CN100586155C - Imaging apparatus allowing a plurality of regions to be read, and method therefor - Google Patents

Imaging apparatus allowing a plurality of regions to be read, and method therefor Download PDF

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Publication number
CN100586155C
CN100586155C CN03813747A CN03813747A CN100586155C CN 100586155 C CN100586155 C CN 100586155C CN 03813747 A CN03813747 A CN 03813747A CN 03813747 A CN03813747 A CN 03813747A CN 100586155 C CN100586155 C CN 100586155C
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China
Prior art keywords
address
pixel
imaging
register
substrate
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CN1659861A (en
Inventor
阿部贡基
熊泽崇
牧野圣
岸顺司
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Toshiba Teli Corp
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Toshiba Teli Corp
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/40Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled
    • H04N25/44Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled by partially reading an SSIS array
    • H04N25/443Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled by partially reading an SSIS array by reading pixels from selected 2D regions of the array, e.g. for windowing or digital zooming
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/779Circuitry for scanning or addressing the pixel array

Abstract

An imaging part (700) includes a plurality of pixels arranged two-dimensionally in such a manner that each pixel has its own independent address and is given a read address. When an imaging signal is read from the imaging part, a signal processing part (800) can generate addresses to designate any ones of the imaging regions.

Description

Can read the imaging device and the method in a plurality of zones
Technical field
The present invention relates to a kind of imaging device and formation method, particularly in image-generating unit, use for example a kind of imaging device and the formation method of cmos sensor.More particularly, the present invention can be used as monitoring arrangement.It also can be used as the parts inspection machine of electronic equipment such as liquid crystal apparatus and semiconductor equipment.
Background technology
CCD type imaging device and CMOS type imaging device are by the known imaging device that is to use photo-electric conversion element.In CCD type imaging device, photo-electric conversion element is provided with by bidimensional ground, and the imaging signal in the unit is from being read out here.On the other hand, in CMOS type imaging device, the imaging signal in the pixel cell can directly be read from the photo-electric conversion element of bidimensional setting.
By using a kind of like this imaging device, surveillance or parts check system have been developed.In traditional surveillance or parts check system, imaging signal is read from the whole surface of image-generating unit, and these imaging signals are transferred in monitor or the comparator circuit.In surveillance, the image on the customer inspection monitor screen.In the parts check system, comparator circuit compares the picture pattern of reference pattern and imaging signal.
In traditional surveillance or parts check system, because imaging signal reads from the whole surface of image-generating unit, so time for reading can not be reduced, and when imaging signal during from analog-converted to numeral, the data transaction amount is very big.Therefore, in surveillance because whole screen always showing, so local image inspection is difficult, and equally in the parts check system because processed be the imaging signal of whole screen, so be difficult to carry out high speed inspection.
Summary of the invention
One aspect of the present invention provides a kind of imaging device and method thus, and it can be restricted to from the imaging signal that image-generating unit obtains the imaging plane from the signal in any a plurality of zones, easily local image is checked and the high speed processing signal.
The present invention relates to a kind of imaging device that is used for checking that the inspection machine of a plurality of configuration of components is used on the substrate, this device comprises: the imaging region that is formed with a plurality of X-address wires and a plurality of y-address lines thereon, be formed near the pixel in crosspoint of X-address wire and y-address line, an independently address and this imaging region is set to provide to read the address for each pixel is provided each pixel; Go out the Y-register of a free-throw line from described a plurality of y-address line selections; Select-the X-register of free-throw line from described a plurality of X-address wires; The serial device of address date being provided for X-and Y-register is used to indicate each pixels of a plurality of parts of corresponding region, and these zones are corresponding to a plurality of configuration of components position on the substrate in the imaging region; Address date is sent to the address processor of serial device; And memory cell, when described address date sends described address processor to, at least be included in the wherein first memory part of address data, be used for indicating each pixel in the zone of corresponding more than first parts, the second memory part of address data therein, be used for indicating each pixel in the zone of corresponding more than second parts, it is applicable to and checks and be different from the situation of the substrate of a plurality of configuration of components on the substrate thus.
