CN100561340C - The method of optical close correction - Google Patents
The method of optical close correction Download PDFInfo
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- CN100561340C CN100561340C CNB200710126596XA CN200710126596A CN100561340C CN 100561340 C CN100561340 C CN 100561340C CN B200710126596X A CNB200710126596X A CN B200710126596XA CN 200710126596 A CN200710126596 A CN 200710126596A CN 100561340 C CN100561340 C CN 100561340C
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Abstract
A kind of method of optical close correction comprises the following steps: to provide at least one to treat the exposure circuit figure; Form at least one perpendicular to the auxiliary pattern to be exposed for the treatment of the exposure circuit figure, the described auxiliary pattern size of waiting to expose is less than litho machine resolution; To treat that exposure circuit figure and auxiliary pattern to be exposed are transferred on the photomask, form circuitous pattern and auxiliary pattern.Through above-mentioned steps, when not only on photomask, being reflected on the Semiconductor substrate, can not form photoresist film figure corresponding to auxiliary pattern perpendicular to the auxiliary pattern of circuitous pattern, imaging results is improved, but also improved graphics resolution and DOF.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, particularly in the photomask manufacture craft, be used for the method for optical close correction (OPC).
Background technology
Along with the develop rapidly of semiconductor fabrication, semiconductor devices is in order to reach arithmetic speed faster, bigger data storage amount and more function, and semi-conductor chip develops to high integration direction more; And the integrated level of semi-conductor chip is high more, and (CD) is more little for the critical dimension of semiconductor devices.Under the 90nm process conditions, the CD that VLSI (very large scale integrated circuit) is used has entered into tens scopes to the hundreds of nanometer.
In order to realize small CD, must make image focusing meticulousr on the photomask on the photoresist of Semiconductor substrate, and must increase optical resolution, to make semiconductor devices near optical resolution limit in the photomask technology.Resolution enhance technology comprises the long light source of radiothermy, phase-shift mask method and utilizes the method for off-axis illumination (OAI).Application number is that 02131645.7 Chinese patent application discloses a kind of off-axis illumination (OAI) method, theoretically, utilizing under the situation of OAI, high about 1.5 times of the resolution when the about Billy of resolution is shone with tradition, and can increase the depth of focus (DOF).By the OAI technology, the minimum space cycle that is printed on live width CD on the substrate by optical system can further be shortened, but can produce optical close effect.As shown in Figure 2, optical close effect comes from when the very close circuitous pattern 40 of pitch on the photomask 4 is transferred on the photoresist of Semiconductor substrate 5 in little shadow mode, because the light wave of adjacent pattern interacts, that is diffraction, and cause the distortion distortion of the graphic design of transferring at last on the photoresist 50, produce the change fixed according to pattern form.In the deep-submicron device, because the lines very dense, optical close effect can reduce the resolution of optical system for exposure figure.
Optical close effect be included in forbid the reducing of live width in the pitch range, line end shortens and resolution decline phenomenon such as corner passivation, these phenomenons be since in forbidding pitch the decline of DOF and the increase of dilution of precision (MEEF) cause.As shown in Figure 3, forbid that pitch (oval frame goes out part among the figure) locates DOF and reduce, cause optical close effect easily.
