CN101126622A - High temperature non-contact type eddy current displacement sensor - Google Patents
High temperature non-contact type eddy current displacement sensor Download PDFInfo
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- CN101126622A CN101126622A CNA2007100773283A CN200710077328A CN101126622A CN 101126622 A CN101126622 A CN 101126622A CN A2007100773283 A CNA2007100773283 A CN A2007100773283A CN 200710077328 A CN200710077328 A CN 200710077328A CN 101126622 A CN101126622 A CN 101126622A
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Abstract
The utility model discloses a high temperature non-contact sensor for eddy current displacement, which comprises a probe formed by inductance coils, a plurality of high frequency connecting cables, and a front end circuit; wherein, the front end circuit comprises an oscillation circuit, a detection circuit, a filter circuit, a correcting circuit, and an output signal conversion circuit; the inductance coils are formed by winding the alloy wires with temperature coefficient of minus ten ppm to minus eighty ppm per centidegree; the correcting circuit comprises a thermocouple and an amplifier, wherein, the thermocouple is positioned near the inductance coils; the inductance coils part of the probes are glazed to restrain the geometrical shape change of the inductance coils under high temperature. By adopting the inductance coils with both suitable temperature coefficient and protective measures, together with the correcting circuit composed of the thermocouple under the same temperature and environment, the measurement error is eliminated to the maximum extent. The utility model solves the problems of short-time precision measurement of the prior non-contact eddy current sensors under high temperature conditions, so as to enable the sensor to be widely applied in the displacement detection of the large rotary machines.
Description
Technical field the present invention relates to a kind of non-contact electric eddy shift sensor, relates in particular to a kind of non-contact electric eddy shift sensor that can realize under high temperature (220 ℃-400 ℃) condition that long-term precise displacement is measured.
Background technology is present, in the non-contact displacement measurement technology, generally adopts the electric vortex type displacement sensor.This type of sensing system generally includes: probe, high frequency stube cable and three parts of front end circuit.Wherein probe is the responsive part that sensing system obtains the measurement of correlation signal.Common non-contact electric eddy shift sensor probe is formed with epoxy bond by a metal inductance coil and bobbin, and the probe of this class formation is difficult in the medium-term and long-term operate as normal of the working environment more than 220 ℃.Front end circuit is formed (as shown in Figure 1) by oscillatory circuit, detecting circuit, filtering circuit, correcting circuit and signaling conversion circuit.Its measuring principle is: oscillator produces a high-frequency excitation signal, this high-frequency excitation signal makes telefault produce a high-frequency alternating magnetic field Φ 1, when measured conductor when the coil, can produce the current vortex of magnetic field intersecting chain therewith on the surface of the action of a magnetic field scope, according to Lenz law as can be known this current vortex will produce a magnetic field Φ 2 with its opposite sign but equal magnitude again.This reversed magnetic field Φ 2 can hinder the variation of magnetic field Φ 1, when sensors inductance coil and measured distance between conductors change, because the effect in current vortex and magnetic field, inductance value L, the equivalent resistance R of telefault are changed, thereby make the amplitude of telefault both end voltage that corresponding the variation be taken place.The relating to parameters such as material, geometric configuration, size and power frequency of eddy current effect and tested intermetallic distance, conductivity, magnetic permeability, coil.When the material of material, geometric configuration, size and the measured conductor of coil was determined, eddy current effect only and the distance dependent between telefault and tested metallic conductor.This moment, signal of sensor was the single-valued function of distance.By the oscillatory circuit in the circuit, detecting circuit, filtering circuit, correcting circuit and output signal change-over circuit, can convert measured conductor to electric current (or voltage) with respect to the variable in distance of telefault and change, thereby realize displacement measurement.This type of displacement transducer is being used widely aspect the on-line measurement of the change in displacement parameter of big rotating machinery such as Turbo-generator Set, fan blower, pump, boiler air preheater and the fault diagnosis.But under hot environment (220 ℃-400 ℃), the material of its telefault, geometric configuration and resistance are compared during with low temperature bigger variation can be taken place, have a strong impact on measuring accuracy, make the measured value of sensor output lose the actual measurement meaning because of error exceeds allowed band.Chinese patent application 02121432.8 discloses a kind of sensor, and its weak point is to realize the high temperature range observation, and correcting circuit too simply can't be realized the accurate correction of large-temperature range, and the resistance change during the high low temperature of coil is bigger.
The inventor is by great deal of experimental, improves at aspects such as the material of telefault, correcting circuits, finished the present invention.
Summary of the invention the purpose of this invention is to provide a kind of high temperature non-contact type eddy current displacement sensor, makes it and obtain accurate measured value in the medium-term and long-term operate as normal of high temperature (220 ℃-400 ℃) environment.
