CN101121308A - Al2O3/Al-Si-Cr composite coatings and preparation method thereof - Google Patents

Al2O3/Al-Si-Cr composite coatings and preparation method thereof Download PDF

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CN101121308A
CN101121308A CNA200710122224XA CN200710122224A CN101121308A CN 101121308 A CN101121308 A CN 101121308A CN A200710122224X A CNA200710122224X A CN A200710122224XA CN 200710122224 A CN200710122224 A CN 200710122224A CN 101121308 A CN101121308 A CN 101121308A
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CN100522607C (en
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周春根
蔡锐
姚登樽
张虎
徐惠彬
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Beihang University
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Abstract

本发明公开了一种Al2O3/Al-Si-Cr复合涂层,以及采用低压30~40×103pa等离子喷涂工艺在Nb-24Ti-16Si-6Al-6Cr-2Hf基体上制备Al2O3/Al-Si-Cr复合涂层的方法。所述Al2O3/Al-Si-Cr复合涂层由Al2O3涂层和Al-Si-Cr混合层组成,Al2O3涂层在Al-Si-Cr混合层与Nb-24Ti-16Si-6Al-6Cr-2Hf基体之间,Al2O3涂层厚度为50~200μm,Al-Si-Cr混合层厚度为50~200μm;所述Al2O3/Al-Si-Cr复合涂层中Al-Si-Cr混合层包含Cr(Si,Al)2、Al、Si三相,在高温1000~1250℃氧化100h以后能够形成连续、致密的Al2O3和SiO2混合氧化物层;所述Al2O3涂层能够有效地阻止Al-Si-Cr混合涂层与基体之间的互扩散,从而提高了涂层的持续抗氧化寿命。

Figure 200710122224

The invention discloses an Al 2 O 3 /Al-Si-Cr composite coating, and the preparation of Al 2 O 3 on a Nb-24Ti-16Si-6Al-6Cr-2Hf substrate by adopting a low-pressure 30-40×10 3 pa plasma spraying process O 3 /Al-Si-Cr composite coating method. The Al 2 O 3 /Al-Si-Cr composite coating is composed of an Al 2 O 3 coating and an Al-Si-Cr mixed layer, and the Al 2 O 3 coating is composed of an Al-Si-Cr mixed layer and a Nb-24Ti Between -16Si-6Al-6Cr-2Hf substrates, the thickness of the Al 2 O 3 coating is 50-200 μm, and the thickness of the Al-Si-Cr mixed layer is 50-200 μm; the Al 2 O 3 /Al-Si-Cr composite The Al-Si-Cr mixed layer in the coating contains three phases of Cr(Si, Al) 2 , Al and Si, and can form continuous and dense mixed oxides of Al 2 O 3 and SiO 2 after being oxidized at a high temperature of 1000-1250°C for 100 hours layer; the Al 2 O 3 coating can effectively prevent the interdiffusion between the Al-Si-Cr mixed coating and the substrate, thereby improving the continuous anti-oxidation life of the coating.

Figure 200710122224

Description

Al 2O 3/ Al-Si-Cr composite coating and preparation method thereof
Technical field
The present invention relates to a kind of preparation method of coating, more particularly, refer to a kind of employing low pressure (30~40 * 10 3Pa) plasma spraying method is prepared the Al of (1000~1250 ℃) antioxygenic property that has high temperature at the Nb-24Ti-16Si-6Al-6Cr-2Hf matrix 2O 3/ Al-Si-Cr composite coating.
Background technology
Niobium-base alloy has high melt point (>1700 ℃), lower density (6.6~7.2g/cm 3), good room temperature fracture toughness (>20Mpam 1/2), good high-temperature intensity and casting character, thereby be expected to become the blade material of under 1200~1400 ℃ even higher temperature, working.But Nb Ss/ Nb 5Si 3The two-phase alloys antioxygenic property is poor, has serious oxidation weight gain phenomenon during high-temperature oxydation.The oxide that forms is as TiNb 2O 7, AlNb 11O 29And CrNbO 4Etc. loose porous, and growth rapidly, can't stop the continuation diffusion of oxygen to matrix, thereby not reach the high-temperature oxidation resistant effect.
