CN100577863C - A kind of cavity device of energy waves reflection unit - Google Patents
A kind of cavity device of energy waves reflection unit Download PDFInfo
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- CN100577863C CN100577863C CN200410058202A CN200410058202A CN100577863C CN 100577863 C CN100577863 C CN 100577863C CN 200410058202 A CN200410058202 A CN 200410058202A CN 200410058202 A CN200410058202 A CN 200410058202A CN 100577863 C CN100577863 C CN 100577863C
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Abstract
The invention discloses a kind of cavity device of energy waves reflection unit, utilize an energy wave source and cavity curve sphere collocation, wherein, this energy wave source is microwave or light etc., in order to an energy to be provided, and the curve sphere that this cavity curve sphere is made up of a minimum Fresnel reflection unit, in order to reflect this energy waves, make it be projected to a platform, and this cavity curve sphere can be made up of a Fresnel reflection unit and part curve sphere, or minimum two Fresnel reflection units and part curve sphere composition, or form by the Fresnel reflection unit entirely, cavity device provided by the present invention can improve the energy density of projection area greatly, big area and uniformity of energy, and many high-energy district is arranged in the cavity, to save the device space, equipment and processing procedure cost.
Description
Technical field
The present invention relates to a kind of cavity device of energy waves reflection unit, the density that can adjust energy range, area size and inhomogeneity a kind of method particularly are provided, can be with the cavity device of the reflection unit of uniformity of energy.
Background technology
Has splendid physics by diamond, chemical property, and because the development of chemical vapour deposition technique, diamond film can have been grown up on specific base material, diamond surface acoustic wave component for example, diamond crystal pipe etc., therefore diamond film is widely used on cutting tool and the photoelectricity communication part at present, but the stable and uniform energy of the growth needs of diamond mould, gas precursors could be dissociated, reactions such as reorganization, the stability of the energy wave source that is therefore applied deposits quality for diamond mould, homogeneity, growth rate etc., great influence is all arranged, for the diamond coating film board, its energy applies mode and can be hot filament (Hot filament), microwave (microwave), electron cyclotron resonace (ECR), electric arc modes such as (Arc), no matter in addition according to which kind of chemical vapour deposition (CVD, Chemical Vapor Deposition) mode is sedimentary diamond film on the base material, and when substrate sizes increases, energy got homogeneity and just seemed extremely important this moment.If as the energy wave source, uneven energy will influence the shape that electricity slurry (plasma) is produced, and then causes the diamond film subregion streaking that deposits, and the shortcomings such as uneven thickness of diamond film with microwave, that is can influence the processing and the application of diamond.
Shown in Figure 1A, known film coating equipment 80, in order to be the diamond film of growing up on the base material, this board has a parabolic curve cavity 81, and one can be located at the place, focal position of parabolic curve cavity 81 in order to energy to be provided by wave source 82, therefore energy can be thrown road curve cavity 81 by this and evenly is projected on the base material of below, but along with substrate sizes increases, make that the volume of parabolic curve cavity also will be along with increase, so will cause the too huge and generation manufacture difficulty increase of film coating equipment 80 volumes, produce the shortcoming that cost increases.
In addition, the film coating equipment 80a that shown in Figure 1B another is known, in order to be the diamond film of growing up on the base material, this board has an oval cavity 81a, and one can be located at the place, focal position of oval cavity 81a in order to energy to be provided by wave source 82a, therefore energy can focus on the base material of below by this ellipse cavity 81a projection, in order to high-energy to be provided, but along with substrate sizes increases, because this energy wave source 82a is located at the focus place of this ellipse cavity 81a, the concentration of energy of feasible energy wave source 82a is in a particular area, therefore inhomogeneous being projected on the base material of energy of feasible energy wave source 82a so will be caused the bad shortcoming of plated film quality on the base material, for solving the aforesaid drawbacks, the present invention proposes a kind of reflection unit and the cavity device that uses this reflection unit, can effectively solve the above problems.
