CN101002040A - Methods of operating microvalve assemblies and related structures and related devices - Google Patents
Methods of operating microvalve assemblies and related structures and related devices Download PDFInfo
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- CN101002040A CN101002040A CN 200580024642 CN200580024642A CN101002040A CN 101002040 A CN101002040 A CN 101002040A CN 200580024642 CN200580024642 CN 200580024642 CN 200580024642 A CN200580024642 A CN 200580024642A CN 101002040 A CN101002040 A CN 101002040A
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Abstract
A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.
Description
Association request
It is 60/590,483 U.S. Provisional Patent Application that the application advocates to apply for July 23, sequence number in 2004, and applies for interests and preference that July 23, sequence number in 2004 are 60/590,669 U.S. Provisional Patent Application.By reference above-mentioned two contents that provisional application disclosed all are incorporated in this specification.U.S. Patent Application Serial Number (acting on behalf of case 9451-3), denomination of invention that the application also is associated with application simultaneously are the patent application of " Microvalve Assemblies And Related Methods ", by reference the content that this application disclosed all are incorporated in this specification.
Technical field
The present invention relates to the valve field, relate more specifically to little valve and microvalve assemblies and associated method.
Background technique
Can use traditional Electromagnetic Drive air pressure valve to control fluid stream.When energising or when outage, the Electromagnetic Drive air pressure valve can cut off also/or allow one or more fluid stream.The actuator of Electromagnetic Drive air pressure valve is an electromagnet.When valve is switched on, produce magnetic field with the active force pulling of antagonistic spring also/or promote guiding valve.When outage, be back to its home position by the spring action guiding valve.In the mode of example at reference " Technical Principles of Valves " (omega.com, One Omega Drive, Stamford, CT, 06907, J-3 to J-7) in the Electromagnetic Drive air pressure valve has been discussed, by reference the content that the document disclosed all has been incorporated in this specification.
Air stream (or other fluid streams) by valve can be the function of several tension ports connections and several switching positions.Directional valve is functional can be described by being referred to as the combination that " path " reach " position ", and for example, the four-way on-off valve also can be described as 4/2 access valve.Term " path " defines a plurality of tension streams (representing with the arrow in the ISO symbolism) that valve has.For term " position ", the Pneumatic directional valve can have two or three switching positions (representing with the square in the ISO symbolism).
In traditional five-way dibit Electromagnetic Drive air pressure valve (5/2 valve), can between first and second actuator port, first and second discharge port and air supply port, control fluid stream.When solenoid is switched on, 5/2 valve can set up the fluid coupling between the air supply port and first actuator port and between second actuator port and second discharge port.When solenoid cut off the power supply, 5/2 valve can be set up the fluid coupling between air supply port and second actuator port and first actuator port and first discharge port.Therefore, 5/2 valve can be used to control the operation of the pneumatic actuator that is coupled to actuator port.
But the Electromagnetic Drive air pressure valve can suffer meeting to shorten the mechanical wear in its working life.In addition, by the Electromagnetic Drive air pressure valve provide functional be limited.In addition, the Electromagnetic Drive air pressure valve can not remain on on-position when outage.
Summary of the invention
According to some embodiments of the present invention, valve assembly can comprise main casing and first and second electrostatically actuated valve.Main casing can define at least three chambeies, and described three chambeies are: be provided with first chamber that is coupled to high pressure supply port, be provided with second chamber that is coupled to output port and be provided with to be coupled to the 3rd chamber of low pressure discharge port.Can between described first chamber and described second chamber first electrostatically actuated valve be set, wherein said first electrostatically actuated valve allows in response to first electrical signal or blocks described first chamber in fact to be communicated with fluid between described second chamber.Can between described second chamber and described the 3rd chamber second electrostatically actuated valve be set, wherein said second electrostatically actuated valve allows in response to second electrical signal or blocks described second chamber in fact to be communicated with fluid between described the 3rd chamber.
According to other embodiments of the invention, can provide the method that forms valve assembly.Particularly, can form the housing that defines the first, second, third, fourth and the 5th chamber.Can separate first chamber and second chamber by first valve shell that is used for Valve core blade, can separate second chamber and the 3rd chamber by second valve shell that is used for Valve core blade, can separate the 3rd chamber and the 4th chamber by the 3rd valve shell that is used for Valve core blade, and can separate the 4th chamber and the 5th chamber by the 4th valve shell that is used for Valve core blade.In addition, can open chamber and valve shell at the end place that opens of housing.After forming housing, can in a valve shell, insert Valve core blade.Valve core blade can comprise the substrate that wherein has the hole and be provided for opening and the electrostatically actuated flap of close valve orifice, and the opposite side of Valve core blade can be exposed to the chamber on the opposite side of valve shell.After inserting Valve core blade, matrix can be fixed to the end of opening of housing, thus enclosed cavity and valve shell.
According to some embodiments of the present invention, a kind of mass flow controller can comprise the main body with high pressure supply chamber and low pressure output cavity, and the Valve core blade of separating described high pressure supply chamber and described low pressure output cavity.Described Valve core blade can comprise first side of facing described high pressure supply chamber, second side and the hole between described first side and described second side of facing described low pressure output cavity.Described Valve core blade also can be included in the electrostatically actuated flap on the second surface, and wherein flap is related with described hole, and described flexible flap is set to open in response to the electrical signal that is applied to it or to block described hole in fact.In addition, controller can be set with control opening and closing to described valve member to keep mass flow rate by described Valve core blade.
According to other embodiments of the invention, a kind of method of controlling the static valve can be set.Described static valve comprises substrate and the electrostatically actuated valve member that wherein has the hole.Described valve member is associated with described hole in the described substrate, and described valve member is set to open or to close in fact described hole in response to the electrical signal that is applied to it.In addition, can regulate and open and close described electrostatically actuated valve member, described thus valve provides first-class dynamic resistance in first interim, provide second flow resistance in second interim, and provide the 3rd flow resistance in the 3rd interim, wherein said first, second, and the 3rd resistance inequality.
According to other embodiments of the invention, can provide a kind of method of operation of electrostatic actuator, described electrostatically actuated device comprises the flexible member that is positioned at the fixed electrode on the substrate and has flexible electrode.Particularly, can between described fixed electrode and described flexible voltage, apply first electromotive force to activate described flexible member.After applying described first electromotive force, can remove the pad gesture between described fixed electrode and the described flexible electrode.After removing electromotive force, can between described fixed electrode and described flexible voltage, apply second electromotive force, wherein said first electromotive force and described second electromotive force have opposite polarity.
According to other embodiments of the invention, can provide a kind of method of operation of electrostatic actuator, described electrostatically actuated device comprises the flexible member that is positioned at the fixed electrode on the substrate and has flexible electrode.Particularly, when described flexible member separates with described substrate, can between described fixed electrode and described flexible voltage, apply first electromotive force to activate the position of described flexible member to more approaching described substrate with first magnitude.Activating described flexible member to the described position of more approaching described substrate, can apply second electromotive force with second magnitude and be in the described position of more approaching described substrate to keep described flexible member between described fixed electrode and described flexible voltage, wherein said first magnitude is greater than described second magnitude.
According to other embodiments of the invention, a kind of valve assembly can comprise main casing and first and second photolithographic fabrication valve.This main casing can define at least three chambeies, and described three chambeies are: be provided with first chamber that is coupled to high pressure supply port, be provided with second chamber that is coupled to output port and be provided with to be coupled to the 3rd chamber of low pressure discharge port.Can between described first chamber and described second chamber first photolithographic fabrication valve be set, the wherein said first photolithographic fabrication response valve allows or blocks described first chamber in fact to be communicated with fluid between described second chamber in first electrical signal.Can between described second chamber and described the 3rd chamber the second photolithographic fabrication valve be set, the wherein said second photolithographic fabrication response valve allows or blocks described second chamber in fact to be communicated with fluid between described the 3rd chamber in second electrical signal.
According to other embodiments of the invention, a kind of method that forms valve assembly can be included on described first substrate and form described first valve by photoetching, and forms described second valve by photoetching on described second substrate.Can form the main casing that defines at least three chambeies, described three chambeies are: be provided with first chamber that is coupled to high pressure supply port, be provided with second chamber that is coupled to output port and be provided with to be coupled to the 3rd chamber of low pressure discharge port.Can arrange first valve between described first chamber and described second chamber, described thus first response valve allows or blocks described first chamber in fact to be communicated with fluid between described second chamber in first electrical signal.Can arrange second valve between described second chamber and described the 3rd chamber, described thus second response valve allows or blocks described second chamber in fact to be communicated with fluid between described the 3rd chamber in second electrical signal.
Description of drawings
Fig. 1 is the viewgraph of cross-section of electrostatically actuated valve according to an embodiment of the invention.
Fig. 2 is the planimetric map that comprises the Valve core blade of electrostatically actuated valve array according to an embodiment of the invention.
Fig. 3 is the explanatory view of valve assembly according to an embodiment of the invention, and the control pneumatic actuator is shown here.
Fig. 4 A-Fig. 4 F illustrates the explanatory view of the programmed sequence of operations of valve assembly according to an embodiment of the invention.
Fig. 5 is the schematic representation that comprises the valve assembly of the controller that is used for the operating valve chip and lead-in wire according to an embodiment of the invention.
Fig. 6 A-Fig. 6 B illustrates to be used to provide the 5 logical schematic representation that reach the valve assembly housing of 3 logical valves operations according to an embodiment of the invention.
Fig. 7 is the block diagram of mass flow controller according to an embodiment of the invention.
Fig. 8 is the stereogram that utilizes the three-way valve assemblies of single Valve core blade realization according to an embodiment of the invention.
Fig. 9 is the stereogram of four-way valve assembly according to an embodiment of the invention, has wherein removed top cover and bottom and has utilized one chip to realize.
Figure 10 is a block diagram, and functional such as the custom circuit of specific integrated circuit (ASIC) that is used for the electronics sub-component according to some embodiments of the present invention is shown.
Figure 11 is the explanatory view according to the electronics sub-component that comprises custom circuit of some embodiments of the present invention.
Figure 12 is a table, show according to the input of the custom circuit of some embodiments of the present invention with export between logical relation.
Figure 13 is a table, shows the program that is used for state exchange and polarity inversion according to some embodiments of the present invention.
Figure 14 A and Figure 14 B are tables, show the stitch definition according to the custom circuit of some embodiments of the present invention.
Figure 15 A and Figure 15 B are tables, show the design parameter that is used for custom circuit according to some embodiments of the present invention.
Figure 16 is the block diagram that is coupled to the control valve of guiding valve according to an embodiment of the invention.
Figure 17 is the block diagram of pressure regulator according to an embodiment of the invention.
Embodiment
The present invention is explained in more detail embodiments of the invention shown in the drawings below with reference to accompanying drawing.But the present invention can much different forms implement, and should not be construed as limited to listed embodiment here.On the contrary, provide these embodiments' purpose to be to make the content that discloses thorough and complete here, and scope of the present invention is conveyed to those skilled in the art fully.
In the accompanying drawings, the thickness of layer, zone and/or line and/or width illustrate for clear the exaggeration.Should be appreciated that when the element such as layer, zone or substrate is mentioned be to be positioned on another element, it can be located immediately on this another element, or also other spacer elements can be arranged betwixt.On the contrary, be to be located immediately on another element if be mentioned such as the element of layer, zone or substrate, then do not have other spacer elements therebetween.Similarly, when element is mentioned " being connected to " or " being coupled to " another element, then it can be connected directly to or be coupled to this another element, or also other spacer elements can be arranged betwixt.On the contrary, be to be connected directly to or to couple directly to another element if element is mentioned, then do not have other spacer elements betwixt.In this manual, term " and/or " comprise one or more associations list project arbitrarily and all combinations.
In addition, here can use such as below, on, upper and lower and/or inferior relational terms the relation of an element shown in the accompanying drawing with respect to other elements described.Should be understood that relational terms is intended to comprise the different azimuth of the device except the orientation shown in the accompanying drawing.For example, if the device in an accompanying drawing is reversed, the element that then is described as being positioned at other elements belows will be positioned at the top of other elements.Therefore, schematically can comprise under the term over-azimuth and orientation, below both.
Although should be appreciated that using term first, second and third to wait describes various zones, layer, part and/or step here, these zones, layer, part and/or step should not limited by these terms.Use the purpose of these terms only to be zone, layer, part or a step and another zone, layer, part or step are differentiated.Therefore, under the situation that does not break away from instruction of the present invention, first area described below, layer, part or step also can be called as second area, layer, part or step, and similarly, second area, layer, part or step also can be called as first area, layer, part or step.Similarly label is represented similar elements in the whole text.
