CN100535201C - Electron tubes type equipment for preparing nano material - Google Patents
Electron tubes type equipment for preparing nano material Download PDFInfo
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- CN100535201C CN100535201C CNB2007100178790A CN200710017879A CN100535201C CN 100535201 C CN100535201 C CN 100535201C CN B2007100178790 A CNB2007100178790 A CN B2007100178790A CN 200710017879 A CN200710017879 A CN 200710017879A CN 100535201 C CN100535201 C CN 100535201C
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Abstract
The invention discloses a vacuum tube apparatus to prepare nanometer material, which is characterized by the following: comprising closed vacuum chamber (2); arranging the vacuum chamber (2) in furnace body (1); arranging underlay (7) on the position of air flow downstream in the vacuum chamber (2); connecting the vacuum chamber (2) with at least one source material evaporator (16) to control and adjust evaporation rate of source material; adopting control source component flux technology; realizing accurate control. This device possesses simple device, compact structure, simple operation and low cost.
Description
Technical field
The present invention relates to a kind of equipment for preparing nano material, particularly a kind of electron tubes type equipment for preparing nano material.
Background technology
Nano wire, nano thin-film can be synthetic by several different methods, and wherein vapor growth method is topmost method.The principle of vapor phase growth is that source material is converted into gaseous state by processes such as distillation, evaporation, decomposition, makes it become supersaturated vapor then under suitable condition, grows crystal through condensation-crystallization.Sheng Chang crystal purity height in this way, integrity is good.Because fluid phase (gas phase) molecular density of crystal growth is very low, the specific volume of gas phase and solid phase differs greatly, make that the speed of growing crystal is all more much lower than the speed from melt or growth from solution from gas phase, so this method mainly is to be used for growing whisker and thickness greatly about the films of several microns to the hundreds of micron, promptly usually said vapor phase epitaxy technique at present.This be most important in the present vapor phase process also be a field with the fastest developing speed.
In physical vaporous deposition, thermal evaporation is the most frequently used growth method.Way commonly used is, utilize vacuum tube furnace, single source material, or evaporate a certain position that the blended source material is placed in the vacuum oven, material atom that evaporates or atomic group family are under the conveying of carrier gas, under certain metal catalyst effect,, form one-dimensional nano line through the vapour deposition process of self-organization according to VLS (vapor-liquid-solid) mechanism.Thermal evaporation is one of physical vaporous deposition (PVD), thermal evaporation has advantages such as equipment is simple, easy and simple to handle, cost of use is low, also has higher sedimentation velocity, higher relatively vacuum tightness, and cause thus than characteristics such as high-crystal qualities, so method of evaporation has been subjected to largely paying attention to.But this method also has its tangible limitation.As, above-mentioned single source evaporation technique can be applied to element, or the compound that evenly distils, perhaps those more approaching materials of the steaming pressure ratio of component.And the vapour pressure that can not be applied to component has the very evaporation of those compounds of big difference, because than being easier to before evaporable constituent element another constituent element as far back as any considerable amount is transported to, just almost can all evaporate, in this case, finally can make the deposited film layering, or gradient appears on composition, and promptly enabling to reach stable state, its composition also can have very big difference with initial feed.Therefore, present thermal evaporation tube furnace technology can not effectively address this problem, want this compounds is adopted vacuum evaporation technique, present method is: adopt continuous dosing flash evaporation technology, the compound crystal growth of big-difference has certain effect although this technology is pressed with very for the steam that overcomes component element, but effect is still unsatisfactory, still can not be than the composition of accurate control growing material.
Molecular beam epitaxy (MBE) is a kind of epitaxy technology that grows up on the basis of vacuum-evaporation.It mainly comprises: the ultravacuum system; Molecular beam, specimen holder and sample transfer system; Quadrupole mass spectrometer; The detection system on monocrystal thin films surface.Major advantage is: growth temperature is low, has very low growth velocity; Growth conditions can accurately be controlled, and in the molecular beam epitaxy device, is equipped with the molecular beam evaporation source, and the component of film and doping content can be adjusted rapidly with the variation of evaporation source.But the shortcoming of molecular beam epitaxy technique is: the equipment complexity, cost an arm and a leg, and will consume a large amount of liquid nitrogen during use, and crystalline growth velocity is very slow.
Summary of the invention
The technical problem to be solved in the present invention is: a kind of electron tubes type equipment for preparing nano material is provided, and this multi-source injects the vaporator rate that electron tubes type equipment can be controlled each source material respectively, finally improves the Composition Control precision of tube furnace growth material.
For solving the problems of the technologies described above, the present invention is achieved in that it comprises the vacuum chamber (2) of sealing, described vacuum chamber (2) is arranged in the body of heater (1), described vacuum chamber (2) is provided with the carrier gas (11) that is used for delivery source material steam and is used for carrier gas (12) with the source material vapor reaction, the interior airflow downstream of vacuum chamber (2) place is provided with substrate (7), and this vacuum chamber (2) is connected with at least one the source material vaporizer (16) that can control and regulate the source material vaporator rate.
