CN101089502A - Dustless chamber and its air conditioning method - Google Patents
Dustless chamber and its air conditioning method Download PDFInfo
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- CN101089502A CN101089502A CN 200610087018 CN200610087018A CN101089502A CN 101089502 A CN101089502 A CN 101089502A CN 200610087018 CN200610087018 CN 200610087018 CN 200610087018 A CN200610087018 A CN 200610087018A CN 101089502 A CN101089502 A CN 101089502A
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Abstract
The present invention relates to a dustless room, it includes an inner room space, an outer room space, a filtration/regulation system and several circulating fans and air filtration units. Said inner room space is enclosed with said outer room space, said filtration/regulation system is placed in said outer room space and is communicated with an external air-conditioning equipment. Said filtration/regulation system includes a first regulation switch, a filtration unit and a second regulation switch communicated with said filtration unit, and said circulating fans and air filtration units are respectively placed between said outer chamber space and said inner room space. Besides, said invention also provides the concrete steps of operation method of said dustless room air-conditioning equipment.
Description
Technical field
The present invention refers to a kind of semiconductor industry that is applied to especially about a kind of dust free room and air-conditioning method thereof, and can change the dust free room and the air-conditioning method thereof of different air filter screens along with the quality of outside air quality.
Background technology
Be the epoch of science industry and sophisticated technology now, and when production technology trends towards ultrapreciseization, high-purityization and asepticize, in these epoch,, except needing peace and quiet production environment, still need and want a pure environment for performance and the yield that improves most advanced and sophisticated goods.
With the semiconductor applications is example, early stage semiconductor technology is emphasized and must be carried out in the environment of a no micro dust particle, this is because have the characteristic of inferior micron-scale size by the construction package of the electronic circuit of semiconductor manufacturing, even and this circuit in the presence of the single particle dust, still may cause ineffective.
Yet, after micronic dust control has been attained maturation, new one from generation to generation the care person of semiconductor technology institute turned to the micronic dust special use screen pack the gaseous contamination that can't handle.These gaseous contaminations may be from technology itself, also the outdoor air that may come from the outside.Usually handle these gases, we can use chemical filter screen.This means that we need another kind of new dust free chamber system, it not only can be controlled micronic dust but also can control gaseous contamination.
Outdoor air at the external world pollutes, and the known practice is the quality regardless of the quality of outside air, and gas air-conditioning equipment (MAU) device chemical filter screen is with the relevant gaseous contamination of filtering outside this.
Yet, outer gas air-conditioning equipment (MAU) all is in use throughout the year, no matter the outer gas quality of filter plant all is in user mode always, when really there is prominent next gas stream of pollution (the high pollution thing entrance concentration of short time interval in the dust free room external world, as having the people to burn straw near the dust free room or spraying insecticide or dust free room is arranged near incinerator or the generating field) through out-of-date, may can't have preferable filter effect owing to be somebody's turn to do outer gas air-conditioning equipment (MAU), and make dust free room inside that the shortcoming that can't obtain the optimum air quality still still be arranged.Simultaneously, need not use the situation that also must use, increase power consumption (because of the characteristic of chemical filtering netting gear high pressure loss) on foot yet.
In addition, during the loss of the technology medicine that meets accident when technology, the present practice also has only the passive fresh outer gas that utilizes to do dilution, there is no the mechanism that removes initiatively.
Therefore, the improving of the above-mentioned disappearance of inventor's thoughts, and according to the correlation experience of being engaged in for many years in this respect, concentrated observational study, and cooperate the utilization of scientific principle, and propose a kind of reasonable in design and effectively improve the present invention of above-mentioned disappearance.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of dust free room and air-conditioning method thereof.The air-conditioning system of this dust free room can change different air filter screens along with the quality of outside air quality.
In order to solve the problems of the technologies described above, according to wherein a kind of scheme of the present invention, a kind of air-conditioning method of dust free room is provided, wherein this dust free room comprises an inner chamber space and a mistress space around this inner chamber space, the step of this air-conditioning method comprises: (a) by an outer gas air-conditioning equipment that is arranged at this dust free room outside, with the filtration/regulating system that provides pure air to be arranged at this mistress space, wherein this filtration/regulating system comprises one first by-pass cock, one filter element, two second by-pass cock and the 3rd by-pass cockes that link with this filter element respectively, reach one and drive windmill; (b) according to the air quality of extraneous (external world), selecting this pure air is to send into this mistress space by this first by-pass cock or this second by-pass cock and this filter element; (c) see through a plurality of circulating fan and air filter units that are arranged between this mistress space and this inner chamber space, import this inner chamber space from this mistress space with the pure air that will be somebody's turn to do by this first by-pass cock or this second by-pass cock and this filter element; (d), push to this mistress space with the pure air that will import this inner chamber space by these circulating fans and air filter unit; (e) see through these circulating fans and air filter unit, import this inner chamber space once more with the pure air that this is pushed to this mistress space; And repeating step (d)～(e).
