CN101079270B - Lubricating film forming method, slipping body with the lubricating film, magnetic recording medium, magnetic head slider and hard disk drive - Google Patents

Lubricating film forming method, slipping body with the lubricating film, magnetic recording medium, magnetic head slider and hard disk drive Download PDF

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Publication number
CN101079270B
CN101079270B CN 200710104888 CN200710104888A CN101079270B CN 101079270 B CN101079270 B CN 101079270B CN 200710104888 CN200710104888 CN 200710104888 CN 200710104888 A CN200710104888 A CN 200710104888A CN 101079270 B CN101079270 B CN 101079270B
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China
Prior art keywords
lubricating film
lubricant
base material
magnetic recording
infrared laser
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CN101079270A (en
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富元诚
村越龙太
苏立志
清野浩
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SAE Magnetics HK Ltd
TDK Corp
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SAE Magnetics HK Ltd
TDK Corp
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Priority claimed from JP2006231153A external-priority patent/JP4167281B2/en
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Abstract

The present invention provides a method for forming lubricator film, which has the working procedure that irradiating the lubrication (21) having OH radicel coated on the substrate (10) surface so that blazing vibrational infrared laser of OH key of OH radicel. Thereout, to blaze the librations of the OH key of the OH radicel of the lubrication through irradiation of the infrared laser. Thus, to improve the reactivity of the surface of the OH radicel and substrate of the lubrication, to make the lubrication chemistry combinate on the surface of the substrate easily, and to improve the durability of the lubrication.

Description

Lubricating film formation method, the slide mass that possesses lubricating film, magnetic recording media, head-slider and hard disk drive
Technical field
The present invention relates to lubricating film formation method, possess slide mass, magnetic recording media, head-slider and the hard disk drive of lubricating film.
Background technology
The surface of the hard disk in hard disk drive (magnetic recording media) or the surface of head-slider etc., contact with other parts slip etc., perhaps have on the surface (slipping plane) of the base material of the sort of possibility, need to form lubricating film.
And; Known have: as disclosed in japanese kokai publication hei 11-203670 communique, TOHKEMY 2001-93141 communique, TOHKEMY 2000-322734 communique and TOHKEMY 2003-228810 communique, after the surface coated lubricant of base material, heat and make lubricant adhere to the method on the substrate surface; As disclosed in the japanese kokai publication hei 11-25452 communique, the method for irradiation UV behind the surface coated lubricant of base material; As disclosed in the japanese kokai publication hei 6-215367 communique, the method for after the surface coated lubricant of base material, shining neutral free radical; Disclosed like japanese kokai publication hei 7-326151 communique, TOHKEMY 2004-152462 communique, TOHKEMY 2002-109718 communique, with plasma or gas etc. lubricant layer is carried out the method for surface modification when forming lubricant layer or after forming on surface to base material; Disclosed like japanese kokai publication hei 6-44558 communique, japanese kokai publication hei 5-143975 communique, japanese kokai publication hei 5-189752 communique, japanese kokai publication hei 5-205246 communique, japanese kokai publication hei 6-172479 communique, have the method for the lubricant of polar group to the surface coated of base material; Put down in writing like japanese kokai publication hei 11-66555 communique, after application of lubricating, shone laser below the 300nm dispersing the part of lubricant, thereby carried out the lubricating film formation method of the method etc. of filmization; Put down in writing like TOHKEMY 2005-187656 communique, after forming self-assembled monolayer on the surface of base material, make lubricant be adsorbed on the lubricating film formation method etc. of method on the self-assembled monolayer etc.
Summary of the invention
But, in the method for prior art, lubricating film fixing insufficient on base material, the durability not insufficient of lubricating film.
The present invention makes in view of above-mentioned problem, and purpose is to provide the formation method of the lubricating film that can bring into play enough permanance, and the manufacturing approach of using its magnetic recording media or head-slider.
The formation method of lubricating film of the present invention possesses, and the lubricant irradiation with OH base on the surface that is coated on base material is excited the operation of infrared laser of vibration of the OH key of OH base.
According to the present invention, excite the vibration of OH key of the OH base of lubricant through the irradiation infrared laser.Thus, the OH of lubricant base is improved with the reactivity on the surface of base material, makes the surface chemistry property combination of lubricant at base material easily, and the permanance of lubricant is improved.
Specifically, think following mechanism.That is, there is the terminal key that is known as dangling bonds on the surface of base material.Usually, there is the state that does not combine with other atom in this dangling bonds, and the state that combines with the OH base is with the state of hydrone formation hydrogen bond (absorption) etc.And, according to above-mentioned invention, exciting the vibration of OH key of the OH base of lubricant through irradiating laser, the OH base is activated, and reactivity is improved, and combines with the dangling bonds of substrate surface easily.Thereby, can make lubricant for example via easily forming covalent bond with the dangling bonds of substrate surface from the O atom of OH base.Thereby improve the permanance of lubricating film.
Here, in above-mentioned operation, the infrared laser of preferred illumination wavelength 0.9～8 μ m perhaps, absorbs the energy corresponding to the light of wavelength 0.9～8 μ m through the multi-photon that is caused by infrared laser.The infrared laser of preferred especially illumination wavelength 0.9～1.1 μ m or wavelength 2.7～3.0 μ m perhaps, absorbs the energy corresponding to the light of wavelength 0.9～1.1 μ m or wavelength 2.7～3.0 μ m through the multi-photon that is caused by infrared laser.
In addition, preferably in above-mentioned operation, carry out multi-photon and absorb, and the irradiation infrared laser is so that the part of base material side forms the focus of infrared laser in the above-mentioned surface of above-mentioned base material or above-mentioned lubricant.
Thus,, can selectivity carry out because exciting of producing of the absorption of infrared light, therefore can be suppressed at unnecessary subsidiary reaction beyond the interface etc. the OH base of the lubricant of the near surface of base material, thereby preferably.In addition, in multi-photon absorbed, absorbing light hardly beyond focus also can be implemented even the film that is therefore formed by lubricant is very thick fully.
In addition, go back the preferred infrared laser that has seen through homogenizer that uses as above-mentioned infrared laser.At this moment, utilize homogenizer to make the intensity distributions of laser smooth in face, thereby can handle the area of broad rapidly with uniform exposure intensity.
In addition, preferred above-mentioned lubricant forms the layer of the thickness below the 2nm.
Thus, owing to can make infrared laser fully arrive the near interface of lubricant and base material especially, so can carry out the absorption of the infrared laser on the OH base of the lubricant of the near surface that is positioned at base material efficiently.
In addition, the exposure intensity of preferred infrared laser is 60J/cm 2Below.
Exposure intensity surpasses 60J/cm 2The time bring damage for sometimes the surface of lubricant or base material.
Particularly, as infrared laser, the exposure intensity of laser is 60J/cm to preference like the irradiation pulsed infrared laser 2Below, pulse width is 0.1～1ms, and umber of pulse is 1～10, and the frequency of pulse is 10～50Hz.
In addition, preferably the surface temperature of base material is maintained below 200 ℃ during infrared laser in irradiation.
When the surface temperature of base material surpasses 200 ℃, cause the evaporation or the deterioration of lubricant sometimes, or cause the deterioration of base material.
In addition, preferred emollient is the fluorinated organic compounds with OH base.The special fluorinated organic compounds that preferably has the OH base endways.
The lubricant greasy property of fluorinated organic compounds system is high, but the fixedly difficulty on existing base material.But, in the application's invention, can such lubricant fully be fixed on the base material, thereby can easily form greasy property and the excellent lubricating film of endurance quality.
In addition, the surface of preferred substrates is formed by material with carbon element.Especially, material with carbon element has enough performances as the diaphragm on surface, but because be chemically stable material, so the fixedly difficulty of lubricant.But, according to the present invention, even for the surface of the base material that forms by material with carbon element, also can be fully fixing lubricant.
The manufacturing approach of magnetic recording media of the present invention is that the lubricant to the surface that is coated on magnetic recording media carries out above-mentioned lubricating film formation method.
The manufacturing approach of head-slider of the present invention is that the lubricant to the surface that is coated on head-slider carries out above-mentioned lubricating film formation method.
According to the present invention, the formation method of the lubricating film that can bring into play enough permanance is provided, and the manufacturing approach of using its magnetic recording media or head-slider.
Another object of the present invention only provides on the part on the surface of base material fixing and have a formation method of the lubricating film of enough permanance.And purpose also is to provide slide mass, magnetic recording media, head-slider and the hard disk drive that only on the part of slipping plane, is fixed with lubricant.
The formation method of lubricating film of the present invention possesses following operation; Promptly; Only to the part on the surface of the substrate that is coated with lubricant with the OH base that on carbon atom, combines; Irradiation excites the infrared laser of vibration of the OH key of OH base, only on the part on the surface of base material, forms the laser radiation operation of lubricating film.
According to the formation method of lubricating film of the present invention, excite the vibration of OH key of the OH base of lubricant through the irradiation infrared laser.Therefore, the OH of lubricant base is improved with the reactivity on the surface of base material, and lubricant is combined through covalent bond on the surface of base material, and the permanance of the lubricant of gained is improved.
Specifically, think following mechanism.That is, there is the terminal key that is known as dangling bonds on the surface of base material.Usually, this dangling bonds has the state that does not combine with other atom, and the state that combines with OH base is with the state of hydrone formation hydrogen bond (absorption) etc.And according to above-mentioned invention, because irradiating laser excites the vibration of the basic OH key of the OH of lubricant, the OH base is activated, and reactivity is improved, and combines with the dangling bonds of substrate surface easily.Therefore, can make lubricant for example via easily forming covalent bond with the dangling bonds of substrate surface from the O atom of the OH that combines with carbon atom base.Thus, lubricating film is adhered on the surface of base material more firmly, has improved the permanance of lubricating film.
And; Formation method according to lubricating film of the present invention; Through only to a part of irradiating laser on the surface of base material; And the lubricant that can make the part that laser shines optionally with the dangling bonds covalent bond of substrate surface, therefore can easily only be fixed on the lubricating film on the part on surface of base material.Thereby, can easily form on the surface of base material by lubricating film cause concavo-convex.In addition, owing to can only on the part of needs, form lubricating film, so be lubricated the qualitative control of film easily.
Here, in above-mentioned laser radiation operation, the infrared laser of preferred illumination wavelength 0.9～8 μ m perhaps, absorbs the energy corresponding to the light of wavelength 0.9～8 μ m through the multi-photon that is caused by infrared laser.The infrared laser of preferred especially illumination wavelength 0.9～1.1 μ m or wavelength 2.7～3.0 μ m perhaps, absorbs the energy corresponding to the light of wavelength 0.9～1.1 μ m or wavelength 2.7～3.0 μ m through the multi-photon that is caused by infrared laser.
In addition, preferably in above-mentioned operation, carry out multi-photon and absorb, and the irradiation infrared laser is so that form the focus of infrared laser on the part of base material side in the surperficial or above-mentioned lubricant of above-mentioned base material.
Thus, that can carry out that absorption owing to infrared light causes to the OH based selective of the lubricant of the near surface of base material excites, and therefore can be suppressed at unnecessary subsidiary reaction beyond the interface etc., thereby preferred.In addition, in multi-photon absorbed, absorbing light hardly beyond focus also can be implemented even the lubricant layer that is therefore formed by lubricant is very thick fully.