Al, Cr, three kinds of elements of Si have superior high-temperature oxidation resistant effect, their oxide Al 2O 3, SiO 2And Cr 2O 3Can stop the diffusion of oxygen, stop further carrying out of oxidation.Al, Cr, Si form chemical compound lot through chemical combination, and these compounds all have good high-temperature oxidation resistance, but part of compounds is subjected to the influence of its fusing point, have limited its high temperature and have used.Cr (Al, Si) 2Good in oxidation resistance, fusing point height (>1250 ℃).Thereby has a very high high temperature using value.
Al 2O 3Has very high fusing point, fine and close Al 2O 3Layer not only can stop the diffusion of oxygen element, and can stop Nb, Ti, Al, Cr, Si etc. than the diffusion of the element of thick atom radius, is the selection that well hinders diffusion layer material.
Along with the development of coating technology, more high-performance, the coating system of labyrinth is developed gradually more.The development multi-layer composite coatings is one of important directions of present coating development.In the high-temperature oxidation resistant coating system, ORC can lose efficacy gradually along with the increase of oxidization time.Causing its failure reasons mainly is the consumption of active element.The consumption of active element comprises two processes: the oxygen that (1) active element spreads in environment is combined and is formed oxide; (2) active element spreads to the matrix direction in hot environment.In order to improve the service life of coating, it is very necessary increasing one deck resistance diffusion layer between anti oxidation layer and matrix.
Summary of the invention
One of purpose of the present invention provides a kind of Al 2O 3/ Al-Si-Cr composite coating, this composite coating is by Al 2O 3Coating and Al-Si-Cr mixed layer form, Al 2O 3Coating between Al-Si-Cr mixed layer and Nb-24Ti-16Si-6Al-6Cr-2Hf matrix, Al 2O 3Coating layer thickness is 50~200 μ m, and Al-Si-Cr mixed layer thickness is 50~200 μ m.The Al-Si-Cr mixed layer is by Cr (Si, Al) 2, Al, Si three phase compositions, it is formed with Al with interior on Al-Si-Cr mixed layer surface at 1000~1250 ℃ of oxidation 100h of high temperature 2O 3And SiO 2Mixed oxide layer, can successfully stop oxygen to the diffusion of matrix.The Al that the present invention makes 2O 3The coating section of (during 1000~1250 ℃ of oxidation 100h of oxidizing condition) shows that coating forms by three layers after the oxidation after the oxidation of/Al-Si-Cr composite coating process sem analysis: skin is the oxide skin(coating) of Al-Si-Cr mixed coating; The intermediate layer is the Al-Si-Cr mixed coating; Internal layer is Al 2O 3Al 2O 3Layer has played the resistance diffusion in oxidizing process, successfully stoped the counterdiffusion effect between matrix and the coating.
Another object of the present invention is to propose a kind of employing low pressure 30~40 * 10 3The pa plasma spraying prepares Al 2O 3The method of/Al-Si-Cr composite coating is at first prepared Al at the Nb-24Ti-16Si-6Al-6Cr-2Hf matrix 2O 3Coating is then at Al 2O 3Prepare the Al-Si-Cr mixed coating on the coating; Have Cr (Al, Si) in the Al-Si-Cr mixed coating 2, the material such as Si and Al, when 1000~1250 ℃ of oxidation 100h of high temperature, can form continuous, fine and close Al 2O 3And SiO 2Mixed oxide layer, thus the further oxidized of coatings and substrate stoped, improved the high temperature oxidation resistance of Nb-24Ti-16Si-6Al-6Cr-2Hf matrix; Simultaneously, described Al when 1000~1250 ℃ of oxidation 100h of high temperature 2O 3Coating can successfully stop the counterdiffusion between Al-Si-Cr mixed coating and the matrix, thereby has improved the lasting anti-oxidant life-span of coating.
