CN100590090C - Flat glass substrate attenuation clamp - Google Patents

Flat glass substrate attenuation clamp Download PDF

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Publication number
CN100590090C
CN100590090C CN200810056268A CN200810056268A CN100590090C CN 100590090 C CN100590090 C CN 100590090C CN 200810056268 A CN200810056268 A CN 200810056268A CN 200810056268 A CN200810056268 A CN 200810056268A CN 100590090 C CN100590090 C CN 100590090C
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Prior art keywords
glass substrate
card article
flat glass
substrate attenuation
groove
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CN200810056268A
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CN101215101A (en
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王道鹏
王乾旭
朱墨雨
史华威
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BOE Technology Group Co Ltd
BOE Hebei Mobile Display Technology Co Ltd
BOE Modern Beijing Display Technology Co Ltd
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BOE Technology Group Co Ltd
BOE Hebei Mobile Display Technology Co Ltd
BOE Modern Beijing Display Technology Co Ltd
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Priority to CN200810056268A priority Critical patent/CN100590090C/en
Publication of CN101215101A publication Critical patent/CN101215101A/en
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Abstract

The invention relates to a fixture for thinning flat panel glass substrates, comprising at least two frameworks and a plurality of interlocking strips, wherein each of the frameworks is disposed at interval with each other, and two ends of each interlocking strip is respectively connected with different frameworks. One or more grooves are disposed in circumferential direction on the surface of theinterlocking strip, the width of the transverse section of the groove decreases from the surface of the interlocking strip to the axial center of the interlocking strip, and a plurality of grooves utilized to thin the glass substrates is interlocked and fixed between a plurality of interlocking strips, wherein the grooves are arranged on the interlocking strips. Under the premise that the fixturefor thinning flat panel glass substrate of the invention realizes clamping the glass substrates to soak and etch liquid medicine and achieves the purpose of thinning the glass substrate, the invention can remove embossments existed at the contact point of the glass substrates and the fixture, improve the thinning effect of the glass substrates, increase the uniformity of the glass substrates after being etched, and grantee the implement of the subsequent handling.