In addition, go back the preferred infrared laser that has seen through homogenizer that uses as above-mentioned infrared laser.At this moment, utilize homogenizer to make the intensity distributions of laser smooth in face, thereby can handle the area of broad rapidly with uniform exposure intensity.
In addition, the layer of above-mentioned lubricant that is coated on the surface of base material is preferably the thickness below the 2nm.
Thus, owing to can make infrared laser arrive the near interface of lubricant and base material especially fully, so can carry out the absorption of the infrared laser on the OH base of the lubricant of the near surface that is positioned at base material efficiently.
In addition, the exposure intensity of preferred infrared laser is 60J/cm 2Below.
Exposure intensity surpasses 60J/cm 2The time bring damage for sometimes the surface of lubricant or base material.
Particularly, as infrared laser, the exposure intensity of pulsed infrared laser is 60J/cm to preference like the irradiation pulsed infrared laser 2Below, pulse width is 0.1～1ms, and umber of pulse is 1～10, and the frequency of pulse is 10～50Hz.
In addition, preferably in above-mentioned laser radiation operation, the surface temperature of base material is maintained below 200 ℃.
When the surface temperature of base material surpasses 200 ℃, cause the evaporation or the deterioration of lubricant sometimes, or cause the deterioration of base material.
In addition, preferred above-mentioned lubricant is a fluorinated organic compounds.
High greasy property and the drying performance of performance when using fluorinated organic compounds as lubricant, but be difficult to be fixed on the existing base material.But, in the present invention, can such lubricant be fixed on the base material fully, thereby can easily form the lubricating film of greasy property and excellent in te pins of durability.
In addition, the surface of preferred substrates is formed by material with carbon element.Especially, material with carbon element has enough performances as the diaphragm on surface, but because be chemically stable material, so the fixedly difficulty of lubricant.But, according to the present invention, even for the surface of the base material that forms by material with carbon element, also can be fully fixing lubricant.
Preferred above-mentioned lubricating film is a plurality of dot patterns, and preferably its spot diameter is 0.9～100 μ m.
Thus, the contact area in the time of can reducing lubricating film and contact with other parts.In addition, when on the surface of base material, further possessing lubricant layer, can control the flowability of lubricant through the fixed effect that causes by dot pattern.
Lubricating film formation method of the present invention preferably also possesses the cleaning process of removing the lip-deep lubricant that is not fixed on base material after above-mentioned laser radiation operation.
Thus, can obtain on the surface of base material, existing hardly the lubricating film of the lubricant that flows.
And lubricating film formation method of the present invention preferably further possesses after above-mentioned cleaning process at the lubricant of the surface coated lubricant of base material painting process again.
Thus, can make and have concavo-convex on the surface of lubricant layer of coating.
Slide mass of the present invention only forms lubricating film on the part of slipping plane, the molecule that constitutes lubricating film has the C-O key, and the O atom of C-O key and the atom of slipping plane pass through covalent bonds.
According to slide mass of the present invention, only on the part of slipping plane, be formed with lubricating film, therefore the lubricating property of slipping plane is freely changed in certain scope.And according to slide mass of the present invention, the permanance of lubricating film is enough high, therefore can fully prevent when other parts contact with slipping plane and slide, and lubricating film comes off from slipping plane owing to vibration or impact etc.And, according to slide mass of the present invention, can form on the surface of base material by lubricated film formed concavo-convex.In addition, owing to can only on the part of needs, form lubricating film, thereby can easily be lubricated the qualitative control of film.
In addition, slide mass of the present invention can be formed method and easily forms by above-mentioned lubricating film.
The molecule that constitutes above-mentioned lubricating film preferably has the organic group that contains a plurality of fluorine atoms.
Molecule through by the organic group with contain fluorine atoms constitutes lubricating film, can bring into play high greasy property, therefore has the greasy property excellence of the slide mass of such lubricating film.
Preferred above-mentioned slipping plane is formed by material with carbon element.Thus, slipping plane is adequately protected.
In addition, preferred above-mentioned lubricating film is a plurality of dot patterns, and preferably its spot diameter is 0.9～100 μ m.
Thus, on slipping plane, form concavo-convexly, thereby obtain the drying effect, even water droplet also is difficult to adhere under the condition of high humidity.
In addition, on the surface of part that does not have dot pattern on the above-mentioned slipping plane and dot pattern, preferably has the lubricant layer that the physisorption lubricant molecule forms.
Thus, can control the flowability of lubricant through the fixed effect that causes by dot pattern.
In addition, on the surface of above-mentioned lubricant layer, preferably exist the part of dot pattern more outstanding than there not being the part of dot pattern.
Thus, the fixed effect that causes by dot pattern can be improved, the flowability of lubricant can be controlled more to heavens.
Magnetic recording media of the present invention possesses above-mentioned slide mass, and in slide mass, has magnetic recording layer.
In addition, preferred above-mentioned magnetic recording media is, slide mass is discoideus, and lubricating film is formed on arbitrary at least annular section of radial direction inside portion, radial direction central portion and radial direction outside portion in the discoideus slipping plane.
Head-slider of the present invention possesses above-mentioned slide mass, has the magnetic recording element and/or the magnetic read element that are configured on the slipping plane.
Preferred head-slider of the present invention has the bottom and gives prominence to from the bottom on slipping plane the 1st protuberance possesses above-mentioned lubricating film on the surface of any in bottom and the 1st protuberance.
Preferred head-slider of the present invention has the bottom on slipping plane, from the bottom outstanding the 1st protuberance and be arranged on around the 1st protuberance and be lower than the 2nd protuberance of the 1st protuberance, possess above-mentioned lubricating film on any the surface at least in the 1st protuberance, bottom and the 2nd protuberance.
Head-slider of the present invention preferably possesses above-mentioned lubricating film on the surface of the sensor part that comprises above-mentioned magnetic recording element and/or magnetic read element.
Hard disk drive of the present invention possesses above-mentioned magnetic recording media and head-slider.
Can provide on the part on the surface that only is fixed on base material according to the present invention and have the formation method of the lubricating film of enough permanance.And, slide mass, magnetic recording media, head-slider and the disc driver that only on the part of slipping plane, is fixed with lubricant can be provided according to the present invention.
Description of drawings
Fig. 1 is an expression schematic cross-section preferred embodiment of the present invention.
Fig. 2 is the expression then schematic cross-section of Fig. 1 preferred embodiment of the present invention.
Fig. 3 is the figure that the absorbing wavelength of the OH key of expression OH base distributes.
Fig. 4 is an example of expression LASER Illuminator System, (a) is the system of laser beam being amplified irradiation on the point of regulation area, (b) is the system with the laser beam condensation irradiation.
Fig. 5 is the expression then schematic cross-section of Fig. 2 preferred embodiment of the present invention.
Fig. 6 is the expression then schematic cross-section of Fig. 5 preferred embodiment of the present invention.
Fig. 7 is the synoptic diagram of expression hard disk unit of the present invention.
Fig. 8 is the partial section of Fig. 7, (a) is the sectional view of slide block, (b) is the sectional view of magnetic recording media.
Fig. 9 is result's the table of condition and the scratch hardness test of expression embodiment A 1～A3 and Comparative examples A 1.
Figure 10 is illustrated in the figure that is fixed on the concentration (density) of the lubricant of substrate surface in embodiment A 3 and the Comparative examples A 1.
Figure 11 is an expression schematic cross-section preferred embodiment of the present invention.
Figure 12 is the expression then schematic cross-section of Figure 11 preferred embodiment of the present invention.
Figure 13 is the figure that the absorbing wavelength of the OH key of expression OH base distributes.
Figure 14 is an example of expression LASER Illuminator System, (a) is the system of laser beam being amplified irradiation on the point of regulation area, (b) is the system with the laser beam condensation irradiation.
Figure 15 is an expression schematic cross-section preferred embodiment of the present invention.
Figure 16 is the expression then schematic cross-section of Figure 12 preferred embodiment of the present invention.
Figure 17 is the expression then schematic cross-section of Figure 16 preferred embodiment of the present invention.
Figure 18 is the expression then schematic cross-section of Figure 17 preferred embodiment of the present invention.
Figure 19 is the synoptic diagram of the hard disk unit of expression preferred implementation of the present invention.
Figure 20 is the partial section of the magnetic recording media of expression preferred implementation of the present invention.
Figure 21 is the planimetric map of magnetic recording media of the CSS mode of expression preferred implementation of the present invention.
Figure 22 is the planimetric map of magnetic recording media of the loading and unloading mode of expression preferred implementation of the present invention.
Figure 23 is the schematic cross-section of the head-slider of expression preferred implementation of the present invention.
Figure 24 is the stereographic map of the head-slider of expression preferred implementation of the present invention.
Figure 25 is the planimetric map of the head-slider of expression preferred implementation of the present invention.
Figure 26 is the planimetric map of the head-slider of expression preferred implementation of the present invention.
Figure 27 is the planimetric map of the head-slider of expression preferred implementation of the present invention.
Figure 28 is the planimetric map of the head-slider of expression preferred implementation of the present invention.
Figure 29 is result's the table of condition and the scratch hardness test of expression Embodiment B 1～B4 and comparative example B1.
Figure 30 is illustrated in the figure that is fixed on the concentration (density) of the lubricant of substrate surface among Embodiment B 3 and the comparative example B1.
Symbol description
10 ... Base material, 12 ... Dangling bonds, 21 ... Lubricant, 20 ... Lubricating film, lubricant layer, 28 ... Diaphragm, 30 ... Lubricating film, 50 ... LASER Light Source, 54 ... Homogenizer, 60,110 ... Head-slider, 40,120 ... Magnetic recording media, D ... Hard disk drive.
Embodiment
Below, preferred embodiment of the present invention with reference to description of drawings.In the explanation of accompanying drawing,, omit the explanation of repetition to the identical symbol of identical element mark.In addition, in the accompanying drawings, dimensional ratios may not be consistent with said explanation.
(the 1st embodiment)
(base material preparatory process)
At first, as shown in Figure 1, prepare base material 10 as process object.The material of base material 10 is not special to be limited.For example, can enumerate the metal of aluminium, aluminium alloy, titanium etc., the metal oxide of aluminium oxide etc., aluminium titanium carbon (Al 2O 3-the pottery that TiC) waits; The inorganic material of silicon, glass, material with carbon element (agraphitic carbon) etc., contains the macromolecular compound etc. of the polyolefin etc. of cyclic hydrocarbon group at polyethylene terephthalate, polyimide, polyamide, polycarbonate, polysulfones, PEN, PVC.In addition, at these substrate surfaces, physical vapor deposition (PVD:physical vapor deposition) that can be through sputter, vacuum evaporation etc., or formation such as plating be selected from the film more than a kind of NiP, NiP alloy, other alloy.Certainly, base material 10 also can be sandwich construction.
In this embodiment,, explain that using the carbon of being processed by CVD (chemical vapordeposition) method is the situation of diaphragm diamond-like-carbon (agraphitic carbon) as base material 10 as an example.
On the surface of base material 10, there is the terminal key that is become dangling bonds 12 usually.Have in this dangling bonds 12 12a that do not combine, the 12b that combines with the OH base with other atom, with the 12c of hydrone formation hydrogen bond (absorption).Certainly, the situation that combines (absorption) with the molecule beyond these is also arranged.
Such dangling bonds 12 does not exist only in the material with carbon element, in all solids material, can find its existence, and is particularly remarkable especially in the strong material of covalent bond property.
