CN101019034A - Test arrangement including anisotropic conductive film for testing power module - Google Patents
Test arrangement including anisotropic conductive film for testing power module Download PDFInfo
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- CN101019034A CN101019034A CN 200580025093 CN200580025093A CN101019034A CN 101019034 A CN101019034 A CN 101019034A CN 200580025093 CN200580025093 CN 200580025093 CN 200580025093 A CN200580025093 A CN 200580025093A CN 101019034 A CN101019034 A CN 101019034A
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Abstract
A testing apparatus and method for testing a semiconductor device, and more particularly a test arrangement for measuring a guaranteed power loss of a semiconductor module, not requiring the module to have on-board decoupling capacitors for the power loss test. The conventional pogo-pin array and test socket are replaced by a novel low cost anisotropic conductive elastomer and a low cost socket, the conductive polymer providing electrical communication between the socket and the module under test.
Description
The cross reference of related application
The present invention is based on the provisional application no.60/576 that submitted on June 3rd, 2004,727 and require its right of priority, its content is as quoting and being incorporated into this.
Technical field
The present invention relates to a kind of testing apparatus and method of semiconductor test, and relate in particular to a kind of proving installation of measuring the guaranteed output loss of semiconductor module, wherein said module does not need to have the plate live that is used for the power attenuation test and holds.
Background technology
Current, in order on semiconductor module, to carry out the power attenuation test, must in encapsulation, comprise two big electric capacity.This is not worth for the user, but only is used for the power attenuation test.Integrated power supply manufacturer only can hold the power attenuation that just can guarantee on its data sheet by using complicated testing process and plate live.Fig. 3 has shown circuit board to be tested, wherein needs inner input capacitance " X " to carry out the power attenuation test.Module shown in the figure is the iP2003 iPOWIR that applicant (Int Rectifier Corp, InternationalRectifier Corp.) makes
TMModule is described among the document No.PD-96922A on November 18th, 2004 in www.irf.com.
Conventional proving installation uses traditional " spring needle (pogo-pins) " and slot.Fig. 1 has shown the test fixing device of " spring needle " contact array 30 that has in the test socket 40 that is arranged on the test board 50.Fig. 2 has shown described pogo-pin structure with the illustrated section diagram form.Described spring needle is installed in the framework 32 of relative stiffness.Each pin, for example pin 34, have a pair of plunger (plunger) 34a, 34b at its two ends, thus described plunger supports contract by distance d by spring.
Tested module is placed from the top on as shown in Figure 1 the test socket, is wherein contacted so that the parameter of power supply and measurement module to be provided with electrode on the module by spring-supported spring needle.Because pin is a stationkeeping with respect to its framework and test socket, the alignment between the electrode on pin and the module must be very accurate.
Known pogo-pin arrangement may produce leakage inductance and interconnection resistance (contact resistance adds conducting resistance), and this may cause in the vibration of power supply input and output and power attenuation, and it is inaccurate to make power attenuation measure.And, if the corresponding test point loose contact on spring needle and the module or be interrupted contact may produce voltage transient when applying power supply.This transition may be wasted the test duration, because can not test before transition steadily, and this transition may damage semiconductor module.
In order to carry out accurately the power attenuation test, provide that low-impedance to comprise very little or do not have the power supply of the electric capacity of interconnection distance be very important.Any increase of the separation distance between power supply and the modular power source pin all can cause the increase of the leakage inductance in the power circuit.This leakage inductance can cause the voltage oscillation (dynamic change) on the power pin of module successively, can change power attenuation like this, even owing to the transient overvoltage condition causes module failure.
And power attenuation is measured must be accurately.Spring needle forms the grid of rough segmentation, and the pin with limited quantity contacts with each required liner, causes very high contact resistance.Self has certain resistance equally described pin.Although interconnection resistance total between test socket and the module is very little, but influence is very big, particularly in the power attenuation test of high electric current.Voltage drop in the interconnection increases and increases along with the electric current that flows through, cause heating thus, thereby further increase interconnection resistance and change power attenuation the working point (that is to say, in interconnection loss more power input, reduced the power input that offers module).
