CN101187589A - Method for regulating magnetic levitation vacuum molecular pump rotor dynamic balance - Google Patents
Method for regulating magnetic levitation vacuum molecular pump rotor dynamic balance Download PDFInfo
- Publication number
- CN101187589A CN101187589A CNA2007103014294A CN200710301429A CN101187589A CN 101187589 A CN101187589 A CN 101187589A CN A2007103014294 A CNA2007103014294 A CN A2007103014294A CN 200710301429 A CN200710301429 A CN 200710301429A CN 101187589 A CN101187589 A CN 101187589A
- Authority
- CN
- China
- Prior art keywords
- rotor
- dynamic balance
- molecular pump
- carried out
- vacuum molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The invention discloses a method for adjusting dynamic balance of a rotor of a magnetic suspension vacuum molecular pump, which particularly comprises first, detecting an actual vibrating signal of a rotor which is obtained by a sensor which is detected on the direction of a rotor of a magnetic bearing, second, collecting rotor speed and phase signal, third, doing an isolating process of direct current composition to the vibrating signal of the rotor which is obtained, fourth, doing a real-time filtering process to the vibrating signal according to the rotor speed, obtaining vibrating signals with the same frequency of the rotor, fifth, finishing corresponding dynamic balance algorism in post period by utilizing a dynamic balancing device or an observation system which is operated in a magnetic suspension vacuum molecular pump, and doing a dynamic balance to the rotor according to the result of the dynamic balance algorism, sixth, repeating the steps until the rotor achieves a needing dynamic balancing accuracy. The method of the invention has the advantages of high accuracy of a vibrating value which is collected and high dynamic balance accuracy, and balancing behavior of the rotor is completely consistent with the final actual operating behavior, which is beneficial for simplifying dynamic balancing equipment.
Description
Technical field
The present invention relates to a kind of adjustment magnetic levitation vacuum molecular pump rotor dynamic balance method.
Background technology
Modern machines is towards high speed, high-level efficiency, high precision and large scale development, in rotating machinery, the rotor oscillation problem has become relatively more outstanding technical matters, and service life of a machine, reliability, behavior in service and working environment are had material impact, and the rotor unbalance that, non-uniform temperature inhomogeneous owing to material, processing and alignment error and structural reason cause is the main excitaton source of rotor oscillation.Transient equilibrium is to determine the size and the position of rotor unbalance by measuring rotor oscillation and certain balanced algorithm, and by increasing the weight of in position accordingly or removing heavily to reduce amount of unbalance.Transient equilibrium is to reduce the vibratory output of rotor in operational process, a kind of effective means of prolongation service life of equipment, also is one of necessary link in the molecular pump production run.
Traditional magnetic levitation vacuum molecular pump rotor dynamic balance method mainly comprises off-line transient equilibrium and two kinds of this motor-driven balances, and the off-line transient equilibrium is before rotor is installed, and rotor is positioned on the dynamic balancing machine, drives rotor rotation carrying out transient equilibrium by drive unit; This motor-driven balance is after the molecular pump assembling is finished, and in the actual moving process of molecular pump, rotor is carried out transient equilibrium.
The off-line transient equilibrium is owing to be rotor to be placed on the dynamic balancing machine be rotated, measure the actual vibration of rotor, but since the bearing position of rotor on dynamic balancing machine often with actual motion in bearing position inconsistent, thereby cause vibrational state in service inconsistent, so the off-line transient equilibrium is difficult to guarantee actual dynamically balanced precision; In addition, in order to obtain higher dynamic balance accuracy, need high transient equilibrium rotating speed, molecular pump rotor is made up of blade, the off-line transient equilibrium is again to carry out in atmospheric environment usually, and its transient equilibrium rotating speed is subjected to certain restriction, improve rotating speed, rotor must be placed vacuum environment, and this can cause transient equilibrium device structure complexity.
For this motor-driven balance,, therefore can effectively overcome the dynamically balanced shortcoming of off-line because the dynamic equilibrium state and the duty of rotor are in full accord, and can carry out transient equilibrium under working speed.But because rotor is installed in the pump case, its actual vibratory output can't directly be measured, usually all be that the vibration measuring probe is attached on the pump case, by measuring the vibration of pump case, come rotor is carried out transient equilibrium, being delivered on the pump case by supporting structure and the vibration of pump case is rotor oscillation, be not the actual vibration of rotor, so its dynamic balance accuracy also can be restricted.
