CN101158776A - Color filter structure and manufacturing method thereof - Google Patents

Color filter structure and manufacturing method thereof Download PDF

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CN101158776A
CN101158776A CNA2007101626258A CN200710162625A CN101158776A CN 101158776 A CN101158776 A CN 101158776A CN A2007101626258 A CNA2007101626258 A CN A2007101626258A CN 200710162625 A CN200710162625 A CN 200710162625A CN 101158776 A CN101158776 A CN 101158776A
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hydrophobic
light
black matrix
shielding
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曹俊杰
林祥麟
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AUO Corp
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AU Optronics Corp
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Abstract

The invention relates to a color filter structure and a manufacturing method thereof, wherein the color filter structure comprises a plurality of black matrix pattern rows with hydrophobic property and a color filter layer; each black matrix pattern row comprises a plurality of light shielding structures which are arranged in series, and each light shielding structure forms an accommodating space for accommodating the color filter layer; each containing space is a closed space and is not communicated with each other, and each shading structure is provided with at least one drain valve to provide a drain force. The invention can reduce the defects of uneven thickness, color mixing and the like possibly caused by the variation of the ink-jet manufacturing process, thereby achieving the effect of uniform chromaticity of the color filter layer and effectively improving the reliability and the yield of the color filter.

Description

彩色滤光片结构及其制作方法 Color filter structure and manufacturing method thereof

技术领域technical field

本发明是关于一种彩色滤光片结构及其制作方法,尤指一种具有疏水凹口或疏水通道等疏水阀设计而可避免混色与膜厚不均问题的彩色滤光片结构及其制作方法。The present invention relates to a color filter structure and its manufacturing method, especially to a color filter structure and its manufacture which are designed with traps such as hydrophobic notches or channels to avoid the problems of color mixing and uneven film thickness method.

背景技术Background technique

液晶显示器一般使用白光作为光源,必须利用彩色滤光片将白光光源分解成红(red,R)、绿(green,G)、蓝(blue,B)三原色光,再进一步混合成人眼能分辩的各种色彩,因此彩色滤光片的滤光效果是决定液晶显示器的彩色画面表现的重要因素,再加上彩色滤光片的成本较其它元件更为昂贵,因此彩色滤光片成为液晶显示器最重要的关键元件之一。Liquid crystal displays generally use white light as a light source. Color filters must be used to decompose the white light source into three primary colors of red (red, R), green (green, G), and blue (blue, B), and then further mixed into the three primary colors that the human eye can distinguish. Various colors, so the filtering effect of the color filter is an important factor in determining the color picture performance of the LCD, and the cost of the color filter is more expensive than other components, so the color filter has become the most important element of the LCD. One of the important key components.

现有制作彩色滤光片的方法主要是利用涂布光刻胶材料后曝光显影的方式加以形成。首先,将单一颜色光刻胶墨液,例如红色光刻胶墨液以旋转涂布方式涂布于基板上,再利用软烤、曝光显影与硬烤等制造工艺形成红色滤光层图案。随后再重复上述步骤形成绿色与蓝色滤光图案层。然而此制作方式的光刻胶墨液使用率很低,约有九成的光刻胶墨液会在旋转涂布的过程中被甩出,的后又会有约七成的光刻胶墨液在显影过程中被溶解移除。此外,现有制作彩色滤光片的方法需要针对每一种颜色的光刻胶墨液分别进行一次涂布制造工艺、预烤制造工艺、曝光制造工艺与显影制造工艺,使得制造工艺繁复且成本昂贵。Existing methods for manufacturing color filters are mainly formed by coating photoresist materials and then exposing and developing them. First, a single-color photoresist ink, such as red photoresist ink, is coated on the substrate by spin coating, and then the red filter layer pattern is formed by soft baking, exposure and development, and hard baking. Then repeat the above steps to form green and blue light filter pattern layers. However, the photoresist ink usage rate of this production method is very low, about 90% of the photoresist ink will be thrown out during the spin coating process, and about 70% of the photoresist ink will be thrown out in the end The liquid is dissolved and removed during the developing process. In addition, the existing method of manufacturing color filters requires a coating manufacturing process, a pre-baking manufacturing process, an exposure manufacturing process, and a developing manufacturing process for each color of photoresist ink, which makes the manufacturing process complicated and costly. expensive.

因此,目前业界开始利用喷墨方法来改善旋转涂布方式制作彩色滤光片的缺点。请参考图1与图2,图1与图2为一般喷墨制造工艺的方法示意图。首先如图1所示,提供一玻璃基板10,并于玻璃基板10上形成复数个呈阵列状排列的黑色矩阵图案12,其中黑色矩阵图案12之间形成复数个(例如n*m矩阵,n、m为正整数)彼此不连通的封闭型容纳空间14,用以容纳彩色光刻胶墨液。接着如图2所示,利用一喷墨设备的喷墨头(图未示),于玻璃基板10上喷涂所需的光刻胶墨液。以长条状排列的彩色滤光片的制作过程为例,必须依序于3n-2行的黑色矩阵图案12之间的容纳空间中喷涂某一原色颜料(例如红色颜料16R),再依序将另两原色颜料(例如绿色颜料16G与蓝色颜料16B)喷涂于3n-1行与3n行的黑色矩阵图案12之间的容纳空间中。随后再烘烤去除多余的溶剂成分以使红色墨液16R、绿色墨液16G与蓝色墨液16B硬化以形成彩色滤光片。Therefore, the industry has begun to use the inkjet method to improve the shortcomings of the spin coating method for manufacturing color filters. Please refer to FIG. 1 and FIG. 2 . FIG. 1 and FIG. 2 are method schematic diagrams of a general inkjet manufacturing process. First, as shown in FIG. 1, a glass substrate 10 is provided, and a plurality of black matrix patterns 12 arranged in an array are formed on the glass substrate 10, wherein a plurality of (for example, n*m matrix, n , m is a positive integer) closed accommodation spaces 14 that are not connected to each other and are used to accommodate color photoresist ink. Next, as shown in FIG. 2 , the required photoresist ink is sprayed on the glass substrate 10 by using an inkjet head (not shown) of an inkjet device. Taking the manufacturing process of color filters arranged in strips as an example, a certain primary color pigment (such as red pigment 16R) must be sprayed in the accommodation space between the black matrix patterns 12 of 3n-2 rows in sequence, and then sequentially The other two primary color pigments (for example, green pigment 16G and blue pigment 16B) are sprayed in the accommodation space between the black matrix patterns 12 of 3n−1 rows and 3n rows. Then bake to remove excess solvent components to harden the red ink 16R, green ink 16G and blue ink 16B to form a color filter.

