CN101050268A - 半导体和由其产生的电子器件 - Google Patents
半导体和由其产生的电子器件 Download PDFInfo
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- CN101050268A CN101050268A CNA2007100898819A CN200710089881A CN101050268A CN 101050268 A CN101050268 A CN 101050268A CN A2007100898819 A CNA2007100898819 A CN A2007100898819A CN 200710089881 A CN200710089881 A CN 200710089881A CN 101050268 A CN101050268 A CN 101050268A
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- Prior art keywords
- phenyl
- group
- general formula
- hydroxyl
- scheme
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims description 43
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 24
- 125000003118 aryl group Chemical group 0.000 claims abstract description 23
- 125000003710 aryl alkyl group Chemical group 0.000 claims abstract description 14
- 239000000203 mixture Substances 0.000 claims abstract description 14
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 12
- 150000002367 halogens Chemical class 0.000 claims abstract description 12
- 125000003545 alkoxy group Chemical group 0.000 claims abstract description 11
- 125000004093 cyano group Chemical group *C#N 0.000 claims abstract description 10
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims abstract description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 7
- 239000001257 hydrogen Substances 0.000 claims abstract description 7
- 150000002431 hydrogen Chemical class 0.000 claims abstract 2
- -1 hydroxypropyl Chemical group 0.000 claims description 78
- 239000000463 material Substances 0.000 claims description 36
- 239000000178 monomer Substances 0.000 claims description 24
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 11
- 150000003512 tertiary amines Chemical class 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 9
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 claims description 8
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 8
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 7
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 7
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 7
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 7
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 7
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 7
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 5
