right-angle prism inclined-plane of gummed usefulness, an inclined-plane of rhombic prism plates 50% spectro-film, and with the inclined-plane of right-angle prism gummed, another inclined-plane plating total reflection film makes its a branch of incident light be separated into the emergent light that two bundles are parallel to each other, and the distance that spatially staggers; First pair of glass wedge (not shown) is installed in respectively on two emergent light end faces of parallel spectroscope 206, regulates them and can guarantee that two bundle emergent lights are parallel to each other; First two-dimentional wollaston prism 207, form by two identical wollaston prisms of splitting angle, become cross-shaped placement, the branch light direction that guarantees two prisms by Machine Design is vertical mutually, and can be used as whole moving or rotation, the core of two prisms blocks mutually, the two ends remainder all is enough to allow laser beam pass through, the angle of wedge and divide light direction to be called horizontal wollaston prism in surface level in two wollaston prisms, the angle of wedge and branch light direction are called vertical wollaston prism in vertical plane; Second, third is to glass wedge (not shown), be installed in respectively on four end faces of first two-dimentional wollaston prism 207, regulate them and can proofread and correct asymmetric with respect to former incident light of four bundle light from first two-dimentional wollaston prism 207 outgoing, guarantee that its splitting angle is identical; Second two-dimentional wollaston prism 208, its structure and parameter and first two-dimentional wollaston prism 207 identical; Two dimension right-angle prism 209, form by two orthogonal right-angle prisms of optical axis, become cross-shaped placement, its core blocks mutually, the two ends remainder all is enough to allow laser beam pass through, reflected light and incident light are called the straight horizontal angle prism in two right-angle prisms in a surface level, and reflected light and incident light are called the straight vertical angle prism in a vertical plane.Be arranged on second analyzer 210 and second photelectric receiver 211 and the 3rd analyzer 212 and the 3rd photelectric receiver 213 between spectroscope 203 and first the two-dimentional wollaston prism 207, be used for receiving back light.The reflected light path of spectroscope 203 is provided with first analyzer 204 and first photelectric receiver 205.The two-way signal processing card 214 that links to each other with three photelectric receivers links to each other with display unit 215.
Two-way signal processing card 214 is made of signal amplification circuit, two-way phaser and data processor.
Two-frequency laser 201, telescope 202, spectroscope 203, first analyzer 204 and first photelectric receiver 205 are installed on the base (not shown), constitute laser head.
The course of work of this device: crossed polarized light earlier through spectroscope 203, is divided into two bundles with incident light, and a branch of conduct is with reference to light, another Shu Zuowei measuring light.Reference light synthesizes through first analyzer 204, is received by first photelectric receiver 205 and converts ac signal, i.e. reference signal to.Measuring light is earlier by parallel spectroscope 206, be divided into two bundle directional lights, again respectively behind two wollaston prisms of horizontal direction by first two-dimentional wollaston prism 207 and vertical direction, respectively separate a low-angle, again by behind second two-dimentional wollaston prism 208, respectively become two bundle directional lights, incide respectively on the level and vertical direction reflecting prism of two-dimentional right-angle prism 209, pass through second the two-dimentional wollaston prism 208 and the first two-dimentional wollaston prism 207 after the reflection more successively, obtain two bundle directional lights, respectively through second analyzer 210 and the 3rd analyzer 212 is synthetic and second photelectric receiver 211 and the 3rd photelectric receiver 213 receive and convert ac signal, i.e. horizontal direction and vertical direction measuring-signal to.The mobile meeting perpendicular to optical path direction in vertical plane and in the surface level of first two-dimentional wollaston prism 207 or second two-dimentional wollaston prism 208 makes measuring-signal change with respect to the phase place between reference signal, with phaser reference signal is carried out bit comparison mutually with the two-way measuring-signal, the result is delivered to two-way signal processing card 214 carry out data processing, just can obtain the amount of movement of first two-dimentional wollaston prism 207 or second two-dimentional wollaston prism 208.
If second two-dimentional wollaston prism 208 and two-dimentional right-angle prism 209 are put in guide rail (not shown) one end, laser head is put in the other end, adjust light path and make it to be parallel to guide rail, first two-dimentional wollaston prism 207 is moved along guide rail, can record the level of guide rail and the linearity deviation on the vertical direction simultaneously, first wollaston prism 207 is contained in promptly can be used for coaxality measurement on the specific target.
The right alignment that structure shown in Figure 2 can be used to measure linearity or measures slotted hole.
One, the measuring process of measurement linearity is as follows:
1, the Orthogonal Double frequency laser that is sent by two-frequency laser 201 passes through telescope 202 collimator and extenders, is divided into reflected light and transmitted light two parts as incident light by spectroscope 203.Reflected light interferes through first analyzer 204, forms with reference to beat signal, and its phase place does not change in measuring process.This part light path is called reference path.
2, transmitted light is separated into the two-beam that is parallel to each other through parallel spectroscope 206, the light splitting surface of parallel spectroscope 206 and vertical plane in angle of 45 degrees, the two-beam of outgoing all separates certain distance with vertical direction in the horizontal direction like this.