Al of the present invention 2O 3/ Al-Si-Cr composite coating is by adopting the preparation of low-voltage plasma spraying technology on the Nb-24Ti-16Si-6Al-6Cr-2Hf matrix, and preparation has Al between matrix and Al-Si-Cr mixed coating 2O 3Coating; Al 2O 3/ Al-Si-Cr composite coating can form the Al of continuous densification when 1000~1250 ℃ of oxidations of high temperature 2O 3And SiO 2Mixed oxide layer, thus the further oxidized of coatings and substrate stoped, improved the high temperature oxidation resistance of Nb-24Ti-16Si-6Al-6Cr-2Hf matrix, preparing cated matrix surface unit are weightening finish is 4.2~9.8mg/cm 2
Description of drawings
Fig. 1 makes Al at matrix 2O 3The section structure schematic diagram of/Al-Si-Cr composite coating.
Fig. 2 is the Al after the oxidation 2O 3The section structure schematic diagram of/Al-Si-Cr composite coating.
The specific embodiment
The present invention is described in further detail below in conjunction with drawings and Examples.
The present invention is a kind of high temperature resistance (1000~1250 ℃) oxidation Al 2O 3/ Al-Si-Cr composite coating, described Al 2O 3/ Al-Si-Cr composite coating is by Al 2O 3Coating and Al-Si-Cr mixed layer form, Al 2O 3Coating is between Al-Si-Cr mixed layer and Nb-24Ti-16Si-6Al-6Cr-2Hf matrix.Described Al 2O 3Coating layer thickness is 50~200 μ m.Described Al-Si-Cr mixed layer thickness is 50~200 μ m, and this coating is by Cr (Si, Al) 2, Al, Si three phase compositions, Al-Si-Cr mixed layer surface is formed with Al when 1000~1250 ℃ of oxidation 100h of high temperature 2O 3And SiO 2Mixed oxide layer.
The present invention is a kind of employing low pressure 30~40 * 10 3The pa plasma spraying prepares Al 2O 3The method of/Al-Si-Cr composite coating, this coating production has the following step:
The first step: the pre-treatment of matrix
With Nb-24Ti-16Si-6Al-6Cr-2Hf matrix adopting 150#, 360#, the polishing of 500# silicon carbide paper, and it is back stand-by to adopt sand-blasting machine to carry out the surface sand-blasting processing, matrix surface roughness RZ=60 after the sandblast~80 μ m;
Second step: preparation Al-Si-Cr coating material
(A) take by weighing the Al powder of 30~35wt%, the Cr powder of 30~33wt%, the Si powder of 32~40wt%, and the content sum of above-mentioned each composition is 100%, mixes after grind that to make granularity behind 30~150min be 250~350 purposes, first mixed-powders;
(B) will mix with binding agent through first mixed-powder that (A) step makes after to make granularity after grinding 250~400min be 250~350 purposes, second mixed-powders;
The consumption of first mixed-powder and binding agent is a binding agent of putting into 1000~1500ml in first mixed-powder of 1000g;
Described binding agent is stirred in 80~100 ℃ by gum arabic and deionized water and makes, and the consumption of gum arabic and deionized water is to add 0.5~5g gum arabic in every 100ml deionized water;
(C) will make granularity through second mixed-powder that (B) step makes after the atomization drying granulation is 200~250 purpose coating materials;
Atomization drying adopts centrifugal atomizing method, it (is coating material that the shearing force that second mixed-powder injects atomizer and is atomized device immediately through constant flow pump is dispersed into a lot of fine drop, its particle diameter is 40~80 μ m), wherein the atomizer rotating speed is 8000~20000r/min, the atomizer inlet temperature is 220~230 ℃, and the atomizer outlet temperature is 130~150 ℃;
The 3rd step: preparation Al 2O 3Coating material
Choose the Al that granularity is 200~250 purpose purity 99.9% 2O 3Spheroidal powder material;
The 4th step: low-voltage plasma spraying system coating
(A) matrix after the first step is processed is installed on the anchor clamps of low-voltage plasma spraying equipment, and will be through the Al of the 3rd step preparation 2O 3Coating material is put into feed appliance, regulates spraying parameter Al processed 2O 3Coating;
Plasma spraying parameter: jar internal pressure 30~40 * 10 3Pa, the primary air amount is 60~100L/h, and inferior throughput is 25~30L/h, and arc current is 560~600A, and arc voltage is 50~60V, the powder sending quantity of powder feeder is 24~25g/min;
(B) second step preparation Al-Si-Cr coating material is put into feed appliance, regulate spraying parameter system Al-Si-Cr coating;
Plasma spraying parameter: jar internal pressure 30~40 * 10 3Pa, the primary air amount is 60~100L/h, and inferior throughput is 25~30L/h, and electric current is 560~600A, and voltage is 50~60V, the powder sending quantity of powder feeder is 20~22g/min.
