CN101004457A - Method of manufacturing member having concave portion, lens substrate, transmission type screen and rear projection apparatus - Google Patents
Method of manufacturing member having concave portion, lens substrate, transmission type screen and rear projection apparatus Download PDFInfo
- Publication number
- CN101004457A CN101004457A CN 200710002044 CN200710002044A CN101004457A CN 101004457 A CN101004457 A CN 101004457A CN 200710002044 CN200710002044 CN 200710002044 CN 200710002044 A CN200710002044 A CN 200710002044A CN 101004457 A CN101004457 A CN 101004457A
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- CN
- China
- Prior art keywords
- concave part
- opening
- substrate
- light
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910052759 nickel Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
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- 229940049964 oleate Drugs 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- DXGLGDHPHMLXJC-UHFFFAOYSA-N oxybenzone Chemical compound OC1=CC(OC)=CC=C1C(=O)C1=CC=CC=C1 DXGLGDHPHMLXJC-UHFFFAOYSA-N 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 229920000151 polyglycol Polymers 0.000 description 1
- 239000010695 polyglycol Substances 0.000 description 1
- 229960002796 polystyrene sulfonate Drugs 0.000 description 1
- 239000011970 polystyrene sulfonate Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229940072033 potash Drugs 0.000 description 1
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Substances [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 1
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- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
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Images
Landscapes
- Laser Beam Processing (AREA)
Abstract
A method of manufacturing a member having a concave portion includes: preparing a base material; forming a mask forming film on the base material; forming a plurality of openings in the mask forming film by a laser irradiation process using a branching filter; and etching the base material to form the concave portion in the base material. The branching filter splits the laser light into a first laser beam and a second laser beam. Each of irradiation areas of the mask forming film is successively subjected to the laser irradiation treatment so that first openings are formed by the first laser beam and second openings are formed by the second laser beam. Each of the irradiation regions has a portion where an opening is not formed by the first beam of the laser irradiation process to the irradiation region, and an opening is formed by the second laser beam in one or more subsequent laser irradiation processes. In the base material, the concave portion for detection is formed using some of the openings formed by the second laser beam used in the laser irradiation process to the specified irradiation region.
Description
The cross reference of related application
The application requires the right of priority of Japanese patent application No. 2006-010524 that submitted on January 18th, 2006 and the 2006-290243 that submitted on October 25th, 2006, and these apply for that by reference form clearly is combined in this in full.
Technical field
The present invention relates to make the method for member with concave part, member with concave part, lens-substrate, rear projection screen and rear projection, more specifically, relate to the method for making member, use the member with concave part of described manufacture method manufacturing with concave part, use described lens-substrate, dispose the transmission screen and the rear projection that disposes described transmission screen of lenticule substrate with member manufacturing of concave part.
Background technology
In recent years, there is the demand that increases in the rear projection as the display that is applicable to home theater monitor, large-screen receiver etc.In described rear projection, use rear projection screen usually with lens-substrate (biconvex lens substrate) of using biconvex lens.
From the viewpoint of viewing angle characteristic etc., notice the lens-substrate (lenticule substrate) (seeing, for example JP-A-2004-286906) of using lenticule to replace the conventional biconvex lens that uses recently.
Usually, use the mould have with as lens component (biconvex lens, the lenticule etc.) corresponding shape of the lens-substrate of making target to make the said lens substrate.For example, make this mould by using mask etching, described mask has opening in its position corresponding with the lens component (concave part) that will form on the lens-substrate.
Yet by being etched under the situation that forms concave part on the mould, etch amount is according to the temperature of etching liquid therein, and sharply changing appears in its composition etc.This feasible mould that is difficult to make reliably the concave part of size and dimension (radius-of-curvature that for example needs) with needs.
In addition, owing to repeatedly etching processing or other reason, the composition of etching liquid changes in time.This causes more serious difficulty aspect the control etch amount.
This etch amount of can not controlling reliably makes the optical characteristics that the lens-substrate that obtains can not have to be needed, thereby reduces the reliability of the rear projection of lens-substrate and this lens-substrate of configuration.
Summary of the invention
Therefore, an object of the present invention is to provide can be easily and accurately make the method that concave part has the member with concave part of the size and dimension that needs, member with concave part, use described lens-substrate, dispose the transmission screen and the rear projection (rear projection) of lenticule substrate with member manufacturing of concave part.
First aspect of the present invention relates to the method for making the member with concave part.Described method comprises: the preparation base material; On described base material, form mask and form film; In described mask formation film, form a plurality of openings by the laser treatment of using branch's light filter (branching filter) to obtain mask, described branch light filter has a plurality of transmittance parts that the laser that is used for sending from lasing light emitter is divided into a plurality of laser beam, and described light transmission department branch is included in first transmittance of settling in the presumptive area to produce first laser beam and partly and in described presumptive area settles in addition to produce the second transmittance part of second laser beam; Form the described base material of mask thereon in described base material, to form concave part with etching; Wherein said mask forms film and has a plurality of irradiation areas that have preliminary dimension separately, and by using the laser radiation of the laser beam of separating to handle continuously with predefined procedure by described branch light filter to each of described a plurality of irradiation areas, carry out laser treatment in described irradiation area, to form opening, wherein, each described laser radiation of described irradiation area comprises first opening that in described irradiation area, forms by first laser beam and second opening that beyond described irradiation area, forms by second laser beam by being handled the described opening that forms, wherein settle first transmittance part of branch's light filter and second transmittance partly to make each of described irradiation area have such part, can't help first light beam that the described laser radiation of described irradiation area is handled is formed opening at this, and in one or many laser radiation is subsequently handled, form opening in by the part of second laser beam at described irradiation area, handle when all irradiation areas being carried out described laser radiation thus, when finishing etching processing then, in described base material, form a plurality of concave parts, make described base material can have wherein that mode with regular arrangement forms the effective coverage of described concave part and in described effective coverage beyond settle and wherein use as some of under shed form the inactive area that detects with concave part, described opening is formed by second laser beam of use in the described laser radiation of the irradiation area of appointment is handled.
According to described manufacture method, can be in etch step, in the effective coverage of base substrate, be formed with a plurality of concave parts of rule arrangement and in its inactive area, form a plurality of concave parts that detect usefulness, detect the shape that is used to detect the concave part in the effective coverage that forms by etching with concave part.As a result, in etch step, can be by observing the etching progress of suitably determining base substrate with the outward appearance of concave part that detects.
In addition, because second transmittance part (second laser beam) can be as the baseline of the position of aiming at each irradiation area, there are not misalignment form, unordered arrangement etc. so can remain on the opening that forms in the mask.This makes the size and dimension that can be controlled at a plurality of openings that form in the mask change.Owing to these reasons, can be easily and make the member that concave part has the size and dimension that needs reliably with concave part.
Preferably the part of irradiation area is placed in the position in the irradiation area that in one or many laser radiation is subsequently handled, form opening by second laser beam.
This feasible position that can aim at each irradiation area more reliably.
Preferably when second laser radiation is handled or during laser radiation each time thereafter handles, also the part of irradiation area is placed in the position in the irradiation area that in the laser radiation of one or many front is handled, forms opening by second laser beam.
This also feasible position that can aim at each irradiation area more reliably.
Being preferably formed detection separates it with concave part with other concave part in the inactive area of base material.
This makes can detect measurement or other operation with the size of concave part more easily in etch step, thereby can control size as the concave part (in the effective coverage) that forms target, shape etc. exactly.
Preferably directions X with the Y direction of directions X quadrature on move base material relative to lasing light emitter and branch's light filter and make a plurality of irradiation areas also move in an identical manner, carry out laser radiation and handle, wherein in branch's light filter, second transmittance partly is placed in the presumptive area on directions X and Y direction and the separated position of first light transmission department.
This makes can control size as the concave part (in the effective coverage) that forms target, shape etc. exactly.
Preferably when when the surface of the base material that wherein forms concave part is observed, each concave part that forms in the effective coverage has flat elliptical shape.
According to conventional methods, if when the observation of the surface of base material, have flat elliptical shape, then be difficult to etch amount by etching processing control base material as each concave part that forms target.On the contrary, manufacturing method according to the invention even have flat elliptical shape as each of the concave part that forms target, because detect the arrangement with concave part, also can suitably be controlled the etch amount of base material by etching processing.Thereby can obtain the member that concave part has the size and dimension that needs with concave part.In other words, when having flat elliptical shape as each of the concave part that forms target, above-mentioned advantageous effects becomes more remarkable.
Second aspect of the present invention relates to the member with concave part.Use above-mentioned manufacture method to make described member with concave part.
This makes can provide concave part to have the member with concave part of the size and dimension that needs.
The 3rd aspect of the present invention relates to lens-substrate.Use above-mentioned member to make described lens-substrate with concave part.
This feasible member that the lens-substrate of the lens component with the size and dimension that needs can be provided.
The preferred lens substrate is the lenticule substrate.
According to conventional methods, have a plurality of lenticular lenticule substrates, then be difficult to make the lenticular lenticule substrate of size and dimension especially with needs if make.On the contrary, manufacturing method according to the invention can provide the lenticular lenticule substrate with the size and dimension that needs.Thereby the lenticule substrate that obtains has the viewing angle characteristic that improves greatly.In other words, when repacking lens-substrate into the lenticule substrate, above-mentioned advantageous effects becomes more remarkable.
The 4th aspect of the present invention relates to transmission screen.Described transmission screen disposes above-mentioned lenticule substrate.
This makes can provide the transmission screen with excellent optical and reliability.
The 5th aspect of the present invention relates to rear projection.Described rear projection disposes above-mentioned transmission screen.
This makes can provide the rear projection with excellent optical and reliability.
Description of drawings
Fig. 1 schematically shows the vertical cross-section diagram that has the member of concave part according to of the present invention.
Fig. 2 is the vertical view that schematically shows according to the member with concave part of first embodiment of the present invention.
Fig. 3 illustrates the diagrammatic vertical sectional view of step that manufacturing according to the present invention has the member of concave part.
Fig. 4 is the figure that is illustrated schematically in the structure that forms the laser machining device that uses in the opening and carries out the situation of laser radiation processing.
Fig. 5 is illustrated schematically in the method for member that manufacturing according to first embodiment has concave part, forms the vertical view of branch's light filter of use in the step (laser radiation processings) at opening.
Fig. 6 illustrates when carrying out laser radiation at every turn handling in the manufacturing according to first embodiment has the method for member of concave part, forms the vertical view of the arrangement of the opening that forms in the film at mask.
Fig. 7 illustrates by repeating laser radiation to handle the vertical view that forms the different situations of opening in mask formation film in batches continuously.
Fig. 8 illustrates by repeating laser radiation to handle the vertical view that forms the different situations of opening in mask formation film in batches continuously.
Fig. 9 is the vertical view that schematically shows according to the member with concave part of second embodiment of the present invention.
Figure 10 is illustrated schematically in the method for member that manufacturing according to second embodiment has concave part, forms the vertical view of branch's light filter of use in the step (laser radiation processings) at opening.
Figure 11 illustrates when carrying out laser radiation at every turn handling in the manufacturing according to second embodiment has the method for member of concave part, forms the vertical view of the arrangement of the opening that forms in the film at mask.
Figure 12 illustrates by repeating laser radiation to handle, and forms the vertical view that forms the different situations of opening in the film in batches continuously at mask.
Figure 13 illustrates by repeating laser radiation to handle, and forms the vertical view that forms the different situations of opening in the film in batches continuously at mask.
Figure 14 is the vertical view that schematically shows according to the member with concave part of the 3rd embodiment of the present invention.
Figure 15 is illustrated schematically in the method for member that manufacturing according to the 3rd embodiment has concave part, forms the vertical view of branch's light filter of use in the step (laser radiation processings) at opening.
Figure 16 illustrates when carrying out laser radiation at every turn handling in the manufacturing according to the 3rd embodiment has the method for member of concave part, forms the vertical view of the arrangement of the opening that forms in the film at mask.
Figure 17 illustrates by repeating laser radiation to handle, and forms the vertical view that forms the different situations of opening in the film in batches continuously at mask.
Figure 18 illustrates by repeating laser radiation to handle, and forms the vertical view that forms the different situations of opening in the film in batches continuously at mask.
Figure 19 is the vertical cross-section diagram of an example of the major electrical components method of making the lenticule substrate.
Figure 20 is the vertical cross-section diagram of an example of the major electrical components method of making the lenticule substrate.
Figure 21 is the diagrammatic vertical sectional view that illustrates according to a preferred embodiment of the rear projection screen of merging lenticule substrate of the present invention (lens-substrate).
Figure 22 is the figure of major electrical components according to the structure of rear projection of the present invention.
Embodiment
Below will describe manufacturing according to the present invention in detail and have the method for the member of concave part, member, lens-substrate, rear projection screen and rear projection with concave part based on the preferred embodiment that shows in the accompanying drawings.
In the present invention, term " substrate " refers to comprise not flexible, thicker, large-sized basically object, sheets, the notion of membranaceous object and other similar articles.
Although use or application to lens-substrate of the present invention are not particularly limited, following description will concentrate on the situation that lens-substrate mainly is used as the member of making rear projection screen and rear projection.
In addition, in the following description, the lenticule substrate typically is described as an example of lens-substrate.In addition, although use or the application with member of concave part of the present invention is not subjected to special restriction, will illustrate typically that in the following description the member with concave part is used as the situation of the mould of making lens-substrate.
In addition, although in fact have the member of concave part have a plurality of concave parts and in practice the lenticule substrate have a plurality of lenticules (convex lens), for better understanding, accompanying drawing only illustrates their part in significant mode.
Have the member of concave part and make this and have the method for the member of concave part
Below will provide description to member and this method of manufacturing with concave part according to the present invention with member of concave part.
First embodiment
At first, will the member with concave part and this method with member of concave part of manufacturing according to first embodiment be described.
Fig. 1 schematically shows the vertical cross-section diagram that has the member of concave part according to of the present invention.Fig. 2 is the vertical view that schematically shows according to the member with concave part of first embodiment of the present invention.Fig. 3 illustrates the diagrammatic vertical sectional view of step that manufacturing according to the present invention has the member of concave part.
Fig. 4 is the figure that is illustrated schematically in the structure that forms the laser machining device that uses in the opening and carries out the situation of laser radiation processing.Fig. 5 is illustrated schematically in the method for member that manufacturing according to first embodiment has concave part, forms the vertical view of branch's light filter of use in the step (laser radiation processings) at opening.