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 5
- 125000002960 margaryl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
- 125000001421 myristyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
- 125000002958 pentadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
- 125000001204 arachidyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 4
- 125000001196 nonadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 4
- RMSGQZDGSZOJMU-UHFFFAOYSA-N 1-butyl-2-phenylbenzene Chemical group CCCCC1=CC=CC=C1C1=CC=CC=C1 RMSGQZDGSZOJMU-UHFFFAOYSA-N 0.000 claims description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 3
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- GAWIXWVDTYZWAW-UHFFFAOYSA-N C[CH]O Chemical group C[CH]O GAWIXWVDTYZWAW-UHFFFAOYSA-N 0.000 claims description 2
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 claims description 2
- 125000005003 perfluorobutyl group Chemical group FC(F)(F)C(F)(F)C(F)(F)C(F)(F)* 0.000 claims description 2
- 125000005005 perfluorohexyl group Chemical group FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)* 0.000 claims description 2
- 125000005009 perfluoropropyl group Chemical group FC(C(C(F)(F)F)(F)F)(F)* 0.000 claims description 2
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229920000642 polymer Polymers 0.000 abstract description 11
- 239000010410 layer Substances 0.000 description 44
- 125000004432 carbon atom Chemical group C* 0.000 description 18
- 239000000126 substance Substances 0.000 description 12
- 108091006146 Channels Proteins 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 239000010408 film Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 8
- 229920001940 conductive polymer Polymers 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000004528 spin coating Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 229920000728 polyester Polymers 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 6
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Divinylene sulfide Natural products C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 5
- 229920000620 organic polymer Polymers 0.000 description 5
- 239000002985 plastic film Substances 0.000 description 5
- 229920000515 polycarbonate Polymers 0.000 description 5