Al with the said method preparation 2O 3/ Al-Si-Cr composite coating shows that through XRD, sem analysis the Al-Si-Cr mixed coating is by Cr (Si, Al) 2, Al, Si three phase compositions, this coating is formed with Al with interior on Al-Si-Cr mixed layer surface at 1000~1250 ℃ of oxidation 100h of high temperature 2O 3And SiO 2Mixed oxide layer.
Embodiment 1:
The first step: the pre-treatment of matrix
With Nb-24Ti-16Si-6Al-6Cr-2Hf matrix cut growth 13mm, wide 8mm, the rectangle sample of high 3mm, and after adopting 150#, 360#, the polishing of 500# silicon carbide paper, it is stand-by that the employing sand-blasting machine carries out surface sand-blasting processing back, matrix surface roughness RZ=60 after the sandblast~80 μ m;
Second step: preparation coating material
(A) the Si powder that takes by weighing Cr powder, the 34.6wt% of Al powder, the 32.1wt% of 33.3wt% mixes after grind that to make granularity behind the 100min be 250~350 purposes, first mixed-powders;
(B) will mix with binding agent through first mixed-powder that (A) step makes after to make granularity after grinding 300min be 250~350 purposes, second mixed-powders;
The consumption of first mixed-powder and binding agent is a binding agent of putting into 1000ml in first mixed-powder of 1000g;
Described binding agent is stirred in 100 ℃ by gum arabic and deionized water and makes, and the consumption of gum arabic and deionized water is to add the 1g gum arabic in every 100ml deionized water;
(C) will make granularity through second mixed-powder that (B) step makes after the atomization drying granulation is 200~250 purpose coating materials;
Atomization drying adopts centrifugal atomizing method, second mixed-powder is dispersed into a lot of fine drop (particle diameter is 60~80 μ m) through the shearing force that constant flow pump injection atomizer also is atomized device immediately, wherein the atomizer rotating speed is 15000r/min, 225 ℃ of atomizer inlet temperatures, atomizer outlet temperature are 140 ℃.
The 3rd step: preparation Al 2O 3Coating material
Choose the Al that granularity is 200~250 purpose purity 99.9% 2O 3Spheroidal powder material;
The 4th step: low-voltage plasma spraying system coating
(A) matrix after the first step is processed is installed on the anchor clamps of low-voltage plasma spraying equipment, and will be through the Al of the 3rd step preparation 2O 3Coating material is put into feed appliance, regulates spraying parameter Al processed 2O 3Coating;
Plasma spraying parameter: jar internal pressure 30 * 10 3Pa, the primary air amount is 60L/h, and inferior throughput is 25L/h, and electric current is 580A, and voltage is 55V, the powder sending quantity of powder feeder is 24g/min;
(B) second step preparation Al-Si-Cr coating material is put into feed appliance, regulate spraying parameter system Al-Si-Cr coating;
Plasma spraying parameter: jar internal pressure 30 * 10 3Pa, the primary air amount is 60L/h, and inferior throughput is 25L/h, and electric current is 580A, and voltage is 55V, the powder sending quantity of powder feeder is 21g/min.