Summary of the invention
Main purpose of the present invention provides a kind of reflection unit and the cavity device that uses this reflection unit, in order to uniform energy to be provided.
Another object of the present invention provides a kind of reflection unit and the cavity device that uses this reflection unit, can increase the projected area of an energy wave source by reflection unit.
A further object of the present invention provides a kind of reflection unit and the cavity device that uses this reflection unit, can be by modular notion, and elasticity disposes the number of this reflection unit.
In order to achieve the above object, in one preferred embodiment of the cavity device of energy waves reflection unit of the present invention, it is mainly by an energy wave source and cavity curve sphere collocation, wherein, this energy wave source is microwave or light etc., in order to an energy to be provided, and the curve sphere that this cavity curve sphere system is made up of a minimum Fresnel reflection unit, in order to reflect this energy waves, make it be projected to a platform.
Certainly, this cavity curve sphere can be made up of a Fresnel reflection unit and part curve sphere, or minimum two Fresnel reflection units and part curve sphere composition, or is made up of the Fresnel reflection unit entirely.
In another preferred embodiment of the cavity device of energy waves reflection unit of the present invention, it mainly is by a multipotency wave source and cavity collocation, and wherein, this multipotency wave source system is microwave or light etc., and having provides energy more than two energy wave sources; And this cavity system in order to reflect this multi-source energy waves, makes it be projected to a platform by becoming with the corresponding cavity curve of this multipotency wave source quantity sphere array.
Wherein, the cavity curve sphere of this cavity can be made up of a Fresnel reflection unit, a Fresnel reflection unit and part curve sphere, minimum two Fresnel reflection units and part curve sphere form, or be made up of the Fresnel reflection unit entirely.
For the ease of understanding feature of the present invention, purpose and function, below conjunction with figs. the present invention is described in detail.
Description of drawings
Figure 1A is known film coating equipment;
Figure 1B is another known film coating equipment;
Fig. 2 A is the preferred embodiment of cavity curve sphere of the present invention;
Fig. 2 B is the reflection unit of curved-surface structure;
Fig. 2 C is a reflection unit presentation graphs of the present invention;
Fig. 3 is first preferred embodiment of cavity device of the present invention;
Fig. 4 is second preferred embodiment of cavity device of the present invention;
Fig. 5 is the 3rd preferred embodiment of cavity device of the present invention;
Fig. 6 A is the stereographic map of the 4th preferred embodiment of cavity device of the present invention;
Fig. 6 B is the side-view of the 4th preferred embodiment of cavity device of the present invention.
Description of reference numerals: 10 cavity curve spheres; 101 reflecting curved surfaces; 102 first end faces; 20 energy wave sources; 30 cavity devices; 31 energy wave sources; 33 cavitys; 35 platforms; 37 bases; 39 running gears; 40 cavity devices; 41 energy wave sources; 43 cavitys; 45 platforms; 47 bases; 49 running gears; 50 cavity devices; 51 energy wave sources; 53 cavitys; 55 platforms; 57 bases; 59 running gears; 60 cavity devices; 61a, 61b, 61c energy wave source; 10a, 10b, 10c cavity curve sphere; 63 cavitys; 65 platforms; 67 bases; 69 running gears; 80 film coating equipments; 81 parabolic curve cavitys; 82 energy wave sources; The 80a film coating equipment; The oval cavity of 81a; 82a energy wave source; 90 straight lines.
Embodiment
See also the side-view of the preferred embodiment of the cavity curve sphere of the present invention shown in Fig. 2 A.Cavity curve sphere 10 of the present invention can cooperate one can use to throw homogeneous energy towards a prospective region by wave source 20, when the energy of this energy wave source 20 is projected to this cavity curve sphere 10, this energy gets final product the parallel prospective region that is projected to equably by this cavity curve sphere 10, and this cavity curve sphere 10 can replace the reflection unit 10B (as Fig. 2 B) of general curved-surface structure, to reach the effect of dwindling the reflection unit volume and reducing cost of manufacture.
