CN101105450A - Semiconductor laser transmittance analysis system - Google Patents
Semiconductor laser transmittance analysis system Download PDFInfo
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- CN101105450A CN101105450A CNA2007100704847A CN200710070484A CN101105450A CN 101105450 A CN101105450 A CN 101105450A CN A2007100704847 A CNA2007100704847 A CN A2007100704847A CN 200710070484 A CN200710070484 A CN 200710070484A CN 101105450 A CN101105450 A CN 101105450A
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Abstract
The invention discloses a semiconductor laser transmissibility analysis system, which comprises an optical transmitter unit, an optical receiver unit and a signal analysis unit. The optical transmitter unit and the optical receiver unit are arranged on one side or two sides of the medium to be inspected. The optical transmitter unit comprises a semiconductor laser and a first convergent lens; the end of the first convergent lens corresponding to the semiconductor laser is an inclined plane; the optical distance of the principal ray of the laser beam between the semiconductor laser and the first convergent lens is shorter or equal to 7mm; The A-A sectional plane of the middle part of the first convergent lens is a random geometric shape, and the diameter of the smallest cover circle of the A-A sectional plane is bigger or equal to 25mm; the light sent out by the semiconductor laser goes into the medium to be inspected after going through the first convergent lens. The invention also discloses another semiconductor laser transmissibility analysis system.
Description
Technical field
The present invention relates to the photoelectric analysis system, particularly a kind of semiconductor laser transmittance analysis system that obtains measured parameter of analyzing by Laser Measurement bundle transmitance.
Background technology
It is extensive to analyze the semiconductor laser analytical technology application that obtains measured parameter by Laser Measurement bundle transmitance, for example the semi-conductor laser absorption spectrum analytical technology can be used for analytical gas, liquid chemical constitution concentration, all right analytical gas temperature and speed etc. for example can also be analyzed dust concentration by analysis to measure laser beam transmitance again.Be that example is introduced its application with the gas concentration analysis below.The semi-conductor laser absorption spectrum gas analyzing technology is a kind of high sensitivity gas analysis technology.When the light beam of the characteristic frequency that semiconductor laser is launched passed tested gas, the absorption line of tested gas caused light intensity decays to the absorption of beam energy, and light intensity absorbs can be by the Beer-Lambert relationship description:
I
v＝I
v，0T(v)＝I
v，0?exp[-S(T)g(v-v
0)PXL]
I
V, 0And I
vWhen representing respectively that frequency is the laser incident of v and through the light intensity behind the gas of pressure P, concentration X and light path L, line strength of S (T) expression gas absorption spectrum line, line shape function g (v-v
0) characterize the shape of this absorption line.By the Beer-Lambert relation as can be known, the decay of light intensity is relevant with tested gas content, temperature, pressure etc., therefore, just can analyze the correlation parameter that obtains tested gas by the measured light intensity dampening information.
The output light wavelength of semiconductor laser has tunability.The semi-conductor laser absorption spectrum gas analyzing technology adopts single mode semiconductor lasers such as DFB, VCSEL usually, makes the scanned whole piece absorption line of optical wavelength obtain complete high resolving power single line absorption spectra data by the sawtooth current of injecting certain frequency for these laser instruments usually.For the application in the atmospheric pressure environment, as shown in Figure 1, the spectrum width of single mode semiconductor laser (usually less than tens MHz) is received the width of spectral line much smaller than tested gas single suction, the wavelength-modulated sweep limit of laser instrument also only comprises the single suction of tested gas and receives spectral line, the spectral line of other gas is foreclosed, successfully avoided the cross interference of background gas in the measurement environment.
In a lot of application scenarios, analytic system need be installed in the inflammable and explosive environment, as contains in the workspace of hazardous gases such as carbon monoxide or hydrogen.Just need carry out explosion-proof design in these occasions, and obtain explosion-proof authentication analytic system.Explosion-proof design has multiple mode, as positive-pressure explosion-proof, flame proof, intrinsic safe explosion-proof etc.Because flame proof has the reliability height, uses superiority such as convenient, obtains to use very widely.
As shown in Figure 2, a kind of semi-conductor laser absorption spectrum gas analyzing system comprises Optical Transmit Unit 1, light receiving unit 2 and signal analysis unit 3, and described Optical Transmit Unit 1 and light receiving unit 2 are installed in the both sides of tested gas 4.Described Optical Transmit Unit comprises semiconductor laser 11, convergent lens 12 and glass window 13; Described light receiving unit 2 comprises convergent lens 20, light receiving element 21 and glass window 22.When described analytic system needs were explosion-proof, described glass window 13,22 used tempered glass, and in order to satisfy the needs of explosion suppresion surface size, the diameter of tempered glass 13,22 is bigger; Simultaneously a lot of on-position measures are used also needs wide-aperture light beam to reduce the inhomogeneous decay that the particle scattering produces measuring light in the tested gas, so the diameter of convergent lens 12 and convergent lens 20 is bigger.
