CN101176185A - Reflectron - Google Patents
Reflectron Download PDFInfo
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- CN101176185A CN101176185A CNA2006800157105A CN200680015710A CN101176185A CN 101176185 A CN101176185 A CN 101176185A CN A2006800157105 A CNA2006800157105 A CN A2006800157105A CN 200680015710 A CN200680015710 A CN 200680015710A CN 101176185 A CN101176185 A CN 101176185A
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- electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/40—Time-of-flight spectrometers
- H01J49/405—Time-of-flight spectrometers characterised by the reflectron, e.g. curved field, electrode shapes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/05—Arrangements for energy or mass analysis
- H01J2237/053—Arrangements for energy or mass analysis electrostatic
- H01J2237/0535—Mirror analyser
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- Crystallography & Structural Chemistry (AREA)
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Abstract
A reflectron (1) for deflecting an ion from a specimen in a time-of -flight mass spectrometer comprises a front electrode (2) and a back electrode (3) . At least one of the front and back electrodes (2,3) is capable of generating a curved electric field. The front and back electrodes are configured to perform time focusing and resolve an image of a specimen.
Description
Background technology
The present invention relates to be used for the reflector of time-of-flight mass spectrometer, relate more specifically to atom probe microscope.
Time-of-flight mass spectrometer typically comprises sample, is used for generating and the device of release ion and the electric field that the ion of these releases is attracted to detector from sample.Being used to measure the device of the time between initial ion release and the ion detection makes it possible to measure transit time.The mass-to-charge ratio of this transit time and ion is proportional, therefore can determine the information of forming about the atom of sample.
The ion of these releases had not both had identical zero-time, did not have identical kinetic energy yet.The distribution of zero-time is the function of the width of initial ion pulse mechanism.The distribution of the kinetic energy of these ions is to be caused by non-homogeneous evaporating field that exists during the ionization (evaporation field) and initial sample geometry.
Time-of-flight mass spectrometer can comprise that reflector improves the mass resolution of this device.This reflector serves as static " mirror " effectively, and changes the flight path of analyzed ion in mass spectrometer.From ion source ion is deflected on the detector from its inceptive direction.
Conventional reflector by a series of mainly be that the annular electrode on plane forms, this annular electrode defines hollow cylinder.Each all remains on such current potential described electrode, and the direction that described current potential is advanced from ion source at ion increases.Electrode generates uniform field on the cross section of reflector.In fact, Chang uniformity is the critical design criterion of conventional reflector.Any remaining bending of field, this is difficult to be avoided, and all can cause the deviation of ion trajectory and the decline of mass resolution.Ion is advanced with parabolic path by reflector.Ion with more kinetic energy enters reflector and advances deeplyer, so their path is longer, and their to arrive transit time of detector longer.Have still less the ion of kinetic energy and advance so deeply, pass through shorter path, and have shorter transit time.What can derive is that the ion with kinetic energy of given mass-to-charge ratio and variation will have less variation aspect their transit time, so measured mass resolution can be modified.Reflector can be configured, and it is irrelevant with the primary power of ion basically to make ion pass the time that atom-probe spends.This is called as time focusing.
The ion that discharges with the still slightly different kinetic energy of identical mass-to-charge ratio will pass through reflector along different tracks, and will be at slightly different position bump detector.The distribution of position of collision and the aberration of system are proportional.In addition, along with field of view (FOV) increases, aberration also increases.
Reflector with crooked rear electrode (rear electrode) is at U.S. Patent number 6,740, is tangible in 872.In this embodiment, crooked electrode focuses on a collector with being used for the point source space angle that will disperse a little, and this has improved the coupling efficiency between source and the detector.Do not attempt or wish the information of collection about the angle variation of the intensity in source, i.e. analysis diagram picture.Other embodiment (EP0208894, U.S. Patent number 4,731,532) has obtained similar effect, but operating flexibility is less.People such as Keller and Srama has described the reflector that comprises two shaping grids, but does not have the analysis diagram picture.
Reflector can be to use similar mode to improve the mass resolution of atom probe microscope in time-of-flight mass spectrometer to it.Further improve and make it possible to---using spectral information to obtain the microscope of atom imaging---middle use reflector in three-dimensional atom probe.It below is explanation to this specific embodiment.
