CN101014848B - Sensing apparatus - Google Patents
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- CN101014848B CN101014848B CN2005800270993A CN200580027099A CN101014848B CN 101014848 B CN101014848 B CN 101014848B CN 2005800270993 A CN2005800270993 A CN 2005800270993A CN 200580027099 A CN200580027099 A CN 200580027099A CN 101014848 B CN101014848 B CN 101014848B
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Abstract
An object of the present invention is to provide a sensing instrument capable to detect a substance existing in a very small quantity, such as environmental pollutants, instantly with a high degree of precision. As a specific means for solving the problem, a frequency signal from a crystal oscillator is sampled using a frequency signal from a reference clock generating part, the sampling value is outputted in a digital signal, quadrature detection is conducted with the digital signal for a frequency signal corresponding to the output signal, the rotational vector rotating at a frequency corresponding to the difference between the frequency of the frequency signal and the frequency of a sinusoidal wave used for the quadrature detection is taken out, and the variation of the frequency is detected by detecting the velocity of the rotational vector based on the respective sampling values. In addition to that, the measurement range of the variation of frequency can be widened by multiplying the above-described rotational vector by the reversely rotational vector corresponding to the velocity of the rotational vector.
Description
Technical field
The present invention relates to sensing device, by using the adsorbed layer that is formed for adsorbing the perceptive object thing in its surface, the sensor that is changed natural vibration frequency by the absorption of perceptive object thing detects variable quantity and the perception perceptive object thing of this sensor with the natural vibration frequency of oscillator with oscillator quartz vibrator for example.
Background technology
In order to protect environment, press for the concentration of grasping all environmental pollutants in rivers and creeks and the soil, even if extremely trace is also very strong to the toxicity of human body for polluter, therefore wish the measuring technique of the polluter of establishment trace.Be dioxin (Dioxin) as a kind of noticeable polluter recently, as the method for measuring this dioxin, it is well-known using the method for gas chromatography mass analyser and ELISA method (being suitable for the ferment immunoassay).If according to the gas chromatography mass-synchrometer, then can carry out 10
-12The high-precision microanalysis of g/ml magnitude, but the price that exists device is high, so analysis cost is also very high, such shortcoming during further analysis need be long.And ELISA method and gas chromatography mass analyser are relatively, device price and to analyze price low, and it is also short to analyze the time that needs, but it is low to 10 to exist analysis precision
-9The problem that the g/ml magnitude is such.
Therefore, by when the perceptive object thing attached to quartz vibrator on the time its natural vibration frequency and its adhesion amount correspondingly change, so as the determinator of the polluter of dioxin etc., the present inventor is conceived to quartz vibrator.The technology that record in the patent documentation 1 is arranged as the chemical sensitisation device that uses quartz vibrator on the other hand.This device be have the oscillation frequency of output transducer oscillator and the sample circuit of the absolute value of the difference frequency of the reference frequency that produces by the benchmark oscillator, with desired frequency dividing ratio to difference frequency carry out the frequency dividing circuit of frequency division, the constituting of the calculation element of counter that cycle of reference frequency is counted the cycle of this frequency division output as clock and the oscillation frequency of trying to achieve sensor vibration generator according to the cycle of having counted, be the device that is used to discern adsorbed gas.According to this chemical sensitisation device,,, can not enlarge measurement range and carry out the advantage of high-resolution mensuration so have the absolute value that can reduce the frequency that to measure because be to ask difference frequency.
But the technology of patent documentation 1 has by using frequency dividing circuit to reduce the clock frequency of counter, therefore the hop count of above-mentioned difference frequency height and frequency dividing circuit is many, phase noise increases because when this hop count becomes for a long time, so in fact above-mentioned difference frequency is not too high, thereby be difficult to guarantee high mensuration precision.The result defines the scope of application, is difficult to be applied to require to detect accurately the like that extremely situation of the material of trace such as dioxin.And because usage counter requires the shortcoming that resolution is high and minute is long so also exist.
Patent documentation 1: Japanese patent laid-open 6-241972 communique
Summary of the invention
The present invention makes in such situation, the purpose of this invention is to provide the sensing device that has high precision and can detect the perceptive object thing of for example environmental pollutants that trace exists etc.Another object of the present invention provides the sensing device that has high precision and can detect the perceptive object thing instantaneously.Further another purpose provides to have and detects the perceptive object thing accurately, can enlarge the sensing device of measurement range.
The feature of sensing device of the present invention is to be formed with the adsorbed layer that is used to adsorb the perceptive object thing on its surface, use the sensor oscillator that makes the natural vibration frequency change owing to the absorption of perceptive object thing, according to the variation perception perceptive object thing of this sensor with the natural vibration frequency of oscillator, it is characterized in that having:
The sensor oscillatory circuit makes the sensor vibrate with oscillator;
The reference clock generating unit produces and to be used for the clock signal of taking a sample with the frequency signal of oscillator to from the sensor;
Analog/digital conversion portion, by from the clock signal of said reference clock generating unit to taking a sample with the frequency signal of oscillator from the sensor, this sampling value is exported as digital signal;
Rotating vector takes out parts, to with the orthogonal detection that carries out from the corresponding frequency signal of the output signal of this analog/digital conversion portion according to digital signal, and real part and imaginary part when taking out by the complex representation rotating vector, wherein this rotating vector with this frequency signal in frequency and by the suitable angular velocity rotation of the difference on the frequency of the specific frequency of the digital signal that is used for orthogonal detection; With
Rotating vector speed calculation parts according to the above-mentioned real part that is obtained by these rotating vector taking-up parts and each time series data of imaginary part, are tried to achieve the angular velocity of rotating vector.
In addition, the present invention also can have try to achieve when sensor with the parts of the angular velocity of the rotating vector of oscillator in first environment the time with the difference of the angular velocity of rotating vector when sensor usefulness oscillator is in second environment.As first environment, for example can enumerate the solvent of pure water etc., as second environment, can enumerate the situation that in this solvent, comprises the perceptive object thing.
Above-mentioned rotating vector take out parts have above-mentioned rotating vector take out parts comprise to carry out the parts of orthogonal detection and remove the parts that are included in the radio-frequency component in the data that obtain by these parts from the corresponding frequency signal of the output signal of analog/digital conversion portion.In addition, be respectively I (n) and Q (n) when setting real part and the imaginary part corresponding with the above-mentioned sampling value in certain timing, when setting real part corresponding and imaginary part and being respectively I (n-1) and Q (n-1) with the above-mentioned sampling value in the timing before this timing, above-mentioned rotating vector speed calculation parts are tried to achieve the angular velocity of rotating vector according to the calculating of { Q (n)-Q (n-1) } I (n)-{ I (n)-I (n-1) } Q (n).