利用喷墨制造工艺制作彩色滤光片的作法虽然较有效率且成本较低,然而其所面临的难题在于喷墨头在使用一段时间后无可避免地会产生喷墨量变异的问题,如此一来可能使得光刻胶墨液在每一个容纳空间中具有不同的量,使后续形成的彩色滤光片的厚度不均匀,造成显示色度不均而影响显示效果。更甚者,例如当彩色墨液的量不够时(一般称之为unfilled pixel),会使得彩色滤光片的滤光效果不佳而在显示时产生白区(white area),而当彩色墨液的量过多而产生溢流(overflow)现象时,不仅会影响滤光效果,更有可能发生混色(color mixing)的问题。一般而言,若溢流是发生在同一颜色的彩色滤光片之间则不会对色彩表现有太大的影响,然而若溢流是发生在不同颜色的彩色滤光片之间时,则会因为颜料混合产生严重的色偏问题。Although the method of making color filters by inkjet manufacturing process is more efficient and lower in cost, the difficulty it faces is that the inkjet head will inevitably produce the variation of ink ejection amount after a period of use, so On the one hand, the amount of photoresist ink in each containing space may be different, making the thickness of the subsequently formed color filter uneven, resulting in uneven display chromaticity and affecting the display effect. What's more, for example, when the amount of colored ink is not enough (generally referred to as unfilled pixel), the filtering effect of the color filter will be poor and a white area (white area) will be generated when the color ink is displayed. When the amount of liquid is too much and overflow occurs, it will not only affect the filtering effect, but also cause the problem of color mixing. Generally speaking, if the overflow occurs between the color filters of the same color, it will not have a great impact on the color performance, but if the overflow occurs between the color filters of different colors, then There will be serious color cast problems due to the mixing of pigments.

发明内容Contents of the invention

因此本发明提出一种彩色滤光片结构及其制作方法,以解决彩色滤光片的色度不均、白区漏光及色偏问题。Therefore, the present invention proposes a color filter structure and a manufacturing method thereof to solve the problems of color unevenness, light leakage in white areas and color shift of the color filter.

为达上述目的,本发明提出一种彩色滤光片结构,包括:In order to achieve the above purpose, the present invention proposes a color filter structure, including:

一透明基板,所述的透明基板包括一表面;A transparent substrate, the transparent substrate includes a surface;

复数个黑色矩阵图案列,所述的这些黑色矩阵图案列具有疏水特性且设置于所述的透明基板的所述的表面上以定义出复数个次像素,各所述的黑色矩阵图案列包括复数个遮光结构,以串联方式沿一第一方向排列,各所述的遮光结构具有一厚度并形成一容纳空间,且各所述的遮光结构具有至少一疏水通道,使得位于同一所述的黑色矩阵图案列上相邻的所述的这些容纳空间彼此连通;以及A plurality of black matrix pattern columns, the black matrix pattern columns have hydrophobic properties and are arranged on the surface of the transparent substrate to define a plurality of sub-pixels, each of the black matrix pattern columns includes a plurality of light-shielding structures arranged in series along a first direction, each of the light-shielding structures has a thickness and forms an accommodation space, and each of the light-shielding structures has at least one hydrophobic channel, so that they are located in the same black matrix The accommodating spaces adjacent to each other on the pattern column communicate with each other; and

一彩色滤光层,设置于所述的这些遮光结构构成的所述的这些容纳空间之内。A color filter layer is arranged in the accommodating spaces formed by the light-shielding structures.

为达上述目的,本发明提出一种彩色滤光片结构,包括:In order to achieve the above purpose, the present invention proposes a color filter structure, including:

一透明基板,所述的透明基板包括一表面;A transparent substrate, the transparent substrate includes a surface;

复数个黑色矩阵图案列,所述的这些黑色矩阵图案列具有疏水特性且设置于所述的透明基板的所述的表面上以定义出复数个次像素,各所述的黑色矩阵图案列包括复数个遮光结构,以串联方式沿一第一方向排列,各所述的遮光结构具有一厚度并形成一容纳空间,各所述的容纳空间为一封闭空间且彼此不连通,而各所述的遮光结构具有至少一疏水凹口;以及A plurality of black matrix pattern columns, the black matrix pattern columns have hydrophobic properties and are arranged on the surface of the transparent substrate to define a plurality of sub-pixels, each of the black matrix pattern columns includes a plurality of a light-shielding structure arranged in series along a first direction, each of the light-shielding structures has a thickness and forms an accommodating space, each of the accommodating spaces is a closed space and is not connected to each other, and each of the light-shielding structures the structure has at least one hydrophobic notch; and

一彩色滤光层,设置于所述的这些遮光结构构成的所述的这些容纳空间之内。A color filter layer is arranged in the accommodating spaces formed by the light-shielding structures.

为达上述目的,本发明提出一种彩色滤光片结构,包括:In order to achieve the above purpose, the present invention proposes a color filter structure, including:

一透明基板,所述的透明基板包括一表面;A transparent substrate, the transparent substrate includes a surface;

复数个黑色矩阵图案列,所述的这些黑色矩阵图案列具有疏水特性且设置于所述的透明基板的所述的表面上以定义出复数个次像素,各所述的黑色矩阵图案列包括复数个遮光结构,以串联方式沿一第一方向排列,各所述的遮光结构具有一厚度并形成一容纳空间,且各所述的遮光结构具有至少一疏水通道,使得位于同一所述的黑色矩阵图案列上相邻的所述的这些容纳空间彼此连通;以及A plurality of black matrix pattern columns, the black matrix pattern columns have hydrophobic properties and are arranged on the surface of the transparent substrate to define a plurality of sub-pixels, each of the black matrix pattern columns includes a plurality of light-shielding structures arranged in series along a first direction, each of the light-shielding structures has a thickness and forms an accommodation space, and each of the light-shielding structures has at least one hydrophobic channel, so that they are located in the same black matrix The accommodating spaces adjacent to each other on the pattern column communicate with each other; and

一彩色滤光层,设置于所述的这些遮光结构构成的所述的这些容纳空间之内。A color filter layer is arranged in the accommodating spaces formed by the light-shielding structures.