Ion source in the atom probe microscope is the sample with examine of undersized curved surface.Ion originates from the zonule on surface and the detector outside certain distance is advanced.If the use location sensitive detectors, then they can form the image of sample area with very large magnification ratio.For little FOV configuration, the high-quality resolution rate is possible, and arranges that for the FOV of broad then lower mass resolution is possible.
Although the conventional reflector that is included in the atom-probe can improve the mass resolution of measurement, but have following shortcoming: the angular distribution greater than about 8 degree has caused excessive reflector and detector, perhaps caused too short flight path alternatively, thereby FOV is restricted.
Another shortcoming of conventional reflector is the position error that aberration causes the detector place, and this position error is left the normal of reflector along with angle and increased.Aberration is the error that detects the image space of ion, and is the function of ion energy.Therefore adopt conventional reflector to be limited to relatively little angle (approximate 8 ° angles) usually with the FOV of the atom-probe of the resolution that improves the quality.
The reflector that uses in three-dimensional atom probe must be accepted ion on than the significantly bigger angular range of the reflector in the time-of-flight mass spectrometer.If for using the reflector design only to accept and be reflected in the ion of incident among a small circle the angle in conventional atom probe or time-of-flight mass spectrometer, then it is unsuitable for using in three-dimensional atom probe.
Summary of the invention
The present invention is intended to solve at least some problems relevant with prior art.Therefore, the invention provides a kind of being used at the reflector of atom-probe reflection from ionogenic ion, this reflector comprises:
Preceding electrode; And
Rear electrode;
Wherein said electrode is configured to time focusing and the analysis diagram picture that carries out ion.
Before electrode and rear electrode can be configured, make that electric field is generated when current potential is applied in the electrode at least one, the electric field that it is equivalent to basically by the point charge generation makes that the ion of incident is reflected on reflector.
Reflector according to the present invention has improved the space angle of ion on wide range of angles and has focused on.Reflector of the present invention can also be configured to and reduce or color difference eliminating almost.
Though many configurations and shape all are possible, preceding electrode preferably has in the face of ionogenic concave surface.Advantageously, the concave surface of preceding electrode can maybe can be more complicated curvature with constant radius of curvature bending.
Preceding electrode can be taked any suitable form, but will comprise typically that grid focuses on to improve.
Preceding electrode preferably remains on earth potential, but can be with respect to ground positive bias or negative bias.
Before electrode preferably remain on 1.08 times current potential of the average energy that at least approximately is the ion that will be reflected, but other current potential also is possible.
Rear electrode preferably has in the face of ionogenic concave surface.Advantageously, the concave surface of rear electrode is preferably with constant radius of curvature bending, but other orientation also is possible.
Rear electrode can be taked any suitable form, but will typically comprise plate.
In one embodiment, when reflector was included in the three-dimensional atom probe, electrode and being used for detected the distance between the detector of ion of three-dimensional atom probe before the radius of curvature of preceding electrode was substantially equal to.
In one embodiment, the radius of curvature of rear electrode preferably is substantially equal to rear electrode and is used for detecting distance between the detector of ion of three-dimensional atom probe.
In one embodiment, the radius of curvature of the radius of curvature of preceding electrode and rear electrode makes that these two electrodes are concentric.
Reflector preferably typically comprises a plurality of targets that are arranged between preceding electrode and the rear electrode.In the target each preferably is formed ring-type.
In the target each preferably remains on such current potential, the current potential that the point charge that electrode and rear electrode were simulated before it was equivalent to generates in their position.
The present invention also provides a kind of three-dimensional atom probe that comprises the reflector as described here.In one embodiment, preceding electrode preferably has concave surface, and this concave surface has constant radius of curvature, and electrode and being used for detected the distance between the detector of ion of three-dimensional atom probe before the radius of curvature of preceding electrode was substantially equal to.Advantageously, rear electrode has concave surface, and this concave surface has constant radius of curvature, and the radius of curvature of rear electrode is substantially equal to rear electrode and is used for detecting distance between the detector of ion of three-dimensional atom probe.
Description of drawings
Referring now to accompanying drawing as an example embodiments of the invention are only described, in the accompanying drawings:
Fig. 1 is the plane graph that the reflector of the present invention of equipotential line is shown.
Fig. 2 is the plane graph of reflector of the present invention that the example path of ion is shown.
Fig. 3 is the plane graph of reflector of the present invention that the example path of ion is shown.