- 239000004417 polycarbonate Substances 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 4
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 238000007641 inkjet printing Methods 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 4
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
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- 230000006866 deterioration Effects 0.000 description 3
- 125000005842 heteroatom Chemical group 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
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- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 3
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- 238000002360 preparation method Methods 0.000 description 3
- 230000003449 preventive effect Effects 0.000 description 3
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229930192474 thiophene Natural products 0.000 description 3
- OCJBOOLMMGQPQU-UHFFFAOYSA-N 1,4-dichlorobenzene Chemical compound ClC1=CC=C(Cl)C=C1 OCJBOOLMMGQPQU-UHFFFAOYSA-N 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 241000790917 Dioxys <bee> Species 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000007766 curtain coating Methods 0.000 description 2
- 229940117389 dichlorobenzene Drugs 0.000 description 2
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- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
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- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 2
- 125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- JESXATFQYMPTNL-UHFFFAOYSA-N mono-hydroxyphenyl-ethylene Natural products OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000005691 oxidative coupling reaction Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 229960002796 polystyrene sulfonate Drugs 0.000 description 2
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- 229920005989 resin Polymers 0.000 description 2
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- 239000004332 silver Substances 0.000 description 2
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- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 2
- RELMFMZEBKVZJC-UHFFFAOYSA-N 1,2,3-trichlorobenzene Chemical compound ClC1=CC=CC(Cl)=C1Cl RELMFMZEBKVZJC-UHFFFAOYSA-N 0.000 description 1
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- 229920003026 Acene Polymers 0.000 description 1