Preferably before the lubricant applying operation, through heated substrate 10 (for example, 80～200 ℃, more than 30 minutes), (for example, wavelength 50～350nm) perhaps, remains under the reduced atmosphere (for example, 1 * 10 with base material 10 in the surface irradiation ultraviolet ray of base material 10 -1Below the Torr) or inert gas atmosphere under under (for example, nitrogen, argon gas etc.) or the low-humidity environment (for example, below the RH10%) etc., and the molecule that is combined on the dangling bonds 12 (for example water etc.) or functional group (for example OH base etc.) are broken away from.Heating or ultraviolet irradiation are preferred to carry out in a vacuum or in the inert gas of nitrogen or argon gas etc. or under the low-humidity environment (below the RH10%).Certainly, though be combined in the molecule on the dangling bonds or functional group is residual also can embodiment of the present invention.In addition, preferably the intensity of heating-up temperature or UV irradiation is not set at and can brings the degree of infringement to base material.
In addition, also preferably remove surperficial organism etc. through ozone treatment.
(lubricant applying operation)
Then, as shown in Figure 2, application of lubricating 21 on the surface of base material 10 and form lubricating film.As lubricant 21, get final product so long as have the compound of OH base.The notion of the base of the OH here is included in carboxyl (COOH) or the OH base that is comprised in the functional group of the complicacy of phenylol etc.
As such lubricant 21, except hydro carbons, (for example can also enumerate alcohols with OH base; Erucyl alcohol, ricinoleyl alcohol, eicosanol, octanol, decyl alcohol, polyolefin alcohol, 2-Ethylhexyl Alcohol, PAG etc.); Carboxylic acids (for example, aliphatic carboxylic acid, aromatic carboxylic acid, oxo carboxylic acid etc.) (for example has the basic ester class of OH; Have the basic thioesters of OH, phosphate, nitrate etc.); Have the ethers (for example, having the basic polyphenylene oxide of OH, dimethyl ether, ethyl-methyl ether, diethyl ether etc.) of OH base, (for example have the basic silicon compound of OH; Have the silicone oil of OH base etc.), have the basic halogenated organic compounds of OH (have the basic halogenated ethers of OH, have the basic halohydrin of OH, have the halogenation carboxylic acid of OH base etc.).The fluorinated organic compounds that especially preferably has the OH base; For example; Can enumerate perfluorinated polyether with OH base etc. fluorinated ether, fluorinated alohol, fluorinated carboxylic with OH base, have the OH base fluorinated carboxylic alkanol ester, have an OH base fluoridize the diester dicarboxylic acid compound, what have the OH base fluoridizes monoesters monocarboxylic acid compound etc.Wherein, preferred especially end has the chain halogenated organic compounds of OH base, preferred especially chain fluorinated organic compounds.
Especially; In fluorinated ether with OH base; The fluorinated polyether that preferably has OH base, especially preferably be known as (1) formula of Fomblin Z compound, be known as (2) formula of Fomblin Y compound, be known as (3) formula of Krytox compound, be known as the chain fluorinated polyether that has the OH base endways of compound etc. of (4) formula of Demnum.
X-CF 2-O(-CF 2-CF 2-O-) m(-CF 2-O-) nCF 2-X (1)
X-CF 2-O(-CF(CF 3)-CF 2-O-) m(-CF 2-O-) nCF 2-X (2)
X-CF 2-O(-CF(CF 3)-CF 2-O-) mCF 2-CF 2-X (3)
X-CF 2-CF 2-O(-CF 2-CF 2-CF 2-O-) mCF 2-X (4)
Here n, m represent the integer more than 1 respectively.X is selected from-CF 3,-CH 2-OH ,-CH 2(O-CH 2-CH 2-) p-OH ,-CH 2-O-CH (OH)-CH 2Any functional group of-OH, at least one in each compound possesses the functional group with OH base.Here, P representes the integer more than 1.The molecular weight of chain fluorinated polyether is not special to be limited, but its center molecular weight is preferably 500～4000 degree.
In addition, lubricant also can comprise the compound with OH base, for example solvent etc.
The coating of such lubricant can utilize known method to carry out, and for example, carries out through vacuum vapour deposition, PVD method, CVD method, infusion process (dip method), spin-coating method, spraying process etc.In addition; As illustrated in the base material preparatory process; When the surface of the base material before the lubricant applying 10 being carried out in a vacuum or the cleaning when handling of heating in the inert gas or ultraviolet ray irradiation etc.; For the surface that prevents the base material 10 of being cleaned when the coating by the oxygen in the atmosphere, moisture or reactive high other impurity pollutions such as (pollutant contaminants), preferably in a vacuum or carry out this coating in the inert gas.
Here, to not special qualification of thickness of the lubricating film 20 of coating, but for make infrared laser arrive especially efficiently base material 10 and lubricating film 20 the interface and near, be preferably the following degree of 2nm.In the situation that multi-photon absorbs, do not limit thickness is special.
Here; As required also can be through after the coating of lubricant 21, (for example heating lubricating film 20; 80～200 ℃, more than 30 minutes) or through to lubricating film 20 irradiation ultraviolet radiations; OH base or OH base functional group's (for example, amino) in addition that lubricant 21 is had combine with the dangling bonds 12 preparation property ground of base material 10.Certainly, even do not heat or ultraviolet irradiation, also enough can embodiment of the present invention.Preferably the intensity with temperature or UV is not set at and can brings the degree of infringement to base material 10 or lubricating film 20.
(laser radiation operation)
Then, 21 irradiations are used to excite the infrared laser of vibration of the OH key of OH base to the lubricant of such lubricating film 20.Particularly, the OH key is because the easy absorption as shown in Figure 3 infrared light of the wavelength of 0.9～8 μ m degree roughly, so preferred irradiation can absorb the infrared laser corresponding to the energy of this wavelength 0.9～8 μ m.In Fig. 3, dotted line b is a baseline, and solid line a is the absorption intensity that causes owing to the basic OH key of OH.Preferred especially irradiation can absorb the infrared laser corresponding to the energy of the wavelength of 0.9～1.2 μ m (the W2 scope of Fig. 3), 2.7～3.0 μ m (the W1 scope of Fig. 3).
Particularly, under the situation of 1 photonic absorption, for example, the infrared laser of the wavelength of 0.9～8 μ m can be shone, especially, the infrared laser of the wavelength of 0.9～1.2 μ m or 2.7～3.0 μ m can be shone.On the other hand; Under the situation that the multi-photon that absorbs the photon more than 2 absorbs; Can utilize the infrared laser of provision wavelengths and make it absorb the infrared laser corresponding to wavelength 0.9～8 μ m, the infrared laser of the wavelength of preferred 0.9～1.2 μ m or 2.7～3.0 μ m.For example, can be simultaneously or continuously the energize sum at a plurality of photons of above-mentioned energy range.That is, in the situation that multi-photon absorbs, the light of the wavelength that irradiation is longer than the situation of 1 photonic absorption.
Do not limit the illuminating method of infrared laser is special, for example, can the LASER Illuminator System LS1 of example shown in Fig. 4 (a).Can make laser L become directional light with collimating apparatus 52, and after making the intensity distributions homogenising in the face with homogenizer 54, the lubricant 21 of lubricating film 20 is shone from LASER Light Source 50.This form is particularly suitable for utilizing 1 photonic absorption to excite the situation of the vibration of OH base.Can enumerate carbon dioxide laser, YAG laser etc. as LASER Light Source 50.
Here; As the known homogenizers such as homogenizer that homogenizer 54 can adopt homogenizer that 2 combination of lensess are formed or use diffraction grating to form, preferably can make intensity distributions in the face of Gaussian distribution type become the homogenizer of the interior intensity distributions of enough smooth face.
In addition, for for the incident angle of the laser of lubricating film 20,90 ° shown in Fig. 4 (a) is the most effective, but is being necessary to prevent reflected light and during the light source that needs protection etc., can make incident angle is 30～60 °.
To the some footpath of the lubricating film 20 and the infrared laser of base material 10 irradiations, can be corresponding with the area of lubricating film 20.In addition, when irradiated area is very big, also can make light beam spot that lubricating film 20 is carried out relative scanning.
In addition, also can consider LASER Illuminator System LS2 shown in Fig. 4 (b).The multi-photon that this irradiation system is particularly suitable for 2 photonic absorption etc. absorbs.To utilize 2 dimension scanning opticss 56 to scan through the laser that collimating apparatus 52 becomes directional light; Laser after the scanning carries out optically focused through object lens 58, and with on the surface of base material 10 or the part of base material 10 sides in the lubricating film 20 mode that forms focus shine.Thus, can be near the irradiation of the part concentrated area lubricant 21 median surfaces infrared laser.
2 dimension scanning opticss 56 for example, by 2 Electronic Speculum formula scanner formations such as (galvano-mirrorscanner), are being carried out two-dimensional scan to the laser point on the lubricating film 20 by not shown scanner driver control on the base material.In addition, also can scan in the base material side.
Can be above-mentioned light source as LASER Light Source 50, but absorb the LASER Light Source of the ultra-short pulse laser of preferred use supply femtosecond laser (Femtosecond Laser) etc. in order to carry out multi-photon.
In addition, in any situation, the exposure intensity of infrared laser is not all had special the qualification, but, be preferably 60J/cm in order to reduce influence to the influence of base material and the evaporation of lubricant etc. 2Below, in order to cause sufficient vibrational excitation, be preferably 0.01mJ/cm 2More than.The bond energy of OH base is 428～510kJ/mol degree; Must surpass its energy in order to cut off the OH key; If but energy enough too high then can produce the evaporation of lubricant, unwanted reaction, to the problem of the damage of base material etc., so the laser radiation ability need be carried out optimization according to each sample.
When irradiated with pulse laser during, be 60J/cm through the exposure intensity that makes laser as infrared laser 2Below, making pulse width is 0.1～1ms, and making umber of pulse is 1～10, and making pulsed frequency is 10～50Hz, and the unwanted temperature that can suppress the laser treatment part rises, thereby preferred.
In addition, LASER Light Source also can be for a plurality of.
So,, excite the vibration of OH key of the OH base of lubricant through shining such infrared laser.Therefore, the OH of lubricant 21 base improves with the reactivity on the surface of base material 10, and lubricant 21 is combined in the surface chemistry of base material 10.
Particularly, think following mechanism.That is, excite the vibration of OH key of the OH base of lubricant 21 through the irradiation infrared laser, the OH base is activated, and causes dissociating of O and H etc., thereby combines with the dangling bonds 12 of substrate surface easily.Thereby, for example as shown in Figure 5, can make lubricant 21 via easily forming covalent bond with base material 10 surperficial dangling bonds 12 from the basic O atom of OH.Thereby, think that the permanance of lubricating film 20 improves.
Especially,,, can optionally carry out the heating of OH base, therefore can effectively heat, in addition, can carry out the short time and handle with less energy owing to compare with UV processing etc. with heat treated by such immobilization that infrared laser carries out of passing through.Thereby can reduce evaporation of hot deterioration, thermal deformation, unwanted thermal decomposition, material etc.In addition,, especially, can optionally handle the surface portion of base material according to 2 photonic absorption of using the device shown in Fig. 4 (b), thus more effective.
