CN100542002C - Permanent magnetic bistable electrothermal microdrivers - Google Patents
Permanent magnetic bistable electrothermal microdrivers Download PDFInfo
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- CN100542002C CN100542002C CNB2004100847368A CN200410084736A CN100542002C CN 100542002 C CN100542002 C CN 100542002C CN B2004100847368 A CNB2004100847368 A CN B2004100847368A CN 200410084736 A CN200410084736 A CN 200410084736A CN 100542002 C CN100542002 C CN 100542002C
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Abstract
A kind of permanent magnetic bistable electrothermal microdrivers is used for micro-electromechanical system field.The present invention includes: cantilever beam, turn round beam, contact, soft magnetism transition zone, permanent magnet, matrix, hot driving mechanism, lead-in wire port, soft magnetism substrate.To be distributed in on-chip soft magnetic film is the magnetic conduction substrate, and bilateral symmetry is made a pair of permanent magnet on it; Soft magnetism is turned round beam and is placed in by the soft magnetism transition zone and forms bridge architecture on the pair of base; Make one group of contact on the both sides substrate of bridge respectively; The both sides two-way horizontal of turning round the beam middle part stretches the soft magnetism cantilever beam, and cantilever beam two terminal contacts just in time are in the top of hot driving mechanism, and hot driving mechanism is installed on the matrix, is connected with external circuit by the lead-in wire port after the closing of contact.The present invention realizes that by permanent magnetic action power steady state thermal drives, and not only has the advantage of general hot micro-actuator, and driving voltage is low and output torque is big, and the volumetric power density high stable is reliable, and its bistable structure can make power consumption reduce, and the response time significantly reduces.
Description
Technical field
The present invention relates to a kind of electric heating micro driving mechanism, specifically is a kind of permanent magnetic bistable electrothermal microdrivers.Be used for micro-electromechanical system field.
Background technology
Microdrive is the core of MEMS (micro electro mechanical system) (MEMS), and wherein the microdrive based on static driven, Electromagnetic Drive and hot drive principle is the emphasis of research and development.The MEMS microdrive of static driven is simple in structure, and power consumption can be lower.But keep the needed static driven voltage of works fine characteristic higher, high voltage not only causes power issue, and impairs useful life and stability.The needed driving voltage of Electromagnetic Drive can reach very low-level, but the scale effect of its operating characteristic is obvious, complex structure, power consumption height and efficient is low.Though the bistable state design can be alleviated the heat radiation difficulty of concentrating heating to be caused, can't fundamentally change the low difficult problem of small size device effect.It is a kind of driving mechanism of suitable minute yardstick motion that heat machinery (electric heating) drives, and driving voltage is low and output torque is big, and same scale lower volume power density is significantly higher than static and Electromagnetic Drive, and is reliable and stable.But heat drives two significant disadvantage are arranged, power consumption is big and response speed is slow.In many ways studies show that introducing bistable mechanism helps to improve the defective that heat drives.
Find through literature search prior art, people such as Jin Qiul are at Micro Electro MechanicalSystems, 2003.MEMS-03 Kyoto.IEEE The Sixteenth Annual InternationalConference on, 19-23 Jan.2003 Pages:64-67 (MEMS (micro electro mechanical system), the 16th International Year meeting of IEEE) delivered " A high-current electrothermal bistable MEMS relay " (up-to-date electric heating bistable state microcomputer electric relay) literary composition, this article is mentioned with the bistable mechanism that bent beam constituted of two ends fixed support and is realized that the stable state of heat-driven switch keeps.The 60m Ω of the current load of its 3A and closure state makes it to compare favourably with best mems switch.It is simple that this design seems, but the microbend beam by produced by micro processing is not having can only to realize bi-stable function under certain condition under the situation of preset stress, and complicated integral structure, the bent beam that original position is made is easy to fatigue damage and causes the life-span limited, difficulty of processing is quite big, is not therefore accepted extensively.The driving microdrive defective of heat can be improved by introducing bistable structure.But present existing bistable structure is not fully up to expectations, has influenced the performance of hot driving mechanism overall efficiency.The stable state design is that heat drives the key technology difficult problem that practicability must at first solve.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of permanent magnetic bistable electrothermal microdrivers is provided, make it realize the integrated microdrive that steady state thermal drives by permanent magnetic action power, to give full play to the advantage of hot drive principle and integrated manufacturing, promote the application of miniature hot driver in the Switch micro element.
