CN100544002C - Internal storage structure and preparation method thereof - Google Patents
Internal storage structure and preparation method thereof Download PDFInfo
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- CN100544002C CN100544002C CN200610127787.3A CN200610127787A CN100544002C CN 100544002 C CN100544002 C CN 100544002C CN 200610127787 A CN200610127787 A CN 200610127787A CN 100544002 C CN100544002 C CN 100544002C
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- 238000003860 storage Methods 0.000 title claims abstract description 38
- 238000002360 preparation method Methods 0.000 title claims description 24
- 239000003990 capacitor Substances 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 40
- 229910052710 silicon Inorganic materials 0.000 claims description 30
- 239000010703 silicon Substances 0.000 claims description 30
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 28
- 238000005530 etching Methods 0.000 claims description 24
- 239000012535 impurity Substances 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 claims description 5
- 238000001039 wet etching Methods 0.000 claims description 5
- OKZIUSOJQLYFSE-UHFFFAOYSA-N difluoroboron Chemical compound F[B]F OKZIUSOJQLYFSE-UHFFFAOYSA-N 0.000 claims description 4
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 150000003376 silicon Chemical class 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 21
- 229910052581 Si3N4 Inorganic materials 0.000 description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 16
- 230000012447 hatching Effects 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 229910052814 silicon oxide Inorganic materials 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 238000001259 photo etching Methods 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 4
- 230000015654 memory Effects 0.000 description 4
- 238000007598 dipping method Methods 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical class CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003701 mechanical milling Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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Abstract
A kind of internal storage structure comprises semiconductor substrate, be arranged at active region in this semiconductor substrate, a plurality ofly be arranged at doped region in this semiconductor substrate, be electrically connected first conductive plunger of one of bit line and these a plurality of doped regions and second conductive plunger that is electrically connected capacitor and another doped region.This first conductive plunger comprises second block that is arranged at first block in this active area and is arranged at the first side of this active area, and this bit line connects second block of this first conductive plunger.This second conductive plunger comprises the 4th block that is arranged at the 3rd block in this active area and is arranged at the second side of this active area, and this capacitor is connected in the 4th block of this second conductive plunger.
Description
Technical field
The present invention relates to a kind of internal storage structure and preparation method thereof, particularly relate to internal storage structure of the conductive plunger that a kind of two opposite sides that has respectively to active region stretches and preparation method thereof.
Background technology
In recent years, (dynamic random access memory, DRAM) quantity of the memory cell of chip and density significantly increased dynamic random access memory.(metal oxide semiconductor field effect transistor MOSFET) constitutes with capacitor each memory cell, and wherein this transistorized source electrode is electrically connected on the bottom electrode of this capacitor by metal oxide semiconductcor field effect transistor.Capacitor can be divided into stacking-type and two kinds of kenels of deep trenches formula.Stacked capacitor directly forms capacitor on the silicon substrate surface, and deep trenches formula capacitor then is at the inner capacitor that forms of silicon substrate.
Fig. 1 represents known dynamic random access memory 100, is disclosed in Symposium on VLSI TechnologyDigest of Technical Papers in 2005 by the research staff of Korea S Samsung (Samsungelectronics) company.This dynamic random access memory 100 comprises many character lines 102, multiple bit lines 104, a plurality of active region that is obliquely installed 106.The centre of this active region 106 is provided with bit line connector 108, and its two ends are provided with two capacitor connectors 110.The spy's, this dynamic random access memory 100 adopts 6F
2Memory cell design, that is 2F (character line) * 3F (bit line)=6F
2, wherein F represents minimum feature size.
Only, this dynamic random access memory 100 essential repeated exposure technology (double exposuretechnology that use, DET) a plurality of electrically isolated from one and active regions 106 that are obliquely installed of preparation, yet repeated exposure technology and be not suitable for the volume production exposure bench of present industrial circle.Moreover the capacitor connector 110 that is arranged at 102 of two character lines is of a size of 1F, must use advanced photolithography techniques (for example photoetching wet dipping type technology), can guarantee the correctness of its size and position.