The purpose of term used herein only is to describe certain embodiments, and and is not intended to restriction the present invention.In this manual, singulative also is intended to comprise plural form, unless the clear and definite opposite explanation of Wen Zhongyou.It should also be understood that, when using term " to comprise " in this manual, it is intended to represent the existence of described feature, integral body, step, operation, element and/or assembly, and does not get rid of the existence of one or more other features, integral body, step, operation, element, assembly and/or its set or additional.
Unless define especially, employed here whole terms (comprising technology and scientific and technical terminology) all have with the present invention under the identical implication of those skilled in the technology concerned's common sense.It is also understood that such as those terms that in general dictionary, define to be interpreted as having the implication consistent, and should not idealize or excessively doctrine explained, unless here define so clearly with its implication in the background of association area.
In pneumatic actuator, two actuator cavities are separated by piston, use the pressure reduction in the actuator cavities to come mobile piston.Can use bar with the transmission of movement of piston to the device that activated in the actuator outside.Can use the air-flow of controlling one or two actuator cavities that enters or leave pneumatic actuator according to the valve assembly of some embodiments of the present invention.
Valve assembly according to some embodiments of the present invention can comprise a plurality of valve arrays, and wherein each valve array all is arranged on independently on the substrate.Each valve all can comprise by (a plurality of) valve opening of substrate and the electrostatically actuated flexible flap that is used for gate (a plurality of) valve opening.Particularly, each flexible flap all can be anchored into substrate and keep free at whole other edges at first end.In addition, the free end of each flexible flap all can curl away from substrate, makes each flexible flap not exist the electrostatic force that applies to open often.Flap can be arranged on the top surface of substrate, and by opening the stream that (a plurality of) valve opening can form the low pressure on the top surface from the high pressure on the bottom surface of substrate to substrate.
Figure 1 illustrates structure according to the single valve of some embodiments of the present invention.As shown in Figure 1, valve 100 can comprise substrate 101 (such as silicon substrate), be arranged on the fixed electrode 105 between first isolation layer 103 and second isolation layer 107 on the top surface of substrate 101 and be arranged on the 3rd isolation layer 109 and the 4th isolation layer 115 between flexible electrode 111.Fixed electrode 105 and flexible electrode 111 for example all can comprise such as metal layers such as Ti, Cr, Au, Al, Cu, W, Pt with and/or such as other flexible conducting material layers of conducting polymer (for example polyanniline) and/or conductive oxide film (for example ITO).When using specific conductive metal film (for example Au, Ag, Al, Cu and/or Pt), can on the upper surface of conductive metal film and/or lower surface, thin adhesion layer (for example Ti and/or Cr) be set so that the suitable stickiness to the isolation layer of flexible flaps to be provided.More isolation layer 103,107,109, and 115 can be such as polyimide or other photopolymers polymer material layer.In alternate embodiment, can save one in second isolation layer 107 and the 3rd isolation layer 109, and/maybe can save first isolation layer 103.Additional or alternately, isolation layer 107 and/or isolation layer 109 can comprise the ceramic dielectric such as silica (SiO2).
The 3rd isolation layer 109 and the 4th isolation layer 115 and flexible electrode 111 close on each valve opening 119 that passes substrate 101 and have defined flexible flap 117.Can by wet chemical etch also/or pass substrate by deep reactive ion etch and form valve opening.Flexible flap 117 is configured to not exist between fixed electrode 105 and flexible electrode 111 top surface that curls under the situation that attracts electrostatic force away from substrate to be in the normally open position, passes (a plurality of) valve opening 119 also by the flexible flap 117 on the top surface of substrate 101 to allow fluid from the bottom surface of substrate 101.Can attract electrostatic force to come cut-off valve 100 by between fixed electrode 105 and flexible electrode 111, producing, make flexible flap 117 block (a plurality of) valve opening 119.Particularly, make and wherein have predetermined stress by making isolation layer 109 and 115, can be so that the tops that flexible flap 117 curls away from substrate 101 be in the normally open position.Be the U.S. Patent number 6 of " Microelectromechanical FlexibleMembrane Electrostatic Valve Devices And Related FabricationMethods " for example in people, denominations of invention such as mandate Scott H.Goodwin-Johansson, in 590,267; People, denominations of invention such as mandate Scott H.Goodwin-Johansson are in the U.S. Patent number 6,236,491 of " Micromachined Electrostatic ActuatorWith Air Gap "; With and/or international publication number WO02/22492 in micro electronmechanical static control valve unit has been discussed, by reference its full content is incorporated in this specification.According to embodiments of the invention, can utilize above-mentioned other removable valve members such as barrier film of processing with reference to the flap or utilization such as the microcomputer of figure 1 discussion that electrostatically actuated valve is set.
Particularly, can utilize photography mint-mark mask and etching technique on substrate, to form the valve array, and substrate can comprise such as silicon, glass and/or quartzy material.For example, flexible flap can utilize the photography mint-mark to be formed on each sacrifice layer, can remove sacrifice layer (for example utilizing etching) then with the dispensing flexible flap, thereby allow flap to curl away from substrate.In addition, can on common wafer, make a plurality of Valve core blades, then with its separation.
Therefore, can open also cut-off valve array 100 simultaneously
1-x, 1-yParticularly, can close electromotive force and make whole valve openings 119 on whole flexible flap 117 cut-off valve chips 131 applying between the flexible electrode 111 of the fixed electrode 105 of array and array to produce electrostatic attraction.Similarly, can between the fixed electrode 105 of array and flexible electrode 111, apply and open electromotive force and make whole flexible flaps 117 open the whole valve openings 119 on the Valve core blade 131 to remove electrostatic attraction.By common activated valve array 100 is set on chip 131
1-x, 1-y, the bigger flow of flow that Valve core blade 131 can regulate and single valve can be regulated.Therefore, can provide the Valve core blade of different flow size (Cv), the big I of flow is up to the flow size of 1.0Cv.Can for example be provided at about 0.001Cv to the interior flow size of about 10Cv scope.For example can wait to determine the flow size by the quantity of valve, the size of valve opening.Therefore, bigger Valve core blade can provide bigger flow size.Alternately, can independently select and control respectively the valve that is on the identical chips.
In addition, can before discharging flap 117, encapsulate Valve core blade 131.Particularly, flap 117 can be formed on the sacrifical oxide, and can keep sacrifical oxide when being assembled in Valve core blade 131 in the packaging frame.Can utilize drying (steam) HF (hydrofluoric acid) release to remove sacrifical oxide and can not damage packaging frame greatly then.Particularly, packaging frame can and/or can resist the other materials of the damage of self-desiccation (steam) HF exhaust to form by viton.Though sacrificial oxide layer exemplarily has been discussed, can have together been used other sacrifice layers (for example expendable metal layer) with other suitable steam and/or wet chemical etch agent.
In alternative exemplary, can before the wafer cutting that comprises a plurality of Valve core blades, after the cutting but before the encapsulation or after encapsulation by using the HF acid etching removal sacrifical oxide that wets to come the flap of relief valve chip.Particularly, can use 49%HF solution to remove sacrificial oxide layer from Valve core blade through coming in about 10 minutes, and Wet-type etching can follow all through 20 minutes washed with de-ionized water, isopropanol clean and first and second washed with methanol to remove any remaining HF and/or water.After wet processed, the Valve core blade that has discharged flap can load methyl alcohol through the supercritical drying circulation reducing any surface tension, otherwise this surface tension will cause the stiction between flap and the substrate.
Particularly, Valve core blade can be loaded in the exsiccator chamber and by methyl alcohol and cover, and uses liquid CO 2 under the pressure of about 1200psig (pound/square inch, gauge pressure) methyl alcohol is removed from the chamber then.In case removed whole methyl alcohol, with regard to heating chamber through super critical point (about 31 degrees centigrade) with CO2 from liquid-phase conversion to gas phase, and release pressure is to discharge CO2 steam from system.Because supercritical CO 2 has extremely low surface tension, thus when its when liquid state is converted into gaseous state, CO2 is unlikely left behind flap.Can use commercially available and/or customization supercritical drying device.
Can utilize visual inspection to judge and successfully discharge the flap of acceptable number on the Valve core blade.Particularly, the surface of Valve core blade has with valve and exposes down the different color of silicon (when flap discharges and Valve core blade do not switched on as seen), and can be checked through this color distinction.Alternately, can be after release with light emission by wafer, and fluorescence detector can detect energising (closing) and the equation of light between (opening) Valve core blade of switching on.In above-mentioned two kinds of examples, all can use the machine image system to check.Apply for simultaneously by people such as William 0.Teach, denomination of invention is for " Microvalve Assemblies And Related-Methods " (acting on behalf of case 9451-3) " U.S.'s application for a patent for invention (hereinafter referred to as people's documents such as " " Teach) in gone through the encapsulation that is used for Valve core blade 131.Here by reference in this manual with its full content combination.
Figure 3 illustrates explanatory view according to the valve assembly 141 of some embodiments of the present invention.As shown in Figure 3, four Valve core blade 131a-131d are separated out five chamber 143a-143e of valve assembly 141.Particularly, Valve core blade 131a compartment 143a and 143b; Valve core blade 131b compartment 143b and 143c; Valve core blade 131c compartment 143c and 143d; And Valve core blade 131d compartment 143d and 143e.Chamber 143a and 143e are coupled to each low pressure discharge port 142a and 142b; Chamber 143b and 143d are coupled to each chamber 163a and the 163b (being separated by moveable piston 165) of pneumatic actuator 161 by port one 46a and 146b; And chamber 143c is coupled to high pressure supply port 144c.Therefore, Valve core blade 131a is constructed to allow or blocks fluid stream from chamber 143b to chamber 143a.Valve core blade 131b is constructed to allow or blocks fluid stream from chamber 143c to chamber 143b.Valve core blade 131c is constructed to allow or blocks fluid stream from chamber 143c to chamber 143d.Valve core blade 131d is constructed to allow or blocks fluid stream from chamber 143d to chamber 143e.
According to some embodiments of the present invention, can make valve assembly 141 and pneumatic actuator 161 (being also referred to as cylinder) independently, then both are coupled.The user can buy valve assembly and pneumatic actuator independently from identical or different distributors thus.According to other embodiments of the invention, valve assembly can embed in (or being integrated in) pneumatic actuator, thus with two elements as a unit manufacturing also/or sell.
According to some embodiments of the present invention, will be at the sequential operation state that discusses the valve assembly 141 of Fig. 3 below with reference to Fig. 4 A-Fig. 4 F in more detail.In a possible starting state shown in Fig. 4 A, all under first state of startup, close at the flap of the whole valve 100a-100d on the Valve core blade 131a-131d.Applying electrostatic attraction by the flap to valve makes valve keep closing.Under this starting state, only in supply chamber 143c, there is manometer pressure, and in any other chamber 143a-143b and 143d-143e, all do not have manometer pressure.Operation period after starting, will in supplying at least one of chamber 143c and chamber 143b or 143d, there be manometer pressure.In the mode of example, piston 165 and bar 167 are illustrated in and are in retracted position when starting.
In second state of Fig. 4 B, when the valve 100a of Valve core blade 131a and 131c and the flap on the 100c were closed, valve 100b on Valve core blade 131b and the 131d and the flap of 100d were opened.Because from the pressure reduction of chamber 143c to 143b and from the pressure reduction of chamber 143b to 143e, can open the flap of valve 100a and 100c by the electrostatic attraction that reduction/elimination applied, flap curls to the normally open position thus.Therefore, the pressure of chamber 143b and 163a rises, and piston 165 and bar 167 stretch out, and by chamber 143e and discharge port 142b chamber 163b and 143d are discharged.
Under the third state of Fig. 4 C, can realize the abundant balance between the pressure of chamber 143d and 143e, the flap of valve 100d that thus can cut-off valve chip 131d, and utilize electrostatic attraction on the flap to come the valve 100d of cut-off valve chip 131d.Under the four condition of Fig. 4 D, because chamber 143d discharges under the state of Fig. 4 C in advance, so can open the flap of valve 100c.Removal is used for the electrostatic force of the flap of cut-off valve 100c, thus valve 100b keep open in, along with its flap curls to the normally open position shown in Fig. 4 D, valve 100c opens.Opened valve 100c before stretching out fully at piston 165, the pressure that increases in chamber 143d and the 163b can make piston motion slow down.
Under the 5th state of Fig. 4 E, between chamber 143b and 143c, can realize balance, and by applying the flap of the valve 100b of electrostatic attraction on can cut-off valve chip 131b.In addition, the pressure of chamber 143b can increase with respect to the pressure of chamber 143a.
