CN100590222C

CN100590222C - Pliers for reducing coated film deposition

Info

Publication number: CN100590222C
Application number: CN200810082114A
Authority: CN
Inventors: 陈清炜; 吴烱隆
Original assignee: AU Optronics Corp
Current assignee: AU Optronics Corp
Priority date: 2008-03-03
Filing date: 2008-03-03
Publication date: 2010-02-17
Anticipated expiration: 2028-03-03
Also published as: CN101235481A

Abstract

The invention relates to a clamp which reduces film coating sediment and comprises a body and a clamping part. The clamping part extends from the body flexibly and is vertical to the body to clamp a clamped object. The clamping part comprises a base, a projecting margin and two grooves, wherein the base is connected with the body, the projecting margin is arranged on a first side of the base and extruded from the base, two grooves are respectively arranged on the second side of the base and a third side which is corresponded to the second side, the second side and the third side are practically vertical to the first side, and the grooves can be used to deposit the sediment and coating film which are accumulated when in sputtering to prevent a glass substrate from damaging.

Description

Reduce the clamp of coated film deposition

Technical field

The present invention relates to a kind of clamp that is used for film coating equipment, particularly a kind of clamp that is used to reduce coated film deposition.

Background technology

Thin Film Transistor-LCD (Thin Film Transistor Liquid Crystal Display, be also referred to as TFT-LCD) can be below 40ms because of having good demonstration image quality, reaction times, view and admire that angle can reach 160 degree, contrast ratio can surpass 150: 1 with first-class advantage, and be widely used in the electronic products such as comprising digital camera, liquid crystal projector, notebook computer, LCD monitor, be the main product of current display industry.TFT-LCD makes and can divide into the processing procedure of making thin film transistor (TFT) array on glass substrate, the applying and the processing procedures such as liquid crystal injection and liquid crystal display device module assembling of upper and lower panel glass.The thin film manufacture process of TFT-LCD comprises cleaning, film forming, resist coating, exposure, development, etching substantially, goes processes such as photoresist material, detection, finally forms thin film transistor (TFT) array at glass substrate through multiple tracks mask processing procedure.

See also Figure 1A to Fig. 1 C.Figure 1A is the stereographic map of the clamp that is used for film coating equipment of prior art.Figure 1B is the side-view of the clamp of direction shown in the arrow B among Figure 1A.Fig. 1 C is the side-view of the clamp of direction shown in the arrow C among Figure 1A.Clamp (Clamp) 10 comprises body 12 and clamping part 14.Clamping part 14 comprises outstanding edge 141 and outstanding edge 142 down, is used for clamping one gripping object, for example glass substrate.

See also Fig. 2, Fig. 2 causes the synoptic diagram of fragmentation when being clamp clamping glass substrate.The length that goes up outstanding edge 141 of clamp 10 is too short, easily causes coated film deposition in the sputter process.In other words, clamp 10 easily causes coated film deposition because of design problem, and after long-time the use, coated film deposition thickness is blocked up easily to produce collision with glass substrate 20 when making clamp 10 actions, and causes the unfilled corner of glass substrate 20, even the probability of increase glass substrate 20 fragmentations.

Summary of the invention

In view of this, the purpose of this invention is to provide a kind of clamp that is used for film coating equipment, to solve the problem of glass substrate unfilled corner and fragmentation.

The invention provides a kind of clamp that reduces coated film deposition, it comprises a body and a clamping part.This clamping part extends and perpendicular to this body from the bending of this body, and being used for clamping one gripping object, and this clamping part comprises a pedestal, outstanding edge and two grooves: this pedestal is connected in body; Should be located at one first side of pedestal and protrude in pedestal by outstanding edge; Two grooves are located at one second side of pedestal respectively and with respect to one the 3rd side of this second side, this second side and the 3rd side are in fact perpendicular to this first side.

The present invention is the clamp that is used for film coating equipment, and this clamp has long outstanding edge and two grooves.When carrying out the plated film flow process, cumulative plated film when described groove can be used to deposit sputter reduces because of the blocked up problem that causes glass substrate breach or fragmentation in coated film deposition zone, and in addition, long outstanding edge increase covers, and can reduce the coated film deposition of pedestal and groove.

