CN101105476A - Difference frequency type film acoustic wave resonator based micro-mass sensor - Google Patents
Difference frequency type film acoustic wave resonator based micro-mass sensor Download PDFInfo
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- CN101105476A CN101105476A CNA2006100989122A CN200610098912A CN101105476A CN 101105476 A CN101105476 A CN 101105476A CN A2006100989122 A CNA2006100989122 A CN A2006100989122A CN 200610098912 A CN200610098912 A CN 200610098912A CN 101105476 A CN101105476 A CN 101105476A
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Abstract
The invention relates to a micro-mass sensor based on beat frequency type thin film bulk acoustic resonator; the micro-mass sensor comprises a quality sensing thin film bulk acoustic resonator used in quality sensing, the thin film bulk acoustic resonator used to generate reference frequency, a first and a second high frequency oscillatory circuits, a high frequency amplification circuit, a high frequency mixing circuit, a lowpass filter circuit and a frequency measuring and display device; wherein the first and the second high frequency oscillatory circuits are respectively connected with the quality sensing thin film bulk acoustic resonator and the thin film bulk acoustic resonator and compose a first and a second high frequency oscillators. When the quality load on the quality sensing thin film bulk acoustic resonator has micro-variation, the frequency of high frequency signals output from the first high frequency oscillator generates micro-deviation; after being amplified, the reference high frequency signals generated from the second high frequency oscillator is output into the high frequency mixed circuit with the high frequency signals output from the first high frequency oscillator; both of the reference high frequency signals generated from the second high frequency oscillator and the high frequency signals output from the first high frequency oscillator are mixed together and then are output into the lowpass filter circuit; hence frequency variation generated by micro-mass load can be obtained and be output through the frequency measuring and display device.
Description
Technical field
The present invention relates to a kind of atomic little quality be carried out the micro-mass sensor of high-acruracy survey, particularly a kind of micro-mass sensor based on difference frequency type film acoustic wave resonator (FBAR).
Background of invention
Micro-mass sensor is a kind of sensor that small mass change is converted into frequency signal.It is being applied in chemistry and the coenocorrelation more and more, in order to the measurement of the measurement of the constituent analysis of carrying out gas and liquid, little quality, film thickness and pressure detection etc.At military affairs and secure context, it also has very important purposes, can be used as the poisonous gas detection in populous places such as subway, passenger vehicle, theater and the detection of explosive etc., to prevent the generation of terrorist incident.
At present known quartz crystal microbalance (Quartz Crystal Microbalance is called for short QCM) is a typical micro-mass sensor, is widely used in different fields.This sensor has utilized the resonance characteristic of quartz-crystal resonator, the variation of quartz-crystal resonator electrode surface quality is converted into the frequency change of quartz crystal oscillator circuit output electric signal.Because quartz crystal can not be done very thinly, so its work fundamental frequency is generally below tens megahertzes.Like this, the measurement to atomic little quality just has very big difficulty.
Compare with known quartz crystal microbalance (QCM), the present invention has two outstanding advantages, the one, the sensitivity that has improved mass sensor; The 2nd, improved the accuracy of measuring, overcome the influence of external environment (as environment temperature etc.) to sensing system.
Summary of the invention
Purpose of the present invention is exactly in order to solve the low difficulty of above-mentioned crystal microbalance (QCM) sensitivity, and provide a kind of micro-mass sensor based on difference frequency type film acoustic wave resonator (FBAR), this micro-mass sensor is for having adopted the micro-mass sensor of based thin film bulk acoustic wave resonator (FBAR), its resonance frequency can reach several Gigahertzs, thereby improves the sensitivity of sensing quality widely.Owing to adopted the structure of difference frequency type, survey frequency variable quantity accurately, thus also improved accuracy of measurement widely, and can eliminate the influence of external environment (as environment temperature etc.) to system.