Fig. 6 illustrates when carrying out laser radiation at every turn handling in the manufacturing according to first embodiment has the method for member of concave part, forms the vertical view of the arrangement of the opening that forms in the film at mask.Fig. 7 and Fig. 8 illustrate by repeating laser radiation to handle, and form the vertical view that forms the different situations of opening in the film in batches continuously at mask.
In the following description, only for clarity sake, the upside in Fig. 3 can be described as " top " or " top " and downside can be described as " bottom " or " bottom ".In addition, in Fig. 5 to 8, by the concave part 61 that the ghost line explanation forms on the relevant position of substrate 7, this is applicable to the Figure 10 to 13 and 15 to 18 that describes after a while.
In addition, in the following description, vertical (vertical direction) that be applied in the situation of rear projection at the lenticule substrate will abbreviate " vertically " or " vertical direction " as, and horizontal (horizontal direction) that be applied in the situation of rear projection at the lenticule substrate will abbreviate " laterally " or " horizontal direction " as.This also is applicable to the member with concave part corresponding with the lenticule substrate.
At first, before the method for making according to the member with concave part of the present invention, will provide description to the member with concave part according to the present invention.
The member 6 that has concave part by the method manufacturing of describing after a while.As illustrated in fig. 1 and 2, the member 6 with concave part has a plurality of concave parts 61 (concave part 61 ' and concave part 61 ") in its surface.
Member (substrate with concave part) 6 with concave part can be made up of the material of any kind of, but is preferably made by the material that is difficult to produce crooked and crackle.The example of composition material with member 6 of concave part comprises various glass materials, various resin materials etc.
The example of glass material comprises soda-lime glass, glass ceramics, quartz glass, lead glass, potash glass, borosilicate glass, alkali-free glass etc.
The example of resin material comprises polyolefin such as tygon, polypropylene, ethylene-propylene copolymer, vinyl-vinyl acetate copolymer (EVA) etc., cyclic polyolefin, the sex change polyolefin, Polyvinylchloride, poly-inclined to one side 1, the 1-dichloroethylene, polystyrene, polyamide is (as nylon 6, nylon 46, nylon 66, NYLON610, nylon 612, nylon 11, nylon 12, nylon 6-12, nylon 6-66), polyimide, polyamide-imides, polycarbonate (PC), poly--(4-methylpentene-1), ionomer, acrylic resin, acrylonitrile-butadiene-styrene copolymer (ABS resin), acrylonitritrile-styrene resin (AS resin), butadiene-styrene copolymer, polyoxymethylene, polyvinyl alcohol (PVA) (PVA), ethylene-vinyl alcohol copolymer (EVOH), polyester such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT) and poly terephthalic acid cyclohexane ester (PCT), polyethers, polyetherketone (PEK), polyetheretherketone (PEEK), polyetherimide, polyacetal (POM), polyphenylene oxide, sex change polyphenylene oxide, polysulfones, polyethersulfone, polyphenylene sulfide, polyarylate, liquid crystal polymer such as aromatic polyester, fluororesin such as polytetrafluoroethylene (PTFE), poly-inclined to one side 1,1-difluoroethylene etc., various thermoplastic elastomers such as styrene-based elastomer, polyolefin-based elastomer, Polyvinylchloride based elastomeric, the polyurethane-base elastic body, the polyester-based elastic body, polyamide-based elastic body, polybutadiene based elastomeric, the using trans-polyisoprene based elastomeric, fluorohydrocarbon rubber-based elastic body, haloflex based elastomeric etc., epoxy resin, phenolics, urea resin, melamine resin, unsaturated polyester (UP), organic silicone, carbamate groups resin etc.; And at least a multipolymer as principal ingredient that contains these materials, mixture and polymer alloy etc.In addition, in the present invention, can use two or more potpourri of these materials.
In these materials, as the composition material of member 6 with concave part, preferred glass material, and more preferably soda-lime glass, glass ceramics (for example devitrified glass (neoceram) etc.) or alkali-free glass.The member with concave part 6 with these made has excellent shape stability.Therefore, the concave part 61 that forms in the member 6 with concave part also has excellent shape stability (reliability).As a result, use the lenticule 21 of member concave part 6 formation to have uncommon dimensional accuracy with concave part 61 (concave part 61 ').This feasible optical characteristics that can significantly improve lens-substrate.
In addition, when the use soda-lime glass, when glass ceramics or alkali-free glass, be easy to process the material of the member 6 that is used to have concave part, and from the viewpoint of the manufacturing cost of member 6 with concave part is favourable, because soda-lime glass, glass ceramics or alkali-free glass are relatively cheap.
Member (substrate with concave part) 6 with concave part disposes a plurality of concave parts 61 ' (being used to form lenticular concave part) of arranging with the lenticule 21 corresponding one by one (complimentary positions relation) of following lenticule substrate (lens-substrate) 1.
The shape and size of concave part 61 ' are corresponding with lenticule 21, and difference is that they have the concave surface opposite with the convex surface of lenticule 21.That is, but concave part 61 ' relative lenticule 21 has similar complementary shape.
In this embodiment, when observation had the member 6 of concave part in vertical view, concave part 61 ' had flat shape (be generally elliptical shape or be generally the right angle toroidal), and wherein vertical (vertically) width is less than horizontal (level) width.
The concave part 61 ' of this shape guarantees that the lenticule substrate 1 that obtains has the viewing angle characteristic that improves greatly.Particularly, viewing angle characteristic all becomes excellent in the horizontal direction with on the vertical direction.In addition, the brightness of projected image becomes higher.
When supposing to observe in vertical view, the minor axis of each concave part 61 ' is L to (vertically) length
1The major axis of (μ m) and each concave part 61 ' is L to (laterally) length
2(μ m), the preferred satisfied 0.10≤L that concerns
1/ L
2≤ 0.99, the more preferably satisfied 0.50≤L that concerns
1/ L
2≤ 0.95, and the more preferably satisfied 0.60≤L that concerns
1/ L
2≤ 0.80.The satisfied advantageous effects of confirming above that makes of these relations is more remarkable.
When observing in vertical view, the minor axis of each concave part 61 ' is preferably 10-500 μ m to length (vertical width of each concave part 61 '), 30-300 μ m more preferably, and 50-100 μ m more preferably.If the minor axis of each concave part 61 ' falls into above-mentioned scope to length, then can reach sufficiently high resolution in the image on projecting to screen, prevent simultaneously the generation of defective such as ripple etc. effectively, otherwise its can have in the lenticule substrate 1 that the member 6 of concave part makes and occurs in use.Can also further increase the throughput rate of lenticule substrate 1 (rear projection screen 10).
In addition, when observing in vertical view, the major axis of each concave part 61 ' is preferably 15-750 μ m to length (transverse width of each concave part 61 '), more preferably 45-450 μ m and more preferably 70-150 μ m.If the major axis of each concave part 61 ' falls into above-mentioned scope to length, then can reach sufficiently high resolution in the image on projecting to screen, prevent simultaneously the generation of defective such as ripple etc. effectively, otherwise its can have in the lenticule substrate 1 that the member 6 of concave part makes and occurs in use.Can also further increase the throughput rate of lenticule substrate 1 (rear projection screen 10).
In addition, the radius-of-curvature of each concave part 61 ' is preferably 7.5-375 μ m, 22.5-225 μ m more preferably, and 35-75 μ m more preferably.If the radius-of-curvature of each concave part 61 ' falls into above-mentioned scope, then use the lenticule substrate 1 of member 6 manufacturings to demonstrate the viewing angle characteristic that improves greatly with concave part.
The more important thing is that viewing angle characteristic all is improved in the horizontal direction with on the vertical direction.Each concave part 61 ' can differ from one another to the radius-of-curvature that makes progress with major axis at minor axis, and the radius-of-curvature that preferably makes progress at major axis falls into above-mentioned scope in the case.
In addition, the degree of depth of each concave part 61 ' is preferably 7.5-375 μ m, 22.5-225 μ m more preferably, and 35-75 μ m more preferably.If the degree of depth of each concave part 61 ' falls into above-mentioned scope, then use the lenticule substrate 1 of member 6 manufacturings becoming good unusually aspect light service efficiency and the viewing angle characteristic with concave part.
Arrange a plurality of concave parts 61 ' with interlaced pattern (with canine tooth shape carreau).Arrange concave part 61 ' by this way and can prevent the generation of defective such as ripple etc. effectively, otherwise this can appearance in the rear projection screen 10 that finally obtains (rear projection 300).
On the contrary, if with for example chequer or other similar arranged in patterns concave part 61 ', then may be difficult to prevent reliably the generation of defective such as ripple etc. sometimes, it depends on size of concave part 61 ' etc.
Can arrange with arbitrary graphic pattern under the situation of concave part 61 ', the mode with regular arrangement of may being difficult to be increased in fully wherein form concave part 61 ' effective coverage inner concave part 61 ' occupy ratio, it depends on size of concave part 61 ' etc.
In the case, also be difficult to increase fully the light transmission rate (light service efficiency) of the lenticule substrate 1 that obtains, this may cause the image of deepening.
As mentioned above, in this embodiment, when observation had the member 6 of concave part in vertical view, concave part 61 ' was arranged with canine tooth shape carreau.Yet, preferably make first row 65 of concave part 61 ' and the staggered in the vertical half pitch of the second adjacent row 66 of concave part 61 '.
This makes and can more effectively prevent ripple and other generation of defects, otherwise this can occur by the interference of light in the rear projection screen 10 that finally obtains (rear projection 300).This also makes rear projection screen 10 (rear projection 300) have the viewing angle characteristic that improves greatly.
By strict shape, the Pareto diagram that limits concave part 61 ' as mentioned above, occupy ratio etc., can prevent ripple and other generation of defects effectively, otherwise this can occur by the interference of light in the rear projection screen 10 that finally obtains (rear projection 300).Can also guarantee that rear projection screen 10 (rear projection 300) has the viewing angle characteristic that improves greatly.
In addition, when observation has the member 6 of concave part in vertical view, the ratio that occupies that forms the effective coverage inner concave part 61 ' of concave part 61 ' therein preferably is equal to or greater than 90%, more preferably is equal to or greater than 96%, and more preferably is equal to or greater than 97%.If the ratio that occupies of concave part 61 ' falls into above-mentioned scope, then can further improve the light service efficiency of the lenticule substrate 1 that obtains and make the brightness and contrast of projected image become good unusually.
But the Pareto diagram of concave part 61 ' is not limited to above-mentioned pattern can be chequer for example.
Forming under the situation about forming by for example shrinkable material (promptly as the base substrate 2 of the lenticule substrate 1 of manufacturing purpose, trend towards by solidifying under the situation that waits contraction at the composition of forming base substrate 2), consider their shrinkage factor, can design lenticule 21 and concave part 61 ' and make it have configurations differing from one (size) and occupy ratio.
The effective coverage that forms concave part 61 ' (being used to form lenticule) is therein settled concave part 61 in addition " (detect and use).As can describing in detail after a while, use concave part 61 " determine the progress of etching in the etch step of explanation below.In addition, as described later, some that use opening 82B form concave parts 61 " (detect with), described opening 82B is formed by the laser beam of using during the laser radiation of the irradiation area E of appointment is handled (second laser beam) that sees through the second transmittance part 911B.
When observing in vertical view, concave part 61 under normal conditions " have a shape that is generally circular.And, concave part 61 " have the major axis that is substantially equal to concave part 61 ' diameter usually to length.
Then, the method that will have the member of concave part to the manufacturing according to this embodiment provides description.Have in the member 6 of concave part in manufacturing, at first make base plate (base material) 7.Preferred base plate 7 has homogeneous thickness and does not have deflection or crackle.
Also preferably make the surface cleaning of base plate 7 by cleaning or other method.Can carry out this cleaning by the surface of for example etching (photoengraving) base plate 7.Lithographic method is not limited to especially and can is for example wet etching, dry etching etc.
Under the situation of wet etching, the potpourri that preferably uses bifluoride one hydrogen ammonium and sulfuric acid still is not limited to it especially as etching liquid.This feasible smoothness that can increase the surface of base plate 7 easily shifts out impurity such as Na, K etc. from the surface of base plate 7 simultaneously.
As a result, form in the step, can reduce and to form the defective of appearance in step 81 (mask 8) such as pin hole etc. at mask at following mask.Therefore, in the etch step of explanation after a while, the part that can prevent the base plate 7 except that the part corresponding with the opening of mask formation film 81 reliably is by accidental etching.
Subsequently, as follows, on the front surface of the base plate of making thus 7, form mask 8, and go up formation rear surface diaphragm 89 in the rear surface of base plate 7 (forming the surface of the surface opposite of mask 8 on it) with a plurality of openings (initial openings) 82.
Steps A 1
As illustrating among Fig. 3 A, on the rear surface of the base plate of making thus 7, at first form rear surface diaphragm 89, and on the front surface of base plate 7, form mask formation film 81, this step can be described as " mask forms film and forms step ".Can form film 81 in company with mask in as this step of description of drawings forms rear surface diaphragm 89 together or can form rear surface diaphragm 89 in step subsequently.
Preferred mask forms film 81 permissions irradiation (laser treatment) by laser beam in following opening formation step and forms opening 82 ( opening 82A and 82B), but the etching of carrying out in the following etch step is had resistibility.In other words, preferred mask formation film 81 (mask 8) has the etch rate less than base plate 7.
From then on viewpoint, the example that mask forms the composition material of film 81 (mask 8) comprises metal such as Cr, Au, Ni, Ti and Pt, the alloy that comprises two or more metal that is selected from them, the oxide of above-named metal (metal oxide), silicon and resin.In addition, mask formation film 81 (mask 8) can be uniform basically composition individual layer or can be the layered product with a plurality of different layers.
Mask form film 81 (mask 8) be preferably have mainly the layer formed by chromium and mainly by chromium oxide forms layer layered product, still be not limited to it especially.The mask of this structure forms mould 81 and guarantees that irradiation (laser treatment) by laser beam can be easily and form the shaped aperture that needs reliably, and this will be explained hereinafter.In addition, the etching liquid that forms 8 pairs of various compositions of mask that film 81 obtains from the mask of this structure has the stability of raising, thereby can protect base plate 7 in following etch step more reliably.