Description of drawings
Fig. 1 shows is key-drawing according to parts check system profile of the present invention.
Fig. 2 shows be in Fig. 1 camera according to basic configuration block diagram of the present invention.
What Fig. 3 showed is the diagrammatic sketch that embodiment is set of imaging region in the imaging device of the present invention.
What Fig. 4 showed is that the diagrammatic sketch that imaging region is explained an embodiment under the situation of imaging device working example of the present invention is set.
Fig. 5 A is the sequential chart about the timing signal on the Y-direction that is used for reading from the imaging region of Fig. 4 imaging signal to Fig. 5 H demonstration.
Fig. 6 A is the sequential chart about the timing signal on the Y-direction that is used for reading from the imaging region of Fig. 4 imaging signal to Fig. 6 F demonstration.
Fig. 7 shows is the aperture in the image-forming apparatus according to the present invention and the key-drawing of focus controlling system.
Fig. 8 shows is the diagrammatic sketch that another zone that is used for reading imaging device imaging signal of the present invention is provided with embodiment.
Fig. 9 shows is the diagrammatic sketch that another zone that is used for reading imaging device imaging signal of the present invention is provided with embodiment.Take pictures in 302 top, and output image signal.This picture signal is imported into, and for example personal computer 500, and is shown as image on display 501.
Reference number 600 is inspection units, and it can provide timing signal, control signal, address date or the like for camera 400.This inspection unit 600 can be according to the operating signal generating address date from personal computer 500.
Inspection unit 600 can receive picture signal by personal computer 500.In case the picture signal of receiving, this inspection unit 600 can be compared it with reference data, and the pattern comparative result is fed back to personal computer 500.
Fig. 2 is the block diagram of the essential part of the above-mentioned camera 400 of a demonstration.Camera 400 comprises an image-generating unit 700 and a signal processing unit 800.Image-generating unit 700 has an imaging region 701, and a plurality of pixels are provided with by bidimensional ground therein, and each pixel has an independently address, and reads the address for one of each pixel.
The formation of each pixel is identical, and a pixel is exaggerated and is shown as pixel 702, it by dotted line to show basic comprising.Reference number 730 is reset lines that a confession has voltage.Reference number 731 and 732 is buses, is used for being expert at and listing the address of determining pixel.
Switch element (being used to reset) 705 and photo-electric conversion element 706 are series between line 703 and the reference potential.An output of this photo-electric conversion element 706 is connected to by switch element 707 and is used for sampling on the input unit (gate electrode) of electric capacity 701 and amplifier element 708.An electrode of this amplifier element 708 is connected on the line 730 as power supply, and another electrode is connected to an electrode of switch element (being used to read) 709.Another electrode of switch element 709 is an output unit, and it is connected to the bus 732 as column bus.
When switch element 705 was opened, the electric charge in the photo-electric conversion element 706 was released and resets.When switch element 705 was closed, photo-electric conversion element 706 beginnings were recharged according to outside light quantity.Charge cycle is limited to a bit when the switch element 707 that is used to sample is opened.When the switch element 707 that is used to sample when OFF (pass) changes to ON (opening) position, the voltage that relies on the electric charge of collecting in the photo-electric conversion element 706 will be to electric capacity 701 power supplies.
When switch element 709 is reading when a little being unlocked, the output current of amplifier element 708 is by switch element 709 inflow lines 732.That is on column bus 732, the voltage that is directly proportional with the collected electric charge of electric capacity 701 has appearred.
In the figure, address wire is simplified, but y-address register 711 can be determined Y-lines all in the imaging region 701 independently.Selectively, any Y-line all can be determined.
X-address register 712 control analog multiplexers 713.This analog multiplexer 713 is used for receiving the output of the line amplifier 714 that is connected to each X-line.In Fig. 2, shown line amplifier 14A, 14B typically, but in fact they are connected to each X-line.Analog multiplexer 713 has switch element 13A, the 13B of corresponding line amplifier 14A, 14B.In Fig. 2, shown switch element 13A, 13B typically, but their corresponding each line amplifiers in fact.As switch element 13A, when 13B is opened, corresponding X-line signal appears on the common wire 13C.
When the switch element 13A of analog multiplexer 713 or 13B were opened by X-address register 712, the signal on the X line of corresponding switch element 13A or 13B was imported into amplifier 715.
