CN101144765B - Polyphase material each ingredient phase content test method - Google Patents

Polyphase material each ingredient phase content test method Download PDF

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CN101144765B
CN101144765B CN2006100310696A CN200610031069A CN101144765B CN 101144765 B CN101144765 B CN 101144765B CN 2006100310696 A CN2006100310696 A CN 2006100310696A CN 200610031069 A CN200610031069 A CN 200610031069A CN 101144765 B CN101144765 B CN 101144765B
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CN101144765A (en
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王秀芳
杨晓萍
宋洪伟
史弼
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Baoshan Iron and Steel Co Ltd
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Abstract

The invention discloses a nanometer press in testing method of the content of each constituent phase in heterogeneous material. The method tests the content of each constituent phase in the heterogeneous material by using the nanometer press in technology and the microindent characteristic, therefore, the invention has a substantive difference with other methods which are used to test the content of each constituent phase in the heterogeneous material. The method can achieve the testing of three parameters of the content of each constituent phase, the hardness and the Young modulus synchronously, to estimate the drop point of the press in testing each time (the press in point is positioned on which phase of the heterogeneous material), to get the content of each phase. The method of the invention is not only suitable for the heterogeneous materials of metal, macromolecule and ceramics, etc. which are combined by multi-class of different materials, but also suitable for the heterogeneous material which is combined by different phases in single-class material.

Description

The method of testing of respectively forming phase content in the heterogeneous material
Technical field
The present invention relates to respectively form in a kind of heterogeneous material the method for testing of phase content, especially, the nanometer that the present invention relates to respectively to form in a kind of heterogeneous material phase content is pressed into method of testing.
Background technology
The wide range that heterogeneous material is contained, it can be the combination of multiclass storerooms such as metal, macromolecule, pottery both, also can be each the alternate combination of single class material.A major advantage of heterogeneous material is: can carry out performance design according to the requirement on using, make it take into account the excellent specific property of respectively forming phase.Each forms the content of phase and performance is a requisite key element in heterogeneous material research and the design, the object that therefore becomes investigation of materials person and paid close attention to.
The conventional method that phase content is respectively formed in test in the heterogeneous material has a lot, for example quantitative metallography method, Mossbauer spectrometry, X-ray diffraction method, Electron Back-Scattered Diffraction (EBSD) method, or the like.
The quantitative metallography method is by measure the two dimensional surface feature on sample metallographic flour milling; and use the fundamental relation of stereology and mathematical statistics method deduction material is respectively formed phase in three dimensions amount, comprise yardstick (for example crystal grain or average diameter of particles, interparticle distance) and phase content etc.Measuring method has note point method, and (the code test grid that will have regular spaces is superimposed upon and organizes on the picture, calculate each and drop on mark on the lattice point mutually), division lines method (places the p-wire of known length arbitrarily and to organize on the photo, each mutually shared length on the unit of account length testing line) (obtain each total area mutually on the photo organizing with the method for area analysis with planimeter, or cut each phase from photo, obtain the second mutually shared area with weight method).Though the computation process of quantitative metallography method is simple, requires each the mutually clear demonstration in the sample metallographic flour milling, otherwise will bring very mistake to test.If sample need handle display organization by etch, must very high requirement be proposed to the etch technology.In addition, if the yardstick of each phase too little (for example reaching nanometer or submicron order) owing to be subjected to the restriction of optical microscope resolving power, also is difficult to obtain clear photograph.Even adopt SEM to carry out imaging,, also must carry out metal spraying or the processing of spray carbon, very trouble in the occasion that nonconducting sample is tested.
Mossbauer spectrometry is to utilize atomic nucleus to gamma-ray non-recoil resonance absorption phenomenon, the change of the shape of Mossbauer spectral line, resonance absorption position, intensity etc. from test process, the content of inferring each phase in the sample.This method requires sample must contain the isotope identical with the source, and is in ground state, so that resonance absorption takes place.Owing to be subjected to the restriction of isotopic species, have only the nuclear of limited quantity that mossbauer effect is arranged, and wherein many also must carry out at low temperatures, therefore the application of this method is restricted.