Fig. 2 represents another known dynamic random access memory 120, and its research staff by company of U.S. Micorn Technology Inc (Microntechnology) is disclosed in Symposium on VLSI TechnologyDigest of Technical Papers in 2004.This dynamic random access memory 120 comprises many character lines 122, multiple bit lines 124, a plurality of active region that is obliquely installed 126.The centre of this active region 126 is provided with bit line connector 128, and its two ends are provided with two capacitor connectors 130.Compare with the dynamic random access memory 100 of Fig. 1 and only to be obliquely installed its active region 106, the dynamic random access memory 120 of Fig. 2 is obliquely installed its active region 126 and bit line 124 thereof in the lump, and bit line connector 128 promptly is provided with the crosspoint of this active region 126 and this bit line 124.
Summary of the invention
Main purpose of the present invention provides a kind of internal storage structure and preparation method thereof, and it has respectively the conductive plunger that the two opposite sides to active region stretches, and can reduce the demand to advanced photolithography techniques.
For reaching above-mentioned purpose, the present invention proposes a kind of internal storage structure, and it comprises semiconductor substrate, be arranged at active region in this semiconductor substrate, a plurality ofly be arranged at doped region in this semiconductor substrate, be electrically connected first conductive plunger of one of bit line and these a plurality of doped regions and second conductive plunger that is electrically connected capacitor and another doped region.This first conductive plunger comprises second block that is arranged at first block in this active region and is arranged at this active region first side, and this bit line connects second block of this first conductive plunger via the bit line connector.This second conductive plunger comprises the 4th block that is arranged at the 3rd block in this active region and is arranged at this active region second side, and this capacitor is connected in the 4th block of this second conductive plunger via the capacitor contact plunger.Preferably, two times of this second block of the width of this first block, the width of the 3rd block is two times of the 4th block, and the first side of this active region and second side are the two opposite sides of this active region.
According to above-mentioned purpose, the present invention proposes a kind of preparation method of internal storage structure, its comprise form first etching mask on the substrate that comprises dielectric structure, the local dielectric structure of removing beyond this first etching mask is opened between these a plurality of dielectric cylinders to form a plurality of dielectric cylinders and a plurality of first, forms second etching mask of the local surfaces that covers these a plurality of dielectric cylinders, the local dielectric cylinder that is covered by this second etching mask of removing forms second opening to enlarge this first opening, and forms conductive plunger step such as among this second opening.
The step that forms second etching mask at first forms the silicon-containing layer (for example polysilicon layer) that covers these a plurality of dielectric cylinders, carries out oblique at least doping process changes the silicon-containing layer of this predetermined portions so that impurity (for example boron difluoride) is injected the silicon-containing layer of predetermined portions chemical property again.Afterwards, utilize ammoniacal liquor to carry out wet etching process to remove this predetermined portions silicon-containing layer in addition, the silicon-containing layer of this predetermined portions then forms this etching mask.Preferably, carry out before this oblique doping process, can form the 3rd doping mask that covers this first open bottom in addition, to avoid follow-up oblique doping process impurity be injected the inside of this semiconductor substrate via this first opening, and influence the electrical characteristics of the electronic component of preparation.
With known internal storage structure compare when technology is advanced into nanometer era (F is less than 100 nanometers) must use the repeated exposure technology and must use the advanced optical carving technology to define the size and the position of its capacitor connector (contacting the hole), the preparation of internal storage structure of the present invention need not used the repeated exposure technology, and need not use advanced photoetching technique (for example photoetching wet dipping type technology) when defining the size in this contact hole (i.e. this capacitor connector) and position.
Description of drawings
Fig. 1 represents known dynamic random access memory;
Fig. 2 represents another known dynamic random access memory;
Fig. 3 to Figure 16 represents the preparation method of the internal storage structure of first embodiment of the invention; And
Figure 17 to Figure 19 represents the preparation method of the internal storage structure of second embodiment of the invention.