The output signal of amplifier 715 is converted to digital signal by analog to digital converter (ADC) 716, and is supplied to 801 li in buffer in the signal processing unit 800.The data input and output of buffer 801 are controlled by the sprocket pulse that is applied to input 802.Be used as view data from the output of buffer 801 and be sent to output 803.
The y-address register 711 and the X-address register 712 of corresponding image-generating unit 700, Y-and X-address date can be set up.Y-and X-address date can be provided with by serial device 720 from signal processing unit 800.When Y-and X-address date are set up, the pattern that y-address register 711 and X-address register 712 are configured to write.As a result, y-address data and X-address date are from serial device 720 outputs, and sprocket pulse (writing clock) is transferred to y-address register 711 and X-address register 712.
The method that y-address data and X-address date are set is not limited thereto kind of an explanation, and the whole bag of tricks all is possible.For example, can in y-address register 711, have the multilevel address register, and address date tentatively is locked in a y-address register (being used for presetting), and when this address date of needs, its quilt (in batch) in batches is transferred to another y-address register (being used for operation).In this case, reading the address can change at short notice.
Serial device 720 is is not only read and write each address date in y-address register 711 and the X-address register 712, and exports the sprocket pulse of each part in the image-generating unit 700.For example, reset pulse, the sampling pulse of the pixel of sending to and read sprocket pulse arranged.And serial device 720 also outputs to analog to digital converter (ADC) 716 with clock and sprocket pulse.
Signal processing unit 800 has the address control tool and is used at random controlling y-address register 711 in the image-generating unit 700 and the address setting in the X-address register 712.
Address processing unit 802 can obtain the address setting data from the outside.The address setting data that tentatively are stored among the ROM803 also can be placed in the address processing unit 802.Whether be to choose from the outside to select the address setting data or choosing the address setting data from ROM803 is determined by control signal.
Address processing unit 802 produces y-address data or X-address date according to the address setting data, and provides it to timing processing unit 804.Timing processing unit 804 as top explanation, is passed to serial device 720 with y-address data and X-address date.As a result, address date is placed in y-address register 711 and the X-address register 712.The timing that address date is set is determined by the control signal that sends timing processing unit 804 to.
After the address date setting of 712 li of y-address register 711 and X-address registers, imaging signal is read from image-generating unit 700.The process that from image-generating unit 700, obtains imaging signal be reset, exposure, sampling and signal process of reading.For resetting, exposed pulse is imported into the switch element that is used for resetting, and before exposing operation began, each pixel in the imaging region 701 resetted in batches.
Next be exposing operation.Time for exposure is determined by the shutter control data of passing to fast door control unit 805.The shutter control data is passed to timing processing unit 804.Timing processing unit 804 is based on the shutter control data, and reduction point is set to the cycle up to the output of sampling pulse.
To reading of imaging signal is to carry out when the beginning pulse is transmitted to y-address register 711 and X-address register 712 when reading.Reading the output timing of beginning pulse is also determined by timing processing unit 804.Reading the output timing of beginning pulse is determined by the control signal of passing to timing processing unit 804.
Fig. 3 has shown the embodiment of projected image in imaging region 701.In this embodiment, object images 901,902,903,904 is projected to four jiaos of imaging region.Under such imaging circumstances, y-address register 711 and X-address register 712 set zones are the zones 911,912,913,914 that comprise object images 901,902,903,904.
Fig. 4, Fig. 5 A be to Fig. 5 F, and Fig. 6 A is the principle key-drawing of having simplified, be used for illustrating when read the imaging signal of zone when partly being provided with by above-mentioned explanation read timing and demonstration reads zone and various timing.
As shown in Figure 4, in wanting the whole regional W of imaging, the initial address of supposing certain regional A, B, C, D for (Y01, A01), (Y01, B01), (Y11, C01), (Y11, D01).The pixel quantity of whole imaging region is 2048 * 2048 pixels.At regional A, B, C, each zone among the D, the quantity of pixel is 500 * 500 pixels.
In Fig. 5 F, particularly, shown a trigger impulse at Fig. 5 A in Fig. 5 A, it is used as control signal and passes to timing processing unit 804.As a result, the shutter among Fig. 5 B begins pulse (corresponding reset pulse) and is passed to imaging region 702.Photo-electric conversion element exposure beginning, and after determining resetting time by the shutter control data, shutter finishes pulse (corresponding sampling pulse) and is transmitted to imaging region 702 (Fig. 5 C).Beginning pulse from shutter in shutter finishes the cycle of pulse, the photo-electric conversion element exposure, and electric charge is collected (Fig. 5 D).
