CN101012568A - Electromoulding processing method for micro-structure on external surface of cylindrical revolving body element - Google Patents
Electromoulding processing method for micro-structure on external surface of cylindrical revolving body element Download PDFInfo
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- CN101012568A CN101012568A CN 200610161538 CN200610161538A CN101012568A CN 101012568 A CN101012568 A CN 101012568A CN 200610161538 CN200610161538 CN 200610161538 CN 200610161538 A CN200610161538 A CN 200610161538A CN 101012568 A CN101012568 A CN 101012568A
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- electroforming
- flexible
- screened film
- negative electrode
- micro
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- 238000003672 processing method Methods 0.000 title claims description 6
- 238000005323 electroforming Methods 0.000 claims description 67
- 238000000034 method Methods 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims 1
- 239000011810 insulating material Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000007769 metal material Substances 0.000 abstract description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052697 platinum Inorganic materials 0.000 abstract description 3
- 229910052719 titanium Inorganic materials 0.000 abstract description 3
- 239000010936 titanium Substances 0.000 abstract description 3
- 238000005266 casting Methods 0.000 abstract 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 3
- 230000005518 electrochemistry Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
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Abstract
The invention discloses a trace structural electric-cast manufacturing method on the external surface of column-shaped rotary bulk element in the electric cast manufacturing domain, which is characterized by the following: making flexible electric-cast screen film with micro-hole structure; attaching column-shaped rotary bulk element and flexible electric-cast screen film through mechanic squeezing pattern; casting element as cathode; forming trace projecting structure on the external surface of column-shaped rotary bulk element; making electric-cast screen film through insulating material; adding a layer of electrochemical insoluble metal material (platinum or titanium) to make the insulating material.
Description
Technical field
Column type revolving parts outside surface minute protrusions structure electrotyping process method among the present invention belongs to the electroforming manufacture field.
Background technology
High speed development along with science and technology, a lot of novel micro-structure size parts have appearred, such as the roll die that is used for the microscale structure impression in fine manufacturing field, cylindrical parts with the increase cooling electronic component performance that is used for electron trade has all designed the minute protrusions structure on the outside surface of these parts.The radiating element made of scholar such as doctor KevinKelly for example with minute protrusions structure.The range scale of these minute protrusions structures arrives between hundreds of microns at several microns,
There are many scholars to attempt using photoetching technique and other ancillary technique to process this minute protrusions structure in recent years, more representational in these processing technologies is the heat abstractor with small nickel projection that adopts the LIGA fabrication techniques, is used to improve the heat dispersion of electronic devices and components.Make this components and parts, at first on nickel thin plate base material, be coated with the photosensitive PMMA in shop, use photoetching technique on PMMA, to form the minute recesses structure; Adopt galvanoplastics on Ni-based material, to form the minute protrusions structure then; After finishing, electroforming removes PMMA, the nickel thin plate that obtains having the minute protrusions structure; At last the nickel thin plate bending is covered in the electronic devices and components surface that needs heat radiation, in order to improve heat dispersion.This technology can satisfy the shape and size accuracy requirement of micro-structure, but this technology is to process the minute protrusions structure earlier on the nickel thin plate, and then the nickel thin plate bending is covered in the electronic devices and components surface, can't accomplish smooth connection at seam crossing; This technology can only processing thin-walled part simultaneously, can't process solid cylindricality revolving parts; Moreover this technology processing units costs an arm and a leg, processing environment requirement high (minimum requirements is that cleanliness factor is 1000 grades ultra-clean space), complete processing complexity, with high costs.
Summary of the invention
The objective of the invention is deficiency, a kind of low cost, high precision and working method easy and simple to handle are provided at existing column-shape revolving-body part outside surface minute protrusions structure working method.
A kind of electromoulding processing method for micro-structure on external surface of cylindrical revolving body element is characterized in that comprising following process:
1, a kind of electromoulding processing method for micro-structure on external surface of cylindrical revolving body element is characterized in that comprising following process:
(1), makes the flexible electroforming screened film that has the micro-holes structure;
(2), use the flexible electroforming screened film of the right clamper clamping of flexible electroforming screened film left side clamper and flexible electroforming screened film;
(3), use part retainer clamping column-shape revolving-body part negative electrode, the part negative electrode move to flexible electroforming screened film, make flexible electroforming screened film generation flexural deformation, until fitting tightly with the part negative electrode;
(4), energising, the part negative electrode is carried out electroforming processing;
(5), the reversing motion of part negative electrode and flexible electroforming screened film break away from, and returns starting position;
(6), the dividing apparatus of control on the clamper, make the suitable angle of part negative electrode rotation, electroforming is implemented in feeding and fit tightly with flexible electroforming screened film again once more;
(7), continue to carry out (5) step and (6) step, until whole electroforming courses of processing end.
