CN101183017A - Laser phase grating interference displacement sensor - Google Patents
Laser phase grating interference displacement sensor Download PDFInfo
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- CN101183017A CN101183017A CNA2007101686742A CN200710168674A CN101183017A CN 101183017 A CN101183017 A CN 101183017A CN A2007101686742 A CNA2007101686742 A CN A2007101686742A CN 200710168674 A CN200710168674 A CN 200710168674A CN 101183017 A CN101183017 A CN 101183017A
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Abstract
The invention provides a laser phase grating interference displacement sensor and comprises a semi-conductor laser, a parallel spring, a transmission grating, a plus or minus 1 level plane reflector, a dispersion prism, an interference optical plane reflector, an extender lens, an opto-electrical receiver and a signal processing circuit. The laser and the transmission grating are respectively fixed on the front bracket and the back bracket of the parallel spring; a connecting bar is connected with the lower end part of the back bracket of the parallel spring and is connected with a measuring bar through a touching ball; the measuring bar is arranged on a bearing and a probe is arranged on the other end of the measuring bar; the beam sent out by the laser passes through the transmission grating, the plane reflector and the dispersion prism sequentially to produce an interference strip and the interference strip is received by the opto-electrical receiver after being expanded by the lens, moreover, an optical signal is converted into an electrical signal and the electrical signal is outputted after being processed by the signal processing circuit. The invention has the characteristics of large measuring range, high measuring precision, simple structure and low cost. The sensor can be used for measuring the superficial outline and the superficial roughness concentration of a workpiece; the measuring range is 0 to 3mm and the resolving capability is up to 6mm.
Description
Technical field
The invention belongs to displacement transducer technology, be specifically related to a kind of laser phase grating interference displacement sensor.
Background technology
Along with the surface profile measurement technology rapid development, for satisfying the requirement of the surface profile measurement that improves day by day, the problem of development wide range, high precision, low-cost displacement transducer becomes most important.Surface profile measurement generally uses inductive displacement transducer, has the problem that measurement range is little, cost is high, precision is low.Present existing wide range profile measurement displacement transducer mainly contains two kinds: the one, utilize profile measurement displacement transducer ([1] Xiao Hong of laser interference principle, the king selects, Xie Tiebang. rolling bearing curved surface profile topography measurement instrument. bearing, 6,2004, p.30～33), compare with grating interference, the laser interferometry precision is subjected to the air composition, pressure, the influence of humidity, the variation of environment is bigger to the measuring accuracy influence of laser interference profile measurement displacement transducer, must measure in real time and compensate the temperature of locus and workpiece during use, its measuring accuracy depends on the precision of frequency stabilization and the quantity and the precision of environmental baseline and various environment measurement sensors.The 2nd, with profile measurement displacement transducer ([2] Jiang Xiangqian of cylindrical grating interference, Li Zhu, Xie Tiebang. the holographic grating interferometric method is measured the theoretical research of curved surface pattern. HUST's journal, 22 (2), 1994, p.60～64), what use in this sensor is cylindrical grating, the cylindrical grating processing difficulties, the installing and locating difficulty is big.
In documents, document [1] is based on laser interference principle measuring wheel profile looks, working range ± 3mm, resolution 10nm, but this system is than complex structure, cost is more expensive than this device, and the laser interferometry precision to be subjected to environmental changes such as the variation influence of air themperature, pressure and relative humidity big.Document [2] cylindrical grating interference sensor, theoretical measurement range 6mm, resolution can reach 1nm.But the radius-of-curvature and the surface quality of strict guarantee cylinder are wanted in cylindrical grating processing, make sensor cost height.Cylindrical grating profile measurement displacement transducer is installed difficulty in addition, and bearing is required height, and installing to make has deviation slightly, and grating can't be interfered, and photoelectric tube can't accept effective signal, causes measuring.And the linearity of its measurement is poor, and measurement range and measuring accuracy all reach the theoretical analysis value far away, and actual measurement range is 1mm, and measuring accuracy is 10nm.
Summary of the invention
The object of the present invention is to provide a kind of laser phase grating interference displacement sensor, characteristics simple in structure, that measurement range is big, measuring accuracy is high and cost is low that this displacement transducer has.