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 1
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- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
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- 238000000862 absorption spectrum Methods 0.000 description 1
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- 150000004703 alkoxides Chemical class 0.000 description 1
- 125000002877 alkyl aryl group Chemical group 0.000 description 1
- 125000005037 alkyl phenyl group Chemical group 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 1
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- 125000004429 atom Chemical group 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
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- 229910052804 chromium Inorganic materials 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N chromium(III) oxide Inorganic materials O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
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- 125000002541 furyl group Chemical group 0.000 description 1
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- DDYSHSNGZNCTKB-UHFFFAOYSA-N gold(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Au+3].[Au+3] DDYSHSNGZNCTKB-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 125000001072 heteroaryl group Chemical group 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- GNMQOUGYKPVJRR-UHFFFAOYSA-N nickel(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Ni+3].[Ni+3] GNMQOUGYKPVJRR-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
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Abstract
本发明公开了包含通式(I)、通式(II)的聚合物或其混合物或异构体的电子器件,其中每个R1到R10独立地是氢、烷基、芳基、烷氧基、卤素、芳基烷基、氰基或硝基,条件是R1和R2不包括卤素、硝基和氰基;a和b表示环的数目;和n表示重复基团或部分的数目。
Description
关于联邦资助研究或开发的声明
该电子器件及其某些组件由National Institute of Standards andTechnology(NIST)签订的United States Government CooperativeAgreement No.70NANBOH3033赞助。美国政府就在以下举例说明的器件和某些半导体组件具有某些权利。
技术领域
本公开内容总体上涉及在此举例说明的通式的并例如从下述单体产生的半导体,该单体包含主要为稳定性的两个叔胺和两个噻吩并基团,制备方法和其用途。更具体地,本公开内容在实施方案中涉及在此举例说明的通式的并例如从下述单体产生的新聚合物,该单体包含主要为稳定性的两个叔胺和在单体每个端点的两个噻吩并基团,它允许例如在聚合之后延长聚合物共轭,并且其可以选择为有机电子器件,如薄膜晶体管中可溶液加工和基本稳定的信道半导体。
背景技术