X-ray diffraction method is that the diffraction pattern that utilizes incident beam to produce is differentiated and respectively formed phase, and calculates the content of respectively forming phase by the intensity of diffracted ray.Therefore, this method is only applicable to crystalline material, and the sensitivity of X-ray diffraction method is closely related with each kind and quantity of forming mutually.When certain is formed phase content seldom or mutually each crystal face reflection potential is very weak, be difficult to show the diffraction lines of this phase, also just have no way of judging the content of this phase certainly.And when many things coexisted mutually, diffraction lines overlapping easily (especially crystal structure type identical, when the lattice constant difference is little) were analyzed very difficulty.
The EBSD method is that the Electron Back-Scattered Diffraction style that utilizes incident beam to produce is differentiated and respectively formed phase, and determines phase content by calculating the area fraction of respectively forming phase in the phasor.This methods analyst speed is fast, and the result is accurate, has overcome the deficiency of Mossbauer spectrometry and X-ray diffraction method to a certain extent, but also is only applicable to crystalline material.
In sum, various method of testings all have certain limitation more than.And, among these methods, can in recording heterogeneous material, respectively form phase content without any a kind of method in, respectively formed the mechanical property of phase, for example hardness and Young modulus etc.
The method of respectively forming the phase mechanical property in the test heterogeneous material mainly is divided into two big classes:
First kind method is, test contains the mechanical property of the monophase materials of corresponding composition phase, with the replacement heterogeneous material in respectively form the method for phase mechanical property.In fact, chemical constitution, microstructure, residing stress state of respectively forming phase in the heterogeneous material etc. all may be different from corresponding monophase materials, causes its mechanical property also to be partial to corresponding monophase materials far away thus.For example, has in the ferrite-martensite dual-phase steel of identical chemical constitution martensitic hardness far above the hardness of the single-phase steel of martensite.This is because in dual phase steel, and the solubleness of C in ferrite is very low, and main enrichment is distributed in that (Acta Metallurgica Sinica .41 (2005) 287~290 in the martensitic phase that come by the quick cooling transformation of austenite; The journal .26 of University of Science ﹠ Technology, Beijing (2004) 4~7).Again for example, in the particle enhanced aluminum-based composite material, the hardness of alloy matrix aluminum phase is far above the hardness of the single-phase aluminium alloy of identical chemical constitution and condition of heat treatment.This is because being added in of particle introduced highdensity dislocation in the aluminum substrate, makes matrix obtain reinforcement (Mater.Sci.Tech., 10 (1994) 406-413; J.Mater.Sci.Tech., 20 (2004) 167~172).
Second class methods are directly to test the method for respectively forming the phase mechanical property in the heterogeneous material.Mechanics Performance Testing means such as this adopts conventional tensile, compressive, bending, cut are to be difficult to realize, unique alternatively hardness test method, for example microhardness method.But, form the yardstick of phase when very little (for example reaching nanometer or submicron order) when each, utilize the microhardness method just to be difficult to realize.This is because the microhardness instrument is good at accurately providing the little load that can avoid substrate effect or boundary effect, is subjected to the restriction of optical microscope resolution characteristic simultaneously, can cause very big error when measuring the size of little impression.
It is emerging in recent years a kind of analysis and testing technology that nanometer is pressed into technology, and it is different from traditional hardness method, and hardness that not only can test material can also record mechanical parameters such as elastic modulus, fracture toughness, creep under variable stress index.In the indentation test process, it can be controlled at compression distance nanometer or submicron order exactly, thus the influence of avoiding substrate effect and boundary effect that the Mechanics Performance Testing result is brought effectively.In addition, this technology is to pass through load-displacement curve of being write down, adopt suitable mechanical model to calculate the mechanical property of material, overcome the microhardness method and in the small scale scope, be difficult to accurately measure the restriction of the area of indentation, shown special advantages aspect testing film and block materials (comprising heterogeneous material) the microcell mechanical property.Relevant nanometer is pressed into technology applicable cases in this respect, existing both at home and abroad a large amount of reported in literature and relevant patent introduction.
What these documents related generally to is that nanometer is pressed into technology ferrite in characterizing the TRIP steel, austenite, martensite and bainite mechanical property (Mater.Sci.Eng., A328 (2002) 26-32), near in the APIX65 steel crystal boundary the hardness regularity of distribution (Scripta Mater., 45 (2001): 1401-1406), hardness (the Scripta Mater. that contains the full martensite Fe-C bianry alloy of C 0.22%, 49 (2003) 1157-1162), the hardness of SiC film and Young modulus on the silicon base (Surf.Coat.Techol., 163-164 (2003) 491-498), invest and dose SiO on the substrate of glass 2The application of the fracture toughness of the organic modified silicate coating of particle and unrelieved stress aspects such as (Mater.Sci.Eng., R36 (200) 47-103).Patent then relates generally to be utilized nanometer to be pressed into the end between technical testing hard coat hardness (CN 1423115A), dura mater and the soft substrate to stick fracture toughness (US6053034), the mechanical properties of concrete (FR2796150) of intensity (US 6339958), film, the elastic modulus (US2003094034 of material; EP1314970) etc. the concrete test method that is adopted.And relevant nanometer is pressed into technology respectively forms application aspect the phase content in measuring heterogeneous material, does not see document and patent report so far as yet.