Technical scheme of the present invention is as follows:
Micro-mass sensor based on difference frequency type film acoustic wave resonator provided by the invention comprises:
Be used for mass sensitivity mass sensitivity thin film bulk acoustic resonator 100, be used to produce thin film bulk acoustic resonator 200, first high-frequency oscillating circuits 300, second high-frequency oscillating circuits 400, DC/DC DC boosting biasing circuit 500, high-frequency amplifier circuit 600, high frequency mixting circuit 700, low-pass filter circuit 800 and the frequency measurement and the display device 900 of reference frequency;
The described mass sensitivity thin film bulk acoustic resonator 100 and first high-frequency oscillating circuits 300 that is used for mass sensitivity constitutes first high frequency oscillator together, produces a high-frequency signal f
01, when the mass loading on the mass sensitivity thin film bulk acoustic resonator 100 had small variation, first high-frequency oscillating circuits, 300 output signal frequency also correspondingly changed, and promptly Shu Chu high-frequency signal frequency is f
01-Δ f, wherein, the variation delta f of frequency is that mass loading causes;
The described thin film bulk acoustic resonator 200 and second high-frequency oscillating circuits 400 that is used to produce reference frequency constitutes second high frequency oscillator together, produces the high-frequency signal f of a reference
02(under the ideal situation, f
01=f
02), this signal is connected to as input end jointly with first high-frequency oscillating circuits, 300 output signals through high-frequency amplifier circuit 600 amplification backs and carries out mixing on the high frequency mixting circuit 700, output after the mixing obtains the frequency variation Δ f that little mass loading causes through low-pass filter circuit 800, and this frequency variation directly provides by frequency measurement and display device 900.
Micro-mass sensor based on difference frequency type film acoustic wave resonator provided by the invention also can comprise a DC/DC DC boosting biasing circuit 500; Described DC/DC DC boosting biasing circuit 500 is added to by big resistance or inductance element and produces a DC voltage that is higher than supply voltage on the thin film bulk acoustic resonator 200; This DC voltage is used to finely tune the frequency of thin film bulk acoustic resonator 200.
When thin film bulk acoustic resonator (FBAR) 100 and be used to produce reference frequency thin film bulk acoustic resonator 200 resonance frequency relatively near the time, described DC/DC DC boosting biasing circuit (500) can not established yet.
Described mass sensitivity thin film bulk acoustic resonator 100 is to be produced on two identical unit on a slice substrate with thin film bulk acoustic resonator 200;
Described mass sensitivity thin film bulk acoustic resonator 100 and thin film bulk acoustic resonator 200 are encapsulated in the same shell, perhaps are encapsulated in the different shells after cutting.
Described mass sensitivity thin film bulk acoustic resonator 100 and thin film bulk acoustic resonator 200 are operated on fundamental frequency or the higher hamonic wave.
Described mass sensitivity thin film bulk acoustic resonator 100 is made up of substrate 106 and the supporting layer 105, bottom electrode 104, piezoelectric membrane 103, insulation course 102 and the top electrode 101 that are overlying on described substrate 106 successively;
Described substrate 106 is silicon-doped chip, intrinsic silicon substrate or a gallium arsenide substrate commonly used in the semiconductor technology;
Described supporting layer 105 is for being deposited on low stress nitride silicon fiml, the silicon dioxide film of direct heat oxidation on substrate 106 on the described substrate 106; Or for injecting or being diffused in dense boron diffusion film on the substrate 106;
Described bottom electrode 104 is a metal electrode; This metal electrode is aluminium electrode, gold electrode, aluminium/titanium composite bed metal electrode, or golden chromium composite bed electrode; Described bottom electrode 104 is drawn lead and is connected with the simulation ground wire;
When described supporting layer 105 is preferably during conductive layer (as films of the formation of dense boron diffusion), described bottom electrode 104 can not have, and lead can be directly drawn and simulated ground wire and be connected from described supporting layer 105;
Piezoelectric monocrystal film that the piezoelectric membrane that described piezoelectric membrane 103 generates for magnetically controlled sputter method, chemical micro-processing method are made or PZT piezoelectric membrane for making of the Sol-gel sol method; Its thickness is 0.1 micron～30 microns.
