CN100571848C - Equipment for treating exhaust emission - Google Patents
Equipment for treating exhaust emission Download PDFInfo
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- CN100571848C CN100571848C CNB2005100921040A CN200510092104A CN100571848C CN 100571848 C CN100571848 C CN 100571848C CN B2005100921040 A CNB2005100921040 A CN B2005100921040A CN 200510092104 A CN200510092104 A CN 200510092104A CN 100571848 C CN100571848 C CN 100571848C
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- pipeline
- equipment
- exhaust emission
- treating exhaust
- desorption
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- 239000007789 gas Substances 0.000 claims abstract description 64
- 238000003795 desorption Methods 0.000 claims abstract description 54
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 7
- 239000002912 waste gas Substances 0.000 claims description 7
- 229910021536 Zeolite Inorganic materials 0.000 claims description 6
- 239000010457 zeolite Substances 0.000 claims description 6
- 238000010521 absorption reaction Methods 0.000 claims description 3
- 239000010815 organic waste Substances 0.000 abstract description 18
- 230000000694 effects Effects 0.000 abstract description 8
- 238000012423 maintenance Methods 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract description 2
- 230000001590 oxidative effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000012855 volatile organic compound Substances 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000809 air pollutant Substances 0.000 description 1
- 231100001243 air pollutant Toxicity 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 230000000505 pernicious effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000002336 sorption--desorption measurement Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Treating Waste Gases (AREA)
Abstract
The invention discloses a kind of equipment for treating exhaust emission, it comprises: be connected in equipment for treating exhaust emission the inlet region subtract useless system; Incinerator; Be connected to the blast pipe of incinerator outlet side; Be connected first heat exchanger that subtracts useless system and incinerator; The desorption blower fan, its arrival end is provided with first pipeline, and the port of export is provided with and is connected to second pipeline that subtracts useless system; And the airduct that connects the blast pipe and first pipeline.Equipment for treating exhaust emission of the present invention uses airduct, not only can effectively improve gas temperature, and really fully desorption subtract the adsorbed volatile organic waste gas of the system of giving up.In addition, when equipment for treating exhaust emission of the present invention suitably uses valve regulated to enter the exhausted air quantity of desorption blower fan, second heat exchanger that does not need to be provided with as set in existing organic exhaust-gas treatment system also can obtain same effect, so can save equipment initial cost and maintenance cost significantly.
Description
Technical field
The present invention relates to a kind of waste gas treatment equipment, relate in particular to a kind of organic exhaust-gas treatment system (VOC abatement system) that can improve the desorption effect.
Background technology
Along with the domestic economy sustainable development, semi-conductor industry has become one of China's economic development lifeblood.But extensively be subjected to subjects under discussion such as international environmental protection of paying attention to and safety of workers in recent years, also domestic semiconductor industry produced greatest impact.And precise treatment along with high-tech product; even extremely Wei Liang air pollutants all may influence product percent of pass, reliability and personnel's health; therefore no matter from unspecified angles such as environmental protection, workman's safety and product competitions, the air pollution loss and the emission treatment of semiconductor industry are very important important topic.
At present institute of semiconductor factory exhaust gas discharged is mostly based on volatile organic matter, inorganic acid alkali gas etc., the characteristics of its waste gas be air quantity big (＞50,000m
3/ hr) and the low (＜500ppm CH of concentration
4).Now mostly use the equipment disclosed in organic exhaust-gas treatment system (VOC abatement system), for example TaiWan, China patent publication No. 0493056 handle large-wind-volume low-concentration VOC gas (Volatile Organic Compounds, VOCs).This kind treatment system is used two big technology, and one for absorption concentrates, and utilizes zeolite or activated carbon to adsorb VOC gas; Two is oxidizing fire, and the high concentration gas that hot blast desorption saturated zeolite or activated carbon are produced adopts to be sent into oxidation furnace and handle these high concentration pernicious gases in the mode of high-temp combustion.Yet temperature required high when carrying out hot blast desorption and oxidizing fire, its hot blast temperature need reach about 150 ℃～180 ℃ at least when for example carrying out the hot blast desorption, and when carrying out oxidizing fire, its ignition temperature is at least about 760 ℃.Therefore in order to save the energy and cost, often when carrying out hot blast desorption and oxidizing fire, set up the temperature after many group heat exchangers improve exchange in addition.
