CN101174533A - End-window X ray tube - Google Patents

End-window X ray tube Download PDF

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Publication number
CN101174533A
CN101174533A CNA2006101142221A CN200610114222A CN101174533A CN 101174533 A CN101174533 A CN 101174533A CN A2006101142221 A CNA2006101142221 A CN A2006101142221A CN 200610114222 A CN200610114222 A CN 200610114222A CN 101174533 A CN101174533 A CN 101174533A
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CN
China
Prior art keywords
window
thin film
ray
ray tube
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006101142221A
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Chinese (zh)
Inventor
田宇纮
林德旭
商颖健
Original Assignee
BEIJING PUXI SCIENTIFIC INSTRUMENT Co Ltd
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Publication date
Application filed by BEIJING PUXI SCIENTIFIC INSTRUMENT Co Ltd filed Critical BEIJING PUXI SCIENTIFIC INSTRUMENT Co Ltd
Priority to CNA2006101142221A priority Critical patent/CN101174533A/en
Publication of CN101174533A publication Critical patent/CN101174533A/en
Pending legal-status Critical Current

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Abstract

The invention provides an end window X ray tube, which comprises a casing, a cathode filament used for transmitting electron beams, a thin film anode target and a berylium window. The cathode filament is encapsulated in the casing, the berylium window is arranged on the end face of the casing and positioned in front of the electron beam, the thin film anode target is arranged between the cathode filament and the berylium window, and the thin film anode target are fixedly connected inside the casing. Simultaneously, the invention adopts the earthing of casing and the negative high-voltage power supply mode of the cathode filament, and the casing which is electrically insulated and protected is avoided, thus being beneficial to the radiation of the X ray tube. The invention has the advantages that firstly, because X ray is required to penetrate through a thin film anode, and the X ray can emit from the end window, the low energy part of the X ray is filtered and weakened, the high energy part of the X ray is influenced little, thereby an X ray spectrum with weaker background is obtained; secondly, a more complex electric field is not required to control the deflection direction of an electron, thus being beneficial to the product-forming and the mass of the end window X ray tube.

Description

A kind of end window X-ray tube
Technical field
The present invention relates to a kind of end window X-ray tube, belong to the xrf analysis instrument.
Background technology
X-ray tube is the core component in the xrf analysis instrument, and its performance is directly connected to the performance index of instrument.Tradition end window X-ray tube structure is as shown below, and electron beam is suitably chosen electric field strength from cathode emission, make electron beam under the effect of electric field force by the target surface of track bombardment anode as shown in Figure 1, produce X ray.Its weak point is that the final incident direction of beam bombardment anode target surface becomes 180 ° with outgoing X ray direction, causes the intensity of bremstrahlen of its generation lower.In addition, existing structure need utilize the direction of motion of electric field controls electron beam and the position of bombardment plate target, and comparatively strict to various parameter controls, manufacturing process is comparatively complicated.
In addition, patent of invention (patent No. 200480011229.X) has adopted the technology of X ray transmission thin film positive pole equally, because this X-ray tube adopts tungsten target, anode voltage higher (100KV), power is bigger, therefore specialized designs the electron beam retarding electrode, to reduce the heat that anode produces, reaching increases the X-ray tube purpose in useful life.Its weak point is:
1, because anode high voltage is higher, the energy that produces photoelectron beam is higher, is not suitable for light metal is measured.Especially inapplicable is that five kinds of elements of RoHS command request are measured.
2, complex structure, strict to manufacture craft.
3, supply voltage height has increased the power supply manufacture difficulty, has increased difficulty to insulating protection simultaneously.Be not suitable for the small portable instrument field.
Summary of the invention
The object of the present invention is to provide a kind of end window X-ray tube, effectively filter out X ray low energy part, make that outgoing X ray background reduces, characteristic peak is obvious, the sensitivity of measurement is significantly improved.
A kind of end window X-ray tube of the present invention comprises shell, is used for cathode filament, thin film positive pole target, the beryllium window of divergent bundle.Wherein cathode filament is packaged in the shell, and described beryllium window is arranged on the end face of shell, and is positioned at the dead ahead of electron beam, and described thin film positive pole target is arranged between cathode filament and the beryllium window, and this thin film positive pole target is fixedly connected on the inside of described shell.Simultaneously, the present invention adopts the earthing of casing, cathode filament negative high voltage powering mode, can avoid shell is carried out the electric insulation protection, helps the X-ray tube heat radiation.
The advantage of a kind of end window X-ray tube of the present invention is:
1, because the X ray that the beam bombardment plate target produces need pass thin film positive pole could penetrate from the end window of ray tube, therefore the low energy of X ray partly is filtered weakening, and high energy part (using in the measurement) institute is influenced little, thereby obtain the more weak X ray spectrum of background, be that late detection work reduces difficulty, finally reach the purpose that the sensitivity with instrument improves greatly.
2, electron beam is along initial transmissions direction bombardment plate target, and its movement locus is simple relatively, does not need the yawing moment with comparatively complicated electric field controls electronics, has reduced the difficulty and the manufacturing cost of X-ray tube processing and manufacturing.
3, simple in structure, make it help commercialization and mass, its performance is compared with existing window construction X-ray tube and is had advantage, can satisfy the needs that x-ray apparatus is produced in batches.
Below in conjunction with drawings and Examples the present invention is described further.
Description of drawings
Fig. 1 is the structural representation of existing X-ray tube;
Fig. 2 is the structural representation of end window X-ray tube of the present invention;
Embodiment
The described a kind of end window X-ray tube of present embodiment by shown in Figure 2, comprises shell 3, is used for cathode filament 4, thin film positive pole target 2, the beryllium window 1 of divergent bundle 5.Wherein shell 3 adopts copper-based material to make, and its inside is provided with the ring support 31 of common installation thin film positive pole, these shell 3 direct ground connection.Described cathode filament 4 is packaged in the shell 3, and employing-40kV power voltage supply.Described beryllium window 1 is arranged on the end face of shell 3, is positioned at the dead ahead of electron beam 5.Described thin film positive pole target 2 is arranged between cathode filament 4 and the beryllium window 1, adopting thickness in this example is that the film molybdenum sheet of 20 μ m is as thin film positive pole target 2, this thin film positive pole target 2 is welded on the ring support 31 of shell 3 inside, can guarantee good electrical contact and thermo-contact, because the thermal conductivity of copper is good, help the anode heat radiation, guaranteed that X-ray tube has long working life.
The described end window X-ray tube of present embodiment, by the target surface of cathode filament 4 electrons emitted bundles 5 along rectilinear direction bombardment thin film positive pole 2, the X ray 6 identical with electron beam 5 directions passes thin film positive pole 2 and beryllium window 1, is applied to measuring under the operating state.This comparatively simple structure has reduced the difficulty of production and processing on the one hand, has reduced the bremstrahlen in low energy district on the other hand to a certain extent, the X ray background that obtains is weakened, thereby reach the purpose that improves the xrf analysis instrumental sensitivity greatly.

