Ammonium chloride and titanium tetrachloride complex compound retrieving arrangement
Technical field
Byproduct (or refuse) retrieving arrangement that the present invention relates generally in the process for fabrication of semiconductor device to be produced, the ammonium chloride and the titanium tetrachloride complex compound (NH that are produced when being specifically related to deposit titanium nitride film in the semiconducter device manufacturing
4Cl and TiCl
4NNH
3) retrieving arrangement.
Background technology
In the fabrication of semiconductor device, usually want deposit titanium nitride (TiN) film as sealing coat, the formation method of titanium nitride (TiN) film is that with chemical vapor deposition (CVD), the reactant gases in the CVD treatment chamber is NH
3And TiCl
4, chemical equation is;
8NH
3+6TiCl
4→6TiN+24HCl+N
2
Reaction heater temperature scope is 650 ℃-700 ℃, and the preferred indoor temperature of reaction of CVD is 680 ℃.Vacuum tightness in the reaction chamber is 10 torrs (Torr), adds NH in the CVD treatment chamber
3And TiCl
4Gas, in 650 ℃-700 ℃ temperature range, deposit titanium nitride (TiN) film on semiconductor wafers, the waste gas HCl that is produced is being lower than under 160 ℃ the temperature and NH again
3Reaction generates ammonium chloride (NH
4Cl) pressed powder, chemical equation is:
NH
3+HCl→NH
4Cl
In addition, on silicon wafer during deposit TiN film, the TiN film of also can deposit on other component in the CVD treatment chamber not wishing deposit, therefore, each will the cleaning behind the deposit TiN film on silicon wafer removed in the CVD treatment chamber TiN film of deposit on other component, and purging method commonly used is to feeding chlorine (Cl in the CVD treatment chamber
2), chemical equation is:
2TiN+4Cl
2→2TiCl
4+N
2
The heater temperature scope is 650 ℃-700 ℃, and the preferred indoor temperature of reaction of CVD is 680 ℃.The inherent vacuum tightness of reaction chamber is 10 torrs (Torr), the waste gas TiCl that is produced
4Be lower than under 450 ℃ the temperature again and NH
3Reaction generates TiCl
4NNH
3, chemical equation is:
TiCl
4+ nNH
3→ TiCl
4NNH
3(n=2-8) be Huang/white powder end being lower than under 160 ℃ the temperature
NH
3+HCl → NH
4Cl is a white powder
Therefore, when deposit TiN film and cleaning were removed the CVD treatment chamber in TiN film on other parts on silicon wafer in the CVD treatment chamber, byproduct that is produced or refuse mainly were ammonium chloride and titanium tetrachloride complex compound (NH
4Cl and TiCl
4NNH
3).Ammonium chloride and titanium tetrachloride complex compound (NH
4Cl and TiCl
4NNH
3) become pressed powder being lower than under 160 ℃ the temperature, therefore collect easily with refrigerating unit.
Current general ammonium chloride and titanium tetrachloride complex compound (NH
4Cl and TiCl
4NNH
3) retrieving arrangement is arranged on the cold-trap between CVD treatment chamber and the vacuum pump.Recovery cold-trap structure as shown in Figure 1 is by certain interval identical collection ammonium chloride of multi-sheet structure and titanium tetrachloride complex compound (NH to be set in a drum shape shell
4Cl and TiCl
4NNH
3) the recovery sheet, on the every recovery sheet a plurality of aperture pockety is set, the diameter of aperture is less than 50mm, referring to the recovery cold-trap structure behind the removal shell shown in Figure 2, a plurality of collection ammonium chlorides and titanium tetrachloride complex compound (NH are passed in hole misalignment on the adjacent recovery sheet, water-cooled tube
4Cl and TiCl
4NNH
3) the recovery sheet, form circulating water cooling system (referring to Fig. 3 synoptic diagram).