This cavity curve sphere 10 of the present invention can be made up of more than one curvilinear plane, this cavity curve sphere 10 includes: a reflecting curved surface 101 and one first end face 102, and this reflecting curved surface 101 and this first end face 102 are at a distance of a specific range, the cavity curve sphere 10 that has specific thicknesses in order to formation.This reflecting curved surface 101 is surrounded on this energy wave source 20 non-enclosedly, and with this energy wave source 20 predetermined distance of being separated by, the energy of this reflecting curved surface 101 of directive can be reflected.This reflecting curved surface 101 as a focus, and can utilize this focus to define several curves by this energy wave source 20, these several curves all with this focus as focus, the some that captures these a plurality of curves again defines this reflecting curved surface.In preferred embodiment of the present invention; this cavity curve sphere 10 all is illustrated with individual reflection curved surface 101; carrying out in order to specification sheets; certainly also single parabola, single kind of hyperboloid, single kind of curvilinear plane or its curvilinear plane different more than two kinds of planting of this cavity curve sphere 10 makes up; the variation of shape like that and combination thereof; be that those skilled in the art consult the present invention and can change easily and implement,, no longer add to give unnecessary details in this so all should be that the present invention protects.In theory if with the para-curve of a focal point F as focus, can obtain unlimited many group para-curve, and should all will satisfy with the condition of this focal point F by many group para-curves as focus, therefore, suppose a specific parabolic equation formula F (X, Y) can satisfy the condition that focus is F, and capture a reference point at a particular space, through utilizing the many sets of curves of FresnelReflector with specific thicknesses to replace after the specific calculation, also can satisfy the condition that focus is F, therefore definable goes out reflecting curved surface 101 of the present invention, can be by a Fresnel reflection unit, one Fresnel reflection unit and part curve sphere are formed, one of minimum two Fresnel reflection units and part curve sphere are formed, or are made up of the Fresnel reflection unit entirely, in four kinds, that is cavity curve sphere 10 of the present invention is also finished by above-mentioned various combination.Shown in Fig. 2 C, how to define this reflecting curved surface in order to explanation, suppose that a straight line 90 is by focus f (C, 0), and this straight line and the reflection unit 10 with specific thicknesses intersect at P1 (x1, y1) and P2 (x2,2 points y2), according to this f (C, 0) and P (x1, y1) and f (C, 0) and P2 (x2, y2) can obtain f1 (x respectively, y) and f2 (x, curvilinear equation formula y), according to above-mentioned principle to obtain the curvilinear equation formula of array, according to the curvilinear equation formula of this array, can ask this reflecting curved surface 101 equivalent focuss.
See also cavity device of the present invention first preferred embodiment shown in Figure 3.This cavity device 30 includes at least: one can wave source 31, a cavity 33, a platform 35, with a base 37.This energy wave source 31 is micro-wave energy wave sources, in order to microwave energy to be provided, this energy wave source 31 is delivered to microwave energy in this cavity device 30 by a wave guide (figure does not show), this energy wave source 31 is except importing into this cavity device 30 by this wave guide in addition, also can deliver in this cavity device 30, in this preferable enforcement, though this energy wave source is a micro-wave energy wave source by an antenna (figure does not show), limit a micro-wave energy wave source but have more than, can select for use according to user's energy needed.This cavity 33 is surrounded on this energy wave source 31 non-enclosedly, and this cavity 33 and this base 37 formation one enclosed space, and this cavity 33 is curved surface spheroids.This place, cavity 33 tops is provided with a cavity curve sphere 10, and (this cavity curve sphere 10 is shown in this as Fig. 2 A and is not given unnecessary details, and give identical figure number), and be arranged at the focus place of this cavity curve sphere 10 with this energy wave source 31, energy that therefore can wave source 31 can evenly reflex on this platform 35 by cavity curve sphere 10.This platform 35 also can be connected with a running gear 39 in addition, this running gear 39 makes this platform 35 can carry out the motion of three-dimensional, according to user's demand to set the platform motion direction, make and more evenly to be projected on this platform by wave source, and a reactant device can be set more on this platform, in order to provide a reactant gases (for example hydrogen, methane etc.) to this platform, react by this energy.
