CN100559512C - Device and method for controllably preparing optical fiber probe - Google Patents
Device and method for controllably preparing optical fiber probe Download PDFInfo
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- CN100559512C CN100559512C CNB2006100286269A CN200610028626A CN100559512C CN 100559512 C CN100559512 C CN 100559512C CN B2006100286269 A CNB2006100286269 A CN B2006100286269A CN 200610028626 A CN200610028626 A CN 200610028626A CN 100559512 C CN100559512 C CN 100559512C
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 136
- 239000000523 sample Substances 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 39
- 239000000835 fiber Substances 0.000 claims abstract description 26
- 230000007797 corrosion Effects 0.000 claims description 35
- 238000005260 corrosion Methods 0.000 claims description 35
- 239000002253 acid Substances 0.000 claims description 22
- 238000002360 preparation method Methods 0.000 claims description 18
- 230000003068 static effect Effects 0.000 claims description 17
- 238000004140 cleaning Methods 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 9
- 239000002904 solvent Substances 0.000 claims description 6
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- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229940085805 fiberall Drugs 0.000 description 2
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- 102000029749 Microtubule Human genes 0.000 description 1
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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Abstract
The device is composed of a fiber probe position control device, a programmable control circuit board and a motor control program: the motor control program is a code which is burnt in the memory of the programmable microprocessor chip and is programmed according to the technical process of manufacturing the optical fiber probe to control and drive the automatic running of the rotating speed, the rotating direction and the duration time of the corresponding speed of the rotating motor and the direct current motor. The invention has the characteristics of good repeatability, wide adjustable range and simple operation, and can obtain the optical fiber probe with high repetition rate, super sharp tip, controllable tip cone shape, uniform tip thinning and smooth surface.
Description
Technical field
The present invention relates to scan-probe, particularly a kind of apparatus and method of controlled making optical fiber probe.
Background technology
In the scan-probe technology, the optical microscope for scanning near field of having realized the optics contrast has been widely used in fields such as optical diffraction and waveguide device, material science, biology.For optical microscope for scanning near field, one of its core component is the little aperture apparatus of aperture less than wavelength, and the aperture of little aperture apparatus has determined the resolution upper limit of optical microscope for scanning near field.Little aperture apparatus with the most use is exactly an optical fiber probe at present.In optical microscope for scanning near field,, the light beam by optical fiber probe is restricted in the horizontal as much as possible in order to obtain the high-resolution information of sample; Also to make by the luminous flux of restricted area big as much as possible, to obtain higher signal to noise ratio (S/N ratio).Also require the consistance (repeatability) of optical fiber to get well in addition, the cost of making optical fiber probe is low.Actual optical fiber probe mainly designs and makes by above-mentioned requirements.At present, the main method of preparation optical fiber probe is to add hot-drawing method and chemical corrosion method, their technological process is respectively: adding hot-drawing method is to utilize the microtubule drawing machine, with carbon dioxide laser optical fiber limit heating edge is stretched, and makes its fracture to form the smooth needle point of end face; Chemical corrosion method is optical fiber to be placed on carry out corroding method in the hydrofluoric acid solution.The aperture of the fiber optic tip that two kinds of methods form is by being about the thick aluminium film of 100nm at most advanced and sophisticated side evaporation, reserving uncoated printing opacity aperture at needle tip again simultaneously, in this way can be the size Control of printing opacity aperture at 20～50nm.Yet, higher with the optical fiber probe cost that adds the hot-drawing method preparation, and can not obtain to satisfy the tip multiple use requirement, that cone shape is controlled.Chemical corrosion method has two types; be static corrosion method and dynamic etch; the static corrosion method is that the optical fiber that will remove covering inserts in the hydrofluorite; keep static; because the acid solution tension force effect different with organic protection solvent; can form the liquid level of new falcate at optical fiber surface; the final corrodible needle point that goes out cone shape; though this etch equipment requirements is simple; but be difficult to control, especially can not control corrosion speed, though the needle point of gained can be very sharp; but, therefore do not have too big use and be worth because the too for a short time luminous flux that causes of needle point angulus pyramidis is extremely low.In order to realize preparing the ideal fiber probe that has cone shape and window size concurrently, someone will add hot-stretch and chemical corrosion method combines, and the para-curve cone shape of better logical optical efficiency and the better needle point of window size have been prepared, but the repeated non-constant of this method, but also be difficult to prepare the needle point of different cone shapes.Therefore, design and produce the corrosion device of the optical fiber probe that cone shape is controlled, repetition rate is high, the widespread use in more areas has significance to optical microscope for scanning near field.