Here; Also can be as required, behind the irradiation infrared laser, (for example through heating lubricating film 20; 80～200 ℃; More than 30 minutes) or through to lubricating film 20 irradiation ultraviolet radiations, OH base that lubricant 21 had or the functional group beyond the OH base (for example, amino etc.) are combined complementaryly with the dangling bonds 12 of base material 10.Certainly, even do not heat or also abundant embodiment of the present invention of ultraviolet irradiation.In addition, preferably the intensity of temperature and UV is not set at and brings the degree of infringement can not for base material 10 or lubricating film 20.
(cleaning process)
Then; Carry out cleaning process as required; That is, from lubricating film 20, remove unwanted material in the lubricant 21 of lubricating film 20, just be not fixed on the lubricant 21 on the surface of base material 10, unwanted accessory substance or impurity or free oil grade (with reference to Fig. 6).
Particularly, can use organic solvent or water, the CO of fluorine series solvent, ether, hexane, alcohol etc. 2The cleansing medium of (gas, supercritical fluid) etc., and these cleansing mediums are contacted with lubricating film 20.When cleaning, also can give ultrasonic vibration to lubricating film 20.
In addition, be fundamental purpose if remove lower-molecular substance, also can it be volatilized clean through vacuumizing or heating.Thus, surperficial unconjugated lubricant 21 less state of formation and base material 10.Do not limit the thickness of the lubricating film after cleaning is special, but be preferably below the 2nm.
Also can after cleaning, (for example pass through the heating lubricant as stated as required; 80～200 ℃; More than 30 minutes) or, remaining the OH base or the functional group in addition of lubricant are combined with the dangling bonds 12 of base material 10 through to the lubricant irradiation ultraviolet radiation.
Like this, accomplish the formation method of lubricating film preferred embodiment of the present invention.
(head-slider and magnetic recording media)
Then, the head-slider of the formation method of using such lubricating film and the manufacturing approach of magnetic recording media are described.
Fig. 7 is the formation synoptic diagram of hard disk drive HDD.Hard disk drive HDD mainly possesses discoideus magnetic recording media 120 and head-slider 110.
Magnetic recording media 120 is discoideus, in set inside magnetic recording layer 129 is arranged.In addition, link at the axle central part of magnetic recording media 120 and to be useful on the motor 130 that makes magnetic recording media 120 rotations, magnetic recording media 120 pivots.
It is roughly tabular that head-slider 110 is, and relatively dispose with the surperficial S of magnetic recording media 120, and the air-flow owing to the rotation that is accompanied by magnetic recording media 120 produces floats from the surperficial S of magnetic recording media 120 usually a little.
Head-slider 110 possesses magnetic head 140.Magnetic head 140 has the not shown write device that writes that carries out data with respect to the magnetic recording layer 129 of magnetic recording media 120, and/or carries out from the not shown reader of reading of the data of this magnetic recording layer 129.The face with respect to the surperficial S of magnetic recording media 120 of head-slider 110 is the relative ABSs of medium.In addition, on head-slider 110, be connected with a lip-deep drive division 113 of hoping part that this head-slider 110 is moved to magnetic recording media 120.
Shown in the partial section of Fig. 8 (a), head-slider 110 is formed with basalis 116, diaphragm 117 and lubricating film 118 on substrate 115.
As the material of substrate 115, for example can enumerate aluminium oxide titanium carbide (Al 2O 3-TiC) the such stupalith of sintered body, aluminium oxide Al 2O 3Deng metal oxide, the metal material that Ti is such, the non-magnetic insulating material of non-metal inorganic material that Si, C are such etc.
Material as basalis 116 can be enumerated silicon, silicon nitride etc.
As the material of diaphragm 117, the material with carbon element of preferred agraphitic carbon (for example, diamond-like-carbon, graphitic carbon, hydrogenating carbon, add nitrogen carbon, fluorocarbon etc.) or the various carbon that add metal etc., WC, WMoC, ZrN, BN, B 4C, SiO 2, ZrO 2Deng inorganic material, for example, can form the thickness about 1～3nm.Here, diaphragm 117 is equivalent to above-mentioned " base material ".
And lubricating film 118 is corresponding to above-mentioned lubricating film 20.Do not limit the material of lubricant 21 is special, but can especially preferably utilize the fluorinated organic compounds with OH base of fluorinated polyether with OH base etc.
Manufacturing approach as such head-slider 110; Utilizing known method after forming magnetic head 140 on the substrate; Carry out the formation and the grinding of the relative ABS of medium; Utilize the known method of vapour deposition method (vacuum vapour deposition, sputtering method, CVD method etc.) etc. form basalis 116, diaphragm 117 thereafter.Then, can this diaphragm 117 be implemented the formation method of above-mentioned lubricating film as base material.
Then, magnetic recording media 120 is described.Shown in the partial section of Fig. 8 (b), magnetic recording media 120 is formed with basalis 126, magnetic recording layer 129, diaphragm 127 and lubricating film 128 on substrate 125.
Material as substrate 125; For example, can example glass, aluminium, Al is alloy glass, plastics, pottery, carbon, silicon, has the Si monocrystal substrate of oxidized surface etc., in addition; In the situation of flexible plastic disc or tape-shaped medium's, can example gather the synthetic resin of acetate fiber (polyacetate) etc.
About the not restriction of the material of basilar memebrane 126, hard disk can example Cr in the situation of magnetic recording media, Ni-P etc.And, as the material of basilar memebrane 126, in the situation of horizontal magnetic recording media, can enumerate the nonmagnetic substance of Cr alloy etc., in the situation of perpendicular magnetic recording medium, can enumerate soft magnetic material of material of containing Fe, Ni, Co etc. etc.Especially; In the situation of perpendicular magnetic recording medium; For the crystallinity that improves the soft magnetism basalis or the adhesiveness of raising and substrate; Can further below the soft magnetism basalis, have by Ti, Ta, W, Cr, Pt or comprise the basalis that the material etc. of their alloy or their oxide, nitride etc. forms; In addition, the centre between soft magnetism basalis and recording layer can have by Ru, Pt, Pd, W, Ti, Ta, Cr, Si or comprises the middle layer that the nonmagnetic substance of their alloy or their oxide, nitride etc. forms.
As the material of magnetic recording layer 129, for example can enumerate with Co be major component contain Pt at least, and contain Cr as required, further contain the material of oxide.
As the material of diaphragm 127, for example can enumerate the material with carbon element of the diamond-like-carbon etc. of 1～10nm degree.Here, diaphragm 127 is equivalent to above-mentioned " base material ".
And lubricating film 128 is corresponding to above-mentioned lubricating film 20.Do not limit for lubricant is special, but especially preferably have the fluorinated organic compounds with OH base of the fluorinated polyether etc. of OH base.In addition, do not limit for the molecular weight of fluorinated organic compounds is special, but preferably its center molecular weight is 500～4000 degree.
As the manufacturing approach of such magnetic recording media 120, utilize known method on substrate 125, to form basalis 126, magnetic recording layer 129, diaphragm 127 in order, and the formation method of implementing above-mentioned lubricating film get final product.
According to these inventions, especially, owing to needn't heat thereby can suppress the thermal demagnetization etc. of magnetic head 140 and magnetic recording layer 129, therefore preferred.In addition, when using such head-slider 110 or magnetic recording media 120, the permanance of lubricating film 20 is high, therefore can obtain excellent hard disk drive of reliability and life-span.Certainly, when using tape-shaped medium's or flexible plastic disc (FD) etc., also can obtain same effect as magnetic recording media.
[embodiment A]
(embodiment A 1～A3)
On the Co substrate, the thickness with 3nm under vacuum forms diamond-like-carbon as base material.Thereafter, application of lubricating makes its thickness reach the 1.2nm degree to obtain lubricating film on the surface of base material.Use the Fomblin Z of (1) formula as lubricant.Thereafter, the pulsed infrared laser light (Nd-YAG laser) with wavelength 1.064 μ m is radiated on the lubricating film.The pulse width of laser is 0.3ms.In addition, according to the order of embodiment A 1～A3, with laser radiation intensity be set at 9.6,11.6 respectively, 13.5J/cm 2Like this, obtain having the sample substrate of lubricating film.
(Comparative examples A 1)
Except likewise not implementing with embodiment A 1 irradiating laser, obtain sample substrate.
(evaluation)
The penetrator front end uses the diamond chip (diamond chip) of diameter 8 μ m, under the loading of 3.98mN, carries out the scratch hardness test of the lubricating film (the about 1.1nm of thickness) of each sample substrate.Then, measure the depth D and the width W of cut with the sweep type ellipsometer.The result is as shown in Figure 9.
In addition; For embodiment A 3 and Comparative examples A 1; To not carrying out the sample surfaces of scratch hardness test, carry out quality analysis with the secondary ion mass spectrometry meter (SIMS) of TOF type, obtain distinctive C-F key and the ratio that is present in the Co atom in the magnetic recording media magnetosphere in lubricant.The result is shown in figure 10.
Be appreciated that among embodiment A 1～A3 from Fig. 9, compare, show the permanance of enough lubricating films with the Comparative examples A 1 of irradiating laser not.
In addition, be appreciated that among embodiment A 1～A3, compare, obviously improved the concentration (face adsorption density) that is fixed on the lubricant on the base material with Comparative examples A 1 from Figure 10.Because quality analysis is carried out in a vacuum, promptly can not evaporate with the unconjugated lubricant of base material so carry out the lubricant of the substrate surface of Laser Processing.Therefore, think that the thickness of lubricating film of Comparative examples A 1 (laser intensity 0) is less than the thickness of the lubricating film of the Laser Processing among embodiment part.And think that in an embodiment, through Laser Processing, diaphragm diamond-like-carbon and lubricant molecule react securely, compare with comparative example, have produced the densification of the face adsorption density of lubricant molecule.
(the 2nd embodiment)
For simplicity, the method that only on the part of the slipping plane of the slide mass on the simple flat board, forms lubricating film is described.
(lubricant applying operation)
According to Figure 11 the base material as process object is described.Base material 10 have with other parts between slide etc. contact, or the slipping plane S of the sort of possibility is arranged.Do not limit the material of base material 10 is special.For example, can enumerate the metal of aluminium, aluminium alloy, titanium etc., the metal oxide of aluminium oxide etc., aluminium titanium carbon (Al 2O 3-the pottery that TiC) waits; The inorganic material of silicon, glass, material with carbon element (agraphitic carbon) etc., and polyethylene terephthalate, polyimide, polyamide, polycarbonate, polysulfones, PEN, PVC, contain the macromolecular compound etc. of the polyolefin etc. of cyclic hydrocarbon group.In addition, these substrate surfaces can be through sputter, vacuum evaporation etc. physical vapor deposition (PVD:physical vapordeposition), or formation such as plating be selected from the film more than a kind of NiP, NiP alloy, other alloy.Certainly much less base material 10 also can be sandwich construction.
In addition, in this embodiment,, explain that using the carbon of being processed by CVD (chemicalvapor deposition) method is the situation of diaphragm diamond-like-carbon (agraphitic carbon) as base material 10 as an example.
On the surface of base material 10, there is the terminal key that is called as dangling bonds 12 usually.The 12a that do not combine with other atom, the 12b that combines with the OH base are arranged in this dangling bonds 12, with the 12c of hydrone formation hydrogen bond (absorption) etc.Certainly, the situation that combines (absorption) with the molecule beyond these is also arranged.
Such dangling bonds 12 does not exist only in the material with carbon element, in all solids material, can find its existence, and is particularly remarkable especially in the strong material of covalent bond property.
