CN101055197A - Femtosecond laser pulse produced microsize optical fiber Fabry-perot sensor and its production method - Google Patents
Femtosecond laser pulse produced microsize optical fiber Fabry-perot sensor and its production method Download PDFInfo
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- CN101055197A CN101055197A CN 200710078516 CN200710078516A CN101055197A CN 101055197 A CN101055197 A CN 101055197A CN 200710078516 CN200710078516 CN 200710078516 CN 200710078516 A CN200710078516 A CN 200710078516A CN 101055197 A CN101055197 A CN 101055197A
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Abstract
The invention provides a minitype optical fiber FP sensor produced by fetosecond laser pulse, which is to produce a small cavity with rectangle cross section, and full penetration through fiber core on an ordinary single-mode optical fiber, and the depth of the small cavity satisfies: (D+d)/2<=h<=D, wherein D is the diameter of the fiber, d is fiber core diameter. The invention also provides the production method of the invention. The sensor is superior in not only the special physical characteristic of miniaturization, integration, Convenience for production and reuse, strong harsh environment resistance capability, but also having negative temperature sensitivity and improving the sensitivity of axial load in a certain extent, and being applied in the optical sensing field in the future.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, be specifically related to device and method for making that a kind of femto-second laser pulse is made the mini optical fibre Fabry-Perot sensor.
Background technology
In recent years, along with the fast development in fields such as biology, medical science, the energy, environment, space flight and aviation, military affairs, people are to microminiaturization, lightweight, low energy consumption, adverse environment resistant ability (high low temperature, humidity, macroseism, thump, the strong electromagnetic of sensor ...) wait and proposed very urgent requirement.Though existing Fibre Optical Sensor have anti-electromagnetic interference (EMI), corrosion-resistant, easily multiplexing, measure advantages such as dynamic range is big, yet because its complex manufacturing technology, cost height, volume more greatly, weakness such as not easy of integration, thereby the great requirement that is difficult to satisfy the modern science and technology field has seriously restricted the fast development in these fields.Therefore it is particularly necessary to research and develop microsensor of new generation, has become one of international great forward position focus, is generally believed it is popular device in the sensory field of new generation.
In the ascendant to research at present based on the microsensor of MEMS (micro electro mechanical system) (MEMS), just progressively develop so that existing sensors is upgraded to the industrialization direction, existing multidigit scholar has proposed multiple microsensor based on MEMS (micro electro mechanical system) (MEMS) both at home and abroad, as micro flow sensor based on the MEMS technology, micro-acceleration sensor, micropressure sensor, the tepor humidity sensor, little magnetic field sensor, little carbon dioxide gas sensor, microbiological sensor etc., yet, these sensors all are based on the principle of electric parameter measurement, the adverse environment resistant ability, particularly be difficult at high temperature, low temperature, inflammable and explosive, work in the rugged surroundings such as strong electromagnetic, and its system complex, be difficult for multiplexing, can not realize measuring multiple parameters etc., thereby greatly limit of the application of MEMS sensor in many important events.Therefore only be to be the great demand that the electric class microsensor of representative is difficult to satisfy development of modern scientific technology and national economy and Defence business etc. with the MEMS microsensor.
Summary of the invention
The purpose of this invention is to provide a kind of have microminiaturization, integrated, integrated, cost is low, essential safety, be not subjected to electromagnetic interference (EMI), be suitable for rugged surroundings, easy mini optical fibre method amber (F-P) sensor of making of the femto-second laser pulse of advantages such as multiplexing, easy batch process, sensitivity height and preparation method thereof.
The feature of the minitype optical fiber F-P sensor that femto-second laser pulse is made is: on general single mode fiber, be manufactured with one penetrate fiber core fully, xsect is rectangular small cavity, the degree of depth h of small cavity satisfies: (D+d)/and 2≤h≤D, wherein D is the diameter of optical fiber, and d is a core diameter.
