CN101021441A - Filtering optical read-out micro beam temperature sensor - Google Patents
Filtering optical read-out micro beam temperature sensor Download PDFInfo
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- CN101021441A CN101021441A CN 200710020667 CN200710020667A CN101021441A CN 101021441 A CN101021441 A CN 101021441A CN 200710020667 CN200710020667 CN 200710020667 CN 200710020667 A CN200710020667 A CN 200710020667A CN 101021441 A CN101021441 A CN 101021441A
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Abstract
Filter optical numerating micro-beam temperature sensor, it is characterized in that setting two materials micro-beam unit in temperature response head. Projected light of point-source projects onto micro-beam reflector. Set linear border filter unit on convergent spectrum flat of reflected light from micro-beam reflector and set imaging lens behind linear border filter unit. Set photoelectric receiver on imaging position of imaging lens. The invention uses optical method of linear border filter to detect heat angle distortion of two materials micro-beam free end, which can be applied in temperature change of precise detecting environment.
Description
Technical field
The present invention relates to be used for the sensing element of acquisition environment temperature, relate in particular to a kind of optical read-out temperature sensor based on bi-material microcantilevel.
Background technology
Temperature sensor can be divided into two big classes according to the difference of working method: contact-type and non-contact type.In the contact-type temperature sensor, commonly used have thermopair, a thermal resistance.The non-contact type temperature sensor is modal to be infrared temperature sensor.
Thermopair has use widely.Thermopair is to make according to the thermoelectrical potential effect, and plain conductor one end of two different materials welds together and is the working end, and Han Jie a end is not a free end, and two leads are called electrode.During use the working end placed temperature field to be measured, free end inserts instrument surveying its electromotive force, and makes its temperature constant.The electromotive force that thermopair produces is called thermoelectrical potential, can realize measurement to target temperature by the variation of measuring this electromotive force.Its working range can be in-200～1500 ℃, and precision can reach 0.01 ℃ usually.Because it must dispose a stable temperature reference end in the course of the work, use and be not very convenient, and since it in whole sensing process all be with electric signal transmission, be measured as the basis, need make a large amount of circuit arrangements in order to reach higher measuring accuracy, cause the raising of manufacturing cost.In addition, when in complex electromagnetic environments, working,, be easy to be subjected to other non-signal noise interference as electron device.
The thermal resistance sensor working range is generally at-55～1000 ℃, and temperature measurement accuracy can reach 0.1 ℃, and the greatest problem that this class detector is faced is a severe nonlinear, and particularly when enlarging temperature-measuring range, raising measuring accuracy, this problem is particularly outstanding.
Infrared temperature sensor is the main tool of carrying out contactless temperature-measuring.All objects are not as long as its temperature is the thermodynamics zero degree, and always at emitting infrared radiation constantly, as motor, electrical equipment, stove fire, even ice cube can both produce infrared radiation.When object temperature changed, the spectrum of its institute's radiation will change, and can realize detection to the target object temperature by the change of measuring this spectrum.The working range of this temperature sensor is usually at-80～3000 ℃, and temperature resolution is 0.1 ℃.But this temperature sensor need be equipped with the attachment device that a cover receives radiation and analyzes spectrum, and this makes, and it involves great expense, system complex, volume are big.At present, this hygrosensor is mainly used in the non-contact type temperature measurement to the higher target object of temperature, such as in the steelworks to the temperature detection of high temperature furnace.
Existing double-material beam heat distortion temperature sensor is because the cheapness of the simple and cost of its sensing mode is extensive use of as the bi-metal temperature protector by people.Such as; by in the operating circuit of electrical equipment, inserting this kind temperature sensor; when electric equipment work occurs unusually, working current causes the bimetallic temperature transducer generation thermal deformation and the automatic shutoff circuit that insert thereupon increasing, thereby appliance working is protected.Its principle of work is very simple: because beam is two materials, when the temperature of beam surrounding medium changed, beam absorbed heat and is converted into the temperature rise of himself, and then causes thermal deformation, realizes sensing thus.But this kind sensing means temperature detection sensitivity that can realize is limited at present, and its reason mainly contains three aspects, first, the method precision of the little beam distortion of employed detection is not high, causes the temperature resolution of sensor lower thus; The second, the current double-material beam size of generally using is all in a centimetre magnitude, cause its bending stiffness big and thermal deformation is less thus, and thermal capacitance is bigger, thermal response time is longer, so its temperature resolution (being about 0.5 ℃) and dynamic response performance (about second-time of response time) are all not really desirable; Three, when the size of beam more small (as micron dimension), accurately survey little beam distortion and have technical difficulty.