In y-address register 711, receive vertical sync pulse (Fig. 5 F), and simultaneously, the data (Fig. 5 E) that are used for determining the first address Y01 are set.
Here the vertical sync pulse of mentioning is different from the vertical sync pulse of video camera etc. on meaning, it refers to the pulse that is used for being provided with Y-direction address in the register.
Next, clock pulse (Fig. 5 G) is sent to y-address register 711.As a result, the address of reading on the Y direction among regional A, the B increases.Therefore, the data among regional A, the B are read out.When horizontal-drive signal was passed to y-address register 711 as timing signal, this increment added 1.
When the address on the Y-direction reached address Y0n, a vertical sync pulse (Fig. 5 F) was sent to y-address register 711.At this moment, serial device 720 is sent to y-address register 711 with address Y11.
As a result, Y11 has been jumped in the address on the Y-direction.Then, on the Y-direction, in Y1n variation has taken place at address Y11.That is, zone C, the address of reading among the D on the Y-direction increases.Like this, the data among zone C, the D are read out.
Fig. 6 A has shown the relation between the zone of reading on address change and the X-direction to Fig. 6 F.In X-address register 712, first horizontal synchronization pulse (Fig. 6 B) has been sent to X-address register 712 via serial device 720, and has also provided the data (Fig. 6 A) that are used for determining address A01 simultaneously.As a result, also output from X-address register 712 of address A01, and it changes to A0n and increases from A01.Such variation is obtaining when being sent to X-address register 712 when clock pulse (Fig. 6 C).
When the address on the X-direction had reached address A0n, horizontal synchronization pulse had been transmitted to X-address register 712, and had also provided the data that are used for determining address B01 simultaneously.As a result, B01 has been jumped in the address on the X-direction.Thereafter, it changes to B0n from the B01 increase.
When the address on the X-direction had arrived address B0n, horizontal synchronization pulse was sent to X-address register 712 once more, and had provided the data (Fig. 6 A) that are used for determining address A11 simultaneously.As a result, sent address A11, and it is increased and changes to A1n from A11 from X-address register 712.
In this way, in each horizontal synchronization pulse, read the starting position from be provided with data A01, B01 change to A11, B11, A21, B21 ... C01, D01.
Like this, by y-address and X-address, the data among regional A, B, C, the D are read out.
Above-mentionedly can read the imaging device in a plurality of zones and the characteristics of method can be summarized as follows.
When imaging signal was read from image-generating unit 700, the signal processing unit 800 of setting produced the address and is used for specifying any a plurality of zones in the imaging region.Pixel 702 has photo-electric conversion element 706, and is used for this photo-electric conversion element is resetted, exposes, and from photo-electric conversion element the switch element 705,707,708 and 709 of read output signal.It has also comprised many address wires.
Image-generating unit 700 comprises be used for selecting the y-address register 711 of a line arbitrarily from many y-address line, be used for from many X-address wires, selecting the X-address register 712 of any line, and being used for being X at least, the y-address register provides the serial device 720 of the address date of specifying any a plurality of zones.Signal processing unit 800 has the address processing unit 802 that address date is transferred to serial device 720.
Signal processing unit 800 also can have a memory (RAM or ROM 803), wherein stores the address date that is used for specifying any a plurality of regional A, B, C, D.
Signal processing unit 800 also can have a plurality of memories (ROM 803), wherein stores the ordinal position (combination) that address date is used for changing a plurality of zones.Address processing unit 802 also can have an address input unit, is used for obtaining therein the address date from a plurality of zones of appointment of outside.
Image-generating unit 700 obtains the image of a plurality of inspection objects, and signal processing unit 800 can have according to checking that object changes the instrument of a plurality of zone sequence position.
This structure may further include the display that is used to monitor from the imaging signal of image-generating unit 700, the aperture device of image-generating unit front surface and focal length mechanism, and the image-forming condition control appliance that is used for controlling aperture device and focal length mechanism.
Based on the imaging signal in a plurality of zones, the image-forming condition control appliance is being controlled aperture device and focal length mechanism.
Fig. 7 has shown a kind of pattern of using apparatus of the present invention.Camera 400 has focus adjustment mechanism 401 and aperture governor motion 402.Focus control signal and aperture control signal provide from image-forming condition control unit 820.Here, the control of image-forming condition control unit 820 is based on the vision signal that obtains from buffer 801.