Gas (the NH owing to be condensed
4Cl and TiCl
4NNH
3) passage in cold-trap is to be formed by the aperture that reclaims on the sheet, the degree of the gas passage bending that is condensed that the aperture misalignment that is provided with on the adjacent recovery sheet forms is little, the length of gas communication is not enough, and the recovery sheet of cold-trap middle and upper part is collected a large amount of ammonium chloride (NH usually in actual the use
4Cl and TiCl
4NNH
3) powder, but ammonium chloride of collecting on the recovery sheet of bottom and titanium tetrachloride complex compound (NH
4Cl and TiCl
4NNH
3) powder seldom.Thereby the collection sheet of cold-trap middle and lower part can not be fully used.
This kind ammonium chloride and titanium tetrachloride complex compound (NH
4Cl and TiCl
4NNH
3) gas concentration unit, in current production, just must collect ammonium chloride (NH in cold-trap of clean behind the deposit TiN film on per 2000 silicon wafers
4Cl and TiCl
4NNH
3) the recovery sheet.And the cleaning maintenance cycle of CVD treatment chamber be on per 10000 silicon wafers deposit component in cleaning maintenance process CVD treatment chamber behind the TiN film.In other words, maintenance be to clean in the time cycle of component in CVD treatment chamber of every cleaning maintenance and ammonium chloride and titanium tetrachloride complex compound (NH collected 4 times to 5 times
4Cl and TiCl
4NNH
3) cold-trap.Thereby reduced equipment efficiency of usage, and increased the weight of equipment cleaning Maintenance Engineer's work load.In order to overcome existing collection ammonium chloride and titanium tetrachloride complex compound (NH
4Cl and TiCl
4NNH
3) the existing shortcoming of cold-trap, the present invention is proposed.
Summary of the invention
In order to overcome above-mentioned shortcoming proposition the present invention that existing ammonium chloride and titanium tetrachloride complex compound gas concentration unit exist.
The objective of the invention is, a kind of improved ammonium chloride and titanium tetrachloride complex compound retrieving arrangement are provided, ammonium chloride and titanium tetrachloride complex compound retrieving arrangement are arranged between CVD treatment chamber and the vacuum pump.
By a technical scheme of the present invention, improved ammonium chloride and titanium tetrachloride complex compound retrieving arrangement, comprise: drum shape shell, two kinds of different being used to of structure are reclaimed the multi-disc recovery sheet A of ammonium chloride and titanium tetrachloride complex compound powder and are reclaimed sheet B, and water-cooled tube.The inwall of drum shape shell and collection ammonium chloride and titanium tetrachloride complex compound (NH
4Cl and TiCl
4NNH
3) between the edge of recovery sheet of powder almost not at interval, be fully not at interval in theory, two kinds of different multi-discs of structure reclaim sheet A and reclaim sheet B and are arranged alternately at interval in accordance with regulations, and water-cooled tube reclaims ammonium chloride and titanium tetrachloride complex compound (NH with two kinds of different being used to of structure
4Cl and TiCl
4NNH
3) multi-disc of powder reclaims sheet A and reclaim sheet B and weld together.
Be used to reclaim ammonium chloride and titanium tetrachloride complex compound (NH
4Cl and TiCl
4NNH
3) the recovery sheet of powder comprises the recovery sheet of two kinds of different structures, a kind of recovery sheet is not have the circular sheet A that reclaims of foraminous, another kind ofly reclaims the recovery sheet B that sheet is center a annular that circular port is arranged.The center of circle of the described circular port among the recovery sheet B of annular is identical with the center of circle of the recovery sheet B of annular, the outer diameter D b of the recovery sheet B of annular be 270mm to 280mm, the inside diameter D k scope of the recovery sheet B of annular is that 110mm is to 130mm; Not having the circular diameter Da scope that reclaims sheet A of foraminous is that 165mm is to 170mm.And the outer diameter D b that reclaims sheet B is 275mm also, and inside diameter D k is 120mm also; The diameter Da that reclaims sheet A is 160mm also.