The method that femto-second laser pulse is made minitype optical fiber F-P sensor is: 1) general single mode fiber is fixed on the three-dimensional micropositioner; 2) ultrashort laser pulse that femto-second laser is sent focuses on the assigned address on the optical fiber; 3, with certain speed along the optical fiber that moves around of the direction perpendicular to laser pulse, thereby producing an xsect on optical fiber is rectangular small cavity, pass completely through fibre core until small cavity, its degree of depth h is: (D+d)/and 2≤h≤D, wherein D is the diameter of optical fiber, d is a core diameter, thereby forms minitype optical fiber F-P sensor.
The average pulse energy of ultrashort laser pulse is 20 μ J, and wavelength is 200～800nm, and width is 120fs, and repetition frequency is 1kHz.The speed that optical fiber moves around is 300 μ m/sec.
Technique effect of the present invention is: sensor not only have microminiaturization, integrated, integrated, be easy to produce in batches, unique physical characteristics such as the adverse environment resistant ability is strong, and have unique axial load characteristic and a temperature response characteristics, crest at the 1556nm wave band, in 0～330 μ ε scope, its peak wavelength is along with the increase of axial load is drifted about to the long wave direction, wavelength shift and axial load have good linear relationship, fitting coefficient is 0.9969, sensitivity reaches 0.006nm/ μ ε, and the maximum wavelength drift value is 1.93nm; In 20～100 ℃, its wavelength along with the increase of ambient temperature linearly to the drift of shortwave direction, fitting coefficient is 0.9837, sensitivity is-0.0021nm/ ℃, the maximum wavelength drift value is 0.15nm.
Description of drawings
Fig. 1 is the making schematic diagram of minitype optical fiber F-P sensor;
Fig. 2 is that chamber length is the object construction figure of 80 μ m minitype optical fiber F-P sensors;
Fig. 3 is the interference spectum of minitype optical fiber F-P sensor among Fig. 2;
Fig. 4 is the strain-responsive performance plot of 80 μ m minitype optical fiber F-P sensors for chamber length;
Fig. 5 is that chamber length is the temperature response characteristics figure of 80 μ m minitype optical fiber F-P sensors.
Embodiment
The minitype optical fiber F-P sensor that utilizes femto-second laser pulse to make, promptly on general single mode fiber 2-1, be manufactured with one penetrate fiber core fully, xsect is rectangular small cavity (interference cavity) 2-2, the degree of depth h of small cavity 2-2 satisfies: (D+d)/and 2≤h≤D, wherein D is the diameter of optical fiber, and d is a core diameter.
Figure 1 shows that the schematic diagram of femto-second laser pulse making minitype optical fiber F-P sensor, among the figure, 1-1 is for producing the femto-second laser of ultrashort laser pulse, and 1-2 is the collimation beam expanding lens, 1-3 is an attenuator, 1-4 is a camera, and 1-5 is a spectroscope, and 1-6 is object lens, 1-7 is a general single mode fiber, 1-8 is the LED illuminating source, and 1-9 is three-dimensional micropositioner, and 1-10 is a computing machine.With titanium jewel twitter pulse regeneration amplifier, having obtained pulse width is that 120fs, single pulse energy are that 20 μ J, repetition frequency are that 1kHz, wavelength are the 800nm ultra-short pulse laser in the experiment.Pulse laser beam at first passes through a collimator and extender mirror to improve beam quality, to increase beam diameter, and then by a neutral attenuator, obtain the output beam of different capacity, the ultra-short pulse laser bundle is focused on the assigned address of general single mode fiber (healthy and free from worry SMF-28) with the 50 zoom and focus lens of a numerical aperture NA=0.45, operating distance is 12mm, and focal spot size is～2 μ m.
The step of making minitype optical fiber F-P sensor is: 1) general single mode fiber is fixed on the three-dimensional micropositioner; 2) ultrashort laser pulse that femto-second laser is sent focuses on the assigned address on the optical fiber; 3, with certain speed along the optical fiber that moves around of the direction perpendicular to laser pulse, thereby producing an xsect on optical fiber is rectangular small cavity, pass completely through fibre core until small cavity, its degree of depth h is: (D+d)/and 2≤h≤D, wherein D is the diameter of optical fiber, d is a core diameter, thereby forms minitype optical fiber F-P sensor.
