CN101165458A - Electronic fine-grained segmentation device and its method - Google Patents
Electronic fine-grained segmentation device and its method Download PDFInfo
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- CN101165458A CN101165458A CNA2006101359407A CN200610135940A CN101165458A CN 101165458 A CN101165458 A CN 101165458A CN A2006101359407 A CNA2006101359407 A CN A2006101359407A CN 200610135940 A CN200610135940 A CN 200610135940A CN 101165458 A CN101165458 A CN 101165458A
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Abstract
The method is used for, based on first and second periodic signals, calculating a phase shift theta as the base of the space shift distance accumulation. The electronic subdivision device comprises: a decimal counting unit used for generating a phase value theta and cycle number N; an integer counting unit used for generating cycle number M; and a decision unit used for deciding if the cycle number N or the cycle number M will be used to calculate said phase shift.
Description
Technical field
The invention relates to a kind of measurement technology, and particularly relevant for a kind of electronic fine-grained segmentation device and method thereof.
Background technology
In recent years because the rise of semiconductor industry and electronic industry, precision positioning measures product and is widely used in the processing procedure and testing apparatus of semiconductor industry and electronic industry, along with progressing greatly day by day of process technique, littler live width constantly is developed with more accurate process technique, even minification to how the rice grade, cause the precision positioning measurement technology also must weed out the old and bring forth the new.Electronic features is cut apart (electronicinterpolation) technology and constantly is developed, and it reaches the measurement accuracy of promoting sensor and the purpose of resolution by cutting apart the cycle string ripple signal that the sensing tolerance gets.Commercially available resolution is not less than 1/1024 electronic fine-grained segmentation device, and the input frequency range all can't satisfy the at a high speed how demand of Mi Dingwei.
No matter optics chi, Magnetic ruler or interferometer all must utilize electronic fine-grained segmentation device, just can reach higher displacement resolution.But when pursuing high displacement solution and analysing, the commercial goods requirement that but do not reach high-speed displacement at present makes how rice positioning control can only rest on the field of displacement at a slow speed.
The framework that several electronic features of known proposition are cut apart, for example United States Patent (USP) case US4225931 and US4462083 disclose a kind of electronic features and cut apart framework.In addition, the framework that United States Patent (USP) case US5625310 proposes is to utilize the resistance chain mode to obtain the octonary square wave that industry is commonly called as, and cycle string ripple signal is divided into eight quadrants, and collocation SIN/COS with table look-up (Look_up table) electron gain phase value Φ.Moreover, the electronic features that United States Patent (USP) case US6772078 proposes cut apart framework system with analog digital (A/D) converter read value collocation SIN/COS with table look-up, electron gain phase place and quadrant are revised the integer count value, solve that electronics is cut apart and the number of cycles of counter between stationary problem.
Summary of the invention
The present invention proposes a kind of firmware framework and decision-making technique, and firmware framework and electronic fine-grained segmentation device that decision-making technique developed can satisfy displacement and resolve and be not less than 1/1024 according to this, and the input frequency range is up to the demand of 10MHz.
In order to address the above problem, the invention provides a kind of electronic fine-grained segmentation device, in order to from first and second periodic signal, calculate a phase-shifted θ, as the basis of space displacement apart from accumulative total.Electronic fine-grained segmentation device comprises decimal counting unit, integer counting unit and logical decision unit.Decimal counting unit has an efficient sampling frequency range, in order to receive and according to first and second periodic signal voltage level, to produce the periodicity N under phase value Φ and the predetermined period.Integer counting unit is in order to receive and according to first and second periodic signal, to produce the periodicity M under the aforementioned predetermined period.The logical decision unit is couple to decimal counting unit and integer counting unit, in order to export aforementioned phase-shifted θ.When between decimal counting unit and integer counting unit during the no-carry error, adopt phase value Φ and periodicity M, with calculating phase-shifted θ.When having the carry error between decimal counting unit and integer counting unit, and the 2K (K is an integer) that the frequency of first and second periodic signal is not more than the efficient sampling frequency range of decimal counting unit divides for the moment, adopt phase value Φ and periodicity N, to calculate phase-shifted θ.When having the carry error between decimal counting unit and integer counting unit, and the frequency of first and second periodic signal is divided for the moment greater than the 2K (K is an integer) of the efficient sampling frequency range of decimal counting unit, adopt phase value Φ and periodicity M, to calculate phase-shifted θ.
According to an embodiment of the present invention, decimal counting unit can also comprise: first and second sample circuit, respectively first and second periodic signal is taken a sample; First and second analog-digital converter is couple to and receives the output of first and second sample circuit respectively, to first and second periodic signal of sampling, carries out the analog digital conversion; And the decimal counting module, be couple to first and second analog-digital converter, in order to output, produce phase value Φ and periodicity N according to first and second analog-digital converter.