Technology " device and method of siphon lift method corrosion preparation optical fiber the microprobe " (patent No.: 03131830.4) formerly, during this device work, control the flow direction of water by the liquid level difference of regulating the water surface between siphon primary tank and the attached container of siphon, and control the flow velocity of water by the size of regulating siphon speed governing valve, thereby the corrosive liquid container that is holding hydrofluorite is moved along with moving up and down of suspension objective table, realize that optical fiber with respect to etchant solution moving up or down, finally can obtain optical fiber probe preferably.This apparatus structure is succinct, and technical conditions are easy to realize.But obviously have the following disadvantages:
1, owing to adopt the suspension objective table, therefore when regulating vessel level, the suspension objective table is easy to move left and right and up-down vibration, and this can cause optical fiber and etchant solution to relatively move, thus the cone shape of the probe that influence corrodes out;
2, this plant automation degree is lower, and artificial interference is many, and the people can not leave, and artifical influence factor is more, poor accuracy.For example use size that manually changes siphon speed governing valve and the time of controlling twice change, its accuracy is very poor, and this makes the repeatability of experiment condition descend greatly, thereby can cause the repetition rate of optical fiber probe low;
Although 3 adopt micrometer caliper can control the height that optical fiber descends, but since can not be quantitative know the residing position of each mounted optical fiber, optical fiber insertion acid solution actual grade still there are differences during each the experiment, thereby also influence the consistance of experiment condition, therefore also can influence the repetition rate of optical fiber probe.
Summary of the invention
The problem to be solved in the present invention is to overcome the deficiency of above-mentioned technology formerly, a kind of apparatus and method of controlled making optical fiber probe are provided, the present invention should have the characteristics that the repetition performance is good, adjustable extent is wide, simple to operate, can obtain the repetition rate height, most advanced and sophisticated super sharp, most advanced and sophisticated cone shape is controlled, the tip evenly attenuates, ganoid optical fiber probe.
Technical solution of the present invention is as follows:
A kind of device of controllable preparation optical fiber probe, this device is made of optical fiber probe position control, programmable control circuit plate and Electric Machine Control program:
Described optical fiber probe position control comprises: an electric rotating machine is fixed on the bracing frame, one rack support rod is installed on the axle of electric rotating machine, on the rack support rod, fix a gear clamper, fix a direct current motor and an accurate translation stage on this gear clamper, on this precision translation stage, fix a cantilever beams, a plurality of fibre clip are housed in the through hole of this crossbeam, described fibre clip is used for fixing an end of optical fiber, there is being a corrosion container to be fixed on the base below the described fibre clip, acid solution and the oil reservoir that floats on the acid solution are housed in this corrosion container, on another base, fix one the cleaning solvent clean container is housed;
Described programmable control circuit plate comprises bridge circuit, programmable microprocessor chip and toggle switch; Said bridge circuit is used for the direction of Control current, thus the rotating of control motor; Said toggle switch is mainly used in the high-low level that input programmable microprocessor chip I/O is set;
Said Electric Machine Control program is meant the rotating speed according to the controlling and driving electric rotating machine of the technological process establishment of making optical fiber probe and direct current generator of programming in programmable microprocessor chip internal memory, turn to and the code of the automatic operation of duration of corresponding speed.
Described toggle switch is to be made up of a plurality of 8 sections toggle switchs, and each 8 sections toggle switch has 256 kinds of combinations.