The optical close effect modification method is the figure on the correcting light mask in advance, for example uses the method for the auxiliary scattering strip (SRAF) of inferior diffraction limit as auxiliary pattern on photomask.It specifically is 95102281.4 the disclosed technical scheme of Chinese patent as the patent No., as shown in Figure 1, in circuit layout Fig. 1 of optical close correction (OPC) software, add the auxiliary pattern 15 of waiting to expose between the exposure circuit figure 10 in adjacent treating, wherein wait to expose auxiliary pattern 15 with treat that exposure circuit figure 10 is parallel, wait to expose auxiliary pattern 15 for the auxiliary scattering strip of inferior diffraction limit, in order to weaken the light intensity for the treatment of between the exposure circuit figure 10 by adjacent; And then will in OPC software, design treat exposure circuit figure 10 and the auxiliary pattern 15 of waiting to expose inputs in the photomask manufacturing equipment together, equipment can according to input treat exposure circuit figure 10 and wait to expose auxiliary pattern 15 sizes and position automatically on photomask with chromium layer or phase shifter formation circuitous pattern and auxiliary pattern.The expose size of auxiliary pattern 15 for the treatment of is here decided according to treating exposure circuit figure 10, general wide is 20nm to 45nm, long is 80nm to 120nm, the width of auxiliary pattern 15 of waiting to expose is to treat 2/5 to 4/5 of exposure circuit figure 10 width, and length probably deducts 2 to 3 times of auxiliary pattern 15 width of waiting to expose for the adjacent spacing for the treatment of exposure circuit figure 10.Because when the auxiliary pattern on the photomask is reflected on the Semiconductor substrate, because the auxiliary pattern size on the photomask is less than the resolution of litho machine, therefore on Semiconductor substrate, can not form photoresist film figure corresponding to auxiliary pattern, the method of the auxiliary scattering strip of the inferior diffraction limit of this adding is well suited for being used for revising isolated relatively figure makes it seem more intensive, increase the DOF behind the isolated graph exposure and improve the quality of little shadow, intensive graphic structure can significantly increase the degree of freedom of processing procedure simultaneously.
Existing optical close modification method is not suitable for revises the optical close effect of forbidding in the pitch range, because forbid that the distance between pitch is little, for 120nm to 160nm, when the auxiliary pattern that is parallel to circuitous pattern on photomask is reflected on the Semiconductor substrate, formation is very high corresponding to the probability of the photoresist film figure of auxiliary pattern, and cause picture variation as a result, and then seriously limited the development of advanced lithographic processing procedure.
Summary of the invention
The problem that the present invention solves provides a kind of method of optical close correction, prevent owing to forbid that the distance of pitch is little, when the auxiliary pattern that is parallel to circuitous pattern on photomask is reflected on the Semiconductor substrate, formation is very high corresponding to the probability of the photoresist film figure of auxiliary pattern, and cause picture variation as a result, and then seriously limited the development of advanced lithographic processing procedure.
For addressing the above problem, the invention provides a kind of method of optical close correction, comprise the following steps: to provide at least one to treat the exposure circuit figure; Form at least one perpendicular to the auxiliary pattern to be exposed for the treatment of the exposure circuit figure, the described auxiliary pattern size of waiting to expose is less than litho machine resolution; To treat that exposure circuit figure and auxiliary pattern to be exposed are transferred on the photomask, form circuitous pattern and auxiliary pattern.
Optionally, the length of the described auxiliary pattern of waiting to expose is 80nm to 120nm, and width is 25nm to 45nm.
Optionally, the adjacent distance of waiting to expose between auxiliary pattern is to wait to expose 2 times to 3 times of auxiliary pattern width, and the adjacent distance of waiting to expose between auxiliary pattern is 50nm to 135nm.
Optionally, the auxiliary pattern and treat between the exposure circuit figure gappedly of waiting to expose, described clearance distance is 55nm to 65nm.
Optionally, in the optical close fixed software, form auxiliary pattern to be exposed.
Optionally, the width for the treatment of the exposure circuit figure is 65nm to 85nm, and the distance between the exposure circuit figure is 120nm to 160nm in adjacent treating.
Optionally, use electron beam or laser beam writing station will treat that exposure circuit figure and auxiliary pattern to be exposed are transferred on the photomask.
Compared with prior art, above scheme has the following advantages: at the auxiliary pattern of forbidding being provided with between the circuitous pattern of pitch perpendicular to circuitous pattern, when not only on photomask, being reflected on the Semiconductor substrate perpendicular to the auxiliary pattern of circuitous pattern, can not form photoresist film figure corresponding to auxiliary pattern, imaging results is improved, but also improved graphics resolution and DOF.