When regulating the ultrashort laser pulse energy, average pulse energy is 20 μ J preferably, and wavelength is 200～800nm (according to the surface smoothness of processing cavity, select wavelength, general wavelength is short more, and the chamber surface smoothness is good more), and width is 120fs, and repetition frequency is 1kHz.During moving fiber, the speed that optical fiber moves around is 300 μ m/s preferably.In the process that moves, can monitor and read data by a CCD imaging system and phase correlation optical microscope respectively.
Utilize wiring method of the present invention, on general single mode fiber (as healthy and free from worry SMF-28), can one-time formedly accurately produce little fiber F-P interference cavity of different structure, its chamber length can reach 100 microns even tens microns, traditional two sections optical fiber of welding that pass through have been overcome, or when making fibre-optical F-P sensor in two sections optical fiber pipe that comes a hollow in alignment since the F-P sensor of manufacture craft after causing forming have large-size, end face vulnerable to pollution, repeatability poor, shortcoming such as take time and effort.This has also guaranteed the causing property of batch machining when reducing the expensive cost of F-P sensor, reduced the temperature control of F-P sensor in addition, the sensitivity that has also improved its axial load to a certain extent.
Figure 2 shows that a routine object construction figure of minitype optical fiber F-P sensor (MEFPIs) interference cavity of writing out at general single mode fiber (healthy and free from worry SMF-28), the length L of interference cavity is 80 μ m, and degree of depth h is 75 μ m, and width is 30 μ m.Constituted the interference cavity of MEFPIs as seen from the figure perpendicular to two end faces of shaft axis of optic fibre direction.When light beam transmits in optical fiber along fibre core, will be interfered when satisfying phase matching by the light beam of two end face reflections, Fig. 3 is the typical interference spectum of the MEFPIs of Fig. 2.
Fig. 4 is the strain-responsive performance plot of 80 μ m minitype optical fiber F-P sensors for chamber length.With chamber length is that the minitype optical fiber F-P sensor of 80 μ m is fixed on two micropositioners, the precision of micropositioner is 1 μ m, distance between two micropositioners is 70cm, one of them micropositioner remains motionless, and another micropositioner moves with the step-length of 5 μ m, the wavelength of this MEFPIs carries out the monitoring of spectrum and reading of data by spectrometer, thereby obtains the wavelength shift of MEFPIs and the relation between the axial load along with moving to the long wave direction of micropositioner drifted about at this moment.As can be seen from Figure 4, in the scope of 0～330 μ ε, crest at the 1556nm wave band, the peak wavelength of MEFPIs has good linear relationship to axial load, fitting coefficient is 0.9969, and wavelength increases along with the increase of axial load, and wavelength shift reaches 1.93nm, and axial load sensitivity is 0.006nm/ μ ε, and the wavelength of other wave band is also along with the increase of axial load is drifted about to the long wave direction linearly.
Fig. 5 is that chamber length is the temperature response characteristics figure of 80 μ m minitype optical fiber F-P sensors.With chamber length is that the MEFPIs of 80 μ m places in the thermostatic control casing, just can regulate the wavelength shift of MEFPIs by the temperature of control thermostatic control casing, shown in Figure 5 is that MEFPIs is in the wavelength of 1556nm and the relation of temperature, as can be seen from the figure, crest at 1556nm, rising along with temperature, the peak wavelength of this wave band drifts about to the shortwave direction, fitting coefficient is 0.9837, sensitivity is 0.0021nm/ ℃, and the wavelength of other wave band is also along with the increase of temperature is drifted about to the shortwave direction linearly.
Application prospect: the novel little fibre-optical F-P sensor that writes out according to method provided by the invention have microminiaturization, integrated, integrated, be easy to produce in batches and the rugged surroundings ability is strong, the axial load remolding sensitivity is higher, easy unique advantage such as multiplexing, in future communications and light sensory field, have broad application prospects.