In view of above-mentioned, the objective of the invention is: provide the nanometer of respectively forming phase content in a kind of heterogeneous material to be pressed into method of testing.This method can realize respectively forming the test of phase content, hardness and three parameters of Young modulus simultaneously, both be applicable to as metal, macromolecule, pottery etc. by the heterogeneous material that the multiclass different materials is made up, also be applicable in single class material heterogeneous material by homophase did not make up.Be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, form the comparatively tangible heterogeneous material of difference of the hardness or the Young modulus of phase for each, even the yardstick of each phase is little of submicron order, its test result also very accurately and reliably.
Summary of the invention
The invention provides the nanometer of respectively forming phase content in a kind of heterogeneous material and be pressed into method of testing, hardness or the Young modulus of respectively forming phase in the described heterogeneous material exist than evident difference, and described nanometer is pressed into method of testing and comprises the steps:
(1) utilize methods such as mechanical buffing or electropolishing to prepare sample;
(2) utilize nanometer to be pressed into technology and carry out a series of tests that are pressed in one or several zones on testing sample surface, test zone system is randomly dispersed in sample surfaces, and the test point of each test zone is arranged according to grid configuration;
(3) utilize and to be pressed into test to obtain a series of " hardness-Young modulus " data right, draw the scatter diagram of hardness-Young modulus in view of the above;
(4) utilize the size of hardness or Young modulus to discern and respectively form phase, and then judgement is pressed into the drop point of test at every turn, judge that promptly be pressed into which that a little be arranged in heterogeneous material forms and goes up mutually, count with being pressed into of dropping on that each composition goes up mutually then and be pressed into the ratio (or number percent) of always counting and represent each content (or content percentage) mutually.
Be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, hardness or the Young modulus of respectively forming phase in the described heterogeneous material should exist than evident difference.Such as, each forms the difference of the average hardness of phase or Young modulus obviously greater than the undulating quantity of measuring (comprising the influence of measuring error, substrate effect or boundary effect and crystal orientation), at this moment, is particularly suitable for using the present invention.
The present invention utilizes nanometer to be pressed into the mechanical property parameter that obtains of test to differentiate and respectively form phase, therefore to specimen require fairly simple, sample can etch, also can not etch (for the heterogeneous metal sample, suggestion adopts electrolytic polishing method to prepare sample, to eliminate the influence of strained layer to each phase The performance test results), only require that test surfaces is smooth, pollution-free and be parallel to each other with opposite (sample bottom surface).
Be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, the nanometer that is adopted is pressed into the resolving power of the load of testing apparatus and displacement respectively in Na Niu and nanometer scale.In being pressed into test process, controlled variable (load, displacement etc.) can change continuously, can write down load-displacement curve automatically, and be carried out to the long run test of Lot sample or batch test point automatically, and need not operating personnel do monitoring constantly.
Be preferably, be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, the nanometer that is adopted is pressed into the pressure head of testing apparatus and is made by adamas, sapphire or tungsten carbide material, its shape can be the Berkovich pressure head, cube--corner pressure head, Vickers pressure head or Nu Shi pressure head or the like.
Be preferably, be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, the radius-of-curvature at the pressure head tip of being adopted with little for well.In the present invention, consider existing pressure head process technology, can between 1~100nm, be more preferably between 1~50nm, preferably between 1~30nm.But the radius-of-curvature at littler pressure head tip is still in scope of the present invention.
Thus, can improve according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention and be pressed into the measuring accuracy of method of testing, and enlarge its applied material ranges.