In addition, the mask of above-mentioned structure forms film 81 (mask 8) can reduce mask 8 in the resistibility that keeps etching liquid thickness.In addition, the mask of above-mentioned structure formation film 81 (mask 8) allows suitably to use in following etch step and comprises the liquid of bifluoride one hydrogen ammonium as etching liquid.Bifluoride one hydrogen ammonium is not a toxic material, mean can prevent reliably to work human body or any negative effect of environment.
In addition, the mask of above-mentioned structure forms that film 81 (mask 8) can reduce the internal stress of mask 8 effectively and good unusually aspect the adhesiveness (the particularly adhesiveness in etch step) of base plate 7.For above-mentioned reasons, the use of the mask of above-mentioned structure formation film 81 (mask 8) can form concave part 61 shape that needs aptly.
At mask 8 is to have under the situation of layer of mainly being made up of chromium and the layered product of the layer of mainly being made up of chromium oxide, preferred satisfy concern that 0.01≤Y/X≤0.8 and more preferably satisfied the relation represent the average thickness (nm) of chromium layer and the average thickness (nm) that Y represents chromium oxide layer at this X in 0.1≤Y/X≤0.5.By satisfying these relations, can form the sized opening 82 of the precision that needs with increase.
Although the method that forms mask formation film 81 is not particularly limited, but form film 81 (mask 8) by metal material such as chromium (Cr) and gold (Au) at mask, their alloy, the compound of metal oxide (for example chromium oxide) or these materials (is for example made, the layered product of the metal oxide layer that has the metal level formed by metal material and form by metal oxide) under the situation, can suitably form mask by for example vapour deposition process or sputtering method and form film 81.In addition, under the situation that mask formation film 81 (mask 8) is made by silicon, can suitably form mask by for example sputtering method or CVD method and form film 81.
The thickness that mask forms film 81 (mask 8) changes with forming the kind that mask forms the material of film 81 (mask 8), and is preferably 0.01-2.0 μ m and 0.01-0.3 μ m more preferably.This feasible opening 82 that can when keeping, form the controllability of raising easily with its size and dimension to the resistibility of etching.
If less than lower limit, then there is following possibility in thickness: the shape that forms the opening 82 that forms in the step (initial apertures formation step) at following opening may be out of shape, and it depends on the kind that mask forms the composition material of film 81.Equally, when in following etch step, carrying out wet etching, existence can not adequately protect base plate 7 cover the part possibility.
On the other hand, if thickness surpasses higher limit, may be following situation sometimes then: the opening 82 that penetrates mask formation film 81 is difficult to form in following opening formation step and mask formation film 81 (mask 8) is easy to peel off by the internal stress that produces therein, and this depends on the kind of the composition material of mask formation mould 81.
The rear surface of rear surface diaphragm 89 protection base plate 7 below and in the step subsequently.By rear surface diaphragm 89, suitably protect base plate 7 not corroded, degraded etc.For example, rear surface diaphragm 89 has the structure identical construction that forms film 81 (mask 8) with mask.This expression can be when forming mask to form film 81 and forms rear surface diaphragm 89 to form the identical mode of mould 81 with mask.
Steps A 2
Then, as illustrating among Fig. 3 B, formation opening 82 ( opening 82A and 82B) obtains mask 8 in the film 81 by forming at mask, and this step can be described as " opening formation step ".The opening 82 that forms in this step is as the mask hole in following etching processing.
Form opening 82 by laser treatment (laser beam irradiation).Laser treatment can form opening 82 shape and the Pareto diagram that needs easily and accurately.As a result, can control the shape and the Pareto diagram of concave part 61 in more reliable mode.In addition, in forming opening 82, use the feasible member 6 that can have concave part of laser treatment with the throughput rate manufacturing that improves.The more important thing is, can even in base plate 7, form concave part 61 simply with big surface area.
In addition, if form opening 82 by laser treatment, then not only can under the situation that does not form following initial concave part, form opening 82 independently, and can form opening 82 and initial concave part easily and reliably by the control laser irradiation condition with shape, size and change in depth of reducing.
The example of spendable laser instrument comprises ruby laser, semiconductor laser, YAG laser instrument, femto-second laser, amorphous laser, YVO in forming opening 82
4Laser instrument, Ne-He laser instrument, Ar laser instrument, CO
2Laser instrument and excimer laser.Can use the wavelength as SHG, THG, FHG etc. of these laser instruments.
Carry out laser treatment by carrying out the laser radiation processing, handle by laser radiation on the irradiation area of the predetermined area (size) that will form film 81 to mask by the laser beam irradiation that branch's light filter 91 separates.
Particularly, in this embodiment, use laser machining device 9 as shown in Figure 4 to form opening 82.Laser machining device 9 comprises lasing light emitter (not showing), branch's light filter 91 and lens 92.
Branch's light filter 91 is flat members of being made by light screening material and has with predetermined pattern and settle a plurality of (multiple) transmittance part (hole) 911 so that laser is separated.
In laser machining device 9, will be split up into a plurality of laser beam from lasing light emitter emitted laser Lc by branch's light filter 91, the described laser beam of scioptics 92 reversing shines it mask then and forms on the irradiation area E of predetermined area of film 81.This processing can be described as " laser radiation processing ".
Therefore, in forming the irradiation area E of film 81, mask forms a plurality of openings 82 with predetermined magnification ratio and with the Pareto diagram corresponding with the hole that forms in the branch light filter 91.In this laser radiation is handled, for example the area of irradiation area E is decreased to branch's light filter 91 surface area about 1/5th.
By relative lasing light emitter and branch's light filter 91 movable base plates 7 on the Y direction of directions X and vertical directions X, a plurality of different irradiation area E are carried out this laser radiation continuously handle, refer to form the direction that the surface of film 81 extends in parallel with mask in this directions X and Y direction.
Therefore, can form opening 82A on the Zone Full of mask formation film 81, described regional correspondence wherein will form the zone of the base plate 7 of concave part 61 '.Handle by a plurality of different irradiation area E being carried out laser radiation, promptly carry out laser radiation several times and handle, the size and dimension that can be controlled at a plurality of openings 82 that form in the mask 8 changes.
This then the size and dimension that can control a plurality of concave parts 61 that can be by using the member with concave part 6 that mask 8 forms change.As a result, can improve the optical characteristics and the reliability of the lenticule substrate 1 that finally obtains significantly.
In addition, handle,, also can make the member with concave part 6 with the concave part 61 that on enough wide zone, forms even each of irradiation area E has little area by carrying out laser radiation several times.That is, can aptly the member 6 with concave part be manufactured large scale.This can also suitably deal with the size that can increase screen in the future with minimized equipment investment.
In addition, handle, can reduce to form by the mask of laser radiation formation opening 82 therein the area in the zone in the film 81 by carrying out laser radiation several times.Therefore, and laser beam irradiation is compared to the situation on the wide zone, can be suppressed at the variation of the laser beam intensity in each zone of irradiation area E by single fraction irradiation.
Even under the supposed situation of the bigger variation that can demonstrate exposure intensity in laser beam each zone of irradiation, form film 81 in general, can think that this variation is footy from mask at irradiation area E.This means and to control the size and dimension variation of opening 82 in more reliable mode, thereby can prevent the generation of the unevenness of color, brightness etc. in the lenticule substrate 1 that finally obtains.
In branch's light filter 91, wherein settle the width (length) in the zone of transmittance part 911 to be preferably 0.5-10m and 1-5mm more preferably.This makes that above-mentioned advantageous effects is more remarkable, significantly improves the throughput rate of the member 6 with concave part simultaneously with effective and efficient manner.
In addition, if will wherein settle the width (length) in the zone of transmittance part 911 to keep fully for a short time as mentioned above, even then misalignment takes place in the position alignment process of handling in the laser radiation that is used for implementing separately, also can make the misalignment that produces in the arrangement of the arrangement of the concave part 61 in member 6 and the lenticule in lenticule substrate 1 21 more not remarkable, thereby prevent any negative effect more reliably projected image quality with concave part.
In addition, if will wherein settle the width (length) in the zone of transmittance part 911 to keep fully for a short time as mentioned above, even then when the change in size of transmittance part 911 becomes big, also can make the variation that produces in the size of the size of the concave part 61 in the member 6 with concave part and the lenticule 21 in the lenticule substrate 1 more not remarkable, thereby prevent any negative effect more reliably projected image quality.
As mentioned above, have at branch's light filter 91 under the situation of reduced size, the quantity of the transmittance part 911 of branch's light filter 91 becomes less.
The quantity of the transmittance part 911 of branch's light filter 91 is preferably 5-2000 and 10-200 more preferably.This makes that above-mentioned advantageous effects is more remarkable, significantly improves the throughput rate of the member 6 with concave part simultaneously with effective means.
In addition, if the quantity of the transmittance part 911 of branch's light filter 91 falls into above-mentioned scope, even then when being used for implementing the position alignment process generation misalignment of laser radiation processing separately, also can make the misalignment that produces in the arrangement of the arrangement of the concave part 61 in member 6 and the lenticule in lenticule substrate 1 21 more not remarkable, thereby prevent any negative effect more reliably projected image quality with concave part.
In addition, if the quantity of the transmittance part 911 of branch's light filter 91 falls into above-mentioned scope, even then when the change in size of transmittance part 911 becomes big, the variation that the size of the lenticule 21 of the size of concave part 61 of the member 6 with concave part and lenticule substrate 1 is produced is more not remarkable, thereby prevents any negative effect to projected image quality more reliably.
With reference to figure 5, branch's light filter 91 of use comprises: by the light transmission department grouping 912 that a plurality of first transmittance part 911A form, light transmission department grouping 912 is positioned in the presumptive area; With with the regional different zone of light transmission department grouping 912 in the second transmittance part 911B of arrangement.
In other words, branch's light filter 91 is included in the transmittance part 911 of the second transmittance part 911B of interior first transmittance part 911A that arranges of presumptive area and arrangement beyond presumptive area as it.By using this branch light filter 91, the first laser beam to see through second transmittance part 911B generation through the first transmittance part 911A generation and second laser beam by laser Lc by laser Lc.
Although transmittance part 911 is in the form of through hole in the embodiment of explanation, they are not limited to this type and can be by for example light transmitting material manufacturing.
In addition, handle by carrying out laser radiation several times as mentioned above, mask form film 81 as lower area in form the opening 82 (opening 82A) of a plurality of regular arrangements by first laser beam, described regional correspondence wherein will form the zone of the base plate 7 of concave part 61 ' (being used to form lenticular concave part).And, mask form film 81 as lower area in form a plurality of openings 82 (opening 82B) by second laser beam, described regional correspondence wherein will form concave part 61 " zone (seeing Fig. 6 to 8) of the base plate 7 of (detect and use concave part).
Particularly, by forming mask 8 (opening 82) in the above described manner, in following etch step, can in the effective coverage of base plate 7, under the situation that does not have loss, form the concave part 61 (concave part 61 ') of a plurality of regular arrangements.But also can form a plurality of detections with concave part 61 in the inactive area that be positioned at the base plate 7 beyond the effective coverage ", detect with concave part 61 " be used to detect shape by the concave part 61 of etching formation.
The result, in etch step, can be by observe detecting with concave part 61 " outward appearance suitably determine progress to base plate 7 etchings, and can be easily and make the member with concave part 6 of concave part 61 reliably with suitable size and dimension.
In addition, in one or many laser radiation is subsequently handled, by using the laser beam (second laser beam) that sees through the second transmittance part 911B in the part of mask formation film 81, to form opening 82 (opening 82B), the part that described mask forms film 81 is positioned at the zone with a plurality of openings 82 (opening 82A) that formed by the laser beam (first laser beam) that sees through the first transmittance part 911A, but laser radiation does not wherein in front also form opening 82 (opening 82A) in handling.
This allows the second transmittance part 911B (seeing through the laser beam (second laser beam) of the second transmittance part 911B) as the baseline when aiming at the position of each irradiation area E, thereby can remain on the opening 82 that forms in the mask 8 and not have the misalignment form, unordered arrangement etc.
In addition, when second laser radiation is handled or in each laser radiation is thereafter handled, form opening 82A by the laser beam (first laser beam) that sees through the first transmittance part 911A in the irradiation area E except that opening 82B, described opening 82B is formed by the laser beam (second laser beam) that sees through the second transmittance part 911B in the laser radiation of one or many front is handled.
In addition, because handle mask 8 by carrying out laser radiation several times, the size and dimension that can be controlled at a plurality of openings 82 that form in the mask 8 changes.
The result, the size and dimension that can control concave part 61 ' that can be by using the member with concave part 6 that mask 8 makes changes, and the size and dimension that can control the lenticule 21 that can use the lenticule substrate 1 that member 6 with concave part makes changes.This feasible optical characteristics and reliability that can significantly improve lenticule substrate 1.
On the contrary, if use the branch's light filter (not using concave part) do not have second transmittance part, then be difficult to suitably to determine the etching progress in following etch step if do not form to detect.Therefore, be difficult to obtain to have the lens-substrate of lens component of the size and dimension of needs, thereby be difficult to reach the satisfaction of optical characteristics.
Be to be understood that not having second transmittance branch's light filter partly by use forms opening in the effective coverage, and in inactive area, independently form the detection opening in addition.
Yet in the case, the size and dimension of the size and dimension of the opening in the effective coverage and the opening in inactive area (detect and use opening) becomes greatly.This is difficult to suitably be controlled at the etching operation in the etch step and forms the concave part that needs size and dimension.
In addition,, then be difficult to carrying out aiming at the position of irradiation area separately when laser radiation is several times handled, and be difficult to prevent really the misalignment form etc. of the opening 82 that in mask, forms if use the branch's light filter do not have second transmittance part.
Should also be appreciated that use and conduct form the corresponding branch's light filter in whole surface of the mask of target, promptly have the corresponding transmittance branch's light filter partly of opening that aspect quantity and arrangement, forms the mask of target with conduct.
Yet in the case, branch's light filter of use, to be used to shine the light source of directional light and to be used to make the size increase through the lens of the light beam of branch's light filter reversing be inevitably, thereby sharply increase the production cost of the member with concave part.
In addition, if use the branch's light filter with a lot of transmittance parts as mentioned above, then the distortion of the shape that is caused by aberration becomes significantly, thereby is difficult to according to design formation concave part.