Preferably before the lubricant applying operation, through heated substrate 10 (for example, 80～200 ℃, more than 30 minutes), (for example, wavelength 50～350nm) perhaps, remains under the reduced atmosphere (for example, 1 * 10 with base material 10 in the surface irradiation ultraviolet ray of base material 10 -1Below the Torr) or inert gas atmosphere under under (for example, nitrogen, argon gas etc.) or the low-humidity environment (for example, below the RH10%) etc., and the molecule that is combined on the dangling bonds 12 (for example water etc.) or functional group (for example OH base etc.) are broken away from.Heating or ultraviolet irradiation are preferred to carry out in a vacuum or in the inert gas of nitrogen or argon gas etc. or under the low-humidity environment (below the RH10%).Certainly, though be combined in the molecule on the dangling bonds or functional group is residual also can embodiment of the present invention.In addition, preferably the intensity of heating-up temperature or UV irradiation is not set at and can brings the degree of infringement to base material.In addition, also preferably remove surperficial organism etc. through ozone treatment.
Then, according to Figure 12, the operation that application of lubricating 21 on the surface of base material 10 is formed lubricating layer 20 describes.In fact also there is situation about combining with the OH base shown in figure 11 in states that the dangling bonds on surface of base material 10 of in Figure 12, having drawn does not all combine with other atom, but this is in order to simplify and with the situation of hydrone formation hydrogen bond (absorption) etc.
As lubricant 21, get final product so long as have the compound of the OH base that combines with carbon atom.The notion of the said here OH base that combines with carbon atom is included in carboxyl (COOH) or the OH base that is comprised in the functional group of the complicacy of phenylol etc.
As such lubricant 21; Except hydro carbons, can also enumerate alcohols (for example, erucyl alcohol, ricinoleyl alcohol, eicosanol, octanol, decyl alcohol, polyolefin alcohol, 2-Ethylhexyl Alcohol, PAG etc.) with the OH base that combines with carbon atom; Carboxylic acids (for example; Fat formula carboxylic acid, aromatic carboxylic acid, oxo carboxylic acid etc.), have the ester class (for example, having the basic thioesters of the OH that combines with carbon atom, phosphate, nitrate etc.) of the OH base that combines with carbon atom; Ethers with the OH base that combines with carbon atom (for example; Have the polyphenylene oxide, dimethyl ether, ethyl-methyl ether, diethyl ether of the OH base that combines with carbon atom etc.), have the halogenated organic compounds (for example, having the basic halogenated ethers of the OH that combines with carbon atom, halohydrin, halogenation carboxylic acid etc.) of the OH base that combines with carbon atom.The fluorinated organic compounds that especially preferably has the OH base that combines with carbon atom; For example; Can enumerate; Have the perfluorinated polyether etc. of the OH base that combines with carbon atom fluorinated ether, fluorinated alohol, fluorinated carboxylic with the OH base that combines with carbon atom, have the OH base that combines with carbon atom fluorinated carboxylic alkanol ester, have the OH that combines with carbon atom basic fluoridize the diester dicarboxylic acid compound, have the OH that combines with carbon atom basic fluoridize monoesters monocarboxylic acid compound etc.Wherein, especially preferably has the chain fluorinated organic compounds of the OH base that combines with carbon atom, preferred especially chain fluorinated ether.
Especially; In fluorinated ether with the OH base that combines with carbon atom; The fluorinated polyether that preferably has the OH base that combines with carbon atom, especially preferably be known as the formula (1) of Fomblin Z compound, be known as the formula (2) of Fomblin Y compound, be known as the formula (3) of Krytox compound, be known as Demnum formula (4) compound etc. have the basic chain fluorinated polyether of OH that combines with carbon atom endways.
X-CF 2-O(-CF 2-CF 2-O-) m(-CF 2-O-)nCF 2-X (1)
X-CF 2-O(-CF(CF 3)-CF 2-O-) m(-CF 2-O-) nCF 2-X (2)
X-CF 2-O(-CF(CF 3)-CF 2-O-) mCF 2-CF 2-X (3)
X-CF 2-CF 2-O(-CF 2-CF 2-CF 2-O-) mCF 2-X (4)
Here, m, n represent the integer more than 1 respectively.X is selected from-CF 3,-CH 2-OH ,-CH 2(O-CH 2-CH 2-) p-OH ,-CH 2-O-CH (OH)-CH 2Any functional group of-OH, at least one in each compound possesses the functional group with OH base.Here, P representes the integer more than 1.The molecular weight of chain fluorinated polyether is not special to be limited, but its center molecular weight is preferably 500～4000 degree.
In addition, lubricant 21 also can comprise the compound with the OH base that combines with carbon atom, for example solvent etc.
The coating of such lubricant 21 can utilize known method to carry out, and for example, carries out through vacuum vapour deposition, PVD method, CVD method, infusion process (dip method), spin-coating method, spraying process etc.In addition; When the surface of the base material before the lubricant applying 10 being carried out in a vacuum or the cleaning when handling of heating in the inert gas or ultraviolet ray irradiation etc.; For the surface that prevents the base material 10 of being cleaned when the coating by the oxygen in the atmosphere, moisture or reactive high other impurity pollutions such as (pollutant contaminants), preferably in a vacuum or carry out this coating in the inert gas.
Here, the thickness of the lubricant layer 20 that obtains through the coating lubricant 21 is limited especially, but for make infrared laser arrive especially efficiently base material 10 and lubricant layer 20 the interface and near, be preferably the following degree of 2nm.In the situation that multi-photon absorbs, do not limit thickness is special.
(laser radiation operation)
Then, to the only part on the surface of the substrate 10 that is coated with above-mentioned lubricant 21, the laser radiation operation of shining infrared laser for the vibration of the OH key that excites the OH base describes.
At first, infrared laser is described.The OH key is because the easy absorption shown in figure 13 infrared light of the wavelength of 0.9～8 μ m degree roughly, so preferred irradiation can absorb the infrared laser corresponding to the energy of this wavelength 0.9～8 μ m.In Figure 13, dotted line b is a baseline, and solid line a is the absorption intensity that causes owing to the basic OH key of OH.Preferred especially irradiation can absorb the infrared laser corresponding to the energy of the wavelength of 0.9～1.2 μ m (the W2 scope of Figure 13), 2.7～3.0 μ m (the W1 scope of Figure 13).
Particularly, under the situation of 1 photonic absorption, for example, the infrared laser of the wavelength of 0.9～8 μ m can be shone, especially, the infrared laser of the wavelength of 0.9～1.2 μ m or 2.7～3.0 μ m can be shone.On the other hand, under the situation that the multi-photon that absorbs the photon more than 2 absorbs, can utilize the infrared laser of provision wavelengths and absorb infrared laser, the infrared laser of the wavelength of preferred 0.9～1.2 μ m or 2.7～3.0 μ m corresponding to wavelength 0.9～8 μ m.For example, can be simultaneously or continuously the energize sum at a plurality of photons of above-mentioned energy range.That is, in the situation that multi-photon absorbs, the light of the wavelength that irradiation is longer than the situation of 1 photonic absorption.
Do not limit the illuminating method of infrared laser is special, for example, can the LASER Illuminator System LS1 of example shown in Figure 14 (a).Can make laser L become directional light with collimating apparatus 52, and after making the intensity distributions homogenising in the face with homogenizer 54, the lubricant 21 of lubricant layer 20 is shone from LASER Light Source 50.This form is particularly suitable for utilizing 1 photonic absorption to excite the situation of the vibration of OH base.Can enumerate carbon dioxide laser, YAG laser etc. as LASER Light Source 50.
Here; As the known homogenizers such as homogenizer that homogenizer 54 can adopt homogenizer that 2 combination of lensess are formed or use diffraction grating to form, preferably can make intensity distributions in the face of Gaussian distribution type become the homogenizer of the interior intensity distributions of enough smooth face.
In addition, for for the incident angle of the laser of lubricant layer 20,90 ° shown in Figure 14 (a) is the most effective, but is being necessary to prevent reflected light and during the light source that needs protection etc., can make incident angle is 30～60 °.
To the some footpath of the lubricant layer 20 and the infrared laser of base material 10 irradiations, can be corresponding with the area of lubricant layer 20.In addition, when irradiated area is very big, also can make light beam spot that lubricant layer 20 is carried out relative scanning.
In addition, also can consider LASER Illuminator System LS2 shown in Figure 14 (b).The multi-photon that this irradiation system is particularly suitable for 2 photonic absorption etc. absorbs.To utilize 2 dimension scanning opticss 56 to scan through the laser that collimating apparatus 52 becomes directional light, the laser after the scanning is through object lens 58 optically focused, and with on the surface of base material 10 or the part of base material 10 sides in the lubricant layer 20 mode that forms focus shine.Thus, can be near the irradiation of the part concentrated area lubricant 21 median surfaces infrared laser.
2 dimension scanning opticss 56 for example by 2 Electronic Speculum formula scanner formations such as (galvano-mirrorscanner), are being carried out two-dimensional scan to the laser point on the lubricant layer 20 by not shown scanner driver control on the base material.In addition, also can scan in the base material side.
Can be above-mentioned light source as LASER Light Source 50, but absorb, the LASER Light Source of the ultra-short pulse laser of preferred use supply femtosecond laser etc. in order to carry out multi-photon.
In addition, in any situation, the exposure intensity of infrared laser is not all had special the qualification, but, be preferably 60J/cm in order to reduce influence to the influence of base material and the evaporation of lubricant etc. 2Below, in order to cause sufficient vibrational excitation, be preferably 0.01mJ/cm 2More than.The bond energy of OH base is 428～510kJ/mol degree; Must surpass its energy in order to cut off the OH key; But if energy too highly then can produce the evaporation of lubricant, unwanted reaction, to the problem of the damage of base material etc., so the laser radiation ability need be carried out optimization according to each sample.
When irradiated with pulse laser during, be 60J/cm through the exposure intensity that makes laser as infrared laser 2Below, making pulse width is 0.1～1ms, and making umber of pulse is 1～10, and making pulsed frequency is 10～50Hz, and the unwanted temperature that can suppress the laser treatment part rises, thereby preferred.
In addition, LASER Light Source also can be for a plurality of.
So,, excite the vibration of OH key of the OH base of lubricant 21 through shining such infrared laser.Therefore, the OH of lubricant 21 base improves with the reactivity on the surface of base material 10, and lubricant 21 is combined in the surface chemistry of base material 10.
Especially,,, can optionally carry out the heating of OH base, therefore can effectively heat, in addition, can carry out the short time and handle with less energy owing to compare with UV processing etc. with heat treated by such immobilization that infrared laser carries out of passing through.Thereby can reduce evaporation of hot deterioration, thermal deformation, unwanted thermal decomposition, material etc.In addition,, especially, can optionally handle the surface portion of base material according to 2 photonic absorption of using the device shown in Figure 14 (b), thus more effective.
Then, explain laser only is radiated at the method on the part on surface of base material 10.
At first shown in Figure 12 and Figure 14 (a), the method for configuration mask M between LASER Light Source 50 and lubricant layer 20.According to this method, can make laser radiation to the lubricant of part optionally carry out covalent bond with the dangling bonds of substrate surface, only therefore can easily obtain fixing lubricating film on the part on the surface of base material.
In addition, through the LASER Illuminator System LS2 shown in Figure 14 (b), also can only on the part of base material 10, shine the laser of optically focused.
