CN101179878A - Power supply control method and power supply device for electron beam generating system of electron beam bombardment furnace - Google Patents
Power supply control method and power supply device for electron beam generating system of electron beam bombardment furnace Download PDFInfo
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- CN101179878A CN101179878A CNA2007100507317A CN200710050731A CN101179878A CN 101179878 A CN101179878 A CN 101179878A CN A2007100507317 A CNA2007100507317 A CN A2007100507317A CN 200710050731 A CN200710050731 A CN 200710050731A CN 101179878 A CN101179878 A CN 101179878A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention is a control method and a power device used in a process that an electron beam bombards furnace electron beam to produce system power. The method is able to speed up a power open-loop control, and is able to speed up a power pressure and electron beam current sampling signal as a control signal of bombardment power supply, filament power supply and electron beam power, and the electron beam power is steady and easy of being adjusted under a coordinated operation of the three powers. A harmonic is small and has a rather small effect on an electric fence, and power factors and efficiency of the equipment are rather high, and the operation is reliable. A main transformer of an accelerator power supply in the power device is side-connected with three-phase voltage once, and an output terminal is connected with an accelerating voltage bleeder circuit and an electron beam current sampling resistance to output sampling signals. The accelerator power supply further is connected with a thyristor device and a trigger circuit, a soft start controlling circuit, a fault-detecting protection controlling circuit etc. The bombardment power supply comprises a PWM, a bombardment inverter, a bombardment transformer and a bombardment power supply adjustor etc. The filament power supply and the beam power controlling circuit are composed of the PWM, a filament inverter, a filament transformer, a bean power setting potentiometer, a multiplier, a beam power adjustor, a filament power supply adjustor etc.
Description
(1) technical field
The present invention relates to electron beam electric heating and establish each, be specially beam bombardment stove electron beam generation systems power control method and supply unit.
(2) background technology
The beam bombardment stove is a kind of electroheat equipment that the heat energy that produced when utilizing high-velocity electrons bombardments furnace charge carries out melting and heating, it is a kind of physical vacuum that combines, material science, electronic technology, electron optics, high voltage technique, the high-tech product of multiple technologies such as computer and control technology, compare with other vacuum melting furnace, the power density height, can be used for valuable, rare, the melting of refractory metal and concise, vacuum degree height in the stove, easily preparation various high-purity materials or specific alloy and be used for melting high-quality special steel and titanium scrap recovery etc. has the advantage of no refractory material to the furnace charge pollution in addition.The developing direction of beam bombardment stove is high-power, multiple gun, and the separate unit power of this kind equipment has reached 2400kW.
The key technology of beam bombardment stove is electron beam generator (electron gun) and power supply thereof.The beam bombardment stove adopts the axial electron gun of cathodes heated indirectly by an el more, wherein the electron beam generation systems is made up of filament, negative electrode, bunching electrode, anode etc., corresponding with it supply unit comprises filament supply, bombardment power supply and electron beam accelerating power source, and they are operated in negative high-voltage end.
The characteristics of electron beam generation systems power control method and supply unit are in the beam bombardment stove at present:
1) the electron beam accelerating power source is the closed loop voltage-stabilizing system, promptly utilizes thyristor phase shift AC voltage adjusting to control the input voltage of main transformer automatically, makes the accelerating power source output voltage keep stable;
2) control of electronic beam current also is designed to closed-loop system, thereby promptly changes the ability of negative electrode heating power control cathode divergent bundle by self-regulating filament heating current, finally realizes the control of electron beam current stabilization;
3) the stable of beam power realized by above-mentioned accelerating voltage and the independent closed-loop system of electronic beam current two covers.
Beam bombardment stove master power power-supply---accelerating power source adopts thyristor phase shift AC voltage adjusting close-loop control mode to have following major defect inevitably, and is particularly evident for great-power electronic bundle electron-beam furnace.
1) AC side Harmonics of Input amplitude is big, and electrical network is caused severe contamination, forms electric power " public hazards ";
2) phase-shift voltage regulating increases electric current lagging phase angle, power factor step-down;
3) in order to guarantee the regulated quantity requirement, the allowance of main transformer capacity design is bigger, and utilance is on the low side, and the loss of main transformer is bigger, and operational efficiency is not high;
4) the main transformer input voltage waveform is a non-sinusoidal waveform, and higher harmonic voltage, electric current make iron loss increase, and operational efficiency further reduces;
5) main transformer non-sinusoidal waveform power voltage supply makes that the rectifier output voltage ripple is bigger, has increased the difficulty of filtering, finally exports accelerating voltage and still contains higher ripple coefficient;
6) output voltage ripple is unfavorable for that more greatly electron beam focuses on, and reduces the flow rate of electron beam in electron gun, causes the electron gun operating temperature too high, and operational efficiency descends.
In sum, in order to eliminate " public hazards " that beam bombardment stove when operation constitute electrical network and to improve its operational efficiency, must abandon its electron beam generation systems accelerating power source and adopt thyristor phase shift AC voltage adjusting control mode, seek new control method and design new electron beam generation systems supply unit.
(3) summary of the invention
The objective of the invention is to design a kind of beam bombardment stove electron beam generation systems power control method, beam bombardment stove main power source---the electron beam accelerating power source is directly by mains-supplied, the amplitude of the accelerating power source output accelerating voltage of open loop control fluctuates with supply power voltage and load variations, coordinate control filament supply, bombardment power supply by the variable quantity of beam power this moment, allow the servo accelerating voltage inverse change of electronic beam current, make beam power be stable at desired value.
Another object of the present invention is to design a kind of supply unit of beam bombardment stove electron beam generation systems according to above-mentioned control method, the open loop of electron beam accelerating power source is controlled, accelerating voltage sampled signal and electronic beam current sampled signal are as the control signal of bombardment power supply and filament supply, co-ordination between each power supply, make beam power not be subjected to the accelerating voltage variable effect, be convenient to regulate and stable beam power for the beam bombardment stove provides.
The control method of beam bombardment stove electron beam generation systems power supply of the present invention is controlled the open loop of electron beam accelerating power source, accelerating voltage sampled signal and electronic beam current sampled signal are as the control signal of bombardment power supply, filament supply and beam power, accelerating power source, bombardment power supply and filament supply three power supply co-ordinations, make electronic beam current power not be subjected to the influence of accelerating voltage fluctuation, be convenient to regulate and stable beam power for the beam bombardment stove provides.
