CN101060059A - A high speed scanning mode of piezoelectric scanner - Google Patents
A high speed scanning mode of piezoelectric scanner Download PDFInfo
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- CN101060059A CN101060059A CNA2007100655520A CN200710065552A CN101060059A CN 101060059 A CN101060059 A CN 101060059A CN A2007100655520 A CNA2007100655520 A CN A2007100655520A CN 200710065552 A CN200710065552 A CN 200710065552A CN 101060059 A CN101060059 A CN 101060059A
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Abstract
The high-speed scanning method for piezoelectric scanner comprises: driving the scanner fast shift with high-speed distortion-free sine wave; in sampling system, determining the sampling points by displacement; arranging a displacement sensor on the moving direction of fast shift for detecting scanner motion precisely. This invention changes little current structure, and improves the scanning quality and speed.
Description
Technical field
The present invention relates to high speed scanning mode of piezoelectric scanner.
Background technology
For a lot of technology, as scanning probe microscopy, nano-precision motor, based on piezoceramic transducer etc., piezoelectric scanner is very crucial parts.When existing technology relates to the problem of piezoelectric scanner in processing, two kinds of methods are arranged generally: use the single scanning device--as piezoelectric ceramic tube, or several (at least two) scanner of separating with z of xy.But no matter be the former or the latter, zigzag wave or triangular wave are all adopted in the driving of scanner fast and slow axis (being the xy axle).Because the driving to the piezoelectric scanner fast and slow axis is the zigzag wave or the triangular wave of different frequency.The driving frequency of fast axle has directly determined the speed of scanning.Such as, the frequency of current scanline probe microscope slow axis generally is 0.1Hz, the frequency of fast axle generally is 100Hz.The image of having swept a width of cloth pixel and be 512*512 needs a few minutes, this has just limited when scanning probe microscopy only has been adapted at a small amount of determinand and has used, can't be used between apparent time on the large-scale production of life, limited the application of scanning probe microscopy, so the problem of sweep speed needs to be resolved hurrily.
With the zigzag wave is example, the displacement of scanner on quick shaft direction, and speed and acceleration are over time shown in Fig. 1 a, b, c.Can be clear that the distortion point in each cycle from Fig. 1 a, b, c, the speed of scanner and acceleration are all very big.This moment, unpredictalbe situation can appear in the control to scanner, caused the distortion of image both sides easily.In this case, improve the scanning frequency of fast axle again, distortion in images can have influence on the quality of view picture figure.
And piezoelectric ceramic is not an absolute linearity to the variation of time, and in order to eliminate the non-linear employing closed-loop control system of piezoelectric ceramic, this just greatly reduces sweep speed.
In the sampling system of piezoelectric scanner, all be to decide according to the displacement of piezoelectric ceramic tube and the time dependent characteristic of relation of voltage, displacement and linear relation of time that voltage makes piezoelectric scanner promptly are set, and by the position of clock decision sampled point, this is an ideal situation.In the actual scanning process, scanner can shake at sampled point, as shown in Figure 2, especially near distortion point, has caused sampled point inhomogeneous, and the gained figure can't use.
Summary of the invention
The pattern distortion that the objective of the invention is to overcome prior art is bigger, and the shortcoming that sweep speed is slow adopts a kind of scan mode of new piezoelectric scanner, improved existing piezoelectric scanner, and then improved sweep speed, and reduced the distortion of figure, improved picture quality.
The technical scheme that technical solution problem of the present invention is adopted is: in the drive unit of piezoelectric scanner, the driving of fast axle adopted at a high speed, and distortionless driving voltage, that can utilize at present has a sine wave.After adopting sine wave, there is not distortion point in scanner in the displacement of quick shaft direction, and speed and acceleration are not very big, and the sweep speed of fast axle can improve greatly.