Eliminate these factors and particularly compensate leakage inductance and realize the inner and modular power source pin impedance of required low power supply, the input and output decoupling capacitor that causes the big plate of needs to carry, as mentioned above, described electric capacity for the user less than value.They are only useful to manufacturer, and manufacturer must introduce these electric capacity so that test module is for example determined guaranteed output loss figure.
Summary of the invention
According to core of the present invention aspect, can eliminate the needs that when carrying out the power attenuation test plate live held by the elastic body of anisotropic conductive cheaply of novelty, described anisotropic conductive elastic body provides cheaply that slot has substituted slot illustrated in figures 1 and 2 and pogo-pin array.By described elastic body, owing to reduced length that interconnects and the quantity that has increased parallel connection, thereby reduced leakage inductance.And, by being provided, the conductor than more shorter length in the pogo-pin array reduced contact and conducting resistance.At last, because module to be tested drops on the described test board, described elastic body provides reliable contact, and the possibility of lower voltage transient.
Therefore, the present invention allows to make and tests integrated power module (applicant's iPOWIR for example
TMModule), thus determine guaranteed output loss figure and do not need the plate live to hold.
According to one aspect of the invention, provide a kind of test to have with the method and apparatus of power supply terminal as the semiconductor module of the I/O of power supply, comprise test socket with power supply terminal, described power supply terminal is set to provide power supply to described modular power source terminal, and is arranged in the anisotropic conductive elastomeric sheet on the described test socket.Described semiconductor module is arranged on the described thin slice, thus being electrically connected between each power supply terminal that test socket is provided by described thin slice and the semiconductor module.Power is measured at described power supply terminal, thus the electrical characteristics of determination module.
Described method and apparatus is very useful aspect the power attenuation of measuring the module that does not have the required large-scale decoupling capacitor of prior-art devices.By the present invention, the internal semiconductor circuit can be directly connected to the modular power source terminal and the decoupling capacitor that do not need to insert.
According to a further aspect of the present invention, described module also has signal terminal except power supply terminal; And terminals is provided on test socket, is used to measure signal from the signal terminal of module.Described anisotropic conductive elastomeric sheet provides the signal between described terminals and the signal terminal to connect.
By these features, the size of sheet interconnections (highly) is much smaller than the size of known spring needle, and the interconnection that allows to have very little leakage inductance.Because the described impedance that reduces connects the raising of voltage stability in the module that causes, thereby allow from module, to remove large-scale decoupling capacitor.
And, in the thin slice the meticulous grid of conductor increased and module on the quantity of contact point between each liner.The short length of these conductors minimizes its resistance.Therefore reduced total interconnection resistance (contact resistance and conducting resistance).In the power attenuation test of high electric current, the conductor in the thin slice can consume power still less.Described power consumption is not enough to cause any marked change of total interconnection resistance, thereby has produced stable power attenuation working point.
By specific description of embodiments of the present invention below with reference to accompanying drawing, other features and advantages of the present invention can be more obvious.
Description of drawings
Fig. 1 has shown known test fixing device and test socket arrangement with " spring needle " contact;
Fig. 2 has shown pogo-pin structure with schematic sectional form;
Fig. 3 has shown known board under test, needs inner input capacitance " X " to carry out the power attenuation test;
Fig. 4 is the skeleton view of test structure according to an embodiment of the invention;
Fig. 5 has shown the planimetric map of an example of the anisotropic conductive sheet example that substitutes known pogo-pin array; And
Fig. 5 A is the schematic section of anisotropic conductive sheet example shown in Figure 5.
Embodiment
As shown in Figure 4, the module (not shown) in the test is fixed in the brace table 55, by Z-axis 57 brace table 55 is dropped on the test board.Anisotropic conductive elastomeric sheet 20, promptly the elastic sheet that only conducts electricity in one direction is disposed in the test socket, shown in Fig. 5 midplane figure.
