CN101131952A - Protecting device for horizontal manual mode crystal-boat converter - Google Patents
Protecting device for horizontal manual mode crystal-boat converter Download PDFInfo
- Publication number
- CN101131952A CN101131952A CNA2006101114946A CN200610111494A CN101131952A CN 101131952 A CN101131952 A CN 101131952A CN A2006101114946 A CNA2006101114946 A CN A2006101114946A CN 200610111494 A CN200610111494 A CN 200610111494A CN 101131952 A CN101131952 A CN 101131952A
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- push rod
- crystal
- boat converter
- boat
- converter
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Abstract
The present invention discloses a protecting device set on crystal boat converter, which can allow wafer convert operation, only if two crystal boats are set on right positions of the crystal boat converter. Two ejector pins join to the crystal boat converter, which can lock push rods of the crystal boat converter. In specific, the two ejector pins separately join to a pin button which is set on the crystal boat converter. The two buttons can be pressed only when the two crystal boats are located at right position on the crystal boat converter, thus the two ejector pins can be separately joined to swing, and unchain the push rods. The push rods can therefore be used for wafer convert operation, thus cases like cracking, damage and scuff mark of wafers caused by imprecise position of crystal boats, can be avoided, and production costs are reduced, the production efficiency is improved.
Description
Technical field
The present invention relates to a kind of crystal-boat converter, more specifically, relate to and a kind ofly be installed on the crystal-boat converter and be used to confirm the whether correct device of location of brilliant boat.
Background technology
In semiconductor fabrication, in order to cooperate Machine Tool design or manufacture process environmental characteristics, usually need use different brilliant boats, and, then need use crystal-boat converter (Horizontal Wafer Machine) for making wafer in not conversion mutually between the isomorphous boat.Carry out the wafer transfer operation, be to allow tendency to develop hand over the brilliant boat of wafer and the brilliant boat of accepting wafer in advance is placed on respectively on the ad-hoc location on the crystal-boat converter, utilize mechanism on the crystal-boat converter will wafer to hand on the brilliant boat of wafer again and be transferred on the brilliant boat of accepting wafer in advance by tendency to develop.
See also Figure 1 and Figure 2, known crystal-boat converter 1 has a working surface 2, this working surface 2 is provided with locating flange 3, and the bottom of brilliant boat 4 also is provided with corresponding locating flange 5, allowing the user, and brilliant boat 4 is positioned on the tram on the working surface 2 of this crystal-boat converter 1 by the engaging with each other of this locating flange 3,5.
Therefore user's brilliant boat of respectively tendency to develop being handed over a brilliant boat of wafer and accepting wafer is in advance located respectively and is put on crystal-boat converter 1, user's grasped can be carried out the wafer transfer operation and allow wafer change brilliant boat 7 to move the push rod 6 on this crystal-boat converter 1.
Yet the crystal-boat converter 1 of this known transition wafer, brilliant boat 4 not being positioned on the tram of this crystal-boat converter 1 as the user is that mobile putter 6 carries out the wafer transfer operation, then can be because of the location mistake of this crystalline substance boat 4, situations such as wafer fragmentation, damage and scratch take place in transfer process, thereby reduce and produce yield, produce cost and improve to rise.
Summary of the invention
Therefore, main purpose of the present invention is to provide a kind of protective device of crystal-boat converter, allows the user only when two brilliant boats all are properly oriented, and just can carry out the wafer transfer operation.
The invention provides a kind of protecting device for horizontal manual mode crystal-boat converter, it is arranged on the crystal-boat converter, this crystal-boat converter has a push rod and a working surface, this push rod is extended with one and supports a bar and a handle, this protector comprises: a push rod, one push rod button, wherein this push rod is articulated on this crystal-boat converter, and can swing a little, one end of this push rod stretches into this mobile route that supports bar, thereby prevent moving of this push rod, this push rod button is to articulate and be convexly set on the working surface of this crystal-boat converter with this push rod again, but this push rod swing of interlock when therefore pushing this push rod button and moving, and allow an end of this push rod leave the mobile route that this supports bar.
Preferably, be provided with a compression spring between this first push rod and the crystal-boat converter, the compression spring pushes away first push rod.