Under the 6th state of Fig. 4 F, after the pressure with respect to chamber 143a has increased the pressure of chamber 143b, can make flap curl by the electrostatic force that removal is used for the flap of cut-off valve 100a and open the flap of the valve 100a on the Valve core blade 131a to the normally open position.Therefore, pneumatic actuator chamber 163a is coupled to low pressure discharge port 142a by chamber 143a and 143b, and pneumatic actuator chamber 163b is coupled to high pressure supply port 144c by chamber 143c and 143d.Under the state of Fig. 4 F, piston 165 and bar 167 are regained.In case chamber 143c is identical with pressure among the 143d and chamber 143a and 143b in pressure identical, then can cut-off valve chip 131a and valve 100a and the 100c of 131c by apply electrostatic attraction to its flap, and the operation that can repeat Fig. 4 A-Fig. 4 F is to stretch out and to regain piston 165 and bar 167.
The state that the Valve core blade 131a-131d of valve assembly 141 can sequentially experience Fig. 4 B to Fig. 4 C to Fig. 4 D to Fig. 4 E to Fig. 4 F is to move to retracted position with piston 165 and bar 167 from extended position.The state that the Valve core blade 131a-131d of valve assembly 141 can sequentially experience Fig. 4 F to Fig. 4 E to Fig. 4 D to Fig. 4 C to Fig. 4 B is to move to extended position with piston 165 and bar 167 from retracted position.The operation of valve assembly 141 has been discussed, by reference in this manual here with its full content combination in people's documents such as Teach.
Can utilize thus to operate and stretch out and regain piston 165 with reference to the said sequence of figure 4A-4F.But, should be understood that, be not that each order of stretching out piston will make that all piston stretches out or stretches out fully, and be not that each order of regaining piston all will make piston regain or regain fully.For example, before last stretching out/regain action is finished, may receive/send next order.Particularly, if if if for example detecting the error condition safety sensor lost efficacy and/or detect outage, then can move and receive/send next order before finishing last stretching out/regains.
Valve assembly can be increased with reference to the above-mentioned sequencing technology of figure 4A-Fig. 4 F and its operation can be resisted to stretch out and to regain the pressure maximum of actuator.Because on the bottom surface of Valve core blade, have elevated pressures, so can reduce to opening the proper operation restriction of valve array.When coming cut-off valve, can produce restriction by the power of closing power from the static near valve of air pressure.Therefore, valve can selectively open and cut out allow to reduce the pressure reduction between the adjacent chambers.By reducing the pressure reduction between the adjacent chambers, can produce a kind of state and make the flap of Valve core blade can resist to have the much lower pressure reduction of pressure reduction and close than original.When closing the flap of Valve core blade under the state that has relative higher differential pressure, less relatively time lag (for example, based on chamber size in about 100 microseconds to the scope of about 200 microseconds) just can fully reduce pressure reduction.
As mentioned above, Valve core blade 131 can comprise a plurality of electrostatically actuated valves thereon.In addition, the whole fixed electrodes on Valve core blade 131 all can be electrically connected to first input pad, and the whole flexible electrodes on Valve core blade all can be electrically connected to second input pad.Therefore, come first and second input pad that the electrical signal of self-controller 171 can be coupled to each Valve core blade with open simultaneously and the cut-off valve chip on whole valves.The schematic representation of Fig. 5 has illustrated according to embodiments of the invention, the valve assembly of controller 171 that comprises four Valve core blade 131a-131d that separate five valve pocket 143a-143e and be used for the operation of control valve chip 131a-131d.
The packaging frame that is used for Valve core blade, the electronics sub-component that encapsulates Valve core blade, comprises the valve assembly that encapsulates Valve core blade and be used for the control valve assembly have been discussed in people's documents such as Teach, by reference its full content have been comprised in this manual here.For example, as discussing in people's documents such as Teach, can in the electronics sub-component, use the operation of controller according to an embodiment of the invention.Other operations of controller according to an embodiment of the invention are being discussed below with reference to Figure 10-Figure 15.
Same reference leads can provide the electric coupling between controller 171 and the last input pad of each Valve core blade 131a-131d.Independently signal lead 175a-175d provides the independent electric coupling between last other input pads of each Valve core blade 131a-131d and the controller 17 1.Can be each Valve core blade 131a-131d independent reference leads is set, or can be by sharing one or more reference leads more than a Valve core blade.With reference to figure 5, according to specific embodiment discussed below, the first reference leads 173a can be coupling between controller 171 and Valve core blade 131a and the 131c, and the second reference leads 173b can be coupling between controller 171 and Valve core blade 131b and the 131d.
Realize in the electronics sub-component that the functionality of controller 171 can be discussed in as people's documents such as Teach.Therefore, controller 171 can be controlled each Valve core blade 131a-131d independently to be provided with such as the operation with reference to figure 4A-Fig. 4 F the operation described.In addition, for example as discussing in people's documents such as Teach, the housing 401 of valve assembly 141 can be formed by injection molding insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative), wherein go between 173 and 175a-175d be inserted into and be molded in wherein.In addition, the custom circuit of for example describing with reference to figure 10-Figure 15 below can utilizing is whole or in part realized (for example, comprising one or more specific integrated circuit (ASIC) device) electrical assembly of controller 171.
By on the input pad of Valve core blade, applying relative higher voltage (for example 100 volts or higher), because fixed electrode can be closed normally open valve lobe (supposing that the hydrodynamic pressure on the Valve core blade both sides is identical substantially when applying voltage) with the electrostatic attraction between the flexible electrode.Based on ongoing specific operation, the flap on the Valve core blade can be closed long time, thereby causes the electric charge accumulation.For example, comprise that the equipment of valve assembly can shut down at night, Valve core blade is closed through 8 to 16 hours thus, and related actuator is protected during this period in same position.Duan time durations also can cause the electric charge accumulation slightly.
If close the long term at the flap that relative higher voltage (for example 100 volts) is applied to the situation lower valve core sheet between its fixed electrode and the flexible electrode, then can produce the electric charge accumulation, and flap may not be opened immediately when the voltage potential of removing between fixed electrode and the flexible electrode at dielectrics-metal interface place.With reference to figure 1, because the electrostatic force that is produced by the voltage potential that is applied between fixed electrode 105 and the flexible electrode 111 is when flexible flap 117 close valve orifice 119 during through period of length, meeting is at the stored charge of generation at the interface between flexible electrode 111 and the dielectric layer 109 and/or between fixed electrode 105 and the dielectric layer 107.When stored charge was enough big, the inherent stress in the flexible flap 117 just was not enough to produce the enough power of the electrostatic force that overcomes the stored charge generation, had the enough time to dissipate from dielectrics-metal interface until electric charge.Apply voltage difference although this electric charge accumulated state can cause not applying the outside to fixed electrode and flexible electrode, flexible flap still keeps closing closed pore.
Therefore, when Valve core blade kept closing, the controller 171 of Fig. 5 can be set to reduce the stored charge at the metal-dielectric interface place of valve on the Valve core blade.According to embodiments of the invention, controller 171 can periodically make the pole reversal of the lead-in wire that drive to keep the Valve core blade of closing.For example, close if Valve core blade 131a just is being held, then the polarity of signal lead 175a can be with respect to the reference leads 173a of association by periodically oppositely to reduce stored charge.Alternately, controller 171 can detect stored charge and begin pole reversal operation based on the predeterminated level of the stored charge that detects.
When the polarity chron of the lead-in wire of reverse direction actuation Valve core blade, can before reversed polarity, remove energy from lead-in wire.For example, before carrying out reversed polarity, can remove energy, make that the flap of Valve core blade has no time to open before the reversed polarity carrying out through extremely short period (for example, the microsecond magnitude).Alternately, flap can be opened opening or begin during energy is removed before the reversed polarity, but reversed polarity can make fluid by Valve core blade flow for the operation of valve assembly 141 and not quite fast enough subsequently.In other words, before carrying out reversed polarity, there be not fluid during the energy to fail to be convened for lack of a quorum to cause the small movements of the pneumatic actuator controlled by valve assembly 141.Opening and close the flexible flap needed time can be 100 microsecond magnitudes.Can comprise and remove voltage, apply the shorter high-frequency voltage cycle, apply the flexible flap of voltage then again for reducing other controller functions that electric charge accumulation realized to keep closing.
According to a particular embodiment of the invention, valve assembly can be maintained at as Fig. 4 B and/particular state shown in Fig. 4 F can produce the electric charge accumulation through the Valve core blade of closing thus very long period.For example, valve assembly can comprise Valve core blade 131a and the 131c that closes shown in Fig. 4 B, and can keep this state under the situation that piston 165 and bar 167 stretch out.In addition, the first reference leads 173a can be coupling between controller 171 and Valve core blade 131a and the 131c, and the second reference leads 173b can be coupling between controller 171 and Valve core blade 131b and the 131d.Therefore, may need to make simultaneously the pole reversal that is applied to Valve core blade 131a and both signals of 131c.
What particularly, may need is: (1) sequencing is apace passed through Fig. 4 B, Fig. 4 C, Fig. 4 D, is reached the state of the serviceability of Fig. 4 E to Fig. 4 F; (2) polarity of the lead-in wire of reverse direction actuation Valve core blade 131a and 131c; Then (3) apace the sequencing backspace by Fig. 4 E, Fig. 4 D, and the state of Fig. 4 C to the state of Fig. 4 B.By the state of sequencing to Fig. 4 F, both cut off the power supply to Valve core blade 131a and 131c, can oppositely be used for the polarity of the lead-in wire of these chips thus.By sequencing apace by state and return from the state of Fig. 4 B to Fig. 4 F, can in valve pocket 143a-143e, realize sufficient pressure balance, can open thus and the valve of cut-off valve chip 131a and 131c and can not produce the bigger motion of stretching out piston 165 or bar 167.Because the volume of valve pocket 143a-143e can be littler with respect to the volume of actuator cavities 163a-163b, because may have restriction by the coupling between valve pocket 143b and 143d and the actuator cavities 163a-163b, and/or because only need partial equilibrium between the contiguous valve pocket allowing the closing of Valve core blade therebetween, the bigger motion that can not cause stretching out piston 165 and bar 167 so can carry out the reaching sequencing backward forward of Fig. 4 B-Fig. 4 F apace.
In another example, valve assembly can have the Valve core blade 131b and the 131d that close shown in Fig. 4 F, and can keep this state under the situation of piston 165 and bar 167 withdrawals.In addition, reference leads 173b can be coupling between controller and Valve core blade 131b and the 131d, and reference leads 173a can be coupling between controller and Valve core blade 131a and the 131c.Therefore, may need to make simultaneously the pole reversal that is applied to Valve core blade 131b and both signals of 131d.
What particularly, may need is: (1) sequencing is apace passed through Fig. 4 F, Fig. 4 E, Fig. 4 D, is reached the state of the serviceability of Fig. 4 C to Fig. 4 B; (2) polarity of the lead-in wire of reverse direction actuation Valve core blade 131b and 131d; Then (3) apace the sequencing backspace by Fig. 4 C, Fig. 4 D, and the state of Fig. 4 E to the state of Fig. 4 F.By the state of sequencing to Fig. 4 B, can realize the state that both cut off the power supply to Valve core blade 131b and 131d, can oppositely be used for the polarity of the lead-in wire of these chips thus.By sequencing apace by state and return from the state of Fig. 4 F to Fig. 4 B, can in valve pocket 143a-143e, realize sufficient pressure balance, can open thus and the valve of cut-off valve chip 131b and 131d and the bigger motion that can not produce withdrawal piston 165 or bar 167.Because the volume of valve pocket 143a-143e can be littler with respect to the volume of actuator cavities 163a-163b, because have restriction by the coupling between valve pocket 143b and 143d and the actuator cavities 163a-163b, and/or because only need partial equilibrium between the contiguous valve pocket allowing the closing of Valve core blade therebetween, the bigger motion that can not cause regaining piston 165 and bar 167 so can carry out the reaching sequencing forward backward of Fig. 4 F-Fig. 4 B apace.
In addition, can utilize the waveform shaping of the signal that is used for the actuating valve chip to reduce average energy consumption.For example, required " drawing in " electric current and/or the voltage of the flap of cut-off valve chip can be closed required " maintenance " electric current and/or voltage greater than the flap of maintaining valve chip.Therefore, can apply bigger " drawing in " voltage potential (for example being 100 volts or higher magnitude) beginning opening closing of flap to Valve core blade, and when in a single day flap closes, can apply less " maintenance " voltage potential (for example being 50 volts magnitude) to keep to Valve core blade.According to specific embodiment, can utilize signal toning and sedimentation phenomenon to realize initial higher " drawing in " voltage and/or voltage, follow low many " maintenance " electric current and/or voltage.Low by utilizing " maintenance " electric current can reduce in inter metal dielectric electric charge accumulation at the interface.Controller 171 can comprise push away/drawing device and/or amplifier to be to provide waveform shaping according to an embodiment of the invention.