Summary of the invention
The present invention is for avoiding above-mentioned existing in prior technology weak point, a kind of contact-type high sensitivity filtering optical read-out micro beam temperature sensor is provided, adopt the optical means of straight border filtering, detecting two materials is the distortion of beam free end thermic corner, thus the variation of precision measurement environment temperature.
Technical solution problem of the present invention adopts following technical scheme.
The design feature of filtering optical read-out micro beam temperature sensor of the present invention is:
The double-material micro beam unit is set in temperature-sensitive head, pointolite is incident upon on little beam reflector with its projecting beam;
The straight border filter unit is being set in the spectrum that converges from little beam reflection of reflecting light on the plane, imaging len is positioned at after the straight border filter unit, and the optoelectronic receiver that is arranged on the image space of imaging len is a photelectric receiver.
The feature of filtering optical read-out micro beam temperature sensor of the present invention also is:
Temperature-sensitive head is made of hot good conductor shell and the confined chamber that is full of the good drain body of heat, and the top cover of confined chamber is the visible light light inlet window, and the double-material micro beam unit is immersed in the interior hot very drain body of confined chamber.
The feature of filtering optical read-out micro beam temperature sensor of the present invention also is:
Projecting beam from pointolite is incident upon on little beam reflector behind the collimation lens collimation; Folded light beam on little beam reflector converges through plus lens, and the back focal plane of plus lens is positioned at the plane at straight border filter unit place.
Or converging of folded light beam adopted same lens on the collimation of the projecting beam of pointolite and the little beam reflector.
Or be that projecting beam directly is incident upon on little beam reflector with the converging beam of pointolite, the focus that converges hot spot through the anti-light beams of little beam reflector reflection back formation is on the plane, place of filter unit.
Also can be: optoelectronic receiver be photodiode or photomultiplier.
Also can be: the radius that hemispherical temperature-sensitive head is set be 1 ~ 10mm, and the thermal deformation leg thickness of micro-joist unit is that 0.3 ~ 3 μ m, length are 50 ~ 1000 μ m.
Also can be: little beam thermal deformation leg of micro-joist unit be the laminated film of Au layer and SiNx layer, and the thickness ratio of Au layer and SiNx layer is 0.75 in the laminated film, or is 0.02, and length is 200 μ m or is 800 μ m.
The present invention adopts bi-material microcantilevel, detects the parameter of the thermal deformation of bi-material microcantilevel by the optically filtering method, and the end displacement of micro-cantilever for example just can obtain the temperature of testee.Compared with prior art, beneficial effect of the present invention is embodied in:
1, the present invention is owing to adopt the method for optically filtering, the light intensity that the deflection of the reading optical beam that micro-cantilever corner distortion is caused changes the fixed position hot spot into changes, photelectric receiver is a light intensity sensor, can make the reception of photosignal and processing become easier.
2, the present invention can survey the end corner distortion or the end displacement of little beam accurately owing to adopt the method for optically filtering, thereby realizes high-sensitive temperature detection.
3, among the present invention since the size of micro-cantilever in micron dimension, and the thickness of beam even to sub-micron, thereby very responsive to variation of ambient temperature, detect free-ended corner distortion of little beam or end displacement with the optics filtering method, can detect the temperature variation of little K level magnitude.
4, the present invention is by being integrated in micro-cantilever in the small hot good conductor shell, and is full of optimum thermal conductive fluid medium and forms a small temperature detecting head (typical sizes is in the millimeter magnitude).Make the area-volume ratio of temperature detecting head increase, reduced thermal capacity when improving thermal conductance, shortened thermal response time.It is less to temperature field influence itself when realization is surveyed the local temperature in temperature field.
5, according to the mechanics of materials and thermodynamics analysis, the distortion of little beam and the thickness of beam are inversely proportional to, with square being directly proportional of length.After optimizing the size of little beam, the resolution of this hygrosensor can reach little K magnitude, and the response time can reach the submicrosecond level.
Description of drawings
Fig. 1 is a sensor construction synoptic diagram of the present invention.
Fig. 2, Fig. 3 are the different embodiment structural representations of sensor of the present invention.
Fig. 4 is a temperature test curve map of the present invention.A partly is little beam microphoto among the figure.
Fig. 5 is a filtering mode principle of work synoptic diagram of the present invention.
