CN101053864B - Parallel compound ultrasonic energy transmission device - Google Patents
Parallel compound ultrasonic energy transmission device Download PDFInfo
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- CN101053864B CN101053864B CN2007100722116A CN200710072211A CN101053864B CN 101053864 B CN101053864 B CN 101053864B CN 2007100722116 A CN2007100722116 A CN 2007100722116A CN 200710072211 A CN200710072211 A CN 200710072211A CN 101053864 B CN101053864 B CN 101053864B
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- ultrasonic energy
- luffing bar
- transmission device
- energy transmission
- parallel compound
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Abstract
The invention provides a parallel connection combined type ultrasonic energy transferring device, which comprises a parallel connection combined type supersonic wave amplitude transformer, a piezoelectricity ultrasonic transducer as well as a working cleaver on front end of the amplitude transformer. Two sets of unidirectional vibration amplitude transformer are rigidly connected with each other on working end, and the parallel connection combined type supersonic wave amplitude transformer is fixed on a movable flatform via an elastic beam. The invention provides a novel parallel connection combined type ultrasonic energy transferring device, which is used to increase lead bond efficiency, wherein, the requirement of increasing supersonic wave lamplitude transformer end cleaver track coverarea is satisfied, at the same time, ultrasonic energy density is increased, bond time is reduced, and bond efficiency is increased.
Description
One, technical field
What the present invention relates to is a kind of machining tool of micro-processing technology, specifically a kind of ultrasonic energy transmission device that is used for wire bonder.
Two, background technology
Advanced manufacturing technologies such as microelectronics, photoelectron, MEMS combine silicon Micrometer-Nanometer Processing Technology and micromachining technology, produce that volume is little, low-power consumption, integrated height, micro element or system that cost is low.Be encapsulated in micro element or the system's manufacture process and play an important role, it can provide effective mechanical support, environmental protection, with the interface of extraneous medium and with being electrically connected of other system.
The ultrasonic wave wire bonder is widely used in encapsulation field, realize the interconnection of electric signal, promptly utilize the ultrasonic vibration technology to remove impurity such as bonding surface oxide layer, expose pure bonding metal surface, increase atomic mobility and lattice dislocation density, and the distortional strain energy of material lattice, the atom diffusion is strengthened, impel the atomic bond bonding of metal lead wire and pad bonding surface.Simultaneously, the injection of ultrasonic energy, the heating-up temperature in the time of can reducing bonding alleviates because the influence of the residual stress that thermal deformation causes.
Ultrasonic energy transmission device on the existing wire bonder all is that folk prescription is to vibrational system both at home and abroad.It is by by the fixing folk prescription of holding ring to the vibration ultrasonic variable amplitude bar, be installed in the work chopper of luffing bar front end, be installed in that the piezoelectric ultrasonic transducer of luffing rod rear end forms.The working end of ultrasonic variable amplitude bar front end---chopper work track is single linear pattern track.The vibration frequency range of ultrasonic vibration system is 62kHz-136kHz, power output below 2.5W, the chopper folk prescription to amplitude less than 1 micron.Luffing bar majority is the circular section, to the method for clamping of luffing bar, adopts the holding ring method of clamping, and the most sandwich type structurals that adopt of the piezoelectric ultrasonic transducer of luffing rod rear end carry out effective pretension.
According to the ultrasonic average density energy formula, improve the frequency of ultrasonic vibration or increase the terminal chopper work of luffing bar track area coverage, can effectively increase ultrasonic energy density, thereby reach under the prerequisite of identical bond strength, reduce the bonding time, improve bonding efficiency.
The subject matter that existing ultrasonic energy transmission device exists is: the common vibration frequency of wire bonder ultrasonic system be 64kHz between the 120kHz, the power of output is about 2.5W.Improve bonding efficiency, if consider from the frequency angle, just need to obtain higher ultrasonic frequency vibratory, this is to the core of supersonic generator---and power amplification circuit and energy-storage travelling wave tube propose very high requirement.Because the limitation of power amplifier performance is difficult in the above electrical power of output 2.5W under 128kHz even the higher frequency.This makes and to be difficult to realize from improving the idea that the frequency angle improves bonding efficiency.
Three, summary of the invention
The object of the present invention is to provide and a kind ofly can improve ultrasonic energy density, reduce the bonding time, and then improve the parallel compound ultrasonic energy transmission device of lead-in wire bonding efficiency.