The present invention is achieved by the following technical solutions, the present invention includes: cantilever beam, turn round beam, contact, soft magnetism transition zone, permanent magnet, hot driving mechanism, lead-in wire port, magnetic conduction substrate.With the soft magnetic film that is distributed on the matrix is the magnetic conduction substrate, and bilateral symmetry is made a pair of permanent magnet on it; Soft magnetism is turned round beam and is placed in by the soft magnetism transition zone and forms bridge architecture on the pair of base; Make one group of contact on the both sides substrate of bridge respectively; The both sides two-way horizontal of turning round the beam middle part stretches the soft magnetism cantilever beam, and cantilever beam two terminal contacts just in time are in the top of hot driving mechanism, and hot driving mechanism is installed on the matrix, can be connected with external circuit by the lead-in wire port after the closing of contact.Wherein, permanent magnet by the magnetic conduction substrate with turn round that beam, cantilever beam and contact are common to constitute two magnetic loops in parallel, the pulse current direction that changes the introducing of lead-in wire port can overuse hot driving mechanism makes wherein one of contact closure, realizes that by permanent magnetism power the outage attitude keeps, the formation bistable state.Drive conductive contact with cantilever beam, suitable integrated access signal line just can constitute mechanical type micro switch or microrelay.
When the present invention worked, extraneous electric current flowed into microrelay by the lead-in wire port of a side.When electric current was flowed through the hot driving mechanism of this side, hot driver was subjected to exciting upwards warpage, and the contact of running into this end of cantilever beam is continued warpage then, and this end of cantilever beam is upwards lifted.So an other end of cantilever beam descends, until contacting with the lead-in wire port with the magnetic conduction substrate of its this side.Immediately, permanent magnet, the magnetic conduction substrate is turned round beam, the magnetic loop closure of this side that cantilever beam constitutes.The lead-in wire port with cantilever beam contacted the external circuit that is attached thereto promptly closed.And after the magnetic loop closure, electric current can stop input, the hot driver natural cooling of former warpage and recover original appearance.Magnetic loop realizes that by permanent magnetism power the outage attitude keeps, and this is a stable state of the present invention.When the port input current that goes between at opposite side, the end points that the hot driving mechanism of this side will drive the cantilever beam that sinks leaves the origin-location, and contact and bottom disengage, and cantilever beam can tilt to another direction, and forms the no power consumption stable state of another symmetry equally.Finished displacement simultaneously in the process that the end of cantilever beam realizes switching between stable state, so just constituted bistable state hot driver of the present invention.
The present invention realizes that by permanent magnetic action power steady state thermal drives, given full play to the advantage of hot drive principle and integrated manufacturing, the advantage that not only has general hot micro-actuator, driving voltage is low and output torque is big, the volumetric power density high stable is reliable, and its bistable structure can make power consumption reduce, and the response time significantly reduces.So this permanent magnetic bistable electrothermal microdrivers can promote the application of miniature hot driver in the Switch micro element, make the microminiaturized level of switch get a promotion.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is the perspective view of hot driving mechanism
Embodiment
As shown in Figure 1, the present invention includes: cantilever beam 1, turn round beam 2, contact 3, soft magnetism transition zone 4, permanent magnet 5, matrix 6, hot driving mechanism 7, lead-in wire port 8, magnetic conduction substrate 9.With the soft magnetic film that is distributed on the matrix 6 is magnetic conduction substrate 9, and bilateral symmetry is made a pair of permanent magnet 5 on it; Soft magnetism is turned round beam 2 and is placed on a pair of permanent magnet 5 by soft magnetism transition zone 4 and forms bridge architecture; Make one group of contact 3 respectively on the both sides magnetic conduction substrate 9 of bridge; The both sides two-way horizontal of turning round beam 2 middle parts stretches soft magnetism cantilever beam 1,1 liang of terminal contacts 3 of cantilever beam just in time is in the top of hot driving mechanism 7, hot driving mechanism 7 is by overlapping up and down with cantilever beam 1 end, hot driving mechanism 7 is installed on the matrix 6, and the external circuit at lead-in wire port 8 places is connected in 3 closed backs, contact.