Simultaneously, in the scanning process of piezoelectric scanner,, make sampled point break away from dependence to clock by the position of displacement decision sampled point.For accurate location, the present invention is provided with displacement transducer in the fast axle direction of motion of piezoelectric scanner, constantly piezoelectric scanner is sent to control system at the accurate amount of exercise of fast axle.Control system is formulated the step-length between sampled point in advance according to actual needs, whenever piezoelectric scanner in the quick shaft direction step-length of moving, control system is assigned sample command.Displacement transducer has been guaranteed equidistant sampling, avoids sampled point inhomogeneous.
SIN function is a smooth function, and its first derivative and second dervative are respectively cosine function and SIN function, also all is smooth function, metapole.Piezoelectric ceramic is the peculiar material of a kind of performance, and when two end faces in the piezoelectric ceramic symmetry added voltage, piezoelectric ceramic can elongate or shorten by specific direction.So if driving voltage is a SIN function, also will to be similar to be SIN function in the displacement of piezoelectric ceramic so.With the first derivative of SIN function and second dervative respectively as the displacement and the acceleration of piezoelectric ceramic.The displacement that also is piezoelectric ceramic becomes cosine and sine relation with acceleration with the time.
After fast axle adopted sinusoidal drive voltage and displacement transducer, speed and acceleration on the quick shaft direction no longer included distortion point.The speed of whole scanning process and acceleration value fluctuations are little, are beneficial to the control of system to piezoelectric scanner, have avoided because the pattern distortion that piezoelectric scanner causes in original distortion point concussion.Adopt the high frequency sinusoidal drive voltage on this basis, greatly improved the speed of piezoelectric scanner.The step-length of displacement transducer on quick shaft direction that displacement transducer is accurate avoided because the pattern distortion that the step-length inaccuracy causes.
The present invention can be widely used in the instrument that uses piezoelectric scanner, and particularly scanning probe microscopy etc. has the precision instrument of high requirement to sweep speed and graphical quality.
Description of drawings
Further specify the present invention below in conjunction with the drawings and specific embodiments.
Fig. 1 a be the displacement of prior art scanner over time, Fig. 1 b is that the speed of prior art scanner changes in time, Fig. 1 c is the acceleration curve over time of prior art scanner;
Fig. 2 is the prior art actual waveform;
Fig. 3 a for the displacement of scanner of the present invention over time, Fig. 3 b be scanner speed over time, Fig. 3 c be scanner acceleration over time;
Fig. 4 is the time of sampling of the present invention and the relation of displacement;
Fig. 5 is the structure chart of scanner of the present invention, and wherein 1 for only doing the piezoelectric ceramic tube of z to motion, and 2 for only doing the piezoelectric ceramic of x to motion, 3 for only doing the piezoelectric ceramic of y to motion, 4 is displacement transducer, and 5 and 6 for drawing or go into electrode, and 7 and 8 for drawing or going into electrode;
Fig. 6 is for using scanning probe microscopy workflow diagram of the present invention.
Embodiment
The present invention adopts sinusoidal wave to fast axle driving in the drive unit of piezoelectric scanner.SIN function is a smooth function, and its first derivative and second dervative are respectively cosine function and SIN function, also all is smooth function, metapole.Piezoelectric ceramic is the peculiar material of a kind of performance, and when two end faces in the piezoelectric ceramic symmetry added voltage, piezoelectric ceramic can elongate or shorten by specific direction.And the size that elongates or shortens becomes linear approximate relationship with the size of added voltage.So if driving voltage is a SIN function, also will to be similar to be SIN function in the displacement of piezoelectric ceramic so, with the first derivative of SIN function and second dervative respectively as the speed and the acceleration of piezoelectric ceramic.After adopting sinusoidal drive voltage, the displacement of piezoelectric scanner, speed and acceleration shown in Fig. 3 a, b, c, can see that the speed of scanner and acceleration do not have distortion point, and numerical value change are little over time.