为达上述目的,本发明还提供一种制作彩色滤光片结构的方法,包括:In order to achieve the above purpose, the present invention also provides a method for making a color filter structure, comprising:

提供一透明基板;providing a transparent substrate;

于所述的透明基板的一表面形成复数个黑色矩阵图案列,其中各所述的黑色矩阵图案列包括复数个遮光结构,以串联方式沿一第一方向排列,各所述的遮光结构具有一厚度并形成一容纳空间,且各所述的遮光结构具有至少一缺口(或凹口、通道);A plurality of black matrix pattern columns are formed on a surface of the transparent substrate, wherein each of the black matrix pattern columns includes a plurality of light-shielding structures arranged in series along a first direction, and each of the light-shielding structures has a thickness and form an accommodating space, and each of the light-shielding structures has at least one gap (or notch, channel);

对所述的黑色矩阵图案进行一疏水处理制造工艺,使各所述的遮光结构的所述的缺口具有疏水特性而形成至少一疏水阀;以及performing a hydrophobic treatment manufacturing process on the black matrix pattern, so that the gaps of each of the light-shielding structures have hydrophobic properties to form at least one steam trap; and

进行一喷墨制造工艺依序于各所述的容纳空间中喷入光刻胶墨液,并借由各所述的疏水阀产生的一疏水力(hydrophobic force)与各所述的容纳空间内的光刻胶墨液产生的一静水力(hydrostatic force)两者达到静力平衡时,因疏水力主要关联于所述的通道或凹口或缺口的尺寸设计而调整,故多余的光刻胶墨液造成静水力大于设计的疏水力范围时,所述的多余光刻胶墨液便可流入所述的这些疏水阀(包括疏水通道、凹口或缺口)内,而使位于各所述的黑色矩阵图案列的所述的这些容纳空间内的光刻胶墨液具有相同的高度,以降低喷墨制造工艺的变异可能造成的厚度不均与混色等缺陷,而达到彩色滤光层色度均匀的效果并可有效提升彩色滤光片的可靠度与良品率。Perform an inkjet manufacturing process to spray photoresist ink into each of the accommodating spaces in sequence, and use a hydrophobic force (hydrophobic force) generated by each of the traps to interact with each of the accommodating spaces When the hydrostatic force (hydrostatic force) produced by the photoresist ink reaches the static force balance, because the hydrophobic force is mainly related to the adjustment of the size design of the channel or notch or gap, the excess photoresist When the hydrostatic force caused by the ink is greater than the designed hydrophobic force range, the excess photoresist ink can flow into the traps (including the traps, notches or gaps), and make the traps located in each of the traps The photoresist inks in these accommodation spaces of the black matrix pattern columns have the same height to reduce defects such as uneven thickness and color mixing that may be caused by variations in the inkjet manufacturing process, so as to achieve the chromaticity of the color filter layer. The uniform effect can effectively improve the reliability and yield rate of the color filter.

附图说明Description of drawings

图1与图2为现有喷墨制造工艺的方法示意图。1 and 2 are method schematic diagrams of the conventional inkjet manufacturing process.

图3至图5绘示了在一容纳空间内光刻胶墨液的体积调整机制的示意图。3 to 5 are schematic diagrams illustrating the volume adjustment mechanism of the photoresist ink in a containing space.

图6至图12为本发明各实施例的彩色滤光片结构的示意图。6 to 12 are schematic diagrams of color filter structures of various embodiments of the present invention.

图13为本发明一实施例制作彩色滤光片结构的方法流程图。FIG. 13 is a flowchart of a method for fabricating a color filter structure according to an embodiment of the present invention.

附图标号Reference number

10    玻璃基板    12     黑色矩阵图案10 Glass substrate 12 Black matrix pattern

14    容纳空间    16R    红色光刻胶墨液14 Accommodating space 16R Red photoresist ink

16G   绿色光刻胶墨液    16B    蓝色光刻胶墨液16G green photoresist ink 16B blue photoresist ink

30    透明基板          32     黑色矩阵图案列30 Transparent Substrate 32 Black Matrix Pattern Columns

34    遮光结构          36     容纳空间34 shading structure 36 accommodation space

38    彩色滤光层        38R    红色滤光图案38 Color filter layer 38R Red filter pattern

38G   绿色滤光图案      38B    蓝色滤光图案38G Green filter pattern 38B Blue filter pattern

40    疏水通道          42     疏水凹口40 Hydrophobic channels 42 Hydrophobic notches

具体实施方式Detailed ways

本发明提供的彩色滤光片结构具有疏水阀的设计,应用疏水力与静水力的静力平衡,以解决色度不均、白区漏光及色偏问题。请参考图3至图5。图3至图5绘示了在一容纳空间内光刻胶墨液的体积调整机制的示意图,其中图5为图4的俯视图。如图3所示,当光刻胶墨液(未干燥的彩色滤光层)注入一容纳空间之内后,光刻胶墨液的重力会产生一静水力Ps,而另一方面本发明的疏水阀则会因疏水特性产生一疏水力Ph。理论上,光刻胶墨液在干燥前的理想高度为T,然而若光刻胶墨液的喷涂量过多时,例如其高度为T’,此时静水力Ph会大于疏水力Ps使得过多的光刻胶墨液流入疏水阀内。如图4与图5所示,在光刻胶墨液流入疏水阀内的过程中,会使得静水力Ps慢慢减弱,直到与疏水力Ph达成静力平衡为止。The color filter structure provided by the present invention has the design of a water trap, and the hydrostatic force and hydrostatic force are used to balance the hydrostatic force to solve the problems of uneven chromaticity, light leakage in white areas, and color shift. Please refer to Figure 3 to Figure 5. 3 to 5 illustrate schematic diagrams of the volume adjustment mechanism of the photoresist ink in an accommodating space, wherein FIG. 5 is a top view of FIG. 4 . As shown in Figure 3, when the photoresist ink (undried color filter layer) is injected into an accommodating space, the gravity of the photoresist ink will generate a hydrostatic force Ps, and on the other hand the present invention The trap will generate a hydrophobic force Ph due to its hydrophobic characteristics. Theoretically, the ideal height of photoresist ink before drying is T. However, if the amount of photoresist ink sprayed is too much, for example, its height is T', the hydrostatic force Ph will be greater than the hydrophobic force Ps so that too much The photoresist ink flows into the trap. As shown in FIG. 4 and FIG. 5 , when the photoresist ink flows into the trap, the hydrostatic force Ps is gradually weakened until it reaches a static equilibrium with the hydrophobic force Ph.