The main element description of symbols
10 internal storage structures, 12 semiconductor substrates
13A doped region 13B doped region
14 character lines, 16 silicon nitride gap walls
18 silicon nitride layers, 20 dielectric structures
22 silicon oxide layers, 24 silicon oxide layers
30 substrates, 32 first etching masks
36A dielectric cylinder 36B dielectric cylinder
38 first openings, 40 silicon-containing layers
42 doping masks, 44 presumptive areas
46 active regions, 48 doping masks
50 second etching masks, 52 second openings
54 first conductive plunger 54A, first block
54B second block 56 second conductive plungers
56A the 3rd block 56B the 4th block
58 dielectric layers, 60 bit line contact plugs
62 bit lines, 64 silicon nitride masks
66 silicon nitride gap walls, 68 silicon oxide layers
70 photoresist layers, 72 wire openings
74 contact holes, 76 capacitor connectors
78 capacitors, 82 lining oxide layers
82 ' doping mask, 84 photoresist layers
100 dynamic random access memorys, 102 character lines
104 bit lines, 106 active regions
108 bit line connectors, 110 capacitor connectors
120 dynamic random access memorys, 122 character lines
124 bit lines, 126 active regions
128 bit line connectors, 130 capacitor connectors
Embodiment
Fig. 3 to Figure 16 represents the preparation method of the internal storage structure 10 of first embodiment of the invention, and wherein Fig. 3 (a) and Fig. 3 (b) are that Fig. 3 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.At first, form first etching mask 32 (for example photoresist layer) on substrate 30.This substrate 30 comprises semiconductor substrate 12, a plurality of doped region 13A in this semiconductor substrate 12 and 13B, many silicon nitride gap walls 16 that are arranged at character line 14 on this semiconductor substrate 12, cover these many character lines 14 sidewalls, dielectric structure 20 that covers the silicon nitride layer 18 on these semiconductor substrate 12 surfaces and cover these many character lines 14 and this silicon nitride layer 18 of being arranged at.This dielectric structure 20 comprises silicon oxide layer 22 and silicon oxide layer 24, and this first etching mask 32 forms on this silicon oxide layer 24.But the material boron-phosphorosilicate glass (BPSG) of this silicon oxide layer 22, and the material of this silicon oxide layer 24 can be tetraethyl orthosilicate salt (TEOS).
With reference to Fig. 4 (a) and Fig. 4 (b), it is that Fig. 3 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.Then, carry out anisotropic dry etch technology, local this first etching mask 32 dielectric structure 20 in addition of removing forms a plurality of dielectric cylinder 36B and a plurality of first opening 38 between these a plurality of dielectric cylinder 36B up to these silicon nitride layer 18 surfaces.Secondly, remove after this first etching mask 32, carry out depositing operation to form silicon-containing layer (for example polysilicon layer) 40, it covers the surface of these a plurality of dielectric cylinder 36B, shown in Fig. 5 (a) and Fig. 5 (b), it is that Fig. 3 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.
With reference to Fig. 6, Fig. 6 (a) and Fig. 6 (b), wherein Fig. 6 (a) and Fig. 6 (b) are that Fig. 6 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.Form doping mask 42, it covers the dielectric cylinder 36B in the presumptive area 44, and exposes the dielectric cylinder 36A beyond this presumptive area 44.The spy's, these a plurality of dielectric cylinder 36A and 36B are arranged between these many character lines 14 and a plurality of active region 46, and this doping mask 42 covers the dielectric cylinder 36B at the middle place that is positioned at this active region 46.Afterwards, carry out the first oblique doping process with impurity (boron difluoride for example, BF
2) inject the silicon-containing layer 40 on this presumptive area 44 dielectric cylinder 36A in addition, shown in Fig. 6 (a) and Fig. 6 (b).Furtherly, this first oblique doping process injects impurity in the silicon-containing layer 40 of predetermined portions (i.e. this dielectric cylinder 36A left part) and changes the chemical property (for example anti-etching characteristic) of the silicon-containing layer 40 of this predetermined portions, and this dielectric cylinder 36A right side part then keeps its original chemical property without doping impurity.
With reference to Fig. 7, Fig. 7 (a) and Fig. 7 (b), wherein Fig. 7 (a) and Fig. 7 (b) are that Fig. 7 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.Remove after this doping mask 42, form doping mask 48, it exposes the dielectric cylinder 36B in this presumptive area 44.Secondly, carry out the second oblique doping process impurity is injected the silicon-containing layer 40 on the dielectric cylinder 36B in this presumptive area 44.Preferably, the doping of this first oblique doping process is in the direction opposite the doping direction of this second oblique doping process.Furtherly, this second oblique doping process injects impurity in the silicon-containing layer 40 of predetermined portions (i.e. this dielectric cylinder 36B right side part) and changes the chemical property of the silicon-containing layer 40 of this predetermined portions, and this dielectric cylinder 36B left part then keeps its original chemical property without doping impurity.