Summary of the invention
Problem at the prior art existence, the purpose of this invention is to provide a kind of adjustment magnetic levitation vacuum molecular pump rotor dynamic balance method, this method has overcome the problem that balance quality is low, balancing speed is low that exists in the off-line transient equilibrium, and this motor-driven balance method can't directly be measured the problem of rotor oscillation.
For achieving the above object, a kind of adjustment magnetic levitation vacuum molecular pump rotor of the present invention dynamic balance method is specially: the actual vibration signal that 1. directly obtains rotor from the rotor position detecting sensor of magnetic bearing; 2. gather rotor speed and phase signal; 3. the rotor oscillation signal that obtains is carried out the isolation processing of direct current composition; 4. according to the rotating speed of rotor, vibration signal is carried out Real-Time Filtering handle, obtain the once per revolution vibration signal of rotor; 5. utilize dynamic balance instrument or in the operation monitoring system of magnetic levitation vacuum molecular pump, finish corresponding transient equilibrium algorithm of later stage, and rotor is carried out transient equilibrium according to the result of balanced algorithm; 6. repeat above steps, reach required dynamic balance accuracy until rotor.
Further, after 4. above-mentioned steps is finished, at first use program control amplification chip, by the software adjustment, vibration signal is carried out processing and amplifying automatically, and then carry out follow-up step.
Technical solution of the present invention has the following advantages:
1. transient equilibrium is to carry out under magnetic bearing supporting situation, and the balance condition of rotor and final actual operating mode are in full accord;
2. directly obtain the actual vibration signal of rotor, the dynamic balance accuracy height from the output of magnetic bearing sensor;
3. adopt tracking filter and program control amplification chip that the rotor oscillation signal is carried out pre-service, can obtain more high-precision vibration values;
4. balancing speed is not subjected to other condition restriction, can choose arbitrarily in the whole working speed scope of molecular pump;
5. help the integration of the operating state monitoring system of transient equilibrium algoritic module and magnetic bearing, help simplifying transient equilibrium equipment.
Description of drawings
Accompanying drawing is depicted as the inventive method and uses synoptic diagram.
Embodiment
As shown in drawings, when using the transient equilibrium of the inventive method adjustment magnetic levitation vacuum molecular pump rotor, at first, directly obtain the actual vibration signal of rotor, gather the rotating speed and the phase signal of rotor simultaneously from the rotor position detecting sensor of magnetic bearing; Then, the rotor oscillation signal that obtains is carried out the isolation processing of direct current composition, and with known manner the rotor oscillation signal is carried out Real-Time Filtering according to the rotating speed of the rotor that collects and phase signal and handle, to obtain the once per revolution vibration signal of rotor with known manner; At last, utilize dynamic balance instrument or in the operation monitoring system of magnetic levitation vacuum molecular pump, finish corresponding transient equilibrium algorithm of later stage, and rotor is carried out transient equilibrium according to the result of balanced algorithm; Repeat above steps, reach required dynamic balance accuracy until rotor.
Wherein, above-mentioned transient equilibrium algorithm can be realized by two kinds of approach: 1, the once per revolution vibration signal that obtains is sent into special-purpose dynamic balance instrument and resolve, obtain the position and the size of amount of unbalance; 2, the once per revolution vibration signal is sent in the operating state monitoring system that magnetic bearing self is equipped with, by being incorporated into position and the size that transient equilibrium algoritic module in this monitoring system obtains amount of unbalance.Concrete solution for dynamic equlibrium method then can be used general influence coefficient method, and finishes according to following steps: 1. add test mass on each balanced surface, the measuring vibrations amount obtains amount of unbalance on each balancing plane to the influence coefficient of rotor oscillation; 2. by corresponding dynamic balance instrument or resolve module, calculate the size and location of amount of unbalance on each balancing plane; 3. on each balancing plane, add corresponding balance mass; 4. measure the residual vibration amount, and assess whether satisfy the balance quality requirement,, respectively go on foot balance once more more than the repetition, satisfy the balance quality requirement until the residual vibration amount if do not meet the demands.Further, after 4. above-mentioned steps is finished, at first use program control amplification chip, by the software adjustment, vibration signal is carried out processing and amplifying automatically, and then carry out follow-up step.
