CN101070593A - Ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system - Google Patents
Ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system Download PDFInfo
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Abstract
The invention relates to a preparation system of supersonic atomization thermal decomposition compound semiconductor thin film, which is used to prepare the semiconductor thin film of the oxide and the sulfide on the plane matrix. The system consists of atomization and deposit two major parts. Atomization part consists of the carrier gas source, stock solution pot, atomizing chamber and the corresponding electric circuit, while deposit part consists of sealing chamber, spray nozzle, warm table, the electrically operated transmission module, temperature control unit, vacuum manometer, and bubbling pond. Stock solution pot, atomizing chamber, spray nozzle, and sealing chamber are adopted unique design methods. The invention has the merits of cost lowly, operation stable, thin film quality to be good and so on, and the invention can apply to the scientific research and the industrial production of the oxide and the sulfide semiconductor thin film.
Description
Technical field
The invention belongs to the compound semiconductor film preparation field, relate to a kind of novel ultrasonic-atomizing heat-decomposing compound film preparing system.This system can be applicable to the preparation of the sulfide and the oxide semiconductor thin-film of low-cost and high-quality.
Background technology
Compound semiconductor film has in fields such as electron device, solar cell, functional materials, photoelectrochemistry hydrogen manufacturing widely to be used.And the compound semiconductor film of preparing low-cost and high-quality is the difficult problem of restriction related scientific research work and industrial technology development always.The preparation method of present most of semiconductor film materials generally is methods such as chemical vapor deposition (CVD), magnetron sputtering, vacuum evaporation, and these method apparatus expensive make preparation cost high.And the lower sol-gel method of relative cost, the semiconductor film poor-performing of chemical bath deposition method preparation.The spraying thermolysis film preparing technology that development in recent years is got up has characteristics such as cost is low, and film performance is better, has good development prospect.And the implementation of common spraying pyrolysis technique be by high pressure gas at the atomizing nozzle place with solution atomization, and inject directly on and form film on the matrix, the shortcoming of this atomizing type is that droplet is bigger and inhomogeneous, also wayward, therefore the roughness of film that forms is big, film forming is not fine and close, and generally can cause bad results such as in uneven thickness, that the center ratio is thick all around; Owing to adopt sustained firing, cause the composition thermolysis in the drop insufficient easily, the quality of film forming material is impacted (referring to M.Okuya et al.Solid State Ionics172 (2004) 527-531).In some spraying filming equipments, carrier gas too simply mixes inequality with the hybrid mode of droplet, thereby also causes uneven film thickness even in coating process easily.(referring to Chinese invention patent CN 1250823A)
Summary of the invention
The objective of the invention is to overcome above-mentioned prior art deficiency, a ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system is provided, this system can prepare the film that low cost, high quality, big area, thickness are accurately controlled, thereby provides favourable support for the research of oxide compound and sulfide semiconductor thin film material.
Technical scheme of the present invention is achieved in that
This system comprises container for storing liquid, spray chamber, sediment chamber and bubbling pond, the liquid outlet of container for storing liquid is connected with the fluid inlet of spray chamber, the inlet mouth of container for storing liquid and the liquid level line of spray chamber are on the same sea line, the air outlet of spray chamber is connected with the aerosol of sediment chamber inlet, the aerosol inlet is connected with shower nozzle, and the waste gas outlet of sediment chamber is connected with the bubbling pond.
Described container for storing liquid is a cylindrical vessel, the top is the fluid inlet of sealing, one inlet mouth is arranged on tank wall, intake port shape is " Δ " shape, and inlet mouth is close to tank skin outward a vertical pipe, and the bottom of vertical pipe is lower than inlet mouth, the pipe underseal closes, the space is connected with a jar interior space by inlet mouth in the pipe, and the upper end of vertical pipe extends tank deck, is connected to the liquid outlet of a band valve at the bottom of the container for storing liquid.
Described spray chamber middle part is a cylindrical cavity, top and the bottom are respectively upwards tapered configuration and the container of tapered configuration cavity downwards, near the bottom one fluid inlet is arranged, the bottom is equipped with atomizing piece, and the pore more than at least six is arranged on the wall more than the liquid level, lines up a circle with equal intervals, the spray chamber internal space communicates with the annular airway that is enclosed within container outer wall by pore, inlet mouth is communicated with airway, and airway is communicated with the spray chamber internal cavities by pore, and the spray chamber top is the aerosol outlet.
