CN101029385A - Microwave plasma back-coating and re-coating method for CVD diamond coating cutter - Google Patents
Microwave plasma back-coating and re-coating method for CVD diamond coating cutter Download PDFInfo
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- CN101029385A CN101029385A CN 200710013866 CN200710013866A CN101029385A CN 101029385 A CN101029385 A CN 101029385A CN 200710013866 CN200710013866 CN 200710013866 CN 200710013866 A CN200710013866 A CN 200710013866A CN 101029385 A CN101029385 A CN 101029385A
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Abstract
A microwave plasma re-coating method for CVD diamond coating cutter is carried out by machining oxygen entrance at lower part of microwave plasma vacuum chamber, fixing CVD diamond coating cutter in microwave plasma vacuum chamber, power cutting for electromagnetic coil, vacuum supplying for microwave plasma vacuum chamber, inducing into oxygen and 2.45GHz microwave plasma beam, burning for cutter diamond coating to form into grain, cooling to remove grain, cleaning cutter, putting it in microwave plasma vacuum chamber, growing diamond coating by microwave plasma CVD process and re-coating. It's simple, convenient and efficient and has a long usage life.
Description
Technical field
The present invention relates to moving back of CVD diamond-coated tools and be coated with and the recoat method, belong to the coated cutting tool technical field.
Background technology
The CVD diamond is to go up the diamond synthesis film with chemical Vapor deposition process (being called for short CVD) at heterogeneous matrix (as rapid steel, Wimet, pottery etc.), this technology has been applied on the cutting tool, be called the CVD diamond-coated tools, its performance and natural diamond are approaching, are mainly used in the machining of non-ferrous metal and alloy thereof such as aluminum silicon alloy, copper alloy, fiber-reinforced polymer, pottery, graphite etc.Add man-hour, the cutting speed height, the working (machining) efficiency height, and cutter life is long.The main drawback of CVD diamond-coated tools is that its cost is very high with respect to cutter materials such as rapid steel, Wimet, potteries; In addition, behind wearing and tearing of CVD diamond coatings or the disbonding, need change cutter immediately.Be coated with by moving back, recoat renovation back cutter can continue to use, and the unnecessary diamond-coated tools of buying new costliness again, thus diamond-coated tools move back be coated with recoat be the core technology that solves its processing economy.
One of coating process of CVD diamond cutter is to adopt microwave plasma method, carries out in the microwave plasma vacuum chamber, and the structure of microwave plasma vacuum chamber is that the periphery is equipped with solenoid, and the top is provided with the microwave plasma beam entrance.The effect of solenoid is to form magnetron sputtering, and sputtering particle deposits diamond coatings on the heterogeneous matrix of cutter.
Have two kinds of methods can remove cutter coat at present: chemistry moves back to be coated with to move back with physics and is coated with.Moving back the diamond coatings that is coated with on the removal inserted tool with chemistry is a kind of hand work, requires the operator that suitable skill level is arranged.The over-drastic chemistry moves back to be coated with not only coating is removed, but also the cobalt wedding agent may be dissolved and washed away, and damages the microtexture of Hardmetal materials, causes the microcosmic of cutting edge to damage, and produces hackly surface.And physics goes to be coated with, and is generally undertaken by former toolmaker, and application grinding method is got rid of diamond coatings with grindstone from tool matrix.Because diamond is stone and crisp, it grinds removes difficulty, and efficient is low, and removal amount is inhomogeneous, makes that the cutter behind the recoat is second-rate, is difficult to satisfy the production demand, also might cause the sharp wear of grinding stone.
Summary of the invention
The present invention is directed to the deficiency of existing CVD diamond-coated tools decoating method, provide that a kind of microwave plasma back simple and convenient, CVD diamond-coated tools that efficient is high is coated with, the recoat method, make the work-ing life that meets or exceeds new purchase CVD diamond-coated tools work-ing life of recoat renovation back cutter.
The microwave plasma back of CVD diamond-coated tools of the present invention is coated with, the recoat method may further comprise the steps:
(1) will have the transformation of microwave plasma vacuum chamber now, process an oxygen intake in its underpart in addition;
(2) the CVD diamond-coated tools after will wearing and tearing is fixed in the improved microwave plasma vacuum chamber, make the solenoid outage, after the microwave plasma vacuum chamber vacuumized, by its oxygen intake input oxygen, import the 2.45GHz microwave plasma torch by the microwave plasma beam entrance at its top simultaneously, the diamond coatings that makes cutter at microwave plasma vacuum chamber internal heating, be oxidizing to perfect combustion, on tool matrix, form particulate; Take out cutter then, particulate is removed in the cooling back, exposes tool matrix, moves back the process of being coated with and finishes;
(3) will move back cutter clean after being coated with after, insert the microwave plasma vacuum chamber once more, close its oxygen intake, make the solenoid energising, adopt existing microwave plasma CVD technology, growth one deck diamond coatings is finished the recoat refurbishment process on the tool matrix surface of moving back after being coated with.