The technical solution adopted for the present invention to solve the technical problems is: a kind of high temperature non-contact type eddy current displacement sensor, comprise probe, high frequency stube cable and the front end circuit formed by telefault, described front end circuit is made up of oscillatory circuit, detecting circuit, filtering circuit, correcting circuit and output signal change-over circuit, it is characterized in that: described telefault is formed by the alloy lead wire coiling of temperature coefficient for-10ppm/ ℃ to-80ppm/ ℃.
Described correcting circuit is made up of thermopair and amplifier, and thermopair is positioned at the telefault place, and the measuring junction of thermopair is in identical temperature environment with telefault.The thermopower of thermocouple measurement end via amplifier after environment temperature of output with probe becomes the magnitude of voltage (or current value) that necessarily concerns;
For the described probe of better protection, the inductance coils part of probe by last glaze the geometric configuration during with the constraint inductance coils under high temperature change, guarantee insulation and in abominable acid or alkali environment the plain conductor to telefault protect;
On the basis of above-mentioned technology, the frequency that all right oscillatory circuit adopts pumping signal is at 1.2MHz～5.5MHz, and its Optimum Excitation frequency range is that 1.5MHz～3.5MHz comes work.The line of the alloy lead wire of coiling telefault directly is 0.1mm～2.5mm; The high frequency stube cable is the positive temperature coefficient characteristic.
Good effect of the present invention is and since adopt temperature coefficient suitable and the telefault of safeguard measure in addition, and the correcting circuit that adopts synthermal environment thermopair to form, maximum magnitude ground elimination measuring error.Have following outstanding technical characterstic and technical progress: this sensor can be realized displacement measurement in 0 ℃ of-400 ℃ of temperature range, 220 ℃ of precise displacement measurements that-400 ℃ of temperature ranges are interior have particularly been realized, solve the technology that the non-contact electric eddy sensor can not accurately be measured for a long time in the prior art under the condition of high temperature (220 ℃-400 ℃), thereby made this sensor in the large rotating machinery displacement detecting, to be more widely used.
The present invention is further illustrated below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is the system architecture diagram of non-contact electric eddy shift sensor.Among the figure: 1. oscillatory circuit, 2. telefault, 3. detection rectification circuit, 4. filtering circuit, 5. correcting circuit, 6. output conversion circuit, 7. measured metallic conductor.
Fig. 2 is the front end circuit schematic diagram of the embodiment of the invention.Among the figure: 1. oscillatory circuit, 2. telefault, 3. detection rectification circuit, 4. filtering circuit, 5. correcting circuit, 6. change-over circuit, 7. power circuit.
Fig. 3 is the correcting circuit schematic diagram among Fig. 2.Among the figure: 8. thermopair, 9. voltage follower, 10. signal amplifier, 11. signal computing circuits.
Embodiment
As shown in Figure 1, a kind of high temperature non-contact type eddy current displacement sensor comprises oscillatory circuit 1, telefault 2, detection rectification circuit 3, filtering circuit 4, correcting circuit 5 and output conversion circuit 6.Telefault 2 is by oscillatory circuit 1 excitation work, and telefault 2 passes through detection rectification circuit 3, filtering circuit 4, correcting circuit 5 and output conversion circuit 6 outputs successively with the signal that measured metallic conductor 7 interactions produce.
Telefault uses the copper base to add the constantan lead coiling that nickel, manganese element makes and forms, and nickel content is 1.0-2.0%, and manganese content is 39-41%, and temperature-coefficient of electrical resistance is-35ppm/ ℃, its line directly is 1.0mm.This type of alloy telefault and when being the high frequency cable co-operation of positive temperature coefficient, the total resistance value that can make them resistance change≤1% of (220 ℃-400 ℃) when normal temperature and high temperature.After alloy lead wire is wound on ceramic skeleton, use cryogenic glass glaze to carry out the sintering typing, the coil geometric shape when making normal temperature and high temperature does not have big difference.To pop one's head in and insert front end circuit, under normal temperature condition and hot conditions, adjust the correcting circuit output valve respectively, and make sensing system output valve and displacement variable linear via high frequency cable.
Claims (8)
1. a high temperature non-contact type eddy current displacement sensor comprises probe, high frequency stube cable and the front end circuit be made up of telefault; Described front end circuit is made up of oscillatory circuit, detecting circuit, filtering circuit, correcting circuit and output signal change-over circuit; It is characterized in that: described telefault is formed by the alloy lead wire coiling of temperature coefficient for-10ppm/ ℃ to-80ppm/ ℃.
2. high temperature non-contact type eddy current displacement sensor according to claim 1 is characterized in that: described correcting circuit is made up of thermopair and amplifier, and thermopair is positioned at the telefault place.