And, also can be shown in figure 15, diaphragm (mask) 28 is set on base material 10, application of lubricating 21 above that, after forming lubricant layer 20, to all irradiating lasers in the surface of base material 10.According to such method, clearer and more definite by lubricating film and the border between the base material that laser radiation forms, thereby preferred.
As the constituent material of such diaphragm 28, for example, can enumerate the agraphitic carbon based material, the stupalith of aluminium oxide, titanium carbide etc., non-ferrous metal based material, the photoresist of polymer class etc.
The diaphragm 28 that comprises such constituent material for example, can form through the known method of vapour deposition method (CVD method, PVD method), spraying process, spin-coating method, dip coated method etc.
In addition, such diaphragm 28, after the laser radiation operation, for example, physical etchings, chemical etching that can be through air blast processing, plasma treatment etc., the known method of peeling off etc. are removed.
Then, investigate according to the state of the lubricant 21 of Figure 16 after laser radiation.The lubricant 21 of the part that laser radiation is arrived, because the vibration of the OH key of OH base is excited, so the OH base is activated, and causes dissociating of O and H etc., thereby combines with base material 10 surperficial dangling bonds 12 easily.Thereby the lubricant 21 of the part that laser radiation is arrived via combining through covalent bond 24 with the dangling bonds 12 on base material 10 surfaces from the basic O atom of OH, forms the molecule 23 that constitutes lubricating film 30.In addition, constituting the molecule 23 of lubricating film 30, is the residue of having removed the H atom in the OH base that combines with carbon atom of lubricant 21.Therefore, when lubricant 21 was fluorinated organic compounds, the molecule 23 that constitutes lubricating film 30 obviously had the organic group that comprises a plurality of fluorine atoms.
Here; Shown in figure 16; There is lubricant layer 20 in the surface that is formed with part and the inchoate part of lubricating film 30 base material 10 lip-deep on the two; And between part that is formed with lubricating film 30 and inchoate part, with the surface height state much at one of lubricant layer 20 as state A.
In addition, the lubricating film 30 that is formed by above-mentioned method is preferably a plurality of dot patterns (dotpattern), and preferably its some footpath is 0.9～100 μ m.And, never excessively hindering the viewpoint of the flowability of lubricant and set out, the density that is formed with the dot pattern on the part of dot pattern is preferably 5～50%.About the shape of point, not special the qualification can be enumerated for example circle, and ellipse is square, irregular figure etc.
In addition,, can be only on the part on the surface of base material 10, intactly form, also can form a plurality of dot patterns in the part on the surface of base material 10 or all by the formed lubricating film 30 of above-mentioned method.
Like this, obtain only on the part of slipping plane, being formed with the slide mass of lubricating film 30.
(cleaning process)
Then, the cleaning process that explanation is carried out as required according to Figure 17, that is, lubricant 21, unwanted accessory substance and impurity, the free oil of from lubricating film 30, removing surface beyond the molecule 23 that constitutes lubricating film 30, that be not fixed on base material 10 grade.
Cleaning can be through using fluorine series solvent, ether, hexane, alcohol etc. organic solvent or water, CO 2The cleansing medium of (gas, supercritical fluid) etc., and these cleansing mediums are contacted with lubricating film 30 carry out.When cleaning, also can give ultrasonic vibration to lubricating film 30.
In addition, be fundamental purpose if remove lower-molecular substance, also can lower-molecular substance be volatilized clean through vacuumizing or heating.Thus, be formed on surperficial loose lubricant 21 less state of base material 10.Do not limit the thickness of the lubricating film 30 after cleaning is special, but be preferably below the 2nm.
In addition; Also can (for example after cleaning, pass through the residual lubricant 21 of heating as required; 80～200 ℃, more than 30 minutes) or, remaining the OH base or the functional group in addition of lubricant 21 are combined with the dangling bonds 12 of base material 10 through to lubricant 21 irradiation ultraviolet radiations.
Here, with the state of having removed the lubricant 21 beyond the lubricating film 30 shown in figure 17 as state B.
(lubricant is painting process again)
Further specify as required and the lubricant that carries out painting process again, that is, the surface of the base material 10 behind cleaning process is application of lubricating 21 once again.
The coating again of lubricant is carried out through the known method of for example vapour deposition method (CVD method, PVD method), spraying process, spin-coating method, dip coated method etc.
Through being lubricated the coating again of agent like this, can on base material 10, be formed on surperficial irregular lubricant layer 20.
Here, shown in figure 18, following state is called state C, that is, on the surface of lubricant layer 20, exist the part of lubricating film 30 more outstanding than there not being the part of lubricating film 30.
Like this, accomplish the lubricating film formation method of preferred implementation of the present invention.
Here, for simplicity, the slide mass on the simple flat board only has been described; But, so long as the parts that contact or that this possibility is arranged that slide etc. with other parts just do not have special qualification to slide mass; As its concrete example, can enumerate bearing, for example with slipping plane; Sliding bearing, rolling bearing etc., perhaps magnetic recording media in the hard disk drive of following detailed description and head-slider.
[hard disk]
Then, the situation that above-mentioned embodiment is applied in the hard disk is described.
Figure 19 is the formation synoptic diagram of the hard disk drive D of this embodiment.Magnetic recording media 40 and the head-slider 60 stated after hard disk D possesses; Magnetic information is write the slipping plane (upper surface of Figure 19) of the magnetic recording media 40 of high speed rotating by head-slider 60; In addition, read magnetic information by head-slider 60 from the slipping plane of magnetic recording media 40.
In Figure 19, hard disk D mainly possesses: around a plurality of discoideus magnetic recording media 40 of axle 2 rotations; Carry out head-slider 60 to the read-write of magnetic recording media 40; Be used for assembling supporting part (assembly carriage) 3 that head-slider 60 is located on the magnetic track of magnetic recording media 40; Be used for writing of control head slide block 60 and read the read/write circuit 4 of action; The sensor part 15 of the information of the acceleration that detection hard disk D is relevant etc.; The clearance control portion 16 at the interval between control head slide block 60 and the magnetic recording media 40; The portion of keeping out of the way 17 of keeping out of the way part for head-slider 60; And the housing 19 that covers them.
Assembling supporting part 3 is provided with a plurality of arms 5.These arms 5 can be through voice coil motor (VCM) 6 is that angular oscillation is carried out at the center with axle 7, and arm 5 is being piled up along this direction of 7.Leading section at each arm 5 is equipped with head suspension assembly (head gimbal assembly) 14.At the front end of each head suspension assembly 14, relatively be provided with head-slider 60 with the surface of each magnetic recording media 40.Here, with on the head-slider 60 and surperficial relative face magnetic recording media 40 as the air bearing ABS.Magnetic recording media 40 can be odd number, and arm 5 also can only be configured on the face with respect to a magnetic recording media 40.
When assembling supporting part 3 made arm 5 rotations, head-slider 60 was towards the radial direction of magnetic recording media 40, and promptly the direction of crosscut magnetic track line moves.In addition, assembling supporting part 3 can make arm 5 rotations according to the signal from the outside, and makes head-slider 60 keep out of the way portion 17.
[magnetic recording media]
Then, the magnetic recording media 40 to this embodiment describes.Shown in the partial section of Figure 20, magnetic recording media 40 has with following order and basalis 126, magnetic recording layer 129, diaphragm 127 is arranged and be formed on the structure of the lubricating film 128 on the part on surface of diaphragm 127 in substrate 125 laminated.
Material as substrate 125; For example, can example glass, aluminium, Al is alloy glass, plastics, pottery, carbon, silicon, has the Si monocrystal substrate of oxidized surface etc., in addition; In the situation of flexible plastic disc medium or tape-shaped medium's, can example gather the synthetic resin of acetate fiber etc.
About the not restriction of the material of basilar memebrane 126, hard disk can example Cr in the situation of magnetic recording media, Ni-P etc.And, as the material of basilar memebrane 126, in the situation of horizontal magnetic recording media, can enumerate the nonmagnetic substance of Cr alloy etc., in the situation of perpendicular magnetic recording medium, can enumerate soft magnetic material of material of containing Fe, Ni, Co etc. etc.Especially; In the situation of perpendicular magnetic recording medium; For the crystallinity that improves the soft magnetism basalis or the adhesiveness of raising and substrate, can under the soft magnetism basalis, further have by Ti, Ta, W, Cr, Pt or comprise their alloy, perhaps the basalis that forms such as the material of their oxide, nitride etc.; In addition; Centre between soft magnetism basalis and recording layer can have by Ru, Pt, Pd, W, Ti, Ta, Cr, Si or comprises their alloy, perhaps the middle layer that forms of the nonmagnetic substance of their oxide, nitride etc.
As the material of magnetic recording layer 129, for example can enumerate with Co be major component, at least contain Pt, as required contain Cr material, or further contain the material etc. of oxide.
As the material of diaphragm 127, for example can enumerate the material with carbon element of the diamond-like-carbon etc. of 1～10nm degree.Here, the surface of diaphragm 127 is equivalent to above-mentioned " surface of base material ".
And lubricating film 128 is corresponding to above-mentioned lubricating film 30.Do not limit for the molecule that constitutes lubricating film 30 is special, but especially preferably have the organic group of a plurality of fluorine atoms of the residue etc. of the H atom that comprises that the OH that removed the chain fluorinated polyether that has the OH base that combines with carbon atom endways is basic.In addition, constitute not special qualification of molecular weight of the molecule of lubricating film 30, but preferably its center molecular weight is 500～4000 degree.
In the magnetic recording media 40 of Figure 20, lubricating film 128 does not have lubricant layer shown in the state B of Figure 17, but can shown in the state C of the state A of Figure 16 and Figure 18, have lubricant layer yet.
Then, describe at the preferred site that magnetic recording media 40 forms lubricating film 128 being used for.
(a) of Figure 21, (c), (d) look the planimetric map that contact start stops the magnetic recording media 40 of (CSS) mode sideways from slipping plane.In addition, the magnetic recording media of CSS mode is meant to be provided with head-slider and the contacted CSS of magnetic recording media zone 33 when the disk rotation stops
The magnetic recording media of (being equivalent to the radial direction inside portion).
The magnetic recording media 40 of this embodiment preferably also has data portion 32 (being equivalent to the radial direction central portion) and peripheral part 31 (being equivalent to the radial direction outside portion) except CSS zone 33, be formed with lubricating film as a plurality of dot patterns on the arbitrary region therein.
(b) of Figure 21 is the enlarged drawing of dot pattern, and some footpath d is preferably 0.9～100 μ m.Shape about point has been divided into circle, but be not limited thereto in (b) of Figure 21, for example, and also can be for oval, square, irregular figure etc.
Shown in Figure 21 (a), on data portion 32, be formed with among the magnetic recording media 40A of lubricating film 128 as a plurality of dot patterns, can obtain the effect of following (1)～(4).
Therefore (1) lubricating film 128 has enough permanance, can fully prevent when magnetic recording media 40 contacts and slides with head-slider 60, comes off from slipping plane owing to vibrate or impact etc. makes lubricating film 128.(2) thus since lubricating film 128 to be that a plurality of dot patterns form on slipping plane concavo-convex; Reduce the area that might contact between magnetic recording media 40 and head-slider 60, therefore can prevent friction and loss when magnetic recording media 40 contacts with head-slider 60.(3) thus because lubricating film 128 is concavo-convex for a plurality of dot patterns have formed, also be difficult to the drying effect of adhering to even therefore can obtain under many humidity environments water droplet on slipping plane.(4) as also can be from can collection of thesis B66-644 by the Japanese mechanics of work such as gold; Inferred in 139 (2000); By drying effect illustrated in (3),, therefore can obtain the stability of floating of head-slider 60 with the resistance to flow that reduces between magnetic recording media 40 and the head-slider 60.
