CN101017182A

CN101017182A - Wafer-level burn-in and test

Info

Publication number: CN101017182A
Application number: CN 200610105697
Authority: CN
Inventors: I·Y·汉德罗斯; D·V·佩德森
Original assignee: FormFactor Inc
Current assignee: FormFactor Inc
Priority date: 1996-05-17
Filing date: 1997-05-15
Publication date: 2007-08-15
Also published as: CN100461540C; TW341747B; CN1722532A

Abstract

Techniques for performing wafer-level burn-in and test of semiconductor devices include a test substrate having active electronic components such as ASICs mounted to an interconnection substrate or incorporated therein, metallic spring contact element effecting interconnections between the ASICs and a plurality of devices-under-test (DUTs) on a wafer-under-test (WUT), all disposed in a vacuum vessel so that the ASICs can be operated at temperatures independent from and significantly lower than the burn-in temperature of the DUTs. The spring contact elements may be mounted to either the DUTs or to the ASICs, and may fan out to relax tolerance constraints on aligning and interconnecting the ASICs and the DUTs. A significant reduction in interconnect count and consequent simplification of the interconnection substrate is realized because the ASICs are capable of receiving a plurality of signals for testing the DUTs over relatively few signal lines from a host controller and promulgating these signals over the relatively many interconnections between the ASICs and the DUTs. The ASICs can also generate at least a portion of these signals in response to control signals from the host controller. Physical alignment techniques are also described. Micromachined indentations on the front surface of the ASICs ensure capturing free ends of the spring contact elements. Micromachined features on the back surface of the ASICs and the front surface of the interconnection substrate to which they are mounted facilitate precise alignment of a plurality of ASICs on the support substrate.

Description

Wafer-level burn and test

The application is the applying date: 1997.05.15, application number are 97196465.3 (international application no is PCT/US97/08604), and name is called the dividing an application of application of " wafer-level burn and test ".

The cross reference of related application

Present patent application is and 08/452 of submission on May 26th, 95, U.S. Patent application (to call " PATENT CASE " in the following text) and copy the total continuation part of submitting on November 13rd, 95 of US95/14909 PCT patented claim in No. 255 examinations, these two patented claims all are 08/340 of submissions on November 15th, 94, U.S. Patent application and copy the total continuation part of submitting on November 16th, 94 of PCT patented claim in No. 144 examinations, these two applications are and 08/152 of submission on November 16th, 93, patented claim (is USP 5 now in No. 812 examinations, 476,211,19 Dec 95) Gong You continuation part, all applications are all here with reference to quoting.

Present patent application also is the continuation part of U.S. Patent application in the following total examination:

08/526,246 (PCT/US95/14843,13 NOV 95) that on September 21st, 95 submitted to;

08/533,584 (PCT/US95/14842,13 NOV 95) that on October 18th, 95 submitted to;

08/554,902 (PCT/US95/14844,13 NOV 95) that on November 9th, 95 submitted to;

08/558,332 (PCT/US95/14845,15 NOV 95) that on November 15th, 95 submitted to;

08/573,945 (PCT/US96/07924,24 MAY 96) that on Dec 18th, 95 submitted to;

08/602,179 (PCT/US96/08328,28 MAY 96) that on February 15th, 96 submitted to;

60/012,027 (PCT/US96/08117,24 MAY 96) that on February 21st, 96 submitted to;

60/012,040 (PCT/US96/08275,28 MAY 96) that on February 22nd, 96 submitted to;

60/012,878 (PCT/US95/08274,28 MAY 96) that on March 5th, 96 submitted to;

60/013,247 (PCT/US95/08276,28 MAY 96) that on March 11st, 96 submitted to;

60/005,189 (PCT/US95/08107,24 MAY 96) that on May 17th, 96 submitted to, these all applications (except the application of previous proposition) all are the continuation parts of above-mentioned PARENT CASE, these all applications are all quoted by reference.

Khandros and Pedersen are in 60/030,697 of submission on November 13rd, 96; And

Khandros and Pedersen are in 60/032,666 of submission on Dec 13rd, 96.

Technical field

The present invention relates to ageing (exercise) semiconductor devices, relate in particular to semiconductor devices is tested and worn out to discern true excellent chip (KGD), especially, the semiconductor devices (preceding from wafer separation or " stripping and slicing ") that also relates to the ageing wafer scale them.

Background technology

By on silicon wafer, carry out such as etching, shelter, semiconductor devices such as a lot of processing step such as deposit is made from the microprocessor to the memory chip.It is six inches or bigger wafer shape that typical silicon wafer has diameter.General identical many semiconductor devices are placed to the rectangular array of rule, and on single silicon wafer, make these devices.Line of cut (scribe lanes) is set between the adjacent semiconductor device on the wafer.At last, by cutting along scribe lanes and these devices being separated from wafer.

Because the defective or the defective in one or more treatment steps of wafer, make some semiconductor devices can not carry out designed function, these defectives may display the most at the beginning, perhaps also may be at device operation just obviously get up after one lasting period.So, in one period duration, device tested and the ageing of switching on which device for confirmation be which device be bad be very important.

Usually, only separate (separate) from wafer and through these devices of ageing (wear out and test) just behind a lot of " ending " processing step (wherein, these devices being assembled into final " encapsulation " form) in addition at semiconductor devices.

From the aspect of " always ", the typical case of prior art " ending " process chart following (from the wafer manufacturing):

Wafer selecting #1;

Laser repairing;

Wafer selecting #2;

Wafer cuts;

The package assembling step, such as small pieces connect, wire bond connects, seals, goes between fine setting and form, lead-in wire electroplates;

Electrical testing;

Aging;

Electrical testing; And

Product is marked and transported.

Modern semiconductor devices comprises hundreds and thousands of terminals (promptly usually, such as power supply,, I/O etc. " weld zone (pad) "), and modern semiconductor wafer comprises hundreds and thousands of semiconductor devices usually, thereby each wafer has in thousands of weld zones that carry out wafer level test and/or need be addressed when aging or test point (, small pieces are once being tested all small pieces before wafer separates).When arranging distance to have only interval (spacing) between 4/1000ths inches the adjacent weld zone, accurately aim at neither be common thing.Even so, before semiconductor devices is separated from wafer, it is tested and/or the aging purpose that still becomes effort from now on.

USP 5,570, and 032(people such as Atkins; " Micron Patent "; 10/96) wafer calibration (scale) aging equipment and technology have been disclosed, wherein being matched with printed circuit board (PCB) (13) by aging wafer (14), this circuit board uses that the weld zone electricity on each small pieces contacts on little conductive pole (15) and the wafer on it.In order to allow all small pieces on the testing wafer abreast, entire wafer is accurately aimed at printed circuit board (PCB), thereby do not need to survey individually each small pieces.This equipment is equipped with heating element and cooling duct, so that aging and test are produced necessary chip temperature.This application process has been eliminated beyond aging and the test processing to fault small pieces.Fig. 1 of Micron Patent provides from being fabricated onto and has transported and obtain the generalized case of the prior art treatment step of wafer.Transport and obtain the contrast situation of the treatment step of wafer from being fabricated onto when Fig. 8 of Micron Patent provides the aging and method of testing of the wafer calibration that is disclosed in utilization.In Micron Patent, propose also can have the printed circuit board (PCB) of connection and steering logic (microprocessor, multiplexer etc.) minimizing and have the complete test electronic circuit (seeing that the 5th hurdle 53-60 is capable) that is included in the printed circuit board (PCB).