Claims (4)
1, a kind of mini optical fibre Fabry-Perot sensor of femto-second laser pulse making, it is characterized in that: on general single mode fiber (2-1), be manufactured with one penetrate fully fiber core, xsect is rectangular small cavity (2-2), the degree of depth h of small cavity (2-2) satisfies: (D+d)/and 2≤h≤D, wherein D is the diameter of optical fiber, and d is a core diameter.
2, a kind of femto-second laser pulse is made the method for mini optical fibre Fabry-Perot sensor: it is characterized in that: 1) general single mode fiber is fixed on the three-dimensional micropositioner; 2) ultrashort laser pulse that femto-second laser is sent focuses on the assigned address on the optical fiber; 3, with certain speed along the optical fiber that moves around of the direction perpendicular to laser pulse, thereby producing an xsect on optical fiber is rectangular small cavity, pass completely through fibre core until small cavity, its degree of depth h is: (D+d)/and 2≤h≤D, wherein D is the diameter of optical fiber, d is a core diameter, thereby forms the mini optical fibre Fabry-Perot sensor.
3, femto-second laser pulse according to claim 2 is made the method for mini optical fibre Fabry-Perot sensor: it is characterized in that: the average pulse energy of ultrashort laser pulse is 20 μ J, and wavelength is 200～800nm, and width is 120fs, and repetition frequency is 1kHz.
4, femto-second laser pulse according to claim 2 is made the method for mini optical fibre Fabry-Perot sensor: it is characterized in that: the speed that optical fiber moves around is 300 μ m/s.
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Cited By (14)
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| CN101825479A (en) * | 2010-04-15 | 2010-09-08 | 电子科技大学 | Method for manufacturing composite fiber F-P sensor based on self-focusing effect |
| CN101900576A (en) * | 2010-07-08 | 2010-12-01 | 北京交通大学 | Method for manufacturing fiber bragg grating Fabry-Perot sensor |
| CN102221422A (en) * | 2011-04-01 | 2011-10-19 | 上海大学 | Intrinsic optical fiber Fabry-Perot temperature sensor manufactured by femtosecond pulse laser and manufacturing method of temperature sensor |
| CN102508337A (en) * | 2011-11-03 | 2012-06-20 | 上海大学 | Optical fiber fused taper-based intrinsic Fabry-Perot device and manufacturing method thereof |
| CN102539013A (en) * | 2012-01-16 | 2012-07-04 | 上海大学 | Cascaded optical fiber F-P micro-cavity temperature sensor based on scale effect and manufacturing method thereof |
| CN104215270A (en) * | 2013-05-31 | 2014-12-17 | 中自高科（苏州）光电有限公司 | All-fiber sensor machined by femtosecond laser pulse sequence and production method of all-fiber sensor |
| CN106017343A (en) * | 2016-06-06 | 2016-10-12 | 南京工程学院 | Optical fiber bending sensor having air gap and bending measurement method |
| CN106197493A (en) * | 2016-06-29 | 2016-12-07 | 西安交通大学 | A kind of fast preparation method of Fiber Optic Sensor FP sensor based on femtosecond laser direct write |
| CN106500890A (en) * | 2016-11-28 | 2017-03-15 | 重庆大学 | A kind of Fabry-perot optical fiber micro-force sensor |
| CN107247310A (en) * | 2017-07-28 | 2017-10-13 | 西安石油大学 | A kind of optical fiber F P wave filters and preparation method thereof |
| CN107478251A (en) * | 2017-09-18 | 2017-12-15 | 北京航空航天大学 | A kind of graphene film Fabry-perot optical fiber resonator for being capable of stress regulation and control and preparation method thereof |