By reduce to be used to close also/or keep the voltage of flap can reduce the electric charge accumulation.As mentioned above, can use waveform shaping, use higher relatively " drawing in " voltage with the valve on the cut-off valve chip thus, and use relatively low " maintenance " voltage to close with the valve of maintaining valve chip.By reducing " maintenance " voltage, can keep the down periods at the valve of Valve core blade and reduce the electric charge accumulation.In addition, can reduce to be used for " drawing in " voltage of cut-off valve and to be used to keep " maintenance " voltage that valve cuts out by the thickness that reduces dielectric layer 107 and/or 109 one or both, can utilize the low voltage of passing the narrower space generation between fixed electrode and the flexible electrode to produce thus and draw in and/or confining force.Therefore can utilize to use and have the thin dielectric layer that improves the breakdown characteristics material.
In addition, can use master and/or the standby power supply that is used for valve assembly such as the power supply conduct of storage battery, capacitor and/or fuel cell with controller 171.System based on solenoid valve compares with tradition, uses the valve assembly 141 of Valve core blade 131a-131d can have relatively low energy requirement, and the power supply such as storage battery, capacitor and/or fuel cell can be enough thus.For example, utilize chargeable lithium or lithium-ions battery to come, and can use main external power supply during normal running, lithium or lithium-ions battery to be charged for controller 171 provides standby energy.Lithium storage battery can provide relative high energy density, reliability and/or voltage output (for example, 3 volts of DC).Lithium storage battery also can only have minimum change in that operation is provided on the wider temperature range on this scope.In addition, lithium storage battery can provide relatively long life-span and/or long storage period.
In the valve assembly of Fig. 3, Fig. 4 and Fig. 5, shut-off means can reduce peak energy/electric current demand by using energy sequentially to connect also.Particularly, when the cut-off valve chip, can consume maximum energy when closing at first when opening Valve core blade, and can consume more low-yield to keep closing of Valve core blade.In the order of Fig. 4 B-Fig. 4 F, for example, during same transitions, do not have two Valve core blades and close.Close two Valve core blades if conversion relates to, then can close two Valve core blades slightly alternately, a Valve core blade was closed before another thus.
As mentioned above, can use waveform shaping to reduce the electric charge accumulation.In addition, can use waveform shaping with by using first voltage potential to close the Valve core blade opened and to use the voltage potential that reduces to close and reduce the average operation energy that consumed then to keep Valve core blade.Controller also can provide under the situation of primary power supply than the low energy systems state losing, and can prolong the life-span of standby power supply thus.Particularly, during losing primary power supply, can cut off other assemblies except that most important circuit.For example, in case valve assembly arrives the predetermined default state between turnoff time, controller can be closed except keeping valve assembly and is in other whole functionalities the required functionality of default conditions.
According to a particular embodiment of the invention, outside primary power supply can about 24 volts voltage potential offer controller 171, and standby power supply (for example storage battery) can provide about 3 volts voltage potential.Therefore, controller 171 can comprise that high voltage generating circuit is used for the relative high voltage signal of actuating valve chip with generation.High voltage generating circuit for example can comprise the transistor of drive coil and/or transformer, and coil and/or transformer can be discrete.In addition, can utilize one or more capacitors with produce also/or store the usefulness that relative high voltage gesture increases high voltage generating circuit.For example, can use transistor and coil with to capacitor (if perhaps be embodied as bipolar supply then be capacitor) charging.(a plurality of) capacitor can be provided for the power supply of actuating valve chip, and can store enough electric charges on (a plurality of) capacitor, does not need storage battery just can provide standby energy thus.In addition or replacedly, can utilize charge pump, inductor circuit and/or its in conjunction with, with and/or known to those skilled in the art other circuit produce the high-voltage signal that is used for the actuating valve chip.
Can use the collection of energy technology to produce the energy of the operation that is used for controller 171.Particularly, can be converted into electric energy, and be stored in energy storing device (for example storage battery, capacitor, inductor and/or fuel cell) and think that controller 171 provides energy from several extra power harvest energies.For example, light, heat, mechanical vibration etc. can be converted to the electric energy that is stored in storage battery, capacitor and/or the inductor.In addition or alternately, can catch ray (for example alpha and/or beta ray) so that the electric energy that is stored in storage battery, capacitor and/or the inductor to be provided from emitting isotope.Therefore, can not need independent power supply.In addition, can use main external power supply to provide energy and to the charging of the chargeable standby power supply (for example storage battery, capacitor and/or inductor) of controller as valve assembly.Main external power supply is in case interruption can provide energy for valve assembly by chargeable standby power supply.
Therefore the controller 171 of Fig. 5 can be set to the bar that operating valve chip 131a-131d comes the position of control piston and is coupled to its pneumatic actuator, for example illustrates as Fig. 3 and Fig. 4 A-Fig. 4 F.In addition, can go up opening and/or closing of valve by modulation valve chip 131a-131d to provide further control to velocity of piston, acceleration and/or position.Here, the term modulation refers to that the operating valve chip is to be provided at the various flows dynamic resistance between maximum fluidity resistance (that is, valve cuts out fully) and the minimal flow resistance (that is, valve is opened fully).
For example, controller 171 can be arranged so that with PWM modulation frequency (that is, open and close with empty accounting) and come pulsewidth modulation (PWM) to open valve to measure the fluid stream by valve.Can 100% open the sky accounting peak rate of flow and/or minimal flow resistance by valve are set, open the sky accounting with 0% roughly zero delivery and/or maximum fluidity resistance are set, and opening with empty accounting between 100% opens in 0% of PWM modulation frequency can be provided with different middle flow and/or flow resistance.
Alternately, controller 171 can be Valve core blade provides different voltage difference so that different flow resistances to be provided.For example, can provide high voltage differential, can provide the low voltage difference opening valve (that is), and a plurality of medium voltage difference can provide different middle flow and/or flow resistances so that minimal flow resistance to be provided with cut-off valve (that is) so that the maximum fluidity resistance to be provided.In other words, can between the fixed voltage of electrostatically actuated valve and flexible electrode, provide the voltage difference of increase to provide the flow resistance of increase near substrate along with increasing voltage difference pulling flap.
Also alternately, the different flaps on the same valve chip can have different geometrical constructioies, and different thus flaps are closed with different voltage potential.Therefore, first group of valve can cut out voltage in response to first and cut out; Second group of valve and first group of valve can be in response to closing big second the closing voltage and close of voltage than first; And the 3rd group of valve and first and second group valve can be in response to close big the 3rd the closing voltage and close of voltage than first and second.
Also alternately, each Valve core blade all can comprise individually accessible flap, thus controller 171 optionally with different time open also/or be closed in the flap of the varying number on the same Valve core blade.For example, whole flaps (that is) on can the cut-off valve chip for the maximum fluidity resistance is provided, can open on the Valve core blade whole flaps (promptly, for minimal flow resistance is provided), and can open/or close in the middle of the flap of quantity so that different middle flow and/or flow resistances to be provided.
Therefore can use valve to modulate the speed of control piston 167, acceleration and/or position.With reference to figure 4B, for example, can open Valve core blade 131b and 131d so that piston 167 is moved to extended position from retracted position.In some embodiments of the invention, can modulate, first-class dynamic resistance is provided during the first portion of piston motion thus, and second flow resistance is provided during the second portion of piston motion thus the opening of Valve core blade 131b and 131d one or both.For example, can after beginning to stretch out, piston 167 increase the flow resistance that provides by Valve core blade 131b so that be no more than top speed.In addition or alternately, stretch out fully along with piston is contiguous and can increase the flow resistance that provides by Valve core blade 131d so that more controlled deceleration to be provided.In addition, can use the position transducer that is coupled to controller 171 detecting the position of piston 167, and therefore stretching out of controller may command piston, piston is extended to less than any desired location of stretching out fully thus.
With reference to figure 4F, can open Valve core blade 131a and 131c so that piston 167 is moved to retracted position from extended position.In some embodiments of the invention, can modulate, first-class dynamic resistance is provided during the first portion of piston motion thus, and second flow resistance is provided during the second portion of piston motion thus the opening of Valve core blade 131a and 131c one or both.For example, can after beginning to regain, piston 167 increase the flow resistance that provides by Valve core blade 131c so that be no more than top speed.In addition or alternately, regain fully along with piston is contiguous and can increase the flow resistance that provides by Valve core blade 131a so that more controlled deceleration to be provided.In addition, can use the position transducer that is coupled to controller 171 detecting the position of piston 167, and the therefore withdrawal of controller may command piston, piston is recoverable to less than any desired location of regaining fully thus.
According to other embodiments of the invention, the valve chest 401 of valve assembly 141 can define chamber 143a-143e, the shell 403a-403d between each wherein can be set among the 143a-143e of chamber to receive each Valve core blade 131a-131d.Particularly, can in each framework, encapsulate each Valve core blade 131a-131d, in shell 403a-403d, fluid-tight is being set with what for example in people's documents such as Teach, discuss between the valve pocket 143a-143d and encapsulation Valve core blade 131a-131d can be set.As shown in Figure 6A, housing 401 can be provided with four encapsulation Valve core blade 131a-131d and utilize matrix 601 to seal, and operates with the five-way valve of as above discussing with reference to figure 4A-Fig. 4 F that provides.
Shown in Fig. 6 B, also can use same housing 401 and matrix 601 to be used to provide the encapsulation Valve core blade 131c-131d of three-way valve operation that the three-way valve operation is provided by substituting with bolt 132c-132d.Therefore, chamber 143d-143e is sealed and do not work.Can use the three-way valve structure of Fig. 6 B to come driving spring to load pneumatic actuator, the pressure that wherein is applied to a chamber of actuator moves to primary importance with actuator piston, and when removing pressure from the chamber, the spring of actuator moves to the second place with actuator piston.Though the spring-loaded pneumatic actuator has been discussed by way of example, can have been used the three-way valve structure of Fig. 6 B according to embodiments of the invention with the other types actuator.For example, the external agency such as vertical load of actuation can make cylinder be back to its reset condition.
Particularly, can open Valve core blade 131b and can cut-off valve chip 131a so that the high-pressure air from supply port 144c to actuator cavities to be provided.Can open Valve core blade 131a and can cut-off valve chip 131b with by discharge port 142a from the actuator cavities exhaust.When between supply and exhaust when switching, may need to make Valve core blade 131a-131b both do not open at one time, and between the conversion enough delays are being set arbitrarily, thus fully balance pressure to allow to closing when the front opening Valve core blade.
Alternately, can be 4 logical and/or 2 logical valves operates housing and matrix is set.For 4 logical operations, can change matrix and make that fluid is set to be coupled between discharge chamber 143a and 143e and same discharge port.Otherwise, can as above with four Valve core blades 4 logical operations be set with reference to figure 4A-Fig. 4 F is described.Alternately, can utilize single Valve core blade 2 logical operations to be set so that unidirectional connection/cut-out fluid means to be provided.Can utilize housing and the matrix of Fig. 6 A-Fig. 6 B that 2 exchange devices are set, one of them Valve core blade and sealing bolt substitute other Valve core blades.Alternately, can utilize have an input port, an output port and be used for single Valve core blade a shell than small shell 2 exchange devices are set.
According to some embodiments of the present invention, can utilize the Valve core blade 131 that comprises a plurality of valves 100 shown in Figure 7 to come implementation quality flow dontroller 2000 (MFC).Particularly, can supply between chamber 2005a and the low pressure output cavity 2005b at high pressure Valve core blade 131 is set.In addition, the flap that valve 100 can be set is opened towards low pressure output cavity 2005b, thus the air-flow of Valve core blade 131 can regulate from high pressure supply chamber 2005a to low pressure output cavity 2005b.Controller 2003 can be in response to the operation that needs flow and come control valve 100 from the signal of hyperbaric chamber sensor 2001a and low-pressure cavity sensor 2001b.
The state (for example pressure and/or temperature) that each cavity sensor 2001a and 2001b can be among each chamber 2005a and the 2005b provides measured value, and controller 2003 can use these measurement results to judge mass flow rate by mass flow controller 2000.Based on the measurement result from sensor 2001a and 2001b, controller 2003 decidables are by the current mass flow rate of MFC2000, and the valve 100 by modulation valve chip 131 increases or reduce mass flow rate then.Therefore, sensor 2001a and 2001b can provide real-time feedback loop.