USP 5,532, and 510(people such as Tsujide; " NEC Patent "; 7/96) disclosed the equipment that is used for testing semiconductor wafer, test substrate is wherein arranged, place the active circuit on the test substrate to be used to encourage the chip that places on the wafer to be tested, place a plurality of weld zones on the test substrate front so to locate, thereby when covering test substrate on the wafer, these weld zones be set to place wafer on the bonding weld zone of chip aim at.Test substrate (2) can be to use the wafer made from wafer (1) identical materials of test like this.On test substrate (wafer) 2, lead-in wire 74 extends and links power supply, ground wire 8, I/O line 9 and line of chip select 10 from the weld zone.Fig. 4 of NEC Patent illustrates the testing apparatus of being made by silicon wafer 16, the back side of this silicon wafer is carried out etching and formed the hole 21 with quadrilateral pyramidal shape, thereby hole 21 can be played the effect of alignment mark and is convenient to make test substrate (16) to align with wafer to be tested (17).

USP 5,434, and 513(people such as Fujii; " Rohm Patent "; 7/95) disclosed the semiconductor wafer testing apparatus that uses the intermediate semiconductor wafer, wherein on the bottom surface of the intermediate semiconductor wafer that is used as test substrate, form projection (bump) electrode, on (relatively) surface on the test substrate, form and pick up (pickup) electrode and control electrode.Form commutation circuit in the intermediate semiconductor wafer, this circuit is used for via switch-over control signal that control electrode provided some projected electrodes of choosing being linked pickoff electrode according to tester.Pickoff electrode and control electrode are linked tester through the pogo pin.

USP 5,497, and 079(people such as Yamada; " Matsushita Patent "; 3/96) semiconductor testing apparatus, semiconductor test circuit chip and detecting card (probe card) have been disclosed, wherein a plurality of semiconductor test chips (2) are installed to a side of motherboard (4), and the same number of a plurality of semiconductor integrated circuit chips to be tested (1) are installed to the opposite side of motherboard (4).Be provided with the computing machine (3) that is used to control semiconductor test chip (2).Owing to contain main test function in the test circuit chip (2), can be cheap computing machine so be used to collect the computing machine (3) of test result.Fig. 5 of Matsushita Patent, 7 and 10 illustrates a representational semiconductor test circuit chip (2), it has the test pattern generation device, be used for test pattern be added to tested device driver, data storage device, be used to judge whether the output data of being stored represents data judgment means that lost efficacy and the device that is used for judged result is sent to workstation.Figure 12 of Matsushita Patent is illustrated in the structure of employed semiconductor testing apparatus in the wafer sort, wherein a plurality of semiconductor test chips (2) be installed to detecting card (103), a plurality of probes (104) of extending from the detecting card another side of detecting card (supposition from) and tested wafer (106).Control signal when workstation is transferred to the semiconductor test circuit chip, the semiconductor test chip begins to test the SIC (semiconductor integrated circuit) that forms on semiconductor wafer.

Generally, the trial of carrying out the wafer level test scheme in the past comprises the single test substrate of preparation, and this substrate has a plurality of contact elements that contact with respective lands on the tested wafer.As mentioned above, may require several ten thousand such contact elements and and complicated interconnect substrate like this.As an example, one 8 " wafer may comprise the DRAM of 500 16Mb, each DRAM has 60 bonding weld zones, always has 30,000 joints.Tested wafer (WUT) has 30,000 joints, and intermediate substrate has 30,000 plus couplings, and the test electronic circuit has more than 30,000 joint, and the control electronic circuit has the joint of uncertain number.In addition, the required fine pitch of modem semi-conductor devices need keep high tolerance when test substrate and tested wafer are put together.

Summary of the invention

An object of the present invention is to provide a kind of improvement technology that is used to carry out wafer-level burn and test.

An object of the present invention is to make the physical quality of the device of finishing be better than prior art and reliability level to be higher than prior art and to reduce the semiconductor manufacturing cost by carrying out a series of wafer-level process technologies.

According to the present invention, before semiconductor devices is separated from the semiconductor wafer of making these devices, with these semiconductor devices of wafer scale ageing.Employed here term " ageing " comprises semiconductor devices is worn out and functional test, but is not limited thereto.Interconnection elements such as use such as elastic contact element carry out the pressure connection and form a plurality of compression fittings between a plurality of unsegregated tested semiconductor devices (DUT) on the tested wafer (WUT) and test substrate.Preferably the bottom of elastic contact element directly is installed to WUT and goes up (that is, the DUT on the WUT), thereby they have the free end of the common plane that extends to the WUT surface.The thermal expansivity of test substrate preferably and the matched coefficients of thermal expansion of WUT.In addition, can be installed to elastic contact element on the test substrate.

According to one aspect of the present invention, elastic contact element is so arranged on WUT, thereby they become fan-shaped dispersing, or the spacing at its top is greater than the spacing of its bottom.Elastic contact element is such as at the suitable combination interconnection element described in the PARENT CASE.

In one embodiment of the invention, test substrate comprises big relatively interconnect substrate and a plurality of relative little substrate that is installed to and links interconnect substrate, and the size of each little substrate (area) is less than the size (area) of a DUT.Place little substrate in the front of interconnection (support) substrate (in the face of WUT).A little substrate also can match greater than single DUT and with two or more DUT.Little substrate is such as special IC suitable active semiconductor devices such as (ASIC).The design of ASIC makes minimizing from the number that external source (for example, master controller) offers the signal of test substrate.

Under situation about elastic contact element being installed on the DUT, the top of elastic contact element preferably becomes fan-shaped dispersing, and is big thereby the interval of the bottom of being installed is compared at the interval on top, and ASIC is provided with and captures (capture) weld zone, they can be especially big, thereby relax alignment tolerance.The top of elastic contact element can become fan-shaped dispersing, and the area that is placed of these tops less than and be positioned in the DUT area that these tops are installed.The size of the ASIC of seasoned DUT is corresponding to the area on elastic contact element top.

In one embodiment of the invention, the front of ASIC is provided with indenture, and each indenture holds the top of the corresponding elastic contact element that is installed to DUT.Can directly on the surface of ASIC, form these indentures, also can provide these indentures by the layer that places the ASIC surface.After having laid these tops, ASIC is laterally moved or rotation (coplane), so that the top of elastic contact element is meshed with the sidewall of dent characteristic.

According to one aspect of the present invention, provide and guaranteed the device that a plurality of ASIC and interconnection (support) substrate are accurately aimed at, comprise indenture and corresponding indenture on the interconnect substrate front and the spheroid between ASIC and interconnect substrate on the ASIC back side.

According to one aspect of the present invention, test substrate is remained on than under the low temperature of the temperature of WUT.This makes that can be raised to the DUT on the WUT higher temperature aging to quicken it, and can not had a negative impact the life expectancy of the ASIC that be installed to interconnect substrate.Because the thermal expansivity of test substrate and the thermal expansivity of WUT mate very much, this will make the thermal expansion amount of test substrate not obvious than WUT.By entire equipment (WUT and test substrate) is placed vacuum environment, generally keep the obvious temperature difference between WUT and the test substrate.

In use, test substrate is at room temperature contacted with WUT.The feature (for example, indenture) of capturing on the ASIC front makes elastic contact element in place.Then, can power on to DUT.Vacuum environment has prevented to make the ASIC heating from the heat of the DUT that powers on, thereby ASIC will be operated under the temperature more much lower than the aging temperature of DUT.