With the above-mentioned Al that makes 2O 3/ Al-Si-Cr composite coating shows through sem analysis, the Al of preparation 2O 3/ Al-Si-Cr composite coating mainly is made up of two-layer: outer is the Al-Si-Cr mixed layer, and this mixed layer is by Cr (Si, Al) 2, Al, Si three phase compositions; Internal layer is the Al between coating and the matrix 2O 3Coating, its section structure signal as shown in Figure 1.
In air atmosphere, during through 1250 ℃ of isothermal oxidation 100h, the weightening finish of matrix surface unit are is 213mg/cm with the Nb-24Ti-16Si-6Al-6Cr-2Hf matrix 2
To make Al 2O 3The matrix of/Al-Si-Cr composite coating is in air atmosphere, and during through 1250 ℃ of isothermal oxidation 100h, the weightening finish of coating surface unit are is 9.8mg/cm 2Find (section structure is illustrated as shown in Figure 2) by the sem analysis to the oxidised samples section, coating mainly forms by three layers after the oxidation: skin is Al 2O 3And SiO 2Mixed oxide layer; The intermediate layer is the Al-Si-Cr mixed layer; Internal layer is Al 2O 3Coating (100 μ m are arranged approximately).Coating surface after the oxidation shows that through XRD, sem analysis coating surface has formed continuous, fine and close Al 2O 3And SiO 2Mixed oxide layer, thus the diffusion of oxygen to matrix successfully stoped.
By not comparing with preparing coating of material preparing cated matrix, its unit are weightening finish has reduced about 200mg/m 2, prove that the cated matrix of preparation has good high-temperature oxidation resistant effect.
Embodiment 2:
The first step: the pre-treatment of matrix
With Nb-24Ti-16Si-6Al-6Cr-2Hf matrix cut growth 13mm, wide 8mm, the rectangle sample of high 3mm, and after adopting 150#, 360#, the polishing of 500# silicon carbide paper, it is stand-by that the employing sand-blasting machine carries out surface sand-blasting processing back, matrix surface roughness RZ=60 after the sandblast~80 μ m;
Second step: preparation coating material
(A) the Si powder that takes by weighing Cr powder, the 40wt% of Al powder, the 30wt% of 30wt% mixes after grind that to make granularity behind the 150min be 250~350 purposes, first mixed-powders;
(B) will mix with binding agent through first mixed-powder that (A) step makes after to make granularity after grinding 400min be 250~350 purposes, second mixed-powders;
The consumption of first mixed-powder and binding agent is a binding agent of putting into 1500ml in first mixed-powder of 1000g;
Described binding agent is stirred in 80 ℃ by gum arabic and deionized water and makes, and the consumption of gum arabic and deionized water is to add the 5g gum arabic in every 100ml deionized water;
(C) will make granularity through second mixed-powder that (B) step makes after the atomization drying granulation is 200~250 purpose coating materials;
Atomization drying adopts centrifugal atomizing method, second mixed-powder is dispersed into a lot of fine drop (particle diameter is 40~70 μ m) through the shearing force that constant flow pump injection atomizer also is atomized device immediately, wherein the atomizer rotating speed is 20000r/min, the atomizer inlet temperature is 230 ℃, and the atomizer outlet temperature is 150 ℃.
The 3rd step: preparation Al 2O 3Coating material
Choose the Al that granularity is 200~250 purpose purity 99.9% 2O 3Spheroidal powder material;
The 4th step: low-voltage plasma spraying system coating
(A) matrix after the first step is processed is installed on the anchor clamps of low-voltage plasma spraying equipment, and will be through the Al of the 3rd step preparation 2O 3Coating material put into feed appliance, regulate spraying parameter Al processed 2O 3Coating;
Plasma spraying parameter: jar internal pressure 40 * 10 3Pa, the primary air amount is 100L/h, and inferior throughput is 30L/h, and electric current is 600A, and voltage is 60V, the powder sending quantity of powder feeder is 25g/min;
(B) second step preparation Al-Si-Cr coating material is put into feed appliance, regulate spraying parameter system Al-Si-Cr mixed coating;
Plasma spraying parameter: jar internal pressure 40 * 10 3Pa, the primary air amount is 100L/h, and inferior throughput is 30L/h, and electric current is 600A, and voltage is 60V, the powder sending quantity of powder feeder is 22g/min.