Described source material vaporizer (16) comprises end cap (20), lead (21), sleeve (22), sealing material (25), evaporation cover (26), nichrome wire (27); One end of described sleeve (22) inserts in the described evaporation cover (26), the other end of sleeve (22) connects end cap (20), lead (21) passes end cap (20) and links to each other with the interior nichrome wire (27) of sleeve (22) and evaporation cover (26), is provided with circular open (28) on described evaporation cover (26).
Described source material vaporizer (16) is connected the end of vacuum chamber (2) along air flow line.
Described source material vaporizer (16) is connected with vacuum chamber (2) by sealing termination (3).
For in crystal growth, substrate is carried out former bit manipulation, the other end of described vacuum chamber (2) is provided with magnetic push rod (5).
Described magnetic is connected into vacuum chamber (2) with push rod (5) by sealing termination (3).
Described sealing termination (3) is connected with cooling water system (10).
Be provided with O RunddichtringO (9) between described sealing termination (3) and the vacuum chamber (2).
Described vacuum chamber (2) is connected with carrier gas system (11,12) along an end of air flow line.
Described vacuum chamber (2) is provided with thermopair (17).
The invention has the beneficial effects as follows:
The present invention is equipped with the source material vaporizer on tubular type equipment, control the vaporator rate of each source material respectively, finally improves the Composition Control precision of tube furnace growth material; On tube furnace, set up the magnetic force push rod, in crystal growth, can carry out former bit manipulation substrate.The present invention adopts Controlling Source component flux technique, can realize the functions such as former bit manipulation of accurate control, grade doping and the substrate of component; Total system is by computer control, so the accuracy of level of automation height, control accuracy height, data is strong; This equipment has also that equipment is simple, compact construction, easy and simple to handle, cost of use is low etc., production efficiency height, save energy advantage.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the structural representation of source material vaporizer 16 of the present invention.
Embodiment
As shown in Figure 1, the whole nano material process of growth of the present invention is carried out in vacuum chamber, in order to control the vaporator rate of each source material respectively, the final Composition Control precision that improves the tube furnace growth material is provided with the source material vaporizer 16 that at least one could control and regulate the source material vaporator rate at vacuum chamber 2 one ends.Described vacuum chamber 2 is arranged in the body of heater 1, is provided with heating member 8 in body of heater 1, and described body of heater 1 is connected with body of heater heating power supply 15, and described vacuum chamber 2 is provided with thermopair 17, is used to measure temperature in the stove.Owing to produce very high temperature during the source material evaporation, be connected with cooling water system 10 in described sealing termination 3.The airflow downstream place is provided with substrate 7 in vacuum chamber 2, is used to receive the nano material of growth; The two ends of vacuum chamber 2 are provided with O RunddichtringO 9 by 3 sealings of sealing termination between sealing termination 3 and the vacuum chamber 2, and vacuum chamber 2 also is connected with the vacuum system 6 that is used to bleed.For the source material that makes evaporation is transported on the substrate 7, described vacuum chamber 2 is connected with carrier gas system 11,12; For in crystal growth, substrate is carried out former bit manipulation, the other end of described vacuum chamber 2 is provided with magnetic push rod 5.
As shown in Figure 2, described source material vaporizer 16 comprises end cap 20, lead 21, sleeve 22, sealing material 25, evaporation cover 26, nichrome wire 27; One end of described sleeve 22 inserts in the described evaporation cover 26, and the other end of sleeve 22 connects end cap 20, and lead 21 passes end cap 20 and links to each other with the nichrome wire 27 that sleeve 22 and evaporation are overlapped in 26, is provided with circular open 28 at described evaporation cover 26.Nut 18 seal washers 19 are fixed on source material vaporizer 16 on the sealing termination 3 and with vacuum chamber 2 with nut 24, seal washer 23 and link to each other.
Embodiment 1: growth ZnCdO nano wire
Process of growth is as follows:
Whole nanometer village material process of growth is carried out in vacuum chamber (silica tube), before the material growth of nanometer village, earlier source material Zn, Cd metal-powder is placed on respectively in the source material vaporizer 16, and substrate 7 is placed on airflow downstream place in the silica tube.Start cooling water system 10, vacuum system 6, make the middle vacuum tightness of vacuum chamber (silica tube) be not less than 5 * 10
-3Pa.According to the thermograde of setting, start body of heater 1 heating power supply 15, the temperature at substrate 7 places is reached～500 ℃, and meet processing requirement, if be not suitable for, can use the position of 5 pairs of substrates 7 of magnetic force push rod to adjust.According to technology, open source material vaporizer power supply 14, control and regulate the vaporator rate of each constituent element respectively, component source is entered in the vacuum chamber 2 (silica tube) according to certain flow, each source material Heating temperature is controlled at respectively in the temperature range of fusing point+50 ℃, the temperature that is Zn (fusing point is 419 ℃) is about 469 ℃, and the temperature of Cd (fusing point is 321 ℃) is 371 ℃.Open carrier gas system 11 output carrier gas 1, carrier gas 1 is a high-purity argon gas, and purity is 99.9%, and (sccm is cm with 5～10sccm in carrier gas 1
3/ min) flow enters in the silica tube, arrives under the conveying of carrier gas 1 above the substrate.Open carrier gas system 12, output carrier gas 2 (reactant gases, as high-purity oxygen, purity is 99.99%) enters in the vacuum chamber 2 (silica tube) its flow with 2～5sccm, and the ZnCdO nano wire is in the silicon substrate crystallization under carrier gas 2 effects.Behind the growth ending, powered-down is opened vacuum chamber, takes out sample and can observe and test sample.
