CN101092057A

CN101092057A - Vacuum lamination device

Info

Publication number: CN101092057A
Application number: CNA2007101103749A
Authority: CN
Inventors: 河野高幸; 山本隆幸
Original assignee: Meiki Seisakusho KK
Current assignee: Japan Steel Works Ltd
Priority date: 2006-06-19
Filing date: 2007-06-15
Publication date: 2007-12-26
Anticipated expiration: 2027-06-15
Also published as: CN100563984C; JP4246757B2; TW200800567A; KR20070120421A; KR100841733B1; TWI322079B; JP2007331333A

Abstract

Provided is a vacuum lamination device having a simple structure and a pressure film body with little deterioration. A vacuum laminating apparatus (25) comprising an upper plate (6) and a lower plate (17) which are opposed to each other and can be moved closer to and away from each other, wherein when the upper plate (6) and/or the lower plate (17) is moved closer to each other, a molding material (7) is pressed by the pressing film body (8) in a vacuum chamber formed between the pressing film body (8) provided on one of the opposed surfaces of the upper plate (6) or the lower plate (17) and the other opposed surface, and the molding material (7) is heated to laminate and mold the molding material, characterized in that the pressing film body (8) is made of an elastic body, and the hardness of a central portion (24) is lower than that of a peripheral portion (22).

Description

Vacuum laminated device

Technical field

The present invention relates to have the vacuum laminated device of pressurization film body.

Background technology

Technology as the deterioration of the pressurization film body of the vacuum laminated device that prevents to have the pressurization film body has for example patent documentation 1.Patent documentation 1 relates to vacuum laminated device, have: mutually opposed and can near away from upper plate and lower plate, be arranged at the pressurization film body on either party's the opposed faces of this upper plate or lower plate, form when this upper plate and/or lower plate in abutting connection with the time seize on both sides by the arms by quilt between the opposing party's opposed faces and above-mentioned pressurization film body and make the framework of the formingspace that moulding material accommodated, heating shaping material heating mechanism, the mechanism of decompressor that above-mentioned formingspace is evacuated, the pressurization film body operating mechanism that reaches the above-mentioned pressurization film body of operation and the moulding material that is contained in the above-mentioned formingspace is pressurizeed on any opportunity, the above-mentioned mechanism of decompressor of decompression usefulness is with along the inner peripheral of the above-mentioned framework mode across ground opening of full week in the formingspace, when being arranged on the formation formingspace and on arbitrary the opposing party's of the above-mentioned upper plate of above-mentioned framework butt or lower plate the opposed faces, the opening that flexible part is set as than the above-mentioned mechanism of decompressor more protrudes in the inboard, and between opening that attracts mechanism and pressurization film body.

But, according to the technology of patent documentation 1, and though the deterioration of the film body that can prevent to pressurize, the installation constitution complexity of the pressurization film body of vacuum laminated device, the replacing operational difficulty of the high and pressurization film body of cost.

Patent documentation 1: Japanese kokai publication hei 10-175229 communique

Summary of the invention

The present invention proposes in order to address the above problem, and its purpose is to provide a kind of vacuum laminated device with easy structure of the few pressurization film body of deterioration.

Vacuum laminated device of the present invention, have mutually opposed and can near away from go up dish and lower wall, above-mentioned go up dish and/or lower wall near the time, in being located at the vacuum chamber that forms between pressurization film body on dish or the either party's of lower wall the opposed faces and the opposing party's the opposed faces on above-mentioned, by above-mentioned pressurization film body moulding material is pressurizeed, above-mentioned moulding material heating is made its stacked shaping, it is characterized in that, above-mentioned pressurization film body is made of elastomer, and the hardness of the hardness ratio periphery of its central portion is low.

According to vacuum laminated device of the present invention because simple structure and have the few pressurization film body of deterioration, so vacuum laminated device between can be for a long time steady running.

Description of drawings

Partial, longitudinal cross-sectional when Fig. 1 is stacked is shaped of vacuum laminated device of the present invention.

Fig. 2 is the vertical view of pressurization film body.

Fig. 3 is that the A-A of Fig. 2 is to amplification view.

Fig. 4 is the amplification view of other pressurization film bodies.