See also cavity device of the present invention second preferred embodiment shown in Figure 4.This cavity device 40 comprises: one can wave source 41, a cavity 43, a platform 45, with a base 47.This energy wave source 41 is micro-wave energy wave sources, in order to microwave energy to be provided, this energy wave source 41 is delivered to microwave energy in this cavity device 40 by a wave guide (figure does not show), this energy wave source 41 also can be delivered in this cavity device 40 by an antenna (figure does not show) except importing into this cavity device 40 by this wave guide in addition.This cavity 43 is surrounded on this energy wave source 41 non-enclosedly, and this cavity 43 forms an enclosed space with this base 47.This place, cavity 43 tops is provided with cavity curve sphere 10, and (this cavity curve sphere 10 is as shown in Fig. 2 A, do not given unnecessary details at this, and give identical figure number), and this cavity 43 is ellipsoidal surfaces, and this energy wave source 41 is located on the equivalent focus of this cavity 43, make even a reference point on the platform 45 as another equivalent focus of ellipsoidal surface, therefore the energy of energy wave source 41 can evenly reflex on this platform 45 by cavity curve sphere 10, and when the energy of energy wave source 41 is projected to this cavity 43, can focus on the platform 45 by this cavity 43, can improve the energy service efficiency.Certainly this platform 45 more can be connected with a running gear 49, and this running gear 49 makes this platform 45 can carry out the motion of three-dimensional, can more evenly be projected on this platform by wave source to set the platform motion direction, to make according to user's demand.In this preferred embodiment, this cavity 43 is an ellipsoidal surface, certainly cavity also can be an equivalent parabolic curve sphere, an equivalent hyperbolic line sphere or the known sphere of those skilled in the art, no matter be any sphere design, as long as its equivalent focus accurate calculation is come out, just can be with the corresponding setting of energy wave source, because of this energy wave source position system is located on the equivalent focus, so can evenly be projected to platform after the energy waves reflection, to reach purpose of the present invention.
See also cavity device of the present invention the 3rd preferred embodiment shown in Figure 5.This cavity device 50 comprises: one can wave source 51, a cavity 53, a platform 55, with a base 57.This energy wave source 51 is micro-wave energy wave sources, in order to microwave energy to be provided, this energy wave source 51 is delivered to microwave energy in this cavity device 50 by a wave guide (figure does not show), this energy wave source 51 also can be delivered in this cavity device 50 by an antenna (figure does not show) except importing into this cavity device 50 by this wave guide in addition.This cavity 53 is surrounded on this energy wave source 51 non-enclosedly, and this cavity 53 forms an enclosed space with this base 57.(this cavity curve sphere 10 is shown in this as Fig. 2 A and is not given unnecessary details to be provided with several cavity curve spheres 10 in this cavity 53, and give identical figure number), therefore the energy of energy wave source 41 can evenly reflex on this platform 55 by cavity curve sphere 10, and when the energy of energy wave source 51 is projected to these cavity 53 both sides, also can energy even be projected on the platform 45, in order to improve energy uniformity by this cavity curve sphere 10.This platform 55 more can be connected with a running gear 49 in addition, and this running gear 59 makes this platform 55 can carry out the motion of three-dimensional, can more evenly be projected on this platform by wave source to set the platform motion direction, to make according to user's demand.
See also shown in Figure 6, cavity device the 4th preferred embodiment of the present invention.Its with above-mentioned the 3rd preferred embodiment unique different be in, be provided with a multipotency wave source 51 in this cavity 53, more than being arranged, two energy wave sources provide energy, and, become with the corresponding cavity curve of these multipotency wave source 51 quantity sphere 10 arrays, in order to reflect this multi-source energy waves, make it be projected to platform 55, as for other principle of operation, complete in the above embodiments, to disclose, just do not add to give unnecessary details at this.
