CN101135690B - Method for making micro-magnetic field integrated polyalcohol microflow control device - Google Patents

Method for making micro-magnetic field integrated polyalcohol microflow control device Download PDF

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Publication number
CN101135690B
CN101135690B CN2007100535285A CN200710053528A CN101135690B CN 101135690 B CN101135690 B CN 101135690B CN 2007100535285 A CN2007100535285 A CN 2007100535285A CN 200710053528 A CN200710053528 A CN 200710053528A CN 101135690 B CN101135690 B CN 101135690B
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micro
little
magnetic field
formpiston
template
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CN101135690A (en
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张志凌
刘妍君
庞代文
国世上
黄卫华
陈勇
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Wuhan University WHU
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Wuhan University WHU
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Abstract

The invention disclsoses a method for maufacturing a micromagnetic field integrated microflow control device, comprising: 1) preparing male die template for polymer microflow control chip by soft etch method; 2) winding 10-120 turns of wire on the soft magnetic material to make micro coils, wherein the surface of the wire is insulated; 3) securing a plurality of micro coils on the micro channels of the male die template, such that the micro coils are perpendicular to the plane of the male die template; fixing the plurality of micro coils on the two sides of the micro channels of the male die template, with an included angle between the micro coils being 0-180 DEG, and an included angle between the plane of the micro coils and that of the male die template being 0-90 DEG; 4) pouring the liquid prepolymer used for making the polymer microflow control chip on the male die template; solidifying, demoulding and forming to make the chip substrate with micro coils and micro channels, usinga hole puncher to make holes in order to make linkage with a cover plate, thus forming the micromagnetic field integrated microflow control device. The method has simple manufacturing process and low cost, the obtained magnetic field has controllable switch, size and direction, as well as the characteristic of in situ and high integration.