According to an embodiment of the present invention, integer counting unit can also comprise: first and second comparator circuit receives first and second periodic signal respectively, and according to reference to accurate position, exports first and second periodic signal of square wave; And the integer counting module, be couple to first and second comparator circuit, in order to output, produce periodicity M according to first and second comparator circuit.
The present invention more provides a kind of electronic fine-grained segmentation method, in order to measure the phase-shifted θ of first and second periodic signal.Electronic fine-grained segmentation method comprises: receive first and second periodic signal; Calculate the little counting number of first and second periodic signal, to produce phase value Φ and the periodicity N under predetermined period; Calculate the integer counting of first and second periodic signal, count M with the one-period that is created under the predetermined period, and calculate an absolute difference of adjacent twice periodicity; And compare cycle is counted N and periodicity M.When periodicity N equals periodicity M, according to phase value Φ and periodicity M, to produce phase-shifted θ.When periodicity N is not equal to periodicity M and absolute difference during greater than a predetermined difference value, according to phase value Φ and periodicity M, to produce phase-shifted θ.When periodicity N is not equal to periodicity M and absolute difference during smaller or equal to predetermined difference value, according to phase value Φ and periodicity N, to produce phase-shifted θ.
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and cooperate appended graphicly, be described in detail below.
Description of drawings
Fig. 1 illustrates the circuit framework synoptic diagram of electronic fine-grained segmentation device of the present invention.
Fig. 2 A illustrate sine function with and the digitizing rule, Fig. 2 B illustrate cosine function with and the digitizing rule, Fig. 2 C illustrates the example of the numeral value of reading.
Fig. 3 A and Fig. 3 B illustrate decimal counting unit and the integer counting unit quadrant component-bar chart as counting usefulness respectively.
Fig. 4 illustrates the key diagram of quadrant differentiation and progression principle.
Fig. 5 A illustrates the sequential chart when synchronous.
Fig. 5 B illustrates the sequential chart when asynchronous.
Fig. 6 illustrates the schematic flow sheet of electronic fine-grained segmentation method of the present invention.
The primary clustering symbol description
The 10:A/D converter
12: phase comparator
13: the high speed signal handling part
15: scrambler
14: digital signal processor
100: electronic fine-grained segmentation device
110: decimal counting unit
120: integer counting unit
130: the logical decision unit
112a, 112b: sample circuit
114a, 114b: analog-digital converter (A/D)
116: the decimal computing module
122a, 122b: comparator circuit
124: the integer counting module
Embodiment
Fig. 1 illustrates the configuration diagram of electronic fine-grained segmentation device of the present invention.As shown in Figure 1, electronic fine-grained segmentation device 100 comprises decimal counting unit 110, integer counting unit 120 and logical decision unit 130.Decimal counting unit 110 can also comprise sample circuit 112a, sample circuit 112b, analog-digital converter 114a, analog-digital converter 114b and decimal computing module 116.Integer counting unit 120 can also comprise comparator circuit 122a, comparator circuit 122b and integer counting module 124.
Decimal counting unit 110 respectively can be from sensor 102a, 102b receiving cycle string ripple signal A, B with integer counting unit 120.At this cycle string ripple signal A, B will be example with cosine (cos) waveform signal with sinusoidal (sin), but when practical operation not as limit, for example, cycle string ripple signal A, B also can be sawtooth wave.In addition, the phase differential of cycle string ripple signal A, B preferably can be 90 degree.Decimal counting unit 110 can be counted phase signal A, the B that receives respectively with integer counting unit 120, and obtains periodicity N, M respectively.Periodicity N, M send logical decision unit 130 subsequently to, with one of them of decision and output periodicity N, M.To describe the function mode of each module below in detail.
Behind cycle string ripple signal A, the B that decimal counting unit 110 receives from sensor 102a, 102b, just make signal A, B takes a sample through sample circuit 112a, 112b respectively.This moment institute take a sample, and that obtain is magnitude of voltage Va (n) and the Vb (n) of cycle string ripple signal A, B, passes through analog-digital converter 114a, 114b afterwards respectively, generation digital signal A1, B1.Digital signal A1, B1 just produce periodicity N after counting through decimal computing module 116, are sent to logical decision unit 130 afterwards again.
In decimal computing module 116, calculate the quantity and the phase place of string ripple.For example, sine function has
Characteristic, so the number of times of counting by 2 π just can be learnt the relative shift when measuring.Except calculating above-mentioned number of times, another one is the problem of direction.Because sine in the present embodiment and cosine are to belong to periodic function, thus will get back to original numerical value every 2 π, so except determining above-mentioned number of times, the direction when also needing to know by 2 π.In other words, for example arriving 1 ° from 359 ° via 360 ° is to belong to forward, and this moment, counting just needed to adopt the mode that increases progressively.Otherwise, be to belong to oppositely if arrive 359 ° via 360 °, just this moment, counting needed to adopt the mode of successively decreasing to calculate from 1 °.