Description

Flat glass substrate attenuation clamp
Technical field
The present invention relates to a kind of flat glass substrate attenuation clamp, relate in particular to and a kind ofly be applied in the display device panel manufacturing process attenuation clamp that is adopted when flat glass substrate is soaked the etching attenuate.
Background technology
Along with the high speed development of electronics and information industry, the development of pictorial display product has also entered a brand-new stage.People are to the pursuit fashion-orientation more of pictorial display, and ultra-thinization of profile just becoming the main flow of display terminal production development.Display panel is as the core component of display terminal, and the slimming of display panel is the key that can display terminal realize slimming.
Display panel can have multiple, is example with the display panel of liquid crystal indicator, generally includes color membrane substrates and array substrate that box is provided with, and dependency structures such as liquid crystal layer are set between two substrates.Color membrane substrates and array substrate are generally all made as the basis with glass substrate, so the thickness of glass substrate is a key factor of decision display panel integral thickness.At present, the thickness of glass substrate that glass substrate producer can provide is the thinnest can only to reach 0.5mm, and this and terminal show that the product requirement substrate thickness reaches 0.3mm even thinner requirement has certain gap.So in making the process of display panel, need to adopt the sheet glass reduction process to reduce the thickness of glass substrate, that is: will become double-sided substrate behind the box by physics or chemical process, glass substrate is removed one deck and realized attenuate.Physical method wherein can be mechanical mill, but because at the bottom of the production capacity of physical method, good article rate is low, so chemical etching mode thining method is the normal at present technique means that adopts.
Soak a kind of as in the chemical milling of etching, do not see as yet in the display device panel manufacturing processed at home to be used.The so-called etching technics that soaks is exactly the sheet glass product to be dipped into carry out etching in the medicament briefly, reaches the purpose of attenuate glass substrate.In soaking etching process, what etch effect was played a crucial role is the employed anchor clamps of clamping sheet glass product.Thickness uniformity coefficient and the surface effect of design of Clamping Apparatus after for etching all has very crucial influence, if jig Design is bad, can cause the thickness of glass inequality, and when soaking and the anchor clamps position contacting stay serious projection, this will cause subsequent handling to be difficult to carry out, for example be difficult to realize cutting action and IC binding (Bonding is called for short B/D) operation.
Summary of the invention
The purpose of this invention is to provide a kind of flat glass substrate attenuation clamp, to be implemented in glass substrate is soaked in the process of etching reduction processing, effective fixing glass substrate, and little to the etching process influence, after etching, can obtain the glass substrate that thickness is even, have an even surface.
For achieving the above object, the invention provides a kind of flat glass substrate attenuation clamp, comprising:
At least two frameworks, each framework space is provided with;
Several card articles are arranged between the framework, and the two ends of every card article are connected on the different frameworks;
The width of this groove cross section successively decreases to the card article axis direction on the card article surface with upper groove circumferentially to offer one on the surface of card article, and the groove on several card articles is used for being fixed between several card articles treating that attenuate glass-based integrated circuit board is established,
The quantity of described card article is the six roots of sensation, and two described card articles are connected the middle part on described framework base, and two described card articles are connected the middle part of described frame sides, and two described card articles are connected the top of described frame sides.
By above technical scheme as can be known, flat glass substrate attenuation clamp of the present invention adopts the form of framework and card article, the glass substrate of attenuate is treated in the clamping that cooperatively interacts between card article, and each card article is provided with groove wide outside and narrow inside, avoided on the contact position of card article and glass substrate, glass substrate is difficult to fully contact soup, causes occurring the technical problem of projection.Flat glass substrate attenuation clamp advantage of the present invention is: realizing that the clamping glass substrate carries out soup immersion etching and reaches under the prerequisite of attenuate purpose, can effectively avoid the soup mobile is influenced by the array configuration of framework and card article, by groove wide outside and narrow inside is set glass substrate is fully contacted with soup, eliminate the projection that glass substrate and anchor clamps point of contact place occur, improve the attenuate effect of glass substrate, uniformity coefficient after the raising glass substrate etching guarantees the execution of subsequent handling.
Also in conjunction with the accompanying drawings the present invention is described in further detail below by specific embodiment.
Description of drawings
Fig. 1 is the structural representation of flat glass substrate attenuation clamp specific embodiment one of the present invention;
Fig. 2 is the card article structural representation in the flat glass substrate attenuation clamp specific embodiment one of the present invention;
Fig. 3 is the local structure synoptic diagram of card article axial cross section in the flat glass substrate attenuation clamp specific embodiment one of the present invention;
Fig. 4 is the structural representation of flat glass substrate attenuation clamp specific embodiment two of the present invention.
Embodiment
Embodiment one
