CN100533118C - Piezo-electric type harmonic oscillation cartridge quality sensing unit - Google Patents
Piezo-electric type harmonic oscillation cartridge quality sensing unit Download PDFInfo
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- CN100533118C CN100533118C CNB2007100085315A CN200710008531A CN100533118C CN 100533118 C CN100533118 C CN 100533118C CN B2007100085315 A CNB2007100085315 A CN B2007100085315A CN 200710008531 A CN200710008531 A CN 200710008531A CN 100533118 C CN100533118 C CN 100533118C
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Abstract
It is a piezoelectric resonant tube quality sensor, relating to a quality sensor, which provides a sensor to measure quality, which has a measurement tube, a reference tube and the base, the measurement tube and reference tube installed in the base, and the measurement tube including the vibration tube, cones ring, excitation and pick-up component, shield, wiring terminal, and vibration tube connecting with the cones ring, the shield connecting with the cones ring, the exciting and pick-up component located in the working wall surface of vibration tube, the electrodes of the excitation and pick-up component connecting with wiring terminal through wires, and the wiring terminal and cones ring remains insulation. The reference tube has vibration tube, cones ring, excitation and pick-up component, shield and wiring terminal, and vibration tube connecting with the cones ring, the shield connecting with the cones ring, the excitation and pick-up component located in the working wall surface of the vibration tube, the electrodes of the excitation and pick-up component connecting with the wiring terminal through wires, and wiring terminal and cones ring remaining insulation.
Description
Technical field
The present invention relates to a kind of mass sensor, particularly relate to a kind of harmonic oscillation cartridge quality sensing that adopts piezoelectric type.
Background technology
The measurement of quality is a kind of important work, existing many relevant product and reports.
NGK Insulators Ltd provides a kind of mass sensor in the application for a patent for invention of publication number for CN1243573, the at least a portion at least one sheet surface of a vane is provided with a piezoelectric element, a side of at least one sheet diaphragm links to each other with a side of said vane, make the sheet Surface Vertical of said diaphragm in the sheet surface of said vane, the another side of said vane links to each other with a sensor base and forms a resonance part by said vane, said diaphragm and said piezoelectric element.
NGK Insulators Ltd provides a kind of mass sensor in the application for a patent for invention of publication number for CN1250156, comprising: one connects flat board, has one or more otch and/or open region on it, and/or have thin-wall regions and thick wall area on it; A diaphragm, the side be connected flat board and be connected with each other; A sensing flat board, at least one lip-deep at least a portion at the sensing flat board provides piezoelectric element, with said diaphragm be connected the side of said sensing flat board on the vertical direction of the closure that is connected flat board and be connected dull and stereotyped phase the other side and be connected with each other with said; With a sensor substrate, link to each other with said at least a portion that is connected the side of dull and stereotyped and said sensing flat board; Said diaphragm wherein, said connection flat board, the dull and stereotyped and said piezoelectric element formation of said sensing resonance region.
NGK Insulators Ltd provides a kind of double-headed mass sensor in the application for a patent for invention of publication number for CN1253621, one first brace links to each other with a primary diaphragm at the side of correspondence, one second brace links to each other with a secondary diaphragm at the side of correspondence, at least link to each other with a sensor base plate on the part of said first brace and the side of said second brace with a resonance portion between said second brace along being connected across said first brace with the vertical direction of each the said brace and the closure of each said diaphragm, said resonance portion comprises said first brace, said second brace, said primary diaphragm, said secondary diaphragm, with one first vane, and be arranged on a major component at least one plane surface of said first vane.
Anhui Inst. of Optics and Fine Mechanics, Chinese Academy of Sciences provides a kind of mass sensor based on the elastic qualities system in the application for a patent for invention of publication number for CN1755361, the awl bottom of a hollow conical pipe is fixed on the framework, a filter membrane is fixed at the awl tip, and the neck both sides of its tapered tube are equipped with two blocks of magnet steel.
As everyone knows, the vibration cylinder sensor originates from Britain the earliest, is used for measuring fluid pressure and density.It is to utilize the eigentone of vibrating barrel to measure, and under the effect of exciting force, vibrating barrel is with the vibration of its eigentone, and when being changed by measuring pressure or density, the stress of vibrating barrel changes thereupon, and its resonant frequency also can change.Detecting element detects output with the vibration frequency of vibrating barrel.Yet there are no at present the report that relevant vibration cylinder sensor is used to measure quality both at home and abroad.
Summary of the invention
The object of the present invention is to provide a kind of sensor of measuring quality.