Label declaration

1 upper plate

2 heat-insulating shields

3 heaters

4 holding plates

5 film bodies

Dish on 6

7 moulding materials

8 pressurization film bodies

9 front plate

10 heaters

11 heat-insulating shields

12 lower plates

13 O shapes ring

14 O shapes ring

15 frameworks

16 installing plates

17 lower walls

18 suction chambers

19 attract the compression chamber

20 gaps

21 peripheries

22 peripheries

23 central portions

24 central portions

25 vacuum laminated devices

26 pressurization film bodies

The specific embodiment

With reference to the accompanying drawings, describe embodiments of the invention in detail.Partial, longitudinal cross-sectional when Fig. 1 is stacked is shaped of vacuum laminated device of the present invention.Fig. 2 is the vertical view of pressurization film body.Fig. 3 is that the A-A of Fig. 2 is to amplification view.Fig. 4 is the amplification view of other pressurization film bodies.

Vacuum laminated device 25 has goes up dish 6 and lower wall 17, and freely the lower wall 17 of can rising and descend coils with respect to fixing going up 6 can be approaching/away from.But, also can not fix dish 6 and fixing lower wall 17, also can the both movable.

Last dish 6 comprises: have the upper plate 1 of recess and heat-insulating shield 2, heater 3, holding plate 4 and the film body 5 of stacked successively, as to be fixed in upper plate 1 recess bottom surface at central part.The height of the recess outer peripheral edges of the height on the surface of film body 5 and upper plate 1 is roughly the same.Space between each end face of the recess internal face of upper plate 1 and heat-insulating shield 2, heater 3, holding plate 4 and film body 5, be that suction chamber 18 is communicated with vavuum pump (all not shown) by open and close valve.

Lower wall 17 comprises: central part have the lower plate 12 of recess and stack gradually, be fixed in the recess bottom surface of lower plate 12 heat-insulating shield 11, heater 10 and front plate 9, be adhered to the pressurization film body 8 of installing plate 16, the O shape ring 13 of bearing surface between framework 15 that the film body 8 that will pressurize by installing plate 16 is close to the outer peripheral surface of lower plate 12, sealing framework 15 and the upper plate 1, and the outer peripheral surface of sealing lower plate 12 and the O shape of being close to face between the installing plate 16 encircle 14.Space between the recess internal face of lower plate 12 and the end face of heat-insulating shield 11, promptly attract compression chamber 19 to be communicated with vavuum pump and air voltage source (all not shown) by open and close valve.Again, though pressurization film body 8 illustrations are arranged at lower wall 17, also can constitute lower plate and upper plate are set on the contrary, the film body that will pressurize is arranged at upper plate.

The typical example of moulding material 7 is for wiring substrate etc. and the overlapping material that obtains of resin materials such as insulating materials or photoresist, on coil 6 and lower wall 17 when separating, be supplied to the upper surface of pressurization film body 8 via not shown carrying film etc.At this moment, pressurization film body 8 connects airtight in the upper surface that is provided with a plurality of grooves quarter of the front plate 9 of aluminum by the vacuum attraction that attracts compression chamber 19.If last dish 6 and lower wall 17 near and make framework 15 be connected to upper plate 1, then form by the surface of the upper surface of pressurization film body 8, film body 5, and the space that internal face marked off of framework 15 be vacuum chamber.Vacuum chamber is communicated with suction chamber 18 by gap 20, so if vacuum attraction suction chamber 18 then also becomes vacuum state in the vacuum chamber.

Then, remove to attract the vacuum of compression chamber 19, further make to attract compression chamber 19 to be connected with air voltage source, the film body 8 that pressurizes leaves front plate 9 and bloats towards the top, moulding material 7 is pressed on coil 6 film body 5.Moulding material 7 is made the resin material of moulding material 7 be laminated into shape on wiring substrate by

heater

3,10 heating and 8 pressurizations of pressurized film body.

Pressurization film body 8, as shown in Figures 2 and 3, the elastomer that is thickness 3mm is a silicone rubber membrane.Pressurization film body 8 is on interior all ends of installing plate 16 with the corrosion resistant plate that its peripheral end sintering is bonded in the frame shape of thickness 1.6mm, except the width segments of interior all number mm of distance installing plate 16.