Described insulation course 102 is silicon dioxide layer, the LTO insulation course that generates with magnetically controlled sputter method; Described insulation course 102 can not have yet;
Described top electrode 101 is aluminium or golden metal electrode; Perhaps being aluminium/titanium composite bed metal electrode, perhaps is golden chromium composite bed electrode; Described top electrode 101 is drawn lead and is connected with described first high-frequency oscillating circuits 300; Described top electrode 101 is the sensitizing range of mass sensitivity;
The top electrode 201 of described thin film bulk acoustic resonator 200 is drawn lead and is connected with described DC/DC DC boosting biasing circuit 500 with described second high-frequency oscillating circuits 400;
Described first high-frequency oscillating circuits 300 is the oscillatory circuit that is made of semiconductor transistor or integrated amplifier and resistance, electric capacity and inductance (for example Colpitts etc.);
The high-frequency signal that described first high frequency oscillator produces is connected to described high frequency mixting circuit 700 as signal end;
The oscillatory circuit (for example Colpitts etc.) that described second high-frequency oscillating circuits 400 is made of semiconductor transistor or integrated amplifier and resistance, electric capacity and inductance;
The high-frequency signal that described second high frequency oscillator produces is connected to described high frequency mixting circuit 700 as the local oscillator end after described high-frequency amplifier circuit 600 amplifies;
Described high-frequency amplifier circuit 600 is the amplifying circuit that single transistor amplifier or integrated amplifier and resistance, electric capacity and inductance are formed, and the signal of described second high-frequency oscillating circuits 400 is amplified to satisfies the needed signal amplitude of described high frequency mixting circuit 700 local oscillator ends;
The mixting circuit that described high frequency mixting circuit 700 is made up of high-frequency mixer and resistance, electric capacity and inductance; Its signal input part is connected with described first high-frequency oscillating circuits, 300 output terminals, and the local oscillator input end of high frequency mixting circuit 700 is connected with described high-frequency amplifier circuit 600 output terminals; The mixing output of described high frequency mixting circuit 700 is connected to the input end of described low-pass filter circuit 800;
Described low-pass filter circuit 800 is the active low-pass filter of being made up of transistor or integrated amplifier and resistance, electric capacity and inductance, it perhaps is the passive filter of forming by resistance, electric capacity and inductance, high fdrequency component with the mixing output that filters high frequency mixting circuit 700, and keep the difference frequency signal component of described first high-frequency oscillating circuits 300 and second high-frequency oscillating circuits 400, i.e. low frequency frequency component; The filtering output of described low-pass filter circuit 800 is connected on described frequency measurement and the display device 900 as input;
Described frequency measurement and display device 900 comprise high precision frequency measurement circuit, display driver circuit and the display part to low frequency signal, convert corresponding quality to the difference frequency signal component with described first high-frequency oscillating circuits 300 and second high-frequency oscillating circuits 400 and show or output to other smart machine and get on.
The piezoelectric membrane that described magnetically controlled sputter method generates is ZnO piezoelectric film or AlN piezoelectric membrane; The piezoelectric monocrystal film that described chemical micro-processing method is made is LiNbO
3Piezoelectric monocrystal film or LiTaO
3The piezoelectric monocrystal film;
Described DC/DC DC boosting biasing circuit 500 produces a DC voltage that is higher than power supply voltage, and supply with described thin film bulk acoustic resonator 200 dc offset voltages by big resistance or inductance element, with the resonance frequency of fine setting thin film bulk acoustic resonator 200; Described DC/DC DC boosting biasing circuit 500 is an inductance switch pump pressure circuit, perhaps for adopting the charge pump volt circuit of electric capacity/diode battle array; The resistance of a described big resistance is 1K～10G ohm.
In the mass-sensitive zone of described mass sensitivity thin film bulk acoustic resonator 100, promptly described top electrode 101 is or/and one deck selective gas adsorption film 108 is placed in the sensitizing range of described supporting layer 105; Described selective gas adsorption film 108 is exposed in the monitored gaseous environment, in order to detect the concentration of adsorbate in the detected gas environment; The sensitizing range of described supporting layer 105 is the vertical projection zone of described top electrode 101 on described supporting layer 105.
Described selective gas adsorption film (108) is ZSE-5 nano molecular sieve adsorption film or is nano molecular sieve adsorption film or other gas absorption film of absorption three peroxidating tri acetylacetonates.
A layer-selective ion adsorbed film 109 is placed in the sensitizing range of the supporting layer 105 of described mass sensitivity thin film bulk acoustic resonator 100; The sensitizing range of the supporting layer of described selectivity ion adsorbed film 109 and described thin film bulk acoustic resonator 200 is immersed in the monitored liquid environment, in order to the concentration of adsorbed material or ion in the tracer liquid environment; The sensitizing range of the supporting layer 105 of described mass sensitivity thin film bulk acoustic resonator 100 is meant the vertical projection zone of described top electrode 101 on described supporting layer 105; The sensitizing range of described thin film bulk acoustic resonator 200 supporting layers is meant the vertical projection zone of described top electrode 201 on described supporting layer 105.
Compared with prior art, the present invention has three outstanding advantages:
(1) owing to the frequency of operation height (as 1GHz) of resonator, the sensitivity of the sensor that therefore can improve the quality widely;
(2) owing to adopt the difference frequency type structure, improved the accuracy of frequency measurement, also overcome the influence of external environment (as environment temperature etc.) simultaneously sensing system.