The present invention is provided with measuring cylinder, reference tube and base; measuring cylinder and reference tube are located on the base; piezoelectric element (referred to as measuring exciting and Vibration pickup), measuring and protecting cover, measurement binding post that measuring cylinder is provided with measuring vibrations tube, the measurement collar, measuring vibrations excitation and detects; the measuring vibrations tube is fixedly connected with measuring the collar, and the measuring and protecting cover is connected with the measurement collar.Measure exciting and Vibration pickup and be located on the measuring vibrations tube work wall surface, measure exciting and be connected with the measurement binding post by lead with the electrode of Vibration pickup, measure binding post and measuring unit environmental protection and hold insulation.
Reference tube is provided with reference to vibrating barrel, with reference to the collar, with reference to the piezoelectric element (referred to as reference exciting and Vibration pickup) of vibrational excitation and detection, with reference to protective cover and reference terminal; with reference to vibrating barrel be fixedly connected with reference to the collar, with reference to protective cover be connected with reference to the collar.Be located at reference on the vibrating barrel work wall surface with reference to exciting and Vibration pickup, with reference to the electrode of exciting and Vibration pickup by lead and reference terminal sub-connection, reference terminal with keep insulation with reference to the collar.
The measuring vibrations tube preferably is fixedly connected with Type of Welding with measuring the collar, and the measuring and protecting cover preferably is connected with thread forms with the measurement collar, prevents that the measuring vibrations tube is impaired because of external factor.Measure exciting and Vibration pickup and preferably fasten with glue on measuring vibrations tube work wall surface, measure exciting and be connected with the measurement binding post by lead with the soldering form with the electrode of Vibration pickup, hold insulation with epoxy resin binding post and measuring unit environmental protection.With reference to vibrating barrel with preferably be fixedly connected with Type of Welding with reference to the collar, with reference to protective cover with preferably be connected with thread forms with reference to the collar, prevent with reference to vibrating barrel impaired because of external factor.Preferably fasten with glue on reference vibrating barrel work wall surface with reference to exciting and Vibration pickup, with reference to the electrode of exciting and Vibration pickup with the soldering form by lead and reference terminal sub-connection, with the epoxy resin binding post with keep insulation with reference to the collar.
Can establish blow vent on the measuring vibrations tube, the measuring vibrations tube inner chamber is communicated with outside atmosphere through blow vent, can establish blow vent on the reference vibrating barrel, is communicated with outside atmosphere through blow vent with reference to the vibrating barrel inner chamber.
During use, adsorbed film or measured matter can be attached on the surface of measuring vibrations tube work wall by modes such as coating, plating, sputters, particular location can according to circumstances be attached to upper, middle and lower section or all surfaces of measuring vibrations tube work wall.The shape of adsorption film can be one or several ring-type, also can be one or several bulk.Whole measuring vibrations tube is fixed by screws on the base.
Measuring cylinder one side on base is established reference tube, its objective is in order to compensate the impact of the factors such as surrounding environment, improves certainty of measurement and anti-interference, forms the mass sensor of measuring with reference to two vibrating barrel structures, and reference tube is screwed on base.
In order to improve the resonant frequency of measuring cylinder, on measuring cylinder and reference tube, can remove blow vent, measuring cylinder and two vibrating barrel inner chambers of reference tube are evacuated.
When measuring, take off the protective cover of measuring cylinder and reference tube, adsorbed film or measured matter are attached directly on the outer surface or inner surface of measuring vibrations tube work wall.By detecting the resonant frequency signal of measuring vibrations tube, measure quality and the viscoelastic dynamic characteristics of material.
The present invention improves on the basis of known vibration cylinder pressure transducer.Piezo-electric type harmonic oscillation cartridge quality sensing unit still adopts cantilever mounted formula vibrating barrel, the adsorbed film of absorption measured matter is attached on the outer surface or inner surface of measuring vibrations tube work wall, perhaps measured matter is attached directly on the surface of measuring vibrations tube work wall.The element inorganic or high polymer piezoelectric material vibrates as measurement excited vibration and detection, stick on the stress maximum position of measuring vibrations tube, electrostrictive effect with piezoelectric makes the vibration of measuring vibrations tube, detects the frequency of measuring vibrations tube with the piezoelectric effect of piezoelectric.
When the quality of measurement of species, after adsorption film has adsorbed measured matter (or vibrating measured matter on the tube surface attachment), the resonance frequency of measuring vibrations tube changes, so can measure the quality size of adsorption film absorption by detecting the change of resonance frequency amount of measuring vibrations tube.