Described shower nozzle inside is a cylindrical cavity, and inlet mouth is between the internal cavities being one section increaser, and the shower nozzle bottom is a slit.
Described sediment chamber is a sealing chamber, the top, sediment chamber is an operation aperture, sidewall has a maintenance opening, two openings are flange arrangement, sediment chamber's sidewall has a fog import, there is a waste gas outlet in sediment chamber bottom centre, fog import and waste gas outlet all are connected to Vacuum ball valve outside the sediment chamber, the bleeding point and the inlet mouth that also have two band vacuum valves on sediment chamber's sidewall, warm table, screw rod, shower nozzle, contact switch and electric motor are all in deposition chamber interior, and screw rod is installed in directly over the warm table, and shower nozzle is installed on the slide block of screw rod, contact switch has been installed in upper end, the both sides of screw rod, and the contact switch position is along regulating on the screw axial.
The pipeline cross section of the conveying fog between from the spray chamber to the shower nozzle all is circular, from the spray chamber internal space to one section reducing pipe is arranged the air outlet, it is constant that internal diameter of the pipeline between the inlet mouth from the air outlet to the shower nozzle keeps, and one section increaser is arranged from the inlet mouth to the internal cavities.
Because in the ultrasonic atomizatio process, the height value of bottom transducing pitch of fins liquid level has a significant impact atomizing intensity, so need in atomization process, keep the liquid level value stabilization, the present invention has designed the container for storing liquid that can keep level stability, liquid level in the spray chamber can be adjusted automatically remain on the Metacentre Height.Droplet and carrier gas blended degree of uniformity have a significant impact film forming quality, and the present invention has designed inlet mouth, make spray chamber can stably export the aerosol that concentration stabilize, droplet are evenly distributed.The present invention adopts the process that mobile shower nozzle scans static matrix to carry out plated film.Use the flexible rubber pipe that the aerosol inlet is connected with shower nozzle in deposition chamber interior, make the shower nozzle can the freedom activity, and can vacuumize degasification the sediment chamber.Because waste gas may pollute atmosphere, so the bubbling pond of chemical solution is equipped with in utilization of the present invention waste gas is handled.
The constant level container for storing liquid that the present invention adopts can guarantee that liquid level is constant in the spray chamber, and atomization process is carried out under stable condition.Nozzle structure of the present invention can guarantee that fog with banded mist bundle ejection and difficult cohesion, improves the stability and the quality of forming film of system.The degasification form that vacuumizes that the sediment chamber adopts can be removed air influence more effectively, improves the purity of film forming material.
Description of drawings
Fig. 1 (a) is the inlet mouth synoptic diagram of container for storing liquid of the present invention;
Fig. 1 (b) is a liquid storage tank structure synoptic diagram of the present invention;
Fig. 2 (a) is a spray chamber structure of the present invention;
Fig. 2 (b) is a gas flow synoptic diagram of the present invention;
Fig. 3 is a nozzle structure synoptic diagram of the present invention;
Fig. 4 is the whole structural representation of forming of the present invention;
Below in conjunction with accompanying drawing content of the present invention is described in further detail.
Embodiment
Shown in Fig. 1 (a) and (b), air inlet port 1 left side is the vertical inlet pipe inside 2 that opening makes progress, and the right side is container for storing liquid inside 3.The upper end of a little higher than air inlet port 1 of liquid level in left side, when container for storing liquid 21 air pressure inside reduced, liquid level will descend, and air enters container for storing liquid 21 from air inlet port 1, and jar internal gas pressure rises, and liquid level is elevated to a little higher than air inlet port 1 upper end, stops air to continue to enter.Container for storing liquid 21 upper ends are fluid inlets 6, and the sealing back is air tight, and left end is vertical inlet pipe 5, and inlet pipe bottom 4 is by air inlet port 1 and container for storing liquid 21 internal communication, and a liquid outlet 7 is arranged at the right-hand member bottom, and solution adds in the spray chamber 24 thus.