(3) owing to make thin film bulk acoustic resonator (FBAR) and common semiconductor technology compatibility, therefore, easy and follow-up circuit carries out integrated, promptly constitutes system-on-a-chip (System On a Chip is called for short SOC).
Description of drawings
Fig. 1 is based on the schematic diagram of the micro-mass sensor system of difference frequency type film acoustic wave resonator (FBAR);
Fig. 2 is the structural representation of thin film bulk acoustic resonator (FBAR) when being applied to little mass sensitivity;
Fig. 3 is the structural representation of thin film bulk acoustic resonator (FBAR) when being applied to alternative gas absorption in the gaseous environment;
Fig. 4 is the structural representation of thin film bulk acoustic resonator (FBAR) when being applied to alternative material in the liquid environment or ionic adsorption.
Embodiment
Embodiment 1
Present embodiment will describe the situation (with reference to figure 1) of the present invention as micro-mass sensor in detail, and present embodiment comprises the mass sensitivity thin film bulk acoustic resonator (FBAR) 100 that is used for mass sensitivity, thin film bulk acoustic resonator (FBAR) 200, first high-frequency oscillating circuits 300, second high-frequency oscillating circuits 400, DC/DC DC boosting biasing circuit 500, high-frequency amplifier circuit 600, high frequency mixting circuit 700, low-pass filter circuit 800 and frequency measurement and the display device 900 that is used to produce reference frequency;
The principle of work of present embodiment is such: the mass sensitivity thin film bulk acoustic resonator (FBAR) 100 and first high-frequency oscillating circuits 300 that are used for mass sensitivity constitute first high frequency oscillator together, produce a high-frequency signal f
01(as f
01=1GHz).When the mass loading on the mass sensitivity thin film bulk acoustic resonator (FBAR) 100 has small variation, first high-frequency oscillating circuits, 300 output signal frequency also correspondingly change, and promptly output area is meant the vertical projection zone of described top electrode 201 on described supporting layer 105.
Compared with prior art, the present invention has three outstanding advantages:
(1) owing to the frequency of operation height (as 1GHz) of resonator, the sensitivity of the sensor that therefore can improve the quality widely;
(2) owing to adopt the difference frequency type structure, improved the accuracy of frequency measurement, also overcome the influence of external environment (as environment temperature etc.) simultaneously sensing system.
(3) owing to make thin film bulk acoustic resonator (FBAR) and common semiconductor technology compatibility, therefore, easy and follow-up circuit carries out integrated, promptly constitutes system-on-a-chip (System On a Chip is called for short SOC).
Description of drawings
Fig. 1 is based on the schematic diagram of the micro-mass sensor system of difference frequency type film acoustic wave resonator (FBAR);
Fig. 2 is the structural representation of thin film bulk acoustic resonator (FBAR) when being applied to little mass sensitivity;
Fig. 3 is the structural representation of thin film bulk acoustic resonator (FBAR) when being applied to alternative gas absorption in the gaseous environment;
Fig. 4 is the structural representation of thin film bulk acoustic resonator (FBAR) when being applied to alternative material in the liquid environment or ionic adsorption.
Embodiment
Embodiment 1
Present embodiment will describe the situation (with reference to figure 1) of the present invention as micro-mass sensor in detail, and present embodiment comprises the mass sensitivity thin film bulk acoustic resonator (FBAR) 100 that is used for mass sensitivity, thin film bulk acoustic resonator (FBAR) 200, first high-frequency oscillating circuits 300, second high-frequency oscillating circuits 400, DC/DC DC boosting biasing circuit 500, high-frequency amplifier circuit 600, high frequency mixting circuit 700, low-pass filter circuit 800 and frequency measurement and the display device 900 that is used to produce reference frequency;
The principle of work of present embodiment is such: the mass sensitivity thin film bulk acoustic resonator (FBAR) 100 and first high-frequency oscillating circuits 300 that are used for mass sensitivity constitute first high frequency oscillator together, produce a high-frequency signal f
01(as f
01=1GHz).When the mass loading on the mass sensitivity thin film bulk acoustic resonator (FBAR) 100 has small variation, first high-frequency oscillating circuits, 300 output signal frequency also correspondingly change, i.e. output also can be that the piezoelectric monocrystal film made of chemical micro-processing method (CMP) is (as LiNbO
3, LiTaO
3), also can be the piezoelectric membrane of making of sol method (Sol-gel) (as the PZT piezoelectric membrane of Sol-gel method making).The oscillation frequency of the thickness decision thin film bulk acoustic resonator (FBAR) 100 of described piezoelectric membrane 103.