In order to solve the problems of the technologies described above, according to another kind of scheme of the present invention, a kind of dust free room is provided, this dust free room outer setting one outer gas air-conditioning equipment (MAU) wherein, and this dust free room comprises a: inner chamber space, a mistress space, a filtration/regulating system, and a plurality of circulating fans and air filter unit.This mistress's spatial loop is around in this inner chamber space; This filtration/regulating system is arranged in this mistress space and is communicated in this outer gas air-conditioning equipment (MAU), and wherein this filtration/regulating system comprises one first by-pass cock, a filter element, and second by-pass cock that links with this filter element; And these circulating fans and air filter unit are arranged at respectively between this mistress space and this inner chamber space.By this, see through the unlatching of this first by-pass cock or this second by-pass cock, so that the air that gas air-conditioning equipment (MAU) is sent outside this directly sees through this first by-pass cock and imports this mistress space, or import this mistress space through this second by-pass cock and by the filtration of this filter element.
Therefore, the present invention has following advantage:
1, making filter screen with the environment of the intimate constant temperature and humidity of dust free room stores.
2, utilize the mode of switching different filter screens, to deal with prominent next outer gas gas stream of pollution, to keep stable outer gas air feed quality.
3, utilize the mode of switching different filter screens, pollute loss with the unexpected technology of dealing with in the dust free room.
4, energy-conservation and effectively use chemical filter screen.That is the present invention can more effectively filter human body or product detrimental substance, with inhibition, removal or the attenuating influence power from these chemical substances.
Reach technology, means and the effect that predetermined purpose is taked in order further to understand the present invention, see also following about detailed description of the present invention and accompanying drawing, believe purpose of the present invention, feature and characteristics, go deep into and concrete understanding when getting one thus, yet appended graphic reference and the explanation usefulness of only providing not is to be used for the present invention is limited.
Description of drawings
Fig. 1 is provided with the space schematic diagram for dust free room of the present invention; And
Fig. 2 is the flow chart of the air-conditioning method of dust free room of the present invention.
The primary clustering symbol description
Inner chamber space 1
Mistress space 2
Filtration/regulating system 3 first by-pass cockes 31
Second by-pass cock 32
The 3rd by-pass cock 33
Filter element 34
Drive windmill 35
Circulating fan and air filter unit 4
Outer gas air-conditioning equipment 5
The specific embodiment
See also shown in Figure 1ly, the space schematic diagram is set for dust free room of the present invention.As seen from the figure, dust free room provided by the present invention (Clean room) comprising: an inner chamber space 1, a mistress space 2, a filtration/regulating system 3, and a plurality of circulating fans and air filter unit 4.Wherein, this dust free room outer setting one outer gas air-conditioning equipment 5 (Make-up Air Unit, MAU), and among the figure arrow representative be the direction that air flows.
Moreover, this mistress space 2 is surrounded on this inner chamber space 1, and this filtration/regulating system 3 is arranged in this mistress space 2 and is communicated in this outer gas air-conditioning equipment 5 (MAU), and wherein this filtration/regulating system 3 comprises one first by-pass cock 31, a filter element 34, reaches one and second by-pass cock 32 that links of this filter element 34.In addition, this filter element 34 can be a chemical filter screen device (Chemical Filter Unit, CFU).
In addition, these circulating fans and air filter unit 4 are arranged at respectively between this mistress space 2 and this inner chamber space 1, and these circulating fans and air filter unit 4 can be filter blower module (Filter Fan Unit, FFU).By this, see through the unlatching of this first by-pass cock 31 or this second by-pass cock 32, so that the air that gas air-conditioning equipment 5 (MAU) is sent outside this directly sees through this first by-pass cock 31 and imports this mistress space 2, or see through this second by-pass cock 32 and import this mistress space 2 by the filtration of this filter element 34.