According to one aspect of the present invention, be provided for testing the signal of DUT to a plurality of ASIC with first kind of form (such as the serial data stream on the relative minority several threads) by external source (master controller), and these conversion of signals are become second form, such as the independent signal that is used for independently relative a plurality of elastic contact elements of DUT contact.In addition, can in ASIC, produce at least a portion signal that is used to test DUT, rather than provide by external piloting control system device.

According to one aspect of the present invention, ASIC can accumulate (monitoring) test result from DUT, so that be transferred to master controller subsequently.Can use this information (test result) to characterize each DUT independently.In addition, according to the test result of DUT, ASIC can end the further test of the DUT of crucial test crash and/or aging.

In another embodiment of the present invention, can directly on silicon wafer, make ASIC, and ASIC is not installed on the silicon wafer.So provide redundant, thereby available other ASIC replaces out of order ASIC or its part on electricity.

A benefit of the present invention is to make ASIC at an easy rate, the ASIC specialized designs of every kind " type " is become to be applicable to the DUT of (matching) a kind of specific type.

Conventional aging technology relates to and places DUT conventional baking box to improve its temperature.In the context of the present invention, generally do not want to make the thermal cycle of ASIC through so repeating.And, according to the present invention, want to make DUT and ASIC to be in contact with one another and DUT powered on and wear out.This has caused the heat that produced by DUT, in most of the cases, have sufficient heat satisfy the temperature that improves DUT demand and without any need for additional thermal source.

According to one aspect of the present invention, DUT and test substrate assembly (interconnect substrate adds the ASIC that is installed on it) are placed vacuum environment, only the little heat that ASIC stood is transmitted to ASIC along the elastic contact element that is electrically connected between ASIC and DUT.The DUT substrate contacts the controller that the flow direction of this sucker is different with test substrate with the sucker (chuck) of liquid cooling.The DUT substrate is taken to the high temperature that the part that generally is higher than encapsulation can be born, and test substrate is remained on room temperature or is lower than room temperature, to strengthen the electric operation of tester greatly.

A benefit of the present invention is that DUT is directly contacted with ASIC, and the interconnect substrate that supports ASIC can be the low-down wiring substrate of density, this substrate receives the considerably less signal of autonomous controller, ASIC itself produces WUT is gone up most of signals in required a large amount of (for example 30, the 000) signal of a plurality of DUT ageings.

A benefit of the present invention is to guarantee the DUT operation in the wide temperature range of the maximum temperature that semiconductor technology allowed from the temperature more much lower than room temperature, and they can not produce thermal stress to ASIC.

The invention provides the start-up technique that is used for entire wafer level assembly technology.

According to one aspect of the present invention, a kind of equipment that is used for semiconductor devices is carried out ageing is provided, it is characterized in that described equipment comprises: be used for the support of described semiconductor devices; Active electron component; Data bus is used to be electrically connected a described active electron component and a master controller; And semiconductor devices connects, be used to be electrically connected described active electron component and described semiconductor devices, it is characterized in that described active electron component receives the test signal of first form by described data bus, described test signal is become second form, and export the described test signal of described second form by described semiconductor devices interface.

In described equipment, in described first form, described test signal is a serial data stream, and in described second form, described test signal walks abreast.

In described equipment, described active electron component also connects the response data that receives the parallel form that described semiconductor devices produced by described semiconductor devices, described response data is become serial form, and export the described response data of described serial form by described data bus.

In described equipment, in described serial form, described response data is a serial data stream, and in the described parallel form, described response data walks abreast.

In described equipment, described active electron component also comprises pressure regulator, is used to be adjusted to the voltage of described semiconductor devices.

In described equipment, described semiconductor devices connection is connected to a plurality of described semiconductor devices to described active electron component.

In described equipment, in described first form, described test data is enough to test the described semiconductor devices of a number, and in described second form, described test data is enough to test the more described semiconductor devices of more number.

In described equipment, also comprise a plurality of described active electron components.

In described equipment, one of described active electron component is corresponding to one in the described semiconductor devices.

In described equipment, described semiconductor devices connects a plurality of described active electron components is linked to each other with a plurality of described semiconductor devices.

In described equipment, described semiconductor devices constitutes unsegregated semiconductor wafer, described equipment also comprises a substrate, and described substrate comprises the approximately equalised material of the thermal expansivity of thermal expansivity and described different chips, and described active electron component places on the described substrate.

In described equipment, described semiconductor devices connects and comprises that a plurality of elastic contact elements, each elastic contact element are electrically connected a terminal of described active electron component and a terminal of described semiconductor devices.

In described equipment, each described elastic contact element is single independent structures.

In described equipment, described semiconductor devices connects and comprises that a plurality of weld zones of capturing, each weld zone are used to accept install to a plurality of independently resilient contact structure of a terminal of described semiconductor devices.

According to another aspect of the present invention, a kind of equipment that is used for semiconductor devices is carried out ageing is provided, it is characterized in that described equipment comprises: be used for the support of described semiconductor devices; Active electron component; Data bus is used to be electrically connected a described active electron component and a master controller; And semiconductor devices connects, be used to be electrically connected described active electron component and described semiconductor devices, it is characterized in that the test signal of described active electron component in response to the described semiconductor devices of input, receive response data that described semiconductor devices produces, analyze described response data, and when described response data is indicated described semiconductor devices fault, stop the ageing of described semiconductor devices.

In described equipment, described active electron component also receives the test signal of first form by described data bus, described test signal is become second form, and connects the described test signal of described second form of output by described semiconductor devices.

According to another aspect of the present invention, a kind of equipment that is used for semiconductor devices is carried out ageing is provided, it is characterized in that described equipment comprises: be used for the support of described semiconductor devices; Active electron component; Data bus is used to be electrically connected a described active electron component and a master controller; And semiconductor devices connects, be used to be electrically connected described active electron component and described semiconductor devices, it is characterized in that described active electron component receives first test signal by described data bus, produce the additional testing signal, and connect the described additional testing signal of output by described semiconductor devices.

In described equipment, described active electron component also connects described first test signal of output by described semiconductor.

In described equipment, described active electron component is also in response to the additional testing signal of importing described semiconductor devices, receive the response data that described semiconductor devices produces, analyze described response data, and when described response data is indicated described semiconductor devices fault, stop the ageing of described semiconductor devices.

In described equipment, described first test signal is enough to test the described semiconductor devices of first number, and described additional testing signal is enough to test the described semiconductor devices of additional number.

Other purpose of the present invention, feature and advantage will be become obviously.

Summary of drawings

Will be at length with reference to preferred embodiment of the present invention, the example of these embodiment is as shown in drawings.Though will in the context of these preferred embodiments, describe the present invention, and should understand the spirit and scope of the present invention and be not limited to these certain embodiments.

Figure 1A is the side cutaway view that is used to implement the equipment of wafer-level burn and method of testing according to the present invention.

Figure 1B is according to the planimetric map of the present invention such as the ASIC small-sized test substrate such as (shown in dotted line) that covers a DUT (shown in solid line).

Fig. 1 C is the perspective illustration according to the DUT of Figure 1B of the present invention.

Fig. 1 D is the planimetric map according to the ASIC front of Figure 1B of the present invention.

Fig. 1 E is according to the planimetric map of the present invention such as the ASIC small-sized test substrate such as (shown in dotted line) that covers two DUT (shown in solid line).

Fig. 2 is the side view that is used to make another embodiment that contacts between ASIC and the DUT according to the present invention.