An example of described thin slice is shown among Fig. 5 A.In this example, thin slice 20 comprises elastic matrix 22 and a large amount of conductors 24 that walk abreast and fully extend by matrix 22.As shown in the figure, because the pliability of array, when module was depressed by brace table, array can compress to a certain degree, can cause conductor to tilt like this but keeping parallelism still, between test board and tested module, provide than the more reliable connection of existing pogo-pin array.
Except structure shown in Fig. 5 A, described thin slice can adopt other structures, as long as provide electric conductivity in one direction by thin slice.
Therefore, the use that comprises the proving installation of anisotropic conductive film allows to remove internal module electric capacity, the accurate measurement module power attenuation because can not need internal capacitance.
Like this, the shape of proving installation, size and layout are very near final consumer products, and this is impossible in pogo-pin arrangement.New proving installation provides Low ESR, low resistance interconnect identical when finally being soldered on the production board with module.
Although described the present invention with reference to specific embodiment, those skilled in the art can be easy to make various other variations and modification and other uses.Therefore, the present invention is not limited to certain content disclosed herein.
Claims (according to the modification of the 19th of treaty)
1. one kind is used to have the method for testing of power supply terminal as the semiconductor module of the I/O of power supply, and this method comprises the following steps:
Test socket with power supply terminal is provided, and this power supply terminal is set to provide power supply to the power supply terminal of described module;
On described test socket, arrange anisotropic conductive elastomeric sheet;
Described semiconductor module is arranged on the described thin slice, thus being electrically connected between each power supply terminal that described test socket is provided by described thin slice and the described semiconductor module; And
On described power supply terminal, measure power, thereby determine the electrical characteristics of described module;
Wherein said electrical characteristics are power attenuation.
2. method according to claim 1, wherein said module comprise the circuit of the decoupling capacitor that is directly connected to described modular power source terminal and does not need to insert.
3. method according to claim 1, wherein said module further have signal terminal except described power supply terminal; And described method further comprises the following steps:
On described test socket, provide terminals; And
Use the signal of described terminals measurement from the described signal terminal of described module, described thin slice provides the signal between described terminals and the described signal terminal to connect.
4. one kind is used to test and has the testing apparatus of power supply terminal as the semiconductor module of the I/O of power supply, and this testing apparatus comprises following combination:
Test socket with power supply terminal, this power supply terminal are set to provide power supply to the power supply terminal of described module; And
Be arranged in the anisotropic conductive elastomeric sheet on the described test socket;
It further comprises the semiconductor module that is arranged on the described thin slice, thus being electrically connected between each power supply terminal that described thin slice provides described test socket and the described semiconductor module; And
Thereby it further comprises the measuring equipment that is used for the electrical characteristics of the definite described module of measurement power on described power supply terminal;
Wherein said electrical characteristics are power attenuation.
5. combination according to claim 4, wherein said module comprises the internal semiconductor circuit, described internal semiconductor circuit is directly connected to described modular power source terminal and the decoupling capacitor that do not need to insert.
6. combination according to claim 4, wherein said module further have signal terminal except described power supply terminal; And described combination further comprises:
Terminals on described test socket;
Described terminals can be carried out signal by described thin slice and be connected the signal of measuring from the described signal terminal of described module.
7. one kind is used to have the method for testing of power supply terminal as the semiconductor module of the I/O of power supply, and this method comprises the following steps:
Test socket with power supply terminal is provided, and this power supply terminal is set to provide power supply to the power supply terminal of described module;
On described test socket, arrange anisotropic conductive elastomeric sheet;
Described semiconductor module is arranged on the described thin slice, thus being electrically connected between each power supply terminal that described test socket is provided by described thin slice and the described semiconductor module; And
On described power supply terminal, measure power, thereby determine the electrical characteristics of described module,
Wherein said module comprises the circuit of the decoupling capacitor that is directly connected to described modular power source terminal and does not need to insert.