Moreover this filtration/regulating system 3 further comprises: one the 3rd by-pass cock 33 and drives windmill 35.Working as this second by-pass cock 32 by this closes, and this first and third by-pass cock 31,33 and this are when driving windmill 35 and opening, initiatively aspirate the contaminated air in mistress space 2 through this filter element 34 to see through this driving windmill 35, more diluent airs are provided, initiatively reduce this specific pollutants concentration, and then can guarantee that this dust free room continues to have better air quality, and make the present invention be maintained the certain outer gas air feed quality and the demand of energy-conservation and low operating cost.
Yet the kind of above-mentioned disclosed dust free room (framework) is not that the dust free room framework that is applied to different brackets such as is all the category that the present invention protects in order to qualification the present invention.
See also shown in Figure 2ly, be the flow chart of the air-conditioning method of dust free room of the present invention.By in the flow chart as can be known, the air-conditioning method of dust free room provided by the present invention comprises the following steps: at first, by an outer gas air-conditioning equipment 5 (MAU) that is arranged at this dust free room outside, so that the filtration/regulating system 3 in the mistress space 2 that pure air to is arranged at this dust free room to be provided, wherein this filtration/regulating system 3 comprises second by-pass cock 32 that one first by-pass cock 31, a filter element 34, two link with this filter element 34 respectively and the 3rd by-pass cock 33, and one drives windmill 35 (S100); Then, judge whether this extraneous air quality is lower than a predetermined value (S102), that is according to the air quality of extraneous (external world), selecting this pure air is to send into this mistress space by this first by-pass cock 31 or this second by-pass cock 32 and this filter element 34.
Next, when this extraneous air quality is lower than this predetermined value, then close this first and third by-pass cock 31,33 and open this second by-pass cock 32, to select this pure air by this second by-pass cock 32 and this filter element 34 (S104), wherein this filter element 34 can be a chemical filter screen device; Perhaps, when this extraneous air quality is higher than this predetermined value, then closes this second and third by-pass cock 32,33 and open this first by-pass cock 31, to select this pure air directly by this first by-pass cock 31 (S106).
Then, see through circulating fan and air filter unit 4 between a plurality of inner chamber space 1 that are arranged at this mistress space 2 and this dust free room, with the pure air that will pass through this first by-pass cock 31 or this second by-pass cock 32 and this filter element 34 from these mistress space 2 these inner chamber space 1 (S108) of importing; Then, by these circulating fans and air filter unit 4, push to this mistress space 2 (S110) with the pure air that will import this inner chamber space 1.
And then, whether the specific pollutants concentration of judging this inner chamber space 1 is higher than a predetermined value (S112); When if the specific pollutants concentration of this inner chamber space 1 is not higher than this predetermined value as yet, then see through these circulating fans and air filter unit 4, import this inner chamber space 1 (S114) once more with the pure air that this is pushed to this mistress space 2; Then, continue to carry out this step S110.
Moreover, in this step S112, when if the specific pollutants concentration of this inner chamber space 1 has been higher than a predetermined value, then close this second by-pass cock 32, and open this first and third by-pass cock 31,33 and drive windmill 35, to see through this filter element 34 of contaminated air process that this driving windmill 35 initiatively aspirates this mistress space 2, more diluent airs are provided, initiatively reduce this specific pollutants concentration (S116); Then, carry out this step S114 again.
In sum, dust free room of the present invention can change different air filter screens along with the quality of outside air quality.Therefore, the present invention has following advantage:
1, making filter screen with the environment of the intimate constant temperature and humidity of dust free room stores.
2, utilize the mode of switching different filter screens, to deal with prominent next outer gas gas stream of pollution, to keep stable outer gas air feed quality.
3, utilize the mode of switching different filter screens, pollute loss with the unexpected technology of dealing with in the dust free room.
4, energy-conservation and effectively use chemical filter screen.That is the present invention can more effectively filter human body or product detrimental substance, with inhibition, removal or the attenuating influence power from these chemical substances.
But, the above, only be the detailed description of the specific embodiment of the best of the present invention and graphic, and feature of the present invention is not limited thereto, be not in order to restriction the present invention, all scopes of the present invention should be as the criterion with the claim scope, all closing in the embodiment of the spirit variation similar of claim scope of the present invention with it, all should be contained in the category of the present invention, anyly be familiar with this skill person in the field of the invention, can think easily and variation or modify all can be encompassed in the scope that claim defines.