Because the resonant frequency of measuring vibrations tube except outside the Pass having with adsorbed film, also is subjected to the factor affecting such as surrounding medium, environment, so the present invention increased the impact that a reference tube is used for compensating the factors such as surrounding environment, improves certainty of measurement and anti-interference.The reference vibrating barrel surface of reference tube does not have adsorbed film, non-cohesive measured matter yet.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention 1.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is located at the synoptic diagram of measuring vibrations tube outer tube wall for adsorption film or measured matter.In Fig. 3, be followed successively by from left to right the whole of the bottom of middle part, measuring vibrations tube work wall of top, the measuring vibrations tube work wall of measuring vibrations tube work wall and measuring vibrations tube work wall.
Fig. 4 is located at the synoptic diagram of measuring vibrations tube inner tube wall for adsorption film or measured matter.In Fig. 4, be followed successively by from left to right the whole of the bottom of middle part, measuring vibrations tube work wall of top, the measuring vibrations tube work wall of measuring vibrations tube work wall and measuring vibrations tube work wall.
Embodiment
Embodiment 1
Shown in Fig. 1～4, the present invention is provided with measuring cylinder A, reference tube B and base 6, and measuring cylinder A and reference tube B are located on the base 6.Measuring cylinder A is made up of with Vibration pickup 5 and measurement binding post 7 measuring vibrations tube 2, the measurement collar 3, measuring and protecting cover 4, measurement exciting, and measuring vibrations tube 2 inner chambers are communicated with outside atmosphere through blow vent 8.Measuring vibrations tube 2 with measure the collar 3 and fixedly connected with Type of Welding, measure protective cover 4 and the measurement collar 3 and be connected with thread forms, prevent that the measuring vibrations tube is impaired because of external factor.Measuring exciting and Vibration pickup 5 fastens with glue on the work wall surface of measuring vibrations tube 2, to measure exciting with the soldering form by lead and be connected with measurement binding post 7 with the electrode of Vibration pickup 5, and keep insulating with epoxy resin binding post 7 and the measurement collar 3.Adsorbed film or measured matter 1 can be attached on the surface of measuring vibrations tube work wall by modes such as coating, plating, sputters, and particular location can according to circumstances be attached to upper, middle and lower section or all surfaces of measuring vibrations tube work wall.The shape of adsorption film can be one or several ring-type, also can be one or several bulk.Whole measuring vibrations tube 2 is fixed by screws on the base 6.
Reference tube B is provided with reference to vibrating barrel 10, with reference to the collar 11, with reference to the piezoelectric element 12 (referred to as exciting and Vibration pickup) of vibrational excitation and detection, with reference to protective cover 13 and reference terminal 14; with reference to establishing blow vent 15 on the vibrating barrel 10; be communicated with outside atmosphere through blow vent 15 with reference to vibrating barrel 10 inner chambers; with reference to vibrating barrel 10 be fixedly connected with reference to the collar 11, with reference to protective cover 13 be connected with reference to the collar 11.Be located at reference on the vibrating barrel 10 work wall surfaces with reference to exciting and Vibration pickup 12, be connected with reference terminal 14 by lead with the electrode of Vibration pickup 12 with reference to exciting, reference terminal 14 and insulate with reference to the collar 11 maintenances.
When measuring, take off the measuring and protecting cover 4 of measuring cylinder A and the reference protective cover 13 of reference tube B, adsorbed film or measured matter 1 are attached directly on the outer surface or inner surface of measuring vibrations tube work wall (referring to Fig. 3 and 4).By detecting the resonant frequency signal of measuring vibrations tube, measure quality and the viscoelastic dynamic characteristics of material.
Embodiment 2
Similar to Example 1, its difference is to be evacuated the corresponding blow vent 8 of the measuring cylinder A among Fig. 1 and the blow vent 15 of reference tube B of removing with the measuring vibrations tube with reference to two vibrating barrel inner chambers of vibrating barrel in order to improve the resonant frequency of measuring vibrations tube.