The process that control unit 820 generation focal lengths and aperture control data are adjusted in imaging is as follows.During beginning, camera 400 is taken the entire image of checking object 301.The image that is taken shows on the display 510 of personal computer 500.User's operation, for example mouse 511, and specify desirable a plurality of zone (for example, above-mentioned A, B, C, D), and surrounded by window frame.By fill order, the result, appointed area A is output in the buffer 801 to the view data of D.View data is sent in the image-forming condition control unit 820.
Here, (1) aperture is controlled.820 outputs of image-forming condition control unit also change the aperture control data.Among the variation of aperture control data, when the brightness of view data reached expected range, the aperture control data was fixed.Next, the radio-frequency component of (2) view data is extracted out, and the focus controlling data are output in order to regulate.Among the focus controlling data variation, when radio-frequency component reached peak value, the focus controlling data were determined.Here, step (1) and (2) can be repeated.
In this was explained, a plurality of regional A that check was separated and be separately located in the imaging plane to D.Yet apparatus of the present invention are not limited to such zone, and also easily the zone be set to overlap.
Fig. 8 has shown an embodiment, and wherein area E, F, G are set among the whole regional W, and area E, F are arranged to overlap.
Fig. 9 has shown the embodiment of another apparatus of the present invention.This device is suitable for changing at high speed the situation of address.In the explanation in front, regional A is foursquare to D, and X-address and y-address increase.Yet device of the present invention can have crooked zone.Such zone also can be used in the aforesaid execution mode.In this device, has the time enough surplus being provided with of address.
As shown in Figure 9, suppose that regional H, I are set up.In this case, y- address register 711A, 711B is alternately changed.When the address date of y-address register 711A (or 711B) was used, the regional specific data that is used for next y-address had been write into another y-address register 711B (or 711A).Switch 711C is which a switch of data that are used for determine using y- address register 711A or 711B, and switch 711D is a switch which is used for determining address date write among y-address register 711A, the 711B.
Address date is exported from memory (RAM) 740.On the other hand, also alternate of X-address register 712A, 712B.When the address date of X-address register 712A (or 712B) was used, the regional specific data that is used for next X-address had been write into another X-address register 712B (or 712A).Switch 712C is the switch which is used for determining using in X-address register 712A or 712B data, and switch 712D is the switch which is used for determining address date write among X-address register 712A, the 712B.
The sprocket pulse and the clock setting of the control timing origin self clock control unit 741 of each part.
Device of the present invention can not only be used as surveillance, and can be used as the parts check system.When using as surveillance, it is effective when the indication monitor area.For example, the inlet of building or window can be set to monitor area.During as a kind of parts check system, be arranged on by pattern match inspection that a plurality of locational parts are effective on the substrate.For example, the parts that check are set at regional A in D.
The parts of checking comprise the parts of IC chip and semiconductor element.Not only be confined to parts, when being used for checking the character that is imprinted on printed circuit board (PCB) or the parts, numeral and symbol, it also is effective.When checking whether indicated parts correctly are arranged on the printed circuit board (PCB), it is effective.
And in device of the present invention because indicated the address of regional A to D, thus can be easily in conjunction with except that regional A to the D from other regional view data.Therefore whether, can check effectively has the parts of not expecting to be set on regional A other zones to the D, or whether checks effectively that in regional A other zones outside the D any defective (as flaw) is arranged.
This device only can be in conjunction with the view data in a plurality of zones of necessity.On the contrary, need not to reach the view data in unnecessary zone or the view data of All Ranges.
As a result, after exposure for the first time, compared with the prior art, the required time (time for reading) that is used for obtaining from imaging region image has been reduced greatly.This means that the review time can be shortened.
Industrial applicability
As mentioned above, the present invention relates to a kind of image acquiring device and method, particularly, for example, The cmos sensor that in image-generating unit, uses. More particularly, the present invention can be applied to one Plant surveillance equipment. It also can be used as a kind of parts inspection machine, is used for electronic equipment, such as liquid Brilliant equipment and semiconductor equipment.