Container for storing liquid 21 principles are: because container for storing liquid 21 tops seal, jar internal upper part air pressure is less than normal atmosphere, and both differences equal the water column pressure of the difference of spray chamber 24 liquid level position height and tank level position height.Liquid level position height in the spray chamber 24 is determined (two height are on same sea line) by the position height in vertical pipe bottom inflow hole, container for storing liquid 21 left side 1.Liquid level descends in spray chamber 24, solution in the container for storing liquid 21 will flow to spray chamber 24, the liquid level of container for storing liquid 21 inside will descend, the gas volume on its top increases, air pressure will be lower than the value behind the water colunm pressure that normal atmosphere deducts difference of altitude, thereby in the vertical inlet pipe 5 of container for storing liquid 21, normal atmosphere will be pressed into container for storing liquid 21 with the solution in the vertical inlet pipe 5, when air inlet port 1 exposes liquid level, air will enter container for storing liquid 21 from air inlet port 1, up to pressure balance again, air inlet port 1 is submerged in below the liquid level again, and air can not enter container for storing liquid 21 from air inlet port 1 again.By this process, just can keep the liquid level of spray chamber 24 inside automatically, make atomization condition stable.And the height of regulating container for storing liquid 21 just can be regulated the liquid level of spray chamber 24.
Shown in Fig. 2 (a) and (b), figure (a) is the structure iron of spray chamber 24, and left-half is a sectional view, and right half part is an outside drawing.An annular airway 11 is being overlapped at spray chamber 24 middle parts, and carrier gas enters annular airway 11 by inlet mouth 10, and annular airway 11 communicates by the equidistant a plurality of pores 12 arranged of annular with spray chamber 24 internal cavities 13.Bottom is respectively upwards reducing pipe 9 and reducing pipe 15 downwards on spray chamber 24 internal cavities 13.Top is aerosol outlet 8, is a fluid inlet 14 near the bottom, and make-up solution is come in thus, and the bottom is an atomizing piece 16.Arrow is an air flow line among the figure (b).
Adopt structure shown in Figure 2, promptly use horizontal annular array, a plurality of pores 12 of interval equally distributed on spray chamber 24 walls (to determine pore 12 numbers according to spray chamber 24 sizes, be generally more than six) as inlet mouth 10, can make carrier gas evenly enter spray chamber 24 and fully and equably mix with droplet.Aerosol outlet 8 is located at directly over the spray chamber 24, and bore is relatively large, makes mixed uniformly fog be unlikely to, disturbance excessive because of flow velocity and droplet is distributed become uneven.Whole spray chamber 24 flow fields are stable, can stablize the uniform aerosol of output concentration.Spray chamber 24 can use the stable material of chemical property such as simple glass, synthetic glass and tetrafluoroethylene to make.
With reference to shown in Figure 3, fog is from entering the mouth 17 through being full of cavity 19 after increasers 18 diffusions, and from the slit 20 with banded mist bundle ejection.The advantage of this mode is can avoid well losing and stop up gas circuit because of the droplet that droplet causes in the cohesion of shower nozzle 35 places.
With reference to shown in Figure 4, container for storing liquid 21 is connected with spray chamber 24 usefulness silicone tubes 23, indirect one valve 22, and the height of the air inlet port 1 of container for storing liquid 21 has determined the liquid level of spray chamber 24.Be connected to the inlet mouth 10 of spray chamber 24 behind the carrier gas source connection anemometer.The aerosol outlet 8 of spray chamber 24 is connected with the aerosol inlet 27 of sediment chamber 40.Sediment chamber's 40 outer covers are the vacuum vessel of a steel, are connected to four Vacuum ball valves and two flanges on the outer cover, are respectively aerosol inlet 27, bleeding point 30, inlet mouth 31, waste gas outlet 38, operation aperture 28 and service openings 33, also are connected to a vacuumometer 26 simultaneously.Screw rod 34, limit switch 32, shower nozzle 35, matrix 36, electric motor and warm table 37 be portion within it all.The waste gas outlet 38 of sediment chamber 40 connects bubbling pond 39.
The pipeline cross section of the conveying fog 35 all is circular from spray chamber 24 to shower nozzle among the present invention, one section upwards reducing pipe 9 is arranged the outlet 8 from spray chamber 24 internal cavities 13 to aerosol, sectional area reduces thereupon, the aerosol flow velocity increases, keep constant from aerosol outlet 8 to the internal diameter of the pipeline the inlet 17 of shower nozzle 35, aerosol flows stable, cavity 19 from the inlet 17 of shower nozzle 35 to shower nozzle 35 has one section increaser 18, the aerosol flow velocity reduces at the cavity 19 of shower nozzle 35 thereupon, when increase thereupon, reach enough big speed through shower nozzle 35 slits 20 aerosol flow velocitys.In whole aerosol flow circuits, slower at the aerosol flow velocity of spray chamber 24 and shower nozzle 35 inside, and the aerosol flow velocity of the aerosol delivery pipe 25 between them is very fast, thus can realize stable function of carrying aerosol.