Fig. 3 A is the side cutaway view according to single ASIC among a plurality of ASIC of the present invention, shown in Fig. 1 D, these ASIC have capture (contact) be installed to DUT the elastic contact element top capture feature (bonding region).

Fig. 3 B is that these ASIC have the feature that is used to capture the elastic contact element top that is installed to DUT according to the side cutaway view of another embodiment of single ASIC among a plurality of ASIC of the present invention.

Fig. 3 C is the side cutaway view according to ASIC of the present invention, and another embodiment of the feature that is used to obtain the elastic contact element top that is installed to DUT is shown.

Fig. 4 is that the feature at these ASIC back sides has guaranteed to aim at the accurate of interconnect substrate according to the side cutaway view of an ASIC among a plurality of ASIC of the present invention.

Fig. 5 is the side view that is used to make the technology that is electrically connected between ASIC and the interconnect substrate according to the present invention.

Fig. 5 A, 5B and 5C are according to the invention provides from such as the front of electronic components such as ASIC of the present invention side cutaway view to the technology of the electrical path at the ASIC back side.

Fig. 6 A and 6B are the side cutaway views that is used for elastic contact element is installed to the technology of DUT according to the present invention.

Fig. 6 C is the skeleton view according to elastic contact element shown in Fig. 6 B of the present invention.

Fig. 7 is the synoptic diagram (comparing with Figure 1A) according to system of the present invention of the present invention, and the connectivity and the whole functional of particular example of the present invention is shown.

Better embodiment of the present invention

Figure 1A illustrates the equipment 100 according to the invention process wafer-level burn and method of testing.Place tested wafer (WUT) (laying) on, thereby WUT (here generally WUT finger element 102) go up the semiconductor devices 102a, the 102b that form, 102c, 102d (as shown in the figure) up such as suitable stilt such as temperature control vacuum cup 104 grades.

Such as special IC (ASIC; Refer generally to element 106) etc. a plurality of (shown in many figure four) relatively little

active electron component

106a, 106b, 106c and 106d be installed on the relative big interconnect substrate (substrate) 108, general and the WUT's 102 of the size of this substrate (that is diameter) is measure-alike.For example, the diameter of interconnect substrate 108 and WUT 102 is eight or 12 inches.Electronic component (ASIC) 106 and interconnect substrate 108 constitute " test substrate " together.

WUT 102 comprise to be tested a plurality of (shown in many figure four)

semiconductor devices

102a, 102b, 102c, 102d or tested device (DUT).

A plurality of (shown in many figure four) bottom of elastic contact element 110 is installed to just (as shown in the figure) face of each DUT, the top of these elastic contact elements extends to the common plane of top, DUT front.These elastic contact elements can be the suitable elongated stand alone types that contains the interconnection element of PARENT CASE, but are not limited thereto.

In use, in the predetermined aligned mode test substrate (106,108) and WUT 102 are put together (in opposite directions), up to the respective terminal (capturing the weld zone) 120 (seeing Fig. 1 D) that by the pressure contact top of elastic contact element 110 is connected electrically on ASIC 106 fronts.Place the pilot pin 112 of WUT and test substrate periphery to guarantee accurate aligning.(diameter of interconnect substrate may be greater than the diameter of WUT, but corresponding guide hole in the pilot pin break-through interconnect substrate.) suitably placed the lip-deep pressure-bearing of WUT retaining (compression stop) (catch ring) 114 to limit amount of movement, that is, the top of elastic contact element 110 is in the distance of withstanding deflection when capturing weld zone 120.

Shown in Figure 1A, principal computer 116 offers ASIC 106 to signal via interconnect substrate 108.These signals are test signals of a plurality of DUT of ageing.Because the DUT on the WUT is identical usually, so can produce independent one group of test signal (vector) to a plurality of DUT.In addition, can under the The whole control of principal computer, produce test vector by each ASIC.Also can suitably offer DUT to electric energy (for example, Vdd and Vss) from power supply 118 via ASIC 106 (for example, directly presenting) by ASIC.

Interconnect substrate 108 is wiring (interconnection) substrate in essence, and it is the thermal expansivity silicon wafer identical with the thermal expansivity of WUT 102 preferably.By the welding wire that between ASIC just (bottom as shown in the figure) face, extends ASIC 106 is suitably linked interconnect substrate to just (bottom as shown in the figure) of support substrates face.

A key character of the present invention is, exists between DUT and the ASIC directly to connect (via elastic contact element 110).The overwhelming majority of total system that Here it is connects the location, as described in more detail below, only needs to carry out very (utmost point) few connection in interconnect substrate (108) itself.Place ASIC DUT one side (front) of interconnect substrate to help between ASIC and the DUT Directly connectFor example, if (promptly via interconnect substrate, by place on the interconnect substrate certain type elastic contact element rather than via ASIC) to DUT carry out thousands of (for example, 30,000) individual connection, then, must in interconnect substrate, carry out Route Selection to these thousands of connections with the residing location independent of ASIC.As described in more detail below, can directly produce thousands of signals by ASIC itself to DUT, the signal of few (for example, four) is sent to ASIC from master controller by interconnect substrate.

WUT 102 and test substrate 106/108 are suitably placed in the gas-tight container 130 that communicates with the vacuum source (not shown), thereby can comprise under the parital vacuum of high vacuum or under other controlled atmospheric conditions, implement technology of the present invention at least.As mentioned above, vacuum helps DUT and ASIC heat are isolated.

According to a feature of the present invention, test substrate 106/108 is installed to temperature control sucker 104a (being equivalent to 104), thereby can between aging period, remains on the temperature (general obvious lower) irrelevant fully to this substrate with the temperature of WUT 102.

The top of elastic contact element is fan-shaped and disperses

As mentioned above, Xian Dai semiconductor devices has usually to be similar to a large amount of bonding regions of 4/1000ths inches spacing placement.The bottom of elastic contact element (110) is installed to the bonding region of DUT.Stretch out if elastic contact element (for example, is parallel to each other) equably from DUT, then the spacing on its top also is 4/1000ths inches, and capturing the weld zone accordingly is difficult to the brigadier on ASIC.

Shown in Figure 1B, each DUT (for example DUT 102a) has a plurality of (illustrate a plurality of in 24) bonding region 107 (shown in square) of arranging along the center line of DUT.Free standing spring contact element (110) is installed to each bonding region, and generally becomes 90 degree to arrange with the center line of DUT.Shown in Figure 1B, elastic contact element can so be arranged, thereby they are mutually along opposite direction extension, and has length alternately.For example, the first elastic contact element 110a is long relatively and extend first distance from the center line of DUT 106 along first direction; The second elastic contact element 110b grows relatively and extends first distance from the center line edge second direction opposite with first direction of DUT 106; The 3rd elastic contact element 110c is short relatively and extend second distance less than first distance from the center line of DUT 106 along first direction; The 4th elastic contact element 110d is short relatively and extend second distance from the center line of DUT 106 along second direction.

Shown in Figure 1B, the top of elastic contact element 110 (shown in circle) all places in the little zone of the area (in its periphery) than DUT 106a, and less zone is the zone of corresponding ASIC 106a, represents the periphery in this zone in the drawings with dashed rectangle.The spacing (at interval) of free end (top) that makes elastic contact element 110 like this, easily is greater than the spacing of the bonding region (107) of the DUT that these elastic contact elements are installed.

For example, the top of elastic contact element is limited in than holding less DUT in the much smaller space shown in the dashed rectangle among Figure 1B, this within the scope of the invention.