For foregoing of the present invention can be become apparent, preferred embodiment cited below particularly, and be described in detail below in conjunction with the accompanying drawings.

Description of drawings

Figure 1A is the stereographic map of the clamp that is used for film coating equipment of prior art.

Figure 1B is the side-view of the clamp of direction shown in the arrow B among Figure 1A.

Fig. 1 C is the side-view of the clamp of direction shown in the arrow C among Figure 1A.

Fig. 2 causes the synoptic diagram of fragmentation when being clamp clamping glass substrate.

Fig. 3 A is the stereographic map that is used for the clamp of film coating equipment of the present invention.

Fig. 3 B is the side-view of the clamp of direction shown in the arrow D among Fig. 3 A.

Fig. 3 C is the side-view of the clamp of direction shown in the arrow E among Fig. 3 A.

Wherein, description of reference numerals is as follows:

10 clamps, 12 bodies

Outstanding edge on 14 clamping parts 141

142 times outstanding edge 20 glass substrates

100 clamps, 102 bodies

Top side 104 clamping parts of 1021 bodies

First side of 106 pedestals, 1061 pedestals

The 3rd side of second side, 1063 pedestals of 1062 pedestals

108 outstanding edge 110 grooves

The inboard of 1101 grooves

Embodiment

See also Fig. 3 A to Fig. 3 C.Fig. 3 A is the stereographic map that is used for the clamp of film coating equipment of the present invention.Fig. 3 B is the side-view of the clamp of direction shown in the arrow D among Fig. 3 A.Fig. 3 C is the side-view of the clamp of direction shown in the arrow E among Fig. 3 A.Clamp 100 is used for a film coating equipment, and this board can be the metal sputtering board, but is not limited thereto, and those of ordinary skill in the art also can adjust applied board according to the actual requirements.Clamp 100 is used for clamping and is sent to the gripping object of film coating equipment, and for example glass substrate only is for example herein, is not limited to this, and those of ordinary skill in the art also can change the classification of gripping object according to demand.Clamp 100 comprises body 102 and clamping part 104.Clamping part 104 is from body 102 bending extensions and perpendicular to body 102.Clamping part 104 comprises pedestal 106, outstanding edge 108 and two grooves 110.Described groove 110 can be used as the zone of coated film deposition, makes most plated film can be deposited on this, reduces coated film deposition easily contacting part with glass substrate, can avoid colliding the unfilled corner and the fragmentation that cause glass substrate.

With reference to figure 3B, pedestal 106 is connected in body 102, and outstanding edge 108 is located at first side 1061 of pedestal 106 and is protruded in pedestal 106.Two grooves 110 are located at second side 1062 of pedestal 106 respectively and with respect to the 3rd side 1063 of second side 1062, and second side 1062 and the 3rd side 1063 are in fact perpendicular to first side 1061.In preferred embodiment, two grooves 110 are with pedestal 106 symmetric offset spread and approximate rectangular, the volume of two grooves 110 is equal in fact in addition, but is not limited thereto, and those of ordinary skill in the art can adjust groove shapes and volume ratio according to the actual requirements.With reference to figure 3A and Fig. 3 C, arc angle can reduce the deposition of plated film, and the top side 1021 of body 102 can be an arc angle, and the inboard 1101 of two grooves 110 can be respectively an arc angle, but the invention is not restricted to this, also can adjust top side or inboard design according to the actual requirements.

See also Fig. 3 C, in preferred embodiment, an outer rim of pedestal 106 to an apical margin of outstanding edge 108 apart from the length of d1 in fact greater than 3mm, and consult Fig. 3 B and Fig. 3 C, the length L of two grooves 110, width W are in fact more than or equal to 1mm; The length d of pedestal 106 ₂Be at least 8 times of length L of groove 110.The width of pedestal 106 is about the width W of groove 110; The height of pedestal 106 is about the height H of groove 110, and height H also can be comparable to the thickness of gripping object in addition, so that clamp 100 can be seized gripping object on both sides by the arms.For example, the about 1mm of the length L of two grooves 110 of the present invention, the about 1mm of width W, the about 3.5mm of height H.The apical margin of outstanding edge 108 and the outer rim of pedestal 106 are apart from d ₁About 4mm, the length d of pedestal 106 ₂About 8mm, however the present invention with above-mentioned be described as the limit, those of ordinary skill in the art can adjust its size and ratio according to the actual requirements.