With reference to Fig. 8 (a) and Fig. 8 (b), it is that Fig. 7 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.Remove after this doping mask 48, utilize etching solution (for example ammoniacal liquor) to carry out wet etching process, local remove silicon-containing layer 40 on this dielectric cylinder 36B (promptly removing on this dielectric cylinder 36B left side wall the silicon-containing layer 40 without doping impurity) and form second etching mask 50, it exposes the left side wall of this dielectric cylinder 36B.In like manner, this wet etching process is also local removes silicon-containing layer 40 on this dielectric cylinder 36A (promptly removing on this dielectric cylinder 36A right side wall the silicon-containing layer 40 without doping impurity), and expose the right side wall of this dielectric cylinder 36A, as Fig. 9 (a) and Fig. 9 (b), it is that Fig. 6 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.
With reference to Figure 10 (a) and Figure 10 (b), it is that Fig. 7 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.Utilize buffer oxide etch liquid (BOE) to carry out wet etching process, remove the dielectric cylinder 36B that is not covered with the part by this second etching mask 50.This buffer oxide etch liquid can be via the dielectric cylinder 36B sidewall that is not covered by this second etching mask 50, this dielectric cylinder 36B of etching and enlarge this first opening 38 to form second opening 52.Secondly, utilize anisotropic dry etch technology to remove this second etching mask 50, and local remove this silicon nitride layer 18 and expose doped region 13A and 13B in this semiconductor substrate 12, shown in Figure 11 (a) and Figure 11 (b), it is that Fig. 7 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.
With reference to Figure 12,12 (a) and Figure 12 (b), wherein 12 (a) and Figure 12 (b) are that Figure 12 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.Carry out depositing operation to form conductive layer (for example polysilicon layer), carry out again flatening process (for example etch-back technics or chemical mechanical milling tech) remove this conductive layer with the part and form among second opening 52 of first conductive plunger 54 in this presumptive area 44 in and second conductive plunger 56 among this presumptive area 44 second opening 52 in addition.
Furtherly, this first conductive plunger 54 comprises the second block 54B that is arranged at the first block 54A in this active region 46 and is arranged at these active region 46 first sides.This second conductive plunger 56 comprises and is arranged at the 3rd block 56A in this active region 46 and is arranged at these active region 46 second sides and the 4th block 56B.Preferably, the width of this first block 54A is about two times of this second block 54B, and the width of the 3rd block 56A is about two times of the 4th block 56B, and the first side of this active region 46 and second side are the two opposite sides of this active region 46.
With reference to Figure 13,13 (a) and Figure 13 (b), wherein 13 (a) and Figure 13 (b) are that Figure 13 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.Form the dielectric layer 58 that covers this first conductive plunger 54 and this second conductive plunger 56, the bit line contact plug 60 that forms this first conductive plunger 54 of connection again is among this dielectric layer 58.Secondly, depositing conducting layer (for example tungsten metal level) forms silicon nitride mask 64 again and carries out dry etching process and remove this conductive layer with the part on this dielectric layer 58, and form connect this bit line contact plug 60 bit line 62 on this dielectric layer 58.Reach being electrically connected of this bit line 62 and this doped region 13A owing to this bit line contact plug 60 can be connected with the first block 54A of this first conductive plunger 54 or the second block 54B, the photoetching technique that therefore defines its size and position has bigger process margin (process window).Preferably, this bit line contact plug 60 connects the second block 54B of this first conductive plunger 54.
With reference to Figure 14,14 (a) and Figure 14 (b), wherein 14 (a) and Figure 14 (b) are that Figure 14 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.Form silicon nitride gap wall 66 and isolate this bit line 62 with electricity.Secondly, carry out high density chemistry gas-phase deposition to form silicon oxide layer 68, it fills up the gap of 62 of this bit lines and covers this silicon nitride mask 64.Afterwards, carry out flatening process and remove silicon oxide layer 68 on this silicon nitride mask 64 with the part.
With reference to Figure 15,15 (a) and Figure 15 (b), wherein Figure 15 (a) and Figure 15 (b) are that Figure 15 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.Formation has the photoresist layer 70 of a plurality of wire openings 72 in the surface of planarization, wherein these wire opening 72 expose portion silicon oxide layers 68.Secondly, utilize this photoresist layer 70 and this silicon nitride gap wall 66 to be etching mask, carry out the autoregistration dry etching process and form the contact hole 74 that several expose this second conductive plunger 56 with the silicon oxide layer 68 of removing these wire opening 72 belows, it exposes the 4th block 56B of this second conductive plunger 56.