存在采用在此举例说明的通式的半导体制造的所需电子器件,如薄膜晶体管、TFT,并且该半导体具有优异的溶剂溶解度,且可以是可溶液加工的;并且该器件具有机械耐用性和结构柔性,这是在塑料基材上制造柔性TFT所需的特性。柔性TFT能够实现具有结构柔性和机械耐用性特性的电子器件的设计。塑料基材与在此举例说明的通式的并例如从下述单体产生的半导体的一起使用可将传统刚性硅TFT转变成机械上更耐用和结构柔性的TFT设计,所述单体包含主要为稳定性的两个叔胺和例如两个噻吩并基团。这对大面积器件如大面积图像传感器、电子纸和其它显示介质有特别的价值。同样,选择在此举例说明的通式的并例如从下述单体产生的p-型半导体用于低端微电子集成电路逻辑元件,如智能卡、射频识别(RFID)标记和记忆/存储器件可增强它们的机械耐用性和因此它们的使用寿命,所述单体包含主要为稳定性的在聚合物单体单元的中心部分的两个叔胺,和用于延长共轭的在聚合物结构单体单元的两个噻吩并末端或终止基团。
相信许多半导体材料当暴露于空气时是不稳定的,因为它们由环境氧气氧化掺杂,导致增加的电导率。结果是对于由这些材料制造的器件的大切断电流和因此低的电流开/关比。因此,采用许多这种材料通常在材料加工和器件制造期间采取严格的预防措施以排除环境氧以避免或最小化氧化掺杂。这些预防措施增加制造成本,因此抵消某些半导体TFT作为无定形硅技术的经济替代的吸引力,特别是对于大面积器件。在本公开内容的实施方案中避免或最小化这些和其它缺点。
由在此举例说明的通式的p-型半导体聚合物制造的TFT在功能和结构上可以比常规硅更为需要,在于它们可提供机械耐用性、结构柔性和能够直接引入到器件的有源介质上的可能性,因此提高对于运输性的器件致密度。同样,许多已知的基于小分子或低聚物的TFT器件依赖于困难的真空沉积技术而制造。选择真空沉积主要是由于选择的材料是不溶性的或它们借助旋涂、溶液流延或压印的溶液加工通常不提供均匀的薄膜。
此外,真空沉积也可能涉及对于大面积格式难以获得一致的薄膜质量。聚合物TFT,如由立体规则组分,例如立体规则聚(3-烷基噻吩-2,5-二基)由溶液工艺制造的那些尽管提供了一定的迁移率,但受限于它们在空气中氧化掺杂的倾向。对于实用的低成本TFT设计,因此有价值的是具有既稳定又可溶液加工的半导体材料,并且其中其性能不受环境氧的消极影响,例如采用聚(3-烷基噻吩-2,5-二基)产生的TFT对空气非常敏感。从这些材料制造的TFT在环境条件下通常显示大的切断电流、非常低的电流开/关比,并且它们的性能特性快速劣化。
发明内容
在此公开如下实施方案。
方案1.一种包括半导体的电子器件,该半导体选自通式(I)、通式(II)或其混合物的至少一种,
其中每个R1到R10独立地是氢、烷基、芳基、烷氧基、卤素、芳基烷基、氰基或硝基,条件是R1和R2不包括卤素、硝基和氰基;a和b表示环的数目;和n表示重复基团或部分的数目。
方案2.根据方案1的器件,其中n表示约2-约5000或2-约2000的数字。
方案3.根据方案1的器件,其中n表示约100-约1000的数字。
方案4.根据方案1的器件,其中n表示2-约50的数字。
方案5.根据方案1的器件,其中R1到R10的至少一个是烷基。
方案6.根据方案1的器件,其中R1到R10的至少一个是芳基。
方案7.根据方案1的器件,其中R3到R10的至少一个是卤素。
方案8.根据方案1的器件,其中R3到R10的至少一个是氰基或硝基。
方案9.根据方案1的器件,其中R1和R2独立地是十二烷基、戊基苯基或辛基苯基。
方案10.根据方案1的器件,其中所述半导体是任选地由下述单体产生的p-型半导体,该单体包含两个叔胺和两个噻吩并基团,并且该p-型半导体具有如下通式的结构:
其中R1到R6的至少一个是烷基或芳基,和n是2-约100的数字。
方案11.根据方案1的器件,其中每个R是包含6-约36个碳原子的芳基。
方案12.根据方案1的器件,其中烷基和烷氧基包含1-约25个碳原子,并且卤素是氯、氟、碘或溴。
方案13.根据方案1的器件,其中烷基或烷氧基包含约1-约12个碳原子。
方案14.根据方案1的器件,其中n是约10-约200或约20-约100的数字。
方案15.根据方案1的器件,其中n是约50。
方案16.根据方案1的器件,其中芳基包含6-约48个碳原子。
方案17.根据方案1的器件,其中芳基包含6-约18个碳原子。
方案18.根据方案1的器件,其中所述半导体具有通式I的结构。
方案19.根据方案1的器件,其中所述半导体具有通式II的结构。
方案20.一种薄膜晶体管,器件由如下部分构成:基材、栅电极、栅电介质层、源电极和漏电极、及与源/漏电极和栅电介质层接触的由如下通式的至少一种组分或其混合物构成的半导体层:
其中每个R1到R10独立地是氢、烷基、芳基、烷氧基、卤素、芳基烷基、氰基或硝基,条件是R1和R2不包括卤素、硝基和氰基;a和b表示环的数目;和n表示重复基团或部分的数目。
方案21.根据方案20的器件,其中烷基是丁基、戊基、己基、庚基、辛基、壬基、癸基、十一烷基、十二烷基、十三烷基、十四烷基、十五烷基、十六烷基、十七烷基、十八烷基、十九烷基或二十烷基。
方案22.根据方案20的器件,其中所述半导体具有如下可供选择的通式的结构:
其中R1到R6的至少一个是烷基、芳基或芳基烷基,和n是2-约200的数字。
方案23.根据方案20的器件,其中所述半导体具有如下通式的结构:
其中n是2-约100。
方案24.根据方案20的器件,其中所述基材是聚酯、聚碳酸酯或聚酰亚胺的塑料片;所述栅、源和漏电极各自独立地由银、金、镍、铝、铬、铂或氧化铟钛或导电聚合物构成;和所述栅电介质层由无机氮化物或氧化物、或有机聚合物、氮化硅、氧化硅构成。