In this embodiment, as illustrating among Fig. 6, form opening 82 ( opening 82A and 82B), thus in the inactive area of base plate 7, the detection that forms in following etch step is with concave part 61 " can abut female face portion 61 '.
In addition, in this embodiment, settle a plurality of second transmittance part 911B of branch's light filter 91, this means by a laser radiation and handle a plurality of opening 82B of formation.
Therefore, when by carrying out laser radiation continuously in abutting connection with irradiation area E and handle when forming opening 82, can implement to aim at the operation of the position of irradiation area E by rights to different.This feasible misalignment form or other generation of defects that can prevent the chance of opening 82 more reliably.
Form in the processing procedure that forms opening 82 in the film 81 at mask, the some parts of the front surface by removing base plate 7 and mask form film 81 and can form initial concave part.When this guaranteed to carry out etching in following etch step, initial concave part contacted with etching liquid with the contact area that increases, thereby makes erosion begin easily.
In addition, can adjust the degree of depth (maximum ga(u)ges of lens) of concave part 61 ' by the degree of depth of adjusting initial concave part.Under the situation that forms initial concave part, its degree of depth is preferably and is equal to or less than 5 μ m and more preferably about 0.1-0.5 μ m, but is not limited to them especially.
In addition, the irradiation formation opening 82 by laser beam can reduce the change in depth in company with a plurality of initial concave parts of opening 82 formation more reliably.This helps to reduce the change in depth of each concave part 61 of the member 6 with concave part, then can reduce the size and dimension variation of the lenticule 21 of the lenticule substrate 1 that finally obtains.As a result, can reduce the diameter of each lenticule 21 significantly, the variation of focal length and lens thickness.
Although without limits, the opening 82 that forms in this step has the shape that is generally circular aspect size, wherein its diameter is preferably 0.8-20 μ m, more preferably 1.0-10 μ m and more preferably 1.5-4 μ m.If the diameter of opening 82 falls into above-mentioned scope, then in following etch step, can form concave part 61 ' reliably with above-mentioned shape.
Steps A 3
Then, with base plate 7 etchings that are coated with mask 8 with as the illustrated a plurality of concave parts 61 (concave part 61 ' and detect ") that on base plate 7, form among Fig. 3 C with concave part 61; described mask 8 has the opening 82 ( opening 82A and 82B) that forms in front the step, and this step can be described as " etch step ".
Although can use various etching liquids under situation about being not particularly limited, the preferred ammonium fluoride that uses is as etching liquid.The example of ammonium fluoride comprises the normal salt (NH that can be used alone or in combination
4F) and hydrogen salt (NH
4HF
2: bifluoride one hydrogen ammonium).
Particularly, under the situation of using the ammonium fluoride of mainly forming by bifluoride one hydrogen ammonium, can be with more effective mode etching base plate 7.Bifluoride one hydrogen ammonium salt solution is not a toxic material, therefore can prevent the human body when working or any negative effect of environment.
Although be not particularly limited, the content of ammonium fluoride is preferably 1-500g/L in etching liquid, more preferably 1-200g/L and more preferably 10-100g/L.This makes can be with more effective mode etching base plate 7.
Yet, if, there is the possibility that can not reach sufficiently high etch rate according to the temperature of etching condition such as etching liquid etc. less than lower limit in the content of ammonium fluoride.On the other hand, if the content of ammonium fluoride surpasses higher limit, then can not reach the advantageous effects that matches with this content.
In addition, except that above-mentioned ammonium fluoride, etching liquid can also comprise acid.As long as it does not produce F ion, HF when water-soluble
2Ions etc. can use the acid of any kind of under situation about being not particularly limited.The example of this acid comprises mineral acid such as sulfuric acid, hydrochloric acid or nitric acid and organic acid such as acetate or succinic acid, and they one or more can be used alone or in combination.
Wherein, preferably use mineral acid, more preferably use oxyacid such as sulfuric acid or nitric acid and more preferably use sulfuric acid.This makes can more effectively remove the accessory substance of the reaction between etching liquid and glass.
Particularly,, use the etching liquid that comprises sulfuric acid to guarantee etching base plate 7 more equably, suppress negative effect simultaneously effectively mask 8 having layer of mainly forming and the layered product of the layer of mainly forming as under the situation of mask 8 by chromium oxide by chromium.
Although be not particularly limited, the content of acid is preferably 1.7-920g/L, more preferably 1.7-370g/L and more preferably 1.7-190g/L in etching liquid.This makes can more effectively remove the accessory substance of the reaction between etching liquid and glass.
Yet less than lower limit, may be following situation sometimes: according to the composition of base plate 7, the content of ammonium fluoride etc. fully reach above-mentioned advantageous effects as the content of tartaric acid.On the other hand, surpassing higher limit as the content of tartaric acid, may be following situation then: depend on the composition of mask 8, and the content of ammonium fluoride etc., mask 8 is subjected to accidental negative effect.
The content of supposing ammonium fluoride in etching liquid is that the content of A (g/L) and acid is B (g/L), preferred satisfied 1.0≤B/A≤4.0 that concern, more preferably satisfied 1.0≤B/A≤3.0 and more preferably satisfied 1.3≤B/A≤2.7 that concern of concerning.This makes can the more all even base plate of etching effectively 7, more effectively removes the accessory substance of the reaction between etching liquid and glass simultaneously.
Except that above-mentioned ammonium fluoride and acid, etching liquid can also comprise solvent such as water etc.In addition, except that said components, in etching liquid, can also comprise adjuvant such as hydrogen peroxide, surfactant etc.These adjuvants comprise the even etching of assurance to base plate 7.Particularly, in other component, add under the situation of hydrogen peroxide, can increase etch rate.
In addition, if if satisfy above-mentioned relation and above-mentioned have mainly the layer formed by chromium and mainly by chromium oxide forms layer layered product be used as mask, then above-mentioned advantageous effects is more remarkable.
As mentioned above, mask 8 disposes opening 82B (opening of corresponding second transmittance part).In addition, as mentioned above, mask form film 81 as lower area in form opening 82B, described regional correspondence wherein will form concave part 61 " zone of the base plate 7 of (detect use concave part); i.e. the zone of corresponding base plate 7 except that the zone that wherein will form concave part 61 ' (being used to form lenticular concave part); guarantee formation concave part 61 on base plate 7 thus " when (detection concave part), concave part 61 " and adjacent concave part 61 ' (being used to form lenticular concave part) crossover.
When in vertical view, observing, concave part 61 " (detect and use concave part) have the shape that is generally circular, and this is feasible can measure its definite size.Therefore, in this step, by observing to the concave part corresponding 61 with opening 82B " progress of (detect and use concave part) etching, can be easily with the corresponding part that calculates to a nicety with opening 82A in the size and dimension of the concave part 61 ' (being used to form lenticular concave part) that forms.This feasible terminal point that can correctly determine etching.
Therefore, can be easily and make the member with concave part 6 of concave part 61 ' reliably with the size and dimension that needs.In addition, can reduce the size and dimension variation of each concave part 61 '.
Just in time at concave part 61 with corresponding opening 82B " termination etching operation when forming preliminary dimension.This makes the part of the base plate 7 can prevent corresponding opening 82A by overetch, thereby allows concave part 61 ' (being used to form lenticular concave part) is accurately formed the size and dimension that needs.
Steps A 4
At last, as illustrating among Fig. 3 D, remove mask 8 from base plate 7, this step can be described as " mask is removed step ".When removing mask 8, also remove rear surface diaphragm 89, thereby obtain having the member 6 of concave part.
Mask 8 by aforementioned have the layer of mainly forming by chromium and mainly form by chromium oxide layer layered product situation about forming under, can suitably carry out removing of mask 8 by for example using the etching operation of the potpourri of cerium ammonium nitrate (II) and perchloric acid.
In addition, for example, the surface that forms the member with concave part 6 of concave part 61 thereon can be handled through the demoulding.This makes and can easily take out the member 6 with concave part in the method for following manufacturing lenticule substrate 1, prevents the generation in defective such as crack etc. in the lenticule 21 of base substrate 2 simultaneously really.
The example that the described demoulding is handled comprises forming of the coating be made up of release materials, and described release materials is silicone such as alkyl polysiloxane etc. and fluoro resin such as teflon etc. for example; Use silylating agent such as hexamethyldisilazane ([(CH
3)
3Si]
2NH) surface treatment; With the surface treatment of using fluorine base gas.
Via in above-described step, can obtain the member with concave part 6 that constitutes by base plate 7, as Fig. 1,2 and 3D in illustrate, on base plate 7, form a plurality of concave parts 61 ' with interlaced pattern.
Second embodiment
Then, will the member with concave part and this method with member of concave part of manufacturing according to second embodiment be described.
Fig. 9 is the vertical view that schematically shows according to the member with concave part of second embodiment of the present invention.Figure 10 is illustrated schematically in the method for member that manufacturing according to second embodiment has concave part, forms the vertical view of branch's light filter of use in the step (laser radiation processings) at opening.
Figure 11 illustrates when carrying out laser radiation at every turn handling in the manufacturing according to second embodiment has the method for member of concave part, forms the vertical view of the arrangement of the opening that forms in the film at mask.Figure 12 and 13 illustrates by repeating laser radiation to handle, and forms the vertical view that forms the different situations of opening in the film in batches continuously at mask.
With describe according to the member with concave part of second embodiment and make this have the method for the member of concave part from now on.Omitting under the situation of identical point from describe, following description will concentrate on the point different with previous embodiments.
In the member with concave part 6 of previous embodiments, be formed in the vertical view concave part 61 that has the shape that is generally circular when observing " (detect and use concave part); contact with the concave part 61 ' (being used to form lenticular concave part) of flat shape thus; in contrast, the member with concave part 6 that disposes this embodiment makes the concave parts 61 of the shape that is generally circle " (detection concave part) do not contact (see figure 9) with the concave part 61 ' (being used to form lenticular concave part) of flat pattern.
This makes and can carry out concave part 61 more easily in etch step " measurement or other operation of size, thereby concave part 61 ' can be formed the size and dimension that needs in more reliable mode.In addition, this guarantees to form easier position alignment in the step at opening, thereby prevents misalignment form or other generation of defects of concave part 61 ' reliably.
In addition, with wherein settle concave part 61 along the both sides (inactive area) of member 6 with concave part " member with concave part 6 of the previous embodiments of (detect and use concave part) is opposite, the member with concave part 6 that disposes this embodiment makes settles concave parts 61 along four sides (inactive area) of the member 6 with concave part " (detection concave part).
This makes and can carry out concave part 61 on the wide zone of base plate 7 in following manufacture process " measurement or other operation of size; thereby even in the time in the various piece in the etching device (for example etching bath) variation of etch amount may taking place, also can more suitably determine the terminal point of etching.
In addition, a plurality of concave parts 61 " though formation guarantee when the variation of etch amount takes place in the various piece in the etching device (for example etching bath); also can change orientation and the arrangement of base plate 7 in etching device, reduce thus in the etch step process each concave part 61 " progress of etching changes.This makes the generation that the size and dimension of concave part 61 ' (being used to form lenticular concave part) of the member 6 can prevent to have concave part effectively changes.
The member with concave part 6 of this embodiment is substantially the same with the member with concave part 6 of previous embodiments aspect the shape of concave part 61 ' (being used to form lenticular concave part) and arrangement.In addition, the member with concave part 6 of this embodiment has the shape of cross section identical with the member with concave part that shows 6 in Fig. 1.
Then, the method that the manufacturing according to this embodiment is had a member of concave part provides description.
In the embodiment, the manufacture method of this embodiment is included in each step illustrated in fig. 3 and uses the laser machining device 9 that shows in Fig. 4 to form at mask and forms opening 82 in the film 81 as described above.
Be different from previous embodiments aspect the arrangement of the transmittance part 911 that this embodiment is settled in branch's light filter 91.Promptly, use the branch light filter of this embodiment to form opening 82B to guarantee when by implementing the concave part 61 that etch step forms " (detect and use concave part) when becoming preliminary dimension (; when concave part 61 " diameter become when design load as the maximum gauge of the concave part 61 ' that forms target equates), the concave part 61 of aligning opening 82B formation " (detection concave part) be not to contact with the concave part 61 ' (being used to form lenticular concave part) of aligning adjacent apertures 82A formation but isolate.
Branch's light filter 91 that use has the transmittance part 911 (the first transmittance part 911A and the second transmittance part 911B) of arranging by this way makes can form more reliably to have desirable round-shaped detection concave part 61 in vertical view when observing in etch step ".As a result, can determine to stop the appropriate time of etching operation in more reliable mode, thereby make the size and dimension that concave part 61 ' can be formed more reliably needs.
In addition, branch's light filter 91 comprises the zone that is surrounded and have empty part by the first transmittance part 911A of light transmission department grouping 912, the transmittance part that can not form from the viewpoint of regular arrangement in described empty part.
The existence in this zone makes when in one or many laser radiation is subsequently handled, by using the laser beam (second laser beam) that sees through the second transmittance part 911B, be easy to carry out position alignment when in the part of mask formation film 81, forming opening 82B, but described mask forms the part of film 81 and is arranged in the laser radiation that is surrounded wherein in front by a plurality of opening 82A and handles the zone that does not also form opening, and described opening 82A is formed by the laser beam (first laser beam) that sees through the first transmittance part 911A.Thereby can prevent the generation of the misalignment form of concave part 61 ' more reliably.
In addition, even have the use of branch's light filter 91 in aforesaid zone guarantee in the light of branch's light filter 91 irradiation can each zone at branch's light filter 91 (in each of irradiation area E is regional) demonstrate under the supposed situation of the bigger variation of exposure intensity, form film 81 in general from mask, can think that also this variation is footy.This means the variation that to control the size and dimension of opening 82 in more reliable mode, thereby make the generation that can prevent the unevenness of color, brightness etc. in the lenticule substrate 1 that finally obtains.
In addition, use with branch's light filter of above-mentioned zone is guaranteed when being used for implementing the position alignment process generation misalignment of each laser radiation processing, can make the misalignment that produces in the arrangement of the arrangement of the concave part 61 in member 6 and the lenticule in lenticule substrate 1 21 more not remarkable, thereby prevent any negative effect more reliably projected image quality with concave part.
In addition, even when the change in size of a plurality of transmittance parts 911 becomes big, also can make the change in size of lenticule 21 of the change in size of concave part 61 of member 6 and lenticule substrate 1 more not remarkable, thereby prevent any negative effect more reliably projected image quality with concave part.