In the described course of processing, the life-span of flexible electroforming screened film and processing quality are directly restricting final electroforming result, therefore select suitable flexible electroforming barrier film material and working method to become the essential condition that guarantees processing result in the present invention.If flexible electroforming screened film is all made by insulating material, it has characteristics such as manufacture craft is simple, the life-span is long, cost is low, than the electrotyping process that is more suitable for having than large-feature-size and high aspect ratio minute protrusions structure.If flexible electroforming screened film adds the metallic substance (as platinum, titanium etc.) that one deck has electrochemistry indissoluble characteristic by insulating material and forms, be characterized in that metallic substance can be directly as the electroforming anode, electric field distribution when can be good at improving electroforming, improve electroforming replica precision, than the electrotyping process that is more suitable for having than the small-feature-size micro-structure.
As seen, characteristics of the present invention are: 1. adopt flexible shielding film electrocasting method processing column-shape revolving-body part outside surface minute protrusions structure, conventional common electroforming screened film does not occur bending and deformation, and the solid of revolution screened film is difficult to make at present.Flexible shielding film of the present invention is to be out of shape by mechanical presses, under the normal temperature state, dull and stereotyped screened film is deformed into the bent shield film, this method has solved the manufacturing difficult problem of column-shape revolving-body part outside surface minute protrusions structure, greatly reduces tooling cost, has saved process period; 2. flexible shielding film electroforming process both can also can satisfy the processing request of different demands in solid column-shape revolving-body outside surface processing minute protrusions structure in thin cylinder outside surface processing minute protrusions structure; 3. low to the processing environment requirement, need not the ultra-clean space, need not heating.The minute protrusions structure tooling cost of utilizing the present invention to process is low, efficient is high, and flexible electroforming screened film can be repeatedly used.
Description of drawings
Fig. 1 is a column-shape revolving-body part outside surface minute protrusions structure electrotyping process synoptic diagram.
Fig. 2 is flexible electroforming screened film synoptic diagram.Fig. 2 a is the flexible electroforming screened film synoptic diagram that processes; Fig. 2 b is the flexible electroforming screened film synoptic diagram of being made by insulating material; Fig. 2 c adds the flexible electroforming screened film synoptic diagram that metallic substance that one deck has electrochemistry indissoluble characteristic is formed by insulating material.
Label title among Fig. 1: 1, part retainer, 2, the column-shape revolving-body part, 3, flexible electroforming screened film left side clamping device, 4, the right clamper of flexible electroforming screened film, 5, flexible electroforming screened film, 6, the part rotary index device, 7, electroforming solution.
Label title among Fig. 2: 8, insulating material, 9, metallic substance
Embodiment
Implement the present invention--the operating process of " column type revolving parts outside surface minute protrusions structure electrotyping process method " below in conjunction with the specific examples explanation.
The metal heat sink of the cylindrical electronic devices and components that in electron trade, use, its optimum shape has the thin cylinder of a large amount of high aspect ratio minute protrusions for the surface, these minute protrusions can increase area of dissipation, in use thin cylinder is enclosed within the outside surface of cylindrical electronic devices and components, can reduces temperature rapidly.
In the electroforming course of processing, intend to adopt 3 electrotyping processes, promptly 1/3 of each processing thin-walled cylinder of electroforming, in conjunction with Fig. 1, concrete processing and implementation process is passed through following steps successively:
(1), adopt the drilling processing technology, directly on insulating material film drilling to go out diameter be hundreds of microns hole array, obtain flexible electroforming screened film (5);
(2), use flexible electroforming screened film left side clamping device (3) and the right clamper of flexible electroforming screened film (4) that flexible electroforming screened film (5) is fixing;
(3), with column-shape revolving-body part (2) clamping to part retainer (1), drive part retainer (1) part (2) fitted tightly until the two to flexible electroforming screened film (5) motion;
(4), adjust the electroforming liquid level and arrive proper height, part (2) as the electroforming negative electrode, and is selected suitable electroforming anode;
(5), implement electroforming;
(6), after electroforming finishes, drive part retainer (1) and make part (2) reversing motion, break away from flexible electroforming screened film (5), get back to starting position;
(7), the dividing apparatus (6) in control part retainer (1), make 120 ° of part (2) rotations, electroforming is implemented in feeding and fit tightly with flexible electroforming screened film (5) again;
(8), separate once more, rotation, feeding and electroforming;
(9), finish electroforming processing.
For the electrotyping process that has than the small-feature-size micro-structure. If flexible electroforming screened film is by insulation Material adds metal material (such as platinum, the titanium etc.) composition that one deck has electrochemistry indissoluble characteristic, is characterized in metal Material can be directly as the electroforming anode, and the Electric Field Distribution when can be good at improving electroforming improves the electroforming replica Precision.
