CN1005928B - Photoextinction-luminosity compatible elliptic polarizer - Google Patents
Photoextinction-luminosity compatible elliptic polarizer Download PDFInfo
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- CN1005928B CN1005928B CN87104793.4A CN87104793A CN1005928B CN 1005928 B CN1005928 B CN 1005928B CN 87104793 A CN87104793 A CN 87104793A CN 1005928 B CN1005928 B CN 1005928B
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- 238000012360 testing method Methods 0.000 claims description 30
- 230000010287 polarization Effects 0.000 abstract description 18
- 230000003287 optical effect Effects 0.000 abstract description 5
- 230000008033 biological extinction Effects 0.000 abstract 2
- 238000005259 measurement Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000000711 polarimetry Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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Abstract
The present invention relates to a novel extinction-luminosity compatible elliptical polarizer which is mainly characterized in that the polarizer uses a rotary 1/4 wave plate (Q) positioned in the front optical path of a sample for the phase modulation of light beams. When the polarizer is used for measuring luminosity, the measuring accuracy of the polarization parameter delta is enhanced by 11 to 31 times, and the polarizer is convenient to operate. By using the principle of the present invention, the extinction type elliptical polarizer can be refitted into an instrument with the compatibility of functions of extinction and luminosity. The refitted instrument can ensure the precision of the original two separated instruments, and the refitting expense is 20% of the expense for buying a luminosity type instrument.
Description
The present invention relates to a kind of ellipsometer test that has rotating element.
Ellipsometer test is a kind of exact instrument of measuring solid surface and thin film parameter, is widely used in technical fields such as electronics industry, optical thin film, galvanochemistry and biology.
Ellipsometer test commonly used is the ellipsometer test of single system, i.e. delustring formula ellipsometer test and luminosity formula ellipsometer test.
Delustring formula ellipsometer test mainly adopts the PQSA structure, measures the accuracy height of polarization parameter △, φ value, and error can be less than 0.005 °, but measuring speed is slow, is generally several minutes to more than 10 minutes.
Luminosity formula ellipsometer test, the polarimeter as Belgian BE280475 patent is reported often contains rotating element, has the fast advantage of measuring speed, Measuring Time is below 1 second, and its shortcoming is that the accuracy of measuring is low, and polarization parameter △, φ measuring error are 0.05 ° or lower.
Rev.Sci Instru.v56(11 in 1985) PP1995 has reported a kind of ellipsometer test that adopts the delustring-luminosity compatible of rotatory polarization device, the structure of this instrument is: be reflecting surface with the sample surfaces, one side of incident light is arranged a polarizer, a quarter wave plate and a faraday modulator I, a catoptrical side is arranged an analyzer, a photomultiplier and a faraday modulator II.Its polarizer and quarter wave plate are installed on the scale of a direction-adjustable, and one of analyzer installation has on the scale of scrambler, and the orientation of this scale is regulated and adopted driven by servomotor, and is also available simultaneously manual.When measuring polarization parameter △ and φ, light beam is successively by the polarizer, quarter wave plate, faraday modulator I, through the testing sample surface reflection, by arriving photomultiplier behind faraday modulator II, the analyzer, and is for data processing by robot calculator.
When the quarter wave plate orientation is fixed in 45 °, when the orientation of the polarizer and analyzer reached delustring by manual adjustments, this instrument just became the PQSA structure, can be used as delustring formula ellipsometer test and used.
If with faraday modulator I, II exit optical, quarter wave plate is fixed on 0 ° or 90 °, with 0.75 revolutions per second of rotational speed, by computer-aided analysis data determination polarization parameter △, φ value, then this instrument has the function of luminosity formula ellipsometer test with the analyzer of driven by servomotor.
The shortcoming of the ellipsometer test of the delustring-luminosity compatible of this rotation analyzer is:
1, utilize analyzer to be in when mensuration polarization parameter △ value is measured the △ value under the rotation status near △=0, the luminosity formula ellipsometer test of its error ratio single system increases 10～20 times, and one-shot measurement can't be determined the sign of △ value.Reason is that the positive and negative polarized light that depends on of polarization parameter △ is dextrorotation or left-handed, when utilizing the polarizer rotation, is actually and observes the light intensity of elliptically polarized light in each polarization direction, so can't differentiate its sense of rotation.At △=0(line polarisation) near, the increase of △ value will make elliptically polarized light minor axis light vector increase, but when the rotatory polarization device goes near the short-axis direction, light signal very easily is subjected to the interference of the big tens times major axis component of light intensity projection on this analyzer direction, so the time to measure the precision of △ very poor.
When 2, measuring polarization parameter △ value, faraday modulator I, II exit optical must be brought inconvenience to operation.
Task of the present invention is to design a kind ofly can accurately measure polarization parameter △ value, and the ellipsometer test of easy to operate delustring-luminosity compatible type.
The drawing explanation:
Fig. 1 is the structural representation of the ellipsometer test of delustring-luminosity compatible type of the present invention.The P-polarizer among the figure, Q-1/4 wave plate, A-analyzer, D-photomultiplier, S-testing sample, J-robot calculator processor.
Below in conjunction with description of drawings particular content of the present invention, but the content of invention is not limited to description of drawings.
As shown in Figure 1, surface with sample (S) is a reflecting surface, incident beam and folded light beam constitute the V-shape light path, incident angle is 60 ° or 70 °, arranging in a side of incident light that the polarizer (P), one of a band azimuth circle can be driven by servomotor rotates or with the quarter wave plate (Q) of manual adjustment to a certain constant bearing, a catoptrical side is arranged an analyzer (A) and a photomultiplier (D) and a microcomputer data processor (J) that is connected with photoelectricity multiplier tube (D) that has the phase place scale continuously.Light beam after testing sample (S) surface reflection, arrives photomultiplier (D) by analyzer by the polarizer (P), quarter wave plate (Q).