Above-mentioned rotating vector speed calculation parts can constitute has the parts of the result of calculation of being tried to achieve by above-mentioned rotating vector speed calculation parts being obtained the mean value in the stipulated time.As an example more specifically, constitute as the parts of trying to achieve moving average.And, preferably in the leading portion of above-mentioned rotating vector speed calculation parts, be provided with the correcting process portion that removes above-mentioned real part and imaginary part according to the scalar of the vector that determines by real part and imaginary part.
Further preferred the present invention constitutes as follows.That is, constitute further and have:
Contrary rotating vector generating unit, real part and imaginary part when making contrary rotating vector when complex representation and above-mentioned rotating vector retrograde rotation with the angular velocity suitable with the variable quantity of the angular velocity of trying to achieve by above-mentioned rotating vector speed calculation parts; With
The frequency range correction portion, it is arranged in the leading portion of above-mentioned rotating vector speed calculation parts, take out the real part of the above-mentioned rotating vector that parts obtain and imaginary part and the real part and the imaginary part of the contrary rotating vector that generates by above-mentioned contrary rotating vector generating unit by calculating by above-mentioned rotating vector, and postpone the angular velocity of above-mentioned rotating vector, the scope of frequency of amendment variable quantity.
At this moment, contrary rotating vector generating unit has along the tables of data of the group of the real part of the position that is limited to the lip-deep contrary rotating vector of plural number that sense of rotation disposes in turn and imaginary part and generates the address control part of contrary rotating vector by the address that produces above-mentioned tables of data by increment number suitable with the variable quantity of said frequencies or decrement number.As an example more specifically, can enumerate contrary rotating vector generating unit has the pulse width control part of output and the spike train of the corresponding dutycycle of value of the next position when represent the frequency variation of being tried to achieve by above-mentioned rotating vector speed calculation parts with digital signal the time and will work as upper value when representing the said frequencies variable quantity with digital signal and the level addition of the pulse that made by above-mentioned pulse width control part, output to the addition portion of above-mentioned address control part
Above-mentioned address generating unit is carried out integration to the output valve from this addition portion, with the formation of this integrated value as the address of above-mentioned tables of data.
The present invention, according to from the clock signal of reference clock generating unit to taking a sample with the frequency signal of oscillator from the sensor of for example quartz vibrator etc., this sampling value is exported as digital signal, the frequency signal corresponding with this output signal carried out orthogonal detection according to digital signal, take out with by the frequency of the specific frequency signal of above-mentioned sampling value (output signal of analog/digital conversion portion) and the rotating vector that is rotated by the suitable frequency of the difference of the specific frequency of the digital signal that is used for orthogonal detection.Because the angular velocity of this rotating vector is corresponding with the oscillation frequency (natural vibration frequency) of oscillator with sensor, so the angular velocity by detecting the rotating vector when in the solvent that sensor is immersed in pure water for example etc. with oscillator and the angular velocity of the rotating vector when the liquid that will comprise the perceptive object thing is supplied with this solvent, can detect the variable quantity of the angular velocity of rotating vector, can know to be adsorbed on the adsorbance of sensor with the perceptive object thing on the oscillator.In addition in the present invention, also can be by for example grasping the correspondence of the angular velocity of the various concentration of the perceptive object thing in solvent and rotating vector in advance according to detection limit line etc., by the angular velocity of rotating vector and above-mentioned detection limit line etc. are checked the concentration of inferring the perceptive object thing.
Therefore, the method for counting calculated rate with paired pulses compares, and can detect the oscillation frequency of sensor with oscillator in the short time with high precision and at the utmost point.Thereby also can detect the variable quantity of sensor with the oscillation frequency of oscillator in the short time with high precision and at the utmost point, be useful as the device of the denier material of testing environment polluter.
And, by using and the suitable angular velocity of frequency variation of trying to achieve by above-mentioned rotating vector speed calculation parts, promptly corresponding angular velocity with above-mentioned rotating vector, generate contrary rotating vector with this rotating vector retrograde rotation, contrary rotating vector and above-mentioned rotating vector are multiplied each other, can postpone the angular velocity of above-mentioned rotating vector.As a result, even if because sensor with the oscillation frequency height of oscillator, also can detect this angular velocity by the angular velocity that postpones rotating vector, so the result can enlarge the measurement range of frequency.
Description of drawings
Fig. 1 is the block diagram that the integral body of the embodiment of expression sensing device of the present invention constitutes.
Fig. 2 is that expression is used for the carrier wave remover of above-mentioned embodiment and the pie graph of low-pass filter.
The key diagram of Fig. 3 rotating vector that to be expression corresponding with frequency variation in the frequency signal of quartz vibrator.
Fig. 4 is the pie graph that expression is used for the correcting process portion of above-mentioned embodiment.
Fig. 5 is expression produces the situation that detects error when rotating vector delays a key diagram.
Fig. 6 is illustrated in the key diagram of the phase differential of the rotating vector of the timing sampling of front and back mutually.
Fig. 7 is the pie graph that expression is used for the speed calculation portion of above-mentioned embodiment.
Fig. 8 is the block diagram that the integral body of expression other embodiment of the present invention constitutes.
Fig. 9 is the rotating vector of expression in above-mentioned other embodiment and the key diagram of contrary rotating vector situation about multiplying each other.
Figure 10 is the key diagram that is illustrated in the tables of data of the contrary rotating vector that is used to produce in above-mentioned other embodiment.
Figure 11 is a block diagram of at length representing the formation of the major part in above-mentioned other embodiment.
Figure 12 is the sequential chart of the part effect in above-mentioned other embodiment of expression.
Figure 13 is the sequential chart of the part effect in above-mentioned other embodiment of expression.
Figure 14 is the performance plot of an example that is illustrated in the input value of the pulse width circuit portion that uses in above-mentioned other embodiment.
Figure 15 is the performance plot of an example of the output valve of the above-mentioned pulse width circuit of expression portion.
Figure 16 is the performance plot of an example that is illustrated in the output valve of the totalizer of using in above-mentioned other embodiment.
Figure 17 is illustrated in the specific embodiments of the invention, to taking a sample from the frequency signal of the oscillatory circuit of quartz vibrator and being transformed into the key diagram of the situation of digital value.
Figure 18 is the result of frequency spectrum is verified in expression to the output signal that is obtained by Fig. 8 a performance plot.