It is as follows to utilize the device of described controllable preparation optical fiber probe to make the flow process of method of optical fiber probe:
1. the preparation of working: the end with optical fiber is fixed on the fibre clip earlier, and fibre clip is fixed in the through hole of crossbeam with trip bolt, make the upper surface of fibre clip and crossbeam upper end surface in same plane, the other end of optical fiber is positioned at the acid solution liquid level top of corrosion container;
2. plug in, system starts working, and sets the duty of toggle switch;
3. the state of setting according to toggle switch, direct current generator drives crossbeam earlier toward rising, until the highest, then direct current generator drives crossbeam at full speed from the past decline of highest point, and certain time makes the index dial of direct current generator be in a certain scale, all optical fiber is inserted in the acid solution, follow static etching optical fiber, the optical fiber etching is disconnected, make the lower end of all optical fiber all be in same plane;
4. direct current generator drives crossbeam and continues to descend, and makes optical fiber immerse a certain degree of depth of acid solution, then allows the static etching of optical fiber, utilizes the new curved month type liquid level of acid solution to make that optical fiber is earlier etched to go out certain taper;
5. then be the dynamic etching process that carries out optical fiber according to state by the toggle switch of initial setting up, dynamically allowing optical fiber do static etching again after the corrosion end, make the formation tapered probe of optical fiber, then allowing direct current generator drive crossbeam upwards promotes, optical fiber is proposed acid solution, be in highest point until crossbeam;
6. driven in rotation driven by motor crossbeam is rotated counterclockwise 90 °, optical fiber is in fill cleaning solution directly over, then direct current generator drives crossbeam and descends, and makes optical fiber immerse the cleaning solution certain depth, move up and down then, wash the acid solution that remains on the optical fiber;
7. direct current generator drives crossbeam optical fiber is proposed and rise to highest point, and last electric rotating machine drive crossbeam turns clockwise 90 ° and gets back to the origin-location, and the programmable control circuit plate gives the alarm simultaneously, and whole process finishes.
Compare advantage of the present invention with technology formerly:
1, driving rotating speed, duration of the direct current generator that optical fiber moves and turning to by the programmable control circuit plate controls, so the precision height, flexibly, range of adjustment is big, make and the good reproducibility of optical fiber probe also make the technology of making optical fiber probe obtain optimization simultaneously;
2, be provided with a plurality of 8 sections toggle switchs in the programmable control circuit plate of this device, be used to control speed and its corresponding duration of direct current generator.Because each 8 sections toggle switch has 256 kinds of combinations, can be used for being provided with the duration of 256 kinds of DC generator speeds or 256 kinds of corresponding DC generator speeds.The speed and the corresponding duration of multiple direct current generator can be set when experimentizing, thereby realize the probe corrosion of many angulus pyramidises.This is the range of adjustment of way of extensive experimentation greatly, for the optical fiber probe for preparing multiple shape provides well-to-do condition, the technology of preparation optical fiber probe is optimized;
3, in this device, optical fiber is before formally corroding, the position of optical fiber lower end can be determined and is in the same surface level by the disconnected optical fiber of first static corrosion, the degree of depth of optical fiber in solution can accurately be controlled, this has further guaranteed the consistance of experiment condition, thereby the repeatability of optical fiber probe is further improved;
4, this device has adopted the programmable control circuit plate, can control the whole process of fiber optical corrosive, comprises the cleaning of optical fiber, and this process does not need artificial interference, has improved the automaticity of device greatly, also can guarantee the consistance of etching time.Simultaneously, because direct current generator can carry out moving up and down of nanometer scale, therefore can guarantee the accuracy of optical fiber translational speed, this has also further improved the repeatability of experiment condition, thereby guarantees to obtain the optical fiber probe of high duplication;
5, whole plant automation degree height, experimental implementation is extremely easy, and the cost of making optical fiber probe is low.
Description of drawings
Fig. 1 makes the structural representation of the device of optical fiber probe for the present invention.
Fig. 2 is an Electric Machine Control program flow diagram of the present invention.
Embodiment
Consult Fig. 1, Fig. 1 is the structural representation of the device of the controlled making optical fiber probe of the present invention, as seen from the figure, the device of adjustable preparation optical fiber probe of the present invention, be made up of 3 modules: first module is the optical fiber probe position control; Second module is the programmable control circuit plate; Three module is the Electric Machine Control program.Wherein:
The described optical fiber probe position control of first module comprises: an electric rotating machine 102 is fixed on the bracing frame 101, one rack support rod 107 is installed on the axle of electric rotating machine 102, on rack support rod 107, fix a gear clamper 105, fix a direct current motor 103 and an accurate translation stage 106 on this gear clamper 105, on this precision translation stage 106, fix a cantilever beams 108, a plurality of fibre clip 109 can be housed in the through hole of this crossbeam 108, described fibre clip 109 is used for fixing an end of optical fiber 110, there is being a corrosion container 111 to be fixed on the base 112 below the described fibre clip 109, acid solution 114 and the oil reservoir 113 that floats on the acid solution are housed in this corrosion container 111, on another base 116, fix one cleaning solvent 117 clean containers 115 are housed;
Second module is the programmable control circuit plate, comprises bridge circuit 201, programmable microprocessor chip 202, toggle switch 203.Described bridge circuit 201 is meant and is connected into square circuit, and two diagonal line points are inputs, and two other output can be used for the direction of Control current, thus the rotating of control motor; Said toggle switch 203 mainly is the high-low level that input programmable microprocessor chip 202I/O is set.