This control method comprises the control of electron beam accelerating power source, control, the control of filament supply and the control of beam power of bombardment power supply.
The control method of electron beam accelerating power source is open loop control, its boost main transformer input and three-phase mains are straight-through, input voltage is complete three-phase sine-wave, boost after six phase 12 pulsating wave full-wave rectifications obtain uncontrollable high direct voltage, the main transformer input current waveform that boosts is the near sinusoidal ripple; Dc high-voltage output end is connected to sample circuit, exports accelerating voltage sampled signal and electronic beam current sampled signal respectively.
The control method of bombardment power supply is voltage stabilizing control.The bombardment power work is in high-pressure side, power supply and control circuit are at low-pressure end, by AC → DC → AC → DC current transformation mode, realize the transmission of energy, the conversion and the High-Voltage Insulation of magnitude of voltage by the bombardment transformer, adopt pulse-width modulation (PWM) technology to regulate the input of bombardment power supply in direct current intermediate link.The bombardment power regulator is introduced bombardment inverter input voltage negative feedback and input current in low-pressure side and is just being compensated and offset the output voltage fluctuation that load effect etc. causes, make bombarding voltage have harder output characteristic, change with bombarding current hardly, reach the purpose of voltage stabilizing control.
The filament supply control method is the Current Negative Three-Point Capacitance closed-loop control.Filament supply works in high-pressure side, power supply and control circuit are at low-pressure end, by AC → DC → AC current transformation mode, realize the transmission of energy, the conversion and the High-Voltage Insulation of current value by filament transformer, adopt pulse-width modulation (PWM) technology to regulate the input of filament supply in direct current intermediate link.The filament supply adjuster is introduced the negative feedback of filament input current of inverter in low-pressure side, and the given signal of heater current desired value is from the output signal of beam power adjuster in the filament supply adjuster, so heater current is controlled by beam power.
The beam power control method is two closed-loop controls, and interior ring is the heater current adjustable ring, and outer shroud is the beam power adjustable ring.Accelerating voltage is open loop control, and its amplitude of running can change with power network fluctuation and load variations.Beam power equals the product of accelerating voltage and electronic beam current, when the accelerating voltage of open loop control changes, regulates the electronic beam current inverse change automatically, can keep beam power constant.The present invention adopts filament supply and two power supplys of bombardment power supply to jointly control the size of regulating electronic beam current.Negative electrode and filament work in " transition region " of temperature limitation and space charge restriction two states in the beam bombardment stove, it is T=f (W) that negative electrode or filament work temperature and its heating power W have certain functional relation, and there are functional relation in negative electrode or filament emitting electrons beam current density j and its work temperature is j=g (T), regulate filament electrons emitted line (bombarding current) by regulating the filament heating current, this bombardment power supply is voltage stabilizing output, so also just regulated bombardment power (negative electrode heating power), and then regulated the electron beam (melting electron beam) of cathode emission.The beam power adjuster is ratio-integration (PI) adjuster, the product of accelerating voltage and electronic beam current sampled signal is compared as the given signal of beam power feedback signal and desired value and is obtained the power deviation signal, this deviation signal is amplified through the computing of beam power adjuster, the beam power regulator output signal is regulated the filament heating current as the given signal of filament supply adjuster, make and the servo accelerating voltage inverse change of electronic beam current finally realize the stable control of beam power.
The present invention comprises electron beam accelerating power source, bombardment power supply and filament supply by the beam bombardment stove electron beam generation systems supply unit of above-mentioned control method design; Accelerating power source is connected between gun cathode, bunching electrode and the anode, the electron beam that the high voltage electric field of its generation goes out cathode emission quickens, the electric energy that accelerating power source provides changes into the kinetic energy of electron beam, and its kinetic energy was converted into the melting necessary energy when this electron beam was got to target (molten bath); The bombardment power supply is connected between an end of filament and negative electrode, the bunching electrode, the electron beam that the electric field of its generation is launched filament quickens, the electric energy that provides of bombardment power supply changes into the kinetic energy of electron beam, and electron beam kinetic energy was converted into heat energy and makes the negative electrode heating and launch more electron beam when this electron beam was got to negative electrode; Filament supply is connected in the filament two ends, and it makes filament heating divergent bundle.
The electron beam accelerating power source comprises the main transformer that boosts, high-voltage rectifier, high-voltage filtering capacitor, accelerating voltage bleeder circuit, electronic beam current sample resistance.The three-phase mains is straight-through with the first side winding of the main transformer that boosts during operate as normal, and the secondary side of main transformer has two groups of high pressure windings, is respectively star and delta connection, and two groups of three-phase high-voltage winding output line voltages equate; Two groups of three-phase high-voltage alternating currents connect high-voltage rectifier respectively, connect high-voltage filtering capacitor again after two groups of high-voltage rectifier output series connection, and the negative pole of its output is connected to the negative electrode and the bunching electrode of electron gun, and positive pole joins with the earth and anode.The output of output termination accelerating voltage bleeder circuit is proportional to the sampled signal of accelerating voltage, accelerating power source output loop low-pressure end seals in the electronic beam current sample resistance, this resistance two ends output is proportional to the sampled signal of electronic beam current size, and these two signals are as the shows signal of accelerating voltage and electronic beam current and the control signal of other power supply.
Accelerating power source also is connected to thyristor units, thyristor gating circuit, input current detection translation circuit, control of soft circuit and fault detect protection control circuit.The three-phase mains is connected with the first side winding of the main transformer that boosts through thyristor units.Accelerating power source control of soft circuit and fault detect protection control circuit and thyristor gating circuit join.The main transformer input that boosts configuration input current detects translation circuit, and it is converted to d. c. voltage signal in proportion with three-phase input AC electric current, and this signal inserts accelerating power source fault detect protection control circuit.Accelerating voltage sampled signal and electronic beam current sampled signal also insert fault detect protection control circuit.