Alternately, the quantity of controller 2003 valve 100 that can open and close by change is come modulation valve 100.Can biggest quality flow be set by opening whole valves 100, and can roughly zero mass flow be set by closing whole valves 100.Therefore, the measurement result that controller 2003 can be used to autobiography sensor 2001a and 2001b is monitored the mass flow rate by MFC2000, and judges whether current mass flow rate is greater than or less than the requirement quality flow.If current mass flow rate is less than the requirement quality flow, then controller 2003 can increase the quantity of the valve of opening 100.If current mass flow rate is greater than the requirement quality flow, the quantity of the controller valve 100 that can reduce to open then.Therefore, single valve 100 and/or in groups the stationary electrode and/or the flap electrode of valve 100 can be connected to absolute electrode, controller 2003 can be visited each valve 100 and/or valve 100 in groups independently thus.By way of example, Valve core blade 131 can comprise 63 valves 100, and it has first group of valve, second group of two valve, the 3rd group of four valves, the 4th group of eight valves, the 5th group of 16 valves, and the 6th group of 32 valves.By controlling every group of valve independently, controller can provide the flow control of 64 levels, the peak rate of flow that the roughly zero delivery of cutting out from whole groups valve to whole valves of group open.
According to other embodiments of the invention, shown in the exploded view of Fig. 8, three-way valve assemblies can comprise two electrostatically actuated valves and the supply through hole on the single substrate.Substrate 1101 salable comprise separator 1103 down, in the encapsulation of separator 1115, lower cover structure 1121 and superstructure 1123.Following separator 1103 defines first cavity of resorption that is communicated with from the ingress port 1105 of high-voltage power supply and inlet valve 1107, and defines and supply second cavity of resorption that through hole 1109 and outlet valve 1111 are communicated with.
According to other embodiments of the invention, as shown in Figure 9, the four-way valve assembly can be included in 4 electrostatically actuated valves and two the supply through holes on the single substrate.Substrate 1201 is salable on comprising first time separator 1203, second time separator 1205, first on the separator 1207 and second in the encapsulation of separator 1209.(for clarity sake having saved superstructure and lower cover structure in the drawings).The four-way valve of Fig. 9 can provide the functionality of two three-way valve, and the control to the double-action pneumatic cylinder for example can be set on single substrate thus.
When both all closed when A inlet valve 1211 and A outlet valve 1213, A cylinder port 1231 can be kept apart from high pressure entry port one 233 and discharge port 1235.When A inlet valve 1211 was opened, air can flow to A cylinder port 1231 by A inlet valve 1211 from high pressure entry port one 233.When opening A outlet valve 1213, can flow to discharge port 1235 by A supply through hole 1215 and A outlet valve 1213 from A cylinder port 1231 from the air in the A chamber of pneumatic cylinder.
When both all closed when B inlet valve 1221 and B outlet valve 1223, B cylinder port 1237 can be kept apart from high pressure entry port one 233 and discharge port 1235.When B inlet valve 1221 was opened, air can flow to B cylinder port 1237 by B inlet valve 1221 from high pressure entry port one 233.When opening B outlet valve 1223, can flow to discharge port 1235 by B supply through hole 1225 and B outlet valve 1223 from B cylinder port 1237 from the air in the B chamber of pneumatic cylinder.
According to some embodiments of the present invention, can utilize custom circuit (for example comprising one or more specific integrated circuit (being also referred to as ASIC)) that the electric functionality of the controller of describing with reference to figure 5 171 is provided as above.Figure 10 is the block diagram that illustrates according to the functional block of the circuit 2001 of some embodiments of the present invention, and Figure 11 is the explanatory view of element that the printed circuit board (PCB) of the circuit 2001 that comprises Figure 10 is shown.
As shown in figure 10, circuit 2001 can comprise power adjustments/control circuit 2011, high voltage generating circuit 2013, storage battery detection/control circuit 2015, limit change/debounce logic circuit 2017, sequence controller (state machine) circuit 2019, high pressure (HV) output level conversion circuit 2021, configuration circuit 2023, reverse timing/control circuit 2025 and light emitting diode (LED) drive circuit 2027.As shown in the figure, power adjustments/control circuit 2011 can receive external power supply VDD and ground connection GND signal by providing to each connector such as the electric coupling of the external control device of programmable controller.Similarly, limit change/debounce logic circuit 2017 can receive input control signal A and B by providing to each connector such as the electric coupling of the external control device of programmable controller.Storage battery detection/control circuit 2015 can from be arranged at/storage battery controller 171 receives storage battery energy supply VBat and ground connection GBat signal.
Utilize the output F1-F4 of HV output level conversion circuit 2021 and HComO and HComE to come the Valve core blade of actuating valve assembly, wherein export lead-in wire by main casing of F1-F4 and HComO and HComE (for example by Fig. 5 lead-in wire 175a-175d and 173a-173b) and be coupled to each Valve core blade.Particularly, the Valve core blade of valve assembly can be identified as first Valve core blade (apart from the electronics sub-component farthest) to the 4th Valve core blade (nearest apart from the electronics sub-component), its mesohigh output F1 to F4 is applied to first to fourth Valve core blade respectively, the shared strange HComO signal of high pressure is applied to the first and the 3rd Valve core blade, and the shared even HComE signal of high pressure is applied to the second and the 4th Valve core blade.
The custom circuit of Figure 10 and Figure 11 can be arranged so that the valve assembly of acquisition can be used as substituting flexibly traditional Electromagnetically driven valve.Therefore, physics and the electric interfaces that is used for the electronics sub-component can be consistent with physics that is used for traditional Electromagnetically driven valve and electric interfaces.For example, limit change/debounce logic circuit 2017 can be provided with input control signal A and the B that is used for Electromagnetically driven valve with reception.As Figure 10 and shown in Figure 11, four independently high pressure output signal F1-F4 can be set, and each Valve core blade load all effectively modeling as having the capacitor VC1-VC4 of hysteresis.Therefore capacitor VC1-VC4 represents that the element on the printed circuit board (PCB) interior with being arranged on controller relatively is arranged on the interior Valve core blade of main valve housing.In addition, can utilize supply pump, sensor circuit and/or its combination with and/or well known to a person skilled in the art that other circuit produce higher actuation voltage.
High voltage generating circuit 2013 can be set so that low pressure source (for example 24 volts of external power supply signal VDD and/or 3 volts of battery feed signal VBat) is converted to the high-voltage signal such as 200 volts of DC signals.HV generative circuit 2013 for example can comprise that series connection is arranged on the charge pump on the circuit 2001.As shown in Figure 10 and Figure 11, in size that reduces circuit 2001 and/or cost, extraly or alternatively, outside inductor coil LL and LH can be arranged in parallel so that the one or more booster converters that are used to produce high-voltage signal to be provided with external resistor RL and RH.In addition, the absolute value that can adjust consequent high pressure with adapt to be used for different application different actuation voltage also/or adapt to because of making the change of the characteristic that changes the different circuit (for example ASIC) that cause.Can utilize the resistor HVAR of the part of the voltage divider that together uses as comparator to adjust synthetic high pressure when high voltage generating circuit 2013 is activated, to control with HV generative circuit 2013.
When primary power source de-energizes (for example when losing external power supply signal VDD), the controller that comprises circuit 2001 can be set to be arranged so that valve assembly and can to keep a kind of state or to be converted to the state of needs.Therefore, the controller that comprises circuit can be set providing enough energy, be in the electric leakage that overcomes when needing state to reach the time period in indefinite duration by the electrostatically actuated Valve core blade during losing external power supply signal VDD (it is 24 volts of power supplys), to keep Valve core blade from storage battery (for example storage battery 3013 of Figure 11).
When detecting when outage, also can need the input state of energy with the time that high pressure output signal F1-F4 is switched to predetermined state based on concrete application and outage.Can use 3 volts of lithium main batterys of relatively low cost provide energy with lose also at DC external power supply signal VDD/or keep high pressure output signal F1, F2, F3 and/or F4 when being interrupted.Alternately, can use the rechargeable lithium-ion battery of the voltage output that has in 3.0 to 4.2 volt range, circuit 2001 wherein is set when having external power supply signal VDD, storage battery is recharged.
During the normal running that can obtain external power supply signal VDD, limit changes/debounce logic circuit 2017 can receive also/or filter input control signal A and B, and limit change/debounce logic circuit 2017 can provide input control signal A and B to sequence controller 2019.In the time can obtaining external power supply signal VDD, sequence controller circuit 2019 also disposes the operation of instructing HV output level conversion circuit 2021 according to the circuit that is defined by configuration signal C1-C3 according to input control signal A and B.When losing external power supply signal VDD, storage battery detection/control circuit 2015 can detect outage, and power-off signal can produce and be provided to sequence controller circuit 2019 by detection/control circuit 2015.During losing external power supply signal VDD, sequence controller circuit 2019 instructs the operation of HV output level conversion circuit 2021 according to the power-down mode (not considering input control signal A and B) that is defined by configuration signal C1-C3.
Because only can obtain finite energy, so the operation during losing external power supply signal VDD can influence the operation of each assembly of circuit 2001 from storage battery.In other words, the one or more assemblies of circuit 2001 can be set under low energy model, to operate to prolong the life of storage battery during the loss signal VDD.For example, HV output level conversion circuit 2021 can be set so that low electric leakage operation to be provided, the high pressure of HV generative circuit 2013 generates oscillator and can operate based on " on demand " during loss signal VDD, and/led drive circuit 2027 maybe can be set so that the pattern of only leaking electricity to be provided during loss signal VDD.By reducing the electric current that obtains from storage battery, can prolong the time durations that during loss signal VDD, can use storage battery.
In addition, storage battery detection/control circuit 2015 can be set detects low battery tension and for example needs to replace storage battery by one or two LED1023 being glimmered indicating.Particularly, storage battery detection/control circuit 2015 battery tension of can under rated load, periodically sampling, and storage battery detection/control circuit 2015 can be indicated and needed to replace storage battery (to hold dissimilar storage batteries) when battery tension signal VBat falls to about 2 volts.For example, storage battery detection/control circuit 2015 can utilize the rated load at least about 10M-ohms to come battery tension is sampled.
Logical relation between (comprising the controller of Figure 10 and circuit 2001 shown in Figure 11) input and the output is provided in the table of Figure 12.Index raises and fall (by the capacitor of transistor charging and discharge) can be enough to drive the electrostatically actuated Valve core blade.But, can provide waveform shaping (for example deliberate toning and sedimentation voltage) according to some embodiments of the present invention.In the table of Figure 12, X represents " paying no attention to " state to each signal.But the one or both of input control signal A and/or B is being represented under the situation of " paying no attention to " state, can all input control signal be urged to high pressure or low pressure at any time.
Shown in the table of Figure 12,5 logical 3 cylinder port discharging configurations can be set by being arranged so that configuration signal C1 and C1 ground connection (being expressed as 0).When signal VDD exists when being in normal running, in response to represented input control signal A and B can drive high pressure output signal F1-F4 (wherein 0 expression valve open and 1 expression valve close) and LED output signal LBD-A and LED-B (wherein 0 expression is interrupted and 1 expression conducting).When configuration signal C3 ground connection and signal VDD are interrupted, can drive HV output signal F1-F4 makes to " 00 " state and wins and the 4th Valve core blade opens and second and third Valve core blade is closed (that is, two cylinder port are all discharged) and do not consider the state of input signal A and B.When configuration signal C3 is floating (being expressed as 1) and signal VDD when being interrupted, the end-state when HV output signal F1-F4 can remain on its outage and do not consider the state of input signal A and B.
Can the 5 logical whole occlusion configuration of 3 bit ports be set configuration signal C2 unsteady (being expressed as 1) by being arranged so that configuration signal C1 ground connection (being expressed as 0).When signal VDD exists when being in normal running, in response to represented input control signal A and B can drive high pressure output signal F1-F4 (wherein 0 expression valve open and 1 expression valve close) and LED output signal LED-A and LED-B (wherein 0 expression is interrupted and 1 expression conducting).When configuration signal C3 ground connection and signal VDD are interrupted, can drive HV output signal F1-F4 and make the full spool sheet all close (that is, two cylinder port are all isolated with high pressure and discharge port) and do not consider the state of input signal A and B to " 00 " state.When configuration signal C3 is floating (being expressed as 1) and signal VDD when being interrupted, the end-state when HV output signal F1-F4 can remain on its outage and do not consider the state of input signal A and B.