3. high temperature non-contact type eddy current displacement sensor according to claim 1 and 2 is characterized in that: glaze on the inductance coils part quilt of described probe.
4. high temperature non-contact type eddy current displacement sensor according to claim 1 and 2 is characterized in that: described oscillatory circuit adopts the frequency of pumping signal at 1.2MHz～5.5MHz.
5. high temperature non-contact type eddy current displacement sensor according to claim 4 is characterized in that: described oscillatory circuit adopts the frequency of pumping signal at 1.5MHz～3.5MHz.
6. high temperature non-contact type eddy current displacement sensor according to claim 1 and 2 is characterized in that: the line of the alloy lead wire of described telefault directly is 0.1mm～2.5mm.
7. high temperature non-contact type eddy current displacement sensor according to claim 1 and 2 is characterized in that: described high frequency stube cable is the cable that is the positive temperature coefficient characteristic.
8. high temperature non-contact type eddy current displacement sensor according to claim 3 is characterized in that: described glaze is a glass glaze.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100773283A CN101126622A (en) | 2007-09-25 | 2007-09-25 | High temperature non-contact type eddy current displacement sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CNA2007100773283A CN101126622A (en) | 2007-09-25 | 2007-09-25 | High temperature non-contact type eddy current displacement sensor |
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| CN101126622A true CN101126622A (en) | 2008-02-20 |
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| CNA2007100773283A Pending CN101126622A (en) | 2007-09-25 | 2007-09-25 | High temperature non-contact type eddy current displacement sensor |
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Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095432A (en) * | 2010-12-07 | 2011-06-15 | 四川达宇特种车辆制造厂 | Miniature integrated eddy current sensor |
| CN102176060A (en) * | 2011-01-25 | 2011-09-07 | 中国人民解放军国防科学技术大学 | Inductance approach switch sensor |
| CN102338395A (en) * | 2011-09-28 | 2012-02-01 | 南京创能电力科技开发有限公司 | Automatic air leakage control device of air preheater |
| CN102680891A (en) * | 2012-06-15 | 2012-09-19 | 东莞市三友联众电器有限公司 | Electronic detection device for detecting over-travel value of finished product relay |
| CN102865884A (en) * | 2012-03-21 | 2013-01-09 | 李彤阳 | Non-contact sensor |
| CN103363886A (en) * | 2013-07-17 | 2013-10-23 | 国家电网公司 | Method and system for full-measuring-range temperature compensation of swing sensor of generating set |
| CN103644835A (en) * | 2013-12-29 | 2014-03-19 | 中国科学技术大学 | Device for measuring temperature drift coefficient of eddy current displacement sensor |
| CN104006731A (en) * | 2014-06-12 | 2014-08-27 | 株洲时代电子技术有限公司 | Centering sensing device and displacement detection method thereof |
| CN105242635A (en) * | 2015-09-21 | 2016-01-13 | 山东电力建设第一工程公司 | Axial center alignment method for steam turbine |
| CN105486220A (en) * | 2015-11-23 | 2016-04-13 | 中国南方航空工业(集团)有限公司 | Propeller pitch measuring device |
| CN105722007A (en) * | 2014-12-19 | 2016-06-29 | 英特尔公司 | Card Detect Architecture For Near Field Communications |
| CN106969698A (en) * | 2017-06-02 | 2017-07-21 | 深圳怡化电脑股份有限公司 | A kind of electric vortex sensor measuring circuit and current vortex sensor |
| CN107084659A (en) * | 2017-05-31 | 2017-08-22 | 北京航空航天大学 | A kind of high temperature follows the differential variable frequency AM electric vortex displacement sensor of grading compensation certainly |
| CN107121153A (en) * | 2017-05-22 | 2017-09-01 | 天津大学 | High speed current vortex sensor |
| CN110608660A (en) * | 2019-08-28 | 2019-12-24 | 西安理工大学 | Eddy current sensor displacement and temperature prediction method |
| CN111059993A (en) * | 2018-10-16 | 2020-04-24 | 纳博特斯克有限公司 | Displacement sensor |
| CN111056025A (en) * | 2019-12-30 | 2020-04-24 | 中航电测仪器(西安)有限公司 | Detection sensor and method for detecting release of release pull rod |