Described insulation course 102 can be the silicon dioxide (SiO2) that generates with magnetically controlled sputter method, also can be the insulation course (as LTO) made of method for distinguishing etc., also can not have.102 effects of described insulation course are direct-current short circuit or punctures of avoiding little defective on the described piezoelectric membrane 103 or pin hole to cause.
Normally a kind of metal electrode of described top electrode 101 (as aluminium, gold etc.) can be aluminium/titanium (Al/Ti) composite bed metal electrode, also can be golden chromium composite bed (Au/Cr) electrode.Described top electrode 101 is drawn lead and is connected with described first oscillatory circuit 300.Described top electrode 101 normally is used for the sensitizing range of mass sensitivity.
The part that described thin film bulk acoustic resonator (FBAR) 200 that is used to produce reference frequency and the described thin film bulk acoustic resonator (FBAR) that is used for mass sensitivity 100 are identical no longer repeats here.Different parts comprise: a) the described top electrode that is used to produce the thin film bulk acoustic resonator (FBAR) 200 of reference frequency is not used further to mass sensitivity; B) the described top electrode 201 that is used to produce the thin film bulk acoustic resonator (FBAR) 200 of reference frequency is drawn lead and is connected with described DC/DC DC boosting biasing circuit 500 with described second oscillatory circuit 400.
Described first high-frequency oscillating circuits 300 is made up of the oscillatory circuit (for example Colpitts oscillatory circuit) that semiconductor transistor or integrated amplifier and several resistance, electric capacity and inductance constitute, constitute a high frequency oscillator together with the described thin film bulk acoustic resonator (FBAR) 100 that is used to produce reference frequency, produce a high-frequency signal and be connected to described high frequency mixting circuit 700 as signal end.
Described second high-frequency oscillating circuits 400 is the oscillatory circuits (for example Colpitts oscillatory circuit) that are made of semiconductor transistor or integrated amplifier and several resistance, electric capacity and inductance, constitute a high frequency oscillator together with the described thin film bulk acoustic resonator (FBAR) 200 that is used to produce reference frequency, produce a high-frequency signal, this signal is connected to described high frequency mixting circuit 700 as the local oscillator end after described high-frequency amplifier circuit 600 amplifies.
Described DC/DC DC boosting biasing circuit 500 produces a DC voltage that is higher than power supply voltage, and give described thin film bulk acoustic resonator (FBAR) 200 dc offset voltages that are used to produce reference frequency by a big resistance or inductance element, to finely tune its resonance frequency.It can be the switch pump pressure circuit that adopts inductance, also can be the charge pump volt circuit that adopts electric capacity/diode battle array.When the resonance frequency of thin film bulk acoustic resonator (FBAR) 100 and 200 relatively near the time, described DC/DC DC boosting biasing circuit (500) can not have yet;
Described high-frequency amplifier circuit 600 is amplifying circuits that single transistor amplifier or integrated amplifier and several resistance, electric capacity and inductance are formed, and the signal of described high-frequency oscillating circuits 400 is amplified to satisfies the needed signal amplitude of described high frequency mixting circuit 700 local oscillator ends.
The mixting circuit that described high frequency mixting circuit 700 is made up of high-frequency mixer and several resistance, electric capacity and inductance.Its signal input part is connected with the output terminal of described high-frequency oscillating circuits 300, and its local oscillator input end is connected with the output terminal of described high-frequency amplifier circuit 600.The mixing output of described high frequency mixting circuit 700 is connected to the input end of described low-pass filter circuit 800.
The active low-pass filter that described low-pass filter circuit 800 can be made up of transistor or integrated amplifier and several resistance, electric capacity and inductance also can have only several resistance, electric capacity and inductance to form passive filter.Its effect is that the high fdrequency component that the mixing of high frequency mixting circuit 700 is exported is filtered, and only keeps the difference frequency signal component of described high- frequency oscillating circuits 300 and 400, i.e. the low frequency frequency component.The filtering output of described low-pass filter circuit 800 is connected on described frequency measurement and the display device 900 as input.
Described frequency measurement and display device 900 comprise high precision frequency measurement circuit, display driver circuit and the display part to low frequency signal.Its function is that the difference frequency signal component with described high- frequency oscillating circuits 300 and 400 converts corresponding quality to and shows or output to other smart machine and get on.