Can 5 logical 3 bit port stimulation arrangement be set configuration signal C2 ground connection (being expressed as 0) by being arranged so that configuration signal C1 to float (being expressed as 1).When signal VDD exists when being in normal running, in response to represented input control signal A and B can drive high pressure output signal F1-F4 (wherein 0 expression valve open and 1 expression valve close) and LED output signal LED-A and LED-B (wherein 0 expression is interrupted and 1 expression conducting).When configuration signal C3 ground connection and signal VDD are interrupted, can drive HV output signal F1-F4 makes to " 00 " state and wins and the 4th Valve core blade is closed and second and third Valve core blade is opened (that is, two actuator port all are energized) and do not consider the state of input signal A and B.When configuration signal C3 is floating (being expressed as 1) and signal VDD when being interrupted, the end-state when HV output signal F1-F4 can remain on its outage and do not consider the state of input signal A and B.
Can by be arranged so that configuration signal C1 and C2 all float (being expressed as 1) 5 logical 2 configurations are set., only use an input control signal B here, so input control signal A is in " being indifferent to " state.When signal VDD exists when being in normal running, in response to represented input control signal B can drive high pressure output signal F1-F4 (wherein 0 expression valve open and 1 expression valve close) and LED output signal LED-A and LED-B (wherein 0 expression is interrupted and 1 expression conducting).When configuration signal C3 ground connection and signal VDD are interrupted, can drive HV output signal F1-F4 and make to " 0 " state and win and the 3rd Valve core blade opens and the second and the 4th Valve core blade is closed and do not consider the state of input signal A and B.When configuration signal C3 is floating (being expressed as 1) and signal VDD when being interrupted, the end-state when HV output signal F1-F4 can remain on its outage and do not consider the state of input signal A and B.
When voltage being applied to continuously the electrostatically actuated Valve core blade through during the time enough, the electric charge of accumulation can cause de-excitation to postpone.Because according to the application meeting needs of some embodiments of the present invention keep the set state a few days or even several weeks, so need reduce stored charge.By making the pole reversal of the voltage that applies in the case periodically, can reduce residual charge, reduce stored charge and related actuating delay thus.Because Valve core blade is electrostatic, so it is inessential to apply the polarity of voltage.In addition, if before Valve core blade can be opened fully, can make the pole reversal, then just can not cause substantial influence to the physical operations of device.
Therefore, circuit can be set is applied to the HV output signal that keeps closing the Valve core blade during the long period (for example, F1, F2, F3 and/or F4) the pole reversal reduces stored charge thus to make periodically.By being used in oscillator on the chip in the high voltage generating circuit 2013, can obtain to be used for the signal of the timing that polarity switches.The various functions of the absolute cycle of vibration for high voltage generating circuit can not be epochmaking.
Can determine minimum latency length (t between the pole reversal based on the characteristic of the Valve core blade that uses
Rev).Because during losing external power supply signal VDD, when accumulator positive is used to the maintaining valve chip status, also can produce stored charge, so also can between whole turnoff time, provide the pole reversal.Therefore, can when HV generative circuit 2013 is encouraged periodically, trigger the pole reversal between turnoff time, when outage, just not need continuous running thus the oscillator of HV generative circuit.In addition, if change state, then can before in response to new input control signal order, finish the pole reversal at pole reversal operation period input control signal A and B.
When a state switches to another state, product functionality can require sequence controller circuit 2019 to be provided at de-excitation and/or the excitation (describing with reference to figure 4A-Fig. 4 F for example) that is converted to controlled sequence during next serviceability from a serviceability.In other words, after control input signals changes and/or after state of energy changes, can need timing order to output state.In addition, sequencing is by a series of intermediatenesses term of execution that the pole reversal can being included in it.Particularly, sequencing can make by intermediateness and can not take place or even the specific output combination of moment, and make that giving the specific intermediateness sufficient time solves.
Shown in table among Figure 12, can there be 5 kinds of unique operation states (0101,1010,1111,0110 and 1001) of HV output signal F1-F4 and 14 kinds of different switching from a serviceability to another serviceability.Figure 13 illustrates example according to the order of the whole 14 kinds of change of state of some embodiments of the present invention.Figure 13 also shows and can be used to the order that (being each of five kinds of serviceability) carries out 5 kinds of pole reversal conversions.In addition, minimum time can be set and postpone (t before switching to the state that is expressed as runic
Del).In addition, during power-down mode, can produce the pole reversal sequencing of Figure 13.Therefore, the high-voltage signal conversion can utilize storage battery energy between turnoff time.
The Valve core blade that at first makes its pole reversal is through applying the state of zero volt to it.In Figure 13 with top line (promptly
Represent these zero cross points.(wherein a pair of two HV output signals (for example to realize the top line state at circuit 2001, F1 and F3 or F2 and F4) (for example share shared signal with respect to each, HComO or HComE) be driven with the zero potential difference) afterwards, can make the pole reversal of sharing shared signal right with respect to each HV output signal.If the HV output signal is initially in the high-voltage potential of sharing shared signal with respect to each when pole reversal operation beginning, then share shared signal at paired high pressure output signal of transition period and each and can all be pulled to high-voltage potential, the high pressure output signal can be pulled to the low pressure electromotive force of sharing shared signal with respect to each in pairs then.If the HV output signal is initially in the low pressure electromotive force of sharing shared signal with respect to each when pole reversal operation beginning, then share shared signal at paired high pressure output signal of transition period and each and can all be pulled to the low pressure electromotive force, the high pressure output signal can be pulled to the high-voltage potential of sharing shared signal with respect to each in pairs then.
Figure 14 A-Figure 14 B provides the input/output signal and/or the stitch summary of circuit 2001.Can a plurality of connection pads be set to adapt to the electromotive force current surge for some stitch.
Can be on whole I/O stitch of circuit 2001 be provided with in circuit 2001 and meet IEC61000-4-2, meeting rank is the Electrostatic Discharge circuit protection of 2 grades (4kV is used for contact).In addition, can be according to IEC61000-4-4, meeting 4 grades of ranks is that input control signal stitch (A and B) and power supply stitch (VDD and GND) are provided with to external electrical fast transient (EFT) circuit.Particularly, can between master battery signal/stitch VDD and ground signalling/stitch GND, be provided with transient voltage suppressor TVS (for example comprising two Zener diodes) with and/or reservoir capacitor SC.In addition, externally between power Vcc and master battery signal/stitch VDD diode RPI is set.In addition, can be input control signal/stitch A and B diode RP2 and RP3 are set.Figure 15 A-Figure 15 B provides the design parameter according to the circuit 2001 of some embodiments of the present invention.
Transient voltage suppressor TVS can comprise the zener diode that becomes that is connected between input power supply signal Vcc/VDD and the ground connection GND.The Zener diode setting of can under the situation that its negative electrode connects as shown in figure 11, connecting.Transient voltage suppressor TVS can provide overvoltage protection and can provide protection to avoid relatively large fast transient.Transient voltage suppressor TVS can arrange so that realize reliable protection from transients away from the circuit on the printed circuit board (PCB) of electronics sub-component 2001 relatively.Volume, thickness, width, length and the material of trace that can select to be used for electronics sub-component printed circuit board (PCB) is with the useful signal path that is provided for normal running and be provided at protection from transients under the elevated temperature.
Reversed polarity diode RP1 also can connect with circuit 2001 and be arranged between power supply stitch VDD and the external power supply Vcc (for example 24 volts of DC external power supplys), and reversed polarity diode RP1 can provide the reversed polarity protection to circuit 2001.Additional diodes RP2 and RP3 can be input control signal/stitch A and B provides the reversed polarity protection.Reservoir capacitor SC can be arranged in parallel with transient voltage suppressor TVS, and reservoir capacitor SC can provide lower pass-filter.Reservoir capacitor SC also can play the work of electric accumulator in order to be circuit 2001 power supplies during losing external energy.Lose external energy (that is, Vcc) afterwards, reservoir capacitor SC can provide sufficient electric current, make circuit 2001 can detect outage also/or begin to be converted to the power operation pattern and can switch to storage battery 3013 until circuit.
High voltage generating circuit 2013 can utilize resistor R L and/or RH and inductor LL and/or LH to generate high pressure HVDD to be used for inductive impulse to reservoir capacitor HVSC charging with generation.Resistor R L and/or RH can be used to limit maximum impulse voltage, do not damage the diverter circuit of high voltage generating circuit 2013 thus to generate sufficiently high voltage.
The speed that changes electric current in inductor depends on and applies the voltage that passes it.Can utilize equation: V=L (di/dt) to calculate the voltage that passes inductor, and provide the voltage that passes inductor can make the electric current by inductor raise with the slope.Electric current is provided and makes the switch of inductor current sedimentation if open to inductor, then because the electric current that passes inductor is because of inductor characteristic V=Ldi/dt can not change immediately, the voltage that passes inductor will raise.When opening switch, the voltage that passes inductor will be increased to the level that is enough to force electric current to flow immediately.By resistor R L and RH being set in parallel, can limit the possibility that the maximum current that is produced by inductor also can reduce to damage circuit 2001 with inductor LL and LH.As shown in figure 10, the inductive impulse circuit that comprises inductor LH and resistor R H can be used to charge to high pressure reservoir capacitor HVSC by charging diode CD1.Between turnoff time, comprise that the inductive impulse circuit of inductor LL and resistor R L can be used to charge to reservoir capacitor SC by charging diode CD2.
For example above controller of being discussed with reference to figure 5 and Figure 10-13, Figure 14 A-14B and Figure 15 A-15B and/or control circuit can be configured to the operator scheme that provides different.As above described with reference to Figure 12, can utilize configuration to select stitch (for example, C1, C2, C3 etc.) to select different mode (for example, 5 logical 3 cylinder port dischargings, 5 logical 3 bit ports all block, 5 logical 3 cylinder port excitations, 5 logical 2 etc.).Particularly, by optionally make configuration select stitch ground connection also/or float, can be between erecting stage and/or select to be used for the specific operation pattern of controller afterwards.For example, can select during manufacture before the sealing controller, its configuration can not change after making thus.Alternately, can be set to the visit approach that stitch is selected in configuration, the end user just can change its configuration at any time thus.
Alternately, controller can comprise and is used for the stored configuration selective value Nonvolatile programmable memory of (being used to select the specific operation pattern).Can for example use three bits of memory able to programme to provide configuration shown in Figure 12 to select.In addition, can be to memory reprograming able to programme to store different configuration selective values.As example, can utilize the different configuration selective value of universal serial bus slave controller outer installment.
In addition or alternately, controller can comprise the Nonvolatile programmable memory that is used to store computer readable program code (defining the operation of controller), and during manufacture and/or the Nonvolatile programmable memory that can be reprogrammed afterwards.Universal serial bus for example can be set on controller connect, after making, can utilize universal serial bus to connect thus the memory reprograming.
Controller for example can be set to provide as above with reference to the described different mode of Figure 12.In addition or alternately, can be provided with also/or reset other aspects of valve operation.For example, controller can be set and think that valve provides different timing and/or delays in proper order; Different valve orders are provided; Different actuator acceleration distribution maps are provided; Different actuator velocity distribution maps are provided; Deng.Also can " during the spare time " change the controller configuration, for example comprise thus that the machine of controller and Controlled valve can change its operation by connecting the reprograming controller via universal serial bus.
As shown in figure 16, can utilize electrostatically actuated valve to be provided for the control valve 1601 of machinery 5 logical guiding valves 1651 according to embodiments of the invention.Particularly, the main body 1653 of guiding valve 1651 can comprise first and second actuator port 1655a-1655b, first and second discharge port 1657a-1657b and high pressure supply port 1659.In addition, spool 1661 can be set in the inner chamber of main body 1653, and but spring 1665 bias voltage spools are to default conditions, and discharge port 1657b is communicated with actuator port 1655b fluid thus, and high pressure supply port 1659 is communicated with actuator port 1655a fluid thus.In addition, at an end of spool 1661 spring 1665 is set, and control port 1667 is arranged in the main body 1653 in the second end place of spool 1661.
Shown in Figure 16 was further, control valve can comprise three chamber 1603a-1603c that separated by electrostatically actuated Valve core blade 1605a-1605b.Particularly, Valve core blade 1605a is set, and the fluid from high pressure supply chamber 1603a to control chamber 1603b flows with obstruction or permission, and Valve core blade 1605b is set, and the fluid from control chamber 1603b to low pressure discharge chamber 1603c flows with obstruction or permission.Controller 1609 is set with control valve chip 1605a-1605b, with the spool 1661 of controlling guiding valve 1651 subsequently.