Be preferably, be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, when utilizing nanometer to be pressed into technology to test, select one or more test zones on sample at random, the lattice point number of setting the described test zone of representative is test grid (the I=grid line number of I * J; J=grid columns), I and J can equate, also can be unequal, and the numerical range of I and J can be between 2~100.But different according to test material, instrument and method etc. or not when being pressed into test fee at every turn, usually, and 1~8 fen clock time when approximately costing.Thus, count when a lot of when being pressed into, just need finish whole test for a long time, economic rationality and operability are relatively poor.According to the present invention, to count and should be taken into account the different of test occasion, material, instrument and method etc. satisfying the best test under the mathematical statistics requirement situation, the numerical range of I and J better is between 5~50, is more preferably between 10~15.
Be preferably, be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, the spacing of the adjacent lattice point that is adopted equates and forms as far as possible the yardstick of phase near each, and greater than being pressed into 20 times of MTD.
Take this, can avoid the test of subsequent point to be subjected to the influence of the adjacent with it impression strain field that former test point produced.
Be preferably, be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, the compression distance that is adopted mostly is less than forming 1/8 of phase smallest dimension in the heterogeneous material, is preferably less than 1/12.
In the present invention, the setting of described compression distance is very crucial.Compression distance can be less than the 1/4-1/12 that forms the phase smallest dimension in the heterogeneous material.But according to the test material difference, the substrate effect can be different to the influence degree of test result with boundary effect.According to the present invention, as mentioned above, compression distance mostly is less than forming 1/8 of phase smallest dimension in the heterogeneous material, is preferably less than 1/12.
Thus, can guarantee that plasticity that process of press in causes and elastic strain field only limit within each phase scope that test point falls in material, thereby avoid being subjected to the influence of the adjacent with it substrate effect that homophase did not cause in this test of going up mutually.Otherwise, this mutually on the mechanical performance data that produced of test may drop in the groupings of data points that other phase produces, cause dropping on being pressed on the homophase not thus and occur error when counting in statistics.
In the hardness of utilizing the present invention to draw sample during to the scatter diagram of Young modulus, no matter be the situation of carrying out a grid test at a test zone, still carry out the situation of a plurality of grid tests at a plurality of test zones, all the test result of being had a few will be summarised in the scatter diagram and add up.During statistics indivedual between two adjacent point groups, on counting, being pressed into of two point groups respectively add 1/2.
Be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, described method system utilizes nanometer to be pressed into technology and micro-indentations characteristic thereof, the method that the content of respectively forming phase in the heterogeneous material is tested.Therefore, the method for respectively forming phase content in the present invention and other test heterogeneous material has substantive difference.It is that to be pressed into technology with nanometer be means, and the hardness of the each point that obtains with test or the size of Young modulus are discerned each phase, and then judges the drop point that at every turn is pressed into test (be pressed into a little be arranged in heterogeneous material which go up mutually), thereby obtains the content of each phase.Method of the present invention both had been applicable to as metal, macromolecule, pottery etc. by the heterogeneous material that the multiclass different materials is made up, and also was applicable in single class material the heterogeneous material by homophase did not make up.
Description of drawings
Figure 1 shows that the present invention's synoptic diagram of " respectively forming the phase content method of testing in the heterogeneous material ".
Figure 2 shows that ferrite-martensite dual-phase steel is organized photo among the embodiment 1.
Figure 3 shows that ferrite-martensite dual-phase steel among the embodiment 1, be pressed into the hardness that obtains of test to the Young modulus scatter diagram by one 12 * 10 rectangular node (amounting to 120 lattice points).
Fig. 4 is a GCr15 structure of steel photo among the embodiment 2.
Fig. 5 is to the GCr15 steel among the embodiment 2, is pressed into the hardness that obtains of test to the Young modulus scatter diagram by three 8 * 5 rectangular nodes (amounting to 120 lattice points).
Embodiment
Below, the invention will be further described with embodiment in conjunction with the accompanying drawings.
Referring to Fig. 1, to set and contain three composition phases (three-phase is respectively A, and B and C, its hardness H or Young modulus E size order are H/E (A)>H/E (B)>H/E (C)) in the heterogeneous material, its enforcement of respectively forming the phase content method of testing is as follows:
Utilizing nanometer to be pressed into technology carries out being pressed into test N time on the surface of sample, this N is pressed into rectangular node that lattice point number is I * J of formation, the yardstick of B, C two-phase is comparatively approaching in the spacing of adjacent lattice point and the material, simultaneously greater than being pressed into 20 times of MTD.Be pressed in the test process, these are pressed into A, B or the C that point (lattice point) drops in the heterogeneous material and go up mutually.According to the fundamental relation of stereology, drop on each and be pressed on mutually to count and account for the number percent that is pressed into a sum and will equal the content of every phase respectively.Suppose in N is pressed into a little, there be X hardness number higher data point to be gathered into a group, Y hardness number data point placed in the middle is gathered into a group, and Z the lower data point of hardness number is gathered into a group, and the content of A, B and C three-phase just can be used respectively in this heterogeneous material so
Figure G06131069620060926D000101
With
Figure G06131069620060926D000103
Represent.Respectively above X, Y and Z hardness and Young modulus test result are averaged, just obtained the hardness and the Young modulus of A, B and C three-phase.