Be illustrated in figure 1 as the structural representation of flat glass substrate attenuation clamp specific embodiment one of the present invention, the flat glass substrate attenuation clamp of present embodiment comprises following structure: two frameworks 11 that the space is provided with and 12, framework 11 and 12 can be the flat board of two hollow outs, it perhaps can be the framework that is put together by several ribs, two frameworks 11 and 12 are parallel to each other, and have certain spacing distance therebetween; Be arranged on the six roots of sensation card article 21~26 between framework 11 and 12, be parallel to each other between the card article 21~26, the two ends of card article 21~26 are connected on two frameworks 11 and 12, wherein, two card articles 21,22 are connected the middle part on two frameworks 11 and 12 bases, two card articles 23,24 are connected the middle part of two frameworks 11 and 12 sides, remain the top that two card articles 25,26 are connected two frameworks 11 and 12 sides; The shape of each card article 21~26 is identical, with card article 21 wherein is example, is illustrated in figure 2 as the structural representation of card article 21, circumferentially offers a plurality of grooves 3 on the surface of card article 21,20~30 grooves preferably are set, can process 20~30 sheet glass substrates simultaneously.Be illustrated in figure 3 as the local structure synoptic diagram of card article axial cross section, the shape of cross section of groove 3 is for trapezoidal.Six roots of sensation card article is used for the edge card for the treatment of attenuate glass substrate 5 is established in thereon the groove, thereby will treat that by cooperatively interacting of the six roots of sensation card article attenuate glass substrate 5 is fixed between the card article, as shown in Figure 1.In the description to technical solution of the present invention, the display panel that box is set also can be described as glass substrate, because main processing is the glass substrate in the display panel outside.
In the present embodiment, the effect of framework is a fixing strip, and its concrete structural shape also can be the three-dimensional structure of bar rib composition, as long as leave the space that holds card article and treat the attenuate glass substrate between two frameworks.The structure of framework adopts the advantage of hollow out panel to be: when treating that the attenuate glass substrate is dipped in the soup in company with anchor clamps, therefore the framework of hollow out can have been avoided because of the mobile uneven generation that causes glass substrate to soak the etching non-uniform phenomenon of soup the mobile formation influence of soup hardly.The quantity of framework is not limited to two, and a plurality of frameworks that are parallel to each other can be set, and card article is set respectively betwixt, and this technical scheme can increase the weight capacity of whole anchor clamps.
Card article in the present embodiment is specifically as follows right cylinder, rectangular parallelepiped, prism or other shapes, and the shape of card article does not influence its carrying for the treatment of the attenuate glass substrate.Adopt the card article of elongate in shape to fix glass substrate, its effect also is can reduce to greatest extent the soup mobile is influenced.Card article cooperatively interacts by six roots of sensation card article to the carrying effect of glass substrate and realizes, two card articles that middle part, framework base connects are used for the gravity of bearing glass substrate, four card articles that frame sides connects are used for fixing the position of glass substrate, at the framework top margin card article not being set, is to put between the framework from top for the ease of glass substrate.Present embodiment is a kind of preferred implementation, but the quantity of card article and position are not limited to this, as long as can realize glass substrate is fixed in the scope that several card article surrounds.
In the present embodiment, the groove that is arranged on the card article surface is a key of the present invention.Adopting soup to soak in the process of glass substrate, guarantee that the surface of glass substrate can fully touch enough soups, otherwise the inhomogeneous meeting of corrasion causes glass baseplate surface to have projection.This protruding phenomenon occurs especially easily at the position of anchor clamps clamping glass substrate.The design of present embodiment further groove is a kind of preferable technical scheme, by being provided with the groove of trapezoidal cross-section, both realized glass substrate is embedded in the groove, also realize surface that glass substrate is embedded the position not with contact grooves, thereby avoided projection occurring after the etching.Existing liquid-crystal display (Liquid Crystal Display, hereinafter to be referred as LCD), plasma panel (Plasma Display Panel, be called for short PDP), organic light emitting diode display (OrganicLight Emitting Diode, be called for short OLED) etc. product, the common thickness of its glass substrate be generally 1.4 millimeters or below, groove in the present embodiment, the base length L1 of trapezoid cross section of preferably being provided be 2 millimeters to adapt to the thickness for the treatment of the attenuate glass substrate, the trapezoidal top margin length L 2 of being provided with is 3~5 millimeters and to be provided with trapezoidal height L3 be 3~5 millimeters, thereby realize glass substrate fully contacting at this place and soup, avoid occurring projection, this technical scheme can generally adapt to the etching clamping that thickness is 1.4 millimeters and following glass substrate.Certainly, the shape of cross section of groove, offer the position and quantity is not limited to technique scheme, multiple concrete set-up mode can also be arranged.
The shape of cross section of groove is not limited to trapezoidal, can also be semicircle or other shapes, as long as the width of its cross section successively decreases to the card article axis direction on the card article surface, and groove should be adapted to treat the thickness of attenuate glass substrate be greater than the thickness for the treatment of the attenuate glass substrate at the A/F on card article surface.