The course of work of described analytic system is as follows: described semiconductor laser 11 is luminous, be converged to directional light through the convergent lens 12 in the Optical Transmit Unit 1, pass tested gas 4 through glass window 13 afterwards, assemble through convergent lens 20 again after passing the glass window 22 of light in passing light receiving unit 2 of tested gas 4, received by described light receiving element 21 afterwards, and received signal feed signals analytic unit 3 is analyzed, thereby obtains the concentration etc. of tested gas 4.
After laser is launched by semiconductor laser 11, through each optical components such as convergent lens 12, glass window 13, glass window 22, convergent lens 20 surperficial the time, although most laser energy refraction passing through optical device, but the sub-fraction laser energy can be received by light receiving element after interflection or scattering by the surface of above-mentioned optical device again, therefore, can there be phase differential between each secondary reflection of arrival light receiving element, the scattering laser bundle, produces multiple-beam interference (etalon) phenomenon.This multiple-beam interference phenomenon can exert an influence to the transmitance of measuring beam, thereby changes the light signal that light receiving element receives.Because the absorption spectroanalysis technology is to come analytical gas concentration by the light signal that the analysis light receiving element receives, above-mentioned multiple-beam interference phenomenon can produce the gas concentration analysis and disturb, and this interference is commonly called the etalon noise.In the process of the scanned absorption line of optical maser wavelength, phase differential constantly changes with optical maser wavelength between the multiple beam; That is to say that the transmitance of light beam changes in the process of the scanned absorption line of optical maser wavelength, therefore, the etalon noise changes with the variation of light frequency, and Fig. 3 has provided the relation of a kind of etalon noise and light frequency.In addition, be subjected to the influence of various environmental factors (temperature variation, mechanical vibration etc.), small variation often takes place in the distance between each optical component surface; Because optical maser wavelength is shorter, small variation will cause the obvious change of phase differential between the multiple beam, thereby significantly change the transmitance variation that above-mentioned multiple-beam interference produces, that is to say that the etalon noise can be changed by various Effect of Environmental with the distribution of light frequency, and then bring difficulty for accurate gas parameter analysis.Fig. 4 has provided is not having the gas single line absorption spectrum that analytic system records under the etalon noise situation, can significantly descend in the signal to noise ratio (S/N ratio) that the gas single line absorption spectrum that records under the etalon noise situation is arranged, as shown in Figure 5.For the fixed wave length measuring method, the small drift of wavelength or the variation of environmental factor also all can cause the variation of the apparent transmitance of optical system, thereby influence measuring accuracy.
Above-mentioned analytic system comes with some shortcomings: 1) structure relative complex, adopt convergent lens to come converging and diverging light, and also need tempered glass to realize flame proof simultaneously; Owing to adopt a plurality of optical components, increased the reflecting surface number, increased the etalon optical noise, reduce measuring accuracy and measured sensitivity; 2) when measuring some concentration of medium, as when measuring trace water and concentration of oxygen, because between semiconductor laser, convergent lens, the flame proof slide, light receiving element, all there are many spaces between convergent lens and the flame proof slide,, will exert an influence measurement if there is tested gas composition in gas in these spaces, current approach is or adopts nitrogen purging, perhaps adopts the method for nitrogen embedding to avoid existing in these spaces these tested gases; But purge the complexity that has increased system, encapsulating method can produce bigger measurement inaccuracy when taking place to leak in addition, especially when measured medium concentration is low, ppm magnitude for example, therefore, Optical Transmit Unit 1, light receiving unit 2 all need strict seal, and anti-leak requires high, and this has further increased the complicacy of system design and manufacturing.
Summary of the invention
In order to solve above shortcomings in the prior art, the invention provides a kind of measuring accuracy and measure sensitivity higher, simple and reliable for structure, be easy to realize the flame proof function, need not to purge, semiconductor laser transmittance analysis system that seal request is low and easily manufactured.