Embodiment 1:
Tested heterogeneous material is ferrite-martensite dual-phase steel, and ferrite and martensitic average crystal grain diameter are respectively 3.0 μ m and 1.3 μ m.Select a test zone at random on sample, carry out 120 times and be pressed into test, it is 12 * 10 rectangular nodes of spacing with 5 μ m that 120 impression points constitute one.In the process of the test, employing be the Berkovich diamond penetrator, radius-of-curvature<50nm that it is most advanced and sophisticated; The setting compression distance is 70nm, and it is 0.05s that control is pressed into rate of strain -1
After the test, it is right to obtain 120 hardness-Young modulus data, and scatter diagram as shown in Figure 2.As seen from the figure, higher 12 of hardness number are gathered into a group, and showing has dropped on the martensitic phase harder in the dual phase steel at 12 in the test process; 108 that all the other hardness numbers are lower be gathered into a group, and showing has dropped on the ferritic phase softer in the dual phase steel at 108 in the test process.Can draw thus, martensite and ferritic content are respectively in this dual phase steel With
Figure G06131069620060926D000105
This is consistent with the quantitative metallography result who obtains by sem observation (Fig. 2).Simultaneously, can also draw the hardness and the Young modulus of martensite and ferrite two-phase: martensitic hardness number is (mean value is 8.20GPa) between 7.23~9.64GPa, and the Young modulus value is (mean value is 218.7GPa) between 199.0~240.0GPa; Ferritic hardness number is (mean value is 4.57GPa) between 3.51~5.89GPa, and the Young modulus value is (mean value is 227.0GPa) between 200.4~256.6GPa.Ferrite-martensite dual-phase steel is a kind of polycrystalline material, and different crystal grain has different performances because of being orientated difference.In the nanometer indentation test, each what measure often is the performance of some crystal grain, and therefore repeatedly test result has the distribution range of broad.
Embodiment 2:
Tested heterogeneous material is ferrite-carbonide dual phase steel, and the mean diameter of carbide particle is 0.5 μ m.Select three test zones at random on sample, respectively carry out in each zone being pressed into test 40 times, it is 8 * 5 rectangular nodes of spacing with 5 μ m that 40 impression points constitute one.In the process of the test, employing be the Berkovich diamond penetrator, radius-of-curvature<20nm that it is most advanced and sophisticated; The setting compression distance is 50nm, and it is 0.05s that control is pressed into rate of strain -1
After the test, it is right to obtain 120 hardness-Young modulus data, and these data are summarised in the scatter diagram, as shown in Figure 3.As seen from the figure, higher 9 of hardness number are gathered into a group, and showing has dropped on the carbide particle harder in the dual phase steel at 9 in the test process; 111 that all the other hardness numbers are lower be gathered into a group, and showing has dropped on the ferritic phase softer in the dual phase steel at 111 in the test process.Can draw thus, carbonide and ferritic content are respectively 7.5% in this dual phase steel
Figure G06131069620060926D000111
With
Figure G06131069620060926D000112
This is consistent with the quantitative metallography result who obtains by transmission electron microscope observation (Fig. 4).Simultaneously, can also draw the hardness and the Young modulus of carbonide and ferrite two-phase: the hardness number of carbonide is (mean value is 13.30GPa) between 9.50~16.28GPa, and the Young modulus value is (mean value is 231.4GPa) between 199.5~252.3GPa; Ferritic hardness number is (mean value is 3.88GPa) between 2.88~5.97GPa, and the Young modulus value is (mean value is 206.5GPa) between 170.7~238.7GPa.Ferrite-carbonide dual phase steel also is a kind of polycrystalline material, therefore repeatedly tests the distribution range that the mechanical property result who obtains also has broad.