Pressure was lower than 900Pa after the microwave plasma vacuum chamber vacuumized in (2) step, and the input speed of oxygen is 0.1 liter/minute, and the temperature of combustion of diamond coatings in vacuum chamber is above 800 ℃.
The present invention utilizes the microwave plasma vacuum chamber, and input oxygen carries out moving back of CVD diamond cutter and is coated with; Carry out the recoat of CVD diamond cutter when not importing oxygen, simple and convenient, move back and be coated with recoat efficient height, the work-ing life that meets or exceeds new purchase CVD diamond-coated tools work-ing life of recoat renovation back cutter.
Description of drawings
Accompanying drawing is that CVD diamond-coated tools microwave plasma back of the present invention is coated with, the principle assumption diagram of recoat method.
Among the figure: 1, CVD diamond-coated tools, 2, anchor clamps, 3, the microwave plasma vacuum chamber, 4, pallet, 5, solenoid, 6, oxygen intake, 7, the microwave plasma beam entrance.
Embodiment
Embodiment
Present embodiment with wearing and tearing after CVD diamond coatings solid end mill (diameter: 16mm, helix angle: 30 °, the number of teeth: 2 teeth, total length: 80mm, the long 20mm of sword, CVD diamond coatings thickness: be example 40 μ m).Move back be coated with, recoat adopts microwave plasma vacuum chamber 3 to carry out.As shown in drawings, the periphery of this microwave plasma vacuum chamber 3 is equipped with solenoid 5, and pallet 4 is installed in it, and its underpart is provided with oxygen intake 6, and the top is provided with microwave plasma beam entrance 7.
Concrete moving back is coated with, recoat may further comprise the steps (referring to accompanying drawing):
(1) the CVD diamond-coated tools 1 usefulness anchor clamps 2 after will wearing and tearing are fixed on the pallet 4 of microwave plasma vacuum chamber 3.
(2) make solenoid 5 outages, after microwave plasma vacuum chamber 3 vacuumized, make the pressure in it be lower than 900Pa, open oxygen intake 6 input oxygen, 0.1 liter/minute of oxygen input speed, open microwave plasma beam entrance 7 simultaneously, input 2.45GHz microwave plasma torch, make diamond coatings at vacuum chamber 3 internal heating, be oxidizing to perfect combustion, temperature of combustion is above 800 ℃, on tool matrix, form particulate, retreated through 25 minutes and be coated with end of processing.Available physical method or the particulate that forms is removed with chemical, the cutter of removing behind the diamond coatings promptly is a tool matrix.
(3) will move back cutter after being coated with after clean, insert vacuum chamber 3 again, close oxygen intake switch 6, make solenoid 5 energisings, adopt microwave plasma CVD method, growth one deck diamond coatings on the tool matrix surface of moving back after being coated with, thickness reaches 40 μ m.The recoat refurbishment process finishes.
Be coated with moving back, the CVD diamond coatings solid end mill of the CVD diamond coatings solid end mill after the recoat renovation and the new same trade mark of buying and geometrical dimension carries out the contrast cutting test of cast aluminium alloy ZL109 on same vertical machining centre.The chemical ingredients of cast aluminium alloy ZL109 and content such as following table:
| Si | Cu | Mg | Mn | AL |
| 11～13％ | 1.0～2.0％ | 0.4～1.0％ | 0.3～0.9％ | Residue |
Its tensile strength is 196Mpa, and hardness is HB115 ~ 130.Cutting data: cutting speed is 780m/min, and feed engagement is 0.08mm/Z, and axially depth of cut is 1mm, and the radial cutting degree of depth is 5mm, dry type milling, upmilling.
Reaching 0.16mm with cutter wear of the tool flank bandwidth is the cutter life judgment criteria, and the cutter life after the recoat renovation is 84 minutes, and the life-span of newly buying cutter is 80 minutes.
By changing the structure formation of anchor clamps 4, can be used for that moving back of indexable insert tip, throw away tip, solid end mill, brill first grade CVD diamond-coated tools is coated with, the recoat renovation.The application of the present invention on these form cutters also belongs to protection scope of the present invention.