3, a branch of horizontal wollaston prism that passes through in first two-dimentional wollaston prism 207 in this two-beam, the light of two frequency components is separated a little angle, again through the horizontal wollaston prism in second two-dimentional wollaston prism 208, become two bundle directional lights, this two-beam does not separate fully.Return after the reflection of straight vertical angle prism in two-dimentional right-angle prism 209 again, once more by the horizontal wollaston prism in the two-dimentional wollaston prism 208,207, synthetic a branch of light, converted to straight horizontal dimension beat signal through second analyzer, 210 synthetic backs by second photelectric receiver 211, when first two-dimentional wollaston prism 207 when guide rail moves, the phase change of measuring beat signal is just corresponding to the linearity variation of guide rail horizontal direction.
4, in like manner, other a branch of in this two-beam will be by the vertical wollaston prism in first two-dimentional wollaston prism 207, the light of two frequency components is separated a little angle, again through the vertical wollaston prism in second two-dimentional wollaston prism 208, become two bundle directional lights, this two-beam does not separate fully.Return after the reflection of straight horizontal angle prism in two-dimentional right-angle prism 209 again, once more by the vertical wollaston prism in the two-dimentional wollaston prism 208,207, synthetic a branch of light, converted to straight vertical dimension beat signal through the 3rd analyzer 212 synthetic backs by the 3rd photelectric receiver 213, when first two-dimentional wollaston prism 207 when guide rail moves, the phase change of measuring beat signal is just corresponding to the linearity variation of guide rail vertical direction.
5, two measuring-signals that obtain in the step 3,4 are admitted to the two-way phaser with the described reference signal of step 1 and carry out bit comparison mutually, the two-way phaser has synchronous latch function, can write down the phase differential of two-way measuring-signal and reference signal simultaneously, calculate this two phase differential by two-way signal processing card 214.
6, when the platform at first two-dimentional wollaston prism 207 places when guide rail moves, phase differential changes, it changes level and the straight vertical dimension that has just directly reflected guide rail.Measure platform two-way measuring-signal when each position and just obtained the linearity deviation on this guide rail level and the vertical direction after process two-way signal processing card 214 is handled with respect to the phase differential of reference signal.
Two, measure the slotted hole right alignment:
Its structure is an end that the laser head among Fig. 2 is put in tested slotted hole, two-dimentional right-angle prism 209 and second two-dimentional wollaston prism 208 are positioned over the other end of tested slotted hole, measuring the target external diameter of this slotted hole right alignment and the internal diameter of slotted hole equates, first two-dimentional wollaston prism 207 is embedded in the target center, and target is placed in the tested slotted hole and can moves along slotted hole.
Its measuring method is as follows:
1,, calculates the two-way phase differential of horizontal direction and vertical direction by two-way signal processing card 214 with the step 1-5 in above-mentioned " one " item.
2, when the target that first two-dimentional wollaston prism 207 is housed was mobile in tested slotted hole, phase differential changed, and it changes level and the vertical direction right alignment that has just directly reflected slotted hole.Measure target two-way measuring-signal when each position and just obtained the coaxiality deviation on slotted hole level and the vertical direction after process two-way signal processing card 214 is handled with respect to the phase differential of reference signal.
Fig. 3 and Fig. 4 illustrate two kinds of structural representations that two-dimentional right-angle prism 209 can also adopt respectively.Fig. 3 is the prism that adopts Pyramid, and its bottom surface is a square, and two relative sides are vertical mutually.Two-dimentional right-angle prism 209 shown in Figure 4 is formed by a square glass and four right-angle prism gummeds, and the inclined-plane of four right-angle prisms is coated with reflectance coating, as the inclined-plane of arrow indication among Fig. 4.
Fig. 5 is the structural representation of the another kind of embodiment of two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measurement mechanism of the present invention, can be used to measure the linearity of guide rail.
Structurally, only be with the difference of structure shown in Figure 2, by using 4 fixed block (not shown)s that the angle of wedge is identical, make parallel spectroscope 206 wherein, first, second two-dimentional wollaston prism 207,208, two dimension right-angle prism 209 and second, third analyzer 210,212, second, third photelectric receiver 211,213 all have been rotated counterclockwise a θ angle around optical axis and have placed.
Its measuring process is as follows:
1, with the step 1-5 in above-mentioned " one " item, calculates the two-way phase differential by two-way signal processing card 214
With
They can convert the horizontal direction linearity to
With the vertical direction linearity
Promptly
2, when the platform that first two-dimentional wollaston prism 207 is housed was mobile on guide rail, phase differential changed, and it changes the level and the vertical direction linearity that just can convert guide rail to.Measure platform two-way measuring-signal when each position and just obtained the straightness error on guide rail level and the vertical direction after process two-way signal processing card 214 is handled with respect to the phase differential of reference signal.