Under first state, controller 1609 can apply fully high pressure reduction to Valve core blade 1605a, its flap is closed thus, block fluid stream thus from high pressure supply chamber 1603a to control chamber 1603b, and controller 1609 can apply fully low pressure reduction to Valve core blade 1605b, its flap is opened thus, allows the fluid stream from control chamber 1603b to low pressure discharge chamber 1603c thus.Under first state, provide thus from control port 1667 by control chamber 1603b, by Valve core blade 1605b and arrive the low pressure fluid discharged by low pressure discharge chamber 1603c and be communicated with.Control end to spool 1661 applies low pressure thus, and spring 1665 promotes spool 1661 to default conditions shown in Figure 16 thus.By default, between discharge port 1657b and actuator port 1655b and between high pressure supply port 1659 and the actuator port 1655a fluid being set is communicated with.
Under second state, controller 1609 can apply fully low pressure reduction to Valve core blade 1605a, its flap is opened thus, allow fluid stream thus from high pressure supply chamber 1603a to control chamber 1603b, and controller 1609 can apply fully high pressure reduction to Valve core blade 1605b, its flap is closed thus, blocks the fluid stream from control chamber 1603b to low pressure discharge chamber 1603c thus.Under second state, provide thus from the high pressure supply by high pressure supply chamber 1603a, be communicated with by Valve core blade 1605a and by the fluid that control chamber 1603b arrives control port 1667.Control end to spool 1661 applies high pressure thus, and antagonistic spring 1665 promotes spool to excited state thus.Under excited state, between discharge port 1657a and actuator port 1655a and between high pressure supply port 1659 and the actuator port 1655b, fluid is set and is communicated with.
In addition, can be to opening and the flap of cut-off valve chip 1605a-1605b carries out timing, two Valve core blades are not opened at one time thus.Also can time lag is set between another valve flow, reduce pressure spike etc. closing a valve and open to improve fluid.For example can with reference to figure 1-3, Fig. 5, Fig. 6 B and Figure 10-15 as above be provided with Valve core blade 1605a-1605b, controller 1609, with and/or the housing of control valve 1601.Though high pressure supply port and the low pressure discharge port end that is in control valve 1601 shown in Figure 16 also can provide other configurations (for example being positioned at a side of control valve).
As shown in figure 17, can utilize electrostatically actuated valve that pressure regulator 1701 is set according to embodiments of the invention.Particularly, the main body 1703 of pressure regulator 1701 can comprise three chamber 1707a-1707c that separated by electrostatically actuated Valve core blade 1709a-1709b.Particularly, Valve core blade 1709a is set flows from high pressure supply chamber 1707a to the fluid of regulating chamber 1707b, and Valve core blade 1709b is set to block or to allow from regulating the fluid stream of chamber 1707b to low pressure discharge chamber 1707c to block or to allow.In addition, can in regulating chamber 1707b, pressure transducer 1711 be set.Controller 1705 can be set to come control valve chip 1709a-1709b, in regulating the chamber, keep the pressure that needs thus in response to the pressure signal that is produced by pressure transducer 1711.
If the pressure of regulating in the 1707b of chamber drops to below the low pressure threshold, then controller 1705 can apply fully low pressure reduction to Valve core blade 1709a, its flap is opened thus, allow thus from high pressure supply chamber 1707a to the fluid stream of regulating chamber 1707b, and controller 1705 can apply fully high pressure reduction to Valve core blade 1709b, its flap is closed thus, blocks thus from regulating the fluid stream of chamber 1707b to low pressure discharge chamber chamber 1707c.Be provided with thus from the high pressure supply by high pressure supply chamber 1707a, by Valve core blade 1709a and by regulating chamber 1707b to the fluid connection of regulating port 1721.
If the pressure of regulating in the 1707b of chamber rises to more than the HVT high voltage threshold, then controller 1705 can apply fully high pressure reduction to Valve core blade 1709a, its flap is closed thus, block thus from high pressure supply chamber 1707a to the fluid stream of regulating chamber 1707b, and controller 1705 can apply fully low pressure reduction to Valve core blade 1709b, its flap is opened thus, allows thus from regulating the fluid stream of chamber 1707b to low pressure discharge chamber chamber 1707c.Be provided with thus from regulate port 1721 by regulate chamber 1707b, by Valve core blade 1709b, and be communicated with to the low pressure fluid discharged by low pressure discharge chamber 1707c.
In addition, can be to opening and the flap of cut-off valve chip 1707a-1707b carries out timing, two Valve core blades are not opened at one time thus.Also can time lag is set between another valve flow, reduce pressure spike etc. closing a valve and open to improve fluid.For example can with reference to figure 1-3, Fig. 5, Fig. 6 B and Figure 10-15 as above be provided with Valve core blade 1707a-1707b, controller 1705, with and/or the housing 1703 of pressure regulator 1701.Though high pressure supply port and the low pressure discharge port end that is in control valve 1701 shown in Figure 17 also can provide other configurations (for example being positioned at a side of pressure regulator).
Though specifically illustrate and described the present invention with reference to embodiment, it will be apparent to one skilled in the art that under the situation that does not break away from the spirit that defines by claims and equivalent thereof and scope, can carry out change on each form and the details to the present invention.
Claims (65)
1. valve assembly comprises:
Define the main casing at least three chambeies, first chamber is set to be coupled to high pressure supply port, and second chamber is set to be coupled to output port, and the 3rd chamber is set to be coupled to the low pressure discharge port;
First electrostatically actuated valve between described first chamber and described second chamber, wherein said first electrostatically actuated valve allow in response to first electrical signal or block described first chamber in fact to be communicated with fluid between described second chamber; And
Second electrostatically actuated valve between described second chamber and described the 3rd chamber, wherein said second electrostatically actuated valve allow in response to second electrical signal or block described second chamber in fact to be communicated with fluid between described the 3rd chamber.
2. valve assembly as claimed in claim 1, wherein said main casing also defines: be set to the 5th chamber that is coupled to the 4th chamber of second output port and is set to be coupled to the low pressure discharge port, described valve also comprises:
The 3rd electrostatically actuated valve between described first chamber and described the 4th chamber, wherein said the 3rd electrostatically actuated valve allow in response to the 3rd electrical signal or block described first chamber in fact to be communicated with fluid between described the 4th chamber; And
The 4th electrostatically actuated valve between described the 4th chamber and described the 5th chamber, wherein said the 4th electrostatically actuated valve allow in response to the 4th electrical signal or block described the 4th chamber in fact to be communicated with fluid between described the 5th chamber.
3. valve assembly as claimed in claim 2, the wherein said first, second, third and the 4th electrostatically actuated valve is arranged on the same substrate.
4. valve assembly as claimed in claim 2, wherein said the 3rd chamber and described the 5th chamber are coupled to same low pressure discharge port.
5. valve assembly as claimed in claim 2, wherein said the 3rd chamber and described the 5th chamber are coupled to different low pressure discharge port.
6. valve assembly as claimed in claim 1, wherein said first and second electrostatically actuated valve comprise first Valve core blade and second Valve core blade separately, and wherein each Valve core blade all comprises at least one electrostatically actuated flap thereon respectively.
7. valve assembly as claimed in claim 6, wherein said first Valve core blade and described second Valve core blade are spaced apart.
8. valve assembly as claimed in claim 6, wherein said first Valve core blade and described second Valve core blade are not parallel.
9. valve assembly as claimed in claim 6, wherein said first Valve core blade comprise,
Substrate, its have first and second apparent surface, at least one hole by described substrate between described first surface and the described second surface, with and on paired input pad; And
At least one electrostatically actuated flap on the described substrate, wherein said at least one flap is associated with described at least one hole in the described substrate, described at least one flexible flap wherein is set to open in response to described first electrical signal that is applied to described paired input pad or to block described at least one hole in fact; And wherein said substrate is supported in the described housing in its edge, the core of the described first surface of described substrate and described second surface is exposed to described first chamber and described second chamber respectively thus, and provides fluid-tight thus between the edge of described housing and described substrate.
10. valve assembly as claimed in claim 1, wherein said main casing also defines: be set to the 5th chamber that is coupled to the 4th chamber of second output port and is set to be coupled to the low pressure discharge port, described valve assembly also comprises:
The 3rd electrostatically actuated valve between described first chamber and described the 4th chamber, wherein said the 3rd electrostatically actuated valve allow in response to the 3rd electrical signal or block described first chamber in fact to be communicated with fluid between described the 4th chamber;
The 4th electrostatically actuated valve between described the 4th chamber and described the 5th chamber, wherein said the 4th electrostatically actuated valve allow in response to the 4th electrical signal or block described the 4th chamber in fact to be communicated with fluid between described the 5th chamber; And
Be provided with for each electrostatically actuated valve and produce described first, second, third and the controller of the 4th electrical signal.
11. valve assembly as claimed in claim 1 also comprises:
Be provided with the controller that produces described first and second electrical signal for each electrostatically actuated valve.
12. valve assembly as claimed in claim 11, wherein said controller comprises the programming memory that first operational order that defines first sequential operation arranged and define second operational order of second sequential operation, wherein selects in described first and second operational order one to operate in preset time.
13. valve assembly as claimed in claim 12 is wherein selected described first operational order using during the very first time, and is selected described second operational order to use at second time durations.
At least one electric energy produces described electrical signal in storage battery, capacitor, fuel cell, emitting isotope 14. valve assembly as claimed in claim 11, wherein said controller are used to.
15. valve assembly as claimed in claim 11, wherein said controller comprises rechargable power supplies, and wherein said controller is used to produce described electrical signal from the electric energy of described rechargable power supplies.
16. valve assembly as claimed in claim 11, wherein said controller utilize external power supply to produce described electrical signal.
17. valve assembly as claimed in claim 16, wherein said external power supply comprise be in the DC power supply of about 3 volts of DC to about 48 volts of DC scopes with and/or be in the AC power supplies of about 24 volts of AC to about 240 volts of AC scopes.
18. valve assembly as claimed in claim 11, wherein said controller comprise the transistor with power supply and coil series coupled, wherein said transistor and described coil are provided as the described electrical signal with voltage higher than described power supply and produce electric energy.
19. valve assembly as claimed in claim 11, the capacitive charge pump that wherein said controller comprises, it is provided as the described electrical signal with voltage higher than described power supply and produces electric energy.
20. valve assembly as claimed in claim 11, wherein said controller comprise the transistor with power supply and transformer series coupled, wherein said transistor and described transformer are configured to produce electric energy for the described electrical signal with voltage higher than described power supply.
21. valve assembly as claimed in claim 11, wherein said controller comprises the transistor with power supply and auto-transformer series coupled, and wherein said transistor and described auto-transformer are provided as the described electrical signal with voltage higher than described power supply and produce electric energy.
22. valve assembly as claimed in claim 11, wherein said controller utilize electric energy to produce described electrical signal, utilize that at least one produces described electric energy in light, heat and/or the mechanical vibration.
23. valve assembly as claimed in claim 11, wherein said controller utilize electric energy to produce described electrical signal, utilize the environmental energy source near described controller to produce described electric energy.
24. valve assembly as claimed in claim 22, wherein said controller utilize, and at least one produces described electric energy in light, heat and/or the mechanical vibration, and utilizes wherein that at least one stores described electric energy in storage battery, capacitor and/or the inductor.
25. valve assembly as claimed in claim 1 also comprises:
Be provided with the controller that produces described electrical signal for described each electrostatically actuated valve, wherein said controller comprises the memory that is set to be programmed first operational order that defines first sequential operation and is programmed second operational order that defines second sequential operation.
26. valve assembly as claimed in claim 1 also comprises:
Be set to described each electrostatically actuated valve and produce the controller of described electrical signal, described controller also is provided with first electromotive force that applies as described first electrical signal to activate described first electrostatically actuated valve, blocking described first chamber thus in fact is communicated with fluid between described second chamber, and removal is as first electromotive force of described first electrical signal, and after removing described first electromotive force, apply second electromotive force as described first electrical signal to activate described first electrostatically actuated valve, block described first chamber thus in fact and be communicated with fluid between described second chamber, wherein said first electromotive force and described second electromotive force have reverse polarity.
27. valve assembly as claimed in claim 1, wherein said first electrostatically actuated valve comprises the Valve core blade that has the electrostatically actuated flap on it, and described valve assembly also comprises:
Be provided with the controller that produces described electrical signal for described each electrostatically actuated valve, described controller also be set to when described flap branch is kept apart described Valve core blade, apply have first magnitude as first electromotive force of described first electrical signal described flap is actuated to the position of more contiguous described substrate, and after described flap is actuated to the described position of more contiguous described substrate, apply have second magnitude as second electromotive force of described first electrical signal described flap is maintained the described position of more contiguous described substrate, wherein said first magnitude is greater than described second magnitude.