Matrix 6 is selected according to the instructions for use of device, as the matrix of sheet glass, silicon chip, aluminium oxide ceramics or other any surfacing.For with the integrated needs of control circuit, silicon chip is to select preferably, but in some high-frequency element systems, the ceramic matrix of specific function more helps improving the performance of device, as aluminium oxide ceramics, BST pottery etc., in particular cases metallic matrix also can use.Device thickness to matrix on the design principle does not have special requirement, and smooth matrix helps the enforcement of fine process.
Magnetic conduction substrate 9 is mainly born the effect that compiles magnetic flux and set up the flux transfer passage; with the high magnetic permeability soft magnetic material for well; wherein permalloy has practicality most; the permalloy film of electro-deposition particularly; not only internal stress is low; the magnetic permeability height, and can realize selective deposition easily by mask plating, at the subregion of matrix surface structure substrate and passage.Also can adopt the superior nano-magnetic thin-film material of soft magnet performance.The thickness of substrate can be peeked micron to tens of microns, is as the criterion can prevent effectively that magnetic flux from dispersing.
As shown in Figure 2, hot driving mechanism 7 is the parts that produce actuating force by the electric heating effect, and it comprises: electrode 10, drive medium 11, warpage layer 12, pedestal 13.Its annexation is: electrode 10 is being close to drive medium 11, and drive medium 11 is deposited on warpage layer 12 top, and the end of warpage layer 12 is fixed on the pedestal 13.Its stereochemical structure as shown in Figure 2.Hot driving mechanism 7 is installed on the matrix 6.Hot driving mechanism can sputtering sedimentation niti-shaped memorial alloy film as drive medium 11.The one end is fixed on the pedestal 13 by electrode 10, the other end be positioned at contact 3 under.The drive medium structure is a bar structure, is beneficial to expand in its face.Be the aluminium oxide warpage layer 12 of insulation below the drive medium, its coefficient of expansion and drive medium difference are bigger.The warpage layer is unsettled to be placed on the pedestal 13.When hot Drive Structure heating power, because the bimetallic effect of the shape memory effect of drive medium and itself and matrix, hot driving mechanism is stimulated and upwards drives, and it just in time can the top upper contact, thus the initiation bistable structure.Electrode material, base material etc. can independently be chosen according to performance need.Drive medium size desirable tens is to the hundreds of micron, and thickness gets final product for several microns.Electrode and base size are got greatly as far as possible, and be hundreds of to thousands of microns, with handled easily and increase adhesion.
Permanent magnet 5 is positioned on the soft magnetism substrate 9, and not high to its coercitive requirement, multiple permanent magnetic material can be competent at, it is the most desirable that but the mask plating method directly prepares, adopt suitable solution composition, comprise Co-P, the magnetic alloy of systems such as Co-Fe-Ni all might meet the demands.Also can process rare-earth permanent magnet such as Nd-Fe-B by precision optical machinery, material such as Sm-Co, Al-Ni-Co makes it one-step forming just, reaches design height by retrofit again after being in place, Jia Gong magnet performance is more superior like this, but the processing technology complexity.Permanent magnet 5 is also born the effect of turning round beam 2 bearing bases simultaneously, must be by the strict control of designing requirement, by can necessarily regulating the pedestal whole height the suitable adjustment of soft magnetism transition zone 4 thickness on it to its height dimension.
The 4 main effects of soft magnetism transition zone are that the magnetic flux that reduces permanent magnet 5 is dispersed, the material selection is similar to soft magnetism substrate 9 with process choice, thickness does not have very strict requirement, but generally want more than several microns, can significantly suppress the permanent magnet magnetic flux disperses and gets final product, the thickness increase does not have tangible limiting factor, and this provides convenience for the height of suitably regulating the bearing base of turning round beam 2.
Turn round beam 2 carrying total movement structures, according to global design thought, the primary structure distortion that motion causes also occurs in to be turned round on the beam 2, it also switches for stable state provides part actuating force (distortion restoring force), it still is the part of closed magnetic circuit in parallel simultaneously, so, the structural design of turning round beam 2 must be for slender type so that it can easily reverse, and it must be made by soft magnetic material.Consider that from the magnetic property aspect foundation that material is selected is similar to substrate 9, still, must take into account mechanical performance and little processing feasibility here simultaneously, particularly when its Mechanical Builds was very important, this point was even more important.The possible material of tool that can take into account above-mentioned requirements remains the soft magnetic material of electro-deposition, as permalloy etc.