Accelerating power source control of soft circuit makes it to work in the phase-shift voltage regulating state in start-stop process control thyristor phase shift trigger angle, controls the main transformer input voltage smooth variation of boosting, and realizes the mild lifting of accelerating voltage, avoids the beam bombardment stove to produce hard ray; Fusion process control thyristor units works in the all-pass state, and three-phase mains and main transformer first side winding are straight-through.Fault detect protection control circuit detects and exchanges input current signal, accelerating voltage sampled signal and electronic beam current sampled signal, when arbitrary signal surpasses the thresholding of setting, fault detect protection control circuit blocks the trigger impulse of thyristor units, thyristor units works in cut-off state, cut off power supply rapidly, prevent that fault from further enlarging; Fault detect protection control circuit judges that by detecting the negative kick signal of accelerating voltage sampled signal accelerating power source produces discharge fault in addition; and execute protection operation cut-out power supply, fault detect protection control circuit restarts accelerating power source automatically after time-delay in short-term.
The bombardment power supply comprises input bombardment straightening and filtering unit, bombardment dc pulse width modulation (PWM) device, bombardment inverter input filtering circuit, bombardment inverter, bombardment transformer, bombardment output rectifier and filter, bombarding voltage adjust potentiometer and bombardment power regulator.AC power connects bombardment input rectifying filter, and alternating current converts straight direct current to, and the output of bombardment input rectifying filter inserts bombardment PWM device; The direct current that bombardment PWM device output is adjustable inserts the bombardment inverter behind bombardment inverter input filtering circuit, the bombardment inverter becomes alternating current to dc inverter; The output of bombardment inverter inserts the first side winding of bombardment transformer, and the bombardment transformer is realized the transmission of energy, the conversion and the High-Voltage Insulation function of magnitude of voltage; Export straight direct current after bombardment Circuit Fault on Secondary Transformer winding alternating current connects the bombardment output rectifier and filter, negative electrode and bunching electrode in its positive pole and the electron gun join, and an end of the filament in negative pole and the electron gun joins; Bombardment inverter input termination bombardment bleeder circuit, bombardment bleeder circuit export ratio inserts the bombardment power regulator in the sampled signal of bombardment inverter input voltage as bombardment supply voltage negative-feedback signal, seal in bombardment input current sample resistance in the bombardment inverter input circuit, the voltage signal that this resistance two ends output is proportional to bombardment input current of inverter size inserts the bombardment power regulator as the positive compensating signal of bombarding current; The bombarding voltage potentiometer of adjusting inserts the bombardment power regulator, sends into the bombarding voltage duty setting signal.The output of bombardment power regulator inserts the control end of bombardment PWM device.The bombardment power regulator is ratio-integration (PI) adjuster.The bombardment power regulator is by voltage negative feedback signal and the positive compensating signal of electric current during operate as normal, and control bombardment electric power output voltage value stabilization is in the definite desired value of potentiometer output signal of being adjusted by bombarding voltage.
The bombardment power supply also is connected to bombarding current by negative-feedback circuit, and this circuit also inserts the bombardment power regulator.Bombarding current is inserted by negative-feedback circuit in another road of bombardment input current sample resistance output, when the bombardment power supply breaks down, bombardment input current sampled signal surpasses a certain thresholding, bombarding current is sent strong Current Negative Three-Point Capacitance by negative-feedback circuit to the bombardment power regulator, fault current is limited in the safe range under its effect, after fault was eliminated, the bombardment power regulator recovered normal operating conditions automatically.Bombardment power work electric current is by filament electrons emitted beam control system, i.e. the bombardment power of negative electrode reception is controlled by the filament heating current.
Filament supply and beam power control loop comprise filament input rectifying filter, filament dc pulse width modulation (PWM) device, filament inverter input filtering circuit, filament inverter, filament transformer, beam power adjust potentiometer, multiplier, beam power adjuster and filament supply adjuster.Filament input rectifying filter input termination alternating current, its output inserts filament PWM device; Filament PWM device output inserts the filament inverter behind filament inverter input filtering circuit; The output of filament inverter inserts the first side winding of filament transformer, and filament transformer is realized the transmission of energy, the conversion and the High-Voltage Insulation function of current value; Electron gun filament adopts Alternating Current Power Supply, filament transformer secondary side winding two ends respectively with electron gun in the filament two ends join.The output termination filament supply adjuster of beam power adjuster, the filament supply conditioner outlet end connects the control end of filament PWM device.The beam power potentiometer of adjusting inserts the beam power adjuster, and accelerating voltage sampled signal and electronic beam current sampled signal insert multiplier simultaneously, and the multiplier output also inserts the beam power adjuster.
Also seal in filament input current sample resistance in the filament inverter input circuit, the voltage signal that its two ends output size is proportional to the filament input current of inverter inserts the filament supply adjuster as feedback signal.
The given signal of heater current desired value is from the output signal of beam power adjuster in the filament supply adjuster, and heater current is controlled by beam power.Filament supply adjuster, beam power adjuster are ratio-integration (PI) adjuster.
Accelerating voltage sampled signal and electronic beam current sampled signal are imported multiplier simultaneously, its output signal is as the beam power negative-feedback signal, this signal and beam power are adjusted the potentiometer output signal relatively, deviation signal is amplified the given signal of output as the filament supply adjuster through the computing of beam power adjuster, thus the control heater current.When accelerating voltage changes, beam power stable regulation process is as follows: suppose that accelerating voltage descends, and cause electronic beam current to descend, beam power descends more serious, its value of feedback descends in the beam power ratio, increase with the beam power power deviation signal forward of potentiometer output signal after relatively of adjusting, the output of beam power adjuster is risen, the output of filament supply adjuster is risen, so heater current strengthens, filament emitting electrons ability strengthens, bombardment power increases, cathode temperature rises, and it is that electronic beam current rises that the cathode emission electronic capability strengthens, and beam power goes back up near the desired value; Vice versa.
The advantage of beam bombardment stove electron beam generation systems power control method of the present invention and supply unit is:
1) in the electron beam accelerating power source, abandoned thyristor phase shift AC voltage adjusting control mode, low-pressure side is directly powered by the three-phase mains, six phase 12 pulsating wave way of full-wave rectification are adopted in the high-pressure side, and harmonic component greatly reduces in the input current, and are very little to the public electric wire net influence; Employing open loop control, the allowance of main transformer can reduce, and increases operation rate, and reduces manufacturing cost; Harmonics of Input is little, has improved power factor simultaneously and has reduced the running wastage of main transformer, meets green power supply and energy-conservation development trend.