Preferably, be provided with a compression spring between this second push rod and this crystal-boat converter, this second push rod of this compression springs urges.
Preferably, this crystal-boat converter is provided with one by digging first groove of establishing up down, is provided with one first fixed block in this first groove, and this first push rod is articulated on this first fixed block.
Preferably, be provided with a compression spring between this first push rod and this first fixed block, this first push rod of this compression springs urges.
Preferably, be bolted with a height adjustable bolt on the top of this first fixed block.
Preferably, this crystal-boat converter is provided with one by digging second groove of establishing up down, is provided with one second fixed block in this second groove, and this second push rod is articulated on this second fixed block.
Preferably, be provided with a compression spring between this second push rod and this second fixed block, this second push rod of this compression springs urges.
Preferably, be bolted with a height adjustable bolt on the top of this second fixed block.
Therefore when brilliant boat is properly oriented working surface in this crystal-boat converter, the locating flange of this crystalline substance boat can press the end that this push rod button moves with this push rod of interlock and leave the mobile route that this supports bar, thereby remove the restriction of moving for push rod, therefore the present invention by above-mentioned structure only when two brilliant boats all are properly oriented, just the expert grabs this handle and this push rod is moved carry out the wafer transfer operation, and then can avoid wafer to damage.
Description of drawings
Fig. 1 is the structure chart of known crystal-boat converter;
Fig. 2 is the structure chart of known brilliant boat;
Fig. 3 is the vertical view according to first embodiment of the invention;
Fig. 4 is the front view according to first embodiment of the invention;
Fig. 5 is the part constitutional diagram one according to second embodiment of the invention;
Fig. 6 is the part constitutional diagram two according to second embodiment of the invention; And
Fig. 7 is the front view according to second embodiment of the invention.
Embodiment
Relevant detailed description of the present invention and technology contents now are described as follows with regard to conjunction with figs.:
See also Fig. 3 and shown in Figure 4, it is the first embodiment of the present invention, it is to be arranged on the crystal-boat converter 10, this crystal-boat converter 10 has a push rod 11 and a working surface 12, this push rod 11 is extended with one and supports a bar 15 and a handle 16, and this protector includes one first push rod 20, one second push rod 30, one first push rod button 40 and one second push rod button 50.
This first push rod 20 is articulated on the crystal-boat converter 10, and can swing a little, and an end of this first push rod 20 forward stretches into this mobile route that supports bar 15, and the end has a hook part 21 and can catch on and should support bar 15, thereby prevents the mobile of this push rod 11; This first push rod button 40 is to articulate and protrude with this first push rod 20 to be arranged on the working surface 12 of this crystal-boat converter 10 again, but these first push rod, 20 swings of interlock when pushing these first push rod button, 40 displacements, and allow an end of this first push rod 20 leave the mobile route that this supports bar 15.
This second push rod 30 is to be articulated on the crystal-boat converter 10, and can swing a little, one end of this second push rod 30 oppositely stretches into this mobile route that supports bar 15, and can prevent moving of this push rod 11, this second push rod button 50 is to articulate and protrude with this second push rod 30 to be arranged on the working surface 12 of this crystal-boat converter 10 again, but these second push rod, 30 swings of interlock when therefore pushing these second push rod button, 50 displacements, and allow an end of this second push rod 30 leave the mobile route that this supports bar 15.
Can be provided with a compression spring 60 again between this first push rod 20 and this crystal-boat converter 10, these compression spring 60 these first push rods 20 of pushing, make an end of this first push rod 20 trend towards stretching into the mobile route that this supports bar 15, to guarantee when brilliant boat no-fix is put, one end of this first push rod 20 is to stretch into the mobile route that this supports bar 15, also can be provided with a compression spring 61 between this same second push rod 30 and this crystal-boat converter 10, these these second push rods 30 of compression spring 61 pushing make an end of this second push rod 30 trend towards stretching into the mobile route of this push rod 11.