By a technical scheme of the present invention, in the ammonium chloride retrieving arrangement, to be that diameter is smaller do not have a circular sheet A that reclaims of foraminous to the recovery sheet of topmost, the recovery sheet of foot is the recovery sheet B of the bigger center of diameter annular that circular port K is arranged, from top to bottom interval in accordance with regulations coaxially sequence alternate the recovery sheet B that the smaller circle of diameter reclaims the bigger annular of sheet A and diameter (external diameter) is set, the quantity of the recovery sheet B of the annular that circle recovery sheet A that set diameter is smaller and diameter are bigger is respectively 4 or 5.Reclaiming sheet A from the smaller circle of diameter topmost and begin downwards, is one group with adjacent A, B sheet, and the space between preceding two groups of A, the B sheet is 3cm; Thereafter the space between A, the B sheet is 2cm.
Because the circular recovery of the foraminous sheet A that do not have that diameter is smaller is positioned at the top of cold-trap, the center that diameter is bigger has between the inner edge of the edge of recovery sheet B of annular of circular port and cold-trap almost not at interval, therefore, ammonium chloride that enters above cold-trap and titanium tetrachloride complex compound gas can only have the centre hole of recovery sheet B of the annular of circular port to flow downward from the smaller circular edge that reclaims sheet A of foraminous that do not have of diameter through the bigger center of diameter, form crooked gas channel.
Compare with existing ammonium chloride and titanium tetrachloride complex compound retrieving arrangement, collect ammonium chloride and titanium tetrachloride complex compound (NH in ammonium chloride provided by the invention and the titanium tetrachloride complex compound retrieving arrangement
4Cl and TiCl
4NNH
3) the recovery sheet two kinds of different structures are arranged, a kind of is not have the circular sheet that reclaims of foraminous, another kind is that the annulus that is provided with large diameter hole at the center reclaims sheet, two kinds of recovery sheets are big by the interval on top, the little mode in the interval of bottom is arranged alternately, form crooked gas channel, prolonged gas channel length, this design can reduce from top to bottom each and reclaim the ammonium chloride collected on sheet and the difference of titanium tetrachloride complex compound powder quantity, make on the recovery sheet that is positioned at the cold-trap bottom and also can collect a large amount of powder, improved the utilising efficiency of whole recovery device.Facts have proved,, just need the cleaning maintenance process once to collect ammonium chloride and titanium tetrachloride complex compound (NH on per 5000 silicon wafers behind the deposit TiN film with ammonium chloride provided by the invention and titanium tetrachloride complex compound retrieving arrangement
4Cl and TiCl
4NNH
3) cold-trap in the recovery sheet.Thereby improved plant factor, shortened the process time.
Description of drawings
The accompanying drawing that comprises among the application is a component part of specification sheets, and accompanying drawing and specification sheets and claims one are used from explanation flesh and blood of the present invention, are used for understanding better the present invention.
By detailed description, can understand element structure of the present invention better, member pattern, operation of the present invention, other purposes of the present invention and advantage below in conjunction with accompanying drawing.Accompanying drawing is included in the specification sheets, the component part of the description of the drawings book, in the accompanying drawing similarly or components identical indicate with identical reference number.In the accompanying drawing:
Fig. 1 is existing ammonium chloride Waste recovery device one-piece construction profile synoptic diagram;
Fig. 2 is the picture after existing retrieving arrangement is removed shell;
Fig. 3 is the recovery sheet and the water-cooled tube structural representation of existing retrieving arrangement inside;
Fig. 4 is the recovery sheet one-piece construction synoptic diagram of retrieving arrangement of the present invention, and sheet A is reclaimed in numeral 1 expression, and sheet B is reclaimed in numeral 2 expressions;
Fig. 5 is the recovery sheet one-piece construction and the simple synoptic diagram of condensate pipe of retrieving arrangement of the present invention, wherein demonstrates with arrow and collects ammonium chloride and titanium tetrachloride complex compound (NH in the cold-trap
4Cl and TiCl
4NNH
3) the different formed gas flowing path of recovery sheet of two kinds of structures of powder;
Fig. 6 is the sectional view that shows the state that is provided with according to the recovery sheet of ammonium chloride of the present invention and titanium tetrachloride complex compound retrieving arrangement inside, demonstrates the interval between the recovery sheet B that the little circle of diameter reclaims the big annular of sheet A and diameter among the figure:
Fig. 7 shows the top view that reclaims the structure of sheet A according to the little circle of the diameter of ammonium chloride of the present invention and titanium tetrachloride complex compound retrieving arrangement inside;
Fig. 8 is the top view of demonstration according to the structure of the recovery sheet B of the big annular of the diameter of ammonium chloride of the present invention and titanium tetrachloride complex compound retrieving arrangement inside; With
Fig. 9 demonstrates ammonium chloride and the position block diagram of titanium tetrachloride complex compound retrieving arrangement (cold-trap) on the semiconducter device production line.