In the said method, the rotor of rotor and phase signal can adopt various known manner to gather, as utilize mode or the mode of laser or the mode of inductance measurement of infrared probe, or the like.
After obtaining the vibration signal of rotor, at first it is carried out the isolation processing of direct current composition, and then utilize the rotating speed of the rotor that collects and phase signal that vibration signal is carried out the Real-Time Filtering processing, to obtain the once per revolution vibration letter of rotor by known manner.When carrying out Filtering Processing, both can utilize known tracking filter chip vibration signal to be carried out Real-Time Filtering according to the current rotating speed of rotor, method that also can known bandpass filtering is carried out Real-Time Filtering to signal and is handled number, in addition, can also adopt the mode of known software algorithm filtering to carry out.When wherein adopting filtering chip, at first measure the current rotating speed of rotor, the parameter of tracking filter chip is set according to this rotating speed then, make the logical scope of band of its filtering consistent with the frequency of rotor rotation, like this, the output of this filtering chip only comprises the vibration signal of the same frequency rotation of rotor, and does not comprise the vibration signal of other frequency.
Generally speaking, after obtaining the once per revolution vibration signal, also need be by adjusting different enlargement factors, the value of this signal is adjusted in the intermediate range of sampling A input voltage range in the subsequent step, voltage is too small to avoid, sampling back error is big or voltage is excessive, exceeds the input voltage range of sampling A.Specifically can use known mode, promptly utilize program control amplification chip,, vibration signal be carried out processing and amplifying automatically, it is adjusted to required scope by the software adjustment.
Claims (2)
1. adjust the magnetic levitation vacuum molecular pump rotor dynamic balance method for one kind, be specially: 1. directly obtain the actual vibration signal of rotor, 2. gather rotor speed and phase signal from the rotor position detecting sensor of magnetic bearing; 3. the rotor oscillation signal that obtains is carried out the isolation processing of direct current composition; 4. according to the rotating speed of rotor, vibration signal is carried out Real-Time Filtering handle, obtain the once per revolution vibration signal of rotor; 5. utilize dynamic balance instrument or in the operation monitoring system of magnetic levitation vacuum molecular pump, finish corresponding transient equilibrium algorithm of later stage, and rotor is carried out transient equilibrium according to the result of balanced algorithm; 6. repeat above steps, reach required dynamic balance accuracy until rotor.
2. adjustment magnetic levitation vacuum molecular pump rotor dynamic balance method as claimed in claim 1 is characterized in that, after 4. above-mentioned steps is finished, at first use program control amplification chip, by the software adjustment, vibration signal is carried out processing and amplifying automatically, and then carry out follow-up step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103014294A CN101187589A (en) | 2007-12-27 | 2007-12-27 | Method for regulating magnetic levitation vacuum molecular pump rotor dynamic balance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103014294A CN101187589A (en) | 2007-12-27 | 2007-12-27 | Method for regulating magnetic levitation vacuum molecular pump rotor dynamic balance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101187589A true CN101187589A (en) | 2008-05-28 |
Family
ID=39480074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007103014294A Pending CN101187589A (en) | 2007-12-27 | 2007-12-27 | Method for regulating magnetic levitation vacuum molecular pump rotor dynamic balance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101187589A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101951208A (en) * | 2010-09-08 | 2011-01-19 | 中国科学院电工研究所 | Device and method for inhibiting vibration of superconducting magnetic suspension rotor |