Description

The method for making of the polyalcohol microflow control device that a kind of little magnetic field is integrated
Technical field
The present invention relates to the method for making of the integrated polyalcohol microflow control device in a kind of little magnetic field, belong to the micro-total analysis system field.
Background technology
The micro-fluidic chip technology is to grow up in the analytical chemistry field nineties in 20th century, it is an architectural feature with the microchannel network, with life science is main research object, the function in whole laboratory is comprised that sample pretreatment, reaction, separation, detection etc. are integrated on the microchip, analysis speed is greatly improved, having very extensive applicability and application prospect, is the emphasis of current micro-total analysis system research.
Meanwhile, magnetic particle is because good navigability becomes another research focus.At present, in microfluidic system, generally obtain little electromagnetic field, thereby realize manipulation magnetic particle by use externally-applied magnetic field or micro-processing technology, the former is placed directly in the chip outside with permanent magnet or electromagnet, this passive magnetic particle separation vessel is processed easily, but lacks original position, and integrated level is low and device is bigger, the latter is integrated in electromagnet on the chip by micro-machined method, the chip integration height that this method makes, but process complexity, the cost height.
Summary of the invention
The method for making that the purpose of this invention is to provide the integrated polyalcohol microflow control device in a kind of little magnetic field, manufacturing process is simple, and the micro fluidic device cost of making is low and integrated level is high, can be widely used for fields such as biomolecule detection, genetic analysis, tachysynthesis mensuration, cell screening.
Realize that the technical scheme that the object of the invention adopts is: the method for making of the micro fluidic device that a kind of little magnetic field is integrated, adopt following steps:
(1) makes the formpiston template that polymeric micro-fluidic chip is used with the method preparation of soft etching;
(2) on soft magnetic material, become little coil, the surface insulation of lead around 10~120 circle wire producings;
(3) with several little coil stationary directly over the microchannel of formpiston template, make the plane of little coil perpendicular to the formpiston template; Or with several little coil stationary in the both sides of the microchannel of formpiston template, the angle between little coil is 0~180 °, the angle between the plane of formed plane of little coil and formpiston template is 0~90 °;
(4) will make the used material liquid prepolymer of polymeric micro-fluidic chip is poured on the formpiston template of fixing little coil, the curing and demolding moulding, make polymeric micro-fluidic chip substrate with little coil and microchannel, with card punch the polymeric micro-fluidic chip substrate is punched, with the cover plate bonding, promptly obtain the integrated polyalcohol microflow control device in little magnetic field then.
Making the used material of polymeric micro-fluidic chip is curing type polymer poly dimethyl siloxane (PDMS), epoxy resin and polyurethane etc., solvent evaporates type polymkeric substance acrylic acid, rubber and fluoroplastic etc., thermoplastic polymer polymethylmethacrylate (PMMA), polycarbonate (PC), polystyrene (PS) etc.
Method with soft etching is Metal Substrate formpiston, silicon mold and glass mold plungers at the formpiston of preparation.
Described soft magnetic material is iron oxide, silicon steel, and the diameter of soft magnetic material is 1~3mm.
Described lead is copper, aluminium or X alloy, and diameter of wire is 0.02~0.8mm.
Described cover plate is glass, curing type polymer poly dimethyl siloxane, thermoplastic polymer polymethylmethacrylate or polycarbonate polymer.
According to the size adjustment magnetic field size of disposing way, the number of turn and the input current of little coil, regulate the direction in magnetic field by the direction of current of input, thereby obtain the integrated polyalcohol microflow control device in the controlled magnetic field of magnetic field size and Orientation.
The present invention not only method by half embedding has realized little magnetic field integrated in micro-fluidic chip, compare with existing method, have tangible advantage: this device processing and making process and method are simple, and cost is low, switch, the size and Orientation in magnetic field are controlled, have original position and integrated level height.Utilize this integrated little magnetic field, can realize the manipulation of magnetic particle in the micro-fluidic chip at an easy rate.Therefore, by in the different biomolecule of magnetic particle surface coupling, for example DNA, albumen etc., this device can be widely used in fields such as the separation and purification, tachysynthesis detection, cell screening, clinical diagnosis of DNA, RNA and albumen.
Description of drawings
The present invention is further illustrated below in conjunction with drawings and Examples.
Fig. 1 is the structural representation that is provided with the micro fluidic device of a little coil directly over the microchannel.