With the above-mentioned Al that makes 2O 3/ Al-Si-Cr composite coating shows that through sem analysis the coating of preparation mainly is made up of two-layer: outer is the Al-Si-Cr mixed layer, Cr (Si, Al) in this mixed layer 2, Al, Si three phase compositions; Internal layer is the Al between coating and the matrix 2O 3Coating.
In air atmosphere, during through 1000 ℃ of isothermal oxidation 100h, the weightening finish of matrix surface unit are is 44.6mg/cm with the Nb-24Ti-16Si-6Al-6Cr-2Hf matrix 2
In air atmosphere, during through 1000 ℃ of isothermal oxidation 100h, the weightening finish of coating surface unit are is 4.2mg/cm with the matrix that makes the Al-Si-Cr coating 2Find that by the sem analysis to the oxidised samples section coating mainly forms by three layers after the oxidation: skin is Al 2O 3And SiO 2Mixed oxide layer; The intermediate layer is the Al-Si-Cr mixed layer; Internal layer is Al 2O 3Layer (200 μ m are arranged approximately).Coating surface after the oxidation shows that through XRD, sem analysis coating surface has formed continuous, fine and close Al 2O 3And SiO 2Mixed oxide layer, thus the diffusion of oxygen to matrix successfully stoped.
By not comparing with preparing coating of material preparing cated matrix, its unit are weightening finish has reduced about 40mg/cm 2, prove that the cated matrix of preparation has good high-temperature oxidation resistant effect.

Claims (5)

1.一种Al2O3/Al-Si-Cr复合涂层,所述Al2O3/Al-Si-Cr复合涂层制备在Nb-24Ti-16Si-6Al-6Cr-2Hf基体上,其特征在于:所述Al2O3/Al-Si-Cr复合涂层由Al2O3涂层和Al-Si-Cr混合层组成,Al2O3涂层在Al-Si-Cr混合层与Nb-24Ti-16Si-6Al-6Cr-2Hf基体之间,Al2O3涂层厚度为50~200μm,Al-Si-Cr混合层厚度为50~200μm。1. An Al 2 O 3 /Al-Si-Cr composite coating, the Al 2 O 3 /Al-Si-Cr composite coating is prepared on a Nb-24Ti-16Si-6Al-6Cr-2Hf substrate, its It is characterized in that: the Al 2 O 3 /Al-Si-Cr composite coating is composed of an Al 2 O 3 coating and an Al-Si-Cr mixed layer, and the Al 2 O 3 coating is formed between the Al-Si-Cr mixed layer and the Al-Si-Cr mixed layer. Between the Nb-24Ti-16Si-6Al-6Cr-2Hf substrate, the thickness of the Al 2 O 3 coating is 50-200 μm, and the thickness of the Al-Si-Cr mixed layer is 50-200 μm. 2.根据权利要求1所述的Al2O3/Al-Si-Cr复合涂层,其特征在于:Al-Si-Cr混合层由Cr(Si,Al)2、Al、Si三相组成。2. The Al 2 O 3 /Al-Si-Cr composite coating according to claim 1, characterized in that the Al-Si-Cr mixed layer is composed of three phases of Cr(Si, Al) 2 , Al and Si. 3.根据权利要求1所述的Al2O3/Al-Si-Cr复合涂层,其特征在于:Al-Si-Cr混合涂层在高温1000~1250℃氧化100h以内在Al-Si-Cr混合层表面形成有Al2O3和SiO2的混合氧化物层。3. The Al 2 O 3 /Al-Si-Cr composite coating according to claim 1, characterized in that: the Al-Si-Cr mixed coating is oxidized at a high temperature of 1000-1250°C within 100h A mixed oxide layer of Al 2 O 3 and SiO 2 is formed on the surface of the mixed layer. 4.