Claims (3)

1. be used for the imaging device that uses in the inspection machine of checking a plurality of configuration of components on the substrate, this device comprises:
Be formed with the imaging region of a plurality of X-address wires and a plurality of y-address lines thereon, be formed near the pixel in crosspoint of X-address wire and y-address line, an independently address and described imaging region is set to provide to read the address for each pixel is provided each pixel;
Go out the Y-register of a free-throw line from described a plurality of y-address line selections;
Select the X-register of a free-throw line from described a plurality of X-address wires;
The serial device of address date being provided for X-and Y-register is used to indicate each pixels of a plurality of parts of corresponding region, and these zones are corresponding to the described a plurality of configuration of components position on the substrate in the described imaging region;
Described address date is sent to the address processor of described serial device; With
Memory cell, when described address date sends described address processor to, at least be included in the wherein first memory part of address data, be used for indicating each pixel in the zone of corresponding more than first parts, the second memory part of address data therein, be used for indicating each pixel in the zone of corresponding more than second parts
It is characterized in that it is applicable to the situation that is different from the substrate of a plurality of configuration of components on the substrate of checking.
2. imaging device according to claim 1 also comprises:
Supervision is from the display of the imaging signal of image-generating unit, aperture device on the leading flank of described image-generating unit and focal length mechanism and control described aperture device and the image-forming condition control appliance of focal length mechanism,
It is characterized in that described image-forming condition control appliance is based on control described aperture device and focal length mechanism from the imaging signal in described a plurality of zones.
3. be used for checking the formation method of the inspection machine of a plurality of component configuration on the substrate, it is characterized in that, may further comprise the steps:
On imaging region, form a plurality of X-address wires and a plurality of y-address line, near the crosspoint of described X-address wire and described y-address line, form pixel, an independently address and described imaging region is set to provide to read the address for each pixel is provided each pixel; The Y-register is from described a plurality of y-address line options one expectation lines; The X-register is selected an expectation line from described a plurality of X-address wires; Serial device provides address date for described X-and Y-register, is used for indicating each pixel of a plurality of parts of corresponding region, and these zones are corresponding to a plurality of configuration of components position on the substrate in the described imaging region; Address processor sends described address date to described serial device; And configuration memory units, make when described address date sends described address processor to, it is included in the wherein first memory part of address data at least, be used for indicating each pixel in the zone of corresponding more than first parts, the second memory part of address data therein, be used for indicating each pixel in the zone of corresponding more than second parts
By selecting and change first and second memory portion, it is applicable to the situation that is different from the substrate of a plurality of configuration of components on the substrate of checking.
CN03813747A 2002-06-13 2003-03-26 Imaging apparatus allowing a plurality of regions to be read, and method therefor Expired - Fee Related CN100586155C (en)

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JP2002172794A JP3484178B1 (en) 2002-06-13 2002-06-13 Imaging device and method capable of reading multiple areas

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CN100586155C true CN100586155C (en) 2010-01-27

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KR100661666B1 (en) 2006-12-26
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IL165719A (en) 2011-07-31
CA2489334C (en) 2011-05-31
CA2489334A1 (en) 2003-12-24
KR20050013128A (en) 2005-02-02
WO2003107660A1 (en) 2003-12-24
MY136185A (en) 2008-08-29
JP3484178B1 (en) 2004-01-06
EP1553760A1 (en) 2005-07-13
JP2004023256A (en) 2004-01-22
HK1081363A1 (en) 2006-05-12
EP1553760A4 (en) 2007-02-28
TW595219B (en) 2004-06-21
TW200308166A (en) 2003-12-16

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