Description of drawings
Fig. 1 is that prior art is used the synoptic diagram of SRAF as auxiliary pattern;
Fig. 2 is the design sketch that prior art does not add auxiliary pattern;
Fig. 3 is that prior art does not add the measured DOF curve map of auxiliary pattern;
Fig. 4 is that the present invention carries out optical close correction process flow diagram with SRAF as auxiliary pattern;
Fig. 5 A to Fig. 5 C is the present invention carries out the optical close correction as auxiliary pattern with SRAF a synoptic diagram;
Fig. 6 is that the present invention adds the design sketch of SRAF as auxiliary pattern;
Fig. 7 adds auxiliary pattern for the present invention and prior art does not add the measured DOF curve of auxiliary pattern contrast figure.
Embodiment
Along with the device that integrated circuit comprised is more and more, require individual devices size and more and more littler at interval.Since 0.13 micron product, optical close effect becomes significantly, and optical close effect comes from the interference between the light of scattering on the figure that closes on mutually.Representational optical close effect be included in forbid the reducing of live width in the pitch range, line end shortens and resolution decline phenomenon such as corner passivation, these phenomenons be since in forbidding pitch the decline of DOF and the increase of MEEF cause.To 0.13 micron and above technology, the optical close correction comprises that the stable and corner of close paucicostellae balanced bandwidth, line end adds upholstery border and has been enough to satisfy the inhomogeneity requirement of live width.To 0.13 micron and following technology, what the complicated more optical close effect correction based on model just became is indispensable because it can do correction to various complicated situations with the optical model of calibrating.The more general auxiliary scattering strip (SRAF) for the inferior diffraction limit of use in figure strengthens the depth of focus (DOF), but owing to forbid that the distance of pitch is little, when the auxiliary pattern that is parallel to circuitous pattern on photomask is reflected on the Semiconductor substrate, formation is very high corresponding to the probability of the photoresist film figure of auxiliary pattern, make the imaging results variation like this, and then seriously limited the development of advanced lithographic processing procedure.The present invention is at the auxiliary pattern of forbidding being provided with between the circuitous pattern of pitch perpendicular to circuitous pattern, when the auxiliary pattern that not only is parallel to circuitous pattern on photomask is reflected on the Semiconductor substrate, do not form photoresist film figure corresponding to auxiliary pattern, imaging results is improved, but also improved graphics resolution and DOF.For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the specific embodiment of the present invention is described in detail below in conjunction with accompanying drawing.
Fig. 4 is that the present invention carries out optical close correction process flow diagram with SRAF as auxiliary pattern.As shown in Figure 4, execution in step S201 provides at least one to treat the exposure circuit figure; Execution in step S202 forms at least one perpendicular to the auxiliary pattern to be exposed for the treatment of the exposure circuit figure, and the described auxiliary pattern size of waiting to expose is less than litho machine resolution; Execution in step S203 will treat that exposure circuit figure and auxiliary pattern to be exposed are transferred on the photomask, form circuitous pattern and auxiliary pattern.
Fig. 5 A to Fig. 5 C is the present invention carries out the optical close correction as auxiliary pattern with SRAF a synoptic diagram.Shown in Fig. 5 A, on the side 200 for the treatment of exposure circuit figure 20, define tie point S with OPC software
1, S
2, S
3, S
4, S
5, S
6, S
7, S
8, definition tie point W on the first side 210 for the treatment of exposure circuit figure 21
1, W
2, W
3, W
4, W
5, W
6, W
7, W
8, definition tie point T on the second side 211 for the treatment of exposure circuit figure 21
1, T
2, T
3, T
4, T
5, T
6, T
7, T
8, definition tie point U on the side 220 for the treatment of exposure circuit figure 22
1, U
2, U
3, U
4, U
5, U
6, U
7, U
8, wherein treat the tie point S on the side 200 of exposure circuit figure 20
1, S
2, S
3, S
4, S
5, S
6, S
7, S
8, the tie point W on the first side 210 for the treatment of exposure circuit figure 21
1, W
2, W
3, W
4, W
5, W
6, W
7, W
8, the tie point T on the second side 211 for the treatment of exposure circuit figure 21
1, T
2, T
3, T
4, T
5, T
6, T
7, T
8And treat tie point U on the side 220 of exposure circuit figure 22
1, U
2, U
3, U
4, U
5, U
6, U
7, U
8Corresponding one by one mutually, be in same horizontal level.