Figure 19 represents in the above-described embodiments the I value that obtains with the carrier wave remover and the performance plot of Q value.
Figure 20 represents in the above-described embodiments the I value that obtains with low-pass filter and the performance plot of Q value.
Figure 21 represents deviation frequency and the performance plot that detects the relation of exporting in the above-described embodiments.
Figure 22 is the performance plot of situation of rising that is illustrated in the detected value of the foregoing description medium frequency variable quantity.
Embodiment
Fig. 1 is the synoptic diagram that the integral body of the embodiment of expression sensing device of the present invention constitutes.The 1st, sensor part, this sensor part 1 have by sealings such as quartz as sensor with the piezoelectric vibrator of oscillator for example quartz vibrator 11 a face and expose another face, as the formation that for example is immersed in Lan Jiewen (Langevin) the type oscillator in the solution 12 that has the perceptive object material.In above-mentioned quartz vibrator 11 with on the face that solution contacts, be formed for the adsorbed layer of absorption (catching) perceptive object material, for example comprise the adsorbed layer of the antibody that is used to adsorb dioxin.The 13rd, the oscillatory circuit that quartz vibrator 11 is vibrated is for example exported the high-frequency signal as the sine wave of frequency signal.
The 2nd, the reference clock generating unit, for the high-frequency signal that comes self-oscillating circuit 13 is taken a sample, output is as the clock signal of the high frequency signal of frequency stability.The 21st, A/D (analog/digital) transducer is taken a sample to the high-frequency signal that comes self-oscillating circuit 13 according to the clock signal from reference clock generating unit 2, and this sampling value is exported as digital signal.The high-frequency signal specific by this digital signal also includes high frequency waves except first-harmonic.Promptly when the sine wave with high frequency waves distortion is taken a sample, imagine the influence that this high frequency component is folded, according to circumstances the situation of the frequency overlap of fundamental frequency and high frequency waves on the frequency axis in frequency spectrum.Therefore must avoid this overlapping in order to access correct perception work.
General when the sine wave signal of frequency f 1 being taken a sample with the clock signal of frequency f s, represent this frequency f that is taken into the result 2 with formula (1).Wherein mod () represents modulo (mould) function.
f2＝|mod(f1+fs/2，fs)-fs/2|……(1)
Be taken among the result at this, because to fundamental frequency, the frequency of n high frequency waves shows as n * (fundamental frequency), so if be placed on and be updated to above-mentioned formula (1) on the f2, then can calculate as which type of frequency and be taken into high frequency waves.Can set the frequency f s and sampling frequency (frequency of the clock signal) fs of the high-frequency signal of self-oscillating circuit 13 with by using this calculating to make the frequency and the nonoverlapping mode of high frequency wave frequency of first-harmonic, for example setting fs is 11MHz, and fs is 12MHz.At this moment, become the sine wave of 1MHz from the first-harmonic of the specific frequency signal of the output signal of the digital signal of A/D transducer 21 by conduct.In addition, be 11/12 if set fc/fs, then the frequency of first-harmonic and high frequency wave frequency are not overlapping, but fc/fs is not limited to this value.
At the back segment of A/D transducer 21, they are set with the order of carrier wave remover 31 and low-pass filter 32.Carrier wave remover 31 and low-pass filter 32 are used for, and take out the rotating vector that is rotated with by the frequency from the frequency of the sine wave signal of the specific for example 1MHz of the digital signal of A/D transducer 21 and the difference of the frequency of the sine wave signal that is used for orthogonal detection.
In order to understand easily the effect that rotating vector is taken out in the ground explanation, set by being Acos (ω 0t+ θ) from the specific sine wave signal of the digital signal of A/D transducer 21.On the other hand, carrier wave remover 31 has as shown in Figure 2 above-mentioned sine wave signal is multiplied by the multiplier 31a of cos (ω 0t) and above-mentioned sine wave signal is multiplied by-the multiplier 31b of sin (ω 0t).Promptly carry out orthogonal detection by this calculating.The output of the output of multiplier 31a and multiplier 31b is respectively by formula (2) and formula (3) expression.
Acos(ω0t+θ)·cos(ω0t)
＝1/2·Acosθ+1/2{cos(2ω0t)·cosθ+sin(2ω0t)·sinθ}……(2)
Acos(ω0t+θ)-sin(ω0t)
＝1/2·Asinθ-1/2{sin(2ω0t)·cosθ+cos(2ω0t)·sinθ}……(3)
Thereby,, remove the frequency signal of 2 ω 0, so the result takes out 1/2Acos θ and 1/2Asin θ from low-pass filter 32 because make the output of multiplier 31a and the output of multiplier 31b pass through low- pass filter 32a and 32b respectively.Recording low-pass filter 32 in addition is made of low-pass filter 32a and 32b.The digital processing of the reality in the low-pass filter 32 is for the continuous for example moving average of 6 data of a plurality of data of time series data computation from 31 outputs of carrier wave remover.
And when by the frequency change of the sine wave signal of Acos (ω 0t+ θ) expression, Acos (ω 0t+ θ) becomes Acos (ω 0t+ θ+ω 1t).Wherein ω 1 compares enough little with ω 0.Thereby 1/2Acos θ becomes 1/2Acos (θ+ω 1t), and 1/2Asin θ becomes 1/2Asin (θ+ω 1t).That is, the output that obtains from low-pass filter 32 is the corresponding signal of frequency variation ω 1/2 π with sine wave signal [Acos (ω 0t+ θ)].Be these values real part (I) and imaginary parts (Q) when being rotating vector, wherein rotating vector is with by being rotated from the frequency of the specific sine wave signal of the digital signal of A/D transducer 21 frequency with the difference of frequencies omega 0/2 π of the sine wave signal that is used for orthogonal detection.
Fig. 3 is the synoptic diagram of this rotating vector of expression, and the length of this rotating vector is A, and angular velocity is ω 1.In Fig. 2 and Fig. 3, ω 1t is expressed as φ.If thereby for example the frequency of the frequency signal of the A/D transformation component 21 when not adsorbing the perceptive object material on the next comfortable quartz vibrator 11 is ω 0/2 π, then because ω 1 is zero, so the angular velocity of its rotating vector is zero, but when the frequency change that on quartz vibrator 11, is adsorbed with perceptive object material and quartz vibrator 11, therefore during the frequency change of above-mentioned sine wave signal, rotating vector with the corresponding angular velocity rotation of this variable quantity.In addition, if depart from from ω 0/2 π from the frequency of the frequency signal of the A/D transformation component 21 when on quartz vibrator 11, not adsorbing the perceptive object material, then rotating vector with the corresponding angular velocity rotation of this frequency that departs from.Because the angular velocity of rotating vector all is the value corresponding with the oscillation frequency of quartz vibrator 11 in the sort of situation, if so by for example trying to achieve the angular velocity that when being immersed in quartz vibrator 11 in the solvent and in this solvent, adds each rotating vector of perceptive object thing when making the perceptive object thing be adsorbed on the quartz vibrator 11, try to achieve their angular velocity difference, then can know owing to make the perceptive object thing be adsorbed on the variable quantity of the oscillation frequency that causes on the quartz vibrator 11.