2) the electron beam accelerating power source adopts six phase 12 pulsating wave full-wave rectifications, the ripple coefficient of high direct voltage is less than 1%, do not need filter circuit to satisfy of the requirement of beam bombardment stove to the accelerating voltage ripple, device costs an arm and a leg, bulky high-pressure filter circuit can greatly be simplified, and reduces manufacturing cost; The ripple coefficient I improves the electronic beam current passband, and loss was little when electron beam passed through electron gun.
3) with accelerating voltage and electronic beam current sampled signal control filament supply, heater current and bombardment power supply jointly control the adjusting electronic beam current, beam power is directly regulated and stable control, come indirect controlling electron beam power than controlling accelerating voltage and electronic beam current respectively, the setting of smelting technology parameter is more directly perceived, and the adjustment of technological parameter is more convenient.
4) the supply unit safeguard measure is perfect, and is reliable, and manufacturing cost decreases.
(4) description of drawings
Fig. 1 is a beam bombardment stove electron beam generation systems supply unit example structure schematic diagram of the present invention, and number in the figure is: the 1-filament, and the 2-negative electrode, the 3-bunching electrode, the 4-electron beam, the 5-anode, the 6-filament supply, 7-bombards power supply, 8-electron beam accelerating power source.
Fig. 2 is electron beam accelerating power source 8 structural representations among Fig. 1; number in the figure is: the J1-thyristor units; the J2-input current detects translation circuit, the J3-main transformer that boosts, J4-high-voltage rectifier; the J5-high-voltage filtering capacitor; J6-accelerating voltage bleeder circuit, J7-electronic beam current sample resistance, J8-fault detect protection control circuit; J9-control of soft circuit, the J10-thyristor gating circuit.
Fig. 3 is cathode bombardment power supply 7 structural representations among Fig. 1, number in the figure is: H1-bombardment input rectifying filter, H2-bombardment dc pulse width modulation (PWM) device, H3-bombardment input current sample resistance, H4-bombardment input voltage bleeder circuit, H5-bombardment inverter input filtering circuit, H6-bombards inverter, and H7-bombards transformer, H8-bombards output rectifier and filter, the H9-bombarding voltage potentiometer of adjusting, the H10-bombarding current is by negative-feedback circuit, and H11-bombards power regulator.
Fig. 4 is filament supply 6 and a beam power control loop structural representation among Fig. 1, number in the figure is: D1-filament input rectifying filter, D2-filament dc pulse width modulation (PWM) device, D3-filament input current sample resistance, D4-filament inverter input filtering circuit, D5-filament inverter, D6-filament transformer, D7-multiplier, the D8-beam power potentiometer of adjusting, D9-beam power adjuster, D10-filament supply adjuster.
(5) embodiment
Beam bombardment stove electron beam generation systems power control method embodiment of the present invention is as follows:
The electron beam accelerating power source adopts thyristor soft start and soft stop, realizes the mild lifting of shutdown process accelerating voltage; The fusion process accelerating power source adopts open loop control, its boost main transformer input and three-phase mains are straight-through, input voltage is complete three-phase sine-wave, boosts after six phase 12 pulsating wave full-wave rectifications obtain uncontrollable high direct voltage, and the main transformer input current waveform that boosts is the near sinusoidal ripple; Dc high-voltage output end is connected to sample circuit, exports accelerating voltage sampled signal U respectively
aWith electronic beam current sampled signal I
bThe main transformer input that boosts configuration input current detects translation circuit, and it is converted to d. c. voltage signal I in proportion with three-phase input AC electric current
s
Fault detects such as accelerating power source comprises the electron beam overcurrent, boost main transformer supply current overcurrent, accelerating voltage overvoltage and accelerating power source discharge protection control circuit, detect arbitrary sampled signal and surpass the setting thresholding, fault detect protection control circuit is by thyristor units fast shut-off main transformer power supply, shield, wherein first three is planted and need manually restart accelerating power source after fault takes place, after the accelerating voltage discharge fault was eliminated, fault detect protection control circuit restarted accelerating power source automatically through delaying time in short-term; Accelerating power source fault-signal detection mode is: accelerating voltage overvoltage, electron beam overcurrent and main transformer supply current overcurrent are respectively with U
a, I
bAnd I
sThe higher limit that signal surpasses separately is a decision criteria, and accelerating power source discharges with U
aIt is decision criteria that signal produces the sudden change pulse that descends, and has detection speed faster than detected electrons bundle overcurrent.
The bombardment power control method is voltage stabilizing control.The bombardment power work is in high-pressure side, power supply and control circuit are at low-pressure end, by AC → DC → AC → DC current transformation mode, realize the transmission of energy, the conversion and the High-Voltage Insulation of magnitude of voltage by the bombardment transformer, adopt dc pulse width modulation (PWM) technology to regulate the input of bombardment power supply in direct current intermediate link.The bombardment power regulator is ratio-integration (PI) adjuster, adopts bombardment inverter input voltage sampled signal U at low-pressure end
BBombardment input current of inverter sampled signal I is introduced in negative feedback simultaneously
BJust compensating and offsetting the output voltage fluctuation that load effect etc. causes; The control strategy that input voltage negative feedback, electric current are just compensating makes the bombardment power supply have harder output characteristic, and bombarding voltage changes with bombarding current hardly, reaches the purpose of voltage stabilizing control.This bombardment power supply bombards input current of inverter in addition by negative feedback protection control; bombardment input current of inverter sampled signal surpasses sets thresholding; the effect of this signal will be transformed into strong feedback by just compensating, and the bombardment input current of inverter is limited in the higher limit scope.After fault was eliminated, the bombardment power regulator recovered normal operating conditions automatically.
The filament supply control method is Current Negative Three-Point Capacitance control.Filament supply works in high-pressure side, power supply and control circuit are at low-pressure end, by AC → DC → AC current transformation mode, realize the transmission of energy, the conversion and the High-Voltage Insulation of current value by filament transformer, adopt dc pulse width modulation (PWM) technology to regulate the input of filament supply in direct current intermediate link.The filament supply adjuster is ratio-integration (PI) adjuster, adopts filament input current of inverter sampled signal I at low-pressure end
FNegative feedback, the given signal of heater current desired value is from the output signal I of beam power adjuster in the filament supply adjuster
F *, so heater current is controlled by beam power.