Fig. 4 is the plane graph of reflector of the present invention, and the path of the ion with different initial ion tracks is shown, thus if use location sensitive detectors then analysis diagram picture.
Fig. 5 is the plane graph of reflector of the present invention that the path of the ion with different primary powers is shown.
Embodiment
Reflector can be included as the part of three-dimensional atom probe.Three-dimensional atom probe is from the independent atom of surface removal of needle shaped specimens with small tip radius.Atom becomes ion, and is quickened towards detector plates, and this detector plates is big as much as possible, and detection and atom are in the position of the corresponding ion in the position of sample surface.Detector electronics is measured the position of ionic bombardment detector plates, and also by measuring the TOF of ion from the sample to the detector, measures the mass-to-charge ratio of consequent ion.
Reflector is by generating the direction that changes ion greater than the current potential of ion energy equivalent.Ion enters reflector angularly with respect to the radius of electrode usually, so that ion passes reflector with elliptical path.Detector from ion the source from them to the path offset of reflector.Under the limiting case of conventional planar reflectron, radius becomes the longitudinal axis of reflector, and ellipse becomes parabola.
Reflector of the present invention preferably is configured, and makes to pass the time that three-dimensional atom probe spends, and is included in the time that spends in the reflector, and is irrelevant with the primary power of ion.This is called as the time and focuses on, and has improved mass spectrometric mass resolution and do not introduce the aberration of significant quantity.
Three-dimensional atom probe is used to check the metal and the semiconductor structure of the structure of material, particularly atomic level.Three-dimensional atom probe will comprise time set, is used for measuring ion and advances the time that preset distance spent within three-dimensional atom probe.Ion passes electric field, and this TOF can be used for calculating the mass-to-charge ratio of ion, thereby determines its chemical identity.The universal relation of three-dimensional atom probe and they and atom-probe is disclosed in publication " Atom Probe Field Ion Microscopy " byM.K.Miller, A.Cerezo, M.G.Hetherington and G.D.W.Smith, among the OUP1996, it is combined in this.
In three-dimensional atom probe, to be launched by zone from the ion of sample from the tip, this depends on curvature.They are by the approximate tip curvature that is transmitted into radially.Detector typically is positioned at from most advanced and sophisticated 80～600mm.Detector typically is square or circle, and has the width of about 40～100mm.
On the tip of sample, there is such zone, will clashes into detector from the ion from sample emission in this zone.The ratio of the image that detects and the linear-scale of the imaging region on the sample is known as magnification ratio.Magnification ratio is typically for the optimum analysis of sample and therefore Yan Taida need be reduced.Magnification ratio can be by reducing to get off: reduce detector distance; Increase tip radius; Perhaps increase detector size.Because actual, detector is limited dimensionally, tip radius be limited to 50 and 100nm between, and detector distance needs big as much as possible.Therefore, realize that the best mode that magnification ratio reduces is the quite wide cone angle of accepting from the emitting ions at tip.Yet this means that reflector must be with the input angle work of wide region.Be desirable more than 30 degree typically.Yet for conventional planar reflectron, if cone angle much larger than 8 degree, aspect mass resolution and from the viewpoint of aberration, performance all reduces.This means that also detector distance will not conform to desirably shortening.
See figures.1.and.2, reflector 1 according to the present invention comprises crooked preceding electrode 2.In this specific embodiment, preceding electrode 2 forms with the shape of the part of spheroid, makes it have constant radius of curvature.Preceding electrode 2 has recessed side 6 and protruding side 7, and has the diameter of about 80mm～200mm.Preceding electrode 2 comprises trickle grid or grid.Grid allows about 90%～95% incident ion to pass.
A plurality of annular electrodes 4 are arranged in preceding electrode 2 back, the protruding side 7 of electrode 2 before being arranged in.Annular electrode 4 does not comprise grid, but is the ring-type with center hole, and ion can freely pass this center hole.The number of these electrodes, they the interval with and on voltage can change along with particular design.
In one embodiment, rear electrode 3 end relative that be positioned at reflector 1 with preceding electrode 2.Rear electrode 3 typically separates 40～100mm with preceding electrode 2.This distance depends on the many factors according to magnification ratio and time focusing demand.Thereby annular electrode 4 is between two parties between preceding electrode 2 and rear electrode 3.
The radius of curvature of preceding electrode 2 preferably is equal to or less than the radius of curvature of rear electrode 3.