| CN107941372A (en) * | 2017-11-28 | 2018-04-20 | 北京信息科技大学 | The method that photonic crystal fiber Fabry Perot temperature sensors are prepared based on femtosecond laser |
| CN109632707A (en) * | 2018-12-27 | 2019-04-16 | 北京信息科技大学 | Concentration detection method based on fibre-optical F-P sensor |
| CN112557363A (en) * | 2020-12-07 | 2021-03-26 | 山西大学 | Single-particle rapid identification device and method based on femtosecond laser modulation phase |
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- 2007-05-28 CN CNB2007100785168A patent/CN100491923C/en active Active
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| CN101825479A (en) * | 2010-04-15 | 2010-09-08 | 电子科技大学 | Method for manufacturing composite fiber F-P sensor based on self-focusing effect |
| CN101900576A (en) * | 2010-07-08 | 2010-12-01 | 北京交通大学 | Method for manufacturing fiber bragg grating Fabry-Perot sensor |
| CN101900576B (en) * | 2010-07-08 | 2011-07-20 | 北京交通大学 | Method for manufacturing fiber bragg grating Fabry-Perot sensor |
| CN102221422A (en) * | 2011-04-01 | 2011-10-19 | 上海大学 | Intrinsic optical fiber Fabry-Perot temperature sensor manufactured by femtosecond pulse laser and manufacturing method of temperature sensor |
| CN102508337A (en) * | 2011-11-03 | 2012-06-20 | 上海大学 | Optical fiber fused taper-based intrinsic Fabry-Perot device and manufacturing method thereof |
| CN102508337B (en) * | 2011-11-03 | 2013-03-06 | 上海大学 | Optical fiber fused taper-based intrinsic Fabry-Perot device and manufacturing method thereof |
| CN102539013A (en) * | 2012-01-16 | 2012-07-04 | 上海大学 | Cascaded optical fiber F-P micro-cavity temperature sensor based on scale effect and manufacturing method thereof |
| CN104215270A (en) * | 2013-05-31 | 2014-12-17 | 中自高科（苏州）光电有限公司 | All-fiber sensor machined by femtosecond laser pulse sequence and production method of all-fiber sensor |
| CN106017343A (en) * | 2016-06-06 | 2016-10-12 | 南京工程学院 | Optical fiber bending sensor having air gap and bending measurement method |
| CN106017343B (en) * | 2016-06-06 | 2018-08-17 | 南京工程学院 | The method for carrying out flexural measurement using the optical fibre bending sensor with the air gap |
| CN106197493A (en) * | 2016-06-29 | 2016-12-07 | 西安交通大学 | A kind of fast preparation method of Fiber Optic Sensor FP sensor based on femtosecond laser direct write |
| CN106197493B (en) * | 2016-06-29 | 2018-12-07 | 西安交通大学 | A kind of fast preparation method of the Fiber Optic Fabry-Perot Sensor based on femtosecond laser direct write |
| CN106500890A (en) * | 2016-11-28 | 2017-03-15 | 重庆大学 | A kind of Fabry-perot optical fiber micro-force sensor |
| CN106500890B (en) * | 2016-11-28 | 2019-08-27 | 重庆大学 | A kind of Fabry-perot optical fiber micro-force sensor |
| CN107247310A (en) * | 2017-07-28 | 2017-10-13 | 西安石油大学 | A kind of optical fiber F P wave filters and preparation method thereof |
| CN107478251A (en) * | 2017-09-18 | 2017-12-15 | 北京航空航天大学 | A kind of graphene film Fabry-perot optical fiber resonator for being capable of stress regulation and control and preparation method thereof |
| CN107941372A (en) * | 2017-11-28 | 2018-04-20 | 北京信息科技大学 | The method that photonic crystal fiber Fabry Perot temperature sensors are prepared based on femtosecond laser |
| CN109632707A (en) * | 2018-12-27 | 2019-04-16 | 北京信息科技大学 | Concentration detection method based on fibre-optical F-P sensor |
| CN112557363A (en) * | 2020-12-07 | 2021-03-26 | 山西大学 | Single-particle rapid identification device and method based on femtosecond laser modulation phase |
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