The beam power control system adopts double circle controling mode, and interior ring is the heater current adjustable ring, and outer shroud is the beam power adjustable ring.Accelerating voltage is open loop control, and its amplitude of running can change with power network fluctuation and load variations.The beam power adjuster is with accelerating voltage sampled signal U
aWith electronic beam current sampled signal I
bProduct as the negative-feedback signal P of beam power, by filament supply and two power supplys of bombardment power supply are jointly controlled, make and the servo accelerating voltage inverse change of electronic beam current realize the stable control of beam bombardment stove melting power.
Beam bombardment stove electron beam generation systems supply unit embodiment of the present invention as shown in Figure 1, comprise the electron beam accelerating power source 8 that is connected between gun cathode 2, bunching electrode 3 and the anode 5, be connected in the bombardment power supply 7 of filament 1 one ends and negative electrode 2, bunching electrode 3, be connected in the filament supply 6 at filament 1 two ends.
Beam bombardment stove melting power supplier---the circuit structure of electron beam accelerating power source 8 comprises that thyristor units J1, input current detect translation circuit J2, the main transformer J3 that boosts, high-voltage rectifier J4, high-voltage filtering capacitor J5, accelerating voltage bleeder circuit J6, electronic beam current sample resistance J7, fault detect protection control circuit J8, control of soft circuit J9 and thyristor gating circuit J10 as shown in Figure 2; Thyristor units J1, the first side winding of three-phase mains with the main transformer J3 that boosts is connected, startup and stopping process thyristor units J1 work in the phase-shift voltage regulating state, fusion process thyristor units J1 works in the all-pass state, and thyristor units J1 worked in cut-off state when accelerating power source broke down; The main transformer J3 secondary side that boosts has two groups of high pressure windings to be respectively star and delta connection, exports the High Level AC Voltage that two groups of line voltages equate; Two groups of three-phase full-wave high-voltage rectifier J4 are respectively two groups of high-voltage alternating electric rectifications, overlapped in series then of the main transformer J3 output of boosting; High-voltage filtering capacitor J5 is connected to the output of high-voltage rectifier J4, and capacitance is less, and the filtering effect is arranged, but main effect is to suppress peak voltage; The output of high-voltage rectifier J4 also and meet accelerating voltage bleeder circuit J6, accelerating voltage bleeder circuit J6 export ratio is in the signal U of accelerating voltage
a, this signal divides two-way output, and one the tunnel receives other power control circuit, and accelerating power source fault detect protection control circuit J8 is inserted on another road; Seal in electronic beam current sample resistance J7 at accelerating power source output loop low-pressure end, its two ends output is proportional to the voltage signal I of electronic beam current size
b, this signal divides two-way output, and one the tunnel receives the beam power control loop, and accelerating power source fault detect protection control circuit J8 is inserted on another road; The main transformer J3 input that boosts configuration current detecting translation circuit converts three-phase input AC electric current to 0～10V direct current signal I in proportion
s, this signal inserts accelerating power source fault detect protection control circuit J8; Fault detect protection control circuit J8 and accelerating power source control of soft circuit J9 all join with thyristor gating circuit J10 control input end; Fault detect protection control circuit J8 blocks the trigger impulse of thyristor when accelerating power source breaks down, cut off power supply rapidly, prevents that fault from further enlarging; Accelerating power source fault detect protection control circuit J8 has detected electronic beam current signal I
bSurpassing a certain thresholding is judged to the electron beam overcurrent, exchanges input current signal I
sSurpass a certain thresholding and be judged to power supply overcurrent, accelerating voltage signal U
aSurpass a certain thresholding and be judged to accelerating voltage overvoltage, accelerating voltage signal U
aThe pulse of big amplitude decline kick occurs and be judged to accelerating voltage discharge, after wherein accelerating voltage discharge fault signal was eliminated, fault detect protection control circuit J8 restarted accelerating power source automatically through delaying time in short-term; Accelerating power source control of soft circuit J9 sends the mild lifting signal of accelerating voltage in the start-stop process, regulates thyristor phase shift trigger angle, controls the main transformer J3 input voltage smooth variation of boosting, and realizes the mild lifting of accelerating voltage; Thyristor gating circuit J10 works in by states such as, phase-shift voltage regulating or all-wave conductings according to the signal controlling thyristor units J1 of fault detect protection control circuit J8 and accelerating power source control of soft circuit J9; The negative pole of accelerating power source output is connected to the negative electrode 2 and the bunching electrode 3 of electron gun, and positive pole joins with the earth and anode 5.