The shape of turning round beam 2 is preferably anisotropic, turn round on the beam 2 because wish that most of deformation occurs in, rather than above the cantilever beam 1, so, its torsional rigidity can not be too big, but the weight of carrying cantilever beam 1 and magnet 3, and the impact of their high-speed motions, need it to have higher intensity, so the structure depth-width ratio of turning round beam 2 should be greater than 1 in vertical direction, as for its concrete numerical value of width, height and length, the relation that then has mutual restriction, it is long more to turn round beam 2 length, and the width of permission and height value are also big more.Turn round the length of beam 2 and can get between 100～1000 microns, corresponding thickness can be between 3～100 microns, and width can be between 1～50 micron, and definite numerical value will be determined according to design parameter combined process condition.Turn round beam 2 and can also get the version of other particular design to satisfy the requirement of system, such as tortuous beam etc. to its intensity anisotropy.
Cantilever beam 1 is distributed in the both sides of turning round beam 2 to the both direction horizontal stretching, in structure of the present invention, it and unlike cantilever beam be the main carrier that produces distortion and then cause moving like that, its effect is presented as more around turning round beam 2 makes circular motion, amplify the torsional deflection of turning round beam 2, and self can keep substantially original form constant.For this reason, need the intensity of cantilever beam apparently higher than turning round beam, so the physical dimension of cantilever beam 1 and shape are different from turns round beam 2.Yet, consider that from the response speed restraining factors of moving component the cantilever beam 1 of desired movement is too unheavy again, therefore, need with its structural design for turn round the beam several times wide but divide only wide so that have lower quality simultaneously in that acquisition is high-intensity.
The length of cantilever beam 1 has a direct impact the displacement of microdrive, but does not have tangible restraining factors to limit its selection, and each 50～1000 microns of side arm length is proper, does not get rid of the longer possibility of special circumstances lower cantalever certainly.Cantilever beam 1 also is simultaneously the part that stable state keeps magnetic circuit, the requirement on magnetism of material with turn round beam 2 basically identicals.The two ends of cantilever beam 1 extend to hot driving mechanism 7 front ends top, and form about ten direct twistings to tens of microns juxtaposition but, this has constituted a striking features of the present invention, be that driving mechanism 7 both can link with the attitude maintaining body, can separate again, to reduce pining down mutually between them.
Contact 3 links to each other with the outer end of cantilever beam 1, it is the extensional section of cantilever beam 1, participate in magnetic action directly and produce actuating force or attitude confining force, it also is the part of closed magnetic circuit, it mainly is that end face with lead-in wire port 8 and hot driving mechanism 7 is complementary that the contact shape adopts the purpose of special construction, to reduce the loss that magnetic flux is dispersed.
The present invention have one group of symmetry in parallel by permanent magnet 5, turn round beam 2, soft magnetism transition zone 4, cantilever beam 1, contact 3, the toroid that magnetic conduction substrate 9 is constituted they can not be closed simultaneously, but closure state can substitute mutually.Arbitrary magnetic circuit closure just forms the stable state that a no power consumption attitude keeps, and has bi-stable function on this basis thereby make.
At the initial state that does not have impressed current to pass through, to turn round beam 2 and keep initial condition, the contact 3 that the cantilever beam 1 of both sides holds up does not contact with hot driving mechanism 7, the magnetic flux M that permanent magnet 5 produces
0Naturally be divided into two parts, form the loop that both sides all have air gap to exist by two magnetic circuits respectively, it is identical to turn round the gravitation that beam 2 both sides cantilever beams 1 two ends are subjected to, and keeps original attitude.At this moment give hot driving mechanism 7 triggering signals in two loops, hot driving mechanism 7 will start, and promotes a side of cantilever beam 1, makes it to tilt to another direction.This restoring force that be turned round beam 2 by a part of meeting of the actuating force that produced by force unbalance is offset, but, as long as hot actuating force is enough big, the contact of cantilever beam 1 end just can be made air gap in this side loop up substantially through enough displacements, reach the locating point position that contacts with the surface of magnetic conduction substrate 9, formation is close to closed magnetic circuit, realizes the communication with external lead wire simultaneously.At this moment disconnect the drive current of hot driving mechanism 7 again, this inclination contact condition will be maintained by permanent magnetism power, a stable state of said system that Here it is.Make cantilever beam 1 leave present stable state, as long as in another hot driving mechanism 7, insert starting current, the hot driving mechanism 7 of this side will drive cantilever beam 1 end points that sinks and leave the origin-location, disengage with contact 3 and bottom, cantilever beam 1 can tilt to another direction, and forms the no power consumption stable state of another symmetry equally.Finished displacement simultaneously in the process that the end of cantilever beam 1 realizes switching between stable state, so just constituted bistable state hot driver of the present invention.