Fig. 2 is the structural representation that the both sides, microchannel are provided with the micro fluidic device of two little coils.
Fig. 3 is the vertical section structure synoptic diagram of micro fluidic device shown in Figure 1.
Fig. 4 is the cross section structure synoptic diagram of micro fluidic device shown in Figure 1.
Fig. 5 is embodiment 1 a vertical section structure synoptic diagram.
Fig. 6 is embodiment 1 a cross section structure synoptic diagram.
1. microslides among the figure, 2. polymeric micro-fluidic chip substrate, 3. microchannel, 4. little coil.
Embodiment
Embodiment 1
(1) method with soft etching makes the silicon formpiston template that dimethyl silicone polymer micro flow control chip is used;
(2) make little coil (4) around 40 circle enamel covered wires on diameter is the iron core of 1mm, wherein the enamel covered wire diameter is 0.1mm;
(3) two the 40 little coils of circle (4) are fixed in the both sides of microchannel on the silicon formpiston template, the angle between the coil is 120 °, and two planes that coil became and the angle between the stencil plane are 60 °;
(4) the dimethyl silicone polymer monomer is mixed in 10: 1 ratio with hardening agent, fully stir, be poured on the silicon formpiston template of fixing little coil after removing bubble, solidified 3 hours down in 80 ℃, then the dimethyl silicone polymer that solidifies is peeled off from silicon formpiston template, made chip substrate with little coil (4) and microchannel (3);
(5) on chip substrate with card punch punching, use the surface 2 minutes of plasma oxidation process chip substrate and microslide then, realize the permanent bonding of chip substrate (2) and microslide (1), promptly obtain the integrated polyalcohol microflow control device in little magnetic field.
Embodiment 2
(1) method with soft etching makes the glass mold plungers template that dimethyl silicone polymer micro flow control chip is used;
(2) on being the iron core of 1.2mm, diameter makes little coil around 60 circle enamel covered wires; Wherein the enamel covered wire diameter is 0.1mm;
(3) with two the 60 little coil stationary of circle in the both sides of the microchannel of glass mold plungers template, the angle between the coil is 120 °, the angle between two planes that coil became and the glass mold plungers stencil plane is 90 °;
(4) the dimethyl silicone polymer monomer is mixed in 10: 1 ratio with hardening agent, fully stir, be poured on the glass mold plungers template of fixing little coil after removing bubble, solidified 3 hours down in 80 ℃, then the dimethyl silicone polymer that solidifies is peeled off from the glass mold plungers template, made chip substrate with little coil and microchannel;
(5) on chip substrate with card punch punching, use the surface 2 minutes of plasma oxidation process chip substrate and microslide then, realize the permanent bonding of chip substrate and microslide, promptly obtain the integrated polyalcohol microflow control device in little magnetic field.
Embodiment 3
(1) method with soft etching makes the silicon formpiston template that dimethyl silicone polymer micro flow control chip is used;
(2) make little coil around 60 circle enamel covered wires on diameter is the iron core of 1.5mm, wherein the enamel covered wire diameter is 0.1mm;
(3) with two the 60 little coil stationary of circle in the both sides of the microchannel of silicon formpiston template, the angle between the coil is 60 °, the angle between the plane of two planes that coil became and silicon formpiston template is 90 °;
(4) the dimethyl silicone polymer monomer is mixed in 10: 1 ratio with hardening agent, fully stir, be poured on the chip silicon formpiston template of fixing little coil after removing bubble, solidified 3 hours down in 80 ℃, then the dimethyl silicone polymer that solidifies is peeled off from silicon formpiston template, made chip substrate with little coil and microchannel;
(5) on chip substrate with card punch punching, use the surface 2 minutes of plasma oxidation process chip substrate and microslide then, realize the permanent bonding of chip substrate and microslide, promptly obtain the integrated polyalcohol microflow control device in little magnetic field.
Embodiment 4
(1) method with soft etching makes the sheet metal formpiston template that dimethyl silicone polymer micro flow control chip is used;
(2) make little coil around 60 circle enamel covered wires on diameter is the iron core of 2mm, wherein the enamel covered wire diameter is 0.1mm;
(3) with two the 60 little coil stationary of circle in the both sides of the microchannel of formpiston template, the angle between the coil is 60 °, the angle between the plane of two planes that coil became and formpiston template is 60 °;
(4) the dimethyl silicone polymer monomer is mixed in 10: 1 ratio with hardening agent, fully stir, be poured on the chip sheet metal formpiston template of fixing little coil after removing bubble, solidified 3 hours down in 80 ℃, then the dimethyl silicone polymer that solidifies is peeled off from sheet metal formpiston template, made chip substrate with little coil and microchannel;
(5) on chip substrate with card punch punching, use the surface 2 minutes of plasma oxidation process chip substrate and microslide then, realize the permanent bonding of chip substrate and microslide, promptly obtain the integrated polyalcohol microflow control device in little magnetic field.