Claims (4)
1. piezo-electric type harmonic oscillation cartridge quality sensing unit, it is characterized in that being provided with measuring cylinder, reference tube and base, measuring cylinder and reference tube are located on the base, measuring cylinder is provided with the measuring vibrations tube, measure the collar, measure exciting and Vibration pickup, the measuring and protecting cover, measure binding post, the measuring vibrations tube is fixedly connected with the measurement collar, the measuring and protecting cover is connected with the measurement collar, measuring exciting and Vibration pickup is located on the measuring vibrations tube work wall surface, measure exciting and be connected with the measurement binding post by lead with the electrode of Vibration pickup, measure binding post and measuring unit environmental protection and hold insulation;
Reference tube is provided with reference to vibrating barrel, with reference to the collar, with reference to exciting and Vibration pickup, with reference to protective cover and reference terminal; with reference to vibrating barrel be fixedly connected with reference to the collar; with reference to protective cover be connected with reference to the collar; be located at reference on the vibrating barrel work wall surface with reference to exciting and Vibration pickup; with reference to the electrode of exciting and Vibration pickup by lead and reference terminal sub-connection, reference terminal with keep insulation with reference to the collar.
2. piezo-electric type harmonic oscillation cartridge quality sensing unit as claimed in claim 1 is characterized in that the measuring vibrations tube is fixedly connected with Type of Welding with the measurement collar; With reference to vibrating barrel be fixedly connected with Type of Welding with reference to the collar.
3. piezo-electric type harmonic oscillation cartridge quality sensing unit as claimed in claim 1 is characterized in that measuring protective cover and is connected with thread forms with the measurement collar; With reference to protective cover be connected with thread forms with reference to the collar.
4. piezo-electric type harmonic oscillation cartridge quality sensing unit as claimed in claim 1 is characterized in that establishing blow vent on the measuring vibrations tube, and the measuring vibrations tube inner chamber is communicated with outside atmosphere through blow vent; With reference to establishing blow vent on the vibrating barrel, be communicated with outside atmosphere through blow vent with reference to the vibrating barrel inner chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100085315A CN100533118C (en) | 2007-02-01 | 2007-02-01 | Piezo-electric type harmonic oscillation cartridge quality sensing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100085315A CN100533118C (en) | 2007-02-01 | 2007-02-01 | Piezo-electric type harmonic oscillation cartridge quality sensing unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101013082A CN101013082A (en) | 2007-08-08 |
| CN100533118C true CN100533118C (en) | 2009-08-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100085315A Expired - Fee Related CN100533118C (en) | 2007-02-01 | 2007-02-01 | Piezo-electric type harmonic oscillation cartridge quality sensing unit |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568239B (en) * | 2014-12-09 | 2017-11-21 | 太原航空仪表有限公司 | A kind of 9mm piezoelectric excitations small vibrating barrel pressure pickup |
| CN105424567A (en) * | 2015-11-26 | 2016-03-23 | 黑龙江科技大学 | Dust measurement device based on resonance theory |
| CN107643228B (en) * | 2017-08-31 | 2021-04-27 | 中国船舶重工集团公司第七一九研究所 | Preparation method of chip for measuring mercury vapor and use method of sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4815314A (en) * | 1987-11-06 | 1989-03-28 | The United States Of America As Represented By The Secretary Of The Air Force | Particulate mass measuring apparatus |
| CN2056249U (en) * | 1989-10-09 | 1990-04-18 | 王荫槐 | Vibration diaphragm density sensor |
| US5306644A (en) * | 1988-09-29 | 1994-04-26 | Hewlett-Packard Company | Mass sensor method for measuring analytes in a sample |
| US6467950B1 (en) * | 2001-07-26 | 2002-10-22 | The United States Of America As Represented By The Department Of Transportation | Device and method to measure mass loss rate of an electrically heated sample |
| CN1755361A (en) * | 2004-09-30 | 2006-04-05 | 中国科学院安徽光学精密机械研究所 | Mass sensor and measurement method for quality thereof based on the elastic qualities system |
-
2007
- 2007-02-01 CN CNB2007100085315A patent/CN100533118C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4815314A (en) * | 1987-11-06 | 1989-03-28 | The United States Of America As Represented By The Secretary Of The Air Force | Particulate mass measuring apparatus |
| US5306644A (en) * | 1988-09-29 | 1994-04-26 | Hewlett-Packard Company | Mass sensor method for measuring analytes in a sample |
| CN2056249U (en) * | 1989-10-09 | 1990-04-18 | 王荫槐 | Vibration diaphragm density sensor |
| US6467950B1 (en) * | 2001-07-26 | 2002-10-22 | The United States Of America As Represented By The Department Of Transportation | Device and method to measure mass loss rate of an electrically heated sample |
| CN1755361A (en) * | 2004-09-30 | 2006-04-05 | 中国科学院安徽光学精密机械研究所 | Mass sensor and measurement method for quality thereof based on the elastic qualities system |
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| CN101013082A (en) | 2007-08-08 |
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Granted publication date: 20090826 Termination date: 20120201 |