Embodiment 2
Present embodiment will describe the present invention is used as the selective substances mass sensitivity in gaseous environment application (with reference to figure 3) in detail.The part identical with embodiment 1 no longer repeats.
As can be seen from Figure 3, one deck selective gas adsorption film 108 is placed in the sensitizing range that is described top electrode 101 and described supporting layer 105 in the described mass-sensitive zone that is used for the thin film bulk acoustic resonator (FBAR) 100 of mass sensitivity in the present embodiment.In the application of reality, have only described selective gas adsorption film 108 to be exposed in the monitored gaseous environment, other part is then isolated with monitored gaseous environment.
When the gas molecule that occurs in the monitored gaseous environment adsorbing, described selective gas adsorption film 108 adsorbs gas molecule, acting on the described mass loading that is used for the thin film bulk acoustic resonator (FBAR) 100 of mass sensitivity so just increases, thereby causes that the described resonance frequency that is used for the thin film bulk acoustic resonator (FBAR) 100 of mass sensitivity changes.This variation will be detected, from knowing detected gas environment kind, the concentration of some adsorbate.
Described selective gas adsorption film 108 can only be placed on the described top electrode 101 in mass-sensitive district, also can only place in the sensitizing range of described supporting layer 105; Also can place simultaneously in two mass-sensitive zones simultaneously.
Exemplary application 1 provides with the ZSE-5 nano molecular sieve here as the selective adsorption film, is used to detect the situation of homologue methyl acid phosphate two formicesters (DMMP) gas of neural class toxic agent sarin.At this moment, described mass sensor can be used as the nerve gas sensor, be used for chemical analysis and anti-terrorism.
The ZSE-5 nano molecular sieve at methyl acid phosphate two formicesters (DMMP) molecular diameter size that dissolve with ethanol is synthetic after ultrasonic, allows them fully dissolve.Then, be coated in the described sensitizing range that is used for the thin film bulk acoustic resonator (FBAR) 100 of mass sensitivity, form described selective adsorption film 108.Like this, have methyl acid phosphate two formicesters (DMMP) to divide the period of the day from 11 p.m. to 1 a.m in detected environment, described selective adsorption film 108 will adsorb it, thereby causes that the described resonance frequency that is used for the thin film bulk acoustic resonator (FBAR) 100 of mass sensitivity changes.This variation will be detected, from knowing detected gas environment kind, the concentration of basic di(2-ethylhexyl)phosphate formicester (DMMP) gas.
Exemplary application 2, when described selective adsorption film 108 is absorption three peroxidating tri acetylacetonate (Triacetone-triperoxide, be called for short TATP) the nano molecular sieve adsorption film time, the present invention just can be applied to the explosive safety detection of public arenas such as railway station, subway, market as detecting airborne three peroxidating tri acetylacetonate molecules.Three peroxidating tri acetylacetonates are a kind of non-nitro high explosives that the terrorist uses in the case of explosion of London.
Embodiment 3
Present embodiment will describe the present invention is used as the selective substances mass sensitivity in liquid environment application (with reference to figure 4) in detail.The part identical with embodiment 1 and embodiment 2 no longer repeats.
As can be seen from Figure 4, a layer-selective ion adsorbed film 109 is placed in the sensitizing range at the supporting layer 105 of the described thin film bulk acoustic resonator (FBAR) 100 that is used for mass sensitivity in the present embodiment.In the application of reality, have only described selectivity ion adsorbed film 109 and the described sensitizing range that is used for producing thin film bulk acoustic resonator (FBAR) 200 supporting layers of reference frequency to be immersed in monitored liquid environment, other part is then isolated with monitored environment.
When material that occurs in the monitored liquid environment adsorbing or ion, described selective gas adsorption film 109 adsorbs them, acting on the described mass loading that is used for the thin film bulk acoustic resonator (FBAR) 100 of mass sensitivity so just increases, thereby causes that the described resonance frequency that is used for the thin film bulk acoustic resonator (FBAR) 100 of mass sensitivity changes.This variation will be detected, from knowing detected liquid environment kind, the concentration of some adsorbed material or ion.