Number in the figure: 1 pointolite, 2 collimation lenses, 3 light inlet windows, 4 double-material micro beam unit, 5 temperature-sensitive heads, 6 plus lens, 7 filter units, 8 imaging lens, 9 optoelectronic receivers, 10 power supplys and signal processing apparatus, 11 lens.
Below pass through embodiment, and in conjunction with the accompanying drawings the present invention is further described.
Embodiment
Embodiment 1:
Referring to Fig. 1, double-material micro beam unit 4 is set in temperature-sensitive head 5, pointolite 1 is positioned at the incident side of little beam reflector, and is incident upon on little beam reflector;
Be positioned at little beam reflection of reflecting side, straight border filter unit 7 be set from converging on the spectrum plane of little beam reflection of reflecting light, imaging len 8 is positioned at the back level of straight border filter unit 7, the optoelectronic receiver 9 that is arranged on the image space of imaging len 8 is light intensity receiver, light intensity receiver.
Shown in Figure 1, temperature-sensitive head 5 is made of hot good conductor shell and the confined chamber that is full of the good drain body of heat, and the top cover of confined chamber is the light inlet window 3 of visible light, and double-material micro beam unit 4 is immersed in the interior liquid of confined chamber.
In the present embodiment, behind collimation lens 2 collimations, be incident upon on little beam reflector from the illuminating bundle of pointolite 1; Folded light beam on little beam reflector converges through plus lens 6, and the back focal plane of plus lens 6 is positioned at the plane at straight border filter unit 7 places.
Optoelectronic receiver 9 is photodiode or photomultiplier.The light beam that is sent by pointolite 1 is behind the collimation of collimation lens 2, on little beam reflector of double-material micro beam unit 4, reflect, focus on through plus lens 6 again, converge spot center placement filter unit 7 on plus lens spectrum plane and carry out filtering, imaging len 8 changes filtered photoimaging into photosignal on optoelectronic receiver 9 afterwards.Power supply and signal processing apparatus 10 are arranged on the support.
The radius that semisphere temperature-sensitive head 5 is set is 1 ~ 10mm, and the thickness of micro-joist unit 4 distortion legs is 0.3 ~ 3 μ m, and length is 50 ~ 1000 μ m.
In concrete the enforcement, as shown in Figure 4, little beam is gold-plated on silicon nitride film, and the thermal deformation leg of its little beam is the SiN of 1 μ m by thickness
xWith thickness be that the Au laminated film of 0.02 μ m constitutes SiN
xWith the thickness ratio of Au be 1: 0.02, length is 200 μ m, the numerical value change of the optoelectronic receiver that the temperature variation of 11 degree causes is (3340-3180)=160, the thermal response sensitivity of little beam is the 11/160=0.06875K/ luminous intensity unit, distinguishable 0.1 luminous intensity unit of photelectric receiver, temperature resolution is 6.8mK; Thickness ratio to the two materials of little beam is adjusted, and can improve its serviceability, such as adopting SiNx: Au=1: 0.75 o'clock, little beam of same length, temperature resolution can improve one more than the magnitude.In addition, the employed material of double-material micro beam also is not limited to the Au and the SiNx of front, two combinations of materials that thermal expansion coefficient difference is big more can improve the detection sensitivity of this hygrosensor more, for instance, just the effect than Au and SiNx collocation is good to select Al and SiNx collocation for use, because the coefficient of thermal expansion of Al is bigger than Au.
Embodiment 2:
Referring to Fig. 2, in the present embodiment, converging of folded light beam adopted same lens 11 on the collimation of illuminating beam of pointolite 1 and the little beam reflector, and promptly the collimation lens plus lens 11 of holding concurrently makes mechanism obtain simplifying.
Embodiment 3:
Referring to Fig. 3, with respect to the foregoing description 1 and embodiment 2, present embodiment be with pointolite 1 converge light be the illuminating bundle direct irradiation on little beam reflector, the focus that converges hot spot through the anti-light beams of little beam reflector reflection back formation is on the plane, place of filter unit 7.
Fig. 5 has provided when adopting structure shown in Figure 1, by little beam beam reflected at diffraction spectra that forms on plus lens 6 back focal planes and the relative position relation between the optically filtering unit 7.