静水力Ps与疏水力Ph的关系如下列关系式所示:The relationship between the hydrostatic force Ps and the hydrophobic force Ph is shown in the following relational formula:

PP hh == 22 ·&Center Dot; σσ glgl ·· coscos θθ cc ·&Center Dot; [[ (( 11 ww 11 ++ 11 hh 11 )) -- (( 11 ww 22 ++ 11 hh 22 )) ]] -- -- -- (( 11 ))

Ps=ρ·g·h    (2)P s =ρ·g·h (2)

其中in

Ph:疏水力; Ph : Hydrophobic force;

Ps:静水力;P s : hydrostatic force;

σgl:光刻胶墨液的表面张力;σ gl : surface tension of photoresist ink;

θc:光刻胶墨液与黑色矩阵图案列的接触角;θ c : contact angle between photoresist ink and black matrix pattern column;

ρ:光刻胶墨液的密度;ρ: density of photoresist ink;

g:重力常数;g: gravitational constant;

h:光刻胶墨液未干燥前的高度;h: the height of the photoresist ink before drying;

w1:容纳空间的宽度;w 1 : the width of the accommodation space;

h1:容纳空间的高度;h 1 : the height of the accommodation space;

w2:疏水阀的宽度;w 2 : the width of the trap;

h2:疏水阀的高度;h 2 : the height of the steam trap;

由上述关系式可知,在光刻胶墨液的表面张力、光刻胶墨液与黑色矩阵图案列的接触角、光刻胶墨液的密度、容纳空间的高度与疏水阀的高度为已知的状况下,可借由设计容纳空间的宽度w1与疏水阀的宽度w2的比例,使得当静力达到平衡的状能下(亦即Ph=Ps),即使喷墨量过大亦可将光刻胶墨液的高度例如调整控制在理想的范围内(例如T)。因此借由疏水力与静水力的平衡,疏水阀可解决光刻胶墨液的变异量的问题,当光刻胶墨液的喷涂量过大时会流入疏水阀内,而不会产生溢流造成混色问题,且在静力平衡的状况下所有容纳空间内的光刻胶墨液均会具有相同的高度,如此一来后续烘烤后形成的彩色滤光层亦会具有相同的高度,而可提高彩色滤光层高度的一致性。It can be seen from the above relationship that the surface tension of the photoresist ink, the contact angle between the photoresist ink and the black matrix pattern row, the density of the photoresist ink, the height of the accommodation space and the height of the trap are known. Under the situation, the ratio of the width w 1 of the accommodating space to the width w 2 of the trap can be designed so that when the static force is balanced (that is, Ph h = P s ), even if the amount of ink ejected is too large The height of the photoresist ink can also be adjusted and controlled within a desired range (eg T). Therefore, with the balance of hydrophobic force and hydrostatic force, the steam trap can solve the problem of the variable amount of photoresist ink. When the amount of photoresist ink sprayed is too large, it will flow into the trap without overflow. The problem of color mixing is caused, and under the condition of static force balance, the photoresist ink in all the accommodation spaces will have the same height, so that the color filter layer formed after subsequent baking will also have the same height, and The consistency of the height of the color filter layer can be improved.

请参考图6与图7。图6与7图为本发明一较佳实施例的彩色滤光片结构的示意图,其中图6为一外观示意图,而图7为一俯视图。如图6与图7所示,本实施例的彩色滤光片结构包括一透明基板30(例如一玻璃基板)、复数个黑色矩阵图案列32,以及一彩色滤光层38。黑色矩阵图案列32具有疏水特性且设置于透明基板30的表面上,定义出复数个次像素。各黑色矩阵图案列32包括复数个遮光结构34,以串联方式沿一第一方向排列,各遮光结构34具有一厚度并形成一容纳空间36。彩色滤光层38,包括复数种不同颜色的彩色滤光图案,例如红色滤光图案(第一颜色滤光图案)38R、绿色滤光图案(第二颜色滤光图案)38G与蓝色滤光图案(第三颜色滤光图案)38B,其中红色滤光图案38R、绿色滤光图案38G与蓝色滤光图案38B以直条状(stripe)方式交错设置于遮光结构32构成的容纳空间36之内。Please refer to Figure 6 and Figure 7. 6 and 7 are schematic diagrams of the structure of a color filter according to a preferred embodiment of the present invention, wherein FIG. 6 is a schematic appearance diagram, and FIG. 7 is a top view. As shown in FIGS. 6 and 7 , the color filter structure of this embodiment includes a transparent substrate 30 (such as a glass substrate), a plurality of black matrix pattern rows 32 , and a color filter layer 38 . The black matrix pattern columns 32 have hydrophobic properties and are disposed on the surface of the transparent substrate 30 to define a plurality of sub-pixels. Each black matrix pattern row 32 includes a plurality of light-shielding structures 34 arranged in series along a first direction. Each light-shielding structure 34 has a thickness and forms an accommodating space 36 . The color filter layer 38 includes a plurality of color filter patterns of different colors, such as a red filter pattern (first color filter pattern) 38R, a green filter pattern (second color filter pattern) 38G, and a blue filter pattern. Pattern (third color filter pattern) 38B, wherein the red filter pattern 38R, green filter pattern 38G and blue filter pattern 38B are interlaced in a striped manner in the accommodation space 36 formed by the light-shielding structure 32 Inside.