Three module is the Electric Machine Control program, and its flow process is seen Fig. 2.Described Electric Machine Control program is meant by driven by program programmable control circuit plate, thereby the rotating speed of control electric rotating machine 102 and direct current generator 103, turn to and duration of corresponding speed, thereby control movement velocity and the direction of motion of optical fiber 110 in etchant solution 111 indirectly, realize the dynamic corrosion of optical fiber 110 and cleaning automatically.
But said Electric Machine Control program is meant programming in programmable microprocessor chip 202 internal memories, the code that can move automatically after powering on.
Be a specific embodiment of the method for controllable preparation optical fiber probe of the present invention below:
First's preparation work: the end with optical fiber 110 is fixed on the fibre clip 109 earlier, and fibre clip 109 is fixed in the through hole of crossbeam 108 with trip bolt, make the upper surface of fibre clip 109 and crossbeam 108 upper end surfaces in same plane, the other end of optical fiber 110 is positioned at the acid solution 114 liquid levels top of corrosion container 111.Guarantee that here gear clamper 105 is apart from air cushion vibration-isolating platform certain altitude, and the degree of depth of hydrofluoric acid solution 114 is certain in the corrosion container 111, and determine that by the distance between crossbeam 108 lower surfaces and the etchant solution liquid level length of stretching out is 9.5cm here from optical fiber 110 length that fibre clip 109 is stretched out.The length that optical fiber 110 1 ends are removed covering is 2.5cm,, then fibre clip 109 is contained in crossbeam 108 tappings with this end down, after guaranteeing fibre clip 109 and crossbeam 108 upper surfaces being concordant, with trip bolt locking fibre clip 109.Can suitably adjust according to the experiment needs.The toggle switch 203 of setting three groups of control optical fiber 110 decline rates is respectively 1,2,3, its corresponding speed is 11.03um/min, 6.906um/min, 3.475um/min, set the toggle switch 203 in three groups of control times of corresponding these three kinds of speed simultaneously and be respectively 1,2,3, time is 5min, 10min, 5min.
Second portion is the preparation process of probe, and it is divided into three phases:
Phase one, power on for the programmable control circuit plate, system starts working.If toggle switch 203 states that the user sets are the working ranges that allow in system, then direct current generator 103 drives are equipped with the crossbeam 108 of optical fiber 110 earlier to rising, continue 30 seconds, stretch the most longly until the rotating shaft of direct current generator 103, at this moment crossbeam 108 is in the extreme higher position, and purpose is to guarantee that the original state of each experiment direct current generator 103 is all consistent; Then direct current generator 103 drive optical fiber 110 is housed crossbeam 108 at full speed from highest point toward descending, continue 31 seconds, make the sign on 103 in the direct current generator be positioned at index dial 12 scales, purpose is to allow optical fiber 110 ends of removing covering immerse hydrofluoric acid solution 114; At this moment, direct current generator 103 quits work, and optical fiber 110 carries out static corrosion, and to ensure subsequent etching process, all optical fiber all are to be in same plane, and the time of static corrosion is 180 minutes, ensures can corrode disconnected to dissimilar optical fiber.
The subordinate phase corrosion.Direct current generator 103 drives the crossbeam 108 that is equipped with optical fiber 110 to be continued to descend, and continues 8 seconds, and the degree of depth that makes optical fiber 110 immerse hydrofluoric acid solution 114 is 3mm.Then allow optical fiber 110 first static corrosions 60 minutes, this is in order to utilize new meniscus to make optical fiber certain taper that is corroded out earlier, this static corrosion time is adjustable, available toggle switch control, after static corrosion finishes, then be that state according to the toggle switch 203 of initial setting up dynamically corrodes, this process is that direct current generator 103 drives are equipped with the crossbeam 108 of optical fiber 110 with 3 friction speed 11.03um/min, 6.906um/min, 3.475um/min descend continuously, and the time that continues is respectively 5min, 10min, 5min allows optical fiber 110 static corrosions 10 minutes again after dynamically corrosion finishes, the taper of optical fiber 110 is finally formed; Then allow direct current generator 103 drive crossbeam 108 and upwards promote, optical fiber 110 is proposed hydrofluoric acid solution 114, and be in highest point until crossbeam 108.
Phase III, the cleaning of optical fiber probe.After second step was finished, electric rotating machine 102 drove the crossbeam 108 that the good optical fiber 110 of corrosion is housed and revolves and turn 90 degrees, make optical fiber probe 110 be in clean container 115 directly over; Then direct current generator 103 drives this crossbeam 108 and descends, and immerses cleaning solutions 117 at optical fiber 110, and the degree of depth is 20mm, drives crossbeam 108 then and moves up and down, and remains in hydrofluoric acid solution 114 on the optical fiber 110 with cleaning, and this process continues 5 minutes.Last direct current generator 103 drives crossbeam 108 optical fiber 110 is proposed cleaning solution 117, rises to highest point then, and last electric rotating machine 102 drive crossbeams 108 revolve with original opposite direction and turn 90 degrees, get back to the origin-location, at this moment, the programmable control circuit plate gives the alarm, and whole process of preparation finishes.
Technological innovation of the present invention is: the precision that the device of controlled making optical fiber probe can carry out nanometer scale moves up and down.Drive the motor that optical fiber moves, its rotating speed, duration and direction are by programmable control circuit control, so the precision height, and flexibly, range of adjustment is big, so good reproducibility, technology can be optimized, can make difform optical fiber probe.
Be provided with a plurality of 8 sections toggle switchs in the programmable control circuit plate of this device, be used to control speed and its corresponding duration of motor.Because each 8 sections toggle switch has 256 kinds of combinations, can be used for being provided with 256 kinds of motor speeds and to duration that should motor speed.Multiple motor speed and corresponding duration can be set when experimentizing, thereby realize the probe corrosion of many angulus pyramidises.For example, for obtaining the probe of three angulus pyramidises, 3 kinds of motor speeds at first will be set, every kind of motor speed can be determined by a kind of in 256 kinds of combinations of 8 sections toggle switchs, and the duration of corresponding every kind of motor speed also can be determined by a kind of in 256 kinds of combinations of 8 sections toggle switchs, like this, as long as set the duration of three kinds of motor speeds and corresponding motor speed, just can obtain the probe of three angulus pyramidises.This is the range of adjustment of way of extensive experimentation greatly, for the optical fiber probe for preparing multiple shape provides well-to-do condition, the technology of preparation optical fiber probe is optimized.In this device, optical fiber is before formally corroding, and the position at its place can be determined by the disconnected optical fiber of first static corrosion, and the degree of depth of optical fiber in solution can accurately be controlled, this has further guaranteed the consistance of experiment condition, thereby the repeatability of optical fiber probe is further improved.In this device, also increased the automatic cleaning of optical fiber probe, it can be cleaned or be cleaned by moving up and down of another motor by the move left and right of electric rotating machine, can prevent the further corrosion of acid solution to optical fiber probe in time.
Be proven, apparatus and method of the present invention have that Repeatability is good, adjustable extent is wide and behaviour Make simple characteristics, can obtain the repetitive rate height, most advanced and sophisticated super sharp, most advanced and sophisticated cone shape is controlled, all most advanced and sophisticated Even attenuate, ganoid optical fiber probe.
Claims (3)
1, a kind of device of controllable preparation optical fiber probe is characterized in that this device is made of optical fiber probe position control and programmable control circuit plate:
Described optical fiber probe position control comprises: an electric rotating machine (102) is fixed on the bracing frame (101), one rack support rod (107) is installed on the axle of electric rotating machine (102), on rack support rod (107), fix a gear clamper (105), fix a direct current motor (103) and an accurate translation stage (106) on this gear clamper (105), on this precision translation stage (106), fix a cantilever beams (108), a plurality of fibre clip (109) are housed in the through hole of this crossbeam (108), described fibre clip (109) is used for fixing an end of optical fiber (110), there is a corrosion container (111) to be fixed on the base (112) in the below of described fibre clip (109), acid solution (114) is housed in this corrosion container (111) and floats over oil reservoir (113) on the acid solution, on another base (116), fix one the clean container (115) of cleaning solvent (117) is housed;
Described programmable control circuit plate comprises: bridge circuit (201), programmable microprocessor chip (202) and toggle switch (203); Said bridge circuit (201) is used for the direction of Control current, thus the rotating of control motor; Said toggle switch (203) is mainly used in the high-low level that input programmable microprocessor chip (202) I/O is set.
2, the device of controllable preparation optical fiber probe according to claim 1 is characterized in that described toggle switch (203) is made up of a plurality of 8 sections toggle switchs, and each 8 sections toggle switch has 256 kinds of combinations.
3, utilize the method for the device making optical fiber probe of the described controllable preparation optical fiber probe of claim 1, be characterised in that its flow process is as follows:
1. the preparation of working: the end with optical fiber 110 is fixed on the fibre clip 109 earlier, and fibre clip 109 is fixed in the through hole of crossbeam 108 with trip bolt, make the upper surface of fibre clip 109 and crossbeam 108 upper end surfaces in same plane, the other end of optical fiber 110 is positioned at the acid solution 114 liquid levels top of corrosion container 111;
2. plug in, system starts working, and sets the state of toggle switch (203);
3. the state of setting according to toggle switch (203), direct current generator (103) drives crossbeam (108) earlier toward rising, until the highest, then direct current generator (103) drives crossbeam (108) from the past decline of highest point, make the index dial of direct current generator (103) be in a certain scale, all optical fiber (110) is inserted in the acid solution (114), follow static etching optical fiber (110), optical fiber (110) etching is disconnected, make the lower end of all optical fiber (110) all be in same plane;
4. direct current generator (103) drives crossbeam (108) continuation decline, make optical fiber (110) immerse a certain degree of depth of acid solution (114), then allow the static etching of optical fiber (110), utilize the new curved month type liquid level of acid solution (114) to make that optical fiber (110) is earlier etched to go out certain taper;
5. then be the dynamic etching process that carries out optical fiber (110) according to state by the toggle switch (203) of initial setting up, dynamically allowing optical fiber (110) do static etching again after the etching end, make the lower end of optical fiber (110) form tapered probe, then allowing direct current generator (103) drive crossbeam (108) upwards promotes, optical fiber (110) is proposed acid solution (114), be in the extreme higher position until crossbeam (108);
6. driven in rotation motor (102) drives crossbeam (108) and is rotated counterclockwise 90 °, directly over the clean container (115) that optical fiber (110) is in fill cleaning solvent (117), then direct current generator (103) drives crossbeam (108) decline, make optical fiber (110) immerse cleaning solvent (117) certain depth, move up and down then, wash the acid solution (114) that remains on the optical fiber (110);
7. direct current generator (103) drives crossbeam (108) optical fiber (110) is proposed and rise to highest point, last electric rotating machine (102) drive crossbeam (108) turns clockwise 90 ° and gets back to the origin-location, the programmable control circuit plate gives the alarm simultaneously, and whole process finishes.
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| CNB2006100286269A CN100559512C (en) | 2006-07-05 | 2006-07-05 | Device and method for controllably preparing optical fiber probe |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5985166A (en) * | 1997-10-29 | 1999-11-16 | California Institute Of Technology | Chemical etching of fiber probe |
| CN1305191A (en) * | 2000-12-31 | 2001-07-25 | 中国科学院西安光学精密机械研究所 | Method for making curved optical fiber needle point |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5985166A (en) * | 1997-10-29 | 1999-11-16 | California Institute Of Technology | Chemical etching of fiber probe |
| CN1305191A (en) * | 2000-12-31 | 2001-07-25 | 中国科学院西安光学精密机械研究所 | Method for making curved optical fiber needle point |
Non-Patent Citations (2)
| Title |
|---|
| 动态化学腐蚀法制备大锥角近场光纤探针. 孙家林，田广彦，李勤，赵均，郭继华，谢爱芳，张泽渤.物理学报，第50卷第12期. 2001 * |
| 热拉伸和化学腐蚀相结合制备弯曲光纤探针. 徐凯，潘石，吴世法，孙伟，李银丽.物理学报，第52卷第5期. 2003 * |
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