Claims (9)
1, a kind of air-conditioning method of dust free room, wherein this dust free room comprises an inner chamber space and a mistress space around this inner chamber space; This air-conditioning method is characterized in that, comprises the following steps:
(a) by an outer gas air-conditioning equipment that is arranged at this dust free room outside, with the filtration/regulating system that provides pure air to be arranged at this mistress space, wherein this filtration/regulating system comprises that one first by-pass cock, a filter element, one drive second by-pass cock and the 3rd by-pass cock that windmill and two link with this filter element respectively;
(b) according to the air quality of extraneous (external world), selecting this pure air is to send into this mistress space by this first by-pass cock or this second by-pass cock and this filter element;
(c) see through a plurality of circulating fan and air filter units that are arranged between this mistress space and this inner chamber space, import this inner chamber space from this mistress space with the pure air that will be somebody's turn to do by this first by-pass cock or this second by-pass cock and this filter element;
(d), push to this mistress space with the pure air that will import this inner chamber space by these circulating fans and air filter unit;
(e) see through these circulating fans and air filter unit, import this inner chamber space once more with the pure air that this is pushed to this mistress space; And
(f) repeating step (d)～(e).
2, the air-conditioning method of dust free room as claimed in claim 1 is characterized in that: this step (d) and (e) between further comprise:
Whether the specific pollutants concentration of judging this inner chamber space is higher than a predetermined value;
If not, execution in step (e) then.
3, the air-conditioning method of dust free room as claimed in claim 2 is characterized in that: if when the specific pollutants concentration of this inner chamber space has been higher than a predetermined value, then further comprise:
Close this second by-pass cock, and open this first and third by-pass cock and drive windmill,, provide more diluent airs, initiatively reduce this specific pollutants concentration to see through this filter element of contaminated air process that this driving windmill initiatively aspirates this mistress space; And
Execution in step (e).
4, the air-conditioning method of dust free room as claimed in claim 1 is characterized in that: this filter element is a chemical filter screen device.
5, the air-conditioning method of dust free room as claimed in claim 4, it is characterized in that: in this step (b), when this extraneous air quality is lower than a predetermined value, then close this first and third by-pass cock and open this second by-pass cock, to select this pure air by this second by-pass cock and this chemical filter screen device.
6, the air-conditioning method of dust free room as claimed in claim 4, it is characterized in that: in this step (b), when this extraneous air quality is higher than a predetermined value, then close this second and third by-pass cock and open this first by-pass cock, to select this pure air directly by this first by-pass cock.
7, a kind of dust free room, wherein this dust free room outer setting one outer gas air-conditioning equipment (MAU); This dust free room is characterized in that, comprising:
One inner chamber space;
One mistress space, it is surrounded on this inner chamber space;
One filtration/regulating system, it is arranged in this mistress space and is communicated in this outer gas air-conditioning equipment (MAU), and wherein this filtration/regulating system comprises one first by-pass cock, a filter element, and second by-pass cock that links with this filter element; And
A plurality of circulating fans and air filter unit, it is arranged at respectively between this mistress space and this inner chamber space;
By this, see through the unlatching of this first by-pass cock or this second by-pass cock, so that the air that gas air-conditioning equipment (MAU) is sent outside this directly sees through this first by-pass cock and imports this mistress space, or import this mistress space through this second by-pass cock and by the filtration of this filter element.
8, dust free room as claimed in claim 7 is characterized in that: this filter element is a chemical filter screen device.