Embodiment
In order to understand technology of the present invention better, be described further below in conjunction with specific embodiments of the invention, but it does not limit the present invention.
Embodiment 1
This embodiment has elaborated by ammonium chloride of the present invention and titanium tetrachloride complex compound retrieving arrangement with reference to accompanying drawing.
According to ammonium chloride of the present invention and titanium tetrachloride complex compound retrieving arrangement, comprising: drum shape shell, two kinds of different being used to of structure are reclaimed the multi-disc recovery sheet A of ammonium chloride and titanium tetrachloride complex compound powder and are reclaimed sheet B, and water-cooled tube.Almost do not have at interval between the edge of the recovery sheet of the inwall of drum shape shell and collection ammonium chloride and titanium tetrachloride complex compound powder, recovery sheet A that two kinds of structures of multi-disc are different and recovery sheet B are arranged alternately in accordance with regulations at interval, and recovery sheet A that two kinds of structures of water-cooled tube and multi-disc are different and recovery sheet B weld together.
The recovery sheet one-piece construction synoptic diagram of retrieving arrangement of the present invention as shown in Figure 4, in ammonium chloride of the present invention and titanium tetrachloride complex compound retrieving arrangement (cold-trap), interval in accordance with regulations is arranged alternately two kinds of recovery sheets that structure is different from top to bottom, collects ammonium chloride and titanium tetrachloride complex compound (NH
4Cl and TiCl
4NNH
3) powder, uppermost recovery sheet is that the smaller foraminous circle that there is not of diameter reclaims sheet A (in the drawings with numeral 1 expression), second of number is reclaimed the recovery sheet B (in the drawings with numeral 2 expressions) that sheet is the bigger center of diameter a annular that circular port is arranged from the top down, two kinds are reclaimed sheet and are arranged alternately nethermost a slice collection ammonium chloride and titanium tetrachloride complex compound (NH in the cold-trap
4Cl and TiCl
4NNH
3) the recovery sheet of powder is the recovery sheet B of the bigger center of diameter annular that circular port is arranged.
Fig. 5 is the recovery sheet and the simple synoptic diagram of condensate pipe one-piece construction of retrieving arrangement of the present invention, wherein demonstrates with arrow and collects ammonium chloride and titanium tetrachloride complex compound (NH in the cold-trap
4Cl and TiCl
4NNH
3) the different formed gas flowing path of recovery sheet of two kinds of structures of powder.From figure, see, because the circular recovery of the foraminous sheet A (with numeral 1 expression) that do not have that diameter is smaller is positioned at the top of cold-trap, and there is between the inner edge of edge and cold-trap of recovery sheet B (with numeral 2 expressions) of the annular of circular port almost not interval at the bigger center of diameter, therefore the gas that is condensed that enters above cold-trap can only have the centre hole of recovery sheet B of the annular of circular port to flow downward from the smaller circular edge that reclaims sheet A of foraminous that do not have of diameter through the bigger center of diameter, form crooked gas channel (shown in the arrow among the figure).