With the present embodiment is example, and it adopts the height of traditional method of indicating the pronunciation of a Chinese character function (arctangent) to resolve electronic fine-grained segmentation device, utilizes voltage level A1, the B1 of analog-digital converter 114a, 114b read cycle string ripple signal A, B each point, utilizes Φ=tan then
-1(A1/B1) the phase value Φ of acquisition cycle string ripple signal.
The function of decimal computing unit 110 is to measure the voltage level of cycle string ripple signal A, B, through traditional method of indicating the pronunciation of a Chinese character function calculation, the phase place of reduction cycle string ripple signal A, B, satisfies phase resolution and is not less than 1/1024 expectation.So the resolution of analog-digital converter 114a, the 114b of read cycle string ripple signal A, B voltage level must be greater than 10.Under the situation of considering noise, preferably use 12.Because the computing time of traditional method of indicating the pronunciation of a Chinese character function is very long, so the sampling frequency of decimal computing module 116 is far below 10MHz.
Quadrant differentiation and progression principle then are described.Fig. 2 A illustrate sine function with and the digitizing rule, Fig. 2 B illustrate cosine function with and the digitizing rule.The digitizing rule is when greater than 0 the time, is set at logical one, less than then being set at logical zero at 0 o'clock.Therefore, by Fig. 2 A and 2B as can be seen, the digital signal of the one-period of corresponding sine function (0-2 π) is 1,1,0,0, the digital signal of the one-period of corresponding cosine function is 1,0,, 0,1.After the said two devices combination, the digital value that can obtain one of four states is for (11), (01), (00) and (10), shown in Fig. 2 C.This one of four states corresponds to 0,1,2 and 3 each zone of the quadrant component-bar chart of Fig. 3 A respectively.
With reference to figure 4, its explanation quadrant is distinguished and the progression principle.With Fig. 4 outer ring is example, and the order of its numeral value of reading is (11), (01), (00) and (10), and this decimal quadrant AD_quad that corresponds to Fig. 3 A in proper order is 0 → 1 → 2 → 3 → 0, belongs to increase progressively counting.So when decimal computing module 116 was 0 → 1 → 2 → 3 as if the order change that detects AD_quad, the decimal count value was convenient to quadrant conversion place and is added up 1.Otherwise if detect the order change of AD_quad when being 3 → 2 → 1 → 0 → 3, the decimal count value is convenient to that quadrant conversion place is tired to subtract 1 when decimal computing module 116.
So, must, the decimal computing module carries out following step:
Step 1: according to the quadrant principle of distinction of Fig. 3 A, judge the quadrant position at the numeral value of reading A1, B1 place, produce AD_quad, it is 0,1,2,3.
Step 2: calculate decimal phase value Φ, wherein Φ=tan
-1(A1/B1).
Step 3: utilize above-mentioned quadrant AD_quad to add up the number of cycles N of four/one-period, its judgment mode is as follows: if AD_quad changes according to 0 → 1 → 2 → 3 → 0 order, then N adds up 1 one by one.If AD_quad changes according to 3 → 2 → 1 → 0 → 3 orders, then N is tired one by one subtracts 1.
At last, decimal computing module 116 sends resulting count value N to logical decision unit 130, and the count value M that exports with integer counting module 124 carries out logical decision.
Above-mentioned is the principle of work of decimal computing module, but the decimal computing module is to utilize the digital sampling mode, so its inborn restriction is arranged.According to sampling theorem, the acquisition displacement data θ that desire is correct, the frequency f of cycle string ripple signal A, B
1Must be for example less than the sampling frequency f of decimal counting unit 110
51/2nd.Also promptly, when the frequency f of cycle string ripple signal A, B
1Sampling frequency f greater than decimal computing module 116
5Two/for the moment, will cause data to lose.In addition, if need to judge direction, each string period of wave at least must sampling 4 points.Therefore, the frequency f of cycle string ripple signal A, B
1Preferably less than the sampling frequency f of decimal computing module 116
51/4th.Above-mentioned sampling spot only is the explanation example of present embodiment, and it can do suitable adjustment according to actual conditions.In addition, above-mentioned sampling principle f
1＜f
5/ 2 also just explain orally example, can do suitable change according to selected assembly during actual enforcement.
Decimal computing module 116 sampling frequency f
5Except being subjected to the A/D restriction of switching time, also be subjected to the restriction of computing time of the phase value Φ of decimal module.Therefore, generally speaking, the sampling frequency f of decimal computing module 116
5Be about system frequency f
sPer mille, so when the frequency f of cycle string ripple signal A, B
1If greater than system frequency f
sFour per milles the time, four/one-period number N that decimal computing module 116 is obtained is not enough to accept and believe.