9, dust free room as claimed in claim 7 is characterized in that: this filtration/regulating system further comprises: one the 3rd by-pass cock and drives windmill; Working as this second by-pass cock by this closes, and this first and third by-pass cock and when driving windmill and opening, to see through this filter element of contaminated air process that this driving windmill initiatively aspirates this mistress space, more diluent airs are provided, initiatively reduce this specific pollutants concentration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100870185A CN100472142C (en) | 2006-06-12 | 2006-06-12 | Dustless chamber and its air conditioning method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100870185A CN100472142C (en) | 2006-06-12 | 2006-06-12 | Dustless chamber and its air conditioning method |
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| CN101089502A true CN101089502A (en) | 2007-12-19 |
| CN100472142C CN100472142C (en) | 2009-03-25 |
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| CNB2006100870185A Active CN100472142C (en) | 2006-06-12 | 2006-06-12 | Dustless chamber and its air conditioning method |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102679472A (en) * | 2011-03-07 | 2012-09-19 | 上海三因环保科技有限公司 | Environment control system |
| CN102874597A (en) * | 2012-09-27 | 2013-01-16 | 亚翔系统集成科技（苏州）股份有限公司 | Automatic material handling system |
| CN104806043A (en) * | 2015-02-12 | 2015-07-29 | 芜湖锐进医疗设备有限公司 | Medical instrument production workshop |
| CN105222242A (en) * | 2015-09-08 | 2016-01-06 | 洛阳辰祥机械科技有限公司 | A kind of air cleaning system |
| CN105666528A (en) * | 2016-03-29 | 2016-06-15 | 威格气体纯化科技（苏州）股份有限公司 | Circulating filtration device for clean room, clean room and glove box |
| CN106088673A (en) * | 2016-06-28 | 2016-11-09 | 无锡宏纳科技有限公司 | A kind of ultra-clean chamber being provided with backflow fan |
| CN106556085A (en) * | 2016-12-06 | 2017-04-05 | 惠科股份有限公司 | Dust free room workshop and the airflow regulating method in dust free room workshop |
| CN108425520A (en) * | 2016-06-27 | 2018-08-21 | 夏华萍 | Dust free room |
| CN106121291B (en) * | 2016-06-27 | 2018-11-02 | 江苏帕珐尼洁净科技有限公司 | A kind of ultra-clean chamber with internal circulating fan |
| CN106121292B (en) * | 2016-06-28 | 2018-11-27 | 江苏中瀚通讯技术有限公司 | A kind of fan is arranged neat ultra-clean chamber |
-
2006
- 2006-06-12 CN CNB2006100870185A patent/CN100472142C/en active Active
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102679472A (en) * | 2011-03-07 | 2012-09-19 | 上海三因环保科技有限公司 | Environment control system |
| CN102679472B (en) * | 2011-03-07 | 2015-04-08 | 上海三因环保科技有限公司 | Environment control system |
| CN102874597A (en) * | 2012-09-27 | 2013-01-16 | 亚翔系统集成科技（苏州）股份有限公司 | Automatic material handling system |
| CN102874597B (en) * | 2012-09-27 | 2015-09-30 | 亚翔系统集成科技（苏州）股份有限公司 | A kind of automated material handling system |
| CN104806043A (en) * | 2015-02-12 | 2015-07-29 | 芜湖锐进医疗设备有限公司 | Medical instrument production workshop |
| CN105222242A (en) * | 2015-09-08 | 2016-01-06 | 洛阳辰祥机械科技有限公司 | A kind of air cleaning system |
| CN105666528A (en) * | 2016-03-29 | 2016-06-15 | 威格气体纯化科技（苏州）股份有限公司 | Circulating filtration device for clean room, clean room and glove box |
| CN108425520A (en) * | 2016-06-27 | 2018-08-21 | 夏华萍 | Dust free room |
| CN106121291B (en) * | 2016-06-27 | 2018-11-02 | 江苏帕珐尼洁净科技有限公司 | A kind of ultra-clean chamber with internal circulating fan |
| CN108425520B (en) * | 2016-06-27 | 2019-11-12 | 江苏来德福汽车部件有限公司 | Dust free room |
| CN106088673A (en) * | 2016-06-28 | 2016-11-09 | 无锡宏纳科技有限公司 | A kind of ultra-clean chamber being provided with backflow fan |
| CN106121292B (en) * | 2016-06-28 | 2018-11-27 | 江苏中瀚通讯技术有限公司 | A kind of fan is arranged neat ultra-clean chamber |
| CN106556085A (en) * | 2016-12-06 | 2017-04-05 | 惠科股份有限公司 | Dust free room workshop and the airflow regulating method in dust free room workshop |
| CN106556085B (en) * | 2016-12-06 | 2019-05-24 | 惠科股份有限公司 | The airflow regulating method in dust free room workshop and dust free room workshop |
| US11378291B2 (en) | 2016-12-06 | 2022-07-05 | HKC Corporation Limited | Clean room and method for regulating airflow of clean room |
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| Publication number | Publication date |
|---|---|
| CN100472142C (en) | 2009-03-25 |
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Owner name: YAXIANG SYSTEM INTEGRATION SCIENCE ( SUZHOU ) CO., Free format text: FORMER OWNER: YAXIANG ENGINEERING CO LTD Effective date: 20090717 |
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Effective date of registration: 20090717 Address after: Fonda street Suzhou Jiangsu Industrial Park, No. 33 Patentee after: L & K Engineering (Suzhou) Co., Ltd. Address before: Hsinchu County, Taiwan, China Patentee before: Yaxiang Engineering Co., Ltd. |