Figure 3 shows that cathode bombardment power supply 7 structural representations, comprise bombardment input rectifying filter H1, bombardment dc pulse width modulation (PWM) device H2, bombardment input current sample resistance H3, bombardment input voltage bleeder circuit H4, bombardment inverter input filtering circuit H5, bombardment inverter H6, bombardment transformer H7, bombardment output rectifier and filter H8, bombarding voltage are adjusted potentiometer H9, bombarding current by negative-feedback circuit H10 and bombardment power regulator H11; AC power inserts bombardment PWM device H2 after meeting bombardment input rectifying filter H1; The controlled square wave direct current of bombardment PWM device H2 output output filters out wherein alternating current component through bombardment inverter input filtering circuit H5, obtains straight direct current and inserts the input of bombardment inverter H6; Bombardment inverter H6 becomes square wave alternating-current with dc inverter, its output connects the first side winding of bombardment transformer H7, bombardment transformer H7 has realized the transmission of energy, the conversion of magnitude of voltage and High-Voltage Insulation function, output of bombardment transformer H7 secondary side winding and the suitable square wave alternating-current of bombardment operating supply voltage, its secondary side joint bombardment output straightening and filtering unit H8, with the straight direct current of output after the filtering of bombardment transformer H7 secondary side AC rectification, the output of bombardment output straightening and filtering unit H8 is bombardment power supply 7 outputs, negative electrode 2 and bunching electrode 3 in its positive pole and the electron gun join, and an end of filament 1 joins in negative pole and the electron gun; The bombardment input voltage bleeder circuit H4 export ratio that is connected to bombardment inverter H6 input is in the sampled signal U of bombardment inverter H6 input terminal voltage
B, this signal inserts bombardment power regulator H11 as the bombarding voltage negative-feedback signal; The bombardment input current sample resistance H3 two ends output that is serially connected with bombardment inverter H6 input circuit is proportional to the voltage signal I of bombardment inverter H6 input current size
B, this signal divides two-way output, and one the road inserts bombardment power regulator H11 as the positive compensating signal of bombarding current, and bombarding current is inserted by negative-feedback circuit HI0 in another road; Bombarding current also inserts bombardment power regulator H11, I by the output of negative-feedback circuit H10
BDuring less than a certain thresholding, its output signal I
BKBe zero, work as I
BWhen surpassing this thresholding, its output signal I
BKSharply rise; The bombarding voltage potentiometer H9 that adjusts exports given signal U
B *Insert bombardment power regulator H11, as the setting signal of bombarding voltage desired value; During bombardment power regulator H11 operate as normal, by given signal U
B *, bombarding voltage signal U
BWith bombarding current signal I
BObtain the deviation signal Δ U of bombarding voltage after comprehensive
B, promptly
Δ U
BOutput goes to control the output of bombardment PWM device H2 after the computing of bombardment power regulator H11 ratio-integration (PI) is amplified, bombardment power regulator H11 works in the voltage stabilizing that voltage negative is fed back, electric current is just compensating and adjusts state, when discharge takes place in the bombardment power supply, the bombardment electric power outputting current sharply increases I
BSurpass and set thresholding, I
BKNon-vanishing, this moment deviation signal
Because I
BMuch smaller than I
BK, bombardment power regulator H11 receives strong Current Negative Three-Point Capacitance signal I
BKEffect, so fault current is limited in the safe range, after fault is eliminated, bombardment power regulator H11 will recover normal operating conditions automatically.
Fig. 4 illustrates the structure of filament supply 6 and beam power control loop, filament supply 6 comprises filament input rectifying filter D1, filament dc pulse width modulation (PWM) device D2, filament input current sample resistance D3, filament inverter input filtering circuit D4, filament inverter D5, filament transformer D6 and filament supply adjuster D10; The beam power control loop comprises multiplier D7, beam power adjust potentiometer D8, beam power adjuster D9.AC power inserts filament PWM device D2 after filament input rectifying filter D1 converts straight direct current to; Filament PWM device D2 becomes uncontrollable direct current into controlled square wave direct current output; Filter out wherein alternating current component through filament inverter input filtering circuit D4, obtain straight direct current and insert the input of filament inverter D5; Filament inverter D5 becomes square wave alternating-current with dc inverter, its output connects the first side winding of filament transformer D6, filament transformer D6 has realized the transmission of energy, the conversion and the High-Voltage Insulation function of current value, and its secondary side winding is joined at the two ends of filament 1 directly and in the electron gun; Filament input current sample resistance D3 is serially connected with in the filament inverter D5 input circuit, and its two ends output is proportional to the voltage signal I of filament inverter D5 input current size
F, this signal inserts filament supply adjuster D10 as the heater current negative-feedback signal, the given signal I of heater current desired value
F *From the output signal of beam power adjuster D9, I
F *With I
FThe deviation signal Δ I of Chan Shenging relatively
FAmplify the back through filament supply adjuster D10 ratio-integration (PI) computing and export the output of removing to control filament PWM device D2, make the servo I of heater current
F *Change, so heater current is controlled by beam power.The beam power potentiometer D8 that adjusts inserts beam power adjuster D9, its output signal P
*Setting signal as the beam power desired value of beam power adjuster D9; Accelerating voltage sampled signal U
aWith electronic beam current sampled signal I
bImport multiplier D7 simultaneously, multiplier D7 output also inserts beam power adjuster D9, and P is as the beam power negative-feedback signal for multiplier D7 output signal; Beam power adjuster D9 is to P
*The deviation signal Δ P that relatively produces with P is output signal I after it carries out ratio-integration (PI) computing and amplifies
F *Insert the set-point of filament supply adjuster D10, control heater current thus, finally realize the stable control of beam power as heater current control.
Embodiment of the invention supply unit has overcome the shortcoming of classical control system under the prerequisite that manufacturing cost descends to some extent, realized green power supply and energy-conservation operational effect.
Claims (9)
1. a beam bombardment stove electron beam generation systems power control method comprises the control of electron beam accelerating power source, control, the control of filament supply and the control of beam power of bombardment power supply; It is characterized in that:
The open loop of electron beam accelerating power source is controlled, accelerating voltage sampled signal and electronic beam current sampled signal are as the control signal of bombardment power supply, filament supply and beam power, accelerating power source, bombardment power supply and filament supply three power supply co-ordinations, make electronic beam current power not be subjected to the influence of accelerating voltage fluctuation, be convenient to regulate and stable beam power for the beam bombardment stove provides.
2. beam bombardment stove electron beam generation systems power control method according to claim 1 is characterized in that:
The control method of electron beam accelerating power source is open loop control, its boost main transformer input and three-phase mains are straight-through, input voltage is complete three-phase sine-wave, boost after six phase 12 pulsating wave full-wave rectifications obtain uncontrollable high direct voltage, the main transformer input current waveform that boosts is the near sinusoidal ripple; Dc high-voltage output end is connected to sample circuit, exports accelerating voltage sampled signal and electronic beam current sampled signal respectively;
The control method of bombardment power supply is voltage stabilizing control, the bombardment power work is in high-pressure side, power supply and control circuit are at low-pressure end, by AC → DC → AC → DC current transformation mode, realize the transmission of energy, the conversion and the High-Voltage Insulation of magnitude of voltage by the bombardment transformer, adopt the dc pulse width modulation technique to regulate the input of bombardment power supply in direct current intermediate link; The bombardment power regulator is introduced bombardment inverter input voltage negative feedback and input current at low-pressure end and is just being compensated and offset the output voltage fluctuation that load effect etc. causes;
The filament supply control method is current closed-loop control, filament supply works in high-pressure side, power supply and control circuit are at low-pressure end, by AC → DC → AC current transformation mode, realize the transmission of energy by filament transformer, the conversion of current value and High-Voltage Insulation, adopt the dc pulse width modulation technique to regulate the input of filament supply in direct current intermediate link, the filament supply adjuster is introduced the negative feedback of filament input current of inverter at low-pressure end, the given signal of heater current desired value is from the output signal of beam power adjuster in the filament supply adjuster, and heater current is controlled by beam power; The beam power control method is two closed-loop controls, and interior ring is the heater current adjustable ring, and outer shroud is the beam power adjustable ring; The product of accelerating voltage and electronic beam current sampled signal is compared as the given signal of beam power negative-feedback signal and desired value and is obtained the power deviation signal, this deviation signal is amplified through the computing of beam power adjuster, the beam power regulator output signal is regulated the filament heating current as the given signal of filament supply adjuster, make and the servo accelerating voltage inverse change of electronic beam current realize the stable control of beam power.