For achieving the above object, the present invention is by the following technical solutions:
A kind of semiconductor laser transmittance analysis system comprises Optical Transmit Unit, light receiving unit and signal analysis unit, and described Optical Transmit Unit and light receiving unit are installed in the one or both sides of measured medium; Described Optical Transmit Unit comprises semiconductor laser, first convergent lens, and an end of the described first convergent lens phase noise spectra of semiconductor lasers is the inclined-plane; To be less than or equal to the A-A cross section of the center section of described first convergent lens of 7mm be random geometry to laser beam chief ray light path between described semiconductor laser and described first convergent lens, and the diameter of the minimum circle-cover in described cross section is more than or equal to 25mm; The light that described semiconductor laser sends enters measured medium after by described first convergent lens.
The thickness of described first convergent lens is more than or equal to 20mm.
The A-A cross section of the center section of described first convergent lens is circular, and diameter is more than or equal to 25mm.
The A-A cross section of the center section of described first convergent lens is rectangle or regular polygon, and the diameter of its minimum circle-cover is more than or equal to 25mm.
The A-A cross section of the center section of described first convergent lens is an irregular figure, and the diameter of its minimum circle-cover is more than or equal to 25mm.
The front end of described first convergent lens is installed securing member.
Between the housing of described first convergent lens and described Optical Transmit Unit seal is installed.
The invention allows for a kind of like this semiconductor laser transmittance analysis system, comprise Optical Transmit Unit, light receiving unit and signal analysis unit, described Optical Transmit Unit and light receiving unit are installed in the one or both sides of measured medium; Described light receiving unit comprises light receiving element, second convergent lens, and an end of the relative light receiving element of described second convergent lens is the inclined-plane; To be less than or equal to the A-A cross section of the center section of described second convergent lens of 7mm be random geometry to laser beam chief ray light path between described light receiving element and described second convergent lens, and the diameter of the minimum circle-cover in described cross section is more than or equal to 25mm; The light that passes from measured medium is received by light receiving element after by described second convergent lens.
The thickness of described second convergent lens is more than or equal to 20mm.
The minimum circle-cover in above-mentioned cross section is defined as: the circle that can surround the diameter minimum in this cross section.
Compared with prior art, the beneficial effect that has of the present invention is: 1) improved measuring accuracy.First lens not only have the effect of assembling collimation laser device emission light beam, can also realize the effect of system's flame proof, have reduced the number of system optics components and parts, have reduced optical reflection face quantity, and then have reduced the optics etalon noise of system.Simultaneously, owing to reduced distance (the etalon noise that produces between the above-mentioned optical element face is the most obvious) between laser instrument and first convergent lens and the sensor and second convergent lens in system, the FSR of etalon noise (Free Spectral Range) obviously increases, and just the etalon noise is slower with the variation of light frequency; Because of more easily adopting background correct algorithms such as background match to remove the influence of the etalon noise background of slow variation, can improve measuring accuracy preferably.In addition, convergent lens is the inclined-plane near an end of laser instrument or sensor, avoided with laser instrument and sensor in semiconductor wafer surface be parallel to each other, also reduced the optics etalon noise of system effectively.2) need not to purge and seal request low.Medium absorbs with the light path of light in medium and is directly proportional, owing to reduced optics, the distance between each parts is all nearer simultaneously, and air significantly reduces for the influence of measurement result between parts, can need not to purge or sealing.3) simple in structure, reliability is better.The thick convergent lens that uses is not only realized converging action, can also realize the function of flame proof simultaneously, has reduced optics, and is simple in structure.4) big clear aperature can more easily realize flame proof and improve the performance of in site measurement.5) thermal insulation effect is better, owing to used thicker convergent lens, extraneous heat is difficult for being delivered to the laser instrument in the Optical Transmit Unit, thus make analytic system can be under the higher occasion of tested gas temperature operate as normal.
Description of drawings
Fig. 1 is semiconductor laser spectrum width and gas absorption spectrum width synoptic diagram;
Fig. 2 is the structural representation of a kind of semi-conductor laser absorption spectrum gas analyzing system in the prior art;
Fig. 3 is the synoptic diagram that concerns of a kind of etalon noise and light frequency;
Fig. 4 is the single line absorption spectrum synoptic diagram at a gas absorption spectrum line that does not have to record under the etalon noise situation;
Fig. 5 is having the single line absorption spectrum synoptic diagram of a gas absorption spectrum line that records under the etalon noise situation;
Fig. 6 is a kind of semi-conductor laser absorption spectrum water microanalysis system architecture synoptic diagram in the embodiment of the invention 1;
Fig. 7 is the structural representation of the convergent lens of use among the embodiment 1;
Fig. 8 is the A-A sectional view of the center section of convergent lens among the embodiment 2;
Fig. 9 is the A-A sectional view of the center section of convergent lens among the embodiment 3;
Figure 10 is the A-A sectional view of the center section of convergent lens among the embodiment 4.