The time of the present invention sampling and displacement relation as shown in Figure 4, displacement and time relation are non-linear, promptly the time intrinsic displacement identical is not necessarily identical.So can not adopt the sampling of equal time spacing, need employing to wait the method for displacement spacing sampling.The present invention adopts the displacement of displacement transducer accurate measurement piezoelectric scanner along the fast axle direction of motion.Position transducer is arranged on scanner along on the fast track that moves, and links to each other with control system.As shown in Figure 5,1 for only doing the piezoelectric ceramic tube of z to motion, its making alive why type, or numerical value is much by concrete application decision; 2 for only doing the piezoelectric ceramic of x to motion, establishes the x axle and be fast axle; 3 for only doing the piezoelectric ceramic of y to motion, and establishing the y axle is slow axis; 4 is displacement transducer; 5 and 6 for drawing or going into electrode, and the driving voltage of accelerating axle at its two ends is sinusoidal wave; 7 and 8 for drawing or going into electrode, and the driving voltage that adds slow axis at its two ends is triangular wave or sawtooth waveforms.
Quick shaft direction along piezoelectric ceramic adds sine voltage signal, and piezoelectric ceramic is approximate in the motion of quick shaft direction to be sinusoidal wave.Piezoelectric ceramic all can pass to control system by displacement transducer at the displacement that quick shaft direction moves.And control system formulate as requested between sampled point step-length relatively, whenever piezoelectric scanner when quick shaft direction moved a step-length, control system is assigned sample command.
Below be that example illustrates application of the present invention with the scanning probe microscopy.In the workflow of using scanning probe microscopy of the present invention as shown in Figure 6, behind input sine wave, 1, probe is with identical frequency movement, the displacement that displacement transducer writing scan head moves along quick shaft direction; 2, probe moves the displacement of δ X; 3, the displacement of the whenever mobile δ X of probe, displacement transducer is just exported sampled signal to electronic control system; 4, electronic control system is sent sample command, and 5, electronic control system carries out sample command, and pass sampled point data message 6,7 back electronic control system.
The present invention also can be applicable to other needs the accurately precision instrument of scanning.
Claims (1)
1, a kind of high speed scanning mode of piezoelectric scanner is characterized in that adopting sinusoidal wave to the fast axle driving of piezoelectric scanner; By displacement decision sampled point, the actual distance of passing by of displacement transducer accurate measurement scanner that employing is provided with on the direction of motion of the fast axle of piezoelectric scanner, and the displacement that quick shaft direction moves passed to control system, control system is according to the step-length between the sampled point of being formulated, whenever piezoelectric scanner when quick shaft direction moved a step-length, control system is promptly assigned sample command.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100655520A CN101060059A (en) | 2007-04-16 | 2007-04-16 | A high speed scanning mode of piezoelectric scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100655520A CN101060059A (en) | 2007-04-16 | 2007-04-16 | A high speed scanning mode of piezoelectric scanner |
Publications (1)
| Publication Number | Publication Date |
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| CN101060059A true CN101060059A (en) | 2007-10-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNA2007100655520A Pending CN101060059A (en) | 2007-04-16 | 2007-04-16 | A high speed scanning mode of piezoelectric scanner |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111344621A (en) * | 2017-12-08 | 2020-06-26 | 德州仪器公司 | Method and apparatus for increasing efficiency and optical bandwidth of MEMS piston mode spatial light modulator |
| CN111751982A (en) * | 2019-03-29 | 2020-10-09 | 成都理想境界科技有限公司 | Scanning display method and device |
-
2007
- 2007-04-16 CN CNA2007100655520A patent/CN101060059A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111344621A (en) * | 2017-12-08 | 2020-06-26 | 德州仪器公司 | Method and apparatus for increasing efficiency and optical bandwidth of MEMS piston mode spatial light modulator |
| CN111751982A (en) * | 2019-03-29 | 2020-10-09 | 成都理想境界科技有限公司 | Scanning display method and device |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
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Open date: 20071024 |