As the described structure of first embodiment; have only the brilliant boat of handing over the brilliant boat of wafer and accepting wafer in advance when tendency to develop to put respectively on the working surface 12 of this crystal-boat converter 10; and allow the locating flange of brilliant boat (can consult shown in Figure 2; brilliant boat 4 is provided with normalized locating flange 5) press respectively and touch this first push rod button 40 and this second push rod button 50 (that is these interval scale two brilliant boats all be properly oriented put); and an end that makes this first push rod 20 and this second push rod 30 is when all leaving this mobile route that supports bar 15; the user just can hand grabs this handle 16 to be moved this push rod 11 and carries out the wafer conversion process; as long as and when having arbitrary brilliant boat to put less than correct position; then the hook part 21 of this first push rod 20 or this second push rod 30 still can support on the mobile route of bar 15 at this; and it is limited and can not move to make this support bar 15; and then push rod 11 can not be moved, thereby can form protection mechanism.
See also Fig. 5, Figure 6 and Figure 7, it is the second embodiment of the present invention, compare with first embodiment, wherein be to be provided with one on this crystal-boat converter 10 by digging first groove of establishing 13 down up, be provided with one first fixed block 70 in this first groove 13, this first push rod 20 is articulated on this first fixed block 70.This crystal-boat converter 10 is provided with one in addition by digging second groove of establishing 14 up down again, is to be provided with one second fixed block 80 in this second groove 14, and this second push rod 30 is articulated on this second fixed block 80.
And in second embodiment, this compression spring 60,61 is located at respectively and is reached between this second push rod 30 and this second fixed block 80 between this first push rod 20 and this first fixed block 70, to allow this 60,61 pushings of compression spring this first push rod 20 and this second push rod 30, make this first push rod 20 and an end of this second push rod 30 trend towards stretching into the mobile route of this push rod 11.
Can distinguish screw lock one height adjustable bolt 90,91 on the top of this first fixed block 70 and this second fixed block 80 again, when this first fixed block 70 and this second fixed block 80 are installed in this first groove 13 with this second groove 14, by adjusting the height of bolt 90,91, can change the height that this first push rod button 40 and this second push rod button 50 protrude from the working surface 12 of this crystal-boat converter 10.Therefore, as described in second embodiment, subelement of the present invention can be assembled (as Fig. 5 and shown in Figure 6) earlier, is installed on this crystal-boat converter 10 again, though its element is more, is easier to assembling, thereby can reduce puzzlement when making.
Aforesaid two embodiment; protection mechanism provided by the present invention can be guaranteed to have only when tendency to develop and hands over the brilliant boat of wafer and accept the brilliant boat of wafer in advance when correctly the location is put on the working surface 12 of this crystal-boat converter 10 respectively; just the expert grabs this handle 16 and passes this push rod 11; thereby can guarantee that it is when carrying out wafer transfer; can be not incorrect because of the location of brilliant boat; and cause the infringement of wafer; so the present invention can avoid situations such as wafer fragmentation, damage and scratch to take place; and reduce cost, improve productivity effect.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.Within the spirit and principles in the present invention all, any modification of being done, be equal to replacement, improvement etc., all should be included within the claim scope of the present invention.
Claims (9)
1. protecting device for horizontal manual mode crystal-boat converter, be to be arranged on the crystal-boat converter (10), described crystal-boat converter (10) has a push rod (11) and a working surface (12), and described push rod (11) is extended with one and supports a bar (15) and a handle (16), it is characterized in that, comprising:
First push rod (20), described first push rod (20) is articulated on the described crystal-boat converter (10), and can swing a little, one end of described first push rod (20) forward stretches into the described mobile route that supports bar (15), and the end has a hook part (21) and can catch on the described bar (15) that supports, and prevents moving of described push rod (11);
The first push rod button (40), the described first push rod button (40) is to articulate and be convexly set on the working surface (12) of described crystal-boat converter (10) with described first push rod (20), push the described first push rod button (40) but described first push rod of interlock (20) swing when mobile, and allow an end of described first push rod (20) leave the described mobile route that supports bar (15);
Second push rod (30), described second push rod (30) is articulated on the crystal-boat converter (10), and can swing a little, and an end of described second push rod (30) oppositely stretches into the described mobile route that supports bar (15), and can prevent moving of described push rod (11);
The second push rod button (50), the described second push rod button (50) articulates and is convexly set on the working surface (12) of described crystal-boat converter (10) with described second push rod (30), push the described second push rod button (50) but described second push rod of interlock (30) swing when mobile, and allow an end of described second push rod (30) leave the described mobile route that supports bar (15).