Four intervals of reclaiming between the sheet on cold-trap top are bigger than the interval between the recovery sheet of cold-trap bottom, therefore the gas channel on cold-trap top is shorter than the gas channel of cold-trap bottom, though the gas concentration of the gas channel by cold-trap top is greater than the gas concentration of the gas channel by the cold-trap bottom, but because the gas channel of cold-trap bottom is long, so, also can collect a large amount of ammonium chloride and titanium tetrachloride complex compound powder on the recovery sheet of cold-trap bottom.
Fig. 6 provides a cold-trap sectional view according to the present invention program's actual design, as shown in the figure, to be that diameter is smaller do not have a circular sheet A (with numeral 1 expression) that reclaims of foraminous to the recovery sheet of topmost in the cold-trap, the recovery sheet of foot is the recovery sheet B (with numeral 2 expressions) of the bigger center of diameter annular that circular port is arranged, numeral 3 expression prolongs.According to from top to bottom with the interval of regulation coaxially sequence alternate the recovery sheet B that the smaller circle of diameter reclaims the bigger annular of sheet A and diameter is set, the quantity that the smaller circle of set diameter reclaims the recovery sheet B of the bigger annular of sheet A and diameter is respectively 5.Reclaiming sheet A from the smaller circle of diameter topmost and begin downwards, is one group with adjacent recovery sheet A and recovery sheet B sheet, and preceding two groups of spaces of reclaiming sheet A and reclaiming between the sheet B are 3cm; Thereafter recovery sheet A and the space of reclaiming between the sheet B are 2cm.
Fig. 7 and Fig. 8 are respectively above-mentioned two kinds of vertical views that reclaim sheet A and reclaim sheet B, and what Fig. 7 showed is not have the circular sheet A that reclaims of foraminous.Fig. 8 shows is the recovery sheet B of another kind of center annular that circular port is arranged.The center of circle of the described circular port among the recovery sheet B of annular is identical with the center of circle of the recovery sheet B of annular.The outer diameter D b of the recovery sheet B of annular be 270mm to 280mm, the inside diameter D k scope of the recovery sheet B of annular be 110mm to 130mm, not having the circular diameter Da scope that reclaims sheet A of foraminous is that 165mm is to 170mm.And the outer diameter D b of the recovery sheet B of annular is 275mm also, and its inside diameter D k is 120mm also, and the diameter Da that reclaims sheet A is 160mm also.
Retrieving arrangement of the present invention is arranged between CVD treatment chamber and the vacuum pump, as shown in Figure 9 in actual applications.
Have above-mentioned two kinds of different structures owing to reclaim sheet in ammonium chloride of the present invention and the titanium tetrachloride complex compound retrieving arrangement, and these two kinds recovery sheet intervals by top in retrieving arrangement are big, the little mode in the interval of bottom is arranged alternately, thereby the crooked exhaust steam passage of formation, and optimized the passage length that gas is condensed according to reclaiming gas concentration, reduce from top to bottom each and reclaimed the ammonium chloride collected on sheet and the difference of titanium tetrachloride complex compound powder quantity, the ammonium chloride that is positioned at the cold-trap bottom and titanium tetrachloride complex compound are reclaimed on the sheet also can collect a large amount of ammonium chloride and titanium tetrachloride complex compound powder, improved the utilising efficiency of retrieving arrangement.Facts have proved, use retrieving arrangement of the present invention, just need the cleaning maintenance process once to reclaim sheet on per 5000 silicon wafers behind the deposit TiN film.Thereby improved plant factor, shortened the process time.
More than describe in detail by a specific embodiment of the present invention, still the invention is not restricted to detailed description herein.The technician of the industry should be appreciated that the present invention can implement with other form.Therefore, by whole technical schemes of the present invention, cited embodiment just is used to illustrate the present invention rather than restriction the present invention, and the present invention is not limited to the details of describing herein.The scope of protection of present invention is defined by appending claims.