根据权利要求1所述的Al2O3/Al-Si-Cr复合涂层,其特征在于:制备有Al2O3/Al-Si-Cr复合涂层的基体在1000~1250℃高温氧化100h时,单位面积增重为4.2~9.8mg/cm24. The Al 2 O 3 /Al-Si-Cr composite coating according to claim 1, characterized in that: the substrate prepared with the Al 2 O 3 /Al-Si-Cr composite coating is heated at a high temperature of 1000-1250°C When oxidized for 100 hours, the weight gain per unit area is 4.2-9.8 mg/cm 2 . 5.一种采用低压30~40×103pa等离子喷涂制备Al2O3/Al-Si-Cr复合涂层的方法,其特征在于有下列制备步骤:5. A method for preparing an Al 2 O 3 /Al-Si-Cr composite coating by using low-pressure 30-40×10 3 pa plasma spraying, characterized in that it has the following preparation steps: 第一步:基体的前处理The first step: pretreatment of the substrate 将Nb-24Ti-16Si-6Al-6Cr-2Hf基体采用150#、360#、500#水磨砂纸磨光,并采用喷砂机进行表面喷砂处理后待用,喷砂后基体表面粗糙度RZ=60~80μm;Polish the Nb-24Ti-16Si-6Al-6Cr-2Hf substrate with 150#, 360#, 500# water abrasive paper, and use a sandblasting machine to perform surface blasting treatment before use. After blasting, the substrate surface roughness RZ= 60~80μm; 第二步:配制Al-Si-Cr涂层材料The second step: preparation of Al-Si-Cr coating material (A)称取30~35wt%的Al粉、30~33wt%的Cr粉、32~40wt%的Si粉,并且上述各成分的含量之和为100%,混合后经研磨30~150min后制得粒度为250~350目的第一混合粉末;(A) Weigh 30-35wt% of Al powder, 30-33wt% of Cr powder, 32-40wt% of Si powder, and the sum of the contents of the above-mentioned components is 100%, and grind for 30-150min after mixing Obtain the first mixed powder with a particle size of 250-350 mesh; (B)将经(A)步骤制得的第一混合粉末与粘结剂混合后经研磨250~400min后制得粒度为250~350目的第二混合粉末;(B) mixing the first mixed powder prepared in step (A) with a binder and grinding for 250-400 minutes to obtain a second mixed powder with a particle size of 250-350 mesh; 第一混合粉末与粘结剂的用量为1000g的第一混合粉末中放入1000~1500ml的粘结剂;The amount of the first mixed powder and binder is 1000g of the first mixed powder, and 1000-1500ml of binder is put into the first mixed powder; 所述粘结剂由阿拉伯树胶和去离子水在80~100℃中搅拌均匀制得,阿拉伯树胶与去离子水的用量为每100ml去离子水中添加0.5~5g阿拉伯树胶;The binder is prepared by stirring gum arabic and deionized water at 80-100°C, and the amount of gum arabic and deionized water is 0.5-5g gum arabic per 100ml of deionized water; (C)将经(B)步骤制得的第二混合粉末经雾化干燥造粒后制得粒度为200~250目的涂层材料;(C) spraying, drying and granulating the second mixed powder prepared in step (B) to obtain a coating material with a particle size of 200-250 mesh; 雾化干燥采用离心雾化方法,第二混合粉末经恒流泵注入雾化器并立即被雾化器的剪切力分散成很多细小液滴,其中雾化器转速为8000~20000r/min,雾化器进口温度为220~230℃,雾化器出口温度为130~150℃;Atomization drying adopts the centrifugal atomization method. The second mixed powder is injected into the atomizer through a constant flow pump and is immediately dispersed into many fine droplets by the shear force of the atomizer. The atomizer speed is 8000-20000r/min. The inlet temperature of the atomizer is 220-230°C, and the outlet temperature of the atomizer is 130-150°C; 第三步:配制Al2O3涂层材料The third step: preparation of Al 2 O 3 coating material 选取粒度为200~250目的Al2O3粉;Select Al 2 O 3 powder with a particle size of 200-250 mesh; 第四步:低压等离子喷涂制涂层Step 4: Coating by low-pressure plasma