Shown in Figure 21 (c), in CSS portion 33, be formed with among the magnetic recording media 40B of lubricating film 128 as a plurality of dot patterns, same with the situation of magnetic recording media 40A, also can obtain (1)～effect of (4).
Shown in Figure 21 (d), in peripheral part 31, be formed with among the magnetic recording media 40C of lubricating film 30 as a plurality of dot patterns, same with the situation of magnetic recording media 40A, also can obtain (1)～effect of (4).
The (a) and (b) of Figure 22 are planimetric maps of looking the magnetic recording media 40 of loading and unloading mode from slipping plane sideways.In addition; The magnetic recording media of loading and unloading mode; Be meant when the rotation of disk stops head-slider 60 is shelved on the inclined-plane (ramp) (not shown) that is positioned at the more lateral than the most peripheral of magnetic recording media 40, thus the magnetic recording media that head-slider 60 is kept out of the way from magnetic recording media 40.On the zone of most peripheral, be provided for making the head-slider 60 of landing to drop to landing zone (the landing zone) 34 (being equivalent to the radial direction outside portion) that does not write data on the magnetic recording media 40 from the inclined-plane.
The magnetic recording media 40 of this embodiment also has data portion 32 (being equivalent to radial direction central portion and inside portion) except landing the zone 34, preferably is formed with lubricating film 128 as a plurality of dot patterns on the arbitrary zone in these.
Shown in Figure 22 (a), on data portion 32, be formed with among the magnetic recording media 40D of lubricating film 128 as a plurality of dot patterns, same with the situation of magnetic recording media 40A, also can obtain (1)～effect of (4).
Shown in Figure 22 (b), on landing zone 34, be formed with among the magnetic recording media 40E of lubricating film 128 as a plurality of dot patterns, same with the situation of magnetic recording media 40A, also can obtain (1)～effect of (4).
Be formed with the magnetic recording media 40 of lubricating film 128 as a plurality of dot patterns; Shown in the state C of the state A of Figure 16 and Figure 18; Preferred further on part that does not have dot pattern on the slipping plane and surface at dot pattern, have the lubricant layer that lubricant molecule and slipping plane physisorption form.
Thus, through adjustment dot pattern and density thereof, can utilize the flowability of the lubricant 21 in the fixed effect adjustment lubricant layer 30 of dot pattern.In addition; Utilize above-mentioned fixed effect; Can prevent that thereby the centrifugal force that the rotation owing to magnetic recording media 40 produces from making lubricant 21 move the uneven thickness that makes lubricant layer 30, the lubricant 21 on the lubricant layer 30 of thick part moves and is attached to the situation on the head-slider.And, can suppress stickup (stiction) (head-slider is adsorbed on the phenomenon on the magnetic recording media) and lubricant and pick up (lubricantpick-up) (lubricant moves the phenomenon of absorption to head-slider from magnetic recording media).
And, under the situation of the lubricant layer 30 of the state C with Figure 18, have 30 layers of concavo-convex lubricants owing on slipping plane, be formed with, therefore suppress to paste and effect that lubricant is picked up high especially.
And; Like Figure 21 and shown in Figure 22; The zone that is formed with a plurality of dot patterns 128 only is set on the part on surface; And when in dot pattern formation portion and the non-formation of dot pattern portion, having lubricant layer 20, can form that portion (the for example CSS portion 33 of Figure 21 (c)) and dot pattern are non-to form the flowability that portion's (data portion 32, peripheral part 31) changes lubricant by dot pattern.
Manufacturing approach as the magnetic recording media 40 of above explanation; Can utilize known method after forming basalis 126, magnetic recording layer 129, diaphragm 127 on the substrate 125 in order, only on the part of slipping plane, form lubricating film 128 and get final product by the method that forms of above-mentioned lubricating film.
[head-slider]
Then, the head-slider 60 to this embodiment describes.Shown in the partial section of Figure 23, head-slider 60 has to be had basalis 116, diaphragm 117, is being formed on the structure of the lubricating film 118 on the part on surface of diaphragm 117 according to following sequential cascade on the substrate 115.
As the material of substrate 115, for example can enumerate aluminium oxide titanium carbide (Al 2O 3-TiC) the such stupalith of sintered body, aluminium oxide Al 2O 3Deng metal oxide, the metal material that Ti is such, the non-magnetic insulating material of non-metal inorganic material that Si, C are such etc.
As the material of basalis 116, can enumerate silicon, silicon nitride etc.
As the material of diaphragm 117, the material with carbon element of preferred agraphitic carbon (for example, diamond-like-carbon, graphitic carbon, hydrogenating carbon, add nitrogen carbon, fluorocarbon etc.) or the various carbon that add metal etc., WC, WMoC, ZrN, BN, B 4C, SiO 2, ZrO 2Deng inorganic material, for example, can form the thickness of 1～3nm degree.Here, the surface of diaphragm 117 is equivalent to above-mentioned " surface of base material ".
And lubricating film 118 is corresponding to above-mentioned lubricating film 30.Do not limit the molecule that constitutes lubricating film 30 is special, but especially preferably have the organic group of a plurality of fluorine atoms of the residue etc. of the H atom that comprises that the OH that removed the chain fluorinated polyether that has the OH base that combines with carbon atom endways is basic.In addition, to not special qualification of molecular weight of the molecule that constitutes lubricating film 30, preferably its center molecular weight is 500～4000 degree.
Then, utilize the stereographic map of head-slider shown in Figure 24 60 that the head-slider 60 of this embodiment is described.
The head-slider 60 of this embodiment mainly possesses the thin-film head 140 on slide block 150 and the end face that is formed on this slide block 150, and head-slider 60 forms essentially rectangular plate shapes.The face of the front side among Figure 24 is the magnetic recording media opposite face that the slipping plane with magnetic recording media 40 (with reference to Figure 19) relatively disposes, that is, and and air-bearing surface (Air Bearing Surface) ABS.The air bearing ABS is formed by slide block 150 and thin-film head 140.During magnetic recording media 40 rotations; The airflow that between magnetic recording media 40 and head-slider 60, forms owing to being accompanied by this rotation makes head-slider 60 float from the slipping plane of magnetic recording media 40, and the air bearing ABS separates from the slipping plane of magnetic recording media 40.In this embodiment, the air bearing ABS is corresponding with slipping plane.
Thin-film head 140 mainly possesses: the read element 72R that reads magnetic information from magnetic recording media 40; In magnetic recording media 40, write the write element 72W of magnetic information; Protect the covering part 65 of insulativity material system of the aluminium oxide lamp of these read elements 72R and write element 72W.In thin-film head 140, read element 72R is arranged near substrate 110 sides, and write element 72W is arranged on away from substrate 110 sides.
As read element 72R and write element 72W, can at random suitably utilize known elements respectively.For example, can use the MR element that utilizes magnetoresistance, for example GMR element, AMR element, TMR element etc. as read element 72R.In addition, as write element 72W, can use the electromagnetic conversion element of the induction type of magnetic loop that possesses the interval that is formed with regulation and the film coil that surrounds magnetic loop.
On the face 140a opposite in thin-film head 140, be formed with electrode pads 61a, 61b, 61c, 61d by following order with slide block 150.
And write element 72W is electrically connected with electrode pads 61a, 61b through connecting line (not shown), and read element 72R is electrically connected with electrode pads 61c, 61d through connecting line (not shown).
On the air bearing ABS of such head-slider 60, be provided with slot part 79,110 (being equivalent to the bottom), gasket part 73,74,75 (being equivalent to the 1st protuberance), superficial part 78 (being equivalent to the 2nd protuberance). Gasket part 73,75 is formed on the air bearing ABS of slide block 150.In addition; Gasket part 74 has sensor part (gasket part) 74b that on gasket part 74a that forms on the air bearing ABS of substrate 110 and the air bearing ABS at thin-film head 140, forms with from forming across the mode to the air-bearing surface of thin-film head 140 on the air-bearing surface of slide block 150.These gasket part 73,74,75 are outstanding to the slipping plane of magnetic recording media 40 from slot part 79,110.A part of on the surface of sensor part 74b, exposing read element 72R and write element 72W.
The projecting height from slot part 79,110 of gasket part 73,74,75 is identical mutually.
These gasket part the 73,74, the 75th are for the amount of the floating stabilization that makes the head-slider 60 on magnetic recording media 40 is provided with, for not special qualification of position, number, shape of gasket part.
In addition, on the air bearing ABS of head-slider 60, further be formed with the superficial part 78 on every side that is arranged on gasket part 73,75.Superficial part 78 is also outstanding to magnetic recording media 40 from slot part 79,110 equally with gasket part 73,74,75.The projecting height from slot part 79,110 of superficial part 78 is lower than the height of gasket part 73,74,75.
Then, according to planimetric map, Figure 25～28 of seeing head-slider 60 from the air bearing ABS, explain in head-slider 60, to be used to form lubricating film 118 preferred positions.
Form lubricating film 118 on head-slider 60 preferred arbitrary at least surfaces in superficial part 78, slot part 79,110, gasket part 73,74,75 and sensor part 74b of this embodiment.
Among the head-slider 60A that on superficial part 78, is formed with lubricating film 118 shown in figure 25, can obtain following (1), (2) effect.(1) magnetic head that when floating, causes attached to the superficial part that becomes air inflow end 78 owing to impurity (comprise from the lubricant of magnetic recording media 40 etc.) damages (head crash).(2) through lubricating film 118 is set on superficial part 78, the surface energy of air-bearing surface ABS is changed, cause thus changing, inclination angle that can the inching float state with the frictional resistance of air.Consequently, can improve the stability of floating of head-slider 60.
Shown in figure 26ly be formed with among the head-slider 60B of lubricating film 118, can obtain following (1), (2) effect at slot part 79,110.(1) becomes the absorption (FlyStiction) of the impurity (comprising lubricant from magnetic recording media 40 etc.) in the slot part 79,110 of negative pressure portion in the time of can preventing to float and accumulate.(2) through on slot part 79,110, lubricating film being set, the surface energy of air-bearing surface ABS is changed, reduce the frictional resistance with air thus, thereby can be suppressed at the generation of the turbulent flow in the slot part 79,110, can improve and float stability.
Among the head-slider 60C that on gasket part 73,74,75, is formed with lubricating film 118 shown in figure 27, can obtain following (1), (2) effect.The friction and the loss of the gasket part 73,74,75 that (1) can prevent to come in contact with magnetic recording media 40.Thus, can reduce the damage that the head-slider that causes owing to the reduction that produces loss powder or friction and contacting of magnetic recording disk cause.(2) can prevent to paste (stiction) (head-slider is adsorbed in the phenomenon of magnetic recording media), make head-slider 60 leave (Takeoff) from magnetic recording media 40 easily.