Claims (4)
- The microwave plasma back of a CVD diamond-coated tools be coated with, the recoat method, it is characterized in that: may further comprise the steps:(1) will have the transformation of microwave plasma vacuum chamber now, process an oxygen intake in its underpart in addition;(2) the CVD diamond-coated tools after will wearing and tearing is fixed in the improved microwave plasma vacuum chamber, make the solenoid outage, after the microwave plasma vacuum chamber vacuumized, by its oxygen intake input oxygen, import the 2.45GHz microwave plasma torch by the microwave plasma beam entrance at its top simultaneously, the diamond coatings that makes cutter at microwave plasma vacuum chamber internal heating, be oxidizing to perfect combustion, on tool matrix, form particulate; Take out cutter then, particulate is removed in the cooling back, exposes tool matrix, moves back the process of being coated with and finishes;(3) will move back cutter clean after being coated with after, insert the microwave plasma vacuum chamber once more, close its oxygen intake, make the solenoid energising, adopt existing microwave plasma CVD technology, growth one deck diamond coatings is finished the recoat refurbishment process on the tool matrix surface of moving back after being coated with.
- 2. the microwave plasma back of CVD diamond-coated tools according to claim 1 is coated with, the recoat method, it is characterized in that: the pressure after the microwave plasma vacuum chamber vacuumizes in described (2) step is lower than 900Pa.
- 3. the microwave plasma back of CVD diamond-coated tools according to claim 1 is coated with, the recoat method, it is characterized in that: the input speed of oxygen is 0.1 liter/minute in described (2) step.
- 4. the microwave plasma back of CVD diamond-coated tools according to claim 1 is coated with, the recoat method, it is characterized in that: the temperature of combustion of diamond coatings in vacuum chamber is above 800 ℃ in described (2) step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100138666A CN100462478C (en) | 2007-03-28 | 2007-03-28 | Microwave plasma back-coating and re-coating method for CVD diamond coating cutter |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2007100138666A CN100462478C (en) | 2007-03-28 | 2007-03-28 | Microwave plasma back-coating and re-coating method for CVD diamond coating cutter |
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| Publication Number | Publication Date |
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| CN101029385A true CN101029385A (en) | 2007-09-05 |
| CN100462478C CN100462478C (en) | 2009-02-18 |
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| CNB2007100138666A Expired - Fee Related CN100462478C (en) | 2007-03-28 | 2007-03-28 | Microwave plasma back-coating and re-coating method for CVD diamond coating cutter |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105216021A (en) * | 2014-06-24 | 2016-01-06 | 厦门金鹭特种合金有限公司 | A kind of composite processing diamond-coated tools and preparation method thereof |
| CN105695950A (en) * | 2016-03-01 | 2016-06-22 | 上海科弦精密工具有限公司 | Coating removing method of diamond coated cutting tool |
| CN105695949A (en) * | 2016-02-24 | 2016-06-22 | 苏州乐晶新材料科技有限公司 | Coating removing method for diamond coated tool |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101905489B (en) * | 2010-07-21 | 2012-05-09 | 上海昌美精机有限公司 | Machining method of precise and fine graphite electrodes by using diamond coated cutting tool |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1037862C (en) * | 1993-10-28 | 1998-03-25 | 北京科技大学 | New process of chemical gas-phase deposition of diamond coating for hard alloy tool |
| JPH07150358A (en) * | 1993-12-01 | 1995-06-13 | Shin Etsu Chem Co Ltd | Diamond coating method by microwave plasma cvd |
| CN1106469A (en) * | 1994-07-15 | 1995-08-09 | 郑鲁生 | Technique for prodn. of artificial diamond scalpel |
| DE10141696A1 (en) * | 2001-08-25 | 2003-03-13 | Bosch Gmbh Robert | Process for producing a nanostructured functional coating and coating that can be produced with it |
| CN1632165A (en) * | 2004-12-28 | 2005-06-29 | 北京科技大学 | Process for preparing diamond covering on sintered-carbide tool |
| CN100390331C (en) * | 2005-09-22 | 2008-05-28 | 武汉化工学院 | Method and apparatus for polishing large-scale diamond membrane |
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2007
- 2007-03-28 CN CNB2007100138666A patent/CN100462478C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105216021A (en) * | 2014-06-24 | 2016-01-06 | 厦门金鹭特种合金有限公司 | A kind of composite processing diamond-coated tools and preparation method thereof |
| CN105695949A (en) * | 2016-02-24 | 2016-06-22 | 苏州乐晶新材料科技有限公司 | Coating removing method for diamond coated tool |
| CN105695950A (en) * | 2016-03-01 | 2016-06-22 | 上海科弦精密工具有限公司 | Coating removing method of diamond coated cutting tool |
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| Publication number | Publication date |
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| CN100462478C (en) | 2009-02-18 |
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