Shown in Fig. 5 B, will treat tie point S on exposure circuit figure 20 sides 200 with line 23
1 First side 210 tie point W with circuitous pattern 21
1Connect, use line 23 tie point S on circuitous pattern 20 sides 200
2With the first side 210 tie point W that treat exposure circuit figure 21
2Connect, form perpendicular to the auxiliary pattern 24 that exposes of waiting for the treatment of exposure circuit figure 20,21; To treat tie point S on exposure circuit figure 20 sides 200 with line 23
3With the first side 210 tie point W that treat exposure circuit figure 21
3Connect, will treat tie point S on exposure circuit figure 20 sides 200 with line 23
4With the first side 210 tie point W that treat exposure circuit figure 21
4Connect, form perpendicular to the auxiliary pattern 24 that exposes of waiting for the treatment of exposure circuit figure 20,21; To treat tie point S on exposure circuit figure 20 sides 200 with line 23
5With the first side 210 tie point W that treat exposure circuit figure 21
5Connect, will treat tie point S on exposure circuit figure 20 sides 200 with line 23
6With the first side 210 tie point W that treat exposure circuit figure 21
6Connect, form perpendicular to the auxiliary pattern 24 that exposes of waiting for the treatment of exposure circuit figure 20,21; To treat tie point S on exposure circuit figure 20 sides 200 with line 23
7With the first side 210 tie point W that treat exposure circuit figure 21
7Connect, will treat tie point S on exposure circuit figure 20 sides 200 with line 23
8With the first side 210 tie point W that treat exposure circuit figure 21
8Connect, form perpendicular to the auxiliary pattern 24 that exposes of waiting for the treatment of exposure circuit figure 20,21.
To treat tie point U on exposure circuit figure 22 sides 220 with line 23
1With the second side 211 tie point T that treat exposure circuit figure 21
1Connect, will treat tie point U on exposure circuit figure 22 sides 220 with line 23
2With the second side 211 tie point T that treat exposure circuit figure 21
2Connect, form perpendicular to the auxiliary pattern 24 that exposes of waiting for the treatment of exposure circuit figure 22,21; To treat tie point U on exposure circuit figure 22 sides 220 with line 23
3With the second side 211 tie point T that treat exposure circuit figure 21
3Connect, will treat tie point U on exposure circuit figure 22 sides 220 with line 23
4With the second side 211 tie point T that treat exposure circuit figure 21
4Connect, form perpendicular to the auxiliary pattern 24 that exposes of waiting for the treatment of exposure circuit figure 22,21; To treat tie point U on exposure circuit figure 22 sides 220 with line 23
5With the second side 211 tie point T that treat exposure circuit figure 21
5Connect, will treat tie point U on exposure circuit figure 22 sides 220 with line 23
6With the second side 211 tie point T that treat exposure circuit figure 21
6Connect, form perpendicular to the auxiliary pattern 24 that exposes of waiting for the treatment of exposure circuit figure 22,21; To treat tie point U on exposure circuit figure 22 sides 220 with line 23
7With the second side 211 tie point T that treat exposure circuit figure 21
7Connect, will treat tie point U on exposure circuit figure 22 sides 220 with line 23
8With the second side 211 tie point T that treat exposure circuit figure 21
8Connect, form perpendicular to the auxiliary pattern 24 that exposes of waiting for the treatment of exposure circuit figure 22,21.