| CN102425563A (en) * | 2011-12-08 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Method and system for synchronously inhibiting subcritical vibration of rotor of magnetic suspension molecular pump |
| CN102425559A (en) * | 2011-11-02 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Smooth control method in speed-down process of magnetic suspension molecular pump |
| CN102606505A (en) * | 2012-03-29 | 2012-07-25 | 北京中科科仪股份有限公司 | Magnetic suspension molecular pump rotor floating position selection method and rotor floating control method |
| CN102619772A (en) * | 2012-03-29 | 2012-08-01 | 北京中科科仪股份有限公司 | Selection method for rotor floating position of magnetic suspension molecular pump and rotor floating control method |
| CN102661786A (en) * | 2012-05-22 | 2012-09-12 | 国电联合动力技术有限公司 | Method and device for acquiring and analyzing rotor vibration signal of variable-rotation wind generation set |
| CN102829081A (en) * | 2012-08-28 | 2012-12-19 | 清华大学 | Method for diminishing iso-frequency vibration amplitude in rotation of rotor in magnetic bearing system |
| WO2013083000A1 (en) * | 2011-12-05 | 2013-06-13 | 北京中科科仪股份有限公司 | Method of dynamic balance for magnetic levitation molecular pump (5) |
| CN105222959A (en) * | 2015-09-21 | 2016-01-06 | 天津职业技术师范大学 | Amount of unbalance on-line monitoring in a kind of disc type work processing and De-weight method |
| GB2551337A (en) * | 2016-06-13 | 2017-12-20 | Edwards Ltd | Pump assembly, method and computer program |
| CN113108892A (en) * | 2020-01-09 | 2021-07-13 | 珠海格力电器股份有限公司 | Wear testing method for gas bearing of compressor |
| CN114526864A (en) * | 2021-12-27 | 2022-05-24 | 苏州中科科仪技术发展有限公司 | Dynamic balance debugging pump shell and debugging device and method with same |
| CN117990196A (en) * | 2023-12-28 | 2024-05-07 | 北京中科科仪股份有限公司 | Molecular pump micro-vibration measurement method, system, device, equipment and medium |
-
2007
- 2007-12-27 CN CNA2007103014294A patent/CN101187589A/en active Pending
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101951208B (en) * | 2010-09-08 | 2012-01-25 | 中国科学院电工研究所 | Device and method for inhibiting vibration of superconducting magnetic suspension rotor |
| CN101951208A (en) * | 2010-09-08 | 2011-01-19 | 中国科学院电工研究所 | Device and method for inhibiting vibration of superconducting magnetic suspension rotor |
| CN102425559A (en) * | 2011-11-02 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Smooth control method in speed-down process of magnetic suspension molecular pump |
| CN102425559B (en) * | 2011-11-02 | 2014-06-25 | 北京中科科仪股份有限公司 | Smooth control method in speed-down process of magnetic suspension molecular pump |
| WO2013083000A1 (en) * | 2011-12-05 | 2013-06-13 | 北京中科科仪股份有限公司 | Method of dynamic balance for magnetic levitation molecular pump (5) |
| GB2511985A (en) * | 2011-12-05 | 2014-09-17 | Kyky Technology Co Ltd | Method of dynamic balance for magnetic levitation molecular pump |
| GB2511985B (en) * | 2011-12-05 | 2018-05-23 | Kyky Tech Co Ltd | Method of rotor dynamic balancing for magnetic levitation molecular pump |
| US9479035B2 (en) | 2011-12-05 | 2016-10-25 | Kyky Technology Co., Ltd. | Method of dynamic balancing for magnetic levitation molecular pump |
| US9644634B2 (en) | 2011-12-08 | 2017-05-09 | Kyky Technology Co., Ltd. | Method and system for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor |
| WO2013082998A1 (en) * | 2011-12-08 | 2013-06-13 | 北京中科科仪股份有限公司 | Method and system for synchronously suppressing subcritical vibration of magnetic suspension molecular pump rotor |
| CN102425563B (en) * | 2011-12-08 | 2014-03-12 | 北京中科科仪股份有限公司 | Method and system for synchronously inhibiting subcritical vibration of rotor of magnetic suspension molecular pump |
| GB2511984A (en) * | 2011-12-08 | 2014-09-17 | Kyky Technology Co Ltd | Method and system for synchronously suppressing subcritical vibration of magnetic suspension molecular pump rotor |
| GB2511984B (en) * | 2011-12-08 | 2019-04-10 | Kyky Tech Co Ltd | Method and system for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor |
| CN102425563A (en) * | 2011-12-08 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Method and system for synchronously inhibiting subcritical vibration of rotor of magnetic suspension molecular pump |
| CN102606505B (en) * | 2012-03-29 | 2014-07-02 | 北京中科科仪股份有限公司 | Magnetic suspension molecular pump rotor floating position selection method and rotor floating control method |