Among the head-slider 60D that on sensor part 74b, is formed with lubricating film 118 shown in figure 28, can obtain following (1), the effect of (2).(1) through when floating near on the high sensor part 74b of magnetic recording media 40 and the possibility that is in contact with it lubricating film 118 being set, can alleviate the damage of sensor part 74b.(2) (comprise from the lubricant of magnetic recording media 40 etc.) attached to the sensor part 74b that becomes the air outflow end, exists the magnetic recording media 40 and the interval of head-slider 60 to narrow down because impurity when floating, thus the problem that comes in contact.Be directed to this,, can reduce the surface energy of air bearing ABS on sensor part 74b, can prevent to paste (stiction) (head-slider is adsorbed on the phenomenon on the magnetic recording media) and magnetic head damage (head crash) through lubricating film 118 is set.
In addition, each above-mentioned lubricating film 118 can form dot pattern, also can intactly form.In addition, in the magnetic recording media 40 in Figure 23, lubricating film 118 does not have lubricant layer shown in the state B of Figure 17, but can shown in the state C of the state A of Figure 16 and Figure 18, have lubricant layer yet.
In addition, in the head-slider 60 in this embodiment, use laser to be lubricated the formation of film 30, therefore cause that owing to hot the situation of magnetic recording element 72W and magnetic read element 72R deterioration is less.
Manufacturing approach as such head-slider 60; Utilizing known method after forming magnetic head 140 on the substrate; Carry out the formation and the grinding of the relative ABS of medium; Utilize the known method of vapour deposition method (vacuum vapour deposition, sputtering method, CVD method etc.) etc. form basalis 116, diaphragm 117 thereafter.Then, also can this diaphragm 117 be implemented the formation method of above-mentioned lubricating film as base material.
[Embodiment B]
(Embodiment B 1～B3)
On the Co substrate, the thickness with 3nm under vacuum forms diamond-like-carbon as base material.On the part of this lubricant layer, form the photoresists (photo resist) of the opening of toroidal with a plurality of diameter 10 μ m with the thickness of 100nm.Use novolac resin as photoresists.Thereafter, application of lubricating makes its thickness reach the 1.2nm degree to form lubricant layer on the surface of base material.Use the Fomblin Z of (1) formula as lubricant.Thereafter, the pulsed infrared laser light (Nd-YAG laser) with wavelength 1.064 μ m is radiated on the lubricant layer.The pulse width of laser is 0.3ms.In addition, laser radiation intensity according to the order of Embodiment B 1～B3 be respectively 9.6,11.6,13.5J/cm 2Like this, obtain having the sample substrate of lubricating film.
(Embodiment B 4)
Except the mask irradiating laser via the opening of the toroidal with a plurality of diameter 100 μ m replaces likewise implementing with Embodiment B 2, and obtaining sample substrate forming the photoresists on the part of lubricant layer.
(comparative example B1)
Except not the irradiating laser, likewise implement with Embodiment B 1, obtain sample substrate.
(evaluation)
The penetrator front end uses the diamond chip (diamond chip) of diameter 8 μ m, under the loading of 3.98mN, carries out the scratch hardness test of the lubricating film (the about 1.1nm of thickness) of each sample substrate.Then, measure the depth D and the width W of cut with the sweep type ellipsometer.The result is shown in figure 29.
In addition; For Embodiment B 3 and comparative example B1; To not carrying out the sample surfaces of scratch hardness test, carry out quality analysis with the secondary ion mass spectrometry meter (SIMS) of TOF type, obtain distinctive C-F key and the ratio that is present in the Co atom in the magnetic recording media magnetosphere in lubricant.The result is shown in figure 30.
Be appreciated that among Embodiment B 1～B4 from Figure 29, compare, show the permanance of enough lubricating films with the comparative example B1 of irradiating laser not.
In addition, be appreciated that among Embodiment B 1～B4, compare, obviously improved the concentration (face adsorption density) that is fixed on the lubricant on the base material with comparative example B 1 from Figure 30.Because quality analysis is carried out in a vacuum, promptly can not evaporate with the unconjugated lubricant of base material so carry out the lubricant of the substrate surface of Laser Processing.Therefore, think that the thickness of lubricating film of comparative example B1 (laser intensity 0) is less than the thickness of the lubricating film of the Laser Processing among embodiment part.And think that in an embodiment, through Laser Processing, diaphragm diamond-like-carbon and lubricant molecule react securely, compare with comparative example, have produced the densification of the face adsorption density of lubricant molecule.

Claims (35)

1. a lubricating film formation method is characterized in that,
Possess: have the operation of the lubricant of OH base in the surface coated of base material, and the laser radiation operation of infrared laser of vibration that the said lubricant irradiation of coating is excited the OH key of said OH base,
Said lubricant is the chain fluorinated polyether that has the OH base endways,
In said laser radiation operation, the infrared laser of illumination wavelength 0.9～1.1 μ m or wavelength 2.7～3.0 μ m.
2. lubricating film formation method as claimed in claim 1 is characterized in that,
In said laser radiation operation, carry out multi-photon and absorb, and shine said infrared laser so that on the part of base material side described in the surperficial or said lubricant of said base material, form the focus of said infrared laser.
3. lubricating film formation method as claimed in claim 1 is characterized in that,
Use has seen through the infrared laser of homogenizer as said infrared laser.
4. like each described lubricating film formation method of claim 1～3, it is characterized in that,
Said lubricant forms the layer of the thickness below the 2nm.
5. like each described lubricating film formation method of claim 1～3, it is characterized in that,
The exposure intensity of said infrared laser is 60J/cm 2Below.
6. like each described lubricating film formation method of claim 1～3, it is characterized in that,
The irradiation pulsed infrared laser is as said infrared laser, and the intensity of laser is 60J/cm 2Below, pulse width is 0.1～1ms, and umber of pulse is 1～10, and the frequency of pulse is 10～50Hz.
7. like each described lubricating film formation method of claim 1～3, it is characterized in that,
In irradiation during said infrared laser, the surface temperature of said base material is maintained below 200 ℃.
8. like each described lubricating film formation method of claim 1～3, it is characterized in that,
The surface of said base material is formed by material with carbon element.
9. the manufacturing approach of a magnetic recording media is characterized in that,
Lubricant to the surface that is coated on magnetic recording media carries out each the described lubricating film formation method like claim 1～3.
10. the manufacturing approach of a head-slider is characterized in that,
Lubricant to the surface that is coated on head-slider carries out each the described lubricating film formation method like claim 1～3.
11. a lubricating film formation method is characterized in that,
Possess: the operation that has the lubricant of the OH base that on carbon atom, combines in the surface coated of base material; And only to the part on the surface of the base material that is coated with said lubricant; Irradiation excites the infrared laser of the vibration of the basic OH key of said OH; Only on the part on the surface of said base material, form the laser radiation operation of lubricating film
Said lubricant is the chain fluorinated polyether that has the OH base endways,
In said laser radiation operation, the infrared laser of illumination wavelength 0.9～1.1 μ m or wavelength 2.7～3.0 μ m.
12. lubricating film formation method as claimed in claim 11 is characterized in that,
In said laser radiation operation, carry out multi-photon and absorb, and shine said infrared laser so that form the focus of said infrared laser in the part of base material side described in the surface of said base material or the said lubricant.
13. lubricating film formation method as claimed in claim 11 is characterized in that,
Use has seen through the infrared laser of homogenizer as said infrared laser.
14. each the described lubricating film formation method like claim 11～13 is characterized in that,
The layer of said lubricant that is coated on the surface of said base material is the thickness below the 2nm.
15. each the described lubricating film formation method like claim 11～13 is characterized in that,
The exposure intensity of said infrared laser is 60J/cm 2Below.
16. each the described lubricating film formation method like claim 11～13 is characterized in that,
The irradiation pulsed infrared laser is as said infrared laser, and the intensity of said pulsed infrared laser is 60J/cm 2Below, pulse width is 0.1～1ms, and umber of pulse is 1～10, and the frequency of pulse is 10～50Hz.
17. each the described lubricating film formation method like claim 11～13 is characterized in that,
In said laser radiation operation, the surface temperature of said base material is maintained below 200 ℃.
18. each the described lubricating film formation method like claim 11～13 is characterized in that,
The surface of said base material is formed by material with carbon element.
19. each the described lubricating film formation method like claim 11～13 is characterized in that,
Said lubricating film is a plurality of dot patterns.
20. lubricating film formation method as claimed in claim 19 is characterized in that,
The point of said dot pattern directly is 0.9～100 μ m.
21. each the described lubricating film formation method like claim 11～13 is characterized in that,
After said laser radiation operation, also possesses the cleaning process of removing the lip-deep lubricant that is not fixed on said base material.
22. lubricating film formation method as claimed in claim 21 is characterized in that,
After said cleaning process, further possess at the lubricant of the surface coated lubricant of said base material painting process again.
23. a slide mass is characterized in that,
Through carrying out lubricating film formation method as claimed in claim 11, only on the part of slipping plane, form lubricating film,
The molecule that constitutes said lubricating film has the C-O key,
The O atom of said C-O key and the atom of said slipping plane pass through covalent bonds,
The molecule that constitutes said lubricating film has the organic group that contains a plurality of fluorine atoms.
24. slide mass as claimed in claim 23 is characterized in that,
Said slipping plane is formed by material with carbon element.
25. slide mass as claimed in claim 23 is characterized in that,
Said lubricating film is a plurality of dot patterns.
26. slide mass as claimed in claim 25 is characterized in that,
The point of said dot pattern directly is 0.9～100 μ m.
27. slide mass as claimed in claim 25 is characterized in that,
On the surface of part that does not have said dot pattern on the said slipping plane and said dot pattern, has the lubricant layer that the physisorption lubricant molecule forms.
28. slide mass as claimed in claim 27 is characterized in that,
On the surface of said lubricant layer, exist the part of dot pattern more outstanding than there not being the part of dot pattern.
29. a magnetic recording media is characterized in that,
Possess like each described slide mass in the claim 23～28, and in said slide mass, have magnetic recording layer.
30. magnetic recording media as claimed in claim 29 is characterized in that,
Said slide mass is discoideus, and said lubricating film is formed in the discoideus said slipping plane, on arbitrary at least annular section of radial direction inside portion, radial direction central portion and radial direction outside portion.
31. a head-slider is characterized in that,
Possess like each described slide mass in the claim 23～28, have the magnetic recording element and/or the magnetic read element that are configured on the said slipping plane.
32. head-slider as claimed in claim 31 is characterized in that,
The 1st protuberance that the bottom is arranged on said slipping plane and give prominence to from said bottom possesses said lubricating film on the surface of any in said bottom and said the 1st protuberance.
33. head-slider as claimed in claim 31 is characterized in that,
The bottom is arranged on said slipping plane, from said bottom outstanding the 1st protuberance and be arranged on around said the 1st protuberance and be lower than said the 1st protuberance and be higher than the 2nd protuberance of said bottom, possess said lubricating film on any the surface at least in said the 1st protuberance, said bottom and said the 2nd protuberance.
34. head-slider as claimed in claim 31 is characterized in that,
On the surface of the sensor part that comprises said magnetic recording element and/or magnetic read element, possesses said lubricating film.
35. a hard disk drive is characterized in that,
Possess:
Possess as each described slide mass in the claim 23～28 and in said slide mass, have magnetic recording layer magnetic recording media and
Possess like each described slide mass in the claim 23～28 and have the magnetic recording element that is configured on the said slipping plane and/or the head-slider of magnetic read element.
CN 200710104888 2006-05-24 2007-05-24 Lubricating film forming method, slipping body with the lubricating film, magnetic recording medium, magnetic head slider and hard disk drive Expired - Fee Related CN101079270B (en)

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