In this embodiment, the radius of curvature of preceding electrode 2 can be similar to detector and preceding electrode 2 between distance identical.The radius of curvature of the upper surface 5 of rear electrode 3 can be basically with detector and rear electrode 3 between distance identical.Before electrode 2 and upper surface 5 each be shaped as the part of spheroid, this spheroid can make their center approach detector.This layout allow reflector 1 with the ion space focus on the detector.
With reference to Fig. 3, as entering angle ψ during up to about 45 °, reflector 1 is realized the space-focusing of ion to the detector.Reflector 1 can reduce the magnification ratio of three-dimensional atom probe, makes image on the detector corresponding to the much bigger zone of sample.Point 12 is centers of the spheroid of electrode 2,3, also is the focus of the elliptical path followed of ion.
Fig. 4 is the plane graph that the different geometric reflectors of the present invention of ion trajectory is shown.In reflector 1, ion is followed elliptical path.Oval focus is in the center of curvature of electrode.Analytic expression exists, and is used for oval major diameter and minor diameter, and other angle, and it illustrates and is used for given reflectron parameters, and is used for each angle that the datum line between incident ion path and the sample tip and the center of curvature produces.Fig. 4 shows the position of detector 11.
Track from analytic expression calculating institute drawings attached.The time that spends in reflector for ion and the time-derivative of ion energy, analytic expression also is available.The latter is used to be identified for calculating the reflectron parameters of above-mentioned track.
Fig. 5 shows from sample with the primary power scope example path with the ion of equal angular emission.The ion that illustrates has+the interior excessive energy changing of/-10% scope.Typically, the energy changing in expectation+/-1% scope.
Reducing of aberration is possible, because the lateral shift of the ejaculation position of the ion that is caused by energy changing can compensate by being changed by the identical ejaculation angle that energy changing caused.This center of curvature at electrode takes place when approaching detector location.With reference to Fig. 3, enter angle Φ and to penetrate angle Φ identical, this shows that the position of ion on detector significantly do not depend on energy of ions.
In use, preceding electrode 2, rear electrode 3 and annular electrode 4 are applied current potential.The current potential that is applied to back plate 3 is greater than the energy equivalent of wanting measured ion.This guarantees that ion is reflected to ion source before arriving rear electrode 3.
The current potential that applies to all electrodes is calculated, and leaves the center of curvature to guarantee that field in the reflector is always pointed to radially.It only is the edge effect that this fact of part spheroid is caused with electrode before minimizing and rear electrode that annular electrode keeps correct current potential.
In this embodiment, annular electrode 4 placed in the middle is spaced and remains on suitable voltage, as far as possible closely is equivalent to the field that the mathematical point electric charge of the desired value that is positioned at the center of curvature is generated to guarantee field in the reflector.Each remains on such current potential annular electrode 4, and this current potential can be present in their position owing to the point charge that reflector 1 is intended to simulate.
In this embodiment, equipotential field lines 13 bendings, and be essentially the shape of a spheroid part.The field that point charge generated of the ball centre that electrode limited before and after the approximate imitation in the field that reflector 1 is generated is positioned at.The front and back ball centre that electrode limited preferably approaches detector.The distance of front and back ball centre that electrode limited and electrode 2,3 can be approximate identical with the distance of detector and each electrode 2,3.If detector is from the axle offset of electrode 2,3, then before and after the spheroid that electrode limited the center preferably not with detector at same position.Because reflector 1 is the simulation points electric charge basically, so the ion in the reflector moves with ellipse.
At first pass the grid of preceding electrode 2 from the ion of ion source 10.The path of ion is changed by the non-homogeneous current potential of its experience.Ion passes at least some the center bore in the annular electrode 4.Ion continues experience in reflector 1 current potential makes ion before plate after the arrival 3, and its speed on the elliptic orbit direction of principal axis is reduced to zero.The current potential that is applied to back plate 3, ring 4 and preceding electrode 2 makes ion quicken to return and leave back plate 3 towards preceding electrode 2.Ion passes annular electrode 4 and preceding electrode 2 then and continues to advance up to the bump detector.
It is measured that ion advances to the time that detector spends near the point the ion source, and be used to calculate the mass-to-charge ratio of ion.The given value of the mass-to-charge ratio by the reference ion is determined the identity of ion.