2. protecting device for horizontal manual mode crystal-boat converter according to claim 1, it is characterized in that, be provided with a compression spring (60) between described first push rod (20) and the described crystal-boat converter (10), described compression spring (60) pushing described first push rod (20).
3. protecting device for horizontal manual mode crystal-boat converter according to claim 1, it is characterized in that, be provided with a compression spring (61) between described second push rod (30) and the described crystal-boat converter (10), described compression spring (61) pushing described second push rod (30).
4. protecting device for horizontal manual mode crystal-boat converter according to claim 1, it is characterized in that, described crystal-boat converter (10) is provided with one by digging first groove of establishing (13) down up, be provided with one first fixed block (70) in described first groove (13), described first push rod (20) is articulated on described first fixed block (70).
5. protecting device for horizontal manual mode crystal-boat converter according to claim 4, it is characterized in that, be provided with a compression spring (60) between described first push rod (20) and described first fixed block (70), described compression spring (60) pushing described first push rod (20).
6. protecting device for horizontal manual mode crystal-boat converter according to claim 4 is characterized in that, is bolted with height adjustable bolt (90) on the top of described first fixed block (70).
7. protecting device for horizontal manual mode crystal-boat converter according to claim 1, it is characterized in that, described crystal-boat converter (10) is provided with one by digging second groove of establishing (14) down up, be provided with one second fixed block (80) in described second groove (14), described second push rod (30) is articulated on described second fixed block (80).
8. protecting device for horizontal manual mode crystal-boat converter according to claim 7, it is characterized in that, be provided with a compression spring (61) between described second push rod (30) and described second fixed block (80), described compression spring (61) pushing described second push rod (30).
9. protecting device for horizontal manual mode crystal-boat converter according to claim 7 is characterized in that, is bolted with height adjustable bolt (91) on the top of described second fixed block (80).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101114946A CN100499059C (en) | 2006-08-22 | 2006-08-22 | Protecting device for horizontal manual mode crystal-boat converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101114946A CN100499059C (en) | 2006-08-22 | 2006-08-22 | Protecting device for horizontal manual mode crystal-boat converter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101131952A true CN101131952A (en) | 2008-02-27 |
| CN100499059C CN100499059C (en) | 2009-06-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101114946A Active CN100499059C (en) | 2006-08-22 | 2006-08-22 | Protecting device for horizontal manual mode crystal-boat converter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100499059C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102543794A (en) * | 2010-12-30 | 2012-07-04 | 南茂科技股份有限公司 | Crystal boat converter |
| CN109841544A (en) * | 2017-11-29 | 2019-06-04 | Tes股份有限公司 | The moving method and substrate board treatment of ejector pin unit |
| CN112928050A (en) * | 2019-12-06 | 2021-06-08 | 上海新微技术研发中心有限公司 | Wafer transfer apparatus and wafer transfer method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1515479A (en) * | 2003-01-06 | 2004-07-28 | 昶�科技股份有限公司 | Wafer transferring equipment |
| US20050008467A1 (en) * | 2003-07-11 | 2005-01-13 | Rich Huang | Load port transfer device |
| CN101894778A (en) * | 2003-08-29 | 2010-11-24 | 交叉自动控制公司 | The method and apparatus that is used for semiconductor processes |
-
2006
- 2006-08-22 CN CNB2006101114946A patent/CN100499059C/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102543794A (en) * | 2010-12-30 | 2012-07-04 | 南茂科技股份有限公司 | Crystal boat converter |
| CN102543794B (en) * | 2010-12-30 | 2014-02-12 | 南茂科技股份有限公司 | Crystal boat converter |
| TWI474427B (en) * | 2010-12-30 | 2015-02-21 | Chipmos Technologies Inc | Wafer transfer |
| CN109841544A (en) * | 2017-11-29 | 2019-06-04 | Tes股份有限公司 | The moving method and substrate board treatment of ejector pin unit |
| CN112928050A (en) * | 2019-12-06 | 2021-06-08 | 上海新微技术研发中心有限公司 | Wafer transfer apparatus and wafer transfer method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100499059C (en) | 2009-06-10 |
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