See also Figure 1A to Fig. 1 C and Fig. 3 A to Fig. 3 C, clamp 100 of the present invention scabbles the following outstanding edge 142 of the clamp 10 of prior art, can reduce coated film deposition thus in this, avoids producing with the glass substrate collision risk of unfilled corner and fragmentation.In addition, clamp 100 of the present invention cuts a groove 110 with the regional A of the clamp 10 of prior art, as the coated film deposition zone, make most coated film depositions pile groove 110 in both sides, reduce coated film deposition easily contacting part, can avoid colliding the unfilled corner and the fragmentation that cause glass substrate with glass substrate.In addition, compare with the outstanding edge 141 of going up of the clamp 10 of prior art, the outstanding edge 108 of clamp 100 of the present invention obviously increases than the length that goes up outstanding edge 141 of existing clamp 10, even can be twice originally, for example: the reducible 4mm of length of the outstanding edge 108 of clamp 100 of the present invention.In other words; clamp 100 has long outstanding edge 108; the length of outstanding edge 108 can increase coverage with protection pedestal 106 and groove 110, and it is reduced by the chance of coated film deposition, and such design can reduce because of the blocked up probability of damaging glass substrate in coated film deposition zone.

Than prior art, the clamp 100 that is used for the metal coating board of the present invention provides long outstanding edge 108 and two grooves 110.When carrying out the plated film flow process, cumulative metal when groove 110 can be used to deposit sputter reduces because of the blocked up probability of damaging glass substrate in coated film deposition zone.And long outstanding edge 108 increases covering protection to reduce the chance of coated film deposition.Clamp of the present invention more can reduce the blocked up problem of coated film deposition compared to the clamp of prior art, avoids producing with the glass substrate collision risk of unfilled corner and fragmentation.

Though the present invention has carried out explanation as above with the form of embodiment; yet it is not in order to limit the present invention; those of ordinary skill in the art under the premise without departing from the spirit and scope of the present invention; can carry out various changes and retouching to the present invention; and be modified to other different embodiment, so the scope that protection scope of the present invention should define with appended claim is as the criterion.

Claims

1. clamp that reduces coated film deposition comprises:

One body; And

One clamping part, it is from this body bending extension and perpendicular to this body, to be used for clamping one gripping object, this clamping part comprises:

One pedestal, it is connected in this body;

One outstanding edge, it is located at one first side of this pedestal and protrudes in this pedestal; And

Two grooves, it is located at one second side of this pedestal respectively and with respect to one the 3rd side of this second side, this second side and the 3rd side are in fact perpendicular to this first side.

2. clamp as claimed in claim 1, wherein the outer rim of this pedestal to the length of the distance of apical margin that should outstanding edge in fact greater than 3mm.

3. clamp as claimed in claim 1, the length of wherein said two grooves is in fact more than or equal to 1mm.

4. clamp as claimed in claim 1, the width of wherein said two grooves is in fact more than or equal to 1mm.

5. clamp as claimed in claim 1, wherein the length of this pedestal is at least the octuple of the length of a groove in described two grooves.

6. clamp as claimed in claim 1, wherein the width of this pedestal equals the width of a groove in described two grooves.

7. clamp as claimed in claim 1, wherein the height of this pedestal equals the height of a groove in described two grooves.

8. clamp as claimed in claim 1, wherein this clamp is used for a metal sputtering board.

9. clamp as claimed in claim 1, wherein this gripping object is a glass substrate.

10. clamp as claimed in claim 1, wherein the top side of this body is an arc angle.

11. clamp as claimed in claim 1, the inboard of wherein said two grooves are an arc angle.

12. clamp as claimed in claim 1, the volume of wherein said two grooves is equal in fact.