方案25.根据方案20的器件,其中所述半导体由旋涂、压印、丝网印刷或喷墨印刷的溶液工艺沉积。
方案26.一种包括半导体组分的电子器件,并且其中该器件是薄膜晶体管,且该组分选自如下物质或其混合物:
其中R1到R10的至少一个是合适的烃;a和b表示环的数目;和n表示重复单元的数目。
方案27.根据方案1的器件,其中所述芳基烷基包含7-约37个碳原子。
方案28.根据方案1的器件,其中所述R1到R10是甲基、乙基、丙基、丁基、戊基、己基、庚基、辛基、壬基、癸基、十一烷基、十二烷基、十三烷基、十四烷基、十五烷基、十六烷基、十七烷基、十八烷基、十九烷基、二十烷基、羟基甲基、羟基乙基、羟基丙基、羟基丁基、羟基戊基、羟基己基、羟基庚基、羟基辛基、羟基壬基、羟基癸基、羟基十一烷基、羟基十二烷基、甲氧基乙基、甲氧基丙基、甲氧基丁基、甲氧基戊基、甲氧基辛基、三氟甲基、全氟乙基、全氟丙基、全氟丁基、全氟戊基、全氟己基、全氟庚基、全氟辛基、全氟壬基、全氟癸基、全氟十一烷基或全氟十二烷基。
方案29.根据方案1的器件,其中所述芳基或芳基烷基是苯基、甲基苯基、乙基苯基、丙基苯基、丁基苯基、戊基苯基、己基苯基、庚基苯基、辛基苯基、壬基苯基、癸基苯基、十一烷基苯基、十二烷基苯基、十三烷基苯基、十四烷基苯基、十五烷基苯基、十六烷基苯基、十七烷基苯基或十八烷基苯基。
方案30.根据方案1的器件,其中a是0-约15的数字。
方案31.根据方案1的器件,其中b是0-约15的数字。
方案32.根据方案1的器件,其中每个a和b是约1-约4的数字。
方案33.根据方案1的器件,其中R3到R10的至少一个是带有1-约12个碳原子的烷基、带有1-约12个碳原子的烷氧基或带有6-约42个碳原子的芳基。
附图说明
在图1-4中举例说明本公开内容的各种代表性实施方案,并且其中选择在此举例说明的通式的并例如从下述单体产生的p-型半导体作为薄膜晶体管(TFT)结构中的信道或半导体材料,所述单体包含主要用于稳定性的两个叔胺和主要用于延长共轭的两个噻吩并基团。
具体实施方式
本公开内容的特征是提供在此举例说明的通式的p-型半导体,其用于微电子器件应用,如TFT器件。
本公开内容的另一个特征是提供带隙为约1.5eV-约3eV(如由其薄膜的吸收光谱确定)的在此举例说明的通式的p-型半导体。
在本公开内容的另外特征中,提供在此举例说明的通式I和II的p-型半导体,其用作微电子组件,并且该聚合物在常规有机溶剂,如二氯甲烷、四氢呋喃、甲苯、二甲苯、均三苯、氯苯、二氯苯、三氯苯等中的溶解度为例如至少约0.1wt%-约95wt%,且因此这些聚合物可以由溶液工艺如旋涂、丝网印刷、压印、浸涂、溶液流延、喷墨印刷等制造。
本公开内容的另一个特征在于提供采用在此举例说明的通式的p-型半导体作为信道层的电子器件,如TFT,并且该层的电导率为约10-4-约10-9S/cm(西门子/厘米)。
同样,在本公开内容的另一个特征中提供在此举例说明的通式的新颖p-型半导体及其器件,并且该器件显示对氧的不利影响的增强抵抗力,即这些器件显示相对高的电流开/关比,且它们的性能不象采用立体规则聚(3-烷基噻吩-3,5-二基)或采用并苯制造的相似器件那样快速地显著劣化。
在实施方案中公开了聚合物,且更具体地公开了在此举例说明的通式的p-型半导体及其电子器件。更具体地,本公开内容涉及由通式(I)或由通式(II)举例说明或包括的半导体聚合物:
其中通式(II)的单体单元是通式(I)的单体单元的异构体,其中例如每个R1到R10独立地是氢、烷基、芳基、烷氧基、芳基烷基、烷基取代的芳基,但R1和R2不包括卤素、氰基、硝基等;a和b表示环的数目,它们各自是例如0-约3;和n表示单元的数目,例如n是约2-约2000,和更具体地约2-约1000,或约100-约700,或约2-约50的数字,或I和II的混合物,例如约5wt%-约95wt%的I和约95-约5%的II。
聚合物的数均分子量(Mn)在实施方案中可以是例如约500-约300000,包括约500-约100000,和其重均分子量(Mw)可以是约600-约500000,包括约600-约200000,两者均由凝胶渗透色谱使用聚苯乙烯标准物测量。
在实施方案中,具体种类的p-型信道半导体由如下通式表示:
其中每个R1到R6独立地是例如氢、合适的烃如烷基、芳基、烷氧基、芳基烷基、烷基取代的芳基等;和其混合物;和n表示单元的数目,例如n是约2-约5000,和更具体地约2-约1000或约2-约700的数字。在实施方案中,R1到R6更具体地是烷基、芳基烷基和烷基取代的芳基。更加具体地,R1和R2是带有约5-约20个碳原子的烷基,例如戊基、己基、庚基、辛基、壬基、癸基、十一烷基、十二烷基、十三烷基、十四烷基、十五烷基、十六烷基、十七烷基或十八烷基;带有约7-约26个碳原子的芳基烷基,例如甲基苯基(甲苯基)、乙基苯基、丙基苯基、丁基苯基、戊基苯基、己基苯基、庚基苯基、辛基苯基、壬基苯基、癸基苯基、十一烷基苯基、十二烷基苯基、十三烷基苯基、十四烷基苯基、十五烷基苯基、十六烷基苯基、十七烷基苯基和十八烷基苯基。
在实施方案中公开了根据例如如下反应方案制备在此举例说明的通式的p-型半导体的方法:
反应方案1