spraying (A)将经第一步处理后的基体安装在低压等离子喷涂设备的夹具上,并将经第三步配制的Al2O3涂层材料放入送料器中,调节喷涂工艺参数制Al2O3涂层;(A) Install the substrate treated in the first step on the fixture of the low-pressure plasma spraying equipment, and put the Al 2 O 3 coating material prepared in the third step into the feeder, and adjust the spraying process parameters to make Al 2 O 3 coating; 等离子喷涂参数:罐内压力30~40×103pa,主气流量为60~100L/h,次气流量为25~30L/h,电流为560~600A,电压为50~60V,送粉器的送粉量为24~25g/min;Plasma spraying parameters: tank pressure 30-40×10 3 pa, main air flow 60-100L/h, secondary air flow 25-30L/h, current 560-600A, voltage 50-60V, powder feeder The powder feeding amount is 24~25g/min; (B)将第二步配制Al-Si-Cr混合涂层材料放入送料器中,调节喷涂工艺参数制Al-Si-Cr混合涂层;(B) the second step of preparing the Al-Si-Cr mixed coating material is put into the feeder, and the spraying process parameters are adjusted to make the Al-Si-Cr mixed coating; 等离子喷涂参数:罐内压力30~40×103Pa,主气流量为60~100L/h,次气流量为25~30L/h,电流为560~600A,电压为50~60V,送粉器的送粉量为20~22g/min。Plasma spraying parameters: tank pressure 30-40×10 3 Pa, main air flow 60-100L/h, secondary air flow 25-30L/h, current 560-600A, voltage 50-60V, powder feeder The powder feeding amount is 20~22g/min.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101824590A (en) * 2010-04-29 2010-09-08 南昌航空大学 Method for preparing Nb/NbCr2-based high-temperature alloy surface anti-oxidation composite coating
CN101580938B (en) * 2009-06-19 2012-10-03 吉林大学 Method for preparing metallic matrix composite coating reinforced by alumina ceramics particles
CN104611671B (en) * 2015-01-08 2017-08-08 广西大学 A kind of intermediate layer for stopping elements diffusion and preparation method thereof
CN107964650A (en) * 2013-07-20 2018-04-27 应用材料公司 Chamber part, plasma resistant lid or the method for nozzle and article of manufacture
US12195839B2 (en) 2013-12-06 2025-01-14 Applied Materials, Inc. Ion beam sputtering with ion assisted deposition for coatings on chamber components

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101580938B (en) * 2009-06-19 2012-10-03 吉林大学 Method for preparing metallic matrix composite coating reinforced by alumina ceramics particles
CN101824590A (en) * 2010-04-29 2010-09-08 南昌航空大学 Method for preparing Nb/NbCr2-based high-temperature alloy surface anti-oxidation composite coating
CN101824590B (en) * 2010-04-29 2011-07-06 南昌航空大学 Method for preparing Nb/NbCr2-based high-temperature alloy surface anti-oxidation composite coating
CN107964650A (en) * 2013-07-20 2018-04-27 应用材料公司 Chamber part, plasma resistant lid or the method for nozzle and article of manufacture
US12195839B2 (en) 2013-12-06 2025-01-14 Applied Materials, Inc. Ion beam sputtering with ion assisted deposition for coatings on chamber components
CN104611671B (en) * 2015-01-08 2017-08-08 广西大学 A kind of intermediate layer for stopping elements diffusion and preparation method thereof

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