| CN111059994A (en) * | 2018-10-16 | 2020-04-24 | 纳博特斯克有限公司 | Displacement sensor |
| CN111600587A (en) * | 2020-04-23 | 2020-08-28 | 眉山市宇泰电子设备有限公司 | Sensor system for inductive proximity switch |
| CN116772702A (en) * | 2023-08-24 | 2023-09-19 | 河南卫华重型机械股份有限公司 | Eddy current distance acquisition circuit |
| CN117532140A (en) * | 2024-01-09 | 2024-02-09 | 广东隆信激光智能装备有限公司 | Device and process for detecting laser cutting error of superfine tube |
-
2007
- 2007-09-25 CN CNA2007100773283A patent/CN101126622A/en active Pending
Cited By (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095432A (en) * | 2010-12-07 | 2011-06-15 | 四川达宇特种车辆制造厂 | Miniature integrated eddy current sensor |
| CN102176060A (en) * | 2011-01-25 | 2011-09-07 | 中国人民解放军国防科学技术大学 | Inductance approach switch sensor |
| CN102338395A (en) * | 2011-09-28 | 2012-02-01 | 南京创能电力科技开发有限公司 | Automatic air leakage control device of air preheater |
| CN102865884A (en) * | 2012-03-21 | 2013-01-09 | 李彤阳 | Non-contact sensor |
| CN102680891A (en) * | 2012-06-15 | 2012-09-19 | 东莞市三友联众电器有限公司 | Electronic detection device for detecting over-travel value of finished product relay |
| CN103363886B (en) * | 2013-07-17 | 2016-02-10 | 国家电网公司 | The throw sensor gamut temperature compensation of genset and system |
| CN103363886A (en) * | 2013-07-17 | 2013-10-23 | 国家电网公司 | Method and system for full-measuring-range temperature compensation of swing sensor of generating set |
| CN103644835B (en) * | 2013-12-29 | 2016-09-14 | 中国科学技术大学 | A kind of measurement apparatus of temperature drift coefficient of eddy current displacement sensor |
| CN103644835A (en) * | 2013-12-29 | 2014-03-19 | 中国科学技术大学 | Device for measuring temperature drift coefficient of eddy current displacement sensor |
| CN104006731A (en) * | 2014-06-12 | 2014-08-27 | 株洲时代电子技术有限公司 | Centering sensing device and displacement detection method thereof |
| CN105722007A (en) * | 2014-12-19 | 2016-06-29 | 英特尔公司 | Card Detect Architecture For Near Field Communications |
| CN105242635A (en) * | 2015-09-21 | 2016-01-13 | 山东电力建设第一工程公司 | Axial center alignment method for steam turbine |
| CN105242635B (en) * | 2015-09-21 | 2018-02-27 | 山东电力建设第一工程公司 | Turbine shafting center aligning method |
| CN105486220A (en) * | 2015-11-23 | 2016-04-13 | 中国南方航空工业(集团)有限公司 | Propeller pitch measuring device |
| CN105486220B (en) * | 2015-11-23 | 2018-06-19 | 中国南方航空工业(集团)有限公司 | pitch measuring device |
| CN107121153A (en) * | 2017-05-22 | 2017-09-01 | 天津大学 | High speed current vortex sensor |
| CN107084659A (en) * | 2017-05-31 | 2017-08-22 | 北京航空航天大学 | A kind of high temperature follows the differential variable frequency AM electric vortex displacement sensor of grading compensation certainly |
| CN106969698A (en) * | 2017-06-02 | 2017-07-21 | 深圳怡化电脑股份有限公司 | A kind of electric vortex sensor measuring circuit and current vortex sensor |
| CN111059993A (en) * | 2018-10-16 | 2020-04-24 | 纳博特斯克有限公司 | Displacement sensor |
| CN111059994A (en) * | 2018-10-16 | 2020-04-24 | 纳博特斯克有限公司 | Displacement sensor |
| CN111059993B (en) * | 2018-10-16 | 2021-12-21 | 纳博特斯克有限公司 | Displacement sensor |
| CN111059994B (en) * | 2018-10-16 | 2023-03-03 | 纳博特斯克有限公司 | Displacement sensor |
| CN110608660A (en) * | 2019-08-28 | 2019-12-24 | 西安理工大学 | Eddy current sensor displacement and temperature prediction method |
| CN111056025A (en) * | 2019-12-30 | 2020-04-24 | 中航电测仪器(西安)有限公司 | Detection sensor and method for detecting release of release pull rod |
| CN111600587A (en) * | 2020-04-23 | 2020-08-28 | 眉山市宇泰电子设备有限公司 | Sensor system for inductive proximity switch |
| CN116772702A (en) * | 2023-08-24 | 2023-09-19 | 河南卫华重型机械股份有限公司 | Eddy current distance acquisition circuit |
| CN117532140A (en) * | 2024-01-09 | 2024-02-09 | 广东隆信激光智能装备有限公司 | Device and process for detecting laser cutting error of superfine tube |
| CN117532140B (en) * | 2024-01-09 | 2024-04-16 | 广东隆信激光智能装备有限公司 | Device and process for detecting laser cutting error of superfine tube |
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