28. valve assembly as claimed in claim 1, wherein said first and second electrostatically actuated valve is arranged on the same substrate.
29. valve assembly as claimed in claim 1, wherein said first and second electrostatically actuated valve is separately positioned on first substrate and second substrate.
30. valve assembly as claimed in claim 29, wherein said first and second substrate is set to not parallel configuration.
31. valve assembly as claimed in claim 1 also comprises:
Be set to measure the pressure transducer of described second cavity pressure; And
Be coupled to described pressure transducer and be coupled to the controller of described first and second electrostatically actuated valve, it is that described each electrostatically actuated valve produces described first electrical signal and described second electrical signal to keep the pressure in described second chamber that wherein said controller is set in response to the described pressure of measuring in described second chamber.
32. valve assembly as claimed in claim 1 also comprises:
Guiding valve, it comprises the supply port that defines center cavity and be coupled to described center cavity and the main body of actuator port, and be included in spool in the described center cavity, wherein said spool in described center cavity primary importance and the second place between removable, thus in the described primary importance of described spool, provide fluid to be communicated with between described supply port and the described actuator port, and thus in the described second place of described spool, be communicated with in blocking fluid in fact between described supply port and the described actuator port, and an end in wherein said chamber is communicated with the described second chamber fluid; And
Be coupled to the controller of described first and second electrostatically actuated valve, wherein said controller is provided to produce described first electrical signal and described second electrical signal to control described spool moving between the described primary importance and the described second place for described each electrostatically actuated valve.
33. a mass flow controller comprises:
The main body that comprises high pressure supply chamber and low pressure output cavity;
The Valve core blade of separating described high pressure supply chamber and described low pressure output cavity, described Valve core blade comprise in the face of first side in described high pressure supply chamber, in the face of second side of described low pressure output cavity, in the hole between described first side and described second side and with the related electrostatically actuated valve member in described hole, wherein, described valve member is set to open or block described hole in fact in response to the electrical signal that is applied to it; And
Controller, described controller are set to control opening and closing to keep the mass flow rate by described Valve core blade described valve member.
34. mass flow controller as claimed in claim 33, wherein said valve member comprises flexible flap.
35. mass flow controller as claimed in claim 33, wherein said controller be set to first interim provide open and close at least one valve member greater than 0% and less than 100% the first empty accounting, and second interim provide open and close at least one valve member greater than 0% and less than 100% the second empty accounting, the wherein said first empty accounting is different from the described second empty accounting.
36. mass flow controller as claimed in claim 35, the wherein said first empty accounting are greater than the described second empty accounting, described thus Valve core blade provided than low flow resistance in described first interim.
37. mass flow controller as claimed in claim 33, wherein said Valve core blade comprises a plurality of holes and each valve member, wherein said controller is configured such that the described valve member of the quantity of winning opens in first interim, and making the described valve member of second quantity open in second interim, the described valve member of wherein said first quantity and the described valve member of described second quantity are inequality.
38. mass flow controller as claimed in claim 37, wherein said controller is set to provide first voltage in described first interim to whole described valve members, and providing second voltage to whole described valve members in described second interim, wherein said first voltage and described second voltage are inequality.
39. mass flow controller as claimed in claim 37, described first quantity of wherein opening valve member is greater than described second quantity of opening valve member, and described thus Valve core blade provided than low flow resistance in described first interim.
40. mass flow controller as claimed in claim 33, wherein said controller is set to provide first voltage of closing described valve member, provide and open second voltage of described valve member to primary importance, and provide and open the tertiary voltage of described valve member to the second place, the described valve member that is in the described second place thus lower flow resistance when providing and being in described primary importance than described valve member, and wherein said first voltage is greater than described second voltage, and wherein said second voltage is greater than described tertiary voltage.
41. mass flow controller as claimed in claim 33, also comprise the first sensor and second sensor, described first sensor is set to measure the state in described high pressure supply chamber, described second sensor is set to measure the state of described low pressure output cavity, wherein said controller is set in response to measurement result control the opening and closing described each valve member from described first and second sensor.
42. mass flow controller as claimed in claim 41, each is set to measure respectively in temperature and/or the pressure at least one wherein said first sensor and described second sensor.
43. method of controlling the static valve, described static valve comprises substrate and the electrostatically actuated valve member that wherein has the hole, wherein said valve member is associated with described hole in the described substrate, and wherein said valve member is set to open or close in fact described hole in response to the electrical signal that is applied to it, and described method comprises:
Open and close described electrostatically actuated valve member, described thus valve provides first-class dynamic resistance in first interim, provide second flow resistance in second interim, and provide the 3rd flow resistance in the 3rd interim, wherein said first, second, and the 3rd resistance inequality.
44. method as claimed in claim 43, wherein said valve member comprises flexible flap.
45. method as claimed in claim 43 is wherein opened and is closed described electrostatically actuated valve member and comprises,
First interim provide open and close described valve member greater than 0% and less than 100% the first empty accounting; And
Second interim provide open and close described valve member greater than 0% and less than 100% the second empty accounting, the wherein said first empty accounting is different from the described second empty accounting.
46. method as claimed in claim 45, the wherein said first empty accounting are greater than the described second empty accounting, described thus Valve core blade provided than low flow resistance in described first interim.
47. method as claimed in claim 45, wherein provide the step of described first-class dynamic resistance to comprise first voltage is provided to described valve member, wherein provide the step of described second flow resistance to comprise second voltage is provided to described valve member, wherein provide the step of described the 3rd flow resistance to comprise tertiary voltage is provided, and wherein said first, second and third voltage is inequality to described valve member.
48. method as claimed in claim 43, wherein said substrate wherein have a plurality of holes and a plurality of valve members respectively, the step of opening and closing of wherein modulating described a plurality of electrostatically actuated valve members comprises,
Provide the described valve member of first quantity to open in described first interim; And
Provide the described valve member of second quantity to open in described second interim, wherein described first quantity of valve member and described second quantity are inequality.
49. method as claimed in claim 48, wherein provide opening of the first quantity valve member to be included in described first interim and provide first voltage to described a plurality of valve members, wherein provide opening of the second quantity valve member to be included in described second interim and provide second voltage, and wherein said first voltage and described second voltage are inequality to described a plurality of valve members.
50. method as claimed in claim 48, described first quantity of wherein opening valve member is greater than described second quantity of opening valve member, and described thus Valve core blade provided than low flow resistance in described first interim.
51. method as claimed in claim 43 also comprises:
Measure the state at least one side of described substrate, the step of opening and closing of wherein modulating described electrostatically actuated valve member comprises, in response to described measurement state modulation opening and closing described electrostatically actuated valve member.
52. method as claimed in claim 51, wherein said measurement state comprise temperature and/or pressure at least one.
53. method as claimed in claim 51 is wherein opened and is closed described electrostatically actuated valve member and comprises the mass flow rate of keeping by described valve.
54. the method for an operation of electrostatic actuator, described electrostatically actuated device comprises the flexible member that is positioned at the fixed electrode on the substrate and has flexible electrode, and described method comprises:
Between described fixed electrode and described flexible voltage, apply first electromotive force to activate described flexible member;
After applying described first electromotive force, remove the electromotive force between described fixed electrode and the described flexible electrode; And
After removing electromotive force, between described fixed electrode and described flexible voltage, apply second electromotive force, wherein said first electromotive force and described second electromotive force have opposite polarity.
55. the method for an operation of electrostatic actuator, described electrostatically actuated device comprises the flexible member that is positioned at the fixed electrode on the substrate and has flexible electrode, and described method comprises:
When separating with described substrate, described flexible member between described fixed electrode and described flexible voltage, applies first electromotive force to activate the position of described flexible member to more approaching described substrate with first magnitude; With
Activating described flexible member to the described position of more approaching described substrate, apply second electromotive force with second magnitude and be in the described position of more approaching described substrate to keep described flexible member between described fixed electrode and described flexible voltage, wherein said first magnitude is greater than described second magnitude.
56. a valve assembly comprises:
Define the main casing at least three chambeies, first chamber is set to be coupled to high pressure supply port, and second chamber is set to be coupled to output port, and the 3rd chamber is set to be coupled to the low pressure discharge port;
The first photolithographic fabrication valve between described first chamber and described second chamber, the wherein said first photolithographic fabrication response valve allows or blocks described first chamber in fact to be communicated with fluid between described second chamber in first electrical signal; And
The second photolithographic fabrication valve between described second chamber and described the 3rd chamber, the wherein said second photolithographic fabrication response valve allows or blocks described second chamber in fact to be communicated with fluid between described the 3rd chamber in second electrical signal.
57. valve assembly as claimed in claim 56, the wherein said first photolithographic fabrication valve comprise by at least one substrate of making in glass, silicon and/or the quartz, and have at least one hole by described substrate.
58. valve assembly as claimed in claim 57, the wherein said first photolithographic fabrication valve comprise contiguous at least one electrostatically actuated valve member that passes through described at least one hole of described substrate.
59. valve assembly as claimed in claim 58, wherein said valve member comprises flexible flap.
60. a method that forms valve assembly comprises:
The main casing at least three chambeies is defined in formation, and first chamber is set to be coupled to high pressure supply port, and second chamber is set to be coupled to output port, and the 3rd chamber is set to be coupled to the low pressure discharge port;
Arrange first valve between described first chamber and described second chamber, described thus first response valve allows or blocks described first chamber in fact to be communicated with fluid between described second chamber in first electrical signal; And
Arrange second valve between described second chamber and described the 3rd chamber, described thus second response valve allows or blocks described second chamber in fact to be communicated with fluid between described the 3rd chamber in second electrical signal.
61. method as claimed in claim 60, the wherein said first valve photoetching is formed on described first substrate, and the wherein said second valve photoetching is formed on described second substrate.
62. method as claimed in claim 60, wherein said first substrate comprise in glass, silicon and/or the quartz at least one, and wherein said first substrate comprises at least one hole by it.
63. method as claimed in claim 62, wherein the photoetching step that forms described first valve comprises that contiguous described at least one hole by described substrate forms at least one electrostatically actuated valve member.
64. as the described method of claim 63, wherein said at least one electrostatically actuated valve member comprises at least one flexible flap.
65. method as claimed in claim 60 wherein forms described main casing and comprises molded described main casing.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US59066904P | 2004-07-23 | 2004-07-23 | |
| US60/590,483 | 2004-07-23 | ||
| US60/590,669 | 2004-07-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200580024574 Pending CN101002029A (en) | 2004-07-23 | 2005-07-22 | Microvalve assemblies and related methods |
| CN 200580024642 Pending CN101002040A (en) | 2004-07-23 | 2005-07-22 | Methods of operating microvalve assemblies and related structures and related devices |
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| CN 200580024574 Pending CN101002029A (en) | 2004-07-23 | 2005-07-22 | Microvalve assemblies and related methods |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104937320A (en) * | 2012-12-05 | 2015-09-23 | 智慧能量有限公司 | Microvalve |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8662468B2 (en) * | 2008-08-09 | 2014-03-04 | Dunan Microstaq, Inc. | Microvalve device |
| JP5641374B2 (en) * | 2012-05-31 | 2014-12-17 | セメス株式会社ＳＥＭＥＳ ＣＯ．， Ｌｔｄ | Substrate processing equipment |
| WO2014023002A1 (en) | 2012-08-09 | 2014-02-13 | 浙江盾安人工环境股份有限公司 | Microvalve device and fluid flow control method |
| CA2950889C (en) * | 2014-06-20 | 2020-10-06 | Numatics, Incorporated | Zoned manifold assembly for solenoid valve control system |
| KR101846190B1 (en) * | 2015-12-23 | 2018-05-04 | 주식회사 리크릭스 | Self-powered electronic components and flexible device comprising the same |
| CN110285039A (en) * | 2019-08-01 | 2019-09-27 | 黄石东贝电器股份有限公司 | A kind of exhaust valve plate and its refrigeration compressor with diversion function |
| DE102019006327A1 (en) * | 2019-09-09 | 2021-03-11 | Drägerwerk AG & Co. KGaA | Metering device and method for setting a metering of a fluid |
-
2005
- 2005-07-22 CN CN 200580024574 patent/CN101002029A/en active Pending
- 2005-07-22 CN CN 200580024642 patent/CN101002040A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104937320A (en) * | 2012-12-05 | 2015-09-23 | 智慧能量有限公司 | Microvalve |
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| CN101002029A (en) | 2007-07-18 |
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