With reference to Figure 16,16 (a) and Figure 16 (b), wherein 16 (a) and Figure 16 (b) are that Figure 16 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.After removing this photoresist layer 70, carry out silicon nitride deposition and dry etching process to increase the thickness of this silicon nitride gap wall 66, carry out depositing operation fills up this contact hole 74 with formation conductive layer (for example polysilicon layer) again.Secondly, carry out flatening process and remove this conductive layer and form capacitor connector 76 with the part, it connects the 4th block 56B of second conductive plunger 56 beyond this presumptive area 44.Afterwards, form the capacitor 78 that is arranged on this dielectric layer 64, it connects the 4th block 56B of this second conductive plunger 56 via this capacitor connector 76, and forms this internal storage structure 10.
Figure 17 (a) is to the preparation method of the internal storage structure 10 of Figure 19 (b) expression second embodiment of the invention, and it is that Fig. 3 is respectively along the partial cutaway diagrammatic sketch of 1-1 and 2-2 hatching.At first, carry out Fig. 3 (a), Fig. 3 (b), Fig. 4 (a) and technology shown in Figure 4, utilize depositing operation to form lining oxide layer 82 on this silicon-containing layer 40 again.Secondly, utilize coating process and etch process to form photoresist layer 84 in the bottom of this first opening 38, shown in Figure 17 (a) and Figure 17 (b).
With reference to Figure 18 (a) and Figure 18 (b), carry out etch process and remove the lining oxide layer 82 that is not covered by this photoresist layer 84 with the part, that is the local lining oxide layer 82 of removing the top of this first opening 38.Secondly, carry out cleaning and form doping mask 82 ' to remove this photoresist layer 84 in the bottom of this first opening 38, shown in Figure 19 (a) and Figure 19 (b).Afterwards, carry out Fig. 5 (a), Fig. 5 (b) to the technology of Figure 16 to finish this internal storage structure 10.This doping mask 82 ' can avoid follow-up oblique doping process that impurity (boron difluoride) is injected these semiconductor substrate 12 inside via this first opening 38, and the electrical characteristics of influence preparation electronic component.
With known internal storage structure 100 compare when entering nanometer era (F is less than 100 nanometers) must use the repeated exposure technology and must use the advanced optical carving technology to define the size and the position of its capacitor connector 110 (contacting the hole), the preparation of internal storage structure 10 of the present invention need not used the repeated exposure technology, and need not to use advanced photoetching technique (for example photoetching wet dipping type technology) when defining the size in this contact hole 74 (i.e. this capacitor connector 76) and position.Furtherly, bit line 62 of the present invention and active region 64 are the simple wire-form pattern of level design, thereby need not use the repeated exposure technology.In addition, the present invention adopts the photo etched mask with simple linear pattern to define this wire opening 72, utilizes self aligned dry etching technology to form this contact hole 74 again, therefore need not use advanced photoetching technique.
Technology contents of the present invention and technical characterstic disclose as above, yet the person of ordinary skill in the field still may be based on teaching of the present invention and announcement and done all replacement and improvement that does not deviate from spirit of the present invention.Therefore, protection scope of the present invention should be not limited to those disclosed embodiments, and should comprise various do not deviate from replacement of the present invention and improvement, and is contained by claim.
Claims (18)
1. internal storage structure is characterized in that comprising:
Semiconductor substrate;
Active region is arranged among this semiconductor substrate;
A plurality of doped regions that are arranged in this semiconductor substrate;
Be electrically connected first conductive plunger of one of bit line and these a plurality of doped regions;
Be electrically connected second conductive plunger of one of capacitor and these a plurality of doped regions;
This first conductive plunger comprises second block that is arranged at first block in this active region and is arranged at the first side of this active region; And
This second conductive plunger comprises the 4th block that is arranged at the 3rd block in this active region and is arranged at the second side of this active region.
2. internal storage structure according to claim 1 is characterized in that this bit line connects second block of this first conductive plunger via bit line contact plug.
3. internal storage structure according to claim 1 is characterized in that this capacitor is connected in this second conductive plunger via the capacitor contact plunger.
4. internal storage structure according to claim 3 is characterized in that this capacitor contact plunger connects the 4th block of this second conductive plunger.