Claims (10)
1. micro-mass sensor based on difference frequency type film acoustic wave resonator comprises:
Be used for the mass sensitivity thin film bulk acoustic resonator (100) of mass sensitivity, the thin film bulk acoustic resonator (200) that is used to produce reference frequency, first high-frequency oscillating circuits (300), second high-frequency oscillating circuits (400), high-frequency amplifier circuit (600), high frequency mixting circuit (700), low-pass filter circuit (800) and frequency measurement and display device (900);
Described mass sensitivity thin film bulk acoustic resonator (100) and first high-frequency oscillating circuits (300) that is used for mass sensitivity constitutes first high frequency oscillator together, produces a high-frequency signal f
01, when the mass loading on the mass sensitivity thin film bulk acoustic resonator (100) had small variation, first high-frequency oscillating circuits (300) output signal frequency also correspondingly changed, and promptly Shu Chu high-frequency signal frequency is f
01-Δ f, wherein, the variation delta f of frequency is that mass loading causes;
Described thin film bulk acoustic resonator (200) and second high-frequency oscillating circuits (400) that is used to produce reference frequency constitutes second high frequency oscillator together, produces the high-frequency signal f of a reference
02This signal is connected on the high frequency mixting circuit (700) as input end jointly with first high-frequency oscillating circuits (300) output signal through high-frequency amplifier circuit (600) amplification back and carries out mixing, output after the mixing obtains the frequency variation df that little mass loading causes through low-pass filter circuit (800), and this frequency variation directly provides by frequency measurement and display device (900).
2. by the described micro-mass sensor of claim 1, it is characterized in that, also comprise a DC/DC DC boosting biasing circuit (500) based on difference frequency type film acoustic wave resonator; Described DC/DC DC boosting biasing circuit (500) is added to the thin film bulk acoustic resonator (200) that is used to produce reference frequency by resistance or inductance element and goes up DC voltage that is higher than supply voltage of generation; The resistance of described resistance is 1K～10G ohm.
3. by the described micro-mass sensor of claim 1 based on difference frequency type film acoustic wave resonator, it is characterized in that the described mass sensitivity thin film bulk acoustic resonator (100) that is used for mass sensitivity is to be produced on two identical unit on a slice substrate with the thin film bulk acoustic resonator that is used to produce reference frequency (200);
Described mass sensitivity thin film bulk acoustic resonator (100) and thin film bulk acoustic resonator (200) are encapsulated in the same shell, perhaps are encapsulated in the different shells after cutting.
4. by the described micro-mass sensor of claim 1 based on difference frequency type film acoustic wave resonator, it is characterized in that the described thin film bulk acoustic resonator (200) that is used for the mass sensitivity thin film bulk acoustic resonator (100) of mass sensitivity and is used to produce reference frequency is operated in fundamental frequency or higher hamonic wave.
5. by the described micro-mass sensor of claim 3 based on difference frequency type film acoustic wave resonator, it is characterized in that the described mass sensitivity thin film bulk acoustic resonator (100) that is used for mass sensitivity is made up of substrate (106) and the supporting layer (105), bottom electrode (104), piezoelectric membrane (103), insulation course (102) and the top electrode (101) that are overlying on described substrate (106) successively;
Described substrate (106) is silicon-doped chip, intrinsic silicon substrate or a gallium arsenide substrate commonly used in the semiconductor technology;
Described supporting layer (105) is for being deposited on low stress nitride silicon fiml, the silicon dioxide film of direct heat oxidation on substrate (106) on the described substrate (106); Or for injecting or being diffused in dense boron diffusion film on the substrate (106);
Described bottom electrode (104) is a metal electrode; This metal electrode is aluminium electrode, gold electrode, aluminium/titanium composite bed metal electrode, or golden chromium composite bed electrode; Described bottom electrode (104) is drawn lead and is connected with the simulation ground wire;
Piezoelectric monocrystal film that the piezoelectric membrane that described piezoelectric membrane (103) generates for magnetically controlled sputter method, chemical micro-processing method are made or PZT piezoelectric membrane for making of the Sol-gel sol method; Its thickness is 0.1～30 micron;
Described insulation course (102) is silicon dioxide layer or the LTO insulation course that generates with magnetically controlled sputter method;
Described top electrode (101) is aluminium or golden metal electrode; Perhaps being aluminium/titanium composite bed metal electrode, perhaps is golden chromium composite bed electrode; Described top electrode (101) is drawn lead and is connected with described first high-frequency oscillating circuits (300); Described top electrode (101) is the sensitizing range of mass sensitivity;
The described top electrode (201) that is used to produce the thin film bulk acoustic resonator (200) of reference frequency is drawn lead and is connected with described DC/DC DC boosting biasing circuit (500) with described second high-frequency oscillating circuits (400);