The present invention can grow as required ZnO and various zno-based compound semiconductor nano material are as semiconductor nano materials such as ZnO, ZnS, ZnMnO and ZnMgO.
The growth of the nano material of the present invention's growth and prior art growth has the following advantages:
1. composition precision height;
2. the crystal mass height of nano material, defective is few;
Embodiment 2: growth ZnMgO nano wire
Growth ZnMgO nano wire is similar substantially to the process of growth of growth ZnCdO nano wire, and the present embodiment vaporization temperature is that the temperature of Zn (fusing point is 419 ℃) is about 469 ℃, and the temperature of Mg (fusing point is: 649 ℃) is 699 ℃.
Claims (10)
1, a kind of electron tubes type equipment for preparing nano material, it comprises the vacuum chamber (2) of sealing, described vacuum chamber (2) is arranged in the body of heater (1), described vacuum chamber (2) is provided with the carrier gas (11) that is used for delivery source material steam and is used for carrier gas (12) with the source material vapor reaction, the interior airflow downstream of vacuum chamber (2) place is provided with substrate (7), it is characterized in that: this vacuum chamber (2) is connected with at least one the source material vaporizer (16) that can control and regulate the source material vaporator rate.
2, the electron tubes type equipment of preparation nano material according to claim 1 is characterized in that: described source material vaporizer (16) comprises end cap (20), lead (21), sleeve (22), sealing material (25), evaporation cover (26), nichrome wire (27); One end of described sleeve (22) inserts in the described evaporation cover (26), the other end of sleeve (22) connects end cap (20), lead (21) passes end cap (20) and links to each other with the interior nichrome wire (27) of sleeve (22) and evaporation cover (26), is provided with circular open (28) on described evaporation cover (26).
3, the electron tubes type equipment of preparation nano material according to claim 1 and 2 is characterized in that: described source material vaporizer (16) is connected the end of vacuum chamber (2) along air flow line.
4, the electron tubes type equipment of preparation nano material according to claim 3 is characterized in that: described source material vaporizer (16) is connected with vacuum chamber (2) by sealing termination (3).
5, according to the electron tubes type equipment of claim 1,2 or 4 described preparation nano materials, it is characterized in that: described vacuum chamber (2) is provided with magnetic force push rod (5).
6, the electron tubes type equipment of preparation nano material according to claim 3 is characterized in that: described vacuum chamber (2) is provided with magnetic force push rod (5).
7, the electron tubes type equipment of preparation nano material according to claim 5 is characterized in that: described magnetic is connected into vacuum chamber (2) with push rod (5) by sealing termination (3).
8, according to the electron tubes type equipment of claim 4 or 7 described preparation nano materials, it is characterized in that: described sealing termination (3) is connected with cooling water system (10).
9, the electron tubes type equipment of preparation nano material according to claim 8 is characterized in that: be provided with O RunddichtringO (9) between described sealing termination (3) and the vacuum chamber (2).
10, the electron tubes type equipment of preparation nano material according to claim 1 is characterized in that: described vacuum chamber (2) is provided with thermopair (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100178790A CN100535201C (en) | 2007-05-18 | 2007-05-18 | Electron tubes type equipment for preparing nano material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100178790A CN100535201C (en) | 2007-05-18 | 2007-05-18 | Electron tubes type equipment for preparing nano material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101063226A CN101063226A (en) | 2007-10-31 |
| CN100535201C true CN100535201C (en) | 2009-09-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100178790A Expired - Fee Related CN100535201C (en) | 2007-05-18 | 2007-05-18 | Electron tubes type equipment for preparing nano material |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107062903B (en) * | 2017-06-05 | 2019-09-06 | 中国科学院上海高等研究院 | Tube furnace temperature control system and tube furnace |
| CN110079786A (en) * | 2019-06-03 | 2019-08-02 | 杭州睿清环保科技有限公司 | It is used to prepare the device of the hot wall HF CVD of large-area diamond film |
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2007
- 2007-05-18 CN CNB2007100178790A patent/CN100535201C/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN101063226A (en) | 2007-10-31 |
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Granted publication date: 20090902 Termination date: 20100518 |