Like this, 31 pairs of above-mentioned sine wave signals of carrier wave remover carry out orthogonal detection, 32 pairs of these detections of low-pass filter result removes radio-frequency component, the real part when thereby they are the taking-up rotating vector and the device of imaginary part, wherein rotating vector carries out orthogonal detection according to digital signal with complex representation to the frequency signal from A/D transducer 21, the frequency in this frequency signal and be used for the suitable angular velocity rotation of difference on the frequency of frequencies omega 0/2 π of the sine wave signal of orthogonal detection.
Get back to Fig. 1, be provided with decrement treatment portion 4 at the back segment of low-pass filter 32.This decrement treatment portion 4 is to be the set of digital values that the clock signal of 12MHz obtains for the digital signal by the time series that obtains from low-pass filter 32, for example carries out the device every 120 decrement treatment of taking out data (pull out processing).By decrement treatment, alleviated the computational burden of computing machine like this.And in the present embodiment as described later, rotating vector has rotated how many times in the sample interval because by grasping, try to achieve the angular velocity of this rotating vector, so no matter set of digital values is carried out pulling out between what, all the accuracy of detection (accuracy of detection of the variable quantity of frequency) to above-mentioned angular velocity does not influence.
Back segment in decrement treatment portion 4 is provided with correcting process portion 5, this correcting process portion 5 carry out by respectively with the scalar of rotating vector remove by low-pass filter 32 and through the above-mentioned rotating vector of decrement treatment as the I value of real part and the Q value as imaginary part of above-mentioned rotating vector, try to achieve the I value of each unit length of rotating vector and the processing of Q value.That is, as shown in Figure 4, correcting process portion 5 is with when distributing to rotating vector with symbol V, respectively with I value and Q value square and add up, calculates the square root of this addition value and tries to achieve the scalar of rotating vector V | V|, with | the mode that V| removes I value and Q value constitutes.
It is described to revise the reasons are as follows of I value and Q value in this wise.In the present embodiment, whenever calculating rotating vector V when in the sample interval, having rotated how many times, as shown in Figure 5, estimate according to the factor of the vector Δ V that comprises the rotating vector V (n-1) that binding tries to achieve by n the rotating vector V (n) that try to achieve of sampling with by (n-1) individual sampling.Therefore exist when owing to come the waveform fluctuation etc. of the high-frequency signal of self-oscillating circuit 13 to we can say that rotating vector is delayed, when Δ V becomes Δ V ', the corresponding relation collapse of the rotation amount Δ φ of Δ V and rotating vector, the reliability of the detected value of the angular velocity of infringement rotating vector.Therefore because carry out correcting process as described above, make in each I value and corresponding value of the conduct of Q value and the unit length of rotating vector regularly consistent, so can get rid of the influence that rotating vector delays.
Further as shown in Figure 1, be provided with the speed calculation portion 6 of the angular velocity that is used to try to achieve rotating vector at the back segment of above-mentioned correcting process portion 5.With reference to Fig. 6 and Fig. 7 this speed calculation portion 6 is described, as shown in Figure 6, when the setting constant is K, if it is enough little that the angular velocity of rotating vector (frequency) is compared with sampling frequency, then can be similar to rotating vector V (n-1) that tries to achieve by (n-1) individual sampling and rotating vector V (n)=V (the n-1)+Δ V angulation Δ φ that tries to achieve by n sampling with formula (4).Wherein Δ φ is phase (n-1) poor of the phase (n) of V (n) and V (n-1), and imag is imaginary part, conj{V (n) } be the conjugate vector of V (n).
Δφ＝K·imag[ΔV·conj{V(n)}]……(4)
If set with n the corresponding value of taking a sample for I value and Q value here and be respectively I (n) and Q (n), then as complex representation Δ V and conj{V (n) } time represented by formula (5) and formula (6) respectively.
ΔV＝ΔI+jΔQ……(5)
Conj{V(n)}＝I(n)-jQ(n)……(6)
Wherein Δ I is I (n)-I (n-1), and Δ Q is Q (n)-Q (n-1).Formula (5) and formula (6) are updated in the formula (4) through after the arrangement, and Δ φ is represented by formula (7).
Δφ＝ΔQ·I(n)-ΔI·Q(n)……(7)
Above-mentioned speed calculation portion 6 is the devices of trying to achieve the approximate value of Δ φ by the calculating of carrying out this formula (7), and it constitutes as shown in Figure 7.When the I value that is input to speed calculation portion 6 be as and during the I (n) of n the corresponding value of taking a sample, to remain in the register 61 as the I (n-1) corresponding of the timing before with (n-1) individual sampling, in collating circuit portion 62, check them, take out the difference delta I of I (n) and I (n-1), I (n) and Δ I are input to calculating part 65.In addition, also similarly handle, Q (n) and Δ Q are input to calculating part 65 by register 63 and collating circuit portion 64 about the Q value.And in calculating part 65, carry out the calculating of formula (7), try to achieve Δ φ.The result of calculation of calculating part 65 is at length estimated as Δ φ.
If try to achieve rotating vector V (n-1) and V (n) here, then ask the method for the angle delta φ between them or can use various mathematical methods its method of estimating, only enumerate the approximate expression of formula (4) as an example.Also can be used as and to link the mid point of line of each terminal point of V (n) and V (n-1) and { V (n)+V (n-1) }/2 of the vector V 0 that initial point links up, this vector V 0 of replacement V (n) substitution in formula (4) as this formula.The reason of approximate formula (4) therefore can be treated to the length of Δ V suitable with the imaginary value of the Δ V when regarding V0 as real axis because of regarding V0 and Δ V as quadrature like this.And can be to try to achieve the method that argV (n) and argV (n-1) subtract each other them as the method that the method for asking Δ φ is understood intuitively easily, but at this moment because the tables of data that the phase of the group of the imaginary value of each vector and real number value and this vector need be mapped has been a method so calculate from alleviating computing machine burden aspect according to above-mentioned formula (4).ArgV (n) is tan in addition
-1(imaginary value/real number value).