But because the size of heat exchanger and power can have influence on the temperature after the exchange, if temperature raises not enough, get off for a long time not only zeolite or activated carbon can't reach required desorption temperature and desorption effect, even can the organic exhaust-gas treatment system of related reduction handles and the efficient of burnt gas.Therefore for head it off, then the heat exchanger that need more renew improves heat exchanger effectiveness, or increases the temperature of oxidation furnace high-temp combustion, but because this engineering cost is too high and difficulty of construction is high, the utmost point does not meet the principle that reduces cost and save the energy.
Summary of the invention
In view of the above, the object of the present invention is to provide a kind of waste gas treatment equipment that can solve the existing problem of existing organic exhaust-gas treatment system, have better desorption effect, avoiding having influence on whole exhaust-gas treatment progress, and can reduce cost significantly and save the energy because of changing heat exchanger.
In order to solve aforementioned technical problem, the invention provides a kind of equipment for treating exhaust emission, it comprises: subtract useless system; Incinerator; Be connected to the blast pipe of described incinerator outlet side; Be connected described first heat exchanger that subtracts useless system and described incinerator; The desorption blower fan, the arrival end of this desorption blower fan is connected with first pipeline, and the port of export of this desorption blower fan is connected with second pipeline and is attached to the described useless system that subtracts; And the airduct of described blast pipe of connection and described first pipeline; Wherein, equipment for treating exhaust emission also comprises second pipeline, second heat exchanger and the 7th pipeline, described second pipeline connects the described desorption blower fan and second heat exchanger, the 7th pipeline connects second heat exchanger and subtracts useless system, the gas that is used for desorption is sent to the described useless system that subtracts through described second pipeline, second heat exchanger and the 7th pipeline, is used for the gas of desorption and the exhaust of incinerator and carries out heat exchange in second heat exchanger.
In addition, according to the present invention, the equipment for treating exhaust emission that is provided comprises: what be connected with the inlet region of equipment for treating exhaust emission subtracts useless system; Incinerator; Be connected to the blast pipe of incinerator outlet side; Be connected first heat exchanger that subtracts useless system and incinerator; The desorption blower fan, its arrival end is provided with first pipeline, and its port of export is provided with and is connected to second pipeline that subtracts useless system; And the airduct that connects the blast pipe and first pipeline.
Because equipment for treating exhaust emission of the present invention can improve the temperature of desorption fans entrance end, makes the external environment gas of introducing can reach desorption temperature behind over-heat-exchanger, desorption subtracts the adsorbed VOC gas of useless system fully really.In addition, second heat exchanger that equipment for treating exhaust emission of the present invention does not even need to be provided with in existing organic exhaust-gas treatment system also can reach same effect, thereby can save equipment initial cost and maintenance cost significantly.
Description of drawings
In order further to understand feature of the present invention and technology contents, the present invention is described in detail below in conjunction with accompanying drawing.Certainly, the only for reference and aid illustration of these accompanying drawings is not to be limitation of the present invention.
Fig. 1 is the schematic diagram of equipment for treating exhaust emission of the present invention;
Fig. 2 and Fig. 3 are the local enlarged diagram of equipment for treating exhaust emission of the present invention.