Typically, grid is in earth potential, and rear electrode remains on 1.08 times current potential of the nominal energy that equals typically to be approximately ion.This guarantee ion can not penetrate too dark and with the back plate collision of reflector.Required in practice current potential amount changes along with the concrete structure of device, and can not be constant.Intermediate potential before annular electrode remains between the current potential of the current potential of electrode 2 and rear electrode 3.The current potential of annular electrode 4 increases towards rear electrode 4.The current potential of annular electrode 4 is calculated, and keeps radial basically with the edge at reflector 1.Thereby annular electrode has compensated the part that only forms spheroid rather than the front and back electrode 2,3 of complete spheroid.
Reflector of the present invention can be used in time-of-flight mass spectrometer, atom-probe or the three-dimensional atom probe.
Preceding electrode is described to grid or grid.Alternatively, it can be formed by the solid material with hole, perhaps can replace with the electrostatic lens arrangement of being made up of the further annular electrode that remains on different voltages.
Rear electrode is described to spherical bending, yet rear electrode can also have dissimilar curvature or plane.The curvature of preceding electrode can not be constant also.Before or after electrode can be oval-shaped.Typically, the shape of preceding electrode has bigger influence for ion trajectory than rear electrode, therefore can use planar back electrode.Alternatively, use the preceding electrode on plane with the rear electrode of bending.Therefore electrode and rear electrode needn't be concentric before.
The center of the spheroid that preceding electrode and rear electrode are limited has been described to be adjacent to or approach detector.Alternatively, the center of the spheroid that preceding electrode and rear electrode limited can be positioned at the position away from detector.Therefore, the radius of curvature of preceding electrode and/or rear electrode needn't be substantially equal to the distance of electrode to detector.
Claims (21)
1. one kind is used for comprising at the reflector of time-of-flight mass spectrometer deflection from the ion of sample:
Preceding electrode; With
Rear electrode;
Wherein, at least one in the electrode of described front and back can generate crooked electric field; And described front and back electrode is configured to the image that the time of carrying out focused on and resolved sample.
2. reflector according to claim 1, wherein, described preceding electrode has in the face of ionogenic concave surface.
3. reflector according to claim 1 and 2, wherein, described rear electrode has in the face of ionogenic concave surface.
4. according to any one the described reflector in the aforementioned claim, wherein, the concave surface of described preceding electrode is with constant radius of curvature bending.
5. according to any one the described reflector in the aforementioned claim, wherein, the concave surface of described rear electrode is with constant radius of curvature bending.
6. according to any one the described reflector in the aforementioned claim, wherein, in use, in the time of in being included in three-dimensional atom probe, described before the radius of curvature of electrode be substantially equal to described before being used in electrode and the described time-of-flight mass spectrometer detect distance between the detector of ion.
7. according to any one the described reflector in the aforementioned claim, wherein, in use, in the time of in being included in time-of-flight mass spectrometer, the radius of curvature of described rear electrode is substantially equal to being used in described rear electrode and the described time-of-flight mass spectrometer and detects distance between the detector of ion.
8. according to any one the described reflector in the aforementioned claim, wherein, the radius of curvature of described preceding electrode and the radius of curvature of described rear electrode make that described two electrodes are concentric.
9. according to any one the described reflector in the aforementioned claim, wherein, described before electrode and described rear electrode be configured, make when current potential is applied in the described electrode at least one, electric field is generated, and it is equivalent to the electric field that is produced by point charge basically.
10. according to any one the described reflector in the aforementioned claim, wherein, a plurality of targets are arranged between described preceding electrode and the described rear electrode.
11. reflector according to claim 10, wherein, each in the described target remains on such current potential, this current potential be equivalent to described before the current potential that generates in their position of electrode and the rear electrode point charge of simulating.
12. according to claim 10 or 11 described reflectors, wherein, each in the described target is formed ring.
13. according to any one the described reflector in the aforementioned claim, wherein, described preceding electrode remains on earth potential.
14. according to any one the described reflector in the aforementioned claim, wherein, described rear electrode remains on approximate 1.08 times current potential with respect to the average energy of the ion that will be reflected of electrode before described.
15. according to any one the described reflector in the aforementioned claim, wherein, described preceding electrode package purse rope lattice.
16. according to any one the described reflector in the aforementioned claim, wherein, described rear electrode comprises plate.
17. a time-of-flight mass spectrometer comprises the reflector that any one limited in the claim as described above.