As shown in Figure 1, back segment in this speed calculation portion 6 is provided with time average handling part 7, time average handling part 7 take out and output for the time average processing of carrying out as the time series data of the Δ φ of the result of calculation that obtains by speed calculation portion 6, for example moving average of stated amount of data.Here the output valve that obtains is input to difference on the frequency test section 71.This difference on the frequency test section 71 is the devices of difference that are used for detecting the angular velocity of the angular velocity of the rotating vector when quartz vibrator 11 being placed the solvent of for example pure water as first environment etc. and the rotating vector when the solvent that quartz vibrator 11 placed as the supply perceptive object thing of second environment.Because the angular velocity of rotating vector is the value corresponding with the oscillation frequency of quartz vibrator 11, so by difference on the frequency test section 71 detected angular velocity detection differences be and the corresponding value of variable quantity that is adsorbed with the oscillation frequency that the perception material causes by quartz vibrator 11, can be called is the value of estimating the adsorbance of perception material.More particularly, difference on the frequency test section 71 have the angular velocity of each rotating vector of storage storer, read the angular velocity of each rotating vector in this storer and calculate the parts etc. of this angular velocity difference.
Be illustrated by the formation square frameization that makes present embodiment as mentioned above, by software implementation actual calculation or data processing.
The following describes the effect of above-mentioned embodiment.The frequency signal as for example 11MHz of the sine wave of first-harmonic that comprises with 21 conversion of A/D transformation component that quartz vibrator (oscillatory circuit 13) vibration by sensor part 1 produces of the frequency signal by 12MHz for example comprises the signal as the sine wave signal of first-harmonic of about 1MHz from 21 outputs of A/D transformation component.Here for convenience of description, when this sine wave signal of setting is Acos (ω 0t+ ω 1t+ θ) (ω 1 compares enough little with ω 0), by this sine wave signal is carried out orthogonal detection, remove more low frequency composition, take out rotating vector with the angular velocity rotation corresponding with the frequency variation of this sine wave signal.That is, take out the real part of this rotating vector and imaginary part respectively as I value and Q value.By decrement treatment portion 4 these I values and Q value are carried out decrement treatment, further in correcting process portion 5 divided by the scalar of rotating vector V | V|, the influence that delays of removing rotating vector is input to difference on the frequency calculating part 6.In addition, for fear of numerous and diverse property of explanation, additional phase label " V " together describes on the rotating vector before and after the correcting process.
This rotating vector V is the frequency of Acos (ω 0t+ ω 1t+ θ) and frequencies omega 0/2 π poor that is used for the sine wave signal of orthogonal detection with the sine wave signal, and promptly the angular velocity of ω 1 is rotated (with reference to Fig. 3).Here in order to be easy to explanation, for example sensor part 1 is immersed in the solution that is used for the existence of detection senses object material, and when the setting angular velocity corresponding with the natural vibration frequency of the quartz vibrator 11 of (when when the detection boundary of quartz vibrator 11 is following) when the perceptive object material does not exist is ω 0, because ω 1 is zero, so rotating vector V is static.Thereby the Δ φ as the output of time average handling part 7 is zero.
On the other hand, when having the perceptive object material for example during dioxin in above-mentioned solution, corresponding with the amount that is adsorbed on the dioxin on the quartz vibrator 11, its oscillation frequency (natural vibration frequency) changes.At this moment above-mentioned rotating vector V begins with the angular velocity rotation corresponding with frequency variation.In order to make explanation simplify supposition when the variable quantity of setpoint frequency is 1Hz, rotating vector V rotated 1 time in 1 second.Here in the present embodiment, sampling is the difference Δ φ by the phase (n-1) of the phase (n) of the V (n) before and after grasping mutually and V (n-1), detect the sampling of the angular velocity of rotating vector, when this sample interval of supposition was 1/100 second, Δ φ became 3.6 degree.In other words, only in the rotating vector interlude, ask the angular velocity of rotating vector V, just can know the variable quantity of the oscillation frequency of quartz vibrator 11.
But, because consistent with the angular velocity of the sine wave signal that is used for orthogonal detection with the corresponding angular velocity of the oscillation frequency of quartz vibrator 11 when not having the perceptive object material is quite rare, so ask in fact respectively the rotating vector corresponding with the oscillation frequency of quartz vibrator 11 when not having the perceptive object material angular velocity and with the angular velocity of the corresponding rotating vector of the oscillation frequency of quartz vibrator 11 when having the perceptive object material, obtain the poor of these two angular velocity then.Because the difference of the angular velocity of this rotating vector is the corresponding value of variable quantity with the frequency that is adsorbed with the quartz vibrator 11 that the perception material causes on quartz vibrator 11, so the relation of the adsorbance by grasping the perceptive object material in advance and the variable quantity of frequency can be tried to achieve the adsorbance of perceptive object material at this moment.If try to achieve the relation of the adsorbance of the concentration of the perceptive object material in the solution and perceptive object material in advance, then the adsorbance according to the perceptive object material is the variable quantity of the frequency of quartz vibrator 11, can know the concentration of the perceptive object material in the solution.Therefore can know the concentration of the perception material in the sample liquid of supplying with the solution (label 12 among Fig. 1) that is impregnated with quartz vibrator 11.
Like this,, the oscillation frequency (coming the frequency of the frequency signal of self-oscillating circuit 13) of quartz vibrator 11 is carried out digital processing, according to detecting the angular velocity of rotating vector with sample interval respective phase difference according to above-mentioned embodiment.The result compares with the method that the such paired pulses of prior art is counted, and as proving among the embodiment described later, can detect the variable quantity of the oscillation frequency of quartz vibrator 11 in the short time with high precision and at the utmost point.In existing pulse counting method, because sine wave is counted as pulse, so for example need the time in 1 second for the pulse of discerning 10MHz with the resolution of 1Hz.As seeing from the above description, the present invention is extremely useful as the device that detects with the micro substance headed by the environmental pollutants.
As using method of the present invention, be not limited to sensor part 1 is immersed in the solution, solution is dripped on the surface of quartz vibrator 11, and the PCB etc. for example of the environmental pollutants beyond can the perception dioxin, perhaps also can perception virus.
And in the present invention, also can for example carry out various changes by the concentration that makes the perceptive object material in the solution that contacts with quartz vibrator 11, try to achieve the relation of the angular velocity of each concentration and rotating vector in advance, the angular velocity of the rotating vector when solution is contacted with quartz vibrator 11 and this relation are inferred the adsorbance of perceptive object material.