The object of the present invention is achieved like this: it comprises parallel compound ultrasonic luffing bar, front end at the luffing bar is equipped with the work chopper, at the luffing bar other end piezoelectric ultrasonic transducer is installed, the working end rigidity parallel connection of two cover single vibration luffing bars, the luffing bar is fixed on the moving platform of voice coil motor by spring beam.
The present invention can also comprise following architectural feature:
1, the cross section of described luffing bar is rectangle or square sectional.
2, described piezoelectric ultrasonic transducer is the piezoelectric ceramic wafer that parallel connection stacks, and the centre of the piezoelectric ceramic wafer that stacks in parallel connection is provided with the pretension voussoir, has pretension bolt on the pretension voussoir.
3, described pretension voussoir is three, on the pretension voussoir in the middle of described pretension bolt is arranged on.
4, the cross section of spring beam is the square-section, and the luffing bar can be the center with the spring beam, rotates in small angle range.
The present invention proposes a kind of novel parallel compound ultrasonic energy transmission device, be used for improving the lead-in wire bonding efficiency.
Under high-frequency, be difficult to output high-power for overcoming existing ultrasonic variable amplitude bar, can't improve the problem of energy density, propose the terminal chopper work of a kind of utilization increase ultrasonic variable amplitude bar track area coverage and improved ultrasonic energy density, reduce the bonding time, and then improve the tool construction of lead-in wire bonding efficiency.Main feature of the present invention is embodied in:
1, adopt the parallel compound structure that the linear carry-out bit shift-in of the single luffing bar of tradition is capable compound synthetic.According to adjusting the hyperacoustic vibration parameters of both direction: frequency, amplitude or phase place, the work track of luffing bar end is changed, thereby make the compound multidirectional movement locus of one dimension folk prescription in oscillation trajectory becomes the rectangular area, choose reasonable ultrasonic vibration characterisitic parameter can effectively increase chopper movement locus area coverage.
2, adopt novel clamping device, rationally reduced the lateral deflection rigidity of luffing bar, effectively alleviated the coupling effect of parallel institution.
3, adopt novel rectangular cross section luffing bar, make luffing bar compact overall structure, the operative constraint working end is perpendicular to the swing on the plane of oscillation direction.
4, adopt the voussoir firmly beforehand means, utilize self-lock mechanism, solved the pretension problem of rectangle luffing bar piezoelectric ceramics, utilize self-lock mechanism protection pretension bolt to avoid the influence of high-frequency percussion load simultaneously.
5, adopt symmetrical expression tool holder mode, guarantee the uniformity of luffing bar working end vibration.
The present invention had both satisfied the requirement that increases the terminal chopper track of ultrasonic variable amplitude bar area coverage, simultaneously, had increased ultrasonic energy density, reduced the bonding time, improved the purpose of bonding efficiency.
Four, description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2-Fig. 7 is the complex vibration work track schematic diagram under frequency, amplitude or the phase change situation;
Fig. 8 is a parallel compound ultrasonic luffing bar structural representation;
Fig. 9 is a symmetrical expression tool holding end structure schematic diagram;
Figure 10 is a voussoir pre-tightening mechanism structure chart.
Five, the specific embodiment
For a more detailed description to the present invention for example below in conjunction with accompanying drawing:
In conjunction with Fig. 1,8,9 and 10, the composition of parallel compound ultrasonic energy transmission device comprises parallel compound ultrasonic luffing bar 1, end at the luffing bar is equipped with work chopper 7, at the luffing bar other end piezoelectric ultrasonic transducer 2 is installed, the working end rigidity parallel connection of two cover single vibration luffing bars, the luffing bar is fixed on the moving platform 3 of voice coil motor 4 by spring beam 5.The cross section of described luffing bar is rectangle or square sectional.Described piezoelectric ultrasonic transducer is the piezoelectric ceramic wafer that parallel connection stacks, and the centre of the piezoelectric ceramic wafer that stacks in parallel connection is provided with the pretension voussoir, has pretension bolt 6 on the pretension voussoir.Described pretension voussoir is three, i.e. on the pretension voussoir in the middle of voussoir 10, voussoir 11 and voussoir 12, described pretension bolt are arranged on.The cross section of spring beam is the square-section, and the luffing bar can be the center with the spring beam, rotates in small angle range.Working end chopper 8 is clamped in the working end by bolt-sleeve combination 13.
Operation principle of the present invention is:
For the vibration control of parallel compound luffing bar 1, by changing luffing bar X and the Y parameter to vibration: frequency, amplitude or phase place can change working end chopper 8 oscillation trajectories.