本发明的彩色滤光片结构的特征之一在于具有疏水阀设计,而疏水阀经过疏水处理,因此具有疏水特性而可提供疏水力。如前所述,喷墨头可能会产生喷墨量变异的问题,使得光刻胶墨液在各容纳空间36中会具有不同的量,而本实施例的作法为各遮光结构34具有至少一疏水凹口42,各疏水凹口42可单独发挥疏水阀的作用,使得当光刻胶墨液喷涂于容纳空间36之内而尚未干燥之前,多余的光刻胶墨液会流入疏水凹口42使静水力下降而直至疏水力与静水力达到静力平衡为止。如此,光刻胶墨液不致溢流至其它列的不同色容纳空间36之内,并可使各容纳空间36的光刻胶墨液具有相同的高度,进而使得干燥后所形成的彩色滤光层38亦会具有一致的厚度。One of the characteristics of the color filter structure of the present invention is that it has a trap design, and the trap has been treated with hydrophobic treatment, so it has hydrophobic properties and can provide hydrophobic force. As mentioned above, the inkjet head may have the problem of variation in the amount of ink ejected, so that the amount of photoresist ink in each accommodating space 36 will have a different amount. Hydrophobic notches 42, each hydrophobic notch 42 can independently play the role of a drain valve, so that when the photoresist ink is sprayed in the accommodating space 36 and before it dries, the excess photoresist ink will flow into the hydrophobic notches 42 Decrease the hydrostatic force until the hydrophobic force and the hydrostatic force reach a static equilibrium. In this way, the photoresist ink will not overflow into the different color accommodation spaces 36 of other columns, and the photoresist ink in each accommodation space 36 can have the same height, so that the color filter formed after drying Layer 38 will also have a consistent thickness.

本实施例将疏水凹口42形成于各遮光结构34的侧壁上,更精确地说各疏水凹口42与相邻的遮光结构34的疏水凹口42设置于遮光结构34相邻的侧边上,且相邻的疏水凹口42为相对应设置,其中在各黑色矩阵图案列32的两端的容纳空间36仅具有单一疏水凹口42,而其它容纳空间36则分别具有两个疏水凹口42,但其数量并不限于此。另外,疏水凹口42未使相邻的容纳空间36相互连通,因此使得各容纳空间36为一封闭空间,但疏水凹口42具有疏水特性,因此可提供疏水力而发挥疏水阀的功效。In this embodiment, hydrophobic notches 42 are formed on the sidewalls of each light-shielding structure 34 , more precisely, each hydrophobic notch 42 and the hydrophobic notch 42 of an adjacent light-shielding structure 34 are disposed on the side adjacent to the light-shielding structure 34 and the adjacent hydrophobic notches 42 are set correspondingly, wherein the accommodation space 36 at both ends of each black matrix pattern row 32 has only a single hydrophobic notch 42, while the other accommodation spaces 36 have two hydrophobic notches respectively 42, but its number is not limited to this. In addition, the hydrophobic notch 42 does not communicate with the adjacent receiving spaces 36 , so that each receiving space 36 is a closed space, but the hydrophobic notch 42 has a hydrophobic property, so it can provide a hydrophobic force to play the role of a trap.

为了突显本发明不同实施例之间的差异,下列各实施例的说明及图示仅就各实施例的相异处加以说明,而不再赘述相同的元件。请参考图8。图8为本发明另一实施例的彩色滤光片结构的黑色矩阵图案列的俯视图。图8的实施例与图6的实施例类似,其不同之处在于除了各黑色矩阵图案列32最末端的容纳空间36不具有疏水凹口42外,其余的容纳空间均仅具有单一疏水凹口42。In order to highlight the differences between different embodiments of the present invention, the following descriptions and illustrations of the various embodiments only illustrate the differences between the various embodiments, and do not repeat the same elements. Please refer to Figure 8. FIG. 8 is a top view of a black matrix pattern column of a color filter structure according to another embodiment of the present invention. The embodiment of FIG. 8 is similar to the embodiment of FIG. 6, except that the receiving space 36 at the end of each black matrix pattern column 32 does not have a hydrophobic notch 42, and the rest of the receiving spaces only have a single hydrophobic notch. 42.

请参考图9。图9为本发明又一实施例的彩色滤光片结构的黑色矩阵图案列的上视图。如图9所示,与图6的实施例相较,本实施例的各遮光结构34的侧壁上形成有复数个疏水凹口42,而非仅有单一疏水凹口42,且各容纳空间36内的疏水凹口42为均匀分布。值得说明的是在上述各实施例中,容纳空间36的宽度为第一宽度,而各容纳空间36内的疏水凹口42的宽度(或宽度和)为第二宽度,且第二宽度与第一宽度的比值大体上介于0.3至0.95之间,并以大体上介于0.5至0.9之间为较佳,然而第二宽度与第一宽度的比值仍应依据光刻胶墨液的表面张力、光刻胶墨液与黑色矩阵图案列的接触角、光刻胶墨液的密度等参数而加以变更,而不限于上述范围。Please refer to Figure 9. FIG. 9 is a top view of a black matrix pattern column of a color filter structure according to another embodiment of the present invention. As shown in FIG. 9, compared with the embodiment of FIG. 6, a plurality of hydrophobic notches 42 are formed on the side walls of each light-shielding structure 34 of this embodiment instead of only a single hydrophobic notch 42, and each accommodating space The hydrophobic notches 42 within 36 are evenly distributed. It is worth noting that in the above-mentioned embodiments, the width of the accommodation space 36 is the first width, and the width (or sum of width) of the hydrophobic notch 42 in each accommodation space 36 is the second width, and the second width is the same as the first width. The ratio of the first width is generally between 0.3 and 0.95, and preferably between 0.5 and 0.9, but the ratio of the second width to the first width should still be based on the surface tension of the photoresist ink , the contact angle between the photoresist ink and the black matrix pattern row, the density of the photoresist ink and other parameters are changed, and are not limited to the above range.