See also the stereographic map and the side-view of cavity device of the present invention the 4th preferred embodiment shown in Fig. 6 A and Fig. 6 B.This cavity device 60 comprises: a multipotency wave source, by several can wave source 61a, 61b, 61c (though only draw 3 energy wave sources among the figure, but do not limit the number of this energy wave source, can be provided with according to user's demand) provide energy, a cavity 63, a platform 65, with a base 67.In this preferred embodiment, this energy wave source 61a, 61b, 61c are a micro-wave energy wave source, but also can be a light source or known other energy wave source of those skilled in the art.This cavity 63 forms an enclosed space with this base 67.Be provided with in this cavity 63 with a plurality of can wave source 61a, 61b, corresponding several cavity curve spheres of 61c quantity 10a, 10b, 10c (though only draw 3 cavity curve spheres among the figure, but do not limit the number of cavity curve sphere, can be provided with according to user's demand, and this cavity curve ball looks like described with Fig. 2 A, do not given unnecessary details at this), in order to reflect this multi-source energy waves, make it be projected to platform 65.By modular notion, can provide large-area energy to platform 65 in this embodiment, to carry out large-area diamond coating film.By with this cavity curve sphere 10a, 10b, 10c is arranged at place, platform 65 tops, this energy wave source 61a, 61b, 61c is arranged at this cavity curve sphere 10a respectively, 10b, the focus place of 10c, make the energy of energy wave source 61a can evenly be projected to the Shu first specific region A of platform 65 by this reflection unit 10a, and the energy of energy wave source 61b can evenly be projected to the Shu second specific region B of platform 65 by this cavity curve sphere 10b, and the energy of energy wave source 61c can evenly be projected to Shu the 3rd specific region C of platform 65 by this cavity curve sphere 10c, by above-mentioned configuration, can provide large-area energy wave source, and the energy of this energy wave source also can be projected on the platform evenly.
In present embodiment, the position that energy wave source 61a, 61b, 61c are provided with is on equivalent focus, and in previous embodiment, to describe in detail, give unnecessary details this just no longer doing more, though energy wave source 61a, 61b, 61c and this cavity curve sphere 10a of this preferred embodiment, the number of 10b, 10c are 3, certainly can be according to the energy area of user's needs, the number that increases both can provide user's elasticity configuration energy wave source and this reflection unit to reach modular purpose in order to the area of energy wave source to be provided.
This platform 65 also can be connected with a running gear 69 in addition, this running gear 69 makes this platform 65 can carry out the motion of three-dimensional (for example rotation, straight line swing or other knows the known motion of this operator), can can more evenly be projected on this platform 65 by wave source to set the platform motion direction, to make according to user's demand.
Utilize above-mentioned cavity device 60, can carry out diamond coating film to large-area Shu base material, this base material is placed on this platform 65, and can provide large-area energy by energy wave source 61a, 61b, 61c and this cavity curve sphere 10a, 10b, 10c, evenly be projected on this base material, make each regional homogeneous energy of base material with the growth diamond film, and the running gear 69 of can arranging in pairs or groups moves this platform 65, energy more evenly is projected on the base material.
The above only is preferred embodiment of the present invention, when can not with limit the scope of the invention.Be that all equalizations of doing according to claim of the present invention change and modify, will do not lose main idea of the present invention place, also do not break away from the spirit and scope of the present invention, the former capital should be considered as further enforcement of the present invention.
Claims (13)
1, a kind of cavity device of energy waves reflection unit is characterized in that, comprising:
One energy wave source provides an energy waves; And
One cavity curve sphere, by a Fresnel reflection unit form, a Fresnel reflection unit and part curve sphere is formed, minimum two Fresnel reflection units and part curve sphere are formed and be made up of the Fresnel reflection unit entirely, in above-mentioned four kinds one, in order to reflect this energy waves, make it be projected to a platform, this cavity curve sphere is equivalent parabolic curve sphere, this equivalence parabolic curve sphere tool equivalent focus and this energy wave source are arranged on this equivalence focus, evenly are projected to this platform after making the energy wave reflection.