更具体地,制备在此举例说明的通式的聚合物半导体的方法可以通过例如单体(III)在氧化偶联剂,例如FeCl3的存在下在例如从室温到约80℃的高温下氧化偶联聚合,或通过单体(IV)在锌、氯化镍(II)、2,2′-联吡啶(dipyridil)和三苯基膦存在下在二甲基乙酰胺(DMAc)中在例如约70℃-约90℃,和更具体地约80℃的高温下脱卤偶联聚合合适的时间如24小时完成。在反应方案1中,每个R1到R6如在此所举例说明,是例如氢、烷基、芳基、烷氧基、芳基烷基、烷基取代的芳基等;和其混合物;和n表示单元的数目,例如n是约2-约500,和更具体地约2-约1000,或约2-约700的数字。
每个R基团(包括R1到R10)的例子包括带有例如约1-约30,包括约4-约18个碳原子(此范围中的数字全部包括在内,例如4,5,6,7,8,9,10,11,12,13,14,15,16,17和18),和进一步包括约6-约16个碳原子的烷氧基和烷基,如甲基、乙基、丙基、丁基、戊基、己基、庚基、辛基、壬基、癸基、十一烷基、十二烷基、十三烷基、十四烷基、十五烷基、十六烷基、十七烷基、十八烷基、十九烷基或二十烷基,其异构体形式,其混合物等,和对应的醇盐,如丙氧基和丁氧基;带有约7-约50个碳原子,约7-约37个碳原子,约12-约25个碳原子的烷基芳基,如烷基苯基如甲基苯基、取代苯基;带有6-约48个碳原子和更具体地带有约6-约18个碳原子的芳基,如苯基。卤素包括氯、溴、氟和碘。杂原子和含杂原子基团包括例如聚醚、三烷基甲硅烷基、杂芳基等;和更具体地,噻吩基、呋喃基和吡啶基芳基(pyridiaryl)。杂原子组分可以选自许多已知的原子如硫、氧、氮、硅、硒等。
具体的举例说明性聚合物半导体是
其中n是例如约2-约50。
聚合物半导体溶于或基本溶于常规的涂料溶剂,例如在实施方案中它们在诸如二氯甲烷、1,2-二氯乙烷、四氢呋喃、甲苯、二甲苯、均三苯、氯苯、二氯苯等的溶剂中的溶解度为至少约0.1wt%,和更具体地为约0.5wt%到约10wt%或到约95wt%。此外,本公开内容的在此举例说明的通式的并例如由下述单体产生的p-型半导体在实施方案中当制造为TFT器件中半导体信道层时提供例如约10-9S/cm至约10-4S/cm,和更具体地约10-8S/cm至约10-5S/cm的稳定电导率,如由常规四探针电导率测量所测定,所述单体包括主要用于稳定性的两个叔胺和用于延长共轭的两个噻吩并基团。
相信公开的p-型半导体当从溶液制造为例如厚度为约10纳米-约500纳米或约50-约300纳米的薄膜时,与由聚(3-烷基噻吩-2,5-二基)制造的相似器件相比材料在环境条件下更稳定。当未受保护时,上述在此举例说明的通式的p-型半导体和其器件在对环境氧暴露之后通常稳定数周而不是数天或数小时,如在采用聚(3-烷基噻吩-2,5-二基)的情况下,因此当在制备材料、制造器件和评价期间不采用严格的程序预防措施以排除环境氧时,在本公开内容的实施方案中由在此举例说明的通式的和例如由下述单体产生的p-型半导体制造的器件可提供更高的电流开/关比,并且它们的性能特性不象聚(3-烷基噻吩-2,5-二基)那样快速地显著变化,所述单体包含主要用于稳定性的两个叔胺、和两个噻吩并基团。公开的P-型半导体在实施方案中是稳定的,即当暴露于氧时它们基本不劣化。
本公开内容的各方面涉及包括半导体的电子器件,该半导体选自通式(I)、通式(II)或其混合物的至少一种;由如下部分构成的薄膜晶体管:基材、栅电极、栅电介质层、源电极和漏电极及与源/漏电极和栅电介质层接触的由在此举例说明的通式的至少一种组分或其混合物构成的半导体层;
包括半导组分和其中所述器件是薄膜晶体管的电子器件,并且该组分选自如下物质或其混合物:
其中R1到R10的至少一个是合适的烃;a和b表示环的数目;和n表示重复单元的数目;包括选自通式(I)、通式(II)或其混合物的至少一种的那些的聚合物;TFT器件,其中基材是聚酯、聚碳酸酯或聚酰亚胺的塑料片;栅、源和漏电极每个独立地由金、镍、铝、铂、氧化铟钛或导电聚合物构成,并且栅电介质是由氮化硅或氧化硅构成的电介质层;TFT器件,其中基材是玻璃或塑料片;所述栅、源和漏电极每个由金构成,并且栅电介质层由有机聚合物聚(甲基丙烯酸酯)或聚(乙烯基苯酚)构成;器件,其中聚(3-炔基噻吩)层由旋涂、压印、丝网印刷或喷墨印刷的溶液工艺形成;器件,其中栅、源和漏电极、栅电介质和半导体层由旋涂、溶液流延、压印、丝网印刷或喷墨印刷的溶液工艺形成;和TFT器件,其中基材是聚酯、聚碳酸酯或聚酰亚胺的塑料片,并且栅、源和漏电极由有机导电聚合物聚苯乙烯磺酸盐掺杂的聚(3,4-亚乙基二氧噻吩)或由银在聚合物基料中的胶体分散体的导电油墨/糊剂化合物制造,并且栅电介质层是有机聚合物或无机氧化物粒子-聚合物复合材料;和一种或多种包括电子器件如TFT的器件。
在图1中示意性举例说明TFT结构10,其由如下部分构成:基材16,与其接触的金属接触件18(栅电极)和一层绝缘电介质层14,其中栅电极的一部分或整个栅与电介质层14接触,在该层14的顶部上沉积两个金属接触件20和22(源和漏电极)。位于金属接触件20和22之上和之间的是其中n是50的通式(5)的p-型半导体层12。栅电极可以全部包括在基材中、包括在电介质层中等。
图2示意性举例说明另一个TFT结构30,其由如下部分构成:基材36,栅电极38,源电极40,和漏电极42,绝缘电介质层34,和其中n是50的通式(5)的p-型半导体层32。
图3示意性举例说明另一个TFT结构50,其由如下部分构成:重度n-掺杂硅晶片56,它可用作栅电极,热生长氧化硅电介质层54,其中n是50的通式(5)的p-型半导体层52,在其顶部上沉积源电极60和漏电极62;和栅电极接触件64。