The perfect film preparation system that the present invention uses the ullrasonic spraying pyrolysis technique to set up.The ullrasonic spraying pyrolysis technique adopts ultrasonic atomizer that precursor liquid is atomized into droplet that diameter is 1～3 μ m and it is injected on the matrix of being heated, wherein chemical ingredients generation pyrolysis in the droplet evaporate to dryness process, thus on matrix, deposit thin film.Atomisation unit of the present invention is selected air humidifier atomizing piece and related circuit common on the market for use, and wide material sources are cheap.Precursor liquid is selected the aqueous solution of metal chloride, acetate, nitrate and soluble chemical reagent for use, and concentration determines that as requested the general low more film quality of concentration is good more, but depositing time is also long more.The carrier gas that is used to carry droplet selects for use rare gas element (as high pure nitrogen, argon gas) or pressurized air as carrier gas.Source of the gas uses gas cylinder or pneumatic pump etc., measures and the control carrier gas flux by gas meter.Carrier gas enters spray chamber 24 and droplet uniform mixing by a plurality of pores 12, droplet is taken out of the back by carrier gas and is entered shower nozzle 35 by aerosol delivery pipe 25 and 29 guiding of flexible rubber pipe, be injected on the matrix 36 of being heated with banded mist bundle from shower nozzle 35 then, the intrafascicular droplet movement velocity of banded mist is about 3.5m/s, and shower nozzle 35 is 1cm with the distance of matrix 36.Shower nozzle 35 is made uniform motion back and forth under screw rod 34 drives, movement velocity is 0.05～0.1m/s.Droplet impinges upon process pyrolysis on the matrix 36 that is heated, and deposits the film of respective compound material.
Among the present invention, aerosol sprays with banded mist bundle from shower nozzle 35, comes flyback matrix 36 in the moving process of shower nozzle 35, deposits the film of particular area on matrix 36.In scanning process, droplet can not continue to be sprayed on the point, thereby makes droplet have adequate time evaporate to dryness and assurance that decomposition reaction has completely taken place.Shower nozzle 35 is installed on the slide block 41 of screw rod 34, the rotation that drives screw rod 34 by direct-current motor promotes slide block 41 and shower nozzle 35 translations, the zone that shower nozzle 35 moves back and forth is determined by two limit switches 32, when move distance reaches limited range, contact bump limit switch 32 on the slide block 41, change the turning direction that the sense of current changes direct-current motor by circuit, thereby change the direction of motion of shower nozzle 35.The rotating speed of direct-current motor can pass through motor controller controls, thereby can realize the adjusting of shower nozzle 35 translational speeds, can change simultaneously the scanning area of shower nozzle 35 by the position of regulating limit switch 32, i.e. coating film area, and control the thickness of film by the time of gated sweep.
In the system that is provided among the present invention, the opening of sediment chamber 40 has only flange and four Vacuum ball valves of two band seal washers.One of them flange is an operation aperture 28, is used for placing and taking out matrix, and another is the service openings 33 of motor.Four Vacuum ball valves are respectively aerosol inlet 27, waste gas outlet 38, bleeding point 30 and inlet mouth 31, and wherein the Vacuum ball valve internal diameter of aerosol inlet 27 must equate with the internal diameter of aerosol delivery pipe 25, prevents that droplet from losing in this cohesion.Extract air in the sediment chamber 40 by bleeding point 30, and charge into inert carrier gas from inlet mouth 31.After entering sediment chamber 40 by aerosol inlet 27, link with shower nozzle 35, when making the conveying aerosol shower nozzle 35 can be moved freely with a flexible rubber pipe 29.Because sediment chamber's 40 internal structure complexity, be difficult to air purge totally with the purging mode, so extracting the reinject mode of inert carrier gas of air, the employing vacuum pump removes the influence that oxygen may cause pyrolysis.Waste gas is from the waste gas outlet 38 of the sediment chamber 40 back bubbling the bubbling pond 39 that chemical solution (according to possible the composition configuration of waste gas) is housed that comes out, to remove obnoxious flavour that reaction generates and the droplet that has neither part nor lot in reaction.