Embodiment
Below in conjunction with drawings and Examples, the present invention is done further detailed description.
Embodiment 1:
As shown in Figure 6, a kind of semi-conductor laser absorption spectrum micro-moisture analysis system is used for detecting the concentration of tested gas 4 micro-vaporous waters, also satisfies the flame proof requirement simultaneously.Described analytic system comprises Optical Transmit Unit 1, light receiving unit 2 and signal analysis unit 3, and described Optical Transmit Unit 1 and light receiving unit 2 are installed in the both sides of tested gas 4.
Described Optical Transmit Unit 1 comprises housing, semiconductor laser 11 and driving circuit 10, first convergent lens 14 and sleeve 5, the described semiconductor laser 11 and first convergent lens 14 are installed in the described sleeve 5, and wherein semiconductor laser 11 is installed on the laser socket 15.Described semiconductor laser 11 driving circuits 10 are installed in the described housing.14 of described sleeve and described first convergent lenses enclose 16 by seal such as O shape and seal, and the front end of first convergent lens 14 is also installed lens securing member 17 simultaneously.
As shown in Figure 7, described first convergent lens 14 is thick oblique-convex lens, and an end is the inclined-plane, and the other end is a sphere, and the radius-of-curvature of its sphere is 13.66mm.The A-A cross section of the center section of described first convergent lens 14 is circular, diameter is 35mm, the first convergent lens thickness (the chief ray light path of laser beam in first convergent lens, be the spacing of center, inclined-plane and sphere centre) be 31mm, the angle of inclined-plane and face of cylinder longest bus-bar is 76 °, semiconductor laser 11 emitted laser are not entered in the laser instrument 11 after the inclined-plane reflection, reduce the optical noise of system.The meaning on described inclined-plane is: both can be plane inclined, also can be the cambered surface that tilts.The luminous point of described semiconductor laser 11 and inclined-plane center distance are 5.6mm.Laser beam chief ray and face of cylinder central axis angle are 7.49 °, guarantee that the laser beam chief ray is from the sphere centre outgoing.First convergent lens 14 and the sleeve 5 common flame proof functions that realize, flameproof joint between the two is the inclined-plane of lens 14 and the composition surface, inclined-plane of sleeve 5.According to GB GB3836.2-2000, in 9.5mm～15.8mm scope, the face composition surface of making even is 10mm at the width requirement on the volume conditions lower plane composition surface of Optical Transmit Unit 1; If the effective clear aperature that requires first convergent lens 14 is greater than 13mm, the face of cylinder diameter of then described first convergent lens 14 be 2 times of plane engaging surface width to add clear aperature be 33mm, present embodiment is got 35mm.
Described light receiving unit 2 comprises second convergent lens 23, photoelectric sensor 21.The size of described second convergent lens 23 is with first convergent lens 14.23 of lens mount on the described light receiving unit 2 and described second convergent lenses enclose 24 by seal such as O shape and seal, and the front end of second convergent lens 23 is also installed lens securing member 25 simultaneously.
Embodiment 2:
A kind of semi-conductor laser absorption spectrum micro-moisture analysis system is used to detect the concentration of micro-vaporous water, also satisfies the flame proof requirement simultaneously.As different from Example 1, the A-A cross section of the center section of described first and second convergent lenses is squares, and as shown in Figure 8, the diameter of described square minimum circle-cover is 40mm.
Embodiment 3:
A kind of semi-conductor laser absorption spectrum micro-moisture analysis system is used to detect the concentration of micro-vaporous water, also satisfies the flame proof requirement simultaneously.As different from Example 1, the A-A cross section of the center section of described first and second convergent lenses is oval, and as shown in Figure 9, the diameter of described oval-shaped minimum circle-cover is 45mm.
Embodiment 4:
A kind of semi-conductor laser absorption spectrum micro-moisture analysis system is used to detect the concentration of micro-vaporous water, also satisfies the flame proof requirement simultaneously.As different from Example 1, the A-A cross section of the center section of described first and second convergent lenses is irregular figures, and as shown in figure 10, the diameter of the minimum circle-cover of described irregular figure is 50.8mm.