And can will make the solvent state of contact of quartz vibrator 1 and pure water etc. as so-called blank value, but quartz vibrator 1 is contacted with solvent and with the state of exposed to weather as blank value, capture the variable quantity of the rotation number of the rotating vector when adsorbing the perceptive object material when solution is contacted with quartz vibrator 1.
Further, the invention is not restricted to perception and be present in material in the liquid, cigarette in the time of can being applied to detect taste, the detection of fires of oil, perhaps detect sarin gas etc. poison gas, the gas in the test section product, detect the various fields of gas in the decontamination chamber of semiconductor fabrication factory etc. etc.
In addition, the present invention can be used in the concentration by the detection senses object of the variable quantity material of expression frequency own, but also can form as not detecting this concentration, for example have threshold value, only know the formation that has or not the device that has the perceptive object material the variable quantity of frequency.This situation is also because can capture the variable quantity of frequency, so be included in certainly in the technical scope of the present invention.
Other embodiment of the present invention then is described.The purpose of present embodiment is in the above-described embodiment, further enlarges the measurement range of difference on the frequency.In the embodiment in front, because as shown in Figure 6 the angular velocity of rotating vector is estimated as the length of the straight line of each terminal point that links V (n) and V (n-1), so the error at measurment change is greatly when the phase differential of these rotating vectors is big.Therefore, in the present embodiment, by make with the contrary rotating vector of the corresponding angular velocity retrograde rotation of the angular velocity of rotating vector, make above-mentioned rotating vector and be somebody's turn to do contrary rotating vector and multiply each other, can reduce the angular velocity of rotating vector, even if rotating vector is fast or slow, the phase differential that also can detect V (n) and V (n-1) accurately is the angular velocity of rotating vector, has enlarged the measurement range of the variable quantity (difference on the frequency) of the frequency when sample solution is supplied with sensor like this.
Fig. 8 represents that the integral body of present embodiment constitutes, and is provided with integrator 70 between the output terminal of difference on the frequency calculating part 6 and time average handling part 7.On the other hand, between low-pass filter 32 and decrement treatment portion 4, be provided with frequency range correction portion 8 and be provided with the output of integrator 70 correspondingly, generate the contrary rotating vector generating unit 9 with the contrary rotating vector of above-mentioned rotating vector V retrograde rotation, here the contrary rotating vector that will generate with frequency range correction portion 8 and multiply each other according to the specific rotating vector of exporting from low-pass filter 32 of time series data.
Now, suppose difference on the frequency (frequency variation) for example for 500Hz, in the rotating vector corresponding with this 500Hz, set as shown in Figure 9 certain sampling regularly for example n sub-sampling value be I (n)+jQ (n).When making this vector get back to position along real axis, can make with the contrary rotating vector V ' of the angular velocity corresponding above-mentioned rotating vector V retrograde rotation with difference on the frequency 500Hz, be multiplied by this contrary rotating vector V '.Rotating vector V according to the vector I+jQ of contrary rotating vector V ' rotation become { I (n)+jQ (n) } * I ' (n)+jQ ' (n).When this formula is put in order, become formula (8), frequency range correction portion 8 is carried out the calculating of this formula.
I+jQ(n)＝{I(n)·I’(n)-Q(n)·Q’(n)}+j{I(n)·Q’(n)+I’(n)·Q(n)}……(8)
When contrary rotating vector V ' takes place when, with the mode of the in fact contrary rotation of the vector on complex number plane set the value of the real part of this vector and imaginary part, when promptly the phase place of contrary rotating vector V ' is φ, the value of generation cos φ and sin φ.Figure 10 represents to arrange in turn along the sense of rotation of vector the I/Q table 90 of the group of the cos φ of vector and sin φ, contrary rotating vector generating unit 9 has above-mentioned I/Q table 90 in this example, address with reading I/Q table 90 with corresponding increment number of the output of integrator 70 or decrement number outputs to frequency range correction portion 8.For example according to reading of clock regularly one by one read the address from " 0 " to " 11 ", when getting back to " 0 " once more, rotate rotationally 1 time at 12 clock vectors clockwise on complex number plane, the increment number becomes 2, reads the address every 1, and the angular velocity of vector becomes doubly speed.Thereby correspondingly determine the increment number with the size of integrator 70, can generate with contrary rotating vector by the contrary rotation of the corresponding angular velocity of difference on the frequency Δ φ (with the corresponding angular velocity of the angular velocity of rotating vector V) of calculating with said frequencies difference calculating part 6 (with reference to Fig. 8).
Rotating vector V is as described above, when sine wave signal Acos (ω 0t+ θ) changes to Acos (ω 0t+ θ+ω 1t), because with the angular velocity of ω 1 rotation (with reference to Fig. 3), so according to the value of ω 1, the decision clockwise rotates still that inverse clock rotates.Thereby also correspondingly determine the direction of contrary rotating vector V ' with the direction of rotating vector V, the output of integrator 70 and this direction correspondingly become on the occasion of or negative value, read address about I/Q table 90, when integrator 70 be output as on the occasion of the time, read with being worth corresponding increment number with this, when integrator 70 is output as negative value, use to be worth corresponding decrement number with this and to read.That is, I/Q table 90 forms the relation of cos, sin, by address control part 103, by address increment or the decrement that makes I/Q table 90, the correction direction of rotating vector V is controlled.In addition for easy to understand the present invention, make to pattern the I/Q table of Figure 10, and do not enumerate actual table preferably make precedent.
The preference of in Figure 11, having represented contrary rotating vector generating unit 9.In this example, contrary rotating vector generating unit 9 has the position cutting part 100 that the output valve of integrator 70 is divided into upper place value and the next place value.For example when the output valve of integrator is 16, be divided into upper 8 place values and the next 8 place values are exported.In this example, by in output valve with the integrator 70 of 16 bit representations, on the value of upper 8 binary-coded decimal (decimal number of binarization), multiply by 1/M (M is 10 negative 8 powers), make upper 8 value (decimal system transformed value), deduct by multiply by the value that M gets back to 8 original binary-coded decimal value in this value from 16 binary-coded decimal, make the next 8 value (decimal system transformed value) as above-mentioned output valve.In addition the output valve of integrator 70 is divided into the method for the value of the value of upper position and the next position, is not limited to this method, also can only take out the value of upper position and the value of the next position.