Shown in Fig. 5 C, treat the exposure circuit figure and the auxiliary pattern of waiting to expose made in the OPC software are imported in the layout file software for editing, by the layout file software for editing, treat the exposure auxiliary pattern and do whole dwindling, and will treat that the exposure circuit figure and the auxiliary pattern of waiting to expose input in the photomask manufacturing equipment together, equipment can be used chromium layer or phase shifter formation circuitous pattern 26 and auxiliary pattern 25 automatically according to treat exposure circuit figure and wait to expose the auxiliary pattern size and the position of input on photomask 2.The length that is transferred to the auxiliary pattern 25 on photomask 2 is 40nm to 80nm, and width is 25nm to 45nm, forms gap 27 between auxiliary pattern 25 and the circuitous pattern 26, and the distance in gap 27 is 40nm to 60nm.
In the present embodiment, in OPC software, the width of each auxiliary pattern 24 of waiting to expose equates, is 30nm to 50nm, concrete example such as 30nm, 35nm, 40nm, 45nm or 50nm.The distance of adjacent two 24 of auxiliary patterns of waiting to expose is 2 times of auxiliary pattern 24 width, is 60nm to 100nm, concrete example such as 60nm, 70nm, 80nm, 90nm or 100nm.
In the present embodiment, in OPC software, treat exposure circuit figure 20 and electron beam or treat between the exposure circuit figure 21 distance, treat exposure circuit figure 21 and treat that the distance between the exposure circuit figure 22 is 120nm to 160nm, concrete example such as 120nm, 130nm, 140nm, 150nm or 160nm.The width for the treatment of exposure circuit figure 20,21,22 can be 65nm to 85nm, and concrete width is 65nm, 75nm or 85nm for example, the preferred 75nm of present embodiment.
In the present embodiment, the width of the circuitous pattern 26 on photomask blank 2 is 65nm to 85nm, and concrete width is 65nm, 75nm or 85nm for example, the preferred 75nm of present embodiment.Distance between adjacent two circuitous patterns 26 is 120nm to 160nm, concrete example such as 120nm, 130nm, 140nm, 150nm or 160nm, the preferred 160nm of present embodiment.The length concrete example of auxiliary pattern 25 such as 40nm, 50nm, 60nm, 70nm or 80nm, the preferred 60nm of present embodiment; Width is concrete example such as 25nm, 30nm, 35nm, 40nm or 45nm, the preferred 30nm of present embodiment.The distance of adjacent two 25 of auxiliary patterns of waiting to expose is 2.4 times of auxiliary pattern 25 width, is 60nm to 108nm, concrete example such as 60nm, 70nm, 80nm, 90nm, 100nm or 108nm.Gap 27 apart from concrete example such as 40nm, 50nm, 60nm, present embodiment is preferably 50nm.
In the present embodiment, the photomask manufacturing equipment is electron beam writing station or laser beam writing station.
Fig. 6 is that the present invention adds the design sketch of SRAF as auxiliary pattern.As shown in Figure 6, between per two circuitous patterns 30 of photomask blank 3 length being set is 60nm, width is the auxiliary pattern 31 perpendicular to circuitous pattern of 30nm, auxiliary pattern 31 two ends are 60nm from the distance of adjacent circuit figure 30, with the figure transfer on the photomask blank 3 to Semiconductor substrate 6, with enlargement factor is that 150000 times to 200000 times secondary electron imaging microscope is observed, the discovery figure is high-visible, resolution improves, each circuitous pattern 60 edges do not have scattering to occur, and because the size of auxiliary pattern is lower than the resolution of litho machine, so auxiliary pattern is not transferred on the Semiconductor substrate 6.
Fig. 7 adds auxiliary pattern for the present invention and prior art does not add the measured DOF curve of auxiliary pattern contrast figure.Figure intermediate cam form point line is provided with the DOF curve that the SRAF perpendicular to circuitous pattern obtains in the middle of the figure for the present invention, the rhombus dotted line is not provided with the DOF curve that SRAF obtains for routine in the middle of figure, obviously pattern dividing method of the present invention DOF in forbidding pitch (oval frame goes out part among the figure) scope is improved.