Claims (4)

1. end window X-ray tube, it is characterized in that: comprise shell, be used for cathode filament, thin film positive pole target, the beryllium window of divergent bundle, wherein cathode filament is packaged in the shell, described beryllium window is arranged on the end face of shell, and be positioned at the dead ahead of electron beam, described thin film positive pole target is arranged between cathode filament and the beryllium window, and this thin film positive pole target is fixedly connected on the inside of described shell, and adopts the earthing of casing, cathode filament negative high voltage powering mode.
2. a kind of end window X-ray tube as claimed in claim 1 is characterized in that: described shell adopts copper-based material to make.
3. a kind of end window X-ray tube as claimed in claim 1 is characterized in that: described enclosure is provided with ring support, and described thin film positive pole target welding is connected on this ring support.
4. a kind of end window X-ray tube as claimed in claim 1 is characterized in that: described thin film positive pole target is that thickness is the film molybdenum sheet of 20 μ m.
CNA2006101142221A 2006-11-02 2006-11-02 End-window X ray tube Pending CN101174533A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA2006101142221A CN101174533A (en) 2006-11-02 2006-11-02 End-window X ray tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNA2006101142221A CN101174533A (en) 2006-11-02 2006-11-02 End-window X ray tube

Publications (1)

Publication Number Publication Date
CN101174533A true CN101174533A (en) 2008-05-07

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ID=39422945

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006101142221A Pending CN101174533A (en) 2006-11-02 2006-11-02 End-window X ray tube

Country Status (1)

Country Link
CN (1) CN101174533A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104616952A (en) * 2012-12-31 2015-05-13 同方威视技术股份有限公司 Cathode-control multi-cathode distributed X-ray device
CN114705594A (en) * 2022-03-11 2022-07-05 哈尔滨工业大学 Positive electricity environment simulation device for realizing lunar surface high potential by utilizing X-ray irradiation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104616952A (en) * 2012-12-31 2015-05-13 同方威视技术股份有限公司 Cathode-control multi-cathode distributed X-ray device
CN114705594A (en) * 2022-03-11 2022-07-05 哈尔滨工业大学 Positive electricity environment simulation device for realizing lunar surface high potential by utilizing X-ray irradiation

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20090327

Address after: Postcode 3, Ping three road, Pinggu District, Beijing, China: 101200

Applicant after: Puxi General Instrument Co., Ltd., Beijing

Address before: Beijing, Zhongguancun, Haidian District South Street, No. 8 Granville science and technology building building, zip code: 100081

Applicant before: Beijing Puxi Scientific Instrument Co., Ltd.

ASS Succession or assignment of patent right

Owner name: BEIJING PUXI GENERAL INSTRUMENT CO., LTD.

Free format text: FORMER OWNER: BEIJING PUXI SCIENTIFIC INSTRUMENTS CO., LTD.

Effective date: 20090327

C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20080507