Claims (2)
1, a kind of electromoulding processing method for micro-structure on external surface of cylindrical revolving body element is characterized in that comprising following process:
(1), makes the flexible electroforming screened film (5) that has the micro-holes structure;
(2), use the flexible electroforming screened film (5) of right clamper (4) clamping of flexible electroforming screened film left side clamper (3) and flexible electroforming screened film;
(3), use part retainer (1) clamping column-shape revolving-body part negative electrode (2), make part negative electrode (2) to flexible electroforming screened film (5) motion, make flexible electroforming screened film (5) produce flexural deformation, until fitting tightly with the part negative electrode;
(4), energising, part negative electrode (2) is carried out electroforming processing;
(5), (2) reversing motion of part negative electrode and flexible electroforming screened film (5) break away from, and returns starting position;
(6), the dividing apparatus (6) in control clamper (1), make the suitable angle of part negative electrode (2) rotation, electroforming is implemented in feeding and fit tightly with flexible electroforming screened film (5) again once more;
(7), continue to carry out (5) step and (6) step, until whole electroforming courses of processing end.
2, electromoulding processing method for micro-structure on external surface of cylindrical revolving body element according to claim 1, it is characterized in that, the making nexine is that insulation layer, skin are the double-deck flexible electroforming screened film (5) of metal level, and utilizes the metal level of this double layer screen film directly to participate in electroforming processing as the electroforming anode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101615386A CN100567582C (en) | 2006-12-27 | 2006-12-27 | Electromoulding processing method for micro-structure on external surface of cylindrical revolving body element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101615386A CN100567582C (en) | 2006-12-27 | 2006-12-27 | Electromoulding processing method for micro-structure on external surface of cylindrical revolving body element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101012568A true CN101012568A (en) | 2007-08-08 |
| CN100567582C CN100567582C (en) | 2009-12-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006101615386A Expired - Fee Related CN100567582C (en) | 2006-12-27 | 2006-12-27 | Electromoulding processing method for micro-structure on external surface of cylindrical revolving body element |
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| CN (1) | CN100567582C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102230198A (en) * | 2011-07-01 | 2011-11-02 | 广州市白云信达反光材料有限公司 | Secondary electroforming process of closed annular die strip and product formed by by process |
| CN103556188A (en) * | 2013-10-31 | 2014-02-05 | 常州华日升反光材料股份有限公司 | Electroforming equipment |
| CN103668367A (en) * | 2013-12-06 | 2014-03-26 | 宁波微极电子科技有限公司 | Manufacture method for micro-nano-structure array radiating fin |
| CN107779917A (en) * | 2017-09-21 | 2018-03-09 | 河南理工大学 | A kind of manufacturing process of thin-walled cylinder |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1184351C (en) * | 1999-03-30 | 2005-01-12 | 中国科学院高能物理研究所 | Upper sacrificial layer processing method |
| CN1686781A (en) * | 2005-04-28 | 2005-10-26 | 上海交通大学 | Method for making epoxy resin microstructure device |
| CN100510196C (en) * | 2006-03-29 | 2009-07-08 | 南京航空航天大学 | Revolving parts electroforming process and device thereof |
| CN100395374C (en) * | 2006-04-10 | 2008-06-18 | 南京航空航天大学 | Three-dimensional microstructure electroforming method and apparatus |
-
2006
- 2006-12-27 CN CNB2006101615386A patent/CN100567582C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102230198A (en) * | 2011-07-01 | 2011-11-02 | 广州市白云信达反光材料有限公司 | Secondary electroforming process of closed annular die strip and product formed by by process |
| CN103556188A (en) * | 2013-10-31 | 2014-02-05 | 常州华日升反光材料股份有限公司 | Electroforming equipment |
| CN103556188B (en) * | 2013-10-31 | 2016-08-31 | 常州华日升反光材料股份有限公司 | A kind of electroforming apparatus |
| CN103668367A (en) * | 2013-12-06 | 2014-03-26 | 宁波微极电子科技有限公司 | Manufacture method for micro-nano-structure array radiating fin |
| CN103668367B (en) * | 2013-12-06 | 2016-07-20 | 宁波微极电子科技有限公司 | The manufacture method of micro-nano structure array fin |
| CN107779917A (en) * | 2017-09-21 | 2018-03-09 | 河南理工大学 | A kind of manufacturing process of thin-walled cylinder |
| CN107779917B (en) * | 2017-09-21 | 2019-04-16 | 河南理工大学 | A kind of manufacturing process of thin-walled cylinder |
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| Publication number | Publication date |
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| CN100567582C (en) | 2009-12-09 |
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