Claims (9)
1. two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measurement mechanism, comprise: the two-frequency laser light source, be successively set on the telescope on the light path axis of this laser instrument transmitting terminal, spectroscope, it is characterized in that, on light path axis also be disposed with parallel spectroscope thereafter, first two-dimentional wollaston prism, second two-dimentional wollaston prism and two-dimentional right-angle prism, be arranged on second analyzer and second photelectric receiver that receive back light between spectroscope and first the two-dimentional wollaston prism, the 3rd analyzer and the 3rd photelectric receiver, be arranged on first analyzer and first photelectric receiver on this spectroscopical reflected light path, and the two-way signal processing unit and the display unit that link to each other with three photelectric receivers.
2. measurement mechanism according to claim 1, it is characterized in that, described first two-dimentional wollaston prism, form by two identical wollaston prisms of splitting angle, become cross-shaped placement, the branch light direction of two wollaston prisms is vertical mutually, and can be used as whole moving or rotation, the core of two wollaston prisms blocks mutually, and the two ends rest parts all is enough to allow laser beam pass through; The structure and parameter of described second two-dimentional Wollaston and first two-dimentional wollaston prism identical.
3. measurement mechanism according to claim 1, it is characterized in that described two-dimentional right-angle prism is made up of two orthogonal right-angle prisms of optical axis, becomes cross-shaped placement, its core blocks mutually, and the two ends remainder all is enough to allow laser beam pass through.
4. measurement mechanism according to claim 1 is characterized in that, described two-dimentional right-angle prism adopts the prism of a Pyramid, and its bottom surface is a square, and two relative sides are vertical mutually.
5. measurement mechanism according to claim 1 is characterized in that, four right-angle prism gummeds that described two-dimentional right-angle prism adopts square glass and inclined-plane to be coated with reflectance coating form.
6. measurement mechanism according to claim 1, it is characterized in that, described parallel spectroscope is formed by a rhombic prism and a right-angle prism gummed, incident light can be divided into two-beam outgoing parallel to each other, and incide two-dimentional right-angle prism by two two-dimentional wollaston prisms respectively, reflection is returned.
7. measurement mechanism according to claim 6, it is characterized in that, plating 50% spectro-film on the right-angle prism inclined-plane of described parallel spectroscopical gummed usefulness, inclined-plane of rhombic prism plates 50% spectro-film, and with the inclined-plane of right-angle prism gummed, another inclined-plane plating total reflection film makes its a branch of incident light be separated into the emergent light that two bundles are parallel to each other, and the distance that spatially staggers.
8. measurement mechanism according to claim 1, it is characterized in that, described two-way signal processing unit is made of signal amplification circuit, two-way phaser and data processor, two-way receiver in conjunction with second analyzer that is adopted and second photelectric receiver and the 3rd analyzer and the 3rd photelectric receiver formation, sampling latch simultaneously, thus the linearity data of horizontal direction and vertical direction can be obtained simultaneously.
9. measurement mechanism according to claim 1, it is characterized in that, by using 4 fixed blocks that the angle of wedge is identical, make parallel spectroscope, first two-dimentional wollaston prism, second two-dimentional wollaston prism and two-dimentional right-angle prism on light path rotate equal angular jointly, after can doing geometric projection by two linearity data that measure, try to achieve horizontal direction and vertical direction linearity.
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| CN103308004A (en) * | 2013-06-09 | 2013-09-18 | 北京市普锐科创科技有限责任公司 | Laser straightness and displacement measuring device |
| WO2017193680A1 (en) * | 2016-05-13 | 2017-11-16 | 深圳市中图仪器股份有限公司 | Optical system for use in laser interferometer for measuring straightness of guiding rail |
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| CN110057323A (en) * | 2019-04-08 | 2019-07-26 | 上海机电工程研究所 | Turntable Intersection and verticality measurement device and method |
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2006
- 2006-12-27 CN CNB200610169681XA patent/CN100570276C/en not_active Expired - Fee Related
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| CN101915560B (en) * | 2010-06-25 | 2012-09-05 | 北京市普锐科创科技有限责任公司 | Device for measuring straightness/coaxiality by applying laser |
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| CN103308004B (en) * | 2013-06-09 | 2016-01-20 | 北京市普锐科创科技有限责任公司 | The measurement mechanism of a kind of laser linearity and displacement |
| WO2017193680A1 (en) * | 2016-05-13 | 2017-11-16 | 深圳市中图仪器股份有限公司 | Optical system for use in laser interferometer for measuring straightness of guiding rail |
| CN109387823A (en) * | 2018-11-02 | 2019-02-26 | 中国航空工业集团公司洛阳电光设备研究所 | Electro-optic radar laser pick-off optical axis and the inclined test method of infrared optic angle under airborne circumstance |
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| CN110186400A (en) * | 2019-06-28 | 2019-08-30 | 哈尔滨焊接研究院有限公司 | Friction welding coaxial accuracy detection device and its detection method |
| CN112781529A (en) * | 2020-12-25 | 2021-05-11 | 深圳市中图仪器股份有限公司 | Straightness interference measuring device insensitive to incident angle |
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