The Colpitts oscillatory circuit of described first high-frequency oscillating circuits (300) for constituting by semiconductor transistor or integrated amplifier and resistance, electric capacity and inductance;
The high-frequency signal that described first high frequency oscillator produces is connected to described high frequency mixting circuit (700) as signal end;
The Colpitts oscillatory circuit that described second high-frequency oscillating circuits (400) is made of semiconductor transistor or integrated amplifier and resistance, electric capacity and inductance;
The high-frequency signal that described second high frequency oscillator produces is connected to described high frequency mixting circuit (700) as the local oscillator end after described high-frequency amplifier circuit (600) amplifies;
Described high-frequency amplifier circuit (600) is the amplifying circuit that single transistor amplifier or integrated amplifier and resistance, electric capacity and inductance are formed, and the signal of described second high-frequency oscillating circuits (400) is amplified to satisfies the needed signal amplitude of described high frequency mixting circuit (700) local oscillator end;
The mixting circuit that described high frequency mixting circuit (700) is made up of high-frequency mixer and resistance, electric capacity and inductance; Its signal input part is connected with described first high-frequency oscillating circuits (300) output terminal, and the local oscillator input end of high frequency mixting circuit (700) is connected with described high-frequency amplifier circuit (600) output terminal; The mixing output of described high frequency mixting circuit (700) is connected to the input end of described low-pass filter circuit (800);
Described low-pass filter circuit (800) is the active low-pass filter of being made up of transistor or integrated amplifier and resistance, electric capacity and inductance, it perhaps is the passive filter of forming by resistance, electric capacity and inductance, high fdrequency component with the mixing output that filters high frequency mixting circuit (700), and keep the difference frequency signal component of described first high-frequency oscillating circuits (300) and second high-frequency oscillating circuits (400), i.e. low frequency frequency component; The filtering output of described low-pass filter circuit (800) is connected on described frequency measurement and the display device (900) as input;
Described frequency measurement and display device (900) comprise high precision frequency measurement circuit, display driver circuit and the display part to low frequency signal, convert corresponding quality to the difference frequency signal component with described first high-frequency oscillating circuits (300) and second high-frequency oscillating circuits (400) and show or output to a smart machine and get on.
6. by the described micro-mass sensor of claim 5, it is characterized in that the piezoelectric membrane that described magnetically controlled sputter method generates is ZnO piezoelectric film or AlN piezoelectric membrane based on difference frequency type film acoustic wave resonator; The piezoelectric monocrystal film that described chemical micro-processing method is made is LiNbO
3Piezoelectric monocrystal film or LiTaO
3The piezoelectric monocrystal film.
7. by the described micro-mass sensor of claim 4 based on difference frequency type film acoustic wave resonator, it is characterized in that, described DC/DC DC boosting biasing circuit (500) is an inductance switch pump pressure circuit, perhaps for adopting the charge pump volt circuit of electric capacity/diode battle array.
8. by the described micro-mass sensor of claim 5 based on difference frequency type film acoustic wave resonator, it is characterized in that, in the mass-sensitive zone of described mass sensitivity thin film bulk acoustic resonator (100), promptly described top electrode (101) is or/and one deck selective gas adsorption film (108) is placed in the sensitizing range of described supporting layer (105); Described selective gas adsorption film (108) is exposed in the monitored gaseous environment, in order to detect the concentration of adsorbate in the detected gas environment; The sensitizing range of described supporting layer (105) is the zone that vertical projection limited of described top electrode (101) on described supporting layer (105).
9. by the described micro-mass sensor of claim 7 based on difference frequency type film acoustic wave resonator, it is characterized in that described selective gas adsorption film (108) is ZSE-5 nano molecular sieve adsorption film or is the nano molecular sieve adsorption film of absorption three peroxidating tri acetylacetonates.
10. by claim 5 or 8 described micro-mass sensors based on difference frequency type film acoustic wave resonator, it is characterized in that a layer-selective ion adsorbed film (109) is placed in the sensitizing range of the supporting layer (105) of described mass sensitivity thin film bulk acoustic resonator (100); The sensitizing range of the supporting layer of described selectivity ion adsorbed film (109) and described thin film bulk acoustic resonator (200) is immersed in the monitored liquid environment, in order to the concentration of adsorbed material or ion in the tracer liquid environment; The sensitizing range of the supporting layer (105) of described mass sensitivity thin film bulk acoustic resonator (100) is meant the vertical projection zone of described top electrode (101) on described supporting layer (105); The sensitizing range of described frequency bulk acoustic wave resonator (200) supporting layer is meant the vertical projection zone of described top electrode (201) on described supporting layer (105).
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