And the outgoing side (exporting the output end of the next 8 value in this example) of the next position of cutting part 100 on the throne is provided with pulse width control part 101, further the back segment at this pulse width control part 101 is provided with totalizer 102, will be by correspondingly carrying out spike train that pulse width control export and upper value addition with the value of the next position by totalizer 102.And be provided with address control part 103 with rear section side in this totalizer 102, the value of 103 pairs of totalizers 102 of this address control part is carried out integration, correspondingly reading of the address in the I/Q table 90 controlled with this integrated value, promptly the mode of the increment number of control address or decrement number constitutes.
The following describes the effect of present embodiment.At first since on quartz vibrator 11 absorption perceptive object thing, when the frequency of quartz vibrator 11 is never adsorbed the state variation of perceptive object thing, rotating vector with the corresponding angular velocity rotation of difference on the frequency as the variable quantity of this frequency.And will be input to totalizer 102 as the signal of the level of for example upper 8 value in the upper position of the output valve of the integrator corresponding 70 with the angular velocity of rotating vector V.For example the next 8 value in the next position with the output valve of integrator 70 is input to pulse width control part 101 on the other hand.In pulse width control part 101, according to about the time clock of computing machine to the sampled signal that each predefined umber of pulse takes place, carry out pulse width and calculate, the spike train of output and the corresponding dutycycle of input value.
This spike train with in 1 clock, take place+pulse combined of the pulse of 1 level and-1 level that takes place in 1 clock gets up to form, suppose that per 20 clocks carry out pulse width and calculate, when the dutycycle corresponding with the input value of pulse width control part 101 is 50%, alternatively distinguish the pulse of per 10 ground output+1 level and the pulse of-1 level as shown in figure 12.And, for example when the level suitable with upper 8 value is " 5 ", after taking place, sampled signal, alternatively exports " 6 " and " 4 " from totalizer 102 between the next sampled signal of generation, control part 103 pairs of these output valves in address are carried out integration, and its integrated value becomes the address of I/Q table 90.At this moment promptly, because the recruitment of integrated value alternatively repeats " 6 " and " 4 ", so the increment number of address alternatively repeats " 6 " and " 4 ", the result is used as the increment of average " 5 " of the level suitable with upper 8 value and counts reference address, reads the real part and the imaginary part that are documented in the contrary rotating vector V ' in this address.Promptly produce the contrary rotating vector V ' of the angular velocity corresponding with being somebody's turn to do " 5 ".The I/Q table 90 of Figure 10 is understandable in addition, and is not corresponding with action at this moment.Each value of real part of reading from I/Q table 90 and imaginary part in frequency range correction portion 8, is carried out the calculating of above-mentioned formula (8) like this, and contrary rotating vector V ' and rotating vector V are multiplied each other.81 is handling parts in addition, in order to cut down the later calculating figure place of difference on the frequency calculating part 6, carries out the processing of the rounding of the next position.
And, because contrary rotating vector generating unit shown in Figure 11 9 constitutes PLL (Phase LockLoop: phaselocked loop), if to be input to the signal value of frequency range correction portion 8 from low-pass filter 32 sides stable so make, then lock the angular velocity of rotating vector V and the angular velocity of contrary rotating vector V ' immediately, form steady state (SS), in Figure 12, express each signal.Be rotating vector V, owing to reducing angular velocity, stablizes contrary rotating vector V ', but because this angular velocity is with corresponding against the angular velocity of rotating vector V ' when multiplying each other when discord, so the angular velocity of the rotating vector V that is locked by PLL is corresponding with the difference on the frequency of quartz vibrator, the result has enlarged measurement range.That is,, also can try to achieve this angular velocity, promptly measure the variable quantity of this frequency even if the angular velocity of the big rotating vector of variable quantity of frequency is big.
And, when the dutycycle corresponding with the input value of pulse width control part 101 is bigger than 50%, has only as shown in figure 13 with the amount of crossing 50% and count accordingly, the pulse of+1 level is continuous, and the pulse of pulse of level after this+1 and-1 level alternatively takes place.Thereby the recruitment of the integrated value of this spike train because initial " 6 " are continuous, so the increment number of address becomes " 6 " continuously, alternatively repeats " 6 " and " 4 " soon.Therefore, at the input value of pulse-width control part 101 mean value of back of taking a sample to the angular velocity of the contrary rotating vector V ' at the interval of next sampling, the angular velocity corresponding with " 5 " and with " 6 " corresponding angular velocity between, become with above-mentioned dutycycle accordingly the size.Promptly this angular velocity becomes and the corresponding angular velocity of value that adds on " 5 " below the radix point, this means and the input value of pulse width control part 101 (value of the next position of the output of integrator 70) correspondingly interpolation between " 5 " and " 6 ".In addition in this example, the timing of setting pulse width calculating is 20 clocks, but also can set this clock number, for example is the figure place of the next position, is 8 in this example, and per 8 clocks carry out pulse width and calculate.
A cutting part 100 and pulse width control part 101 be not set like this, correspondingly determine in the situation of method of increment number of address of I/Q table 90 with the output valve of the output of integrator 70, I/Q table 90 need with the corresponding number of precision prescribed (difference on the frequency detection resolution), and big when control with pulse width.To this, as present embodiment, constitute the memory capacity that only to cut down I/Q table 90 with the amount of in pulse width control, augmenting.
Here do not appear at situation in the upper position as the output valve of integrator 70, with the difference on the frequency of quartz vibrator is that the situation of 500Hz is an example, expresses the result of the variation of the variation of the incoming level by simulation investigation pulse width control part 101 and output level in Figure 14 and Figure 15 respectively.As shown in figure 14, the incoming level of pulse width control part 101 roughly is stable in 1msec as can be known, is locked the angular velocity of rotating vector V by the PLL that comprises contrary rotating vector generating unit 9 instantaneously.And the output of pulse width control part 101 be actually+1 and-1 level signal, its value is input to address control part 103, but with the pass with image represented resolution tie up to+1 and-1 pull into straight line.And appear at situation in the upper position as the output valve of integrator 70, and be that the situation of 10000Hz is an example with the difference on the frequency of quartz vibrator, in Figure 16, express the output level of totalizer 102.The output of totalizer 102 in this example roughly is stabilized on " 81 ".