Description of reference numerals
50 equipment for treating exhaust emission 52 subtract useless system
54 incinerators, 56 blast pipes
Blast pipe among the last blast pipe 56b of 56a
60 second heat exchangers, 62 desorption blower fans
64 the 3rd pipelines 66 the 4th pipeline
68 first pipelines, 70 second pipelines
72 the 7th pipelines 74 the 5th pipeline
76 the 6th pipelines 78 the 8th pipeline
80 airducts, 82 first valves
84 first proportion valves, 86 second proportion valves
90 the 3rd proportion valves 92 the 4th proportion valve
The specific embodiment
See also Fig. 1 to Fig. 3, Fig. 1 to Fig. 3 is the schematic diagram of equipment for treating exhaust emission 50 of the present invention.Equipment for treating exhaust emission 50 of the present invention comprises and subtracts useless system 52, incinerator 54, the blast pipe 56 that is connected to incinerator 54 outlet sides, first heat exchanger 58, second heat exchanger 60, desorption blower fan 62, many pipelines as 64,66,68,70,72,74,76,78 etc. and airduct 80.Wherein, subtract useless system 52 and can be adsorption desorption devices such as zeolite runner or activated carbon runner, and blast pipe 56 is made of last blast pipe 56a, middle blast pipe 56b and following blast pipe 56c three parts.
As shown in Figure 1, the 3rd pipeline 64 is set at the porch that subtracts useless system 52, with so that the light-concentration volatile organic exhaust gas as volatile organic waste gas (VOC) and so on that the production equipment end produced enters to subtract in the useless system 52 is adsorbed.The 4th pipeline 66 is set at the exit that subtracts useless system 52 and is connected to blast pipe 56.Volatile organic waste gas in the 3rd pipeline 64 enters and subtracts useless system 52 and after being adsorbed, its waste gas becomes clean waste gas, and wherein 90% cleaned air after absorption is again through the 4th pipeline 66 and blast pipe 56, and is discharged in the atmosphere; Other 10% air quantity then is imported into and does the use of desorption air quantity in the system.
Form after the high concentration volatile organic waste gas, these high concentration volatile organic waste gas transfer to first heat exchanger 58 through the 5th pipeline 74 again and carry out heat exchange, to promote the temperature of high concentration volatile organic waste gas, finish preheating, at last, these heated high concentration volatile organic waste gas enter incinerator 54 via the 6th pipeline 76 and carry out oxidizing fire, enter atmosphere via blast pipe 56 again.Because it is temperature required higher to carry out oxidizing fire, about about 760 ℃, the burning of high concentration volatile organic waste gas so the present invention utilizes first heat exchanger 58 to promote the temperature of high concentration volatile organic waste gas, could be saved the gas energy.
In addition, because prior art may be because second heat exchanger designs be improper or second heat exchanger obstruction causes the temperature of desorption not enough, the desorption poor effect when the desorption volatile organic waste gas, and then make and subtract useless system 52 desorption fully, badly influence the adsorption effect that subtracts the system 52 that gives up.For this reason, the present invention is connected with the airduct 80 and first valve 82 in addition between the blast pipe 56 and first pipeline 68, the gas temperature that is used for transferring to the 7th pipeline 72 is increased between 180 ℃～300 ℃, maintain about 180～250 ℃ so that subtract the desorption temperature of useless system 52, and then effective desorption is adsorbed on the organic substance on zeolite runner or the activated carbon runner.Because it is higher via the volatile organic waste gas temperature after incinerator 54 burnings, greatly about about 760 ℃, waste gas through first heat exchanger after, temperature at middle blast pipe 56b place still is more than 300 ℃, so the present invention utilizes a small amount of volatile organic waste gas after this burning to pass to first pipeline 68 via the airduct 80 and first valve 82, make the gas temperature that enters desorption blower fan 62 at the beginning just be heated to about 80 ℃ by 30 ℃ of room temperatures, temperature raises at least more than 50 ℃, so can make external environment gas higher through second heat exchanger, 60 back temperature, and can be controlled between 180 ℃～300 ℃ approximately, effectively maintain about 180～250 ℃ so that subtract the desorption temperature of useless system 52, be beneficial to desorption.Circuit design of the present invention can make really and subtract the adsorbed complete desorption of volatile organic waste gas of useless system 52.