请参考图10与图11。图10与图11为本发明另一实施例的彩色滤光片结构的示意图,其中图10为一外观示意图,而图11为一俯视图。如图10与图11所示,本实施例的彩色滤光片结构的特征之一在于各遮光结构34具有至少一疏水通道40,而非疏水凹口设计。疏水通道40除可发挥疏水阀的作用外,并使得位于同一黑色矩阵图案列32上相邻的容纳空间36彼此连通。与疏水凹口的设计不同之处在于,疏水通道40的设计可使得多余的光刻胶墨液经由疏水通道40溢流至同一串联的相邻的容纳空间36内。如此,光刻胶墨液不致溢流至其它列之不同色容纳空间36之内,并可使得同一列的容纳空间36之内相同颜色的光刻胶墨液具有相同的高度,进而使得干燥后所形成的彩色滤光层38亦会具有一致的厚度。Please refer to Figure 10 and Figure 11. 10 and 11 are schematic diagrams of the structure of a color filter according to another embodiment of the present invention, wherein FIG. 10 is a schematic appearance diagram, and FIG. 11 is a top view. As shown in FIGS. 10 and 11 , one of the features of the color filter structure of this embodiment is that each light shielding structure 34 has at least one hydrophobic channel 40 instead of a hydrophobic notch design. In addition to functioning as a trap, the hydrophobic channel 40 enables adjacent accommodation spaces 36 located on the same black matrix pattern column 32 to communicate with each other. The difference from the design of the hydrophobic notch is that the design of the hydrophobic channel 40 allows excess photoresist ink to overflow into the adjacent receiving spaces 36 in the same series through the hydrophobic channel 40 . In this way, the photoresist ink will not overflow into the different color accommodation spaces 36 of other rows, and the photoresist ink of the same color in the same row of accommodation spaces 36 can have the same height, so that after drying The formed color filter layer 38 also has a uniform thickness.

请参考图12。图12为本发明又一实施例的彩色滤光片结构的黑色矩阵图案列的俯视图。如图12所示,与图10的实施例相较,本实施例的作法为各遮光结构34具有复数条疏水通道40,而非仅具有单一疏水通道40。Please refer to Figure 12. FIG. 12 is a top view of a black matrix pattern column of a color filter structure according to another embodiment of the present invention. As shown in FIG. 12 , compared with the embodiment in FIG. 10 , in this embodiment, each light-shielding structure 34 has a plurality of hydrophobic channels 40 instead of only a single hydrophobic channel 40 .

在上述两实施例中,容纳空间36的宽度为第一宽度,而各容纳空间36内的疏水通道40的宽度(或宽度和)为第二宽度,且第二宽度与第一宽度的比值大体上介于0.3至0.95之间,并以大体上介于0.5至0.9之间为较佳。值得说明的是第二宽度是指各容纳空间36内的疏水通道40的宽度总和,因此若容纳空间36仅包括单一疏水通道40,则第二宽度即为疏水通道40的宽度(例如本实施例中位于各黑色矩阵图案列32两端的容纳空间36),而若容纳空间包括两个疏水通道,则第二宽度是指疏水通道40的宽度总和。另外,第二宽度与第一宽度的比值仍应依据光刻胶墨液的表面张力、光刻胶墨液与黑色矩阵图案列的接触角、光刻胶墨液的密度等参数而加以变更,而不限于上述范围。上述疏水凹口42或疏水通道40形成的空间,可利用对组的含有TFT控制单元的基板上对应的不透光结构以防止漏光,例如含有栅极线或是其他金属导线的不透光层结构,制作遮蔽的金属结构,或者是利用高开口率结构中,有机介电层覆盖于栅极线上,使液晶分子在疏水凹口42或疏水通道40等部分仍然能够控制液晶开关,来遮蔽此处可能造成的漏光,由于此部分为掌握该项技术者所熟知,因此不再赘述。In the above two embodiments, the width of the accommodating space 36 is the first width, and the width (or the sum of the widths) of the hydrophobic channel 40 in each accommodating space 36 is the second width, and the ratio of the second width to the first width is approximately Generally between 0.3 and 0.95, and generally between 0.5 and 0.9 is better. It should be noted that the second width refers to the sum of the widths of the hydrophobic passages 40 in each accommodation space 36, so if the accommodation space 36 only includes a single hydrophobic passage 40, the second width is the width of the hydrophobic passage 40 (for example, in this embodiment The containing space 36 located at both ends of each black matrix pattern row 32 ), and if the containing space includes two hydrophobic channels, the second width refers to the sum of the widths of the hydrophobic channels 40 . In addition, the ratio of the second width to the first width should still be changed according to parameters such as the surface tension of the photoresist ink, the contact angle between the photoresist ink and the black matrix pattern row, and the density of the photoresist ink. It is not limited to the above range. The space formed by the hydrophobic notch 42 or the hydrophobic channel 40 can use the corresponding opaque structure on the substrate containing the TFT control unit to prevent light leakage, such as an opaque layer containing gate lines or other metal wires. structure, make a shielded metal structure, or use the high aperture ratio structure, the organic dielectric layer covers the gate line, so that the liquid crystal molecules can still control the liquid crystal switch in the hydrophobic notch 42 or the hydrophobic channel 40 to shield The light leakage that may be caused here is not repeated because this part is well known to those skilled in the art.