Then, with previous embodiments in identical mode carry out laser radiation several times and handle.Thereby, in handling, one or many laser radiation subsequently sees through the laser beam (second laser beam) of the second laser-transmitting part 911B by use, in the part of mask formation film 81, form opening 82 (with the second transmittance part corresponding opening 82B), the part that described mask forms film 81 is arranged in have a plurality of openings 82 zone of (with the first transmittance part corresponding opening 82A), but laser radiation does not wherein in front also form opening 82 (opening 82A) in handling, and described opening 82 (opening 82A) forms (seeing Figure 11 to 13) by the laser beam (first laser beam) that sees through the first transmittance part 911A.
In addition, when second laser radiation is handled or in each laser radiation is thereafter handled, form opening 82A by the laser beam (first laser beam) that sees through the first transmittance part 911A in the irradiation area E except that opening 82B, described opening 82B is formed by the laser beam (second laser beam) that sees through the second transmittance part 911B in one or many laser radiation is in front handled.Can obtain mask 8 by this way.
Use the mask that obtains thus, settle the periphery (that is, along four sides of effective coverage settle opening 82B) of opening 82B to surround the effective coverage.Therefore, can on the broader area of base plate 7, carry out in etch step the concave part 61 that forms continuously " dimensional measurement; even the variation of etch amount may take place thus, also can more suitably determine the terminal point of etching in the various piece in etching device (for example etching bath).
In addition, even the formation of a plurality of opening 82B is guaranteed when in the various piece in etching device (for example etching bath) variation of etch amount taking place in mask 8, also can change orientation and the arrangement of base plate 7 in etching device, reduce thus in the etch step process each concave part 61 " progress of etching changes.This makes the generation that the size and dimension of concave part 61 ' (being used to form lenticular concave part) of the member 6 can prevent to have concave part effectively changes.
The 3rd embodiment
Then, will the member with concave part and this method with member of concave part of manufacturing according to the 3rd embodiment be described.
Figure 14 is the vertical view that schematically shows according to the member with concave part of the 3rd embodiment of the present invention.Figure 15 is illustrated schematically in the method for member that manufacturing according to the 3rd embodiment has concave part, forms the vertical view of branch's light filter of use in the step (laser radiation processings) at opening.
Figure 16 illustrates when carrying out laser radiation at every turn handling in the manufacturing according to the 3rd embodiment has the method for member of concave part, forms the vertical view of the arrangement of the opening that forms in the film at mask.Figure 17 and 18 illustrates by repeating laser radiation to handle, and forms the vertical view that forms the different situations of opening in the film in batches continuously at mask.
With describe according to the member with concave part of three embodiment and make this have the method for the member of concave part from now on.Omitting under the situation of identical point from describe, following description will concentrate on the point different with previous embodiments.
As shown in figure 14, the member with concave part 6 of this embodiment has on the extended line of in a row a plurality of concave parts 61 ' (being used to form lenticular concave part) of (or becoming row) in pairs a plurality of concave parts 61 that (being used to form between not inserting lenticular concave part 61 ') arranges " (detect and use concave part).
This guarantees to form easier position alignment in the step at opening, thereby prevents misalignment form or other generation of defects of concave part 61 ' reliably.In addition, this makes and can carry out concave part 61 more easily in etch step " dimensional measurement or other operation, concave part 61 ' can be formed the size and dimension that needs in more reliable mode thus.
The member with concave part 6 of this embodiment is substantially the same with the member with concave part 6 of previous embodiments aspect the shape of concave part 61 ' (being used to form lenticular concave part) and arrangement.In addition, the member with concave part 6 of this embodiment has the shape of cross section identical with the member with concave part that shows 6 in Fig. 1.
Then, the method that will have the member of concave part to the manufacturing according to this embodiment provides description.
In the embodiment, the manufacture method of this embodiment is included in each step illustrated in fig. 3 and uses the laser machining device 9 that shows in Fig. 4 to form at mask and forms opening 82 in the film 81 as described above.Be different from previous embodiments aspect the arrangement of the transmittance part 911 that this embodiment is settled in branch's light filter 91.
Promptly, as shown in Figure 15, but branch's light filter 91 of this embodiment comprises by a plurality of first transmittance part 911A of light transmission department grouping 912 and surrounds a plurality of zones with empty part, the transmittance part that can not form from the viewpoint of regular arrangement in described empty part, described zone are positioned in a row on the line of a plurality of first transmittance part 911A of (or becoming to be listed as).
This makes and forms in the step at opening, when in one or many laser radiation is subsequently handled, passing through to use the laser beam (second laser beam) that sees through the second transmittance part 911B in the part of mask formation film 81, to form opening 82B, can more suitably carry out position alignment, but described mask forms the part of film 81 and is arranged in the laser radiation that is surrounded wherein in front by a plurality of opening 82A and handles the zone that does not also form opening, and described opening 82A is formed by the laser beam (first laser beam) that sees through the first transmittance part 911A.Thereby can prevent the generation of the misalignment form of concave part 61 ' more reliably.
In addition, even in the light of branch's light filter 91 irradiation can each zone at branch's light filter 91 (in each of irradiation area E is regional) demonstrate under the supposed situation of the bigger variation of exposure intensity, form film 81 in general from mask, can think that also this variation is footy.This means the variation that to control the size and dimension of opening 82 in more reliable mode, thereby make the generation that can prevent the unevenness of color, brightness etc. in the lenticule substrate 1 that finally obtains.
In addition, even the use of aforesaid branch light filter 91 is guaranteed when being used for implementing the position alignment process generation misalignment of each laser radiation processing, also can make the misalignment that produces in the arrangement of the arrangement of the concave part 61 in member 6 and the lenticule in lenticule substrate 1 21 more not remarkable, thereby prevent any negative effect more reliably projected image quality with concave part.
In addition, even when the change in size of a plurality of transmittance parts 911 becomes big, the variation that the size of the lenticule 21 of the size of concave part 61 of the member 6 with concave part and lenticule substrate 1 is produced is more not remarkable, thereby prevents any negative effect to projected image quality more reliably.
Then, with previous embodiments in identical mode carry out laser radiation several times and handle.Thereby, in handling, one or many laser radiation subsequently sees through the laser beam (second laser beam) of the second laser-transmitting part 911B by use, in the part of mask formation film 81, form opening 82 (with the second transmittance part corresponding opening 82B), the part that described mask forms film 81 is arranged in the zone with a plurality of openings 82 (with the first transmittance part corresponding opening 82A) that formed by the laser beam (first laser beam) that sees through the first transmittance part 911A, but laser radiation does not wherein in front also form opening 82 (opening 82A) (seeing Figure 16 to 18) in handling.
In addition, when second laser radiation is handled or in each laser radiation is thereafter handled, form opening 82A by the laser beam (first laser beam) that sees through the first transmittance part 911A in the irradiation area E except that opening 82B, described opening 82B is formed by the laser beam (second laser beam) that sees through the second transmittance part 911B in the laser radiation of one or many front is handled.Can obtain mask 8 by this way.
Make the method for lenticule substrate and the lenticule substrate of manufacturing
Then, will provide description to the structure that uses above-mentioned member with concave part 6 to make the method for lenticule substrates 1 and the lenticule substrate 1 by this method manufacturing.
Figure 19 and 20 is vertical cross-section diagrams of an example of the major electrical components method of making lenticule substrate (lens-substrate).In the following description, the downside in Figure 19 and 20 will be called " light incident side " or " light incident side " and upside will be called " light exit side " or " exiting side ".
Step B1
At first, with flowable composition 23 (for example, the softening resin material and the resin material of non-polymeric or non-curing) be coated on the surface of the member with concave part 6 that forms concave part 61 on it, this step can be described as " composition coating step " (seeing Figure 19 A).
Step B2
Then, sheet material 24 (basilar memebrane) is placed on the composition 23 that is coated on the member 6 with concave part, and use dull and stereotyped 11 (pressing members) composition 23 to be pressed onto on the member 6 with concave part by sheet material 24, this step can be described as " pushing step " (seeing Figure 19 B).
Can under the situation of settling spacer between member 6 that for example has concave part and the sheet material 24, use dull and stereotyped 11 pressing operation.This feasible thickness that can control the base substrate 2 that obtains more reliably.Using under the situation of spacer, preferably when composition 23 solidifies, having between the member 6 of concave part and the sheet material 24 and settled spacer.Yet, be not subjected to any special restriction the opportunity that spacer is placed on the appropriate location.
For example, can use the composition that wherein tentatively disperses spacer as composition 23, described composition 23 is applied on the surface of the member with concave part 6 that forms concave part 61 on it.Alternatively, can be under the situation of having settled spacer on the member 6 with concave part application composition 23.Select as another kind, can after application composition 23, spacer be settled in position.
Under the situation of using spacer, preferred spacer is made by the composition 23 substantially the same refractive index materials that have and solidify.More specifically, preferably be equal to or less than 0.20, more preferably be equal to or less than 0.10 and more preferably be equal to or less than 0.02 at the absolute value of the difference of the absolute index of refraction of the absolute index of refraction of the material of forming spacer and the composition 23 that solidifies.Most preferably spacer is by making with composition 23 identical materials of solidifying.
Although be not particularly limited at the spacer vpg connection, spacer preferably has the shape of the sphere of being generally or is generally cylindrical shape.Have at spacer under the situation of this shape, its diameter is preferably 10-300 μ m, more preferably 30-200 μ m and more preferably 30-170 μ m.
Step B3
Then, composition 23 is through supersolidification (this term is intended to cover and solidifies and polymerization), thereby obtain having lenticule 21 base substrate 2 of (particularly satisfying the lenticule 21 of conditions such as above-mentioned shape, arrangement), this step can be described as " coagulation step " (seeing Figure 19 C).
Relying on curing or polymerization to carry out under the situation of solidifying of composition 23, the example that can be used for the method for this purpose comprises the irradiation of light such as ultraviolet ray etc., the irradiation of electron beam and heating.
Step B4
Then, take off member 6 and the flat board 11 with concave part from the base substrate 2 that obtains thus, this step can be described as " take off pressing member and have the step of the member of concave part " (seeing Figure 19 D).
The member with concave part 6 and dull and stereotyped 11 that takes off can be recycled and reused for the manufacturing of lenticule substrate 1 in this step.This help to increase manufacturing lenticule substrate 1 quality of stability and the advantage of production cost aspect is provided.
Step B5
Subsequently, on the light exit side surface of the base substrate of in this way making 2, form black matrix 3 (light shield layer).
In this embodiment, form light shield layer as follows: apply the step of the material that is used to form light shield layer on base substrate 2, this step can be described as " light shield layer coated materials step "; With light shine on the material that is used to form light shield layer to form the step in hole, this step can be described as " hole formation step ".
Although as long as they allow the hole to form, the material that is used to form light shield layer can be the material of any kind of, the preferred use comprises the material with photosensitive component.This makes and pore volume easily and reliably can be formed the shape that needs.Following description will mainly concentrate on uses positive photopolymer 32 as the situation that is used to form the material of light shield layer.
As illustrating among Figure 20 E, the positive photopolymer 32 (being used to form the material of light shield layer) that at first will have light-proofness is coated on the light exit side surface of base substrate 2, and this step can be described as " light shield layer coated materials step ".The example that is used for photopolymer 32 is coated to the lip-deep method of base substrate 2 comprises various coating techniques such as dip-coating, the scraper coating, and spin coating is brushed, spraying, electrostatic applications, electrophoresis coating and roller coat.
Step B6
Then, irradiates light (exposure) Lb on base substrate 2.When it falls on the lenticule 21, make light (exposure) the Lb refraction and the gathering of irradiation thus by lenticule 21.Make the part exposure of being assembled the light-struck photopolymer 32 that increases its luminosity (luminous flux) by light, the remainder of photopolymer 32 does not expose or the exposure exposure to reduce simultaneously.Thereby only make photopolymer 32 exposures in light-struck part with luminosity of increase (luminous flux).
Light (exposure) Lb of irradiation is preferably directional light on base substrate 2, but is not limited to it especially.This makes can control the size that conduct forms the hole 31 of target more reliably.As a result, can improve the viewing angle characteristic and the light service efficiency of lenticule substrate 1 greatly, increase the contrast of projected image simultaneously in more reliable mode.
Developing later on above-mentioned or other method irradiates light Lb.In this, photopolymer 32 is an eurymeric, thus dissolving and remove the part of being assembled light-struck photopolymer 32 in developing process.Subsequently, as illustrating among Figure 20 F, formation has the black matrix 3 in hole 31.For example can use aqueous slkali such as KOH aqueous solution etc. to develop, but developing method change with the composition or the other factors of photopolymer 32.
If as in this embodiment, light (exposure) the formation black matrix (light shield layer with hole) of assembling by lenticule by irradiation on photopolymer then can be by than simpler method obtains black matrix under the situation of photoetching technique for example using.After finishing development, can heat-treat where necessary as after cure etc.
Although the description of front relates in step B5 and B6,, can use other material to replace described photopolymer by using the situation of positive photopolymer as the material formation light shield layer (black matrix 3) that is used to form light shield layer.
For example, can use discharged-area development material such as photosensitive silve halide material as the material that is used to form light shield layer.Under the situation of using photosensitive silve halide material (discharged-area development material), only at first carry out later on the processing of exposed portion desalination is developed by burn-out subsequently finishing above-mentioned exposure.By making in this way, the part of initial exposure can form non-masked segment and reserve part with optical transparency can form shading light part (lightproof area).
In addition, can under the situation of usability luminescent material not, form light shield layer.For example, will be applied on the base substrate, make then and use up (energy line) irradiation by the layer that the material that is used to form light shield layer except that photosensitive material is formed.Use scioptics partly to assemble the light that increases energy density, the different piece excision of the layer that will form by the material that is used to form light shield layer or evaporate, thus manufacturing has the light shield layer in hole.
The method that forms light shield layer is not limited to the foregoing description.As alternative embodiment, can make light shield layer by the following method: positive photopolymer bonding agent is coated on the base substrate with hole, make this photopolymer bonding agent through photo-irradiation treatment to form exposed portion, reduce the adhesiveness of described exposed portion and light screening material be coated on the zone except that described exposed portion.
In addition, can repeat of the coating of above-mentioned series of processes, the irradiation of light (exposure) etc. as the material that is used to form light shield layer.This makes can increase the thickness of light shield layer (black matrix), and this helps further to improve the contrast of projected image.