2, the cavity device of energy waves reflection unit as claimed in claim 1, wherein, this energy wave source is one of microwave and light.
3, the cavity device of energy waves reflection unit as claimed in claim 1, wherein, this cavity curve sphere is an ellipsoidal surface.
4, the cavity device of energy waves reflection unit as claimed in claim 3, wherein, this energy wave source position is located on the equivalent focus of ellipsoidal surface, make the energy wave reflection after, on another equivalent focus of concentration of energy projection ellipsoidal surface.
5, the cavity device of energy waves reflection unit as claimed in claim 1, wherein, this platform also connects a running gear, makes this platform can carry out the motion of three-dimensional.
6, a kind of cavity device of energy waves reflection unit comprises:
One multipotency wave source, having more than two to provide energy by wave source; And
One cavity, it in order to reflect this multi-source energy waves, makes it be projected to a platform by becoming with the corresponding cavity curve of this multipotency wave source quantity sphere array;
It is characterized in that: described cavity curve sphere by a Fresnel reflection unit form, a Fresnel reflection unit and part curve sphere is formed, minimum two Fresnel reflection units and part curve sphere are formed and one of be made up of the Fresnel reflection unit entirely, this cavity curve sphere is equivalent parabolic curve sphere, this equivalence parabolic curve sphere tool equivalent focus, and this multipotency wave source position respectively is located on the equivalent focus of corresponding cavity curve sphere, evenly is projected to this platform after making the energy wave reflection.
7, the cavity device of energy waves reflection unit as claimed in claim 6, wherein, this energy wave source is one of microwave and light.
8, the cavity device of energy waves reflection unit as claimed in claim 6, wherein, this evenly projection select mutual projection different area with select to be incident upon simultaneously equal area one of them.
9, the cavity device of energy waves reflection unit as claimed in claim 6, wherein this cavity curve sphere is the equivalent ellipsoidal sphere.
10, the cavity device of energy waves reflection unit as claimed in claim 9, wherein this multipotency wave source position respectively is located on the equivalent focus of corresponding cavity curve sphere, make the energy wave reflection after, energy throws on another equivalent focus of each equivalent ellipsoidal sphere.
11, the cavity device of energy waves reflection unit as claimed in claim 10, wherein, this energy throws on another equivalent focus of each equivalent ellipsoidal sphere, and is confocal to improve the energy density of projection area.
12, the cavity device of energy waves reflection unit as claimed in claim 10, wherein, this energy throws on another equivalent focus of each equivalent ellipsoidal sphere, and to reach a cavity many high-energy district is arranged for not confocal.
13, the cavity device of energy waves reflection unit as claimed in claim 6, wherein, this platform more connects a running gear, makes this platform can carry out moving of three-dimensional.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200410058202A CN100577863C (en) | 2004-08-17 | 2004-08-17 | A kind of cavity device of energy waves reflection unit |
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| Application Number | Priority Date | Filing Date | Title |
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| CN200410058202A CN100577863C (en) | 2004-08-17 | 2004-08-17 | A kind of cavity device of energy waves reflection unit |
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| CN1737194A CN1737194A (en) | 2006-02-22 |
| CN100577863C true CN100577863C (en) | 2010-01-06 |
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| CN200410058202A Expired - Fee Related CN100577863C (en) | 2004-08-17 | 2004-08-17 | A kind of cavity device of energy waves reflection unit |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI294023B (en) | 2006-03-17 | 2008-03-01 | Ind Tech Res Inst | Reflective illumination device |
| CN108624870B (en) * | 2018-07-05 | 2023-07-28 | 成都纽曼和瑞微波技术有限公司 | Tunable round-parabolic cavity type high-power microwave plasma chemical vapor deposition device |
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