Desire to address the above problem, present embodiment increases by one group of integer counting unit 120 of being made up of hardware circuit/firmware circuitry.Because integer counting unit 120 uses hardware circuit/firmware circuitry to form its sampling frequency f
6Be about system frequency f
s1/4th.Utilize the cycle count value of the integer counting unit 120 storage string ripple signals of this high frequency range.Therefore, when the frequency f of cycle string ripple signal A, B
1Less than f
s1/4th, data can not lost yet.
The mode of operation of integer counting unit 120 then is described.Behind cycle string ripple signal A, the B that integer counting unit 120 receives from sensor 102a, 102b, cycle string ripple signal A, B passes through comparator circuit 122a, 122b respectively.Then, integer counting module 124 reads the square wave output of comparator circuit 122a, 122b, and counts, so that integer counting module 124 can obtain number of cycles M.
Behind cycle string ripple signal A, B process comparator circuit 122a, the 122b, just can produce square-wave signal C1, C2 respectively, it is respectively 0 or 1 numerical value.As the little counting number in front, cycle string ripple signal A, B are greater than 0 semiperiod part, and comparator circuit 122a, 122b can export 1 numerical value respectively, and less than 0 semiperiod part, comparator circuit 122a, 122b can export 0 numerical value respectively, and be also promptly such shown in Fig. 2 A, 2B.At this moment, after the said two devices combination, the digital value that can obtain one of four states is (11), (01), (00) and (10).This one of four states corresponds to 0,1,2 and 3 each zone of the quadrant component-bar chart of Fig. 3 B respectively.
In like manner, distinguish and the progression principle, just can count the number of cycles M that integer counting unit is calculated according to the quadrant of Fig. 3 B and Fig. 4.Distinguish and the progression principle according to Fig. 3 B quadrant, via the quadrant variation order integration period number M of A, B signal, the numerical value of M is A, B signal period quantity four times, and industry is commonly called as and is quadruple.For convenience, present embodiment all is used as explaining orally example with quadruple, but in practical application, can adopt the 2n frequency multiplication to carry out.For example,, 4 above-mentioned quadrant principle of distinction can be revised as eight quadrant principle of distinction, and adopt three positions in the minimum bit to carry out adding up and the tired judgement that subtracts calculating of count value with octonary.
In addition, in above-mentioned integer counting unit 120,, for example be 0.5V because comparator circuit 122a, 122b can not be perfectly zero volt by the critical potential standard that logic low level (Lo) converts logic high standard (Hi) to.Therefore, this has caused the difference of the carry sequential of decimal counting unit 110 and integer counting unit 120, and then has produced the time of decimal counting unit 110 with integer counting unit 120 asynchronous carries.In this case, if the output sampling value occurs in the voltage level of cycle string ripple signal A, B just near zero volt place, the carry error will take place.
In order to overcome above-mentioned carry error, present embodiment adopts the counting output value of decimal counting unit 110 and integer counting unit 120 simultaneously, and utilizes the 130 pairs of the two counting output values in logical decision unit to judge and select for use.The function mode of the logical decision unit 130 of present embodiment then, is described.The counting output M that counting output Φ, N that logical decision unit 130 reception decimal counting units 110 are produced and integer counting unit 120 are produced, correct phase place in conjunction with complete cycle counting and A, B signal, overcome the problem of above-mentioned carry error, to determine correct phase-shifted θ.
The sampling frequency f of decimal counting unit 110
5Sampling frequency f far below integer counting unit 120
6, the renewal frequency f of logical decision unit 130 output valves
7Preferably be f
5, also be f
7=f
5, f in other words
7≈ f
s/ 100O.For example, as system frequency f
sBe 100MHz, then the sampling of integer counting unit 120 frequency f
6Be 25MHz, the sampling frequency f of decimal counting unit 110
5Be 100kHz, the sampling frequency f of logical decision unit 130
7Be 100kHz.Frequency f as cycle string ripple signal A, B
1Efficient sampling frequency range f less than decimal counting unit 110
5/ 4, during also promptly less than 25kHz, logical decision unit 130 is adjacent to read difference value between the number of cycles M value that integer counting unit 120 exports for twice-1,0 ,+three kinds of situations such as 1.
Also promptly, read absolute difference between the M value that integer counting unit 120 exported for twice greater than 1, the frequency f of the string ripple signal A of indication cycle, B if logical decision unit 130 is adjacent
1Greater than 25kHz.Therefore, can utilize the adjacent absolute difference that reads for twice between the M value that integer counting unit 120 exported in logical decision unit 130, judge whether four/one-period number N that decimal counting unit 110 is obtained is enough to accept and believe.