值得说明的是,基本上光刻胶墨液的喷涂量的变异在一定程度内的状况下,在疏水力的作用下位于同一列的容纳空间36内的光刻胶墨液并不会通过疏水通道40流入相邻的容纳空间36内,然而光刻胶墨液的喷涂量的变异在极大的情况下有可能超过标准值太多,而导致在某一容纳空间36内的光刻胶墨液的静水力有可能大于疏水通道40的疏水力而使静力不平衡,在此状况下此一容纳空间36内的光刻胶墨液会经静水力的影响经由疏水通道40流至位于同一列的相邻容纳空间36内,而当此一容纳空间36内的光刻胶墨液的量下降至可接受的范围内时,静水力与疏水力仍会达到平衡而使得所有容纳空间36内的光刻胶墨液仍会具有相同的高度。为了适应光刻胶墨液的变异量超出标准值太多的特殊状况,各黑色矩阵图案列32的容纳空间36的其中之一或其中数个(一般为最末端的容纳空间36)可设定为一虚设(dummy)容纳空间36d(如图11或图12所示),其中虚设容纳空间36d可能在喷墨制造工艺时未喷涂有光刻胶墨液,而借此当光刻胶墨液的量过多时,可作为容纳多余的光刻胶墨液的缓冲空间,使其它容纳空间36内的光刻胶墨液的量维持在正常范围。It is worth noting that, basically, when the amount of sprayed photoresist ink varies within a certain range, the photoresist ink located in the accommodation space 36 of the same row will not pass through the hydrophobic force under the effect of hydrophobic force. The channel 40 flows into the adjacent accommodating space 36, yet the variation of the amount of sprayed photoresist ink may exceed the standard value too much under extreme circumstances, resulting in the photoresist ink in a certain accommodating space 36 The hydrostatic force of the liquid may be greater than the hydrophobic force of the hydrophobic channel 40 so that the static force is unbalanced. In the adjacent accommodation space 36 of the row, and when the amount of photoresist ink in this accommodation space 36 drops to an acceptable range, the hydrostatic force and the hydrophobic force will still reach a balance so that all the accommodation spaces 36 The photoresist ink will still have the same height. In order to adapt to the special situation that the amount of variation of the photoresist ink exceeds the standard value too much, one of them or several of them (generally the most end of the accommodation space 36) of the accommodation spaces 36 of each black matrix pattern row 32 can be set It is a dummy accommodating space 36d (as shown in Figure 11 or Figure 12), wherein the dummy accommodating space 36d may not be sprayed with photoresist ink during the inkjet manufacturing process, and thereby acts as a photoresist ink When the amount is too much, it can be used as a buffer space for accommodating excess photoresist ink, so that the amount of photoresist ink in other accommodating spaces 36 can be maintained within a normal range.

请参考图13,并请一并参考图6至图12。图13为本发明一实施例制作彩色滤光片结构的方法流程图。如图13所示,本实施例制作彩色滤光片结构的方法,包括下列步骤:Please refer to FIG. 13 , and please also refer to FIG. 6 to FIG. 12 . FIG. 13 is a flowchart of a method for fabricating a color filter structure according to an embodiment of the present invention. As shown in Figure 13, the method for making a color filter structure in this embodiment includes the following steps:

步骤50:提供一透明基板;Step 50: providing a transparent substrate;

步骤52:于透明基板的一表面形成复数个黑色矩阵图案列,其中各黑色矩阵图案列包括复数个遮光结构,以串联方式沿一第一方向排列,各遮光结构具有一厚度并形成一容纳空间,且各遮光结构具有至少一缺口、凹口或通道,其中遮光结构的缺口可为单一或复数条连通相邻的容纳空间的通道,或为单一或复数个未连通相邻的容纳空间的凹口;Step 52: Form a plurality of black matrix pattern rows on a surface of the transparent substrate, wherein each black matrix pattern row includes a plurality of light-shielding structures arranged in series along a first direction, and each light-shielding structure has a thickness and forms an accommodating space , and each light-shielding structure has at least one gap, notch or channel, wherein the gap of the light-shielding structure can be a single or a plurality of passages that communicate with adjacent accommodating spaces, or a single or a plurality of recesses that are not connected with adjacent accommodating spaces mouth;

步骤54:对黑色矩阵图案进行一疏水处理制造工艺例如一等离子体制造工艺,使各遮光结构的所述的缺口、所述的凹口或所述的通道具有疏水特性而形成至少一疏水阀;Step 54: performing a hydrophobic treatment manufacturing process such as a plasma manufacturing process on the black matrix pattern, so that the gaps, the notches or the channels of each light-shielding structure have hydrophobic properties to form at least one steam trap;

步骤56:进行一喷墨制造工艺依序于各容纳空间中喷入光刻胶墨液,并借由各疏水阀产生的一疏水力与各容纳空间内的光刻胶墨液产生的一静水力达到静力平衡,使多余的光刻胶墨液流入疏水缺口内,而使位于各黑色矩阵图案列的容纳空间内的光刻胶墨液具有相同的高度;以及Step 56: Perform an inkjet manufacturing process to spray photoresist ink into each accommodation space in sequence, and use a hydrophobic force generated by each trap and a static force generated by the photoresist ink in each accommodation space The hydraulic force achieves a static balance, so that excess photoresist ink flows into the hydrophobic gap, so that the photoresist ink located in the accommodation space of each black matrix pattern column has the same height; and

步骤58:于喷墨制造工艺后进行一烘烤制造工艺,以形成色度均匀的彩色滤光片结构。Step 58 : Perform a baking process after the inkjet process to form a color filter structure with uniform chromaticity.

由上述可知,本发明利用疏水阀(包括疏水凹口或疏水通道)设计提供一疏水力,并借由调整疏水通道或疏水凹口的宽度使得疏水力与光刻胶墨液的静水力达到力平衡,以降低喷墨制造工艺的变异可能造成的彩色滤光片缺陷,因此可有效提升彩色滤光片的可靠度与良率。As can be seen from the above, the present invention utilizes the design of the trap (including the hydrophobic notch or the hydrophobic channel) to provide a hydrophobic force, and by adjusting the width of the hydrophobic channel or the hydrophobic notch, the hydrophobic force and the hydrostatic force of the photoresist ink can reach a force. Balanced to reduce color filter defects that may be caused by variations in the inkjet manufacturing process, thus effectively improving the reliability and yield of color filters.

以上所述仅为本发明的较佳实施例,凡依本发明权利要求范围所做的均等变化与修饰,皆应属本发明的涵盖范围。The above descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made according to the claims of the present invention shall fall within the scope of the present invention.