Claims (7)
1. parallel compound ultrasonic energy transmission device, it comprises the work chopper of parallel compound ultrasonic luffing bar, piezoelectric ultrasonic transducer and luffing bar front end, it is characterized in that: the working end of the working end of the parallel compound ultrasonic luffing bar of the 1st single vibration and the parallel compound ultrasonic luffing bar of the 2nd single vibration is rigidly connected, and the parallel compound ultrasonic luffing bar of two cover single vibrations is fixed on the moving platform of voice coil motor by spring beam.
2. parallel compound ultrasonic energy transmission device according to claim 1 is characterized in that: the cross section of described luffing bar is rectangle or square sectional.
3. parallel compound ultrasonic energy transmission device according to claim 1 and 2, it is characterized in that: described piezoelectric ultrasonic transducer is the piezoelectric ceramic wafer that parallel connection stacks, the centre of the piezoelectric ceramic wafer that stacks in parallel connection is provided with the pretension voussoir, has pretension bolt on the pretension voussoir.
4. parallel compound ultrasonic energy transmission device according to claim 3 is characterized in that: described pretension voussoir is three, on the pretension voussoir in the middle of described pretension bolt is arranged on.
5. parallel compound ultrasonic energy transmission device according to claim 1 and 2 is characterized in that: the cross section of spring beam is the square-section, and the luffing bar can be the center with the spring beam, rotates in small angle range.
6. parallel compound ultrasonic energy transmission device according to claim 3 is characterized in that: the cross section of spring beam is the square-section, and the luffing bar can be the center with the spring beam, rotates in small angle range.
7. parallel compound ultrasonic energy transmission device according to claim 4 is characterized in that: the cross section of spring beam is the square-section, and the luffing bar can be the center with the spring beam, rotates in small angle range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100722116A CN101053864B (en) | 2007-05-16 | 2007-05-16 | Parallel compound ultrasonic energy transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100722116A CN101053864B (en) | 2007-05-16 | 2007-05-16 | Parallel compound ultrasonic energy transmission device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101053864A CN101053864A (en) | 2007-10-17 |
| CN101053864B true CN101053864B (en) | 2010-06-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100722116A Expired - Fee Related CN101053864B (en) | 2007-05-16 | 2007-05-16 | Parallel compound ultrasonic energy transmission device |
Country Status (1)
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| CN (1) | CN101053864B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5362235B2 (en) * | 2008-03-04 | 2013-12-11 | 独立行政法人国立高等専門学校機構 | Compound vibrator |
| CN101758017B (en) * | 2009-12-31 | 2012-11-07 | 陕西师范大学 | Omnidirectional ultrasonic radiator |
| US8919631B2 (en) * | 2012-03-15 | 2014-12-30 | Asm Technology Singapore Pte Ltd | Wire bonder including a transducer, a bond head, and a mounting apparatus |
| CN104842029A (en) * | 2015-04-17 | 2015-08-19 | 首都航天机械公司 | Workpiece additional ultrasonic vibration device for ultrasonic electrical discharge machining |
| CN105118493B (en) * | 2015-07-29 | 2018-12-04 | 陕西师范大学 | The compressional vibration converter of one end input multiterminal output can be achieved |
| CN106298598A (en) * | 2016-11-04 | 2017-01-04 | 哈尔滨工业大学深圳研究生院 | High intensity is bonded transducer without the flip-chip of drift angle |
| CN106423810B (en) * | 2016-11-15 | 2018-10-09 | 陕西师范大学 | The variable ultrasonic variable amplitude bar of performance parameter |
| CN108052137B (en) * | 2017-12-06 | 2020-04-03 | 浙江海洋大学 | Ultrasonic lead bonding ultrasonic frequency self-adjusting method |
| CN114388407B (en) * | 2021-12-24 | 2023-02-17 | 凌波微步半导体设备(常熟)有限公司 | Bonding head device and bonding machine |
| CN116021141A (en) * | 2022-12-14 | 2023-04-28 | 四川航天长征装备制造有限公司 | Ultrasonic composite friction stir welding device and welding method |
| CN117066917B (en) * | 2023-10-18 | 2023-12-19 | 山东理工大学 | Combined dual-mode multi-frequency vibration auxiliary processing device |
-
2007
- 2007-05-16 CN CN2007100722116A patent/CN101053864B/en not_active Expired - Fee Related
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| CN101053864A (en) | 2007-10-17 |
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Granted publication date: 20100609 Termination date: 20110516 |