| CN102619772A (en) * | 2012-03-29 | 2012-08-01 | 北京中科科仪股份有限公司 | Selection method for rotor floating position of magnetic suspension molecular pump and rotor floating control method |
| CN102606505A (en) * | 2012-03-29 | 2012-07-25 | 北京中科科仪股份有限公司 | Magnetic suspension molecular pump rotor floating position selection method and rotor floating control method |
| CN102661786A (en) * | 2012-05-22 | 2012-09-12 | 国电联合动力技术有限公司 | Method and device for acquiring and analyzing rotor vibration signal of variable-rotation wind generation set |
| CN102829081B (en) * | 2012-08-28 | 2015-07-15 | 清华大学 | Method for diminishing iso-frequency vibration amplitude in rotation of rotor in magnetic bearing system |
| CN102829081A (en) * | 2012-08-28 | 2012-12-19 | 清华大学 | Method for diminishing iso-frequency vibration amplitude in rotation of rotor in magnetic bearing system |
| CN105222959A (en) * | 2015-09-21 | 2016-01-06 | 天津职业技术师范大学 | Amount of unbalance on-line monitoring in a kind of disc type work processing and De-weight method |
| CN105222959B (en) * | 2015-09-21 | 2017-08-11 | 天津职业技术师范大学 | Amount of unbalance on-line monitoring and De-weight method in a kind of disc type work processing |
| GB2551337A (en) * | 2016-06-13 | 2017-12-20 | Edwards Ltd | Pump assembly, method and computer program |
| CN113108892A (en) * | 2020-01-09 | 2021-07-13 | 珠海格力电器股份有限公司 | Wear testing method for gas bearing of compressor |
| CN114526864A (en) * | 2021-12-27 | 2022-05-24 | 苏州中科科仪技术发展有限公司 | Dynamic balance debugging pump shell and debugging device and method with same |
| CN117990196A (en) * | 2023-12-28 | 2024-05-07 | 北京中科科仪股份有限公司 | Molecular pump micro-vibration measurement method, system, device, equipment and medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101187589A (en) | Method for regulating magnetic levitation vacuum molecular pump rotor dynamic balance | |
| CN201514306U (en) | Dynamic balance testing device | |
| CN103217266A (en) | System and method for synchronously acquiring load and response signals of machine tool vibration test | |
| CN101435733B (en) | Laser balance adjusting device | |
| CN103217287B (en) | Rolling support linear feeding system static and dynamic performance proving installation and method of testing | |
| CN102890477A (en) | On-line active dynamic balance measurement and control device and on-line active dynamic balance measurement and control method | |
| CN101639395A (en) | Improved holographic dynamic balancing method of high-speed main shaft | |
| CN107271126B (en) | Rotor modal frequency and modal vibration type online testing device based on magnetic suspension technology | |
| KR100685667B1 (en) | Balancing apparatus | |
| CN107389268B (en) | A kind of multiple spot spot dynamic balance method based on fast algorithm | |
| CN102152173A (en) | System for testing relative dynamic stiffness of complete machine in processing center | |
| CN103048106B (en) | Aeroengine vibration transducer double-wire checking and detecting method and implementation system thereof | |
| KR102224333B1 (en) | An inspection system of spindle run-out in cnc machines and a method thereof | |
| CN103884482A (en) | Vibration testing method and system based on compressor | |
| CN103134639B (en) | Super-miniature rotor dynamic balancing measuring method and equipment for complementing the same | |
| CN106017758A (en) | Online synchronous test device and method for dynamic/static torque of motor | |
| JP2021131367A (en) | Signal processing method, measurement device, and signal processing program | |
| CN103344423A (en) | Micro-vibration vibration isolator damping parameter and rigidity parameter measuring device | |
| KR20220038702A (en) | Methods and drivetrain test benches for detecting imbalance and/or misalignment | |
| CN110873633A (en) | Spindle vibration detection method and system | |
| CN108917912A (en) | The detection system of driver mechanical resonant | |
| CN101949752B (en) | Triaxial adaptive dynamic-balance execution device for centrifuger | |
| CN110044625B (en) | Flywheel bearing dynamic stiffness measuring method | |
| CN116577050A (en) | Method for testing dynamic damping ratio of aero-engine compressor rotor blade | |
| CN114295311A (en) | High acceleration vibration test system based on phase resonance principle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20080528 |