According to above-mentioned other embodiment, except the effect of the embodiment of front, the effect below further also having.Because rotating vector V ' and the rotating vector V corresponding with the variable quantity of the frequency (natural vibration frequency) of quartz vibrator are multiplied each other, reduce the angular velocity of rotating vector V, so for example as shown in Figure 6, even if in the situation that the angular velocity of rotating vector V is estimated as the straight length of the vector of vector that links certain timing and next timing, also can try to achieve the angular velocity of rotating vector V accurately, thereby because even if the angular velocity of rotating vector V can soon also can be slow, also can try to achieve this angular velocity accurately, so the variable quantity of natural vibration frequency that can be from big value to little pH-value determination pH quartz vibrator, the result has enlarged measurement range.And the angular velocity of rotating vector V of feedback is divided into the value of upper position and the value of the next position, utilize pulse width control about the value of the next position, the data value of interpolation I/Q table 90 is so as stating the size that can reduce I/Q table 90 bright in detail, can reduce circuit scale.
As the experiment of checking device of the present invention, setting the frequency f c of the frequency signal of self-oscillating circuit 13 is 1MHz, and the frequency f s of reference clock signal is 12MHz, in fact carries out data processing by computing machine.The high-frequency signal (sine wave signal) of the test usefulness of using as the frequency signal that comes self-oscillating circuit 13 makes frequency change a little from 1MHz.Figure 17 is the situation of digital value was taken a sample and tried to achieve in expression to the high-frequency signal of test usefulness according to reference clock signal a synoptic diagram.In Figure 18, represented about situation with the digital value specific signal investigation frequency spectrum of trying to achieve like this.Thereby take out the sine wave signal of 1MHz high-frequency signal from A/D transducer 21 here as first-harmonic.
Figure 19 represents from the I value and the Q value of carrier wave remover 31 output, and Figure 20 represents the I value and the Q value that obtain from low-pass filter 32.In this example because make frequency shift, so the output valve of low-pass filter 32 rises about the high-frequency signal of testing usefulness.And Figure 21 represents deviation frequency (frequency variation) and the synoptic diagram that detects the relation of exporting in this embodiment, when increasing time error, deviation frequency increases, but in the little zone of deviation frequency, both corresponding relations are good as can be known, can detect frequency variation with high reliability.In addition, Figure 22 is the synoptic diagram that is illustrated in the output of time average handling part 7 after the frequency shift of the high-frequency signal that makes above-mentioned test usefulness, can detect the variable quantity of frequency as can be known in 0.1 second.And frequency detection accuracy and output stop the to rise amplitude of pulsation in the zone parallel with time shaft is suitable, but its value is 0.0035Hz, has proved that frequency detection accuracy is high.
Claims (9)
1. sensing device, be formed with the adsorbed layer that is used to adsorb the perceptive object thing on its surface, use the sensor oscillator that makes the natural vibration frequency change owing to the absorption of perceptive object thing, according to the variation perception perceptive object thing of this sensor with the natural vibration frequency of oscillator, it is characterized in that having:
The sensor oscillatory circuit makes described sensor vibrate with oscillator;
The reference clock generating unit produces and to be used for the clock signal of taking a sample with the frequency signal of oscillator to from described sensor;
Analog/digital conversion portion, by from the clock signal of described reference clock generating unit to taking a sample with the frequency signal of oscillator from described sensor, this sampling value is exported as digital signal;
Rotating vector takes out parts, to with the orthogonal detection that carries out from the corresponding frequency signal of the output signal of this analog/digital conversion portion according to digital signal, and real part and imaginary part when taking out by the complex representation rotating vector, wherein this rotating vector with this frequency signal in frequency and by the suitable angular velocity rotation of the difference on the frequency of the specific frequency of the digital signal that is used for orthogonal detection; With
Rotating vector speed calculation parts according to the described real part that is obtained by these rotating vector taking-up parts and each time series data of imaginary part, are tried to achieve the angular velocity of rotating vector, wherein,
Described rotating vector take out parts comprise to carry out the parts of orthogonal detection and remove the parts that are included in the radio-frequency component in the data that obtain by these parts from the corresponding frequency signal of the output signal of analog/digital conversion portion.
2. sensing device according to claim 1 is characterized in that having:
The parts of the difference of the angular velocity of the rotating vector when trying to achieve the angular velocity of the rotating vector when sensor uses oscillator in first environment and using oscillator in second environment when sensor.
3. sensing device according to claim 1 is characterized in that:
Be respectively I (n) and Q (n) when setting real part and the imaginary part corresponding with the described sampling value in certain timing, when setting real part corresponding and imaginary part and being respectively I (n-1) and Q (n-1) with the described sampling value in the timing before this timing, described rotating vector speed calculation parts are tried to achieve the angular velocity of rotating vector according to the calculating of { Q (n)-Q (n-1) } I (n)-{ I (n)-I (n-1) } Q (n).
4. sensing device according to claim 1 is characterized in that having:
The result of calculation of being tried to achieve by described rotating vector speed calculation parts is obtained the parts of the mean value in the stipulated time.
5. sensing device according to claim 4 is characterized in that:
The parts of obtaining the mean value in the stipulated time are parts of obtaining moving average.
6. sensing device according to claim 1 is characterized in that:
In the leading portion of described rotating vector speed calculation parts, be provided with the correcting process portion that removes described real part and imaginary part according to the scalar of the vector that determines by real part and imaginary part.
7. according to each described sensing device in the claim 1～6, it is characterized in that having:
The angular velocity of being tried to achieve by described rotating vector speed calculation parts is carried out the integrating block of integration;
Contrary rotating vector generating unit makes when real part and the imaginary part of complex representation during with the contrary rotating vector that taken out the rotating vector retrograde rotation that parts take out by described rotating vector with the angular velocity corresponding with the output valve of this integrating block; With
Be arranged in the leading portion of described rotating vector speed calculation parts, to rotating vector that obtains by described rotating vector taking-up parts and the parts that carry out multiplying by the described contrary rotating vector that generates against the rotating vector generating unit.
8. sensing device according to claim 7 is characterized in that:
Contrary rotating vector generating unit has along the tables of data of the group of the real part of the position that is limited to the lip-deep contrary rotating vector of plural number that sense of rotation disposes in turn and imaginary part and generates the address control part of contrary rotating vector by the address that produces described tables of data by increment number suitable with the variable quantity of described frequency or decrement number.
9. sensing device according to claim 8 is characterized in that:
Contrary rotating vector generating unit has: pulse width control part, the spike train of the dutycycle that output is corresponding with the next value when representing the frequency variation of being tried to achieve by described rotating vector speed calculation parts with digital signal; With addition portion, will work as the value of the upper position when representing described frequency variation and the level addition of the pulse that makes by described pulse width control part with digital signal, output to described address control part,
Described address control part carries out integration to the output valve from this addition portion, with the address of this integrated value as described tables of data.
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