Laser phase grating interference displacement sensor provided by the invention is characterized in that: this sensor comprise semiconductor laser, parallel spring, transmission grating ,+1 grade of plane mirror, baffle plate ,-1 grade of plane mirror, Amici prism, interference light plane mirror, extender lens, photelectric receiver and signal processing circuit;
Parallel spring comprises fore-stock, first to fourth reed, first, second stiffening plate, after-poppet; First, second stiffening plate is between fore-stock and after-poppet, between first stiffening plate and fore-stock, the after-poppet respectively clamping first, second reed is arranged, between second stiffening plate and fore-stock, the after-poppet respectively clamping the 3rd, the 4th reed is arranged, upper and lower two parts symmetry of parallel spring;
Parallel spring is fixed on the base plate, and semiconductor laser is fixed on the fore-stock of parallel spring, and transmission grating is installed on the after-poppet of parallel spring, and back-moving spring one end is installed on the base plate, and the other end is installed in the after-poppet upper end;
Connecting rod is installed in the after-poppet bottom, touches ball and is installed on the connecting rod, and bearing bridge is positioned at fore-stock below, and on bearing bridge, the front end of measuring staff is equipped with probe to measuring staff by Bearing Installation, the rear end with touch ball and contact;
Semiconductor laser, transmission grating, baffle plate and Amici prism are positioned on the same light path successively, and+1 grade of plane mirror and-1 grade of plane mirror symmetry are positioned at the both sides of the transmit direction of semiconductor laser; The interference light plane mirror is positioned on the reflected light path of Amici prism, and the axis of extender lens is by interference light plane mirror center; Photelectric receiver is positioned on the axis of extender lens, and photelectric receiver links to each other with signal processing circuit.
Displacement sensor device of the present invention adopts a transmission-type phase grating as measurement standard, laser beam projects on the grating planar, form+1 ,-1 grade of light by grating diffration, + 1 grade of light is by plane reflection mirror reflection, Amici prism reflection,-1 grade of light is by plane reflection mirror reflection, Amici prism transmission, through the Amici prism reflection+1 grade of light produces interference fringe with interfering through-1 grade of light of Amici prism transmission.Compare with cylindrical grating, the linear phase grating processing and manufacturing of using among the present invention is installed easily, makes sensor construction simple, and cost is low, and measure linear is good.Compare with laser interferometry, the linear phase grating measuring accuracy of using among the present invention is not subjected to the influence of air composition, pressure, humidity; Permission is used under the bigger situation of variation of ambient temperature, and its measuring accuracy depends on the precision of grating itself, and measuring repeatability depends on the heat conductivity of grating chi.The material that arrives involved in the present invention, part are cheap, and involved light channel structure is simple, easily adjust, and realize easily.Displacement Measurement sensor of the present invention has that measurement range is big, measuring accuracy is high, simple in structure, cost is low and do not have the characteristics of assembling error.This sensor can be used for overall size, surface shape error, morphology and the surfaceness of measuring workpieces, and this sensor measurement scope is that 0～3mm, resolution can reach 6nm.
Description of drawings
Fig. 1 is the structural representation of displacement transducer of the present invention;
Fig. 2 is the structural representation of parallel spring;
Fig. 3 is the sensor measurement schematic diagram.
Embodiment
The present invention is further detailed explanation below in conjunction with accompanying drawing and example.
As shown in Figure 1, displacement transducer of the present invention comprise probe 1, measuring staff 2, bearing bridge 3, bearing 4, touch ball 5, connecting rod 6 ,+1 grade of plane mirror 7, baffle plate 8, Amici prism 9, signal processing circuit 10, photelectric receiver 11, extender lens 12, interference light plane mirror 13 ,-1 grade of plane mirror 14, transmission grating 15, back-moving spring 16, parallel spring 17, base plate 18 and semiconductor laser 19.
The present invention has following optimal design parameter:
Grade (1)+1 and the distance between-1 grade of plane mirror center be 40～46mm, distance between two lines of centres and the transmission grating 15 is 23～28mm, + 1 grade of plane mirror and horizontal direction angle are 1～3.5 °, and-1 grade of plane mirror and horizontal direction angle are 1～-3.5 °.
(2) center of Amici prism 9 and+distance between the center of 1 grade of plane mirror is 45～49mm;
(3) interference light plane mirror 13 is 20～25 ° with the horizontal direction angle, and the line of centres of its center and Amici prism 9 and horizontal direction angle are 40～50 °;
(4) photelectric receiver 11 adopts matrix pattern symmetrical expression four-quadrant arrangement mode.