18. the time-of-flight mass spectrometer of use such as the reflector that claim 1 limited, wherein: electrode has concave surface before described, and this concave surface has constant radius of curvature; And
Before described the radius of curvature of electrode be substantially equal to described before being used in electrode and the described time-of-flight mass spectrometer detect distance between the detector of ion.
19. time-of-flight mass spectrometer according to claim 18, wherein:
Described rear electrode has concave surface, and this concave surface has constant radius of curvature; And
The radius of curvature of described rear electrode is substantially equal to being used in described rear electrode and the described time-of-flight mass spectrometer and detects distance between the detector of ion.
20. according to any one the described reflector in the aforementioned claim, wherein, described electrode is placed so that aberration minimizes.
21. according to any one the described reflector in the aforementioned claim, wherein, described time-of-flight mass spectrometer is an atom-probe.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0509638A GB2426120A (en) | 2005-05-11 | 2005-05-11 | A reflectron for use in a three-dimensional atom probe |
| GB0509638.3 | 2005-05-11 | ||
| US60/682,863 | 2005-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101176185A true CN101176185A (en) | 2008-05-07 |
Family
ID=34685459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006800157105A Pending CN101176185A (en) | 2005-05-11 | 2006-05-10 | Reflectron |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN101176185A (en) |
| GB (1) | GB2426120A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104067370A (en) * | 2011-12-22 | 2014-09-24 | 布鲁克化学分析有限公司 | Improvements in or relating to mass spectrometry |
| CN104392888A (en) * | 2014-10-17 | 2015-03-04 | 大连民族学院 | Compact ion reflector |
| CN104704604A (en) * | 2012-10-10 | 2015-06-10 | 株式会社岛津制作所 | Time-of-flight mass spectrometer |
| CN106653559A (en) * | 2016-11-18 | 2017-05-10 | 西北核技术研究所 | Time-of-flight mass spectrometer with wide energy focusing reflector |
| TWI732248B (en) * | 2019-03-08 | 2021-07-01 | 日商東芝記憶體股份有限公司 | Atom probe inspection device, field ion microscope and distortion correction method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3524536A1 (en) * | 1985-07-10 | 1987-01-22 | Bruker Analytische Messtechnik | FLIGHT TIME MASS SPECTROMETER WITH AN ION REFLECTOR |
| US5017780A (en) * | 1989-09-20 | 1991-05-21 | Roland Kutscher | Ion reflector |
| US6875981B2 (en) * | 2001-03-26 | 2005-04-05 | Kanazawa Institute Of Technology | Scanning atom probe and analysis method utilizing scanning atom probe |
| DE10156604A1 (en) * | 2001-11-17 | 2003-05-28 | Bruker Daltonik Gmbh | Spatial angle focusing reflector for flight time mass spectrometer has field between last annular aperture and terminating aperture made weaker than between preceding reflector apertures |
-
2005
- 2005-05-11 GB GB0509638A patent/GB2426120A/en not_active Withdrawn
-
2006
- 2006-05-10 CN CNA2006800157105A patent/CN101176185A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104067370A (en) * | 2011-12-22 | 2014-09-24 | 布鲁克化学分析有限公司 | Improvements in or relating to mass spectrometry |
| CN104704604A (en) * | 2012-10-10 | 2015-06-10 | 株式会社岛津制作所 | Time-of-flight mass spectrometer |
| CN104704604B (en) * | 2012-10-10 | 2016-12-28 | 株式会社岛津制作所 | Time of-flight mass spectrometer |
| CN104392888A (en) * | 2014-10-17 | 2015-03-04 | 大连民族学院 | Compact ion reflector |
| CN104392888B (en) * | 2014-10-17 | 2017-07-11 | 大连民族学院 | A kind of compact ion reflector |
| CN106653559A (en) * | 2016-11-18 | 2017-05-10 | 西北核技术研究所 | Time-of-flight mass spectrometer with wide energy focusing reflector |
| CN106653559B (en) * | 2016-11-18 | 2018-06-26 | 西北核技术研究所 | A kind of time of-flight mass spectrometer with wide Voice segment reflector |
| TWI732248B (en) * | 2019-03-08 | 2021-07-01 | 日商東芝記憶體股份有限公司 | Atom probe inspection device, field ion microscope and distortion correction method |
Also Published As
| Publication number | Publication date |
|---|---|
| GB0509638D0 (en) | 2005-06-15 |
| GB2426120A (en) | 2006-11-15 |
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