Fig. 5-1 expression be little beam when not being heated, the relative position relation of optically filtering unit 7 and diffraction spectra;
Fig. 5-2 expression be little beam be heated produce deflection after, the relative position relation of optically filtering unit 7 and diffraction spectra.In Fig. 5, the opaque zone territory of optically filtering unit is by 7 expressions of optically filtering unit, and the filtering boundary of definition is by 701 expressions.E0, E1 and E2 represent 0 grade of diffraction spectra, 1 grade and 2 grades respectively.The more senior time diffraction light that do not draw among Fig. 5, be because luminous energy on the higher order of diffraction time quite a little less than, optically filtering has not been had too much influence.Under the original state, optically filtering unit 7 be positioned at 0 grade of diffraction spectra, the i.e. position of diffraction spectra intensity gradient maximum.Shown in Fig. 5-1; When temperature changed, little beam produced flexural deformation, and the diffraction spectra of its folded light beam is moved shown in Fig. 5-2.Because the translation of diffraction spectra, its part diffraction light has shifted out the transparent zone territory and has entered the opaque zone territory, and correspondingly, the light intensity that receives on the optoelectronic receiver 9 will die down, and realize the sensing of temperature thus.
Claims (8)
1, filtering optical read-out micro beam temperature sensor is characterized in that:
Double-material micro beam unit (4) is set in temperature-sensitive head (5), pointolite (1) is incident upon on little beam reflector with its projecting beam;
From converging on the spectrum plane of little beam reflection of reflecting light straight border filter unit (7) is being set, imaging len (8) is positioned at straight border filter unit (7) afterwards, and the optoelectronic receiver (9) that is arranged on the image space of imaging len (8) is a photelectric receiver.
2, filtering optical read-out micro beam temperature sensor according to claim 1, it is characterized in that described temperature-sensitive head (5) is made of hot good conductor shell and the confined chamber that is full of the good drain body of heat, the top cover of confined chamber is visible light light inlet window (3), and double-material micro beam unit (4) are immersed in the good drain body of the interior heat of confined chamber.
3,, it is characterized in that behind collimation lens (2) collimation, being incident upon on little beam reflector from the projecting beam of described pointolite (1) according to the described filtering optical read-out micro beam temperature sensor of claim 2; Folded light beam on little beam reflector converges through plus lens (6), and the back focal plane of described plus lens (6) is positioned at the plane at straight border filter unit (7) place.
4, filtering optical read-out micro beam temperature sensor according to claim 3 is characterized in that converging of folded light beam adopted same lens (11) on the collimation of projecting beam of described pointolite (1) and the little beam reflector.
5, filtering optical read-out micro beam temperature sensor according to claim 2, it is characterized in that the converging beam with pointolite (1) is that projecting beam directly is incident upon on little beam reflector, the focus that the anti-light beams that forms after little beam reflector reflection converges hot spot is on the plane, place of filter unit (7).
6, filtering optical read-out micro beam temperature sensor according to claim 1 is characterized in that described optoelectronic receiver (9) is photodiode or photomultiplier.
7, filtering optical read-out micro beam temperature sensor according to claim 1, the radius that it is characterized in that being provided with hemispherical temperature-sensitive head (5) is 1 ~ 10mm, the thermal deformation leg thickness of micro-joist unit (4) is that 0.3 ~ 3 μ m, length are 50 ~ 1000 μ m.
8, double-material micro beam optical read-out temperature sensor according to claim 7, the little beam thermal deformation leg that it is characterized in that described micro-joist unit (4) is the laminated film of Au layer and SiNx layer, the thickness ratio of Au layer and SiNx layer is 0.75 in the laminated film, or be 0.02, length is 200 μ m or is 800 μ m.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200710020667 CN101021441A (en) | 2007-03-20 | 2007-03-20 | Filtering optical read-out micro beam temperature sensor |
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| CN 200710020667 CN101021441A (en) | 2007-03-20 | 2007-03-20 | Filtering optical read-out micro beam temperature sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103234648A (en) * | 2013-03-29 | 2013-08-07 | 清华大学 | Polymer bi-material micro-beam and temperature sensitive structure |
| CN108775968A (en) * | 2018-07-05 | 2018-11-09 | 平高集团威海高压电器有限公司 | A kind of non-contact temperature sensor |
-
2007
- 2007-03-20 CN CN 200710020667 patent/CN101021441A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103234648A (en) * | 2013-03-29 | 2013-08-07 | 清华大学 | Polymer bi-material micro-beam and temperature sensitive structure |
| CN103234648B (en) * | 2013-03-29 | 2015-09-23 | 清华大学 | A kind of polymkeric substance double-material micro beam and temperature sensitive structure |
| CN108775968A (en) * | 2018-07-05 | 2018-11-09 | 平高集团威海高压电器有限公司 | A kind of non-contact temperature sensor |
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