Pressurization film body 8 is partly located to extend at the height of framework 15 during the pressurization of moulding material 7 as shown in Figure 1, is further attracted and extremely bending by gap 20 parts.Therefore, the part of the pressurization film body 8 of the face of the height part that is connected to framework 15 and near portion, the deterioration of the material of pressurization film body 8 is very serious, the breakage of pressurization film body 8 occurs in this position mostly.Though the part of coating moulding material 7 of pressurization film body 8 is also extended, very thin but the height of the thickness of the thickness of moulding material 7 and the film body 8 that pressurizes or framework 15 is compared, so do not produce the problem of deterioration.

At this, the hardness of elastomeric pressurization film body 8, the pressurization film body 8 central portion 23 places lower, the pressurization film body 8 periphery 21 places than higher.Specifically, the central portion 23 of pressurization film body 8 is that pressurization film body 8 is contacted with that to coil 6 forming face be the part of film body 5.The central portion 23 of pressurization film body 8 coats also press molding material 7 under vacuum condition, for make resin material fully be distributed to moulding material 7 be present in the concavo-convex of wiring substrate surface, require hardness low and imbedibility is good.Preferred hardness is below 30 degree, is more preferably 20 degree.Promptly, the size of the central portion 23 of pressurization film body 8, be to be made as minimum in the shape area of the moulding material 7 under the state that can coat moulding material 7 on film body 5 surfaces of last dish 6, be equivalent to be made as maximum as the zone of the part inlet in the gap 20 between the bight of film body 5 surfaces and framework 15, that exceed from vacuum chamber.On the other hand, the periphery 21 of pressurization film body 8 is positioned at the outside of central portion 23, as the above-mentioned part that comprises pressurization film body 8 extension knees.When the periphery 21 of pressurization film body 8 was similarly soft with central portion 23, the influence that is compared to extension for the influence of bending was big, and pressurization film body 8 can enter gap 20 and make extremely deteriorations of pressurization film body 8.Therefore, in the scope of extending no problem, the hardness that improves the periphery 21 of pressurization film body 8 alleviates crooked degree, thus the deterioration of preventing.The preferred hardness of the periphery 21 of pressurization film body 8 though exist with ... the thickness of pressurization film body 8 or the height of framework 15, between 40 degree～60 degree, is 50 degree in this embodiment.Also can between periphery 21 and central portion 23 or in the outside of periphery 21, the different parts of hardness with periphery 21 or central portion 23 be set again.

Amplification view is as shown in Figure 4 represented the pressurization film body 26 of other embodiment.Pressurization film body 8 makes central portion 23 in abutting connection with the inboard that is located at periphery 21, relative with it, it is central portion 24 for periphery 22, the recess that is located at moulding material 7 sides (periphery 22) central portion of pressurization film body 26 that pressurization film body 26 makes towards whole of the bonding plane side of installing plate 16.By constituting in this wise, the part that only requires the required imbedibility of stacked shaping is a soft.

In vacuum laminated device in the past, the breakage of the film body of pressurization has only tens thousand of forming period, still according to the vacuum laminated device of the foregoing description, can turn round more than 100,000 forming period.

The present invention is not limited to the embodiment of above explanation, can carry out various changes in the scope of the aim that does not break away from invention.

Claims

1. vacuum laminated device, have mutually opposed and can near away from go up dish and lower wall, above-mentioned go up dish and/or lower wall near the time, in being located at the vacuum chamber that forms between dish or the either party's of lower wall the pressurization film body of opposed faces and the opposing party's the opposed faces on above-mentioned, by above-mentioned pressurization film body moulding material is pressurizeed, above-mentioned moulding material heating is made its stacked shaping, it is characterized in that

Above-mentioned pressurization film body is made of elastomer, and the hardness of the hardness ratio periphery of its central portion is low.

2. vacuum laminated device as claimed in claim 1 is characterized in that, in the central portion of above-mentioned pressurization film body, the part that the hardness of hardness ratio periphery is low is above-mentioned pressurization film body contacts a side with above-mentioned moulding material face at least.

3. vacuum laminated device as claimed in claim 1, it is characterized in that, the size of the central portion of above-mentioned pressurization film body, the shape area that will be in the above-mentioned moulding material of the state that can be on above-mentioned coats above-mentioned moulding material on the opposing party's the opposed faces of dish or lower wall is made as minimum, and the suitable zone of part that will exceed with the opposed faces from above-mentioned the opposing party of above-mentioned vacuum chamber is made as maximum.