It should be noted that the present invention also can utilize the combination of pipeline and proportion valve more effectively to control automatically and enter the gas temperature that subtracts useless system 52, as shown in Figure 2.Fig. 2 is the local enlarged diagram of equipment for treating exhaust emission 50 of the present invention.Airduct 80 comprises first valve 82, and it can be temperature control hand-operated valve, is used to control the volatile organic waste gas amount that enters first pipeline 68.In addition, in second pipeline 70, first proportion valve 84 can be set again, second proportion valve 86 is set in the 8th pipeline 78 again, be used for controlling for the second time the temperature of gas.When gas mix with airduct 80 via first pipeline 68, through desorption blower fan 62 after, if temperature is too high, can use first proportion valve 84 to control the amount that gas enters second heat exchanger 60, make not gas pass to the 7th pipeline 72, reduce the gas temperature that enters heat exchanger 60 via the 8th pipeline 78 by second heat exchanger 60.For example, if gas is 100 ℃ through desorption blower fan 62 back temperature, become 230 ℃～250 ℃ through second heat exchanger, 60 back gas temperatures again, but desorption temperature only needs 150～180 ℃, therefore can utilize the gas of first proportion valve, 84 controls 60%～80% to enter second heat exchanger 60,40%～20% gas then passes to the 7th pipeline 72 via the 8th pipeline 78, reduces the gas temperature through second heat exchanger 60 whereby.Wherein, first and second proportion control valve is the ratio automatic valve.
In addition even more noteworthy, as mentioned above, because blast pipe 56b passes to airduct 80 and arrives first pipeline 68 again in the volatile organic waste gas process after can utilizing incinerator 54 to burn, can increase the 3rd and the 4th proportional control valve 90,92 again newly in addition, they are arranged at respectively on the airduct 80 and first pipeline 68.Because the delivery temperature of middle blast pipe 56b is at least more than 300 ℃, therefore can by desorption blower fan 62 bleed and third and fourth proportional control valve 90,92 is adjusted.When temperature is too high, drives big the 3rd proportional control valve 90, and turn down the 4th proportional control valve 92, otherwise, if temperature is crossed when hanging down, turn down the 3rd proportional control valve 90, drive big the 4th proportional control valve 92, can be adjusted to the temperature that sets automatically by means of this mode, also can in second pipeline 70, set up the filter (not shown) in addition,, so just can save second heat exchanger 60 in order to filtering dust equigranular thing, thereby can reduce the cost of equipment significantly, as shown in Figure 3.Wherein, the 3rd and the 4th proportion control valve is the ratio automatic valve.
In sum, equipment for treating exhaust emission of the present invention compared with prior art has the following advantages: equipment for treating exhaust emission of the present invention uses airduct, this not only can effectively improve gas temperature, and can subtract the adsorbed volatile organic waste gas of useless system by complete really desorption.In addition, equipment for treating exhaust emission of the present invention is when suitably the utilization valve regulated enters the exhausted air quantity of desorption blower fan, second heat exchanger that does not even need to be provided with as set in existing organic exhaust-gas treatment system also can reach same effect, so can save equipment initial cost and maintenance cost significantly.
Below only preferred implementation of the present invention is described, all equivalents of having done in claim scope of the present invention all fall into the present invention's scope required for protection with modification.