8. one kind is used to test and has the testing apparatus of power supply terminal as the semiconductor module of the I/O of power supply, and this testing apparatus comprises following combination:
Test socket with power supply terminal, this power supply terminal are set to provide power supply to the power supply terminal of described module;
Be arranged in the anisotropic conductive elastomeric sheet on the described test socket; And
Be arranged in the semiconductor module on the described thin slice, thus being electrically connected between each power supply terminal that described thin slice provides described test socket and the described semiconductor module;
Wherein said module comprises the internal semiconductor circuit, and described internal semiconductor circuit is directly connected to described modular power source terminal and the decoupling capacitor that do not need to insert.
Claims (10)
1. one kind is used to have the method for testing of power supply terminal as the semiconductor module of the I/O of power supply, and this method comprises the following steps:
Test socket with power supply terminal is provided, and this power supply terminal is set to provide power supply to the power supply terminal of described module;
On described test socket, arrange anisotropic conductive elastomeric sheet;
Described semiconductor module is arranged on the described thin slice, thus being electrically connected between each power supply terminal that described test socket is provided by described thin slice and the described semiconductor module; And
On described power supply terminal, measure power, thereby determine the electrical characteristics of described module.
2. method according to claim 1, wherein said electrical characteristics are power attenuation.
3. method according to claim 1, wherein said module comprises the internal application circuit, described internal application circuit is directly connected to described modular power source terminal and the decoupling capacitor that do not need to insert.
4. method according to claim 1, wherein said module further have signal terminal except described power supply terminal; And described method further comprises the following steps:
On described test socket, provide terminals; And
Use the signal of described terminals measurement from the described signal terminal of described module, described thin slice provides the signal between described terminals and the described signal terminal to connect.
5. one kind is used to test and has the testing apparatus of power supply terminal as the semiconductor module of the I/O of power supply, and this testing apparatus comprises following combination:
Test socket with power supply terminal, this power supply terminal are set to provide power supply to the power supply terminal of described module; And
Be arranged in the anisotropic conductive elastomeric sheet on the described test socket.
6. combination according to claim 5, it further comprises the semiconductor module that is arranged on the described thin slice, thus being electrically connected between each power supply terminal that described thin slice provides described test socket and the described semiconductor module.
7. combination according to claim 6, thus it further comprises the measuring equipment that is used for the electrical characteristics of the definite described module of measurement power on described power supply terminal.
8. combination according to claim 7, wherein said electrical characteristics are power attenuation.
9. combination according to claim 6, wherein said module comprises the internal semiconductor circuit, described internal semiconductor circuit is directly connected to described modular power source terminal and the decoupling capacitor that do not need to insert.
10. combination according to claim 6, wherein said module further have signal terminal except described power supply terminal; And described combination further comprises:
Terminals on described test socket;
Described terminals can be carried out signal by described thin slice and be connected the signal of measuring from the described signal terminal of described module.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US57672704P | 2004-06-03 | 2004-06-03 | |
| US60/576,727 | 2004-06-03 | ||
| US11/141,860 | 2005-06-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101019034A true CN101019034A (en) | 2007-08-15 |
| CN100582798C CN100582798C (en) | 2010-01-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200580025093 Expired - Fee Related CN100582798C (en) | 2004-06-03 | 2005-06-02 | Test arrangement including anisotropic conductive film for testing power module |
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| Country | Link |
|---|---|
| CN (1) | CN100582798C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114076862A (en) * | 2020-08-21 | 2022-02-22 | 华中科技大学 | Dynamic testing device for upper converter circuit of half-bridge module of Vienna rectifier |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102002694B1 (en) * | 2017-09-29 | 2019-07-23 | 주식회사 새한마이크로텍 | Conductive contact and anisotropic conductive sheet with the same |
-
2005
- 2005-06-02 CN CN 200580025093 patent/CN100582798C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114076862A (en) * | 2020-08-21 | 2022-02-22 | 华中科技大学 | Dynamic testing device for upper converter circuit of half-bridge module of Vienna rectifier |
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| Publication number | Publication date |
|---|---|
| CN100582798C (en) | 2010-01-20 |
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Granted publication date: 20100120 Termination date: 20110602 |