In order to improve the received signal to noise ratio of interference fringe, photelectric receiver 11 adopts matrix pattern symmetrical expression four-quadrant arrangement mode.The phase difference signal that this arrangement is obtained allows the shape and the width of striped to change within the specific limits, the photoelectric tube symmetry is good, and the parameter unanimity is obtained interferometric fringe signal and concentrated, thereby can greatly suppress direct current signal, obtain the photoelectricity differential signal of high s/n ratio.
As shown in Figure 3, the sensor principle is: the light beam that semiconductor laser 19 sends is transmitted to transmission grating 15, form 0 grade ,+1 grade ,-1 grade three beams diffraction light.0 order diffraction light is blocked by baffle plate 8; + 1 order diffraction light is reflected by+1 grade of plane mirror 7, and enters Amici prism 9;-1 order diffraction light is also entered Amici prism 9 by 14 reflections of-1 grade of plane mirror.The reflected light of-1 order diffraction light in Amici prism 9 and+1 order diffraction light transmitted light in Amici prism 9 forms interferes, interference fringe enters extender lens 12 after being changed direction by interference light plane mirror 13, enter photelectric receiver 11 through the interference fringe that expands after restrainting, the output signal of photelectric receiver 11 is exported to signal processing circuit 10.
In measuring process, when sensor probe 1 streaks workpiece 20 surfaces, because surface of the work injustice, probe moves up and down, measuring staff 2 rotates around bearing 4, drive parallel spring after-poppets 24 and drive transmission grating 15 simultaneously and move up and down by touching ball 5 and connecting rod 6, drive moving up and down of transmission grating 15 thereby the measured surface profile varying is converted to displacement signal.Interference fringe is followed mobile, and the striped variable quantity is measured by photelectric receiver 11.This signal removes direct current through signal processing circuit 10, gives subsequent process circuit and Computer Analysis after difference amplification and segmentation, the sensing and handles.
Claims (3)
1. laser phase grating interference displacement sensor is characterized in that: this sensor comprise semiconductor laser (19), parallel spring (17), transmission grating (15) ,+1 grade of plane mirror (7), baffle plate (8) ,-1 grade of plane mirror (14), Amici prism (9), interference light plane mirror (13), extender lens (12), photelectric receiver (11) and signal processing circuit (10);
Parallel spring comprises fore-stock (28), first to fourth reed (21,23,25,27), first, second stiffening plate (22,26), after-poppet (24); First, second stiffening plate (22,26) is positioned between fore-stock (28) and the after-poppet (24), between first stiffening plate (22) and fore-stock, the after-poppet (28,24) respectively clamping reed (21,23) is arranged, between second stiffening plate (26) and fore-stock, the after-poppet (28,24) respectively clamping reed (25,27) is arranged, upper and lower two parts symmetry of parallel spring (17);
Parallel spring (17) is fixed on the base plate (18), semiconductor laser (19) is fixed on the fore-stock (28) of parallel spring (17), transmission grating (15) is installed on the after-poppet (24) of parallel spring (17), back-moving spring (16) one ends are installed on the base plate (18), and the other end is installed in after-poppet (24) upper end;
Connecting rod (6) is installed in after-poppet (24) bottom, touch ball (5) and be installed on the connecting rod (6), bearing bridge (3) is positioned at fore-stock (28) below, and measuring staff (2) is installed on the bearing bridge (3) by bearing (4), the front end of measuring staff (2) is equipped with probe (1), the rear end with touch ball (5) and contact;
Semiconductor laser (19), transmission grating (15), baffle plate (8) and Amici prism (9) are positioned on the same light path successively, and+1 grade of plane mirror (7) and-1 grade of plane mirror (14) symmetry are positioned at the both sides of the transmit direction of semiconductor laser (19); Interference light plane mirror (13) is positioned on the reflected light path of Amici prism (9), and the axis of extender lens (12) is by interference light plane mirror (13) center; Photelectric receiver (11) is positioned on the axis of extender lens (12), and photelectric receiver (11) links to each other with signal processing circuit (10).