Illustrate further the judgment principle of logical decision unit 130 below.Under the situation that does not have the puzzlement of carry error, in other words decimal counting unit 110 equates with count value N, the M that integer counting unit 120 is exported.At this moment, logical decision unit 130 adopts the phase value Φ of decimal counting unit 110, and four/one-period number M of integer counting unit 120, and in the hope of phase-shifted θ, it is shown below.
N＝M
θ＝N×π/2+Φ，0≤Φ＜π/2
In addition, when the carry sequential difference of decimal counting unit 110 and integer counting unit 120, and the frequency f of cycle string ripple signal A, B
1Efficient sampling frequency range f less than decimal counting unit 110
5/ 4 o'clock, logical decision unit 130 adopted the phase value Φ of decimal counting units 110, and four/one-period number N, in the hope of phase-shifted θ, it is shown below.
θ＝N×π/2+Φ，0≤Φ＜π/2
When the carry sequential difference of decimal counting unit 110 and integer counting unit 120, and the frequency f of cycle string ripple signal A, B
1Efficient sampling frequency range f greater than decimal counting unit 110
5/ 4 o'clock, logical decision unit 130 adopted the phase value Φ of decimal counting unit, and four/one-period number M of integer counting unit 120, and in the hope of phase-shifted θ, it is shown below.
θ＝M×π/2+(π/2-Φ)，0≤Φ＜π/2
Above-mentioned example is to be that example is done explanation with four/one-period, but when reality is implemented, and can adopt the counting of taking a sample of different cycles.For example, when taking a sample with P/one-period, above-mentioned three calculating formulas can following three mathematical expressions replace.
θ＝N×2π/P+Φ，0≤Φ＜2π/P
θ＝N×2π/P+Φ，0≤Φ＜2π/P
θ＝M×2π/P+(2π/K-Φ)，0≤Φ＜2π/P
Fig. 5 A explanation when cycle string ripple signal A, the Dc bias of B, amplitude equal fully, and phase phasic difference 90 is when spending, the output valve θ of logical decision unit 130=M * pi/2+Φ=N * pi/2+Φ.Fig. 5 A shows the synchronous sequence of little counting number and integer counting, does not also promptly have aforesaid carry problem.Sampling spot S1, S2 all as can be seen the number of cycles N that exported of decimal counting unit 110 equate with the number of cycles M that integer counting unit 120 is exported.In the case, logical decision unit 130 just adopts the number of cycles M that integer counting unit 120 is exported.
Fig. 5 B explanation is worked as cycle string ripple signal A, B and is subjected to noise, when perhaps decimal counting unit 110 is with the 120 necessary operations asynchronism(-nization)s of integer counting unit, also be to be asynchronous sequential between little counting number and integer counting, near zero point, be easy to generate the carry error near phase value Φ.For the purpose of simplifying the description, with Φ normalization and distinguish ten five equilibriums, obtain the variation that numerical value 0.0～0.9 is represented Φ.Shown in Fig. 5 B,, will obtain 3.9,4.9,4.0 in regular turn if near sampling spot S1, adopt θ=M * pi/2+Φ; If near sampling spot S2, adopt θ=M * pi/2+Φ, will obtain 7.9,7.0,8.1 in regular turn.This phenomenon will cause the great disappearance of displacement measuring means.
Fig. 6 illustrates the schematic flow sheet of electronic fine-grained segmentation method of the present invention.As shown in Figure 6, the left side flow process is represented the flow process of little counting number, and the flow process of integer counting is represented on the right side.At first, at step S102, read cycle string ripple signal A, B, this string ripple signal can for example be the sine and the cosine signals of phase phasic difference 90 degree.
At the decimal segment count, in step S104, to the cycle string ripple signal A that reads, B takes a sample and the analog digital conversion, and the value of reading of the resulting digital signal in conversion back is carried out the quadrant judgement.Then,, carry out arctangent computation, to obtain phase value Φ at step S106.Then,, utilize above-mentioned quadrant judged result at step S108, in the predetermined period of for example four/one-period, the computation period number N.Owing to four/one-period number N be to come by the quadrant progression, so minimum two of N are just representing quadrant judgment value AD_quad.
At the integer segment count, in step S110, the number of cycles M of computes integer part.Owing to four/one-period number M is come by the quadrant progression, so minimum two of M are just representing quadrant judgment value M_quad.Detailed description can be with reference to above-mentioned explanation.
Then in step S114, calculate the absolute difference Del between the adjacent number of cycles M value that reads 124 outputs of integer counting module for twice, to judge whether believable foundation of decimal segment count as follow-up.