The preparation of example one, ZnO film (not removing the air influence)
The preparation of precursor liquid: configuration 0.05molL
-1Zinc acetate ((CH3COO)
2Zn) aqueous solution 200ml.Close the liquid outlet 7 of container for storing liquid, open fluid inlet 6, pour solution into, do not fill, stay a small amount of gas on the top.Seal fluid inlet 6.After opening the valve 22 of liquid outlet 7, solution can flow into spray chamber 24, and container for storing liquid 21 upper end liquid levels descend, and produce a negative pressure, after pressure equilibrium, the height of regulating container for storing liquid 21 makes the liquid level of spray chamber 24 (being the distance of atomizing piece 16 to liquid level) be 3cm.
The thermolysis plated film: (the ITO conductive glass is of a size of the conducting surface of 20mm * 20mm * 1mm) and upwards is placed on the warm table 37 fixing with matrix 36.The position of regulating limit switch 32 with reference to matrix 36 makes scanning area just cover full wafer matrix 36.Close the operation aperture 28 on 40 tops, sediment chamber.Set substrate temperature, open heater switch.Treat that substrate temperature rises to design temperature, and after stablizing 5 minutes, confirm aerosol inlet 27 and waste gas outlet 38 unlatchings that open carrier gas (use high pure nitrogen), the adjusting flow is 0.16m
3/ h opens dc motor power, regulates the direct-current motor velocity of rotation and makes the translational speed of shower nozzle suitable, is about 2～5cm/s.Open the spraying gun power supply and pick up counting.The plated film time (10 fens kinds) closes carrier gas, and closes spraying gun after arriving.Close dc motor power and well heater then, naturally cooling.Behind the cool to room temperature, open sediment chamber's 40 top operation aperture 28, take out matrix 36, operation is finished.Can make thickness and be the transparent ZnO film about 100～300nm.
The preparation of example two, CdS film (extract air and remove the oxygen influence)
The preparation of precursor liquid: configuration Cadmium chloride fine powder (CdCl
2) (concentration is 0.05mol/L) thiocarbamide ((NH
2)
2CS) aqueous solution of (concentration is 0.055mol/L (excessive 10%)).The process of precursor liquid of packing into is identical with example one.
Excluding air: open the position that sediment chamber's 40 top operation aperture 28 are placed matrix 36 with example one method and regulated limit switch 32 earlier, close sediment chamber's 40 top operation aperture 28 then.Close bleeding point 30 and inlet mouth 31 valves, open aerosol inlet 27, waste gas outlet 38 valves, open carrier gas, and be adjusted to certain flow (0.16m
3/ h) spray chamber 24 and aerosol transfer lime 25 were purged ten minutes, the air in spray chamber 24 and the aerosol transfer lime 25 is removed.Closing aerosol enters the mouth and closes carrier gas again behind 27 valves, close waste gas outlet 38 valves, open bleeding point 30 valves, opening vacuum pump bleeds, (0.1Pa) closes bleeding point 30 valves and vacuum pump when air pressure drops to system limits, open inlet mouth 31 valve nitrogen injections, rise to normal atmosphere, close inlet mouth 31 valves up to pressure.Can further reduce the influence of oxygen by extraction gas repeatedly.
Thermolysis plated film: open aerosol enter the mouth 27 valves and waste gas outlet 38 valves this moment.Open heater switch, set substrate temperature.After this step that begins after heating of step and example one is identical.Can obtain high-quality CdS film at last.Thickness is similarly 100～300nm.
Claims (6)
1, a kind of ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system, this system comprises container for storing liquid (21), spray chamber (24), sediment chamber (40) and bubbling pond (39), it is characterized in that, the liquid outlet (7) of container for storing liquid (21) is connected with the fluid inlet (14) of spray chamber (24), the air inlet port (1) of container for storing liquid (21) is on the same sea line with the liquid level line of spray chamber (24), the aerosol outlet (8) of spray chamber (24) is connected with the aerosol inlet (27) of sediment chamber (40), aerosol inlet (27) is connected with shower nozzle (35), and the waste gas outlet (38) of sediment chamber (40) is connected with bubbling pond (39).
2, ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system according to claim 1, it is characterized in that, described container for storing liquid (21) is a cylindrical vessel, the top is the fluid inlet (6) of sealing, one air inlet port (1) is arranged on tank wall, air inlet port (1) is shaped as " Δ " shape, be close to tank skin outside the air inlet port (1) a vertical inlet pipe (5) is arranged, vertically the bottom of inlet pipe (5) is lower than air inlet port (1), the pipe underseal closes, and vertically inlet pipe inside (2) is connected with container for storing liquid inside (3) by air inlet port (1), and vertically the upper end of inlet pipe (5) extends tank deck, and container for storing liquid (21) end is connected to the liquid outlet (7) of a band valve.
3, ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system according to claim 1, it is characterized in that, described spray chamber (24) middle part is columniform internal cavities (13), top and the bottom are respectively upwards reducing pipe (9) and the container of reducing pipe (15) conical cavity downwards, near the bottom one fluid inlet (14) is arranged, the bottom is equipped with atomizing piece (16), pore (12) more than at least six is arranged on the wall more than the liquid level, line up a circle with equal intervals, spray chamber (24) internal space (13) communicates with the annular airway (11) that is enclosed within container outer wall by pore (12), inlet mouth (10) is communicated with annular airway (11), annular airway (11) is communicated with spray chamber (24) internal cavities (13) by pore (12), and spray chamber (24) top is aerosol outlet (8).
4, ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system according to claim 1, it is characterized in that, described shower nozzle (35) inside is a cylindrical cavity (19), inlet (17) is between the cavity (19) being one section increaser (18), and shower nozzle (35) bottom is a slit (20).
5, ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system according to claim 1, it is characterized in that, described sediment chamber (40) is a sealing chamber, top, sediment chamber (40) is an operation aperture (28), sidewall has a maintenance opening (33), two openings are flange arrangement, sediment chamber (40) sidewall has an aerosol inlet (27), there is a waste gas outlet (38) in sediment chamber (40) bottom centre, aerosol inlet (27) and waste gas outlet (38) all are connected to Vacuum ball valve outside sediment chamber (40), the bleeding point (30) and the inlet mouth (31) that also have two band Vacuum ball valves on sediment chamber (40) sidewall, warm table (37), screw rod (34), shower nozzle (35), limit switch (32), electric motor is (40) inside in the sediment chamber all, be connected with a flexible rubber pipe (29) between aerosol inlet (27) and the shower nozzle (35), screw rod (34) is installed in directly over the warm table (37), shower nozzle (35) is installed on the slide block (41) of screw rod (34), the top limit switch (32) of having installed at screw rod (34) two ends, limit switch (32) position can be regulated on axial along screw rod (34).
6, ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system according to claim 1, it is characterized in that, pipeline cross section from spray chamber (24) to the conveying fog the shower nozzle (35) all is circular, one section upwards reducing pipe (9) is arranged the outlet (8) from spray chamber (24) internal cavities (13) to aerosol, keep constant from aerosol outlet (8) to the internal diameter of the pipeline the inlet (17) of shower nozzle (35), the cavity (19) from the inlet (17) of shower nozzle (35) to inside has one section increaser (18).
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| CNB2007100180659A CN100516288C (en) | 2007-06-15 | 2007-06-15 | Ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system |
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|---|---|---|---|
| CNB2007100180659A CN100516288C (en) | 2007-06-15 | 2007-06-15 | Ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system |
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| CN101759372B (en) * | 2009-12-31 | 2012-10-10 | 中国科学院广州能源研究所 | Integrative ultrasonic spray pyrolysis coating device |
| CN103014660A (en) * | 2012-12-14 | 2013-04-03 | 广东志成冠军集团有限公司 | PECVD (plasma enhanced chemical vapor deposition) coating device and connecting device of radio-frequency power supply and vacuum chamber thereof |
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| CN102534546A (en) * | 2012-01-16 | 2012-07-04 | 燕山大学 | Preparation method of perovskite type nanocrystalline thin film on glass substrate |
| CN103014660A (en) * | 2012-12-14 | 2013-04-03 | 广东志成冠军集团有限公司 | PECVD (plasma enhanced chemical vapor deposition) coating device and connecting device of radio-frequency power supply and vacuum chamber thereof |
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| CN108385089A (en) * | 2018-03-07 | 2018-08-10 | 北京环境特性研究所 | A kind of ultrasonic spray pyrolysis precipitation equipment and the method for preparing film using the device |
| CN108385089B (en) * | 2018-03-07 | 2019-10-29 | 北京环境特性研究所 | A kind of ultrasonic spray pyrolysis precipitation equipment and the method for preparing film using the device |
| CN109706433A (en) * | 2018-12-04 | 2019-05-03 | 南京工业大学 | Ultrasonic spray deposition film device and method |
| CN111389644A (en) * | 2020-04-26 | 2020-07-10 | 江苏新美星包装机械股份有限公司 | Ultrasonic atomization device |
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