When quarter wave plate (Q) be positioned ± 45 °, with the orientation delustring of the manual adjustments polarizer (P) and analyzer (A), this instrument has the delustring formula ellipsometer test identical functions with single system when doing polarimetry.
When the polarizer (P) and analyzer (A) location in ± (10 °～80 °) scope, its optimum position be ± 45 °, makes quarter wave plate (Q) fast rotational, and instrument has the luminosity formula ellipsometer test identical functions with single system at this moment.Be cyclical variation by the signal of photomultiplier (D) output with the rotation of quarter wave plate (Q), this signal is carried out the size that fourier analysis is obtained the each harmonic component, therefrom obtain stokes parameter S
1, S
2, S
3, promptly can be converted into and be polarization parameter △ and φ, whole calculation process is carried out by microcomputer processor (J) and is made fast digital and shows.
This instrument is when measuring polarization parameter △ value, the luminosity formula ellipsometer test (as BE280475) that why has with the rotating wave plate of single system has identical precision, its reason is to rotate quarter wave plate (Q) light beam is produced position phase modulating action, can obtain stokes parameter S when measuring
3Value, and S
3Be directly proportional with Sin △, so can determine the sign of △ value uniquely.Secondly, during rotation quarter wave plate (Q), even △=0, then light intensity is not 0 also to the derivative of △, shows thus, as long as polarization parameter △ changes slightly, light intensity promptly has corresponding variation, so when calculating △, the situation that the △ measuring accuracy descends can not occur, overcome the big defective that the Campatible ellipsometer test of existing rotation analyzer exists thus according to the variable quantity of light intensity value.
Campatible ellipsometer test of the present invention compares with quasi-instrument with existing, has following advantage:
1, measures polarization parameter △ value accuracy height.When using as luminosity formula ellipsometer test, can measure the sign of △ value, precision can not descend when the slotted line polarized light, and this is to rely on the Campatible ellipsometer test of rotation analyzer unapproachable, the former measurement this moment is near △ ≠ 0, and the ratio of precision latter of △ is high 10～20 times.
2, easy and simple to handle.During two kinds of working method conversion, in light path, need not to increase and decrease any part, only need to regulate relevant optical element orientation, so more convenient than existing instrument.
3, to having the user of delustring formula ellipsometer test, according to the principle of the invention, only need acquire a rotation quarter wave plate (Q), be aided with general A/D interface and microcomputer, can make manual delustring formula instrument increase fast automatic test function.Its improvement expenses only is 20% of a luminosity formula instrument price, and continues to keep original high accuracy of measurement.
Embodiment
As shown in Figure 1, light source adopts the helium-neon laser of 1mw, the incident angle of the surperficial incident beam of sample (1) is 70 °, it is the film polaroid of φ 20mm that the polarizer (P) adopts clear aperture, be contained in precision and be on 0.01 ° the scale, quarter wave plate (Q) is shelled by mica, and by the worm and gear driven rotary, rotating speed is 1 revolutions per second with small-sized servomotor.It is φ 20mm film polaroid that analyzer (A) adopts clear aperture, is contained in precision and is on 0.01 ° the scale.Photomultiplier (D) adopts the GDB-230 type, and computing machine adopts the Apple-II.
Utilize the rotating shaft of quarter wave plate (Q) the delustring principle to be positioned 45 ° of orientation, the orientation with the manual adjustments polarizer (P) and analyzer (A) during measurement reaches delustring, obtains the value of polarization parameter △, φ from scale, is delustring formula duty this moment.
The polarizer (P) and analyzer (A) are positioned 45 ° of orientation, drive quarter wave plate (Q), every 1 week of rotation, △ of computing machine demonstration, φ value, be luminosity formula duty this moment.
The surface of sample (S) is for blank or be coated with multilayer film, and it is of a size of φ 30 * 5mm, makes with Kq glass.
Measured value to polarization parameter △, the φ of 3 kinds of actual samples is as follows:
Claims (2)
1, a kind of ellipsometer test of delustring-luminosity compatible, comprise light source, the polarizer, the phase place scale, quarter wave plate, analyzer and photomultiplier is characterized in that adopting one to be arranged in and can to allow the polarizer (P) and analyzer (A) orientation adjustment scope to be ± (10 °～80 °) during as luminosity formula apparatus measures by the quarter wave plate (Q) of servomotor driven rotary in the input path.
2, according to the described ellipsometer test of claim 1, when it is characterized in that as luminosity formula apparatus measures, the optimum position, orientation of the polarizer (P) and analyzer (A) is ± 45 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN87104793.4A CN1005928B (en) | 1987-07-10 | 1987-07-10 | Photoextinction-luminosity compatible elliptic polarizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN87104793.4A CN1005928B (en) | 1987-07-10 | 1987-07-10 | Photoextinction-luminosity compatible elliptic polarizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN87104793A CN87104793A (en) | 1988-01-06 |
| CN1005928B true CN1005928B (en) | 1989-11-29 |
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ID=4815019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN87104793.4A Expired CN1005928B (en) | 1987-07-10 | 1987-07-10 | Photoextinction-luminosity compatible elliptic polarizer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1005928B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1006016C2 (en) * | 1997-05-09 | 1998-11-10 | Univ Delft Tech | Ellipsometer with two lasers. |
-
1987
- 1987-07-10 CN CN87104793.4A patent/CN1005928B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CN87104793A (en) | 1988-01-06 |
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