Claims (6)
1, a kind of permanent magnetic bistable electrothermal microdrivers, comprise: matrix (6), lead-in wire port (8), it is characterized in that, also comprise: cantilever beam (1), turn round beam (2), contact (3), soft magnetism transition zone (4), permanent magnet (5), hot driving mechanism (7), magnetic conduction substrate (9) is magnetic conduction substrate (9) with the soft magnetic film that is distributed on the matrix (6), bilateral symmetry is made a pair of permanent magnet (5) on it, turn round beam (2) and be placed on a pair of permanent magnet (5) by soft magnetism transition zone (4) and form bridge architecture, make one group of contact (3) respectively on the both sides magnetic conduction substrates (9) of bridge, the both sides two-way horizontal of turning round beam (2) middle part stretches cantilever beam (1), cantilever beam (1) two terminal contacts (3) just in time is in the top of hot driving mechanism (7), hot driving mechanism (7) is by overlapping up and down with cantilever beam (1) end, and hot driving mechanism (7) is installed on the matrix (6), and the external circuit at lead-in wire port (8) place is connected in contact (3) closed back.
2, permanent magnetic bistable electrothermal microdrivers according to claim 1, it is characterized in that, hot driving mechanism (7) comprising: electrode (10), drive medium (11), warpage layer (12), pedestal (13), its annexation is: electrode (10) is being close to drive medium (11), drive medium (11) is deposited on warpage layer (12) top, and the end of warpage layer (12) is fixed on the pedestal (13).
3, permanent magnetic bistable electrothermal microdrivers according to claim 2, it is characterized in that, hot driving mechanism (7) sputtering sedimentation niti-shaped memorial alloy film is as drive medium (11), the one end is fixed on the pedestal (13) by electrode (10), the other end be positioned at contact (3) under, drive medium (11) structure is a bar structure, the following aluminium oxide warpage layer (12) of drive medium (11) for insulation, and warpage layer (12) is unsettled to be placed on the pedestal (13).
4, permanent magnetic bistable electrothermal microdrivers according to claim 1, it is characterized in that, the structure depth-width ratio of turning round beam (2) is greater than 1, it is long more to turn round beam (2) length, the width and the height value that allow are also big more, turn round beam (2) length between 100～1000 microns, thickness is between 3～100 microns, and width is between 1～50 micron.
5, permanent magnetic bistable electrothermal microdrivers according to claim 1, it is characterized in that, long 50～1000 microns of each side arm of cantilever beam (1), the two ends of cantilever beam (1) extend to hot driving mechanism (7) front end top, and form ten to tens of microns juxtaposition.
6, permanent magnetic bistable electrothermal microdrivers according to claim 1, it is characterized in that, by permanent magnet (5), turn round beam (2), soft magnetism transition zone (4), cantilever beam, contact (3), magnetic conduction substrate (9) constitutes one group of toroid that symmetry is in parallel, and they can not be closed simultaneously, but closure state substitutes mutually.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100847368A CN100542002C (en) | 2004-12-02 | 2004-12-02 | Permanent magnetic bistable electrothermal microdrivers |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100847368A CN100542002C (en) | 2004-12-02 | 2004-12-02 | Permanent magnetic bistable electrothermal microdrivers |
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| CN1614865A CN1614865A (en) | 2005-05-11 |
| CN100542002C true CN100542002C (en) | 2009-09-16 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101544347B (en) * | 2009-04-23 | 2011-04-06 | 上海交通大学 | Bidirectional bistable microdrive based on electrothermal and electromagnetic drive |
| CN109113942B (en) * | 2018-10-12 | 2023-08-29 | 中国地质大学（武汉） | Carbon nano tube fiber composite shape memory alloy type driver |
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