Groove offer quantity determined a thinning glass substrate instrument when the time processing can clamping the quantity of glass substrate, a plurality of grooves on every card article, have been offered in the present embodiment respectively, clamping polylith glass substrate has simultaneously then improved the working (machining) efficiency of product greatly.Spacing distance when the quantity of clamping glass substrate depends on clamping between the glass substrate, spacing distance is little, then but the quantity of clamping just can increase, but, the soup immersion way has determined can not be separated by between the glass substrate too near, otherwise glass baseplate surface will be not can be fully contact with enough soup, just can't reach good etching effect yet.In the present embodiment, the spacing distance between the groove, promptly the distance L between recess axis 4 preferably is not less than 25 millimeters.
The position of offering of every card article upper groove should be corresponding mutually, reaches the purpose that the card that cooperatively interacts is established glass substrate.In the present embodiment, the position of offering of each card article upper groove is identical.On a card article, each groove is preferably around card article one week of surface, and promptly offering 360 degree becomes a ring groove, can not hinder flowing of soup fully, makes etching effect more.Perhaps groove can only be offered one section or half-turn groove on facing surfaces between card article, also can realize the function of clamping glass substrate.Being that groove gets around angle 180 degree of circumferentially offering on the bar surface, perhaps is obtuse angle or acute angle.
The flat glass substrate attenuation clamp of present embodiment as the used glass substrate of display unit in soaking the etching reduction process special-purpose clamping device, the performance characteristics of glass substrate and the characteristic requirement of soaking etching technics have been taken into full account, adapt to its clamping requirement, has multiple advantages: the first, adopt several card articles clamping glass substrate that cooperatively interacts, and groove is set in clamping place, can effectively avoid contacting with the point of contact place soup of anchor clamps at glass substrate insufficient, thereby avoided after the etching of point of contact place forming projection; The second, adopt framework, the card article of hollow out, small to the mobile influence of soup, can effectively avoid the prevention of anchor clamps to liquid-flow, avoid freely not causing thickness of glass inequality after the etching because of liquid-flow; Three, the mode that holds mutually with several card articles makes a plurality of grooves can be set on card article, fixes parallel a plurality of glass substrates simultaneously, therefore can improve the supporting capacity of anchor clamps, but a plurality of products of etching have once improved working (machining) efficiency greatly.Through test, the flat glass substrate attenuation clamp clamping simultaneously multi-disc thickness that adopts present embodiment 1.4 millimeters or following, become the LCD glass substrate of box, after soaking etching, on glass substrate all projection can not appear, and thickness evenness is all less than 2%, 5% the thickness uniformity coefficient index that is far superior to that LCD allows.Pass through follow-up cutting, ICB/D process validation again, adopt the product of the flat glass substrate attenuation clamp clamping etching of present embodiment, the qualification rate in these two operations is 100%.
Embodiment two
Be illustrated in figure 4 as the structural representation of flat glass substrate attenuation clamp specific embodiment two of the present invention, the clamp structure of present embodiment and embodiment one is roughly the same, and difference is that card article 23~26 is different with the annexation of framework 11 and 12.As shown in Figure 4, in the present embodiment, framework 11 and 12 and the junction of card article 23~26 ends offer locating slot 4, be example with a card article 23, slide and be embedded in locating slot 4 in its end 6.
Specifically can screw thread be set, fix, make the card article end to do transverse movement, and can not stretch out or break away from locating slot with respect to locating slot with anti-soup corrosive nut matching thread in the card article end.
In the present embodiment, only locating slot is set in frame sides, corresponding card article can be in the locating slot scope adjusting position, therefore can be according to the position of the length adjustment card article for the treatment of the attenuate glass substrate, the length range that locating slot preferably is set is no more than 60 millimeters, to satisfy the adaptation adjustment of difference being treated attenuate glass substrate width.The preferable glass substrate that can realize adapting to clamping 240~300 millimeters long.Because the upper end of glass substrate is not fixed with card article, do not need to adjust the position of the card article that connects on the framework base.The adjustable extent of locating slot is excessive, may cause regulating out of true and causes product to produce protruding phenomenon.In concrete the application, according to the relative position of card article, the position and the direction of locating slot can be set flexibly, be as the criterion can realize the card article position adjustments.
Adopt technique scheme, can be adapted to the multi-disc of clamping simultaneously long * wide * thick be 300 * 351 * 1 millimeter or 280 * 350 * 1.4 millimeters, become the LCD glass substrate of box to soak etching, and can reach good etch effect.The technical scheme of present embodiment has been improved the controllability of flat glass substrate attenuation clamp, and this point is particularly important for actual production.The material price costliness of sheet glass attenuation clamp if anchor clamps only can be fit to that clamping is single, the display panel of specific dimensions, when product size is improved, must be changed anchor clamps when maybe needing to process the polytypic product, like this cost that can increase input so.The technical scheme of present embodiment makes anchor clamps can adapt to the product of multiple gauge size, thereby has reduced manufacturing cost by locating slot is set.
It should be noted that at last: above embodiment only in order to technical scheme of the present invention to be described, is not intended to limit; Although with reference to previous embodiment the present invention is had been described in detail, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of various embodiments of the present invention technical scheme.