Be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention.This method can realize respectively forming the test of phase content, hardness and three parameters of Young modulus simultaneously, both be applicable to as metal, macromolecule, pottery etc. by the heterogeneous material that the multiclass different materials is made up, also be applicable in single class material heterogeneous material by homophase did not make up.Be pressed into method of testing according to the nanometer of respectively forming phase content in the heterogeneous material of the present invention, form the comparatively tangible heterogeneous material of difference of the hardness or the Young modulus of phase for each, even the yardstick of each phase is little of submicron order, its test result also very accurately and reliably.

Claims (12)

1. the nanometer of respectively forming phase content in the heterogeneous material is pressed into method of testing, described heterogeneous material is the metal heterogeneous material, hardness or the Young modulus of respectively forming phase in the described heterogeneous material there are differences, and it is characterized in that, described nanometer is pressed into method of testing and comprises the steps:
(1) utilize mechanical buffing or electrolytic polishing method to prepare sample;
(2) utilize nanometer to be pressed into technology and carry out a series of tests that are pressed in one or several zones on testing sample surface, test zone system is randomly dispersed in sample surfaces, and the test point of each test zone is arranged according to grid configuration;
(3) utilize and to be pressed into test to obtain a series of " hardness-Young modulus " data right, draw the scatter diagram of hardness-Young modulus in view of the above;
(4) utilize the size of hardness or Young modulus to discern and respectively form phase, and then judgement is pressed into the drop point of test at every turn, judge that promptly be pressed into which that a little be arranged in heterogeneous material forms and goes up mutually, count with being pressed into of dropping on that each composition goes up mutually then and be pressed into the ratio of always counting and represent each content mutually.
2. the nanometer of respectively forming phase content in the heterogeneous material as claimed in claim 1 is pressed into method of testing, it is characterized in that, the nanometer that is adopted is pressed into the resolution of the load of testing apparatus and displacement respectively in Na Niu and nanometer scale, in being pressed into test process, load, displacement control parameters can change continuously, and can write down load-displacement curve automatically, be carried out to the long run test of Lot sample or batch test point automatically.
3. the nanometer of respectively forming phase content in the heterogeneous material as claimed in claim 1 is pressed into method of testing, it is characterized in that, described nanometer is pressed into the pressure head of testing apparatus and is made by adamas, sapphire or tungsten carbide material, it is shaped as the Berkovich pressure head, cube--corner pressure head, Vickers pressure head, Nu Shi pressure head a kind of.
4. the nanometer of respectively forming phase content in the heterogeneous material as claimed in claim 3 is pressed into method of testing, it is characterized in that, the radius-of-curvature at described pressure head tip is in the scope of 10nm~2 μ m.
5. be pressed into method of testing as the nanometer of respectively forming phase content in claim 3 or the 4 described heterogeneous materials, it is characterized in that the radius-of-curvature at described pressure head tip is in the scope of 10~500nm.
6. be pressed into method of testing as the nanometer of respectively forming phase content in claim 3 or the 4 described heterogeneous materials, it is characterized in that the radius-of-curvature at described pressure head tip is in the scope of 10~100nm.
7. the nanometer of respectively forming phase content in the heterogeneous material as claimed in claim 1 is pressed into method of testing, it is characterized in that, select one or more test zones on sample at random, the lattice point number of setting the described test zone of representative is the test grid of I * J, I=grid line number; J=grid columns, the numerical value of I and J is in 2~100 scope.
8. the nanometer of respectively forming phase content in the heterogeneous material as claimed in claim 7 is pressed into method of testing, it is characterized in that, the numerical value of described I and J is in 5~50 scope.
9. be pressed into method of testing as the nanometer of respectively forming phase content in claim 7 or the 8 described heterogeneous materials, it is characterized in that, the numerical value of described I and J is in 10~15 scope.
10. be pressed into method of testing as the nanometer of respectively forming phase content in claim 1 or the 7 described heterogeneous materials, it is characterized in that, the spacing of the adjacent lattice point of the grid that is adopted equates, forms the yardstick of phase near each, and greater than being pressed into 20 times of MTD.
Be pressed into method of testing 11. respectively form the nanometer of phase content in the heterogeneous material as claimed in claim 1, it is characterized in that, the compression distance that is adopted is less than forming 1/8 of phase smallest dimension in the heterogeneous material.
Be pressed into method of testing 12. respectively form the nanometer of phase content in the heterogeneous material as claimed in claim 1, it is characterized in that, the compression distance that is adopted is less than forming 1/12 of phase smallest dimension in the heterogeneous material.
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