Claims (11)
1. equipment for treating exhaust emission, it comprises:
Subtract useless system;
Incinerator;
Be connected to the blast pipe of described incinerator outlet side;
Be connected described first heat exchanger that subtracts useless system and described incinerator;
The desorption blower fan, the arrival end of this desorption blower fan is connected with first pipeline, and the port of export of this desorption blower fan is connected with second pipeline and is attached to the described useless system that subtracts; And
The airduct that connects described blast pipe and described first pipeline;
Wherein, equipment for treating exhaust emission also comprises second pipeline, second heat exchanger and the 7th pipeline, described second pipeline connects the described desorption blower fan and second heat exchanger, the 7th pipeline connects second heat exchanger and subtracts useless system, the gas that is used for desorption is sent to the described useless system that subtracts through described second pipeline, second heat exchanger and the 7th pipeline, is used for the gas of desorption and the exhaust of incinerator and carries out heat exchange in second heat exchanger.
2. equipment for treating exhaust emission as claimed in claim 1, wherein, described to subtract useless system be the zeolite runner.
3. equipment for treating exhaust emission as claimed in claim 1, wherein, described to subtract useless system be the activated carbon runner.
4. equipment for treating exhaust emission as claimed in claim 1, wherein, described airduct also comprises in order to control and enters the gas flow of described first pipeline and first valve of gas temperature.
5. equipment for treating exhaust emission as claimed in claim 4, wherein, described first valve is a hand-operated valve.
6. equipment for treating exhaust emission as claimed in claim 1, wherein, also comprise the 3rd pipeline, the 4th pipeline, the 5th pipeline and the 6th pipeline, described the 3rd pipeline is used for waste gas is sent into the described system of giving up that subtracts to adsorb, described the 4th pipeline is used for the " clean " exhaust gas after the absorption is sent to described blast pipe, described the 5th pipeline connects described useless system and described first heat exchanger of subtracting, and described the 6th pipeline connects described first heat exchanger and described incinerator.
7. equipment for treating exhaust emission as claimed in claim 1 wherein, also comprises the 8th pipeline, and described the 8th pipeline is connected described second pipeline and described the 7th pipeline.
8. equipment for treating exhaust emission as claimed in claim 7, wherein, described second pipeline of described desorption blower fan comprises first proportion valve.
9. equipment for treating exhaust emission as claimed in claim 8, wherein, described first proportion valve is used as the autoamtic temperature controlling valve of control desorption temperature.
10. equipment for treating exhaust emission as claimed in claim 7, wherein, described the 8th pipeline of described desorption blower fan comprises second proportion valve.
11. equipment for treating exhaust emission as claimed in claim 10, wherein, described second proportion valve is used as the autoamtic temperature controlling valve of control desorption temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100921040A CN100571848C (en) | 2005-08-19 | 2005-08-19 | Equipment for treating exhaust emission |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100921040A CN100571848C (en) | 2005-08-19 | 2005-08-19 | Equipment for treating exhaust emission |
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| Publication Number | Publication Date |
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| CN1915478A CN1915478A (en) | 2007-02-21 |
| CN100571848C true CN100571848C (en) | 2009-12-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2005100921040A Expired - Fee Related CN100571848C (en) | 2005-08-19 | 2005-08-19 | Equipment for treating exhaust emission |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101255992B (en) * | 2008-04-10 | 2010-06-09 | 友达光电股份有限公司 | Method for control of stove body temperature and processing system for incineration of organic waste gas |
| CN103845999A (en) * | 2012-11-28 | 2014-06-11 | 宏泰电工股份有限公司 | Volatile organic compound recovery system and recovery process thereof |
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2005
- 2005-08-19 CN CNB2005100921040A patent/CN100571848C/en not_active Expired - Fee Related
Non-Patent Citations (4)
| Title |
|---|
| 吸附、催化燃烧法治理有机废气的研究. 张文俊等.北京轻工业学院学报，第15卷第1期. 1997 |
| 吸附、催化燃烧法治理有机废气的研究. 张文俊等.北京轻工业学院学报，第15卷第1期. 1997 * |
| 有机废气催化燃烧技术. 何毅等.江苏环境科技，第17卷第1期. 2004 |
| 有机废气催化燃烧技术. 何毅等.江苏环境科技，第17卷第1期. 2004 * |
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| CN1915478A (en) | 2007-02-21 |
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