3. beam bombardment stove electron beam generation systems power control method according to claim 2 is characterized in that:
Thyristor units soft start and soft stop are adopted in the control of electron beam accelerating power source, realize the mild lifting of shutdown process accelerating voltage; Also has the fault detect protection control of electron beam overcurrent, the main transformer supply current overcurrent that boosts, accelerating voltage overvoltage and accelerating power source discharge; detect arbitrary sampled signal and surpass to set thresholding, fault detect protection control circuit is by the thyristor units fast shut-off main transformer power supply that boosts.
4. beam bombardment stove electron beam generation systems power control method according to claim 2 is characterized in that:
The bombardment power supply bombards input current of inverter in addition by negative feedback protection control; bombardment input current of inverter sampled signal surpasses sets thresholding; the effect of this signal will be transformed into strong feedback by just compensating, and the bombardment input current of inverter is limited in the higher limit scope.
5. the beam bombardment stove electron beam generation systems supply unit of beam bombardment stove electron beam generation systems power control method design according to claim 1 and 2, comprise the electron beam accelerating power source (8) that is connected between gun cathode (2), bunching electrode (3) and the anode (5), be connected in the bombardment power supply (7) of filament (1) one end and negative electrode (2), bunching electrode (3), be connected in the filament supply (6) at filament (1) two ends; It is characterized in that:
Electron beam accelerating power source (8) comprises the main transformer that boosts (J3), high-voltage rectifier (J4), high-voltage filtering capacitor (J5), accelerating voltage bleeder circuit (J6), electronic beam current sample resistance (J7); The three-phase mains is straight-through with the first side winding of the main transformer (J3) that boosts, and the main transformer that boosts (J3) secondary side has two groups of high pressure windings to be respectively star and delta connection, exports the High Level AC Voltage that two groups of line voltages equate; Two groups of three-phase full-wave high-voltage rectifiers (J4) are respectively two groups of high-voltage alternating electric rectifications, overlapped in series then of the main transformer that boosts (J3) output; High-voltage filtering capacitor (J5) is connected to the output of high-voltage rectifier (J4), and this output is accelerating power source (a 8) output, and this output also and connect accelerating voltage bleeder circuit (J6) export ratio in the signal U of accelerating voltage
a, sealing in electronic beam current sample resistance (J7) at the low-pressure end of accelerating power source (8) output loop, its two ends output is proportional to the voltage signal I of electronic beam current size
bThe negative pole of accelerating power source (8) output is connected to the negative electrode (2) and the bunching electrode (3) of electron gun, and positive pole joins with the earth and anode (5);
Bombardment power supply (7) comprises bombardment input rectifying filter (H1), adjust potentiometer (H9) and bombard power regulator (H11) of bombardment dc pulse width modulating device (H2), bombardment inverter input filtering circuit (H5), bombardment inverter (H6), bombardment transformer (H7), bombardment output rectifier and filter (H8), bombarding voltage; AC power connects bombardment input rectifying filter (H1) back and inserts bombardment dc pulse width modulating device (H2); Bombardment dc pulse width modulating device (H2) output inserts the input of bombardment inverter (H6) through bombardment inverter input filtering circuit (H5); Bombardment inverter (H6) output connects the first side winding of bombardment transformer (H7), bombardment transformer (H7) secondary side winding connects bombardment output straightening and filtering unit (H8), the output of bombardment output straightening and filtering unit (H8) bombards power supply (7) output for this reason, negative electrode (2) and bunching electrode (3) in its positive pole and the electron gun join, and an end of filament in negative pole and the electron gun (1) joins; Bombardment inverter (H6) input termination bombardment input voltage bleeder circuit (H4), the dividing potential drop export ratio is in the sampled signal U of bombardment inverter (H6) input terminal voltage
B, this signal inserts bombardment power regulator (H11) as the bombarding voltage negative-feedback signal; Seal in bombardment input current sample resistance (H3) in bombardment inverter (H6) input circuit, its two ends output is proportional to the voltage signal I of bombardment inverter (H6) input current size
B, this signal inserts bombardment power regulator (H11) as the positive compensating signal of bombarding current, the bombarding voltage given signal U of potentiometer (H9) output that adjusts
B *Insert bombardment power regulator (H11), as the setting signal of bombarding voltage desired value; During bombardment power regulator (H11) operate as normal, by given signal U
B *, bombarding voltage signal U
BWith bombarding current signal I
BObtain the deviation signal Δ U of bombarding voltage after comprehensive
B, promptly
Δ U
BThe output that control bombardment dc pulse width modulating device (H2) is removed in output after bombardment power regulator (H11) ratio one integral operation amplification, bombardment power regulator (H11) works in the voltage stabilizing that voltage negative is fed back, electric current is just compensating and adjusts state;
Filament supply (6) comprises filament input rectifying filter (D1), filament dc pulse width modulating device (D2), filament inverter input filtering circuit (D4), filament inverter (D5), filament transformer (D6) and filament supply adjuster (D10); The beam power control loop comprises multiplier (D7), beam power adjust potentiometer (D8), beam power adjuster (D9); AC power inserts filament dc pulse width modulating device (D2) behind filament input rectifying filter (D1); Filament dc pulse width modulating device (D2) inserts the input of filament inverter (D5) through filament inverter input filtering circuit (D4); The output of filament inverter (D5) connects the first side winding of filament transformer (D6), and its secondary side winding is joined at the two ends of filament (1) directly and in the electron gun; Seal in filament input current sample resistance (D3) in the filament inverter input circuit, its two ends output is proportional to the voltage signal I of filament inverter (D5) input current size