图4示意性举例说明TFT结构70,其由如下部分构成:基材76,栅电极78,源电极80,漏电极82,其中n是50的通式(5)的p-型半导体层72,和绝缘电介质层74。
同样,考虑其它未公开的器件,特别是TFT器件,例如参考已知的TFT器件。
在本公开内容的一些实施方案中,可以在图1、2、3和4的晶体管结构的每个顶部上引入任选的保护层。对于图4的TFT结构,绝缘电介质层74也可起保护层的作用。
在实施方案中以及参考本公开内容和附图,依赖于预期的应用,基材层可通常是包括各种适当形式的硅、玻璃板、塑料膜或片材等的硅材料。对于结构柔性器件,可以选择塑料基材,例如聚酯、聚碳酸酯、聚酰亚胺片等。基材的厚度可以是例如约10微米到10毫米以上,具体的厚度是约50-约100微米,特别地对于柔性塑料基材,和对于刚性基材如玻璃或硅为约1-约10毫米。
绝缘电介质层可分隔栅电极与源和漏电极,并与半导体层接触,它通常可以是无机材料膜、有机聚合物膜或无机-有机复合材料膜。电介质层的厚度是例如约10纳米-约1微米,更具体的厚度是约100纳米-约500纳米。适于作为电介质层的无机材料的举例说明性例子包括氧化硅、氮化硅、氧化铝、钛酸钡、锆酸钛酸钡等;用于电介质层的有机聚合物的举例说明性例子包括聚酯、聚碳酸酯、聚(乙烯基苯酚)、聚酰亚胺、聚苯乙烯、聚(甲基丙烯酸酯)、聚(丙烯酸酯)、环氧树脂等;和无机-有机复合材料的举例说明性例子包括在聚合物如聚酯、聚酰亚胺、环氧树脂等中分散的纳米尺寸金属氧化物粒子。依赖于使用的电介质材料,绝缘电介质层的厚度通常为约50纳米-约500纳米。更具体地,电介质材料的介电常数为例如至少约3,因此约300纳米的合适电介质厚度可提供例如约10-9-约10-7F/cm2的所需电容。
位于例如电介质层和源/漏电极之间及与电介质层和源/漏电极接触的是由在此举例说明的通式的p-型半导体构成的有源半导体层,并且其中此层的厚度通常为例如约10纳米-约1微米,或约40-约100纳米。此层通常可以由本公开内容的p-型半导体溶液的溶液工艺,如旋涂、流延、丝网印刷、压印或喷黑印刷制造。
栅电极可以是薄金属膜、导电聚合物膜、从导电油墨或糊剂产生的导电膜、或基材自身(例如重度掺杂的硅)。栅电极材料的例子包括但不限于铝、金、铬、氧化铟锡、导电聚合物,如聚苯乙烯磺酸盐掺杂的聚(3,4-亚乙基二氧噻吩)(PSS/PEDOT)、由包含在聚合物基料中的炭黑/石墨或胶体银分散体构成的导电油墨/糊剂,如购自Acheson Colloids Company的Electrodag,和购自Noelle Industries的银填充导电热塑性油墨等。栅极层可以通过真空蒸发、金属或导电金属氧化物的溅射、从导电聚合物溶液或导电油墨或分散体由旋涂、流延或印刷的涂覆而制备。栅电极层的厚度是例如约10纳米-约10微米,和具体的厚度是例如对于金属膜为约10-约200纳米,和对于聚合物导体为约1-约10微米。
源和漏电极层可以由对半导体层提供低电阻欧姆接触的材料制造。适于用作源和漏电极的典型材料包括栅电极材料的那些,如金、镍、铝、铂、导电聚合物和导电油墨。此层的典型厚度是例如约40纳米-约1微米,更具体的厚度是约100-约400纳米。TFT器件包含宽度为W和长度为L的半导体信道。半导体信道宽度可以是例如约10微米-约5毫米,具体的信道宽度是约100微米-约1毫米。半导体信道长度可以是例如约1微米-约1毫米,更具体的信道长度是约5微米-约100微米。
将源电极接地,并且当通常将例如约+10伏到约-80伏的电压施加到栅电极时,通常将例如约0伏-约-80伏的偏压施加到漏电极以收集经过半导体信道输送的电荷载流子。
在实施方案中也可以选择用于本公开内容TFT器件的各种组件的未在此描述的其它已知材料。
尽管不希望受理论约束,但相信叔胺中心基团的主要功能是最小化或避免由于对氧暴露的不稳定性,并因此增加在此举例说明的通式的和例如从下述单体产生的半导体在溶液中在环境条件下的氧化稳定性,并且取代基,如烷基允许这些聚合物在通常溶剂,如二氯乙烷中的溶解度,所述单体包含主要用于稳定性的两个叔胺和两个噻吩并端基。
Claims (8)
2.根据权利要求1的器件,其中n表示约2-约5000,或2-约2000,或约100-约1000,或2-约50的数字。
4.根据权利要求1的器件,其中n是约10-约200的数字,和其中所述半导体具有通式I的结构。
7.根据权利要求1的器件,其中所述R1到R10是甲基、乙基、丙基、丁基、戊基、己基、庚基、辛基、壬基、癸基、十一烷基、十二烷基、十三烷基、十四烷基、十五烷基、十六烷基、十七烷基、十八烷基、十九烷基、二十烷基、羟基甲基、羟基乙基、羟基丙基、羟基丁基、羟基戊基、羟基己基、羟基庚基、羟基辛基、羟基壬基、羟基癸基、羟基十一烷基、羟基十二烷基、甲氧基乙基、甲氧基丙基、甲氧基丁基、甲氧基戊基、甲氧基辛基、三氟甲基、全氟乙基、全氟丙基、全氟丁基、全氟戊基、全氟己基、全氟庚基、全氟辛基、全氟壬基、全氟癸基、全氟十一烷基或全氟十二烷基,其中所述芳基或芳基烷基是苯基、甲基苯基、乙基苯基、丙基苯基、丁基苯基、戊基苯基、己基苯基、庚基苯基、辛基苯基、壬基苯基、癸基苯基、十一烷基苯基、十二烷基苯基、十三烷基苯基、十四烷基苯基、十五烷基苯基、十六烷基苯基、十七烷基苯基或十八烷基苯基。
8.根据权利要求1的器件,其中a是0-约15的数字,和b是0-约15的数字。
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