Fig. 1 C is the perspective illustration of the DUT 102a of Figure 1B, and the bottom apex of elastic contact element 110 is arranged along the center line of DUT.

Shown in Fig. 1 D, an advantage of the invention is that the size of bonding region 107 can (go up) especially greatly in " capturing " (bonding) district 120 on the ASIC 106 greater than DUT, thereby relax tolerance limits location, elastic contact element (110) top.

PARENT CASE has described and can be installed on the semiconductor devices simultaneously the many methods that realize pitch extension between the bottom of interconnection element and top thereof to resilient interconnection elements.

Illustrate, on the interface between test substrate and the WUT, each DUT has an ASIC, and each ASIC aims at a corresponding DUT.Can set up other relation, this also within the scope of the invention.For example, shown in Fig. 1 E, an ASIC 126 (its periphery is shown in dashed rectangle) can " cross over " two adjacent DUT102a and 102b.

A key character of the present invention is that as close as possible DUT (102) placement i.e. ASIC (106) on the DUT of interconnect substrate (a 108) side has build-in function easily.Many favourable results are arranged like this.Only need obvious less signal is offered interconnect substrate 108 from principal computer 116, and interconnect substrate only need transmit signal seldom.The restriction of relaxing interconnect substrate transmission signal makes that material, design and the realization of interconnect substrate are much flexible, and the result has reduced cost.ASIC is close to DUT and realizes corresponding directly connection betwixt, has also prevented the signal path of disadvantageous length and has helped accelerated test DUT.

As mentioned above, can utilize any suitable elastic contact element to realize that between ASIC and DUT pressure connects.

Elastic contact element is installed on ASIC rather than the DUT, and this also within the scope of the invention.As shown in Figure 2, wherein the bottom of a plurality of (illustrate a plurality of in four) elastic contact element 210 (being equivalent to 110) is installed to ASIC 206 (being equivalent to 106), the top of elastic contact element 210 (far-end) is the location so, thereby forms pressure and be connected with corresponding bonding region (not shown) on the DUT202 (being equivalent to 102).In other words, can utilize any proper device between ASIC and DUT, to realize connecting, to implement technology of the present invention.Except elastic contact element, also can use micropump (microbump) and similar elements between ASIC and DUT, to realize connecting, this but is not limited thereto also within the scope of the invention.

Capture the top of elastic contact element

As mentioned above, can " capture " top that is installed to the elastic contact element on the DUT simply by corresponding the capturing on the weld zone that the top of elastic contact element is pressed on the ASIC, illustrate, realize pitch extension and on ASIC, form especially big capture the weld zone and can relaxing tolerance limits by elastic contact element.Discuss now and between the top of elastic contact element and ASIC, realize another technology of connecting.

Fig. 3 A illustrates with capturing the basic embodiment that the top that is installed to DUT 302 elastic contact element 310 of (being equivalent to 102) (being equivalent to 110) is captured in the weld zone, and this captures the weld zone is the bonding region 308 (being equivalent to 120) that places ASIC 306 (being equivalent to 106) positive.

According to one aspect of the present invention, can form topology " capturing " feature in the front of ASIC or on the front, aim at reliably with ASIC on the top of aging and testing period chien shih elastic contact element guaranteeing.

Fig. 3 B illustrates a DUT among an ASIC 326 (being equivalent to 106), a plurality of DUT 322 (being equivalent to 102a) among a plurality of ASIC that are installed to interconnect substrate (not shown, as to see 108) and be used for realizing the technology that reliable pressure connects between the two.In the former example, the bottom of a plurality of elastic contact elements 330 (being equivalent to 110) is installed to the surface of DUT 322 and therefrom extension.In this example, elastic contact element is so arranged, the spacing bigger (bigger) of its bottom of the gap ratio of its top (far-end).

A plurality of (illustrate a plurality of in two) indenture 328 with the pyramid form at least three limits extends to the ASIC 322 from the surface of ASIC 322.Use other indenture that forms these indentures 328 and the following stated such as the semiconductor fabrication of routines such as micro-cutting processing easily.

The metallization (not shown) is applied to the sidewall of these indentures 328, and the active component (not shown) of metallization with ASIC 326 is electrically connected.

In use, because ASIC 326 and DUT 322 are linked together, so the top of elastic contact element 330 enters in the indenture 328, thereafter can be laterally (as shown in the figure, cross paper) mobile ASIC or (winding axle) rotation slightly perpendicular to paper, mesh with enough power and indenture 328 with the top that guarantees elastic contact element 330, guarantee that reliable electric pressure connects therebetween.

Another technology on the top that is used to capture (engagement) elastic contact element shown in Fig. 3 C.In the case, ASIC 346 (being equivalent to 326) has in the mode of routine at its positive a plurality of (illustrate a plurality of in two) weld zone (terminal) 344 that forms.Insulation material layer 350 is placed on the front of ASIC 346, this layer is the silicon chip through micro-cutting processing, have pass its extension a plurality of (illustrate a plurality of in two) hole 348 (being equivalent to 328) and with contact weld zone 344 alignings.In other words, in another technology, special covered structure 350 provides similarly captures feature (348), rather than directly forms indenture (328) on the surface of ASIC (346).In the example formerly, can be to capturing the side-wall metallicization of feature 348, and ASIC can be equivalent to that the DUT (not shown) laterally moves or rotation guarantees that reliable electric pressure is connected between ASIC 346 and the elastic contact element 340 (with respect to 330).Silicon chip 350 can be an insulative nitride.

Should be understood that it must be firm that ASIC goes up the device that contacts with the top of elastic contact element.For this reason, for example available Thousand/0.5-1.0 inchCover (for example, electroplating) such as wear-resisting conductive material such as nickel and capture weld zone (120 or 308 or 344).Can be in the same way cover indenture (capturing feature) 328 with the nickel of similar quantity.

Little substrate is aimed at interconnect substrate

As mentioned above, preferably being installed on the bigger interconnect substrate such as a plurality of electronic components such as ASIC.Especially, avoided like this on the whole surface of interconnect substrate, producing the demand of good active device.(that is, under the situation of silicon wafer interconnect substrate, can directly install to the ASIC circuit on the silicon wafer.) result, must provide suitable mechanism to guarantee that a plurality of ASIC aim at the accurate of interconnect substrate.

Fig. 4 illustrates and is used for guaranteeing a plurality of (illustrating a plurality of one) ASIC 406 (being equivalent to 106,206,306,326 and 346) and the bigger accurate technology 400 of aiming at of interconnect substrate 408 (being equivalent to 108).In the case, go up at the back side (top as shown in the figure) of each ASIC 406 in the mode that is similar to indenture 328 as mentioned above and 348 at least two (only illustrating two) indentures 412 are set, wherein indenture has the pyramid form that extends in ASIC 106 back sides.Can use conventional semiconductor fabrication to limit and form these indentures 412 by photoetching by the tolerance of strictness.

Face forms similar indenture 414 in just (bottom as shown in the figure) of interconnect substrate 408, and as mentioned above, interconnect substrate 408 can be a semiconductor wafer.Can use conventional semiconductor fabrication to form these indentures 414 equally, thereby they have strict tolerance (being equivalent to 306).