Claims (11)

1, a kind of flat glass substrate attenuation clamp is characterized in that comprising:
At least two frameworks, described framework space is provided with;
Several card articles are arranged between the described framework, and the two ends of every described card article are connected on the different frameworks;
On the surface of described card article, circumferentially offer one with upper groove, the width of described groove cross section successively decreases to the card article axis direction on the card article surface, and the groove on described several card articles is used for being fixed between described several card article treating that attenuate glass-based integrated circuit board is established;
The quantity of described card article is the six roots of sensation, and two described card articles are connected the middle part on described framework base, and two described card articles are connected the middle part of described frame sides, and two described card articles are connected the top of described frame sides.
2, flat glass substrate attenuation clamp according to claim 1 is characterized in that: the shape of cross section of described groove is trapezoidal or semicircle for falling.
3, flat glass substrate attenuation clamp according to claim 1 is characterized in that: the angle that described groove is circumferentially offered around the card article surface is 360 degree or 180 degree.
4, flat glass substrate attenuation clamp according to claim 2 is characterized in that: the described base of falling trapezoid length is 2 millimeters.
5, flat glass substrate attenuation clamp according to claim 2 is characterized in that: the described top margin of falling trapezoid length range is 3~5 millimeters.
6, flat glass substrate attenuation clamp according to claim 2 is characterized in that: the described altitude range of falling the trapezoid is 3~5 millimeters.
7, according to claim 2 or 3 described flat glass substrate attenuation clamps, it is characterized in that: the spacing distance on every described card article between each groove is not less than 25 millimeters.
8, according to claim 1 or 2 or 3 described flat glass substrate attenuation clamps, it is characterized in that: the junction in described framework and described card article end offers locating slot, slides and be embedded in described locating slot in the end of described card article.
9, flat glass substrate attenuation clamp according to claim 8 is characterized in that: the length of described locating slot is no more than 60 millimeters.
10, flat glass substrate attenuation clamp according to claim 1 is characterized in that: described framework is the flat board of hollow out.
11, flat glass substrate attenuation clamp according to claim 1 is characterized in that: described card article is right cylinder or prism.
CN200810056268A 2008-01-16 2008-01-16 Flat glass substrate attenuation clamp Active CN100590090C (en)

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Application Number Priority Date Filing Date Title
CN200810056268A CN100590090C (en) 2008-01-16 2008-01-16 Flat glass substrate attenuation clamp

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CN100590090C true CN100590090C (en) 2010-02-17

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Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102219387A (en) * 2011-05-18 2011-10-19 上海易殖电子技术有限公司 Etching method for liquid crystal glass panel
CN102643028A (en) * 2012-05-14 2012-08-22 深圳市拓捷科技发展有限公司 Glass thinning equipment and method
TWI435833B (en) * 2012-05-18 2014-05-01 Grand Plastic Technology Co Ltd Cassette for glass plate or wafer etching and holding
CN105271793A (en) * 2015-10-07 2016-01-27 江苏江汉电热设备科技有限公司 Glass resistor solution spraying tool
CN106830695A (en) * 2017-03-14 2017-06-13 凯盛科技股份有限公司 A kind of anti-fragmentation fixing device for glass substrate thinning single surface
CN107219163A (en) * 2017-05-10 2017-09-29 东旭科技集团有限公司 It is a kind of to measure the apparatus and method that speed is thinned in glass chemistry
CN107555812A (en) * 2017-09-07 2018-01-09 凯盛科技股份有限公司 A kind of glass substrate baking rack
CN107698168A (en) * 2017-09-07 2018-02-16 凯盛科技股份有限公司 A kind of anti-fragmentation thinning single surface etching bearing basket tool
CN108436778A (en) * 2018-05-31 2018-08-24 欧朋达科技(深圳)有限公司 Deburring protective cradle
CN109369028B (en) * 2018-10-17 2021-11-23 武汉华星光电半导体显示技术有限公司 Etching equipment
CN113372018B (en) * 2021-06-18 2022-12-02 江西沃格光电股份有限公司 Ultrathin glass, surface treatment method thereof and display device

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