Then, in step S116, judge whether the quadrant judgment value AD_quad of fraction part equates with the quadrant judgment value M_quad of integral part.This part can be undertaken by aforesaid logical decision unit 130.When quadrant judgment value AD_quad equaled quadrant judgment value M_quad, expression did not have the carry error to take place, just execution in step S118, and the number of cycles N that makes decimal counting unit be obtained equals the number of cycles M of integer counting unit.Then, at step S122, output phase displacement data θ=N * pi/2+Φ.
In addition, at step S116, when quadrant judgment value AD_quad was not equal to quadrant judgment value M_quad, just execution in step S120 judged that whether aforesaid absolute difference Del is greater than 1.Foregoing example, absolute difference Del is greater than the frequency f of the 1 string ripple signal A of indication cycle, B
1Greater than 25kHz.At this moment, just execution in step S124 adopts the number of cycles M of integer counting unit, and output θ=M * pi/2+(pi/2-Φ).In addition, Del is not more than 1 when absolute difference, and just execution in step S122 adopts the number of cycles N of decimal counting unit, and exports θ=N * pi/2+Φ.
Further specify, when above-mentioned quadrant judgment value AD_quad and quadrant judgment value M_quad are inequality, as sampling spot S1, the S2 of Fig. 5 B, aforesaid logical decision unit 130 must judge earlier decimal computing module 116 utilizes the number of cycles N of quadrant judgment value AD_quad accumulative total whether to be worth accepting and believing.For example in aforesaid step S116, judge absolute difference between the adjacent M value that reads 124 outputs of integer counting module for twice greater than 1 when logical decision unit 130, the N value that judgement decimal computing module 116 is exported is unworthy accepting and believing.At this moment, logical decision unit 130 adopts the M value of integer counting module 124 outputs.Also promptly, can following mathematical expression make a strategic decision.
If | M (n)-M (n-1) |≤1, θ=N * pi/2+Φ then
If | M (n)-M (n-1) |＞1, θ=M * pi/2+(pi/2-Φ) then
Inspect the situation of Fig. 5 B sampling spot S1, S2 with the method.Logical decision unit 130 judges that the adjacent absolute difference that reads the M value for twice is not more than one, as can be known f
1≤ f
7/ 4.At this moment, logical decision unit 130 output phase displacement datas are θ=N * pi/2+Φ.With Fig. 5 B is example, obtains 3.9,3.9,4.0 or only export thrin near sampling spot S1 in regular turn.
In addition, when the adjacent absolute difference that reads the M value twice is judged greater than 1 in logical decision unit 130, f as can be known
1＞f
7/ 4, then near Fig. 5 B sampling spot S1, only obtain 3.9,4+ (1-0.9)=4.1, arbitrary numerical value of 4.0.Near sampling spot S2, only obtain 7.9,7+ (1-0.0)=8.0, arbitrary numerical value of 8.1.Frequency f for cycle string ripple signal A, B
1＞f
7/ 4 and take place under the situation of carry error, this result of decision meets functional need.
Though the present invention has as above disclosed preferred embodiment; right its is not in order to limit the present invention; any those skilled in the art; without departing from the spirit and scope of the present invention; should carry out suitable changes and improvements, so protection scope of the present invention should be as the criterion with claims restricted portion.
Claims (26)
1. an electronic fine-grained segmentation device in order to from first and second periodic signal, calculates phase-shifted, and the aforementioned electronic fine-grained segmentation device comprises:
Decimal counting unit, in order to receive and according to aforementioned first with aforementioned second round of signal, produce phase value Φ and number of cycles N;
Integer counting unit, in order to receive and according to aforementioned first with aforementioned second round of signal, produce number of cycles M; And
The logical decision unit is couple to aforementioned decimal counting unit and aforementioned integer counting unit, in order to export aforementioned phase-shifted θ.
2. electronic fine-grained segmentation device as claimed in claim 1 wherein when between aforementioned decimal counting unit and aforementioned integer counting unit during the no-carry error, adopts aforementioned phase value Φ and aforementioned number of cycles M, calculates aforementioned phase-shifted θ.
3. electronic fine-grained segmentation device as claimed in claim 2, wherein when aforementioned number of cycles N equates with aforementioned number of cycles M, no-carry error between aforementioned decimal counting unit and aforementioned integer counting unit.
4. electronic fine-grained segmentation device as claimed in claim 1, wherein aforementioned decimal counting unit has an efficient sampling frequency range, when having the carry error between aforementioned decimal counting unit and aforementioned integer counting unit, and aforementioned first with aforementioned second round signal the frequency 2K (K is an integer) that is not more than the aforementioned efficient sampling frequency range of aforementioned decimal counting unit divide for the moment, adopt aforementioned phase value Φ and aforementioned number of cycles N, calculate aforementioned phase-shifted θ.