Although the description of front relates to the situation on the surface (light exit side surface) that the material (photopolymer) that will be used to form light shield layer directly is coated to base substrate 2, can the material that is used to form light shield layer directly be coated on the surface of base substrate 2.For example, will be coated on the surface (light exit side surface) of base substrate 2, and carry out a series of processing as developing etc. at the photosensitive material that exposure the time will not have a sufficiently high light-proofness.Afterwards, can carry out the processing that aforementioned use forms the material of light shield layer.This makes light shield layer (black matrix) can form thicklyer.
Step B7
Then, as illustrating among Figure 20 G, settle thereon on the surface of base substrate 2 of black matrix 3 and form diffusion part 4, this step can be described as " diffusion partly forms step ".
Can form diffusion part 4 by for example following method: will be pre-formed diffusing panel for the plate shape and be adhered on the black matrix 3 or and partly form coated materials on black matrix 3, and make described diffusion partly form material solidification then with the flowable diffusion that comprises diffuse material.
Apply the example that diffusion partly forms the method for material and comprise various coating techniques such as scraper coating, spin coating, brushing, spraying, electrostatic applications, electrophoresis coating and roller coat, and adopt and base substrate 2 is immersed in diffusion partly forms dipping technique in the material.
Step B8
Subsequently, coloring liquid is coated on the surface of the base substrate 2 of settling lenticule 21 on it, thereby forms dyed layer 22 and finally obtain lenticule substrate 1, this step can be described as " dyed layer formation step " (seeing Figure 20 H).
In this embodiment, coloring liquid comprises colorant and benzylalcohol, but its coloring liquid that can be the routine of any kind of can get.The use of this coloring liquid makes can be easily and carry out shading operations to base substrate reliably.Particularly, even to also can be easily and carry out shading operations reliably by be difficult to base substrate that painted material such as acrylic resin etc. make with conventional method.Its reason is as follows by inference.
Particularly, if use the coloring liquid comprise benzylalcohol, the benzylalcohol that then in coloring liquid, exists infiltration and diffuse through base substrate 2.This base substrate 2 combination (intermolecular combination) that weakened by the molecule of its material of making, thus stay the space that is used to place colorant.Benzylalcohol and colorant be double replacement mutually, thus colorant remained in the space (can be called the position of colorant, promptly color bits), thus base substrate 2 is painted.
In addition, make can be easily and form the dyed layer with homogeneous thickness reliably in the use of above-mentioned coloring liquid.Particularly, be used in promptly that painted base substrate (workpiece) disposes fine structure such as lenticule (having closely spaced uneven) in its surface on two-dimensional directional even and will painted zone have the area of increase, also can form dyed layer with homogeneous thickness (not having the inhomogeneous of color).
The example that applies the method for coloring liquid comprises various coating techniques such as scraper coating, spin coating, brushing, spraying, electrostatic applications, electrophoresis coating, printing and roller coat, and with the dipping technique in the base substrate 2 immersion coloring liquids.In these technology, the preferred dipping (particularly dip dyeing) that uses.The use of these technology makes can be easily and form dyed layer 22 (particularly having homogeneous thickness) reliably.
Particularly, applying under the situation of coloring liquid,, also can carry out painted even will make by be difficult to painted material such as acrylic resin etc. with conventional method with the base substrate 2 that coloring liquid applies by dip dyeing.Its reason is that spendable dyestuff has high-affinity with the ester group (ester bond) of acrylic resin etc. in dip dyeing by inference.
Preferably at least one of coloring liquid and base substrate 2 remained on the step that applies coloring liquid under 30-100 ℃ the situation of temperature.This makes and can form dyed layer 22 effectively in the time of the negative effect (for example, the degraded of the composition material of base substrate 2 etc.) that prevents really the base substrate 2 that will form dyed layer 22 on it.
In addition, preferably apply the step of coloring liquid in (under the situation of pressurization) under the atmosphere pressures that for example increases.This helps lend some impetus to coloring liquid and is penetrated in the base substrate 2, and the result can form dyed layer 22 at short notice effectively.
In addition, if desired,, then can repeat to apply several times the step of coloring liquid if the dyed layer 22 that for example will form is thicker.
After applying coloring liquid, can heat-treat where necessary as heating and cooling, photo-irradiation treatment, atmosphere pressures increase or the processing etc. that descends.This helps fixing (the stablizing) of dyed layer 22.
Below will be described in greater detail in the coloring liquid that uses in this step.
The content of benzylalcohol is preferably 0.01-10.0 weight % in coloring liquid, more preferably 0.05-8.0 weight % and more preferably 0.1-5.0 weight %, but be not limited to them especially.If the content of benzylalcohol falls into above-mentioned scope, then can in the time of the negative effect (for example, the degraded of the composition material of base substrate 2 etc.) that more effectively prevents the base substrate 2 that will form dyed layer 22 on it, form dyed layer 22 easily and reliably with good quality.
The colorant that comprises in coloring liquid can be any of various dyestuffs and various pigment, but is preferably dyestuff, the more preferably disperse dyes and the dye of positive ion at least a and more preferably disperse dyes.This makes and can form dyed layer 22 effectively in the time of the negative effect (for example, the degraded of the composition material of base substrate 2 etc.) that prevents really the base substrate 2 that will form dyed layer 22 on it.
Particularly, even will make by be difficult to painted material such as acrylic resin etc. with conventional method with the base substrate 2 that dyed layer 22 applies, also can be easily and carry out shading operations reliably.Its reason is that colorant makes the dyeing position of the ester group (ester bond) of acrylic resin etc. as it by inference, thereby makes shading operations be easy to carry out.
In addition, the coloring liquid of Shi Yonging comprises colorant and benzylalcohol at least in this embodiment, but preferred described coloring liquid also comprises surfactant.Even this makes also can stablize under the condition have benzylalcohol therein and colorant is disperseed.Even will make by material that is difficult to dye with conventional method such as acrylic resin etc. with the base substrate 2 that coloring liquid applies, also can be easily and carry out painted with guaranteeing.
For surfactant, can mention for example non-ionic surfactant, anionic surfactant, cationic surfactant, amphoteric surfactant etc.For non-ionic surfactant, can mention for example ether surfactant, ester group surfactant, ether-ether based surfactants, nitrogenous based surfactants etc.More specifically, can mention polyvinyl alcohol (PVA), carboxymethyl cellulose, polyglycol, acrylate, methacrylate etc.
In addition, for anionic surfactant, can mention for example various rosin, various carboxylate, various ester sulfate, various sulfonate, various ester phosphate etc.More specifically, can mention rosin, newtrex, disproportionated rosin, maleic rosin, rich horse rosin, the maleic rosin five-ester, Lewisol 28, three stearate (for example slaine such as aluminium salt), distearate (slaine for example, as aluminium salt, barium salt), stearate (slaine for example, as calcium salt, lead salt, the zinc lead salt), linolenate (slaine for example, as cobalt salt, manganese salt, lead salt, zinc salt), caprylate (slaine for example, as aluminium salt, calcium salt, cobalt salt), oleate (slaine for example, as calcium salt, cobalt salt), palmitate (slaine, as zinc salt), naphthenate (slaine for example, as calcium salt, cobalt salt, manganese salt, lead salt, zinc salt), resinate (slaine for example, as calcium salt, cobalt salt, manganese salt, zinc salt), polyacrylate (slaine for example, as sodium salt), poly-methyl acrylate (slaine for example, as sodium salt), poly salt (slaine for example, as sodium salt), acrylates-maleate copolymer (slaine for example, as sodium salt), cellulose, dodecyl benzene sulfonate (slaine for example, as sodium salt), alkyl sulfonate, poly styrene sulfonate (slaine for example, as sodium salt), alkyl diphenyl base ether disulfonate (for example slaine, as sodium salt) etc.
In addition, for cationic surfactant, can mention that for example various ammonium salts are as uncle's ammonium salt, secondary ammonium salt, tertiary amine salt, quaternary ammonium salt.More specifically, can mention monoalkyl amine salt, dialkyl group amine salt, trialkyl amine salt, tetraalkyl amine salt, zephiran salt, Fixanol, imidazole salts etc.In addition, for amphoteric surfactant, can mention for example various betaines such as carboxybetaine, sulfobetaines, various amino carboxylic acid, various ester phosphate etc.
In addition, for example, in coloring liquid, can comprise at least a compound that is selected from benzophenone based compound and benzotriazole based compound.This makes can realize above-mentioned effect more significantly.More specifically, this make can be easily and carry out the painted of base substrate 2 with guaranteeing.
Particularly, according to described painted processing, can be to carrying out painted processing easily and by be difficult to the base substrate 2 that painted material such as acrylic based resin form with conventional method with guaranteeing.In addition, even the treatment temperature in this step is lower, also suitably and effectively form dyed layer 22 at short notice.
It is believed that this is because use together by at least a compound and the benzylalcohol that will be selected from benzophenone based compound and benzotriazole based compound, described at least a compound that is selected from benzophenone based compound and benzotriazole based compound and benzylalcohol interact in the mode of complementation, as a result, can realize (performance) they the time use the remarkable result (cooperative effect) cause.
More specifically, it is believed that this is owing to following reason (mechanism) takes place.In order to describe this mechanism in detail, the benzylalcohol in coloring liquid at first makes molecule in the resin of base substrate 2 in conjunction with loose, guarantees the space of other molecule infiltration thus.
Secondly, the described at least a compound that is selected from benzophenone based compound and benzotriazole based compound permeates these spaces and diffusion therein dearly.Each of benzophenone based compound and benzotriazole based compound has the molecule that makes in the resin of base substrate 2 in conjunction with loose and guarantee the effect in the space of other molecule and benzylalcohol infiltration.Owing to this reason, by utilizing the space of being guaranteed by benzylalcohol, each of benzophenone based compound and benzotriazole based compound plays a part described spatial spread is got darker and wideer.In this, colorant does not have this function.
The 3rd, when producing second kind of effect, space that the colorant infiltration is guaranteed and maintenance therein, or the part of displacement benzophenone based compound and/or benzotriazole based compound.By this way, by described at least a compound and the benzylalcohol that is selected from benzophenone based compound and benzotriazole based compound is used together, can make colorant at short notice deeper, be diffused into effectively in the base substrate 2, thus can base substrate 2 is painted equably.
For the benzophenone based compound, can use the compound that shows with Formula I or have compound as the benzophenone skeleton that shows with other norm structure formula that meets Formula I, these dynamic isomer (abbreviating " compound " hereinafter as) with the benzophenone skeleton that shows with Formula I, or these derivant (for example, addition reaction product, substitution reaction product, reduction reaction product, oxidation reaction product etc.).
(Formula I)
For these compounds, can mention for example benzophenone, 2,4-dihydroxy benaophenonel, 2-hydroxyl-4-methoxy benzophenone, 2,2 '-dihydroxy-4,4 '-dimethoxy-benzophenone, 2,2 ', 4,4-tetrahydroxybenzophenone, 2-hydroxyl-4-octyl group benzophenone, 4-benzyloxy-2-dihydroxy benaophenonel, benzophenone-anil, diphenyl-ketoxime, benzophenone chloride (α, α '-dichloro-diphenyl methane) etc.Preferably have in these compounds as compound, and more preferably described compound is 22 '-dihydroxy-4,4 '-dimethoxy-benzophenone and 2,2 ', 4, any of 4-tetrahydroxybenzophenone with the benzophenone skeleton shown in the Formula I.By using this benzophenone based compound, above-mentioned effect shows significantly.In this, shown 2 respectively, 2 '-dihydroxy-4,4 '-dimethoxy-benzophenone and 2,2 ', 4, the structural formula of 4-tetrahydroxybenzophenone (chemical formula) with Formulae II, III.
(Formulae II)
(Formulae II I)
In addition, for the benzotriazole based compound, can use the compound that shows with Formula I V or have compound as the benzotriazole skeleton that shows with other norm structure formula that meets Formula I V, these dynamic isomer (abbreviating " compound " hereinafter as) with the benzotriazole skeleton that shows with Formula I V, or these derivant (for example, addition reaction product, substitution reaction product, reduction reaction product, oxidation reaction product etc.).
(Formula I V)
For these compounds, can mention for example benzotriazole, 2-(2-hydroxy-5-methyl base phenyl)-2H-benzotriazole, 2-(2-hydroxyl-4-octyloxyphenyl)-2H-benzotriazole etc.In these compounds, preferably have compound, and more preferably described compound is any of 2-(2-dihydroxy-5-aminomethyl phenyl)-2H-benzotriazole and 2-(2-hydroxyl-4-octyloxyphenyl)-2H-benzotriazole as the benzotriazole skeleton that shows with Formula I V.By using this benzotriazole based compound, above-mentioned effect shows significantly.In this, the structural formula (chemical formula) that has shown 2-(2-dihydroxy-5-aminomethyl phenyl)-2H-benzotriazole and 2-(2-hydroxyl-4-octyloxyphenyl)-2H-benzotriazole with chemical formula V, VI respectively.
(chemical formula V)
(chemical formula VI)
As mentioned above, described coloring liquid comprises at least a compound that is selected from benzophenone based compound and benzotriazole based compound, but can comprise two or more compound (particularly one or more benzophenone based compounds and one or more benzotriazole based compounds) that is selected from benzophenone based compound and benzotriazole based compound.
In the case, these compounds are interact with each other and interact with the mode of complementation and benzylalcohol in the mode of complementation.Thereby above-mentioned effect further shows significantly.In addition, base substrate 2 can be immersed in the preprocessing solution, described preprocessing solution comprises at least a compound and the benzylalcohol that is selected from benzophenone based compound and benzotriazole based compound, then it is immersed in the coloring liquid.Reach advantageous effects as mentioned below in the case equally.
In coloring liquid or pre-service are molten, comprise under the situation of benzophenone based compound and/or benzotriazole based compound, the total content of benzophenone based compound and benzotriazole based compound in coloring liquid or pre-service are molten is not particularly limited.
Preferably in coloring liquid or pre-service are molten the total content of benzophenone based compound and benzotriazole based compound in the scope of 0.001-10.0 weight %.More preferably it in the scope of 0.005-5.0 weight % and more preferably it in the scope of 0.01-3.0 weight %.