Though the present invention with preferred embodiment openly as above; but it is not to be used for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can make possible change and modification, so protection scope of the present invention should be as the criterion with the scope that claim of the present invention was defined.
Claims (10)
1. the method for an optical close correction is characterized in that, comprises the following steps:
Provide at least one to treat the exposure circuit figure;
Form at least one perpendicular to treat the exposure circuit figure and with the auxiliary pattern to be exposed for the treatment of that the exposure circuit figure is connected, the described auxiliary pattern size of waiting to expose is less than litho machine resolution;
To treat that exposure circuit figure and auxiliary pattern to be exposed are transferred on the photomask, form circuitous pattern and auxiliary pattern.
2. the method for optical close correction according to claim 1 is characterized in that: the length of the described auxiliary pattern of waiting to expose is 120nm to 160nm, and width is 30nm to 50nm.
3. the method for optical close correction according to claim 2 is characterized in that: the adjacent distance of waiting to expose between auxiliary pattern is to wait to expose 2 times of auxiliary pattern width.
4. the method for optical close correction according to claim 3 is characterized in that: the adjacent distance of waiting to expose between auxiliary pattern is 60nm to 100nm.
5. the method for optical close correction according to claim 1 is characterized in that: gapped between auxiliary pattern and circuitous pattern.
6. the method for optical close correction according to claim 5 is characterized in that: described clearance distance is 40nm to 60nm.
7. according to the method for each described optical close correction of claim 1 to 5, it is characterized in that: in the optical close fixed software, form auxiliary pattern to be exposed.
8. the method for optical close correction according to claim 1 is characterized in that: the width for the treatment of the exposure circuit figure is 65nm to 85nm.
9. the method for optical close correction according to claim 8 is characterized in that: the distance between the exposure circuit figure is 120nm to 160nm in adjacent treating.
10. the method for optical close correction according to claim 1 is characterized in that: use electron beam or laser beam writing station will treat that exposure circuit figure and auxiliary pattern to be exposed are transferred on the photomask.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB200710126596XA CN100561340C (en) | 2006-12-04 | 2007-06-22 | The method of optical close correction |
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| CN200610119046.0 | 2006-12-04 | ||
| CN200610119046 | 2006-12-04 | ||
| CNB200710126596XA CN100561340C (en) | 2006-12-04 | 2007-06-22 | The method of optical close correction |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101893819B (en) * | 2009-05-20 | 2011-12-14 | 上海华虹Nec电子有限公司 | Method for improving graphics critical dimension uniformity in mask |
| CN101644889B (en) * | 2009-06-24 | 2012-12-12 | 上海宏力半导体制造有限公司 | Photoetching scattering strip for improving focal depth and manufacturing method thereof |
| CN101957556B (en) * | 2009-07-16 | 2012-05-23 | 中芯国际集成电路制造(上海)有限公司 | Mask picture modification method, mask manufacturing method and optical proximity correction method |
| CN102435154A (en) * | 2011-09-15 | 2012-05-02 | 上海华力微电子有限公司 | Shape design of novel critical dimension monitoring structure |
| CN104570586B (en) * | 2013-10-23 | 2019-03-29 | 中芯国际集成电路制造(北京)有限公司 | The acquisition methods of optical proximity correction model |
| CN104614930B (en) * | 2013-11-05 | 2019-01-22 | 中芯国际集成电路制造(上海)有限公司 | Establish method, the method for optical adjacent calibration ownership goal figure of OPC model |
| CN104678695B (en) * | 2013-11-26 | 2019-03-12 | 中芯国际集成电路制造(上海)有限公司 | The labeling method and labelling apparatus of resolution chart |
| CN110119062B (en) * | 2018-02-06 | 2022-09-20 | 中芯国际集成电路制造(上海)有限公司 | Optical proximity correction method, mask manufacturing method and patterning process |
| CN110647008B (en) * | 2019-09-26 | 2023-02-03 | 上海华力集成电路制造有限公司 | Method for screening SBAR rules |
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Effective date of registration: 20111121 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |