CN100546538C - A kind of method of making skin dry electrode - Google Patents
A kind of method of making skin dry electrode Download PDFInfo
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- CN100546538C CN100546538C CNB2007101188677A CN200710118867A CN100546538C CN 100546538 C CN100546538 C CN 100546538C CN B2007101188677 A CNB2007101188677 A CN B2007101188677A CN 200710118867 A CN200710118867 A CN 200710118867A CN 100546538 C CN100546538 C CN 100546538C
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Abstract
The present invention relates to be used for the electrode sensor processing technique field that physiological signal detects, a kind of method of making skin dry electrode is disclosed, this method comprises: A. selects certain thickness sheet metal, and the sheet metal cutting in bulk with selecting polishes the surface of sheet metal piece then; B. the sheet metal piece after the processing polishing forms base and electrode column array on the sheet metal piece, and the electrode column array is positioned on the base; C. be processed to form electrode head on the top of each electrode column of electrode column array; D. the gold-plated or titanizing in the electrode column array surface; E. electrodes base is bonded on the amplifier; F. between electrode head and base, place the conductive silicon rubber of the nested electrode column array of one deck.Utilize the present invention, can make the skin dry electrode array fast and effectively, be used for physiological signals such as brain electricity, myoelectricity and detect, satisfy scientific research and clinical demand.
Description
Technical field
The present invention relates to be used for the electrode sensor processing technique field that physiological signal detects, relate in particular to a kind of method of utilizing metal material and spark erosion technique to make skin dry electrode.
Background technology
The electricity physiological detection is one of present clinical inspection method commonly used, generally absorbs the various bio electricities of human body by electrode and detects, and the impedance of electrode, polarization characteristic, biological stability etc. are very big to the degree of accuracy influence of physiological signal measurements.
At present the clinical assays bioelectric potential uses skin wet electrodes such as rosette electrode mostly, reduces contact impedance by conductive paste or normal saline and contact skin between electrode and the skin.Skin wet electrode shortcoming is that the physiological signal signal to noise ratio of obtaining is relatively poor, and produces motion artifact because of moving easily; In addition because hair and horny layer influence must be done conscientiously cleaning to skin.
Skin dry electrode is to adopt capacity coupled principle measured signal, the very thin dielectric film of one deck is arranged between kind electrode and the people's contact level, just form certain electric capacity between human body and the metal electrode, human body and electrode slice are respectively two pole plates of capacitor, and dielectric film just becomes the intermediate medium of capacitor for this reason.Bioelectrical signals can enter amplifier input terminal by this capacitor, thereby has simplified the service routine of electrode.Owing to do not use conductive paste, thereby avoided consequent corrosion and stimulation to skin, can improve motion artifact in addition, this measures long-time continuous is very useful, for example physiological status of spaceman monitoring in spaceflight.
The at present domestic report that the making skin dry electrode is not arranged as yet generally adopts semiconductor processing method to make abroad on silicon chip, and this method may further comprise the steps:
1, silicon chip is prepared and thermal oxide silicon dioxide;
2, use photoetching method and lift-off method to make the electrod-array figure;
3, use chemical corrosion method to form sharp-pointed electrode head;
4, use the PECVD method to steam gold or titanium at electrode surface;
5, at the bonding amplifier of electrodes base and encapsulate.
But the skin dry electrode that adopts said method to make has following shortcoming:
1, processing technique complexity, cost is higher;
2, the silicon materials biocompatibility remains clinical verification, implants skin in addition and ruptures easily;
Summary of the invention
(1) technical problem that will solve
In view of this, main purpose of the present invention is to provide a kind of method of making skin dry electrode, to solve material biocompatibility and the high problem of cost of manufacture, improves the signal to noise ratio of skin dry electrode, is convenient to long-time continuous dynamic monitoring physiology signal.
(2) technical scheme
For achieving the above object, the invention provides a kind of method of making skin dry electrode, this method comprises:
A, select certain thickness sheet metal, the sheet metal cutting in bulk with selecting polishes the surface of sheet metal piece then;
Sheet metal piece after B, the processing polishing forms base and electrode column array on the sheet metal piece, the electrode column array is positioned on the base;
C, be processed to form electrode head on the top of each electrode column of electrode column array;
D, gold-plated or titanizing in the electrode column array surface;
E, electrodes base is bonded on the amplifier;
F, between electrode head and base, place the conductive silicon rubber of the nested electrode column array of one deck.
In the such scheme, the thickness of sheet metal described in the steps A is 6mm, and the length and width height of sheet metal piece is of a size of 25mm * 25mm * 6mm.
In the such scheme, sheet metal described in the steps A is a stainless-steel sheet, and described sheet metal piece is the steel embryo.
In the such scheme, the sheet metal piece after the polishing of processing described in the step B adopts the spark discharge method to carry out, and the thickness of described base is 1mm, and described electrode column array is 4 * 4 electrode column array, and the length and width height of each electrode column is of a size of 3mm * 3mm * 3mm.
In the such scheme, be processed to form electrode head described in the step C and adopt chemical attack or laser processing to carry out, described electrode head height is 1mm, and length and width respectively are 0.3mm, and the top is 45 ° of wedge angles.
In the such scheme, described in the step D in the electrode column array surface gold-plated or titanizing adopt electro-plating method, electroplate and further the electrode column array surface cleaned up after finishing.
In the such scheme, Amplifier Gain described in the step e is 1.
In the such scheme, the thickness of conductive silicon rubber described in the step F is 4mm.
(3) beneficial effect
From technique scheme as can be seen, the present invention uses electrical discharge machining process to make the skin dry electrode array, and electrode head length is about 150 μ m and very sharp keen, can directly pass horny layer and enter stratum germinativum but do not damage skin corium.For preventing the corrosion of perspiration counter electrode, the gold-plated or titanizing of electrode surface.Be to reduce because of the high interference of generation pickoff signals in long line transmission of electrode impedance, it is that 1 amplifier is in order to the impedance conversion that electrodes base connects a gain.Place one deck conductive silicon rubber between electrode head and the base, be used for keeping limiting insertion depth simultaneously with good contact of skin, avoid injuring skin, so both reduced motion artifact, improved the electricity physiological signal signal to noise ratio again most possibly, can not damage simultaneously yet, avoid corrosion and the stimulation of long time continuous working skin to human body.
Description of drawings
Fig. 1 is the method flow diagram of making skin dry electrode provided by the invention;
Fig. 2 is a method flow diagram of making skin dry electrode according to the embodiment of the invention;
Fig. 3 is a sketch map of making processing dimension in the skin dry electrode process according to the embodiment of the invention;
Fig. 4 is the axonometric chart of the skin dry electrode of Fig. 3 making;
Fig. 5 is the decomposing schematic representation that embeds the conductive silicon rubber structure according to the embodiment of the invention in skin dry electrode;
Fig. 6 is the axonometric chart of the skin dry electrode of Fig. 5 making;
Fig. 7 is the skin dry electrode of the present invention's making and the sketch map that is linked and packed of amplifier.
The specific embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
As shown in Figure 1, Fig. 1 is the method flow diagram of making skin dry electrode provided by the invention, and this method may further comprise the steps:
Step 101: select certain thickness sheet metal, the sheet metal cutting in bulk with selecting polishes the surface of sheet metal piece then;
Step 102: the sheet metal piece after the processing polishing, on the sheet metal piece, form base and electrode column array, the electrode column array is positioned on the base;
Step 103: the top at each electrode column of electrode column array is processed to form electrode head;
Step 104: gold-plated or titanizing in the electrode column array surface;
Step 105: electrodes base is bonded on the amplifier;
Step 106: the conductive silicon rubber of between electrode head and base, placing the nested electrode column array of one deck.
In the above-mentioned steps 101, described sheet metal generally selects to use stainless-steel sheet, then the stainless-steel sheet of selecting is cut into the steel embryo, then the surface of steel embryo is polished.
Based on the method flow diagram of the described making skin dry electrode of Fig. 1, Fig. 2 shows the method flow diagram of making skin dry electrode according to the embodiment of the invention, and this method may further comprise the steps:
Step 201: select the thick 316-L grade stainless steel steel plate of 6mm, the stainless-steel sheet of selecting is cut into the steel embryo of 25mm * 25mm * 6mm, then the surface of steel embryo is polished.
Step 202: the steel embryo behind fixing polishing on the lathe, adopt spark discharge method processing base and electrode column array.As shown in Figure 3, Fig. 3 is a sketch map of making processing dimension in the skin dry electrode process according to the embodiment of the invention.For making electrode have certain oar degree, the thickness of base is 1mm.The electrode column array is 4 * 4 electrode column array, is not covered by hair for making electrode, and the length and width height of each electrode column is of a size of 3mm * 3mm * 3mm.
Step 203: further machined electrode head, this is the key component of skin dry electrode.The electrode head height is 1mm, and length and width respectively are 0.3mm, and the top is 45 ° of wedge angles.In this step, general chemical attack or the laser processing of adopting when being processed to form electrode head.Concrete size can be with reference to Fig. 3 and Fig. 4.
Step 204: adopt electro-plating method gold-plated or titanizing, after plating is finished the electrode column array surface is cleaned up at electrode surface.Specifically can be with reference to Fig. 5 and Fig. 6.
Step 205: it is on 1 the amplifier that electrodes base is bonded in gain.
Step 206: place the conductive silicon rubber of a layer thickness 4mm between electrode head and base, electrode embeds wherein.Specifically can be with reference to Fig. 6 and Fig. 7.
The method of this making skin dry electrode provided by the invention, electrode head length is about 150 μ m and very sharp keen, can directly pass horny layer and enter stratum germinativum but do not damage skin corium, improve the electricity physiological signal signal to noise ratio most possibly, can not damage again simultaneously people's electrode body.
The method of this making skin dry electrode provided by the invention, utilize semiconducter process the integrated gain of electrodes base be 1 amplifier in order to the impedance conversion, reduced because of the high interference of generation pickoff signals in long line transmission of electrode impedance.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1, a kind of method of making skin dry electrode is characterized in that, this method comprises:
A, select certain thickness sheet metal, the sheet metal cutting in bulk with selecting polishes the surface of sheet metal piece then;
Sheet metal piece after B, the processing polishing forms base and electrode column array on the sheet metal piece, the electrode column array is positioned on the base;
C, be processed to form electrode head on the top of each electrode column of electrode column array;
D, gold-plated or titanizing in the electrode column array surface;
E, electrodes base is bonded on the amplifier;
F, between electrode head and base, place the conductive silicon rubber of the nested electrode column array of one deck.
2, the method for making skin dry electrode according to claim 1 is characterized in that, the thickness of sheet metal described in the steps A is 6mm, and the length and width height of sheet metal piece is of a size of 25mm * 25mm * 6mm.
3, the method for making skin dry electrode according to claim 1 is characterized in that, sheet metal described in the steps A is a stainless-steel sheet, and described sheet metal piece is the steel embryo.
4, the method for making skin dry electrode according to claim 1, it is characterized in that, sheet metal piece after the polishing of processing described in the step B adopts the spark discharge method to carry out, the thickness of described base is 1mm, described electrode column array is 4 * 4 electrode column array, and the length and width height of each electrode column is of a size of 3mm * 3mm * 3mm.
5, the method for making skin dry electrode according to claim 1, it is characterized in that be processed to form electrode head described in the step C and adopt chemical attack or laser processing to carry out, described electrode head height is 1mm, length and width respectively are 0.3mm, and the top is 45 ° of wedge angles.
6, the method for making skin dry electrode according to claim 1 is characterized in that, described in the step D in the electrode column array surface gold-plated or titanizing adopt electro-plating method, electroplate and further the electrode column array surface cleaned up after finishing.
7, the method for making skin dry electrode according to claim 1 is characterized in that, Amplifier Gain described in the step e is 1.
8, the method for making skin dry electrode according to claim 1 is characterized in that, the thickness of conductive silicon rubber described in the step F is 4mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2007101188677A CN100546538C (en) | 2007-06-13 | 2007-06-13 | A kind of method of making skin dry electrode |
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| CNB2007101188677A CN100546538C (en) | 2007-06-13 | 2007-06-13 | A kind of method of making skin dry electrode |
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| CN101322645A CN101322645A (en) | 2008-12-17 |
| CN100546538C true CN100546538C (en) | 2009-10-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102579041A (en) * | 2012-02-09 | 2012-07-18 | 上海交通大学 | Arrayed flexible electroencephalogram dry electrode capable of overcoming obstacle of hair and preparation method thereof |
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| WO2012117304A1 (en) * | 2011-03-02 | 2012-09-07 | Koninklijke Philips Electronics N.V. | Dry skin conductance electrode |
| CN102755158A (en) * | 2011-04-25 | 2012-10-31 | 有医科技股份有限公司 | Comb electrode |
| CN102319068B (en) * | 2011-07-29 | 2013-08-28 | 上海交通大学 | Electroencephalo-graph dry electrode based on capacitive coupling principle |
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| CN103393419B (en) * | 2013-08-15 | 2016-02-17 | 厦门大学 | A kind of biomedical electrode and manufacture method thereof with surface micro-structure array |
| CN103505201B (en) * | 2013-10-24 | 2015-10-07 | 刘卫明 | The wear-type electrocardioelectrodevice of configurable dry wet mode |
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| CN103750833B (en) * | 2014-01-21 | 2015-08-19 | 中国科学院半导体研究所 | A kind of manufacture method of silicon nerve electrode hybrid integrated device |
| FR3039979B1 (en) * | 2015-08-11 | 2017-09-01 | Bioserenity | METHOD FOR MEASURING AN ELECTROPHYSIOLOGICAL PARAMETER USING A CAPACITIVE ELECTRODE SENSOR WITH CONTROLLED CAPACITY |
| CN107157478B (en) * | 2017-06-01 | 2020-10-23 | 电子科技大学 | Multichannel cortex electroencephalogram acquisition system based on capacitive electrodes |
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| US5299572A (en) * | 1992-10-30 | 1994-04-05 | University Of British Columbia | Biological electrode array |
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| US3662441A (en) * | 1970-10-07 | 1972-05-16 | George M Low | Method of making dry electrodes |
| US3911906A (en) * | 1974-04-24 | 1975-10-14 | Survival Technology | Dry applied and operably dry electrode device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102579041A (en) * | 2012-02-09 | 2012-07-18 | 上海交通大学 | Arrayed flexible electroencephalogram dry electrode capable of overcoming obstacle of hair and preparation method thereof |
| CN102579041B (en) * | 2012-02-09 | 2014-04-30 | 上海交通大学 | Arrayed flexible electroencephalogram dry electrode capable of overcoming obstacle of hair and preparation method thereof |
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| CN101322645A (en) | 2008-12-17 |
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