Indenture

412 and 414 all has the size (" width ") that the surface that strides across each ASIC 406 that forms these indentures or interconnect substrate 408 records.The width of ASIC indenture 412 is preferably identical with the width of interconnect substrate indenture 414, and they are preferably in Thousand/3-5 inchScope in, Such as 4/1000ths inches

For ASIC 406 is assembled on the interconnect substrate 408, the bead (ball) 420 that diameter is similar to the width of

indenture

412 and 414 places between indenture 412 and the corresponding indenture 414, to guarantee that ASIC 406 aims at exactly in interconnect substrate 408 fronts.The diameter of ball 4200 preferably slightly greater than (such as, Thousand/2+1 English Very little)

indenture

412 and 414 width (width), this will cause forming the little space of controlled in size between the front (bottom as shown in the figure) of the back side of ASIC 406 (top as shown in the figure) and interconnect substrate 408.For example, the size in space (vertical direction as shown in the figure) exists Thousand/2-5 inchScope in.

The bonding agent (not shown) of suitable preferably heat conduction is placed space (that is, between the apparent surface of ASIC and interconnect substrate), so that ASIC is fixed in interconnect substrate.An example of suitable adhesive is the epoxy that is filled with silver, bonding agent should preferably allow (such as with appropriate solvent or use heat) remove and replace the sort of bonding agent of out of order ASIC.

Can utilize any suitable mechanism that ASIC is aimed at interconnect substrate, this within the scope of the invention.For example, focus on the technique of alignment that being used to described in the above-mentioned shared PCT/US96/08117 aimed at little substrate (for example, 620) and big substrate (for example, 622).For example, provide at the back side of ASIC sizableness (such as 10/1000ths inches rectangles that multiply by 20/1000ths inches) the welding compound feature, and similar sizable welding compound feature is provided for the front of interconnect substrate, and (the pre-base (preform) of or Jin-Xi) also refluxes to place welding compound betwixt, guaranteed that by the surface tension that liquid welding compound applied ASIC aims at the accurate of interconnect substrate on it, this within the scope of the invention.

ASIC is linked interconnect substrate

As mentioned above, use conventional wire bond connection technology that ASIC suitably is connected electrically to interconnect substrate.

For a plurality of DUT that are positioned on the WUT are worn out and power on, need a large amount of relatively electric energy.For example, for whole WUT, need the electric energy of hundreds of wattage magnitude.Because the physical layout of system of the present invention transmits electric energy by ASIC and by corresponding elastic contact element.In the following description book, " directly by " ASIC is shown presents the technology of energy.

Fig. 5 illustrates ASIC 506 (being equivalent to 106,206,306,326,346 and 406), and it will be connected electrically to interconnect substrate 508 (being equivalent to 108) by welding wire (not shown, as to see 510) usually.With to excite ASIC that signal is offered the required relative few line of DUT (not shown) opposite, realize wearing out in order to power on to DUT, need suitable lot of energy, correspondingly between ASIC and interconnect substrate, need quite a large amount of welding wire lines.The number of welding wire is approximately equal to and DUT (for example, 102) is carried out (number of) energy line for example, via elastic contact element 110, it may be 100 or more between ASIC and the interconnect substrate.

According to one aspect of the present invention, use can transmit than the welding wire of routine multipotency more (watt) interconnection device between interconnect substrate and ASIC, transmit energy, thereby reduce the number of required line.

Fig. 5 A, 5B and 5C are illustrated in the technology 500 that realization is electrically connected between ASIC and the interconnect substrate.

Fig. 5 A illustrates ASIC 526 (being equivalent to 106,206,306,326,346,406 and 506), and it has from the positive 526a of ASIC 526 and passes completely through a plurality of (illustrating one) aperture 522 that ASIC 526 extends to its back side 528b.The mode that is adopted when producing indenture 308 in the front of ASIC 306 and producing indenture 412 at the back side of ASIC 406 to be similar to suitably forms these holes 522-, in the positive 526a of ASIC 526, form indenture (first in hole 522) 522a, its degree of depth be ASIC 526 thickness (vertical observation) at least half, and in the 526b of the back side of ASIC 526, forming indenture (second portion in hole 522) 522b, its degree of depth is enough to make the second bore portion 522b and the first bore portion 522a to join.The size of

bore portion

522a and 522b guarantees to exist the continuous opening that passes 526 extensions of ASIC mould.

Fig. 5 B illustrates the next procedure of this technology, wherein such as (for example coming the deposit conductive layer by being splashed in first and second bore portions, tungsten, titanium-tungsten etc.), cause the first conductive layer part 524a to extend among the first bore portion 522a, and the second conductive layer part 524b extend among the second bore portion 522b.As shown in the figure, between these two

conductive layer part

524a and 524b, exist discontinuous.As shown in the figure, current-carrying

part

524a and 524b preferably extend on each surperficial 526a and 526n of ASIC 526 from the inside of each bore portion.In fact, the side of each

bore portion

522a and 522b (left side as shown in the figure or right) is than opposite side (a right or left side as shown in the figure) the more sputter material of receivability of bore portion.

Fig. 5 C illustrates the next procedure of this technology, wherein (for example with conductive material, gold, nickel etc.) piece 528 connects discontinuous between (bridge joint) two conductive layer parts 524a and the 524b, this conductive material be by suitably electroplate (that is, in the ASIC immersion plating liquid and fully electroplate connect two conductive layer parts) added.

To in ASIC, forming the described technology of conductive through hole also applicable to interconnect substrate of the present invention.

Conductive material (for example, filling out the epoxy of silver) group is placed on to come bridge joint in the bore portion this is discontinuous (that is, not being that this is discontinuous by electroplating bridge joint), and this within the scope of the invention.

Elastic contact element

In Fig. 1 (element 110) and Fig. 2 (element 210), elongated free standing spring contact element has been shown, in many above-mentioned U.S. and PCT patented claim, for example 08/452, in No. 255 U.S. Patent applications and the copy US95/14909 PCT patented claim thereof, described in detail this elastic contact element has been installed to method on the substrate that comprises semiconductor devices.Also elastic contact element as described therein is called " combination interconnection element ", " resilient contact structure " and similar title, they softness (for example relate to, gold) wire filaments is welded to a terminal of electronic component, electric wire is formed and is divided into the wire column with resilient shapes, and cover the adjacent domain of wire column and terminal with the hard material (for example, nickel) of one deck at least.Also can subsequently they be installed on the electronic component exhausting this type of combination interconnection element of manufacturing on (sacrificial) substrate.

Can utilize any suitable elastic contact element to realize wafer-level burn of the present invention and test macro, this within the scope of the invention.

Fig. 6 A-6C illustrates another technology that is used to form the elastic contact element that can utilize in the present invention.These elastic contact elements be " manufacturing " form rather than " combination " form.

As shown in Figure 6A, an example that is used to make the technology 600 of free standing spring contact structures relate to many (illustrating three) the insulation course 604,606,608 of composition be added to the top of semiconductor devices 602.The surface of semiconductor devices 602 (or can see from its surface) has a plurality of (illustrating one) bonding region 612.These layers are carried out composition, thereby make them have the opening of aiming at bonding region (as shown in the figure), so form the size and dimension of these openings, thereby certain one deck (for example, the opening of aperture efficiency lower floor 608,606) (for example, being respectively 606,604) further extends from bonding region.Conductive material layer 614 is added in the opening.Then, such as can in opening, forming a conductive material 620 by electroplating.As shown in the figure, this piece conductive material will be fixed in bonding region 412, and it will become stand alone type (having only the one end to fix) be removed (shown in Fig. 6 B) at insulation course after.By suitably selecting material and geometric configuration, these pieces 620 can be used as flexible free-standing contact structures.Shown in Fig. 4 C, not only extend in that the surface of element 620 is vertical as the contact structures 620 of Fig. 6 A and 6B manufacturing, and horizontal expansion.Like this, easily contact structures 620 are designed to adapt with Z axle (shown in arrow 622) and x-y plane (shown in arrow 624, being parallel to the surface of element 602).