5. internal storage structure according to claim 1 is characterized in that this first conductive plunger is electrically connected bit line, and this second conductive plunger is electrically connected capacitor, and this capacitor is arranged at this bit line top.
6. internal storage structure according to claim 1, the width that it is characterized in that this first block are two times of this second block width.
7. internal storage structure according to claim 1, the width that it is characterized in that the 3rd block are two times of the 4th block width.
8. internal storage structure according to claim 1 is characterized in that the first side of this active region and the two opposite sides that the second side is this active region.
9. internal storage structure according to claim 1 is characterized in that also comprising two capacitors, is arranged at the same side of this active region.
10. the preparation method of an internal storage structure is characterized in that comprising:
Form first etching mask on the substrate that comprises semiconductor substrate, active region, doped region and dielectric structure;
Local this dielectric structure of removing is opened between these a plurality of dielectric cylinders to form a plurality of dielectric cylinders and a plurality of first;
Remove this first etching mask, the depositing silicon layer covers the surface of these a plurality of dielectric cylinders;
The part is removed the silicon-containing layer on this dielectric cylinder and is formed second etching mask, and it covers the local surfaces of these a plurality of dielectric cylinders;
Local this dielectric cylinder of removing forms second opening to enlarge this first opening;
Form in second opening of first conductive plunger in this presumptive area and second opening of second conductive plunger beyond this presumptive area in, this first conductive plunger comprises second block that is arranged at first block in this active region and is arranged at this active region first side, and this second conductive plunger comprises the 4th block that is arranged at the 3rd block in this active region and is arranged at this active region second side;
Form the multiple bit lines contact plunger, it connects first conductive plunger in this presumptive area; And
Form a plurality of capacitor contact plungers, it connects second conductive plunger beyond this presumptive area, and forms this internal storage structure.
11. the preparation method of internal storage structure according to claim 10 is characterized in that the step that forms second etching mask comprises:
Change the chemical property of the silicon-containing layer of predetermined portions.
12. the preparation method of internal storage structure according to claim 11, the chemical property that it is characterized in that changing the silicon-containing layer of predetermined portions is to carry out doping process impurity is injected the silicon-containing layer of this predetermined portions.
13. the preparation method of internal storage structure according to claim 12 is characterized in that this doping process is oblique doping process, this silicon-containing layer comprises polysilicon, and this impurity comprises boron difluoride.
14. the preparation method of internal storage structure according to claim 12, it is characterized in that removing this predetermined portions silicon-containing layer in addition is to utilize ammoniacal liquor to carry out wet etching process.
15. the preparation method of internal storage structure according to claim 11, the chemical property that it is characterized in that changing the silicon-containing layer of predetermined portions comprises:
Form first doping mask, it covers the dielectric cylinder of presumptive area; And
Carry out the first oblique doping process impurity is injected this presumptive area silicon-containing layer in addition.
16. the preparation method of internal storage structure according to claim 15 is characterized in that also comprising:
Form second doping mask, it exposes the dielectric cylinder of this presumptive area; And
Carry out the second oblique doping process impurity is injected the silicon-containing layer in this presumptive area;
Wherein the doping direction of this first oblique doping process is different from the doping direction of this second oblique doping process.
17. the preparation method of internal storage structure according to claim 16 is characterized in that also comprising formation the 3rd doping mask, it covers the bottom of this first opening.
18. the preparation method of internal storage structure according to claim 16 is characterized in that the doping direction of the doping of this first oblique doping process in the direction opposite this second oblique doping process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200610127787.3A CN100544002C (en) | 2006-09-08 | 2006-09-08 | Internal storage structure and preparation method thereof |
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|---|---|---|---|
| CN200610127787.3A CN100544002C (en) | 2006-09-08 | 2006-09-08 | Internal storage structure and preparation method thereof |
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| CN101140934A CN101140934A (en) | 2008-03-12 |
| CN100544002C true CN100544002C (en) | 2009-09-23 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US9881924B2 (en) * | 2016-05-11 | 2018-01-30 | Micron Technology, Inc. | Semiconductor memory device having coplanar digit line contacts and storage node contacts in memory array and method for fabricating the same |
| CN109256383B (en) * | 2017-07-14 | 2020-11-24 | 华邦电子股份有限公司 | Memory element and method for manufacturing the same |
| TWI696247B (en) * | 2019-01-28 | 2020-06-11 | 力晶積成電子製造股份有限公司 | Memory structure |
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