Under the total content with benzophenone based compound and benzotriazole based compound is limited in situation in the above-mentioned scope, can when more effectively preventing to produce deleterious effect to the base substrate 2 that will form dyed layer 22 on it (as the degraded of the composition material of base substrate 2), form suitable easy coloring layer 22 easily and with guaranteeing.
In addition, the content of benzylalcohol is defined as X (weight %) in coloring liquid or preprocessing solution, and the percent of total content of benzophenone based compound and benzotriazole based compound is defined as Y (weight %) in coloring liquid or preprocessing solution, and preferred X and Y satisfy relation: 0.001≤X/Y≤10000.More preferably X and Y satisfy relation: 0.05≤X/Y≤1000 and more preferably X and Y satisfy relation: 0.25≤X/Y≤500.
Satisfy under the situation of aforesaid relation at X and Y, obtain performance more significantly by the cooperative effect that benzophenone based compound and/or benzotriazole based compound are used with benzylalcohol.In addition, can be when more effectively preventing to produce deleterious effect to the base substrate 2 that will form dyed layer 22 on it (as the degraded of the composition material of base substrate 2), easily and form suitable easy coloring layer 22 with two-forty with guaranteeing.
The lenticule substrate (lens-substrate) 1 that obtains as mentioned above has at a plurality of lenticules 21 corresponding with the concave part 61 ' of the member 6 with concave part aspect shape, size and the Pareto diagram.
Below will describe the structure of lenticule substrate 1 in detail.
Lenticule substrate (lens-substrate) 1 comprises the base substrate 2 with a plurality of lenticules 21 (lens component) of arranging with predetermined pattern, black matrix (light shield layer) 3 and have inhomogeneous reflection and the fall diffusion part 4 of function of light thereon of diffusion.In addition, settle dyed layer (outer light absorption part) 22 at the light incident side (being the light incident side of lenticule 21) of lenticule substrate 1.
Usually, base substrate 2 is made up of the transmittance resin material.For the composition material of base substrate 2, can mention various glass materials, various resin materials etc.Consider the throughput rate of base substrate 2, the adhesiveness between base substrate 2 and the black matrix 3 etc., the composition material of preferred base substrate 2 is a resin material.
The example of forming the resin material of base substrate 2 comprises polyolefin such as tygon, polypropylene, ethylene-propylene copolymer, vinyl-vinyl acetate copolymer (EVA) etc., cyclic polyolefin, the sex change polyolefin, Polyvinylchloride, poly-inclined to one side 1, the 1-difluoroethylene, polystyrene, polyamide is (as nylon 6, nylon 46, nylon 66, NYLON610, nylon 612, nylon 11, nylon 12, nylon 6-12, nylon 6-66), polyimide, polyamide-imides, polycarbonate (PC), poly--(4-methylpentene-1), ionomer, acrylic resin, acrylonitrile-butadiene-styrene copolymer (ABS resin), acrylonitritrile-styrene resin (AS resin), butadiene-styrene copolymer, polyoxymethylene, polyvinyl alcohol (PVA) (PVA), ethylene-vinyl alcohol copolymer (EVOH), polyester such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT) and poly terephthalic acid cyclohexane ester (PCT), polyethers, polyetherketone (PEK), polyetheretherketone (PEEK), polyetherimide, polyacetal (POM), polyphenylene oxide, sex change polyphenylene oxide, polysulfones, polyethersulfone, polyphenylene sulfide, polyarylate, liquid crystal polymer such as aromatic polyester, fluororesin such as teflon (PTEE), poly-inclined to one side vinylidene fluoride etc., various thermoplastic elastomers such as styrene-based elastomer, polyolefin-based elastomer, the Polyvinylchloride based elastomeric, polyurethane-base elastic body, polyester-based elastic body, the polyamide-based elastic body, the polybutadiene based elastomeric, using trans-polyisoprene based elastomeric, fluorohydrocarbon rubber-based elastic body, haloflex based elastomeric etc., epoxy resin, phenolics, urea resin, melamine resin, unsaturated polyester (UP), organic silicone, carbamate groups resin etc.; And at least a multipolymer as principal ingredient that contains these materials, mixture and polymer alloy etc.
In addition, in the present invention, can use two or more these mixtures of material (for example, use the hybrid resin, polymer alloy of two or more above-mentioned material, by the two-layer or two-layer above layered product of forming).
The material (solidification material) of composition base substrate 2 can have the absolute index of refraction greater than all gases (wherein using the atmosphere gas of lenticule substrate 1) under normal conditions.Particularly, described absolute index of refraction is preferably 1.35-1.9 and 1.40-1.75 more preferably.Fall into above-mentioned scope if form the absolute index of refraction of the material of base substrate 2, then can improve viewing angle characteristic greatly, keep light (incident light) service efficiency significantly high simultaneously.
Lenticule substrate 1 disposes a plurality of lenticules (lens component) 21 with the form of convex lens, and its nonreentrant surface is positioned at the light incident side of lenticule substrate 1.
Use described lenticule substrate (lens-substrate) 1, when in vertical view, observing described lenticule substrate 1, lenticule (lens component) 21 has flat shape (be generally oval shape or be generally the round shape in right angle), and wherein vertical (vertically) width is less than horizontal (level) width.
When supposing to observe lenticule 21 in vertical view, the minor axis of each lenticule 21 is L to (vertically) length
1The major axis of (μ m) and each lenticule 21 is L to (laterally) length
2(μ m), the preferred satisfied 0.10≤L that concerns
1/ L
2≤ 0.99, the more preferably satisfied 0.50≤L that concerns
1/ L
2≤ 0.95, and the more preferably satisfied 0.60≤L that concerns
1/ L
2≤ 0.80.Satisfying of these relations further improves the advantageous effects of confirming above.
When observing lenticule 21 in vertical view, the minor axis of each lenticule 21 is preferably 10-500 μ m to length (vertical width of each lenticule 21), 30-300 μ m more preferably, and 50-100 μ m more preferably.If the minor axis of each lenticule 21 falls into above-mentioned scope to length, then can reach sufficiently high resolution in the image on projecting to screen, prevent the generation of defective such as ripple etc. simultaneously effectively.Can also further increase the throughput rate of lenticule substrate 1 (rear projection screen 10).
In addition, when observing lenticule 21 in vertical view, the major axis of each lenticule 21 is preferably 15-750 μ m to length (transverse width of each lenticule 21), more preferably 45-450 μ m and more preferably 70-150 μ m.If the major axis of each lenticule 21 falls into above-mentioned scope to length, then can reach sufficiently high resolution in the image on projecting to screen, prevent the generation of defective such as ripple etc. simultaneously effectively.Can also further increase the throughput rate of lenticule substrate 1 (rear projection screen 10).
In addition, the radius-of-curvature of each lenticule 21 is preferably 7.5-375 μ m, 22.5-225 μ m more preferably, and 35-75 μ m more preferably.If the radius-of-curvature of each lenticule 21 falls into above-mentioned scope, then can improve viewing angle characteristic greatly.Particularly, viewing angle characteristic all becomes excellent in the horizontal direction with on the vertical direction.Each lenticule 21 each other can be different to the radius-of-curvature that makes progress with major axis at minor axis, and the radius-of-curvature that preferably makes progress at major axis falls into above-mentioned scope in the case.
In addition, the degree of depth of each lenticule 21 (highly) is preferably 7.5-375 μ m, 22.5-225 μ m more preferably, and 35-75 μ m more preferably.If the degree of depth of each lenticule 21 falls into above-mentioned scope, then can improve light service efficiency and viewing angle characteristic greatly.
Arrange a plurality of lenticules 21 with interlaced pattern (with canine tooth shape carreau).Arrange lenticule 21 by this way and can prevent the generation of defective such as ripple etc. effectively.
As mentioned above, in this embodiment, the canine tooth shape carreau form during with observation lenticule substrate 1 in vertical view is arranged lenticule substrate 21.Yet, preferably make first row of lenticule substrate 21 and second adjacent the coming of lenticule substrate 21 vertically go up staggered half pitch.This makes and can more effectively prevent ripple and other generation of defects.Can also improve viewing angle characteristic greatly.
In addition, when in vertical view when light incident side is observed lenticule substrate 1, the ratio that occupies that forms lenticule substrate 21 in the effective coverage of lenticule substrate 21 therein preferably is equal to or greater than 90%, more preferably is equal to or greater than 96%, and more preferably is equal to or greater than 97%.If the ratio that occupies of lenticule substrate 21 falls into above-mentioned scope, then can further improve the light service efficiency and make the brightness and contrast of projected image become good unusually.
By the strict shape that limits lenticule substrate 21, Pareto diagram etc. as mentioned above, can improve viewing angle characteristic greatly, prevent ripple and other generation of defects that can occur by the interference of light in addition simultaneously effectively.
Particularly, if the shape of strict difinition lenticule 21, Pareto diagram etc. as mentioned above, the advantageous effects synergy that provides of the advantageous effects that provides by the above-mentioned shape and the Pareto diagram of lenticule 21 and existence then by black matrix 3 and dyed layer 22, thus remarkable favourable effect aspect for example viewing angle characteristic and light service efficiency caused.
In addition, with each lenticule 21 to settle to the form of the outstanding convex lens of light incident side and design can be positioned near the light exit side near surface and each hole 31 in black matrix (light shield layer) 3 of base substrate 2 its focus f.
Promptly, in light La (coming from the directional light of Fresnel Lenses part 5) each lenticule 21 of falling on the usually vertical direction on the lenticule substrate 1, assemble, then near the formation focus f light exit side near surface of base substrate 2 and each hole 31 in black matrix (light shield layer) 3 at lenticule substrate 1.
By as above describe allowing near each lenticule 21 formation focus f light exit side near surface of base substrate 2 and each hole 31, can make the light service efficiency become good unusually in black matrix (light shield layer) 3.As a result, the image that is formed by the light that sees through lenticule substrate 1 has significantly high contrast.
In addition, as mentioned above, settle dyed layer 22 at the light incident side (that is the light incident side of lenticule substrate 21) of lenticule substrate 1.Dyed layer 22 have allow to fall light incident side light fully by it function and prevent that exterior light (for example, falling the exterior light of light exit side accidentally) is to the light exit side function of reflecting.
The feasible image that can obtain having high-contrast of the existence of this dyed layer 22.Particularly, being used in combination of dyed layer 22 and black matrix 3 acts synergistically these functions mutually, thereby sharply increases the contrast of the image that shows.
Particularly, in this embodiment, as mentioned above,, coloring liquid (coloring liquid that particularly has its composition characteristic) forms dyed layer (dye layer) 22 on the base substrate 2 by being coated to.If (by dyeing) forms dyed layer 22 by this way, then it is compared and demonstrates high degree of adhesion with preparing dyed layer respectively and it is laminated to situation on the base substrate.Therefore, the optical characteristics that can prevent the lenticule substrate more reliably is subjected near for example negative effect of the change of refractive surface-boundary.
In addition, because by coloring liquid being coated to the fact that forms dyed layer 22 on the base substrate 2, the variation in thickness of its various piece (particularly not meeting the variation in thickness of the surface configuration of base substrate 2) keeps for a short time.This makes inhomogeneous etc. the formation can prevent in projected image defective such as color more reliably.
Although dyed layer 22 is made by the material that comprises colorant, its key component is usually identical with those of base substrate 2 (lenticule substrate 21).This means that the border between the non-staining part of dyed layer 22 and reservation is not easy to take place the rapid variation of refractive index.Therefore, be easy to design the optical characteristics of lenticule substrate 1 generally, thereby guarantee that lenticule substrate 1 has the optical characteristics of stable and high reliability.
Have colorant with red, palm fibre or yellow basic blueness of mixing by use, form dyed layer 22, still be not limited to it especially to have the outward appearance of black (colour killing a kind of).Preferred dyed layer 22 is that the selectivity of the trichromatic balance of the control light that comes from light source absorbs or the type of the light of transmission specific wavelength.
This makes can prevent outside reflection of light, accurately shows the tone of the image that is formed by the light that sees through the lenticule substrate, widens chromaticity coordinate (fully widening the indication range of tone) and makes black darker.As a result, can make contrast good unusually.
In addition, on the light exit side surface of base substrate 2, settle black matrix (light shield layer) 3.Black matrix 3 is made and is formed membranaceous shape by light screening material.
The existence of this black matrix 3 is guaranteed to absorb exterior light (unfavorable exterior light in forming projected image) by black matrix 3, thereby makes and can increase the contrast that projects to the image on the screen.Particularly, dyed layer 22 and black matrix 3 is used in combination the image that makes lenticule substrate 1 can form the contrast with remarkable increase.
Aforesaid black matrix 3 disposes a plurality of holes 31 on the light path that the light from each lenticule 21 passes through.This guarantees that the light of assembling can pass through the hole 31 of black matrix 3 with the efficient that increases in each lenticule 21.As a result, can improve the light service efficiency of lenticule substrate 1.
The hole 31 of black matrix 3 can have Any shape, is generally circular shape when observing but preferably have in vertical view.In the case, the diameter in hole 31 is preferably 5-100 μ m, more preferably 15-90 μ m and more preferably 20-70 μ m, but be not particularly limited aspect their size.This image of guaranteeing to project on the screen has higher contrast.
In addition, the thickness (average thickness) of preferred black matrix 3 is 0.3-8 μ m, more preferably 0.8-7 μ m and more preferably 1.4-6 μ m.If the thickness of black matrix 3 falls into above-mentioned scope, can prevent more reliably that then black matrix 3 from being peeled off by accident or split, allow black matrix 3 to bring into play its functions peculiar (that is, increasing the function of picture contrast) effectively simultaneously.This makes can significantly increase the contrast that projects to the image on the rear projection screen 10 that for example has lenticule substrate 1.
In addition, when observing in vertical view, the area ratio (porosity) of hole 31 relative black matrix 3 is preferably 5-50%, more preferably 10-35% and more preferably 15-25%.If described porosity falls into above-mentioned scope, then can fully suppress exterior light (for example, falling the exterior light of an opposite side accidentally) and reflect to light exit side with light incident side.Can also significantly improve the light service efficiency and prevent the infiltration of exterior light, the contrast of the image that obtains thus becomes very high and improves the viewing angle characteristic of lenticule substrate 1 greatly.