Aging DUT

The technology of aging semiconductor devices relates at elevated temperatures these devices is powered on the inefficacy (that is, deliberately causing " initial failure rate ") of quickening potential defectiveness small pieces.As everyone knows, this acceleration strengthens by improving temperature and added operating voltage.Yet if semiconductor devices is packed, the material (for example, plastics) of encapsulation just limits (obstacle) to some extent to the temperature that packed semiconductor devices can be exposed to combustion furnace.Have only few encapsulation can restrain oneself for a long time and expose at high temperature, especially when encapsulating material comprises organic material.

Common aging method relates in 96 hours packed semiconductor devices is heated to 125 ℃ of temperature.Generally, 10 degrees centigrade of the every risings of junction temperature, digestion time can reduce by half.For example, if DUT wore out one day at 150 ℃ of needs, then can carry out the effectively aging of half a day to them down at 160 ℃.

Another obstacle of rising aging temperature is that any test component that is arranged in ageing oven also will be heated, and this can quicken its inefficacy.For example, if ASIC of the present invention is exposed under the aging temperature identical with DUT, then will speed up their inefficacy.

According to one aspect of the present invention, under 150 ℃ temperature, wear out at least.Because DUT is also non-encapsulated, and the elastic contact element that is installed to DUT (or ASIC) is metal fully, so in this operation stage, DUT is stood the harmful temperature of packed semiconductor devices (material that comprises the temperature that can not bear this rising).Can stay (unsegregated) semiconductor devices (DUT) on the wafer or the part of choosing of staying semiconductor devices on the wafer worn out all.

As mentioned above, can place ASIC (106) and WUT (102) can be evacuated and form the container of vacuum basically, can be installed to WUT (102) on the temperature control sucker (104).Produced heat owing to begin aging required electric energy, so in most of the cases, had abundant heat that DUT is elevated to required aging temperature, so temperature control sucker (104) is operated with the pattern of cooling.Because there is vacuum, thus there is minimum hot path between DUT and the ASIC (rather than elastic contact element (110)), thus ASIC is being operated under basically than the low temperature of the aging temperature of DUT.

Reduce required connectivity and other advantage

Fig. 7 illustrates the system 700 of the present invention example of (being equivalent to 100), and the feature of the various example technique of many present invention of being applicable to is shown.These features are, a plurality of ASIC 706 (being equivalent to 106) are installed to interconnection (support) substrate 708 (being equivalent to 108), and a plurality of DUT 702 (being equivalent to 102) thereby have is installed to it and positively forms the elastic contact element 710 (being equivalent to 110) that contacts with the front of ASIC.Power supply 718 (being equivalent to 118) thus via interconnect substrate 708, ASIC 706 be used to make 710 couples of DUT of device, 702 power supplies of ASIC and DUT interconnection to power on aging to them.

Master controller 716 (being equivalent to 116) offers ASIC 706 to signal via interconnect substrate 708.Only need considerably less signal for example serial data stream offer each ASIC 706, be installed to a plurality of (illustrate a plurality of in one) ASIC 706 on the interconnect substrate 708 with control independently.

Example shown in 7 is an example that is used to test the system of DUT (they are memory devices).Master controller 716 is linked a plurality of ASIC 708 by a data bus, this data bus only need considerably less (for example, four) line: single line is used for data output (being designated as DATA OUT), single line is used for data and returns (being designated as (DATA BACK)), single line is used to make ASIC to reset (being designated as MASTER RESET), also has single line to be used to transmit clock signal (being designated as CLOCK).All ASIC that are installed to interconnect substrate are linked these four " public " lines of in interconnect substrate, linking all ASIC.This illustrates the simplicity of realization (that is, making) interconnect substrate (708), and it is applicable to the electronic component (DUT) of a plurality of complexity of test.

In interconnect substrate, arrange equally, easily power supply (be designated as+V) and ground connection (being designated as GROUND) line.In fact, only need two lines in interconnect substrate, they are preferably as the plane in the multilayer interconnection substrate (that is, power plane and ground plane).

The problem relevant with the prior art that a plurality of DUT are powered on is the voltage drop by interconnect substrate.The present invention overcomes this problem by the voltage that increases is offered ASIC (706) and voltage stabilizer (being designated as VOTAGEREGULATOR) is installed in ASIC.

Can know with the those of ordinary skill in the maximally related field of the present invention, can easily append to other function (not illustrating especially) among the ASIC.For example, exclusive address and address decoder function is provided for each ASIC, so that their separate responses are in the serial data stream that comes self-controller 716.

As mentioned above, interconnect substrate only needs considerably less different lines or node.In addition, each ASIC can easily go up with carrying out direct communication with its DUT that directly links to each other at a large amount of interconnection elements (elastic contact element).Can make many lines between ASIC and the DUT carry out at double communication at the many ASIC on the interconnect substrate.This is the great advantage that is better than prior art.For example, if desired to many (for example, 500) large-scale DUT is (for example, the DRAM of 16Mb) system of simulation Matsushita Patent in the application of testing, then interconnect substrate (4) will very complicatedly (for example, provide 30 between each pin of test circuit chip (2) and each corresponding 30,000 contact element between interconnect substrate (4) and the DUT (1), 000 line), the result also will be difficult to make and produce.

Remarkable advantage of the present invention is, can significantly reduce whole " line number ", and is the most remarkable in interconnect substrate.As mentioned above, 8 " wafer can comprise the DRAM of 500 16Mb, and each DRAM has 60 bonding regions, altogether 30000 connections.Use technology of the present invention, can between ASIC and DUT, directly form these 30,000 lines.Turn back to master controller from ASIC by interconnection (support) substrate.For example, power supply (2 lines) and serial signal path (few to two, as to comprise ground wire) from power supply.This and any prior art form remarkable contrast, even use ASIC of the present invention or similar means, also need by interconnect substrate ASIC to be linked and are used to make interconnect substrate to be interconnected to the device of DUT.The present invention has eliminated this problem fully, and has significantly reduced node number required on the interconnect substrate by directly connecting between ASIC and DUT.

Another advantage of the present invention is, ASIC is positioned at WUT one side of support substrates, thereby the signal path between ASIC and the DUT minimized and helps accelerated test DUT.Layout if not so for example is installed to ASIC the opposite side (relative with WUT) of support (wiring) substrate, then will have signal delay and undesired parasitism, realizes that feasible system brings additional design challenge thereby give.

So, a kind of technology has been described, this technology provides following postchannel process flow process: make interconnection element (for example, elastic contact element) on unsegregated semiconductor devices; Wafer-level burn and test (helping higher aging temperature); (arbitrarily) sealing; The quick sorting of wafer scale; Wafer is cut apart and is separated; Transport product.

Though at length represent in accompanying drawing and above instructions and described the present invention, these are schematically, but not literal restriction, are appreciated that only to represent and described preferred embodiment, wish protection all changes and modification within the scope of the present invention.Undoubted is, the those of ordinary skill in the association area of the present invention carries out many other " changes " to " theme " set forth above easily, and these change in the scope of the present invention that is here disclosed.Several such changes have been proposed in PARENT CASE.