Claims (20)

1. a colorful filter structure is characterized in that, described structure comprises:
One transparency carrier, described transparency carrier comprises a surface;
A plurality of black matrix pattern row, described these black matrix patterns row have hydrophobic property and are arranged on the described surface of described transparency carrier to define pixel a plurality of times, each described black matrix pattern row comprises a plurality of light-shielding structures, arrange along a first direction with series system, each described light-shielding structure has a thickness and forms a spatial accommodation, and each described light-shielding structure has at least one hydrophobic channel, makes that be positioned at same described black matrix pattern lists adjacent described these spatial accommodations and communicate with each other; And
One chromatic filter layer is arranged within described these spatial accommodations of described these light-shielding structures formations.
2. colorful filter structure as claimed in claim 1, wherein said light-shielding structure has one first width, and described hydrophobic channel has one second width, and the ratio of described second width and described first width is substantially between 0.3 to 0.95.
3. colorful filter structure as claimed in claim 2, the ratio of wherein said second width and described first width is substantially between 0.5 to 0.9.
4. colorful filter structure as claimed in claim 1, wherein each described light-shielding structure comprises a plurality of hydrophobic channels, makes that be positioned at same described black matrix pattern lists adjacent described these spatial accommodations and communicate with each other.
5. colorful filter structure as claimed in claim 4, wherein each described light-shielding structure has one first width, and the width summation that is positioned at described these hydrophobic channels of same light-shielding structure is one second width, and the ratio of described second width and described first width is substantially between 0.3 to 0.95.
6. colorful filter structure as claimed in claim 5, the ratio of wherein said second width and described first width is substantially between 0.5 to 0.9.
7. colorful filter structure as claimed in claim 1, wherein said chromatic filter layer comprises a plurality of first color filter pattern, a plurality of second color filter pattern and a plurality of the 3rd color filter pattern, is staggered within described these spatial accommodations in vertical bar shape mode.
8. colorful filter structure as claimed in claim 1, wherein one of them of described these spatial accommodations of each described black matrix pattern row is an illusory spatial accommodation.
9. a colorful filter structure is characterized in that, described structure comprises:
One transparency carrier, described transparency carrier comprises a surface;
A plurality of black matrix pattern row, described these black matrix patterns row have hydrophobic property and are arranged on the described surface of described transparency carrier to define pixel a plurality of times, each described black matrix pattern row comprises a plurality of light-shielding structures, each described light-shielding structure has a thickness and forms a spatial accommodation, each described spatial accommodation is an enclosure space and is not communicated with each other, and each described light-shielding structure has at least one hydrophobic recess; And
One chromatic filter layer is arranged within described these spatial accommodations of described these light-shielding structures formations.
10. colorful filter structure as claimed in claim 9, wherein the described hydrophobic recess of the described hydrophobic recess of each described light-shielding structure and adjacent described light-shielding structure is arranged on the adjacent side of described these light-shielding structures.
11. colorful filter structure as claimed in claim 10, wherein said light-shielding structure has one first width, and described hydrophobic channel has one second width, and the ratio of described second width and described first width is substantially between 0.3 to 0.95.
12. colorful filter structure as claimed in claim 11, the ratio of wherein said second width and described first width is substantially between 0.5 to 0.9.
13. colorful filter structure as claimed in claim 9, wherein each described light-shielding structure includes a plurality of hydrophobic recesses.
14. colorful filter structure as claimed in claim 13, wherein each described light-shielding structure comprises a plurality of sides, and described these hydrophobic recesses are arranged on described these sides of each described light-shielding structure.
15. colorful filter structure as claimed in claim 14, wherein each described light-shielding structure has one first width, and the width summation that is positioned at described these hydrophobic recesses of same light-shielding structure is one second width, and the ratio of described second width and described first width is substantially between 0.3 to 0.95.
16. colorful filter structure as claimed in claim 15, the ratio of wherein said second width and described first width is substantially between 0.5 to 0.9.
17. a method of making colorful filter structure is characterized in that, described method comprises:
One transparency carrier is provided;
Form a plurality of black matrix pattern row in a surface of described transparency carrier, wherein each described black matrix pattern row comprises a plurality of light-shielding structures, each described light-shielding structure has a thickness and forms a spatial accommodation, and each described light-shielding structure has at least one breach;
Described black matrix pattern is carried out a hydrophobic treatments manufacturing process, make the described breach of each described light-shielding structure have hydrophobic property and form at least one drain valve; And
Carry out an ink-jet manufacturing process and in each described spatial accommodation, spray into photoetching celluloid ink liquid in regular turn, and a hydrostatic power of a hydrophobic force that produces by each described drain valve and the generation of the photoetching celluloid ink liquid in each described spatial accommodation reaches statical equilibrium, unnecessary photoetching celluloid ink liquid is flowed in described these drain valves, and make the photoetching celluloid ink liquid of described these spatial accommodations that are positioned at each described black matrix pattern row have identical height.
18. method as claimed in claim 17, wherein each described drain valve is a hydrophobic channel, makes that be positioned at same described black matrix pattern lists adjacent described these spatial accommodations and communicate with each other.
19. method as claimed in claim 17, wherein each described drain valve is a hydrophobic recess, and described these hydrophobic recesses are not communicated with each other, makes each described spatial accommodation form an enclosure space.
20. method as claimed in claim 17, wherein said hydrophobic treatments manufacturing process comprises a plasma manufacturing process.
CNA2007101626258A 2007-10-15 2007-10-15 Color filter structure and manufacturing method thereof Pending CN101158776A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102183806A (en) * 2011-03-01 2011-09-14 友达光电股份有限公司 Color filter array and manufacturing method thereof
US20110287682A1 (en) * 2009-02-10 2011-11-24 Panasonic Corporation Organic el display manufacturing method
CN103311269A (en) * 2013-05-29 2013-09-18 京东方科技集团股份有限公司 OLED (organic light emitting diode) pixel limit structure and manufacturing method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110287682A1 (en) * 2009-02-10 2011-11-24 Panasonic Corporation Organic el display manufacturing method
US9111886B2 (en) * 2009-02-10 2015-08-18 Joled Inc. Method of repairing a defect of an organic EL display
CN102183806A (en) * 2011-03-01 2011-09-14 友达光电股份有限公司 Color filter array and manufacturing method thereof
CN103311269A (en) * 2013-05-29 2013-09-18 京东方科技集团股份有限公司 OLED (organic light emitting diode) pixel limit structure and manufacturing method thereof
US10446622B2 (en) 2013-05-29 2019-10-15 Boe Technology Group Co., Ltd. OLED pixel defining structure with at least two intercommunicated sub-pixel defining zones of same color, manufacturing method thereof and array substrate

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