2. displacement transducer according to claim 1, it is characterized in that :+1 grade of plane mirror (7) and-1 grade of plane mirror (14) symmetry are positioned at the transmit direction of semiconductor laser (19), wherein+1 grade and the distance between-1 grade of plane mirror center be 40～46mm, distance between two lines of centres and the transmission grating (15) is 23～28mm, + 1 grade of plane mirror and horizontal direction angle are 1～3.5 °, and-1 grade of plane mirror and horizontal direction angle are-1～-3.5 °; The center of Amici prism (9) and+distance between the center of 1 grade of plane mirror is 45～49mm; Interference light plane mirror (13) and horizontal direction angle are 20～25 °, and the line of centres of its center and Amici prism (9) and horizontal direction angle are 40～50 °.
3. displacement transducer according to claim 1 and 2 is characterized in that: photelectric receiver (11) adopts the matrix pattern arrangement mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101686742A CN100535607C (en) | 2007-12-07 | 2007-12-07 | Laser phase grating interference displacement sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101686742A CN100535607C (en) | 2007-12-07 | 2007-12-07 | Laser phase grating interference displacement sensor |
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| CN101183017A true CN101183017A (en) | 2008-05-21 |
| CN100535607C CN100535607C (en) | 2009-09-02 |
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| CNB2007101686742A Expired - Fee Related CN100535607C (en) | 2007-12-07 | 2007-12-07 | Laser phase grating interference displacement sensor |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101290215B (en) * | 2008-06-10 | 2010-06-02 | 浙江大学 | Micro-displacement sensor based on PGC demodulated interferential scanning |
| CN103791844A (en) * | 2014-01-20 | 2014-05-14 | 浙江大学 | Optical displacement measuring system |
| CN105547184A (en) * | 2015-12-23 | 2016-05-04 | 华中科技大学 | Flatness error measurement apparatus and two-dimension scanning workbench thereof |
| CN108020180A (en) * | 2017-11-22 | 2018-05-11 | 郭淑芳 | A kind of surface roughness device for fast detecting |
| CN113175881A (en) * | 2021-04-10 | 2021-07-27 | 西安交通大学 | Measurement device for improve grating reading gap tolerance |
| CN113638852A (en) * | 2021-08-25 | 2021-11-12 | 中国华能集团清洁能源技术研究院有限公司 | Device and method for monitoring inclination of fan tower barrel |
| CN115574722A (en) * | 2022-11-04 | 2023-01-06 | 中国计量科学研究院 | Self-tracing interference type displacement sensor |
-
2007
- 2007-12-07 CN CNB2007101686742A patent/CN100535607C/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101290215B (en) * | 2008-06-10 | 2010-06-02 | 浙江大学 | Micro-displacement sensor based on PGC demodulated interferential scanning |
| CN103791844A (en) * | 2014-01-20 | 2014-05-14 | 浙江大学 | Optical displacement measuring system |
| CN103791844B (en) * | 2014-01-20 | 2016-08-17 | 浙江大学 | optical displacement measurement system |
| CN105547184A (en) * | 2015-12-23 | 2016-05-04 | 华中科技大学 | Flatness error measurement apparatus and two-dimension scanning workbench thereof |
| CN105547184B (en) * | 2015-12-23 | 2018-12-07 | 华中科技大学 | A kind of flatness error measuring device and its two-dimensional scanning workbench |
| CN108020180A (en) * | 2017-11-22 | 2018-05-11 | 郭淑芳 | A kind of surface roughness device for fast detecting |
| CN108020180B (en) * | 2017-11-22 | 2020-06-09 | 江苏万力机械股份有限公司 | Quick detection device of roughness |
| CN113175881A (en) * | 2021-04-10 | 2021-07-27 | 西安交通大学 | Measurement device for improve grating reading gap tolerance |
| CN113175881B (en) * | 2021-04-10 | 2022-06-03 | 西安交通大学 | Measurement device for improve grating reading gap tolerance |
| CN113638852A (en) * | 2021-08-25 | 2021-11-12 | 中国华能集团清洁能源技术研究院有限公司 | Device and method for monitoring inclination of fan tower barrel |
| CN115574722A (en) * | 2022-11-04 | 2023-01-06 | 中国计量科学研究院 | Self-tracing interference type displacement sensor |
| CN115574722B (en) * | 2022-11-04 | 2024-03-29 | 中国计量科学研究院 | Self-tracing interference type displacement sensor |
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| Publication number | Publication date |
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| CN100535607C (en) | 2009-09-02 |
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Granted publication date: 20090902 Termination date: 20131207 |