5. electronic fine-grained segmentation device as claimed in claim 4, wherein when having the carry error between aforementioned decimal counting unit and aforementioned integer counting unit, and aforementioned first with aforementioned second round signal frequency divide for the moment greater than the 2K (K is an integer) of the aforementioned efficient sampling frequency range of aforementioned decimal counting unit, adopt aforementioned phase value Φ and aforementioned number of cycles M, calculate aforementioned phase-shifted θ.
6. electronic fine-grained segmentation device as claimed in claim 1, wherein aforementioned decimal counting unit also comprises:
First and second sample circuit, respectively to aforementioned first with aforementioned second round signal take a sample;
First and second analog-digital converter, be couple to respectively and receive aforementioned first with the output of aforementioned second sample circuit, to sampling aforementioned first with aforementioned second round of signal, carry out the analog digital conversion; And
The decimal counting module, be couple to aforementioned first with aforementioned second analog-digital converter, in order to according to aforementioned first with the output of aforementioned second analog-digital converter, produce aforementioned phase value Φ and aforementioned number of cycles N.
7. electronic fine-grained segmentation device as claimed in claim 1, wherein aforementioned integer counting unit also comprises:
First and second comparator circuit, receive respectively aforementioned first with aforementioned second round of signal, export first and second periodic signal of square wave; And
The integer counting module, be couple to aforementioned first with aforementioned second comparator circuit, in order to according to aforementioned first with the output of aforementioned second comparator circuit, produce aforementioned number of cycles M.
8. electronic fine-grained segmentation device as claimed in claim 1, wherein aforementioned first with aforementioned second round signal phase place differ 90 degree in fact.
9. electronic fine-grained segmentation device as claimed in claim 1, wherein aforementioned first with aforementioned second round signal be respectively first and second cycle string ripple signal.
10. electronic fine-grained segmentation method, in order to measure the phase-shifted of first and second periodic signal, aforementioned electronic segmentation segmentation method comprises:
Receive aforementioned first with aforementioned second round of signal;
Calculate aforementioned first with the little counting number of aforementioned second round of signal, to produce phase value Φ and periodicity N;
Calculate aforementioned first with the integer counting of aforementioned second round of signal, to produce periodicity M; And comparison of aforementioned periodicity N and aforementioned periodicity M;
Wherein when aforementioned periodicity N equals aforementioned periodicity M, according to aforementioned phase value Φ and aforementioned periodicity N, to produce aforementioned phase-shifted θ.
11. electronic fine-grained segmentation method as claimed in claim 10, also comprise the absolute difference that calculates adjacent twice aforementioned periodicity M, wherein when aforementioned periodicity N is not equal to aforementioned periodicity M and aforementioned absolute difference greater than a predetermined difference value, according to aforementioned phase value Φ and aforementioned periodicity M, to produce aforementioned phase-shifted θ.
12. electronic fine-grained segmentation method as claimed in claim 11, wherein aforementioned predetermined difference value is 1.
13. electronic fine-grained segmentation method as claimed in claim 10, also comprise the absolute difference that calculates adjacent twice aforementioned periodicity M, wherein when aforementioned periodicity N is not equal to aforementioned periodicity M and aforementioned absolute difference smaller or equal to predetermined difference value, according to aforementioned phase value Φ and aforementioned periodicity N, to produce aforementioned phase-shifted θ.
14. electronic fine-grained segmentation method as claimed in claim 13, wherein aforementioned predetermined difference value is 1.
15. electronic fine-grained segmentation method as claimed in claim 10, wherein aforementioned first with aforementioned second round signal phase place differ 90 degree in fact.
16. electronic fine-grained segmentation method as claimed in claim 10 also comprises:
According to aforementioned first with aforementioned second round of signal, produce decimal quadrant judgment value and integer quadrant judgment value; And
According to aforementioned decimal quadrant judgment value and aforementioned integer quadrant judgment value, produce aforementioned periodicity N and aforementioned periodicity M respectively.
17. electronic fine-grained segmentation method as claimed in claim 16 also comprises:
Set up decimal quadrant distinguishable region, aforementioned decimal quadrant distinguishable region is divided into 2n quadrant, and wherein n is a positive integer;
According to aforementioned first with aforementioned 2n the quadrant at sampling value place of aforementioned second round of signal in the quadrant position, produce aforementioned decimal quadrant judgment value; And
Sequence according to aforementioned decimal quadrant judgment value produces aforementioned periodicity N.
18. electronic fine-grained segmentation method as claimed in claim 16 also comprises:
Set up integer quadrant distinguishable region, aforementioned integer quadrant distinguishable region is divided into 2n quadrant, and wherein n is a positive integer;
According to aforementioned first with aforementioned 2n the quadrant at the value of reading place of aforementioned second round of signal in the quadrant position, produce aforementioned integer quadrant judgment value; And
Sequence according to aforementioned integer quadrant judgment value produces aforementioned periodicity M.