F, this signal inserts filament supply adjuster (D10) as the heater current negative-feedback signal; The beam power potentiometer (D8) of adjusting inserts beam power adjuster (D9), its output signal P
*Setting signal as the beam power desired value of beam power adjuster; Accelerating voltage sampled signal U
aWith electronic beam current sampled signal I
bImport multiplier (D7) simultaneously, multiplier (D7) output also inserts beam power adjuster (D9), and multiplier (D7) output signal P is as the beam power negative-feedback signal; The output of beam power adjuster (D9) inserts filament supply adjuster (D10), as the given signal I of filament supply adjuster (D10)
F *
6. beam bombardment stove electron beam generation systems supply unit according to claim 5 is characterized in that:
Described electron beam accelerating power source (8) also includes thyristor units (J1), thyristor gating circuit (J10), control of soft circuit (J9) and fault detect protection control circuit (J8); Control of soft circuit (J9) and fault detect protection control circuit (J8) all join with thyristor gating circuit (J10); The three-phase mains is connected through the first side winding of thyristor units (J1) with the main transformer that boosts (J3), starting and stopping process thyristor units (J1) work in the phase-shift voltage regulating state, fusion process thyristor units (J1) works in the all-pass state, accelerating power source (8) when breaking down thyristor units (J1) work in cut-off state; The output signal U of described accelerating voltage bleeder circuit (J6)
aOther has one the road to insert fault detect protection control circuit (J8); The output signal I of described electronic beam current sample resistance (J7)
bOther has one the road to insert fault detect protection control circuit (J8); Control of soft circuit (J10) in start-stop process control thyristor units (J1) phase shift trigger angle, is controlled main transformer (J3) the input voltage smooth variation of boosting, and realizes the mild lifting of accelerating voltage; Fault detect protection control circuit (J8) detected electrons beam current signal I
bSurpass a certain thresholding and be judged to electron beam overcurrent or accelerating voltage signal U
aSurpass a certain thresholding and be judged to accelerating voltage overvoltage or accelerating voltage signal U
aThe pulse of big amplitude decline kick occurs and be judged to the accelerating power source discharge, all be judged to accelerating power source (8) and break down, fault detect protection control circuit (J8) blocks the trigger impulse of thyristor this moment, cuts off power supply rapidly.
7. beam bombardment stove electron beam generation systems supply unit according to claim 5 is characterized in that:
The described main transformer that boosts (J3) input configuration current detecting translation circuit (J2) converts three-phase input AC electric current to 0～10V direct current signal I in proportion
s, this signal inserts fault detect protection control circuit (J8), and the main transformer that boosts (J3) exchanges input current sampled signal I
sFault detect protection control circuit (J8) is judged to the power supply overcurrent when surpassing a certain thresholding, blocks the trigger impulse of thyristor, cuts off power supply rapidly.
8. according to claim 6 or 7 described beam bombardment stove electron beam generation systems supply units, it is characterized in that:
The fault detect protection control circuit (J8) of described accelerating power source (8) manually restarts accelerating power source (8) after moving at accelerating voltage overvoltage, electron beam overcurrent and three kinds of error protections of power supply overcurrent; Fault detect protection control circuit (J8) restarts accelerating power source (8) automatically through time-delay in short-term after accelerating power source (8) discharge fault is protected action.
9. beam bombardment stove electron beam generation systems supply unit according to claim 5 is characterized in that:
Described bombardment power supply (7) also has bombarding current by negative-feedback circuit (H10), the voltage signal I of bombardment input current sample resistance (H3) output
BOther has one the road to insert bombarding current by negative-feedback circuit (H10), and bombarding current also inserts bombardment power regulator (H11), I by the output of negative-feedback circuit (H10)
BDuring less than a certain thresholding, its output signal I
BKBe zero, work as I
BWhen surpassing this thresholding, its output signal I
BKSharply rise.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102573163A (en) * | 2012-01-18 | 2012-07-11 | 桂林电子科技大学 | Control method of high-voltage power supply of electron beam melting furnace and power supply device |
| CN108717928A (en) * | 2018-04-27 | 2018-10-30 | 桂林狮达机电技术工程有限公司 | Shared accelerating power source array electronic rifle electronic beam current control device and method |
| CN109789483A (en) * | 2016-08-04 | 2019-05-21 | 海帕塔研究财团 | Electron beam 3D printer |
| CN110032060A (en) * | 2018-01-11 | 2019-07-19 | 西门子（中国）有限公司 | Course control method for use, process control equipment and storage medium |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3748536A (en) * | 1972-09-05 | 1973-07-24 | Airco Inc | Power supply |
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2007
- 2007-12-07 CN CNB2007100507317A patent/CN100563399C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102573163A (en) * | 2012-01-18 | 2012-07-11 | 桂林电子科技大学 | Control method of high-voltage power supply of electron beam melting furnace and power supply device |
| CN102573163B (en) * | 2012-01-18 | 2013-08-21 | 桂林电子科技大学 | High-voltage power supply of electron beam melting furnace |
| CN109789483A (en) * | 2016-08-04 | 2019-05-21 | 海帕塔研究财团 | Electron beam 3D printer |
| CN109789483B (en) * | 2016-08-04 | 2021-03-19 | 海帕塔研究财团 | Electron beam 3D printer |
| CN110032060A (en) * | 2018-01-11 | 2019-07-19 | 西门子（中国）有限公司 | Course control method for use, process control equipment and storage medium |
| CN110032060B (en) * | 2018-01-11 | 2022-05-17 | 西门子能源有限公司 | Process control method, process control device, and storage medium |
| CN108717928A (en) * | 2018-04-27 | 2018-10-30 | 桂林狮达机电技术工程有限公司 | Shared accelerating power source array electronic rifle electronic beam current control device and method |
| CN108717928B (en) * | 2018-04-27 | 2023-09-08 | 桂林狮达技术股份有限公司 | Electron beam control device and method for shared accelerating power supply array type electron gun |
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