It is pointed out that above-mentioned embodiment should not be construed as limiting the scope of the invention.Be to be used in the gas analysis among the embodiment 1, can also be applied in fluid analysis or the dust analysis certainly.Relating to a kind of irregular figure among the embodiment, can also be other irregular figure certainly.Key of the present invention is, one end of the first convergent lens phase noise spectra of semiconductor lasers in the described Optical Transmit Unit is the inclined-plane, the chief ray light path is less than or equal to 7mm between semiconductor laser and described first convergent lens simultaneously, the minimum circle-cover diameter in the A-A cross section of the center section of described first convergent lens is more than or equal to 25mm, thereby significantly reduced the Etalon noise, reduce the influence of gas to measuring between optics, and can more easily realize the big clear aperature that flame proof or in site measurement need.Under the situation that does not break away from spirit of the present invention, any type of change that the present invention is made all should fall within protection scope of the present invention.
Claims (9)
1. a semiconductor laser transmittance analysis system comprises Optical Transmit Unit, light receiving unit and signal analysis unit, and described Optical Transmit Unit and light receiving unit are installed in the one or both sides of measured medium; Described Optical Transmit Unit comprises semiconductor laser, first convergent lens; It is characterized in that: an end of the described first convergent lens phase noise spectra of semiconductor lasers is the inclined-plane; Laser beam chief ray light path is less than or equal to 7mm between described semiconductor laser and described first convergent lens; The A-A cross section of the center section of described first convergent lens is a random geometry, and the diameter of the minimum circle-cover in described cross section is more than or equal to 25mm; The light that described semiconductor laser sends enters measured medium after by described first convergent lens.
2. analytic system according to claim 1 is characterized in that: the thickness of described first convergent lens is more than or equal to 20mm.
3. analytic system according to claim 1 and 2 is characterized in that: the A-A cross section of the center section of described first convergent lens is for circular, and diameter is more than or equal to 25mm.
4. analytic system according to claim 1 and 2 is characterized in that: the A-A cross section of the center section of described first convergent lens is rectangle or regular polygon, and the diameter of its minimum circle-cover is more than or equal to 25mm.
5. analytic system according to claim 1 and 2 is characterized in that: the A-A cross section of the center section of described first convergent lens is an irregular figure, and the diameter of its minimum circle-cover is more than or equal to 25mm.
6. analytic system according to claim 1 and 2 is characterized in that: the front end of described first convergent lens is installed securing member.
7. analytic system according to claim 1 and 2 is characterized in that: between the housing of described first convergent lens and described Optical Transmit Unit seal is installed.
8. semiconductor laser transmittance analysis system, comprise Optical Transmit Unit, light receiving unit and signal analysis unit, described Optical Transmit Unit and light receiving unit are installed in the one or both sides of measured medium, and described light receiving unit comprises light receiving element, second convergent lens; It is characterized in that: an end of the relative light receiving element of described second convergent lens is the inclined-plane; Laser beam chief ray light path is less than or equal to 7mm between described light receiving element and described second convergent lens; The A-A cross section of the center section of described second convergent lens is a random geometry, and the diameter of the minimum circle-cover in described cross section is more than or equal to 25mm; The light that passes from measured medium is received by light receiving element after by described second convergent lens.
9. analytic system according to claim 8 is characterized in that: the thickness of described second convergent lens is more than or equal to 20mm.
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| CN200710070484A CN100595570C (en) | 2007-08-03 | 2007-08-03 | Semiconductor laser transmittance analysis system |
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| CN200710070484A CN100595570C (en) | 2007-08-03 | 2007-08-03 | Semiconductor laser transmittance analysis system |
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| CN100595570C CN100595570C (en) | 2010-03-24 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102103071A (en) * | 2010-12-16 | 2011-06-22 | 聚光科技(杭州)股份有限公司 | On-site absorption spectrum gas analysis system |
| CN112485200A (en) * | 2020-11-27 | 2021-03-12 | 西南石油大学 | Modularization well head foam content detection device |
-
2007
- 2007-08-03 CN CN200710070484A patent/CN100595570C/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102103071A (en) * | 2010-12-16 | 2011-06-22 | 聚光科技(杭州)股份有限公司 | On-site absorption spectrum gas analysis system |
| CN112485200A (en) * | 2020-11-27 | 2021-03-12 | 西南石油大学 | Modularization well head foam content detection device |
| CN112485200B (en) * | 2020-11-27 | 2022-03-08 | 西南石油大学 | Modularization well head foam content detection device |
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Address after: Hangzhou City, Zhejiang province Binjiang District 310052 shore road 760 Patentee after: Focused Photonics (Hangzhou) Inc. Address before: Hangzhou City, Zhejiang province Binjiang District 310052 shore road 760 Patentee before: Juguang Sci. & Tech. (Hangzhou) Co., Ltd. |