Claims (5)

1. the method for making of the integrated polyalcohol microflow control device in little magnetic field is characterized in that adopting following steps:
(1) makes the formpiston template that polymeric micro-fluidic chip is used with the method for soft etching;
(2) on soft magnetic material, become little coil, the surface insulation of lead around 10~120 circle wire producings;
(3) with several little coil stationary directly over the microchannel of formpiston template, make the plane of little coil perpendicular to the formpiston template; Or with several little coil stationary in the both sides of the microchannel of formpiston template, the angle between little coil is 0~180 °, the angle between the plane that used little coil forms and the plane of formpiston template is 0~90 °;
(4) the material liquid prepolymer that will make polymeric micro-fluidic chip is poured on the formpiston template of fixing little coil, the curing and demolding moulding, make polymeric micro-fluidic chip substrate with little coil and microchannel, with card punch the polymeric micro-fluidic chip substrate is punched, with the cover plate bonding, promptly obtain the integrated polyalcohol microflow control device in little magnetic field then.
2. according to the method for making of the integrated micro fluidic device in the described little magnetic field of claim 1, it is characterized in that: formpiston is Metal Substrate formpiston, silicon mold or glass mold plungers.
3. according to the method for making of the integrated micro fluidic device in the described little magnetic field of claim 1, it is characterized in that: soft magnetic material is columniform iron oxide or silicon steel, and diameter is 1~3mm.
4. according to the method for making of the integrated micro fluidic device in the described little magnetic field of claim 1, it is characterized in that: lead is copper, aluminium or its alloy, and diameter is 0.02~0.8mm.
5. according to the method for making of the integrated micro fluidic device in the described little magnetic field of claim 1, it is characterized in that: cover plate is glass, curing type polymer poly dimethyl siloxane, thermoplastic polymer polymethylmethacrylate or polycarbonate polymer.
CN2007100535285A 2007-10-11 2007-10-11 Method for making micro-magnetic field integrated polyalcohol microflow control device Expired - Fee Related CN101135690B (en)

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CN101881779B (en) * 2010-05-31 2012-06-27 武汉大学 Ultrasonic standing wave type micro-fluidic chip and preparation method thereof
CN101879467B (en) * 2010-06-04 2012-07-04 武汉大学 Micro-fluidic chip for micro-magnetic field control and manufacturing method thereof
CN102671730A (en) * 2012-05-22 2012-09-19 武汉大学 Polymeric microfluidic chip integrating nickel column microarrays and preparation method thereof
CN102854304B (en) * 2012-07-06 2015-09-16 武汉大学 A kind of pathogen detection method based on micro-fluidic chip
CN108211960B (en) * 2018-01-22 2023-11-21 昆明理工大学 Controllable ratio-regulating micro-flow mixer using magnetic liquid as medium
CN113528310B (en) * 2021-06-16 2023-02-10 复旦大学 Bionic micro-fluidic chip for simulating cervical microenvironment and preparation method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1572717A (en) * 2003-06-11 2005-02-02 Lg电子有限公司 Micro-actuator, fabrication method thereof and micro-actuating valve
WO2005084374A2 (en) * 2004-03-03 2005-09-15 The General Hospital Corporation Magnetic device for isolation of cells and biomolecules in a microfluidic environment
CN1719257A (en) * 2005-07-20 2006-01-11 中国科学院上海微系统与信息技术研究所 Preparation facilities of a kind of low flux micro array biochip and preparation method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1572717A (en) * 2003-06-11 2005-02-02 Lg电子有限公司 Micro-actuator, fabrication method thereof and micro-actuating valve
WO2005084374A2 (en) * 2004-03-03 2005-09-15 The General Hospital Corporation Magnetic device for isolation of cells and biomolecules in a microfluidic environment
CN1719257A (en) * 2005-07-20 2006-01-11 中国科学院上海微系统与信息技术研究所 Preparation facilities of a kind of low flux micro array biochip and preparation method thereof

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
C.H.Ahn M.G.Allen
C.H.Ahn, M.G.Allen, W.Trimmer, Y.-N.Jun, S.Erramill.A Fully Integrated Micromachined Magnetic Particle Separator.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS.1996,5(3),151-158. *
T. Deng, M. Prentiss, and G. M. Whitesides,.Fabrication of magnetic microfiltration systems using soft lithography.APPLIED PHYSICS LETTERS.2002,80(3),461-463. *
刘妍君,国世上,张志凌,黄卫华,Damien Baigl,庞代文,陈勇.蛋白质分析集成化非均相免疫反应微流控芯片的研制.南昌大学学报(理科版).2006,30990,992. *
张志凌,刘妍君,庞代文,陈勇.细胞分选用功能化微流控芯片.南昌大学学报(理科版).2006,30968-969. *
张志凌,刘妍君,王惟汉,庞代文.功能化微流控芯片研制及细胞分选应用.第七届全国毛细管电泳及相关微纳分离分析学术报告会文集.2006,9-10. *

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