19. electronic fine-grained segmentation method as claimed in claim 16, the calculating of wherein aforementioned decimal quadrant judgment value and aforementioned integer quadrant judgment value is to calculate with the 2n frequency multiplication, and wherein n is a positive integer.
20. electronic fine-grained segmentation method as claimed in claim 10, wherein aforementioned first with aforementioned second round signal be respectively sinusoidal signal and cosine signal.
21. electronic fine-grained segmentation method as claimed in claim 20, the phase value Φ that wherein aforementioned decimal computing module produces calculates with arc tangent.
22. an electronic fine-grained segmentation method, in order to measure the phase-shifted of first and second periodic signal, aforementioned electronic segmentation segmentation method comprises:
Receive aforementioned first with aforementioned second round of signal;
Calculate aforementioned first with the little counting number of aforementioned second round of signal, to produce phase value Φ and periodicity N;
Calculate aforementioned first with the integer counting of aforementioned second round of signal, to produce periodicity M; And
Comparison of aforementioned periodicity N and aforementioned periodicity M;
Wherein when aforementioned periodicity N equals aforementioned periodicity M, adopt aforementioned phase value Φ and aforementioned periodicity M, producing aforementioned phase-shifted θ,
When aforementioned periodicity N is not equal to aforementioned periodicity M, and aforementioned first with the frequency during of aforementioned second round of signal greater than the sampling frequency of aforementioned decimal computing module, according to aforementioned phase value Φ and aforementioned periodicity M, producing aforementioned phase-shifted θ, and
When aforementioned periodicity N is not equal to aforementioned periodicity M, and aforementioned first with cycle during smaller or equal to the aforementioned sampling frequency of aforementioned decimal computing module, of aforementioned second round of signal according to aforementioned phase value Φ and aforementioned periodicity N, with generation phase-shifted θ.
23. electronic fine-grained segmentation method as claimed in claim 22 also comprises:
According to aforementioned first with aforementioned second round of signal, produce decimal quadrant judgment value and integer quadrant judgment value; And
According to aforementioned decimal quadrant judgment value and aforementioned integer quadrant judgment value, produce aforementioned periodicity N and aforementioned periodicity M respectively.
24. electronic fine-grained segmentation method as claimed in claim 23 also comprises:
Set up decimal quadrant distinguishable region, aforementioned decimal quadrant distinguishable region is divided into 2n quadrant, and wherein n is a positive integer;
According to aforementioned first with aforementioned 2n the quadrant at sampling value place of aforementioned second round of signal in the quadrant position, produce aforementioned decimal quadrant judgment value; And
Sequence according to aforementioned decimal quadrant judgment value produces aforementioned periodicity N.
25. electronic fine-grained segmentation method as claimed in claim 23 also comprises:
Set up integer quadrant distinguishable region, aforementioned integer quadrant distinguishable region is divided into 2n quadrant, and wherein n is a positive integer;
According to aforementioned first with aforementioned 2n the quadrant at the value of reading place of aforementioned second round of signal in the quadrant position, produce aforementioned integer quadrant judgment value; And
Sequence according to aforementioned integer quadrant judgment value produces aforementioned periodicity M.
26. electronic fine-grained segmentation method as claimed in claim 25, the calculating of wherein aforementioned decimal quadrant judgment value and aforementioned integer quadrant judgment value is to calculate with the 2n frequency multiplication, and wherein n is a positive integer.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108375391A (en) * | 2018-05-04 | 2018-08-07 | 苏州汇川技术有限公司 | Cosine and sine signal processing method and system |
| WO2020200257A1 (en) * | 2019-04-04 | 2020-10-08 | 清华大学 | High-resolution phase detection method and system based on plane grating laser interferometer |
| CN112212783A (en) * | 2020-09-21 | 2021-01-12 | 清华大学 | Phase discrimination system and method based on dynamic response time measurement method |
-
2006
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108375391A (en) * | 2018-05-04 | 2018-08-07 | 苏州汇川技术有限公司 | Cosine and sine signal processing method and system |
| WO2020200257A1 (en) * | 2019-04-04 | 2020-10-08 | 清华大学 | High-resolution phase detection method and system based on plane grating laser interferometer |
| CN112212783A (en) * | 2020-09-21 | 2021-01-12 | 清华大学 | Phase discrimination system and method based on dynamic response time measurement method |
| CN112212783B (en) * | 2020-09-21 | 2021-11-05 | 清华大学 | Phase discrimination system and method based on dynamic response time measurement method |
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| CN100535604C (en) | 2009-09-02 |
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