For example, also can between aging period, test, make such as active semiconductor devices such as ASIC and stay on the test substrate, can control some cycle tests with few relatively signal, and ASIC can obtain some result and corresponding to its action of starting ASIC.

For example, interconnect substrate can be a silicon wafer, can use conventional semiconductor fabrication directly to form ASIC in wafer, rather than a plurality of ASIC are installed on single support (interconnection) substrate.In the case, provide redundant testing element in wafer, the element that has been defined as working (and disconnect be defined as inoperative element) is tested and guaranteed to connect to wafer, these all are favourable.

Claims

1. equipment that is used for semiconductor devices is carried out ageing is characterized in that described equipment comprises:

Be used for the support of described semiconductor devices;

Active electron component;

Data bus is used to be electrically connected a described active electron component and a master controller; And

Semiconductor devices connects, and is used to be electrically connected described active electron component and described semiconductor devices,

It is characterized in that described active electron component receives the test signal of first form by described data bus, becomes second form to described test signal, and exports the described test signal of described second form by described semiconductor devices interface.

2. equipment as claimed in claim 1 is characterized in that, in described first form, described test signal is a serial data stream, and in described second form, described test signal walks abreast.

3. equipment as claimed in claim 1, it is characterized in that described active electron component also connects the response data that receives the parallel form that described semiconductor devices produced by described semiconductor devices, described response data is become serial form, and export the described response data of described serial form by described data bus.

4. equipment as claimed in claim 3 is characterized in that in described serial form described response data is a serial data stream, and in the described parallel form, described response data walks abreast.

5. equipment as claimed in claim 1 is characterized in that described active electron component also comprises pressure regulator, is used to be adjusted to the voltage of described semiconductor devices.

6. equipment as claimed in claim 1 is characterized in that described semiconductor devices connection is connected to a plurality of described semiconductor devices to described active electron component.

7. equipment as claimed in claim 6 is characterized in that in described first form, described test data is enough to test the described semiconductor devices of a number, and in described second form, described test data is enough to test the more described semiconductor devices of big figure.

8. equipment as claimed in claim 6 is characterized in that also comprising a plurality of described active electron components.

9. equipment as claimed in claim 8 is characterized in that one of described active electron component is corresponding to one in the described semiconductor devices.

10. equipment as claimed in claim 8 is characterized in that described semiconductor devices connection links to each other a plurality of described active electron components with a plurality of described semiconductor devices.

11. equipment as claimed in claim 8, it is characterized in that described semiconductor devices constitutes unsegregated semiconductor wafer, described equipment also comprises a substrate, described substrate comprises the approximately equalised material of the thermal expansivity of thermal expansivity and described different chips, and described active electron component places on the described substrate.

12. equipment as claimed in claim 1 is characterized in that described semiconductor devices connection comprises that a plurality of elastic contact elements, each elastic contact element are electrically connected a terminal of described active electron component and a terminal of described semiconductor devices.

13. equipment as claimed in claim 12 is characterized in that each described elastic contact element is single independent structures.

14. equipment as claimed in claim 1 is characterized in that described semiconductor devices connects and comprises that a plurality of weld zones of capturing, each weld zone are used to accept install to a plurality of independently resilient contact structure of a terminal of described semiconductor devices.

15. an equipment that is used for semiconductor devices is carried out ageing is characterized in that described equipment comprises:

Be used for the support of described semiconductor devices;

Active electron component;

It is characterized in that the test signal of described active electron component in response to the described semiconductor devices of input, receive response data that described semiconductor devices produces, analyze described response data, and when described response data is indicated described semiconductor devices fault, stop the ageing of described semiconductor devices.

16. equipment as claimed in claim 15, it is characterized in that described active electron component also receives the test signal of first form by described data bus, described test signal is become second form, and connect the described test signal of described second form of output by described semiconductor devices.

17. equipment as claimed in claim 16 is characterized in that in described first form, described test signal is a serial data stream, in described second form, described test signal walks abreast.

18. equipment as claimed in claim 15 is characterized in that described active electron component also comprises pressure regulator, is used to be adjusted to the voltage of described semiconductor devices.

19. equipment as claimed in claim 15 is characterized in that described semiconductor devices connection is connected to a plurality of described semiconductor devices to described active electron component.

20. equipment as claimed in claim 19 is characterized in that also comprising a plurality of described active electron components.

21. equipment as claimed in claim 20 is characterized in that one of described active electron component is corresponding to one in the described semiconductor devices.

22. equipment as claimed in claim 20 is characterized in that described semiconductor devices connection links to each other a plurality of described active electron components with a plurality of described semiconductor devices.

23. equipment as claimed in claim 20, it is characterized in that described semiconductor devices constitutes unsegregated semiconductor wafer, described equipment also comprises a substrate, described substrate comprises the approximately equalised material of the thermal expansivity of thermal expansivity and described different chips, and described active electron component places on the described substrate.

24. equipment as claimed in claim 15 is characterized in that described semiconductor devices connection comprises that a plurality of elastic contact elements, each elastic contact element are electrically connected a terminal of described active electron component and a terminal of described semiconductor devices.

25. equipment as claimed in claim 24 is characterized in that each described elastic contact element is single independent structures.

26. equipment as claimed in claim 15 is characterized in that described semiconductor devices connects and comprises that a plurality of weld zones of capturing, each weld zone are used to accept install to a plurality of independently resilient contact structure of a terminal of described semiconductor devices.

27. an equipment that is used for semiconductor devices is carried out ageing is characterized in that described equipment comprises:

Be used for the support of described semiconductor devices;

Active electron component;

It is characterized in that described active electron component receives first test signal by described data bus, produce the additional testing signal, and connect the described additional testing signal of output by described semiconductor devices.

28. equipment as claimed in claim 27 is characterized in that described active electron component also connects described first test signal of output by described semiconductor.

29. equipment as claimed in claim 27, it is characterized in that described active electron component is also in response to the additional testing signal of importing described semiconductor devices, receive the response data that described semiconductor devices produces, analyze described response data, and when described response data is indicated described semiconductor devices fault, stop the ageing of described semiconductor devices.

30. equipment as claimed in claim 27 is characterized in that described semiconductor devices connection is connected to a plurality of described semiconductor devices to described active electron component.

31. equipment as claimed in claim 30 is characterized in that described first test signal is enough to test the described semiconductor devices of first number, described additional testing signal is enough to test the described semiconductor devices of additional number.

32. equipment as claimed in claim 30 is characterized in that also comprising a plurality of described active electron components.

33. equipment as claimed in claim 32 is characterized in that one of described active electron component is corresponding to one in the described semiconductor devices.

34. equipment as claimed in claim 32 is characterized in that described semiconductor devices connection links to each other a plurality of described active electron components with a plurality of described semiconductor devices.

35. equipment as claimed in claim 32, it is characterized in that described semiconductor devices constitutes unsegregated semiconductor wafer, described equipment also comprises a substrate, described substrate comprises the approximately equalised material of the thermal expansivity of thermal expansivity and described different chips, and described active electron component places on the described substrate.

36. equipment as claimed in claim 27 is characterized in that described semiconductor devices connection comprises that a plurality of elastic contact elements, each elastic contact element are electrically connected a terminal of described active electron component and a terminal of described semiconductor devices.

37. equipment as claimed in claim 36 is characterized in that each described elastic contact element is single independent structures.

38. equipment as claimed in claim 27 is characterized in that described semiconductor devices connects and comprises that a plurality of weld zones of capturing, each weld zone are used to accept install to a plurality of independently resilient contact structure of a terminal of described semiconductor devices.