On the contrary, if described porosity less than above-mentioned lower limit, then may be difficult to keep the light service efficiency and the viewing angle characteristic of excellence.On the other hand, if described porosity surpasses above-mentioned higher limit, then can not fully suppress outside reflection of light.This feasible sufficiently high contrast that is difficult to prevent the infiltration of exterior light and the image that maintenance obtains.
In addition, on the light exit side surface of lenticule substrate, settle diffusion part 4.Diffusion part 4 plays a part fall thereon light (incident light) of random reflection and diffusion.The existence of diffusion part 4 makes can improve viewing angle characteristic.
In addition, diffusion part 4 is placed in the zone of the light exit side that is positioned at black matrix 3.This structure allows will fall photoconduction on the diffusion part 4 to light exit side (side opposite with light incident side) with effective and efficient manner, thereby improves the viewing angle characteristic (increase the visual angle greatly, promptly project to the visuality of the image on the screen) of rear projection screen 10 greatly.
In this embodiment, diffusion part 4 is made by the material (for example, acrylic resin and polycarbonate resin) of the substantial transparent of wherein disperseing the good optical transparency of having of diffuse material.The example of described diffuse material comprises silicon dioxide, glass and the resin that all is in particulate form.The average particle size particle size of described diffuse material is preferably 1-50 μ m and 2-10 μ m more preferably, but is not limited to them especially.
The thickness of diffusion part 4 is preferably 0.05-5mm, more preferably 0.7-4mm and more preferably 1.0-3mm, but be not limited to them especially.If the thickness of diffusion part 4 falls into above-mentioned scope, then can improve viewing angle characteristic greatly, keep the light service efficiency enough high simultaneously.
On the contrary, if less than lower limit, then there is the possibility that can not give full play to advantageous effects by diffusion part 4 in the thickness of diffusion part 4.On the other hand, if the thickness of diffusion part 4 surpasses higher limit, then with the possibility of the light of diffuse material collision or frequency trends towards sharply increasing and optical quenching may take place.Also exist the light (photon) that falls into diffusion part 4 may rotate back into the possibility of the increase of light incident side.As a result, may be difficult to keep the light service efficiency enough high.
Lenticule substrate (lens-substrate) 1 has high light service efficiency.The light service efficiency of lenticule substrate 1 (leaving the ratio of amount of amount and the light of the light incident side that drops on lenticule substrate 1 of light of the light exit side of lenticule substrate 1) preferably is equal to or greater than 65%, more preferably is equal to or greater than 75% and more preferably be equal to or greater than 85%.
Rear projection screen
Then, will the rear projection screen 10 that dispose aforesaid lenticule substrate 1 be described.
Figure 21 is the diagrammatic vertical sectional view that illustrates according to a preferred embodiment of the rear projection screen 10 of the lenticule substrate (lens-substrate) 1 that shows among the Figure 20 of the being incorporated in H of the present invention.
With reference to Figure 21, transmission screen 10 comprises Fresnel Lenses part 5 and above-mentioned lenticule substrate 1.The light incident side that Fresnel Lenses part 5 is placed in light (image light) makes the light that sees through Fresnel Lenses part 5 can fall on the lenticule substrate 1.
Fresnel Lenses part 5 disposes the Fresnel Lenses 51 of the prism shape that is formed centrally together usually on its light exit side surface.Fresnel Lenses part 5 play a part will come from the image light of projecting lens (not having to show) be refracted as directional light La, described directional light La and parallel the advancing of direction perpendicular to the first type surface of lenticule substrate 1.
Use the as above rear projection screen 10 of configuration, use image light from the projection lens by 5 refractions of Fresnel Lenses part and become directional light La.Then, directional light La drop on its of lenticule substrate 1 on form the opposite side of a side of black matrix 3.By each lenticule 21 directional light La is assembled, after forming focus, disperse then.At this moment, the light of falling on the lenticule substrate 1 can be with sufficiently high transmitance by it.Move and cross the light in hole 31 by the plane picture of diffusion to provide the observer to see.
Rear projection
Then, will provide description to the rear projection that uses aforesaid rear projection screen.
Figure 22 is the figure of major electrical components according to the structure of rear projection of the present invention.
As illustrating among Figure 22, rear projection 300 comprises projecting optical unit 310, light guidance mirrors 320 and the transmission screen 10 that is placed in the shell 340, the opening 12 of all fronts.Rear projection 300 uses the rear projection screen 10 of above-mentioned rear projection screen 10 as it, thereby demonstrates superior display quality.
Although just the embodiment of explanation has been described the present invention in the above, the invention is not restricted to them.For example, one or more steps arbitrarily can be added to manufacturing according to the present invention where necessary has in the method for member of concave part.
Branch's light filter can have any form, if it comprise the light transmission department grouping that is grouped into and in presumptive area, settles by a plurality of first light transmission departments with the regional different zone (beyond presumptive area) of described light transmission department grouping in second light of arrangement throw part.In other words, branch's light filter branch's light filter of being not limited in previous embodiments, use and can have any form.
In previous embodiments, the member with concave part that finally obtains (member with concave part that uses in making lens-substrate) disposes the concave part that is used for testing goal.Alternatively, can removing wherein by excision or other method in the process of making lens-substrate, formation detects the zone of using concave part.Similarly, lens-substrate can not dispose the convex portions that forms in addition with concave part by detecting.
In previous embodiments, when making lens-substrate (base substrate), reuse member as mould and in case make the latter and just itself and base substrate are separated with concave part.Yet the member that can not will have concave part separates with base substrate 2.In other words, the member with concave part can constitute the part of lens-substrate.
In previous embodiments, when the contiguous irradiation area E (second irradiation area) of irradiation area E (first irradiation area) is arbitrarily carried out the laser radiation processing, form opening (opening 82B) in the part that is arranged in first irradiation area but does not wherein also form opening 82 (opening 82A).
As selection, can when being carried out the laser radiation processing, the irradiation area E (the 3rd irradiation area) that is not close to first irradiation area form opening (opening 82B) in the part that is arranged in first irradiation area but does not wherein also form opening 82 (opening 82A).This feasible misalignment form that can prevent opening 82 effectively.
In previous embodiments, use member as the mould when making lens-substrate (base substrate) with concave part.Alternatively, the member itself with concave part can be used as lens-substrate (base substrate).
In previous embodiments, the member with concave part is formed by tabular component (plate with concave part).Alternatively, the member with concave part can have for example shape of web-like.This feasible throughput rate that can improve lens-substrate greatly.
Can replace forming the individual components of member, lens-substrate (lenticule substrate), rear projection screen and rear projection with other any parts that can fulfil similar functions with concave part.In addition, can add any building block where necessary.
In previous embodiments, lens-substrate forms by having lenticular lenticule substrate.Alternatively, lens-substrate can be a biconvex lens.
In addition, one or more arbitrary steps can be added in the method for described manufacturing lens-substrate (lenticule substrate).In the method for described manufacturing lens-substrate, carry out the order that the order of each step is not limited to describe hereinbefore, if desired, then it can be changed.
In previous embodiments, composition is coated on the surface of member with concave part.Alternatively, for example composition can be coated on the surface of dull and stereotyped (or place on the flat board basilar memebrane), can it be pushed with described member then, thereby make lens-substrate with concave part.
In previous embodiments, when forming black matrix (light shield layer), under the situation of taking off member, make rayed (exposure) base substrate with concave part.Alternatively, can under being attached to situation on the base substrate, the member with concave part form black matrix.In other words, light is shone on the material that is used to form light shield layer by the member with concave part.
In previous embodiments, lenticule substrate (lens-substrate) disposes the diffusion part of stratiform.Yet the shape of diffusion part is not limited to it.For example, can in the part corresponding, settle the diffusion part with convex shape with the hole of black matrix.Reach advantageous effects as noted before in the case equally.
In addition, the formation of this diffusion part makes and can more effectively prevent the reflection of exterior light in the part of the black matrix except that the hole, thereby increases the contrast of the image that obtains significantly.In addition, the lenticule substrate can not dispose aforementioned diffusion part.In addition, lens-substrate of the present invention can not have light shield layer.
In previous embodiments, base substrate has the dyed layer (dye layer) through dyeing.Base substrate can not dispose this dyed layer.
In previous embodiments, lenticule has the flat pattern when observing in vertical view, and arranges with canine tooth shape carreau form.Yet the shape and the arrangement of lenticule (lens component) are not limited to it.For example, when observing them in vertical view, lenticular shape can be generally circular or be generally sexangle.In addition, can arrange lenticule with for example chequer.
In previous embodiments, rear projection screen disposes lenticule substrate and Fresnel Lenses part.Rear projection screen of the present invention can dispose the Fresnel Lenses part.For example, rear projection screen of the present invention can be made up of the lenticule substrate separately basically.
In previous embodiments, use lens-substrate as the member that is used to make rear projection screen and rear projection.Yet lens-substrate of the present invention is not limited to above-mentioned application, and can use in many other used.For example, lens-substrate of the present invention can diffusing panel, black matrix screen, be used for projection display device (front projection) screen promptly, the front projection screen, the composition member etc. that is used for the liquid crystal ball (bulb) of projection display device (front projection) is applied.
Claims (11)
1. a manufacturing has the method for the member of concave part, and described member with concave part has a plurality of concave parts, and described method comprises:
The preparation base material;
On described base material, form mask and form film;
In described mask formation film, form a plurality of openings by the laser treatment of using branch's light filter to obtain mask, described branch light filter has a plurality of transmittance parts that the laser that is used for sending from lasing light emitter is divided into a plurality of laser beam, and described light transmission department branch is included in first transmittance of settling in the presumptive area to produce first laser beam and partly and in described presumptive area settles in addition to produce the second transmittance part of second laser beam; And
Etching forms the described base material of mask thereon to form concave part in described base material;
Wherein said mask forms film and has a plurality of irradiation areas that have preliminary dimension separately, and by using the laser radiation of the laser beam of separating to handle continuously with predefined procedure by described branch light filter to each of described a plurality of irradiation areas, carry out laser treatment in described irradiation area, to form opening, the wherein said opening that handle to form by each the laser radiation to described irradiation area comprises first opening that is formed by first laser beam and second opening that is formed by second laser beam beyond described irradiation area in described irradiation area, wherein settle first transmittance part of branch's light filter and second transmittance partly to make each of described irradiation area have such part, can't help first light beam that the described laser radiation of described irradiation area is handled is formed opening at this, and in one or many laser radiation is subsequently handled, form opening in by the part of second laser beam at described irradiation area, handle when all irradiation areas being carried out described laser radiation thus, when finishing etching processing then, in described base material, form a plurality of concave parts, make described base material can have wherein mode with regular arrangement and form the effective coverage of described concave part and be positioned at beyond the described effective coverage and wherein use as some of under shed form the inactive area that detects with concave part that described opening is formed by second laser beam of use in the described laser radiation of the irradiation area of appointment is handled.
2. manufacture method as claimed in claim 1, the wherein part of settling described irradiation area of the position in the described irradiation area that will in one or many laser radiation is subsequently handled, form opening by second laser beam.
3. manufacture method as claimed in claim 2, wherein when second laser radiation is handled or described laser radiation thereafter handle each time in, the part of settling described irradiation area of the position in the described irradiation area that in the laser radiation of one or many front is handled, forms opening also by second laser beam.
4. the method for claim 1 wherein forms described detection and with concave part it is separated in the described inactive area of described base material with other concave part.
5. the method for claim 1, wherein directions X with the Y direction of described directions X quadrature on move described base material relative to described lasing light emitter and described branch light filter and make described a plurality of irradiation area also move in an identical manner, carrying out described laser radiation handles, wherein in described branch light filter, second transmittance partly is placed in the described presumptive area on directions X and Y direction and the separated position of first light transmission department.
6. the method for claim 1, wherein when when the surface of the described base material that wherein forms described concave part is observed, each concave part that forms in described effective coverage has flat elliptical shape.
7. the member with concave part of the manufacture method manufacturing that limits by claim 1 of a use.
8. the lens-substrate made of the member that limits by claim 7 of a use with concave part.
9. lens-substrate as claimed in claim 8, wherein said lens-substrate are the lenticule substrates.
10. transmission screen that disposes the lenticule substrate that limits by claim 8.
11. rear projection that disposes the transmission screen that limits by claim 10.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006010524 | 2006-01-18 | ||
| JP2006010524 | 2006-01-18 | ||
| JP2006290243 | 2006-10-25 |
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| Publication Number | Publication Date |
|---|---|
| CN101004457A true CN101004457A (en) | 2007-07-25 |
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ID=38703731
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200710002044 Pending CN101004457A (en) | 2006-01-18 | 2007-01-18 | Method of manufacturing member having concave portion, lens substrate, transmission type screen and rear projection apparatus |
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| CN (1) | CN101004457A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018119560A1 (en) * | 2016-12-26 | 2018-07-05 | 江南大学 | Chemical salt coating assisted processing method for laser front-side etching of inorganic transparent material |
| CN111169056A (en) * | 2018-11-12 | 2020-05-19 | 苏州维业达触控科技有限公司 | Method for manufacturing anti-dazzle diffusion film |
| CN111566821A (en) * | 2018-01-10 | 2020-08-21 | 松下电器产业株式会社 | Solar cell and method for manufacturing solar cell |
| CN114487020A (en) * | 2022-02-08 | 2022-05-13 | 扬州大学 | Gas-sensitive material for lung cancer breath marker gas methanol and preparation method thereof |
-
2007
- 2007-01-18 CN CN 200710002044 patent/CN101004457A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018119560A1 (en) * | 2016-12-26 | 2018-07-05 | 江南大学 | Chemical salt coating assisted processing method for laser front-side etching of inorganic transparent material |
| CN111566821A (en) * | 2018-01-10 | 2020-08-21 | 松下电器产业株式会社 | Solar cell and method for manufacturing solar cell |
| CN111566821B (en) * | 2018-01-10 | 2023-03-10 | 松下控股株式会社 | Solar cell and method for manufacturing solar cell |
| CN111169056A (en) * | 2018-11-12 | 2020-05-19 | 苏州维业达触控科技有限公司 | Method for manufacturing anti-dazzle diffusion film |
| CN114487020A (en) * | 2022-02-08 | 2022-05-13 | 扬州大学 | Gas-sensitive material for lung cancer breath marker gas methanol and preparation method thereof |
| CN114487020B (en) * | 2022-02-08 | 2023-12-22 